CN102569117A - Ion implantation beam line Faraday - Google Patents
Ion implantation beam line Faraday Download PDFInfo
- Publication number
- CN102569117A CN102569117A CN2010106219033A CN201010621903A CN102569117A CN 102569117 A CN102569117 A CN 102569117A CN 2010106219033 A CN2010106219033 A CN 2010106219033A CN 201010621903 A CN201010621903 A CN 201010621903A CN 102569117 A CN102569117 A CN 102569117A
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- China
- Prior art keywords
- cup
- beam line
- guide rod
- rod hole
- mounting flange
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
The invention discloses an ion implantation beam line Faraday, relating to an ion implanter and belonging to the field of semiconductor manufacturing. The ion implantation beam line Faraday structurally comprises an mounting flange (1), an insulated mounting plate (2), a combustion sensor (3), a cup beam-measuring bottom plate (4), a disassembly and assembly guide rod hole (5), a cup frame (6), a rotating shaft (7) and a cylinder (8), wherein the rotating shaft (7) is connected with the cylinder (8) to finish a rotation action, and the disassembly and assembly guide rod hole (5) is formed on the mounting flange (1); the disassembly and assembly guide rod hole (5) is mainly used for providing a protection device for disassembly and assembly of the device, namely the ion implantation beam line Faraday and preventing the device from being damaged in the disassembly and assembly process, and the insulated mounting plate (2) is arranged at the inner side of the mounting flange (1) and is connected with the cup frame; the insulated mounting plate (2) is arranged between the cup frame (6) and the mounting flange (1) and mainly plays an insulation role and a certain sealing effect; the cup beam-measuring bottom plate (4) is arranged at the left side of the cup frame (6), and the combustion sensor (3) is arranged at the central position in the cup frame (6); and the combustion sensor (3) is used for detecting beam current of a beam-measuring bottom plate (4).
Description
Technical field
The present invention is a kind of ion injected beam line faraday, and particularly semiconductor is made used ion implantor in the ion implantation technology, belongs to field of manufacturing semiconductor devices.
Background technology
Ion implantor is a requisite process equipment during the modern semiconductors integrated circuit is made.Semiconductor integrated circuit manufacturing process now to ion implantor require increasingly high.Not only whole aircraft reliability, line degree of purity, beam homogeneity, implant angle etc. are had higher requirement; And the ion energy scope of implanter, bundle shape of spot, beam transmission efficient etc. have also been proposed very high requirement, and to its technology and equipment require increasingly high.Particularly strict more to the requirement of implanter light path system.
The present invention is a kind of device that detects line, and cup is surveyed the bundle base plate can carry out 90 degree rotation adjusting, can regulate rotation according to demand line is passed through.The combustion sensor 5 that cup is surveyed on the bundle base plate 4 can detect line.
Summary of the invention
A kind of ion injected beam of patent of the present invention line faraday is the checkout gear of a line, can detect line and whether arrive bunch faraday and measure the line size of being drawn.
The present invention realizes through following technical approach:
A kind of ion injected beam line faraday mainly comprises: mounting flange (1), insulating mounting plate (2), combustion sensor (3), cup are surveyed bundle base plate (4), dismounting guide rod hole (5), cup frame (6), rotating shaft (7), cylinder (8).
Described rotating shaft (7) is accomplished spinning movement through being connected with cylinder.
Described dismounting guide rod hole (5) is on the mounting flange 1, and main effect is to make things convenient for the dismounting of device that the unlikely damage of protective device in disassembly process arranged.
Described insulating mounting plate (2) is installed in mounting flange (1) inboard and links to each other with the cup frame, is between a glass frame (6) and the mounting flange (1), mainly plays insulating effect and certain sealing effectiveness is arranged.
Described cup is surveyed the left side that bundle base plate (4) is installed in a glass frame (6).
Described combustion sensor (3) is in cup is surveyed bundle base plate (4) center cup frame (6), and main effect is to be used for detecting cup to survey bundle base plate (4) line.
The present invention has following remarkable advantage:
Mounting structure is stable, reliable operation, and repeatability is high, and detectability is strong.
Description of drawings
Accompanying drawing 1 is the sketch map of one embodiment of the present invention.
Embodiment:
Specific embodiment below in conjunction with accompanying drawing is done further introduction to the present invention, should be appreciated that, these descriptions all are illustrative, the invention is not restricted to this.Scope of the present invention is only limited the scope of accompanying claims.
With reference to figure 1, a kind of ion injected beam line faraday comprises: mounting flange (1), insulating mounting plate (2), combustion sensor (3), cup are surveyed bundle base plate (4), dismounting guide rod hole (5), cup frame (6), rotating shaft (7), cylinder (8).Described rotating shaft (7) is accomplished spinning movement through being connected with cylinder (8), and dismounting guide rod hole (5) is on the mounting flange (1); The main effect of described dismounting guide rod hole (5) is to make things convenient for the dismounting of device that the unlikely damage of protective device in disassembly process arranged, and insulating mounting version (2) is installed in mounting flange (1) inboard and links to each other with the cup frame; Said insulating mounting plate (2) is between a glass frame (6) and the mounting flange (1), mainly plays insulating effect and certain sealing effectiveness is arranged; Described cup is surveyed the left side that bundle base plate (4) is installed in a glass frame (6), its interior install combustion transducer of center cup frame (6) (3); Described combustion sensor (3) is used for detecting cup and surveys bundle base plate (4) line.
Bunch faraday is designed to revolve and turn 90 degrees switching construction, and cup is surveyed bundle base plate (4) by cup frame (6) and cup and formed employing high purity graphite, bottom design cup bottom hole detecting sensor (3).Rotating shaft (7) adopts and to vacuumize sealing, and the spinning movement that cup is surveyed bundle base plate (4) is driven by cylinder (8), and the bi-directional design travel switch that puts in place is surveyed bundle base plate (4) and rotated, and it is motionless that a cup frame (6) keeps.Whole and vacuum chamber insulate, and is used for line and detects.The bottom is designed for the guide rod hole (5) of being convenient to safeguard dismounting, and the advance ball cover is installed.Survey bundle base plate (6) and adopt water-cooled, externally water-cooled joint and compressed air joint adopt the self sealss quick connector, and sealing is adopted two cutting ferrules with vacuum adapter.
Specific embodiment of the present invention elaborates content of the present invention.As far as persons skilled in the art, any conspicuous change of under the prerequisite that does not deviate from spirit of the present invention, it being done all constitutes the infringement to patent of the present invention, with corresponding legal responsibilities.
Claims (4)
1. an ion injected beam line faraday is characterized in that: mounting flange (1), insulating mounting plate (2), combustion sensor (3), cup survey bundle base plate (4), dismounting guide rod hole (5), cup frame (6), rotating shaft (7), cylinder (8).
2. a kind of ion injected beam line faraday as claimed in claim 1 is characterized in that: rotating shaft (7) connects cup and surveys bundle base plate (4), and its spinning movement is driven by cylinder (8) and accomplishes.
3. a kind of ion injected beam line faraday as claimed in claim 1; It is characterized in that: dismounting guide rod hole (5) is on the mounting flange (1), and the main effect of described dismounting guide rod hole (5) is to make things convenient for the dismounting of device that the unlikely damage of protective device in disassembly process arranged.
4. a kind of ion injected beam line faraday as claimed in claim 1 is characterized in that: cup is surveyed bundle base plate (4) mounting center position cup frame (6) interior install combustion transducers (3), and main effect is to be used for detecting cup to survey bundle base plate (4) line.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010106219033A CN102569117A (en) | 2010-12-27 | 2010-12-27 | Ion implantation beam line Faraday |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010106219033A CN102569117A (en) | 2010-12-27 | 2010-12-27 | Ion implantation beam line Faraday |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102569117A true CN102569117A (en) | 2012-07-11 |
Family
ID=46414212
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010106219033A Pending CN102569117A (en) | 2010-12-27 | 2010-12-27 | Ion implantation beam line Faraday |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102569117A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111192805A (en) * | 2018-11-15 | 2020-05-22 | 北京中科信电子装备有限公司 | Pneumatic switching device of ion implanter |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63216254A (en) * | 1987-03-04 | 1988-09-08 | Seiko Instr & Electronics Ltd | Faraday cup for monitoring ion beam |
| JPH0448292A (en) * | 1990-06-18 | 1992-02-18 | Ulvac Japan Ltd | Ion beam characteristic measuring instrument |
| KR20030024165A (en) * | 2001-09-17 | 2003-03-26 | 삼성전자주식회사 | Ion Implanter With Rotatable Faraday-Cup |
| CN1647235A (en) * | 2002-04-10 | 2005-07-27 | 应用材料公司 | Multi-directional scanning of movable member and ion beam monitoring arrangement therefor |
| CN2796082Y (en) * | 2005-03-31 | 2006-07-12 | 北京中科信电子装备有限公司 | Faraday device for detecting bundle |
-
2010
- 2010-12-27 CN CN2010106219033A patent/CN102569117A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63216254A (en) * | 1987-03-04 | 1988-09-08 | Seiko Instr & Electronics Ltd | Faraday cup for monitoring ion beam |
| JPH0448292A (en) * | 1990-06-18 | 1992-02-18 | Ulvac Japan Ltd | Ion beam characteristic measuring instrument |
| KR20030024165A (en) * | 2001-09-17 | 2003-03-26 | 삼성전자주식회사 | Ion Implanter With Rotatable Faraday-Cup |
| CN1647235A (en) * | 2002-04-10 | 2005-07-27 | 应用材料公司 | Multi-directional scanning of movable member and ion beam monitoring arrangement therefor |
| CN2796082Y (en) * | 2005-03-31 | 2006-07-12 | 北京中科信电子装备有限公司 | Faraday device for detecting bundle |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111192805A (en) * | 2018-11-15 | 2020-05-22 | 北京中科信电子装备有限公司 | Pneumatic switching device of ion implanter |
| CN111192805B (en) * | 2018-11-15 | 2024-06-11 | 北京中科信电子装备有限公司 | Pneumatic switching device of ion implanter |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| DD01 | Delivery of document by public notice |
Addressee: Zhongkexin Electronic Equipment Co., Ltd., Beijing Document name: Notification that Application Deemed to be Withdrawn |
|
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20120711 |