CN102568984A - Multi-stage depressed collector adopting isotropic pyrographite and manufacturing method of multi-stage depressed collector - Google Patents
Multi-stage depressed collector adopting isotropic pyrographite and manufacturing method of multi-stage depressed collector Download PDFInfo
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- CN102568984A CN102568984A CN2010106065355A CN201010606535A CN102568984A CN 102568984 A CN102568984 A CN 102568984A CN 2010106065355 A CN2010106065355 A CN 2010106065355A CN 201010606535 A CN201010606535 A CN 201010606535A CN 102568984 A CN102568984 A CN 102568984A
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Abstract
The invention discloses a multi-stage depressed collector adopting isotropic pyrographite and a manufacturing method of the multi-stage depressed collector, relating to a vacuum electronic technology. The multi-stage depressed collector is applicable to a satellite travelling wave tube. As graphite materials have a lower secondary electron yield, the application of the graphite material to the multi-stage depressed collector is favorable for increasing recovery efficiency. Compared with the ordinary depressed graphite, the isotropic pyrographite has the advantages of compact structure, high strength, low gas content and the like, so that reliability of the multi-stage depressed collector can be ensured more easily. The manufacturing method provided by the invention comprises the following steps of: processing, surface metallization and welding of the isotropic pyrographite as well as manufacturing processes of the multi-stage depressed collector. According to the invention, as the characteristics of fine crystalline, compactness, high strength, low gas content and the like of the isotropic pyrographite are utilized, most of weaknesses of the ordinary depressed graphite and a nonisotropic pyrographite are avoided, and the characteristic of low secondary electron yield of the graphite materials can also be retained.
Description
Technical field
The present invention relates to the vacuum electronic technical field, is a kind of isotropism pyrolytic graphite multi-level depressurization collector and manufacturing approach, can be used for satellite travelling wave tube.
Background technology
Satellite travelling wave tube is widely used for payload technology such as communication, navigator fix, military mapping, microwave remote sensing, electronic reconnaissance, transfer of data as final stage power amplifier, is spaceborne core components and parts.
Use travelling wave tube as satellite, high efficiency is one of its core technology index.The efficient of travelling wave tube depends mainly on the organic efficiency of electronic efficiency and collector.After electronic efficiency reaches certain limit, be difficult to further improve, the raising of efficient at this moment depends primarily on the organic efficiency of collector again.External high efficiency travelling wave tube all adopts multi-level depressurization collector basically; Adopt the multi-level depressurization collector technology can the efficient of some frequency range travelling wave tube be brought up to more than 70%; The organic efficiency of collector can reach [list of references: Menninger W L, Benton R T, Choi M S more than 85%; Et al.70%EfficientKu-Band and C-Band TWTs for Satellite Downlinks; IEEE Transactionson Electron Devices, 2005,52 (5): 673-678].
The high efficiency multi-level depressurization collector can be realized from two aspects: one is from the electron optics design angle, to electron energy and distribution, flight path is calculated and simulate, for the collecting pole structure that designs high organic efficiency provides foundation; In addition on the one hand,, select for use the little material of two level electron emission coefficiencies, perhaps electrode surface is carried out technical finesse, improve organic efficiency as the collector electrode from material and technological angle.
Under the situation that structural design is confirmed, obtain higher organic efficiency, the collector electrode surface should have low secondary electron yield.Oxygen-free high conductivity type copper is most widely used multi-level depressurization collector electrode material; But the higher [list of references: Curren A N andJensen K A of its secondary electron yield; Secondary Electron Emission Characteristics ofIon-Textured Copper and High-Purity Isotropic Graphite Surfaces, NASA Technical Paper 2342 (1984); Ebihara B T and Ramins P, Design, 1B107155
Fabrication，and?Performance?of?Small，Graphite?DaprassedCollactors?With?200-W，CW，8-18GHz?Traveling-Wave?Tubes，NASATechnical?Paper?2693(1987)]。Adopt the ion beam process for modifying surface to make its surface that the alligatoring of micron or submicron-scale take place, can significantly reduce the secondary electron yield [list of references: Ebihara B T and Ramins P, Design on oxygen-free copper surface; Fabrication; AndPerformance of Small, Graphite Depressed Collactors With 200-W, CW; 8-18GHz Traveling-Wave Tubes, NASA Technical Paper 2693 (1987); Curren A N, Jensen K A and Roman R F, Secondary Elactron EmissionCharacteristics of Molybdenum-Masked, Ion-Textured OFHC Copper, NASA Technical Paper 2967 (1990)].But the ion beam surface modification needs special technological equipment, and process mechanism is complicated, and influencing factor is more, causes processing procedure control difficulty bigger.And, the processing of practical work piece is also needed the frock jig of special, effect also receives certain limitation.The instructions for use that can its reliability satisfy space travelling wave tube under the condition that works long hours remains in all queries.
Adopt the little graphite type material (isotropic graphite and pyrolytic graphite etc.) of secondary electron yield also can obtain high organic efficiency; Carry out the ion beam modification processing on this basis again and can obtain better experiment effect [list of references: Ramins P and Curren A N; Performance ofTextured Carbon on Copper Electrode Multistage Depressed Collactorswith Medium-Power Traveling Wave tubes, NASA Technical Paper2665 (1986)].But,, cause the insulation property of collector to be difficult to guarantee because the structure of common karbate impervious graphite material is generally relatively more loose, air content is high, intensity is lower, under the long-term bombardment of electron beam, is easy to generate the graphite micronic dust.Though and the preparation technology of anisotropy pyrolysis graphite is similar with the isotropism pyrolytic graphite, its short texture (bond strength is low between the layer structure, layer and layer, peel off easily and produce particle), air content be high, it is bigger to weld difficulty, is difficult to overall applicability.
Summary of the invention
The objective of the invention is to disclose a kind of isotropism pyrolytic graphite multi-level depressurization collector and manufacturing approach; With thin brilliant fine and close isotropism pyrolytic graphite is electrode material; Obtain multi-level depressurization collector through processing, metallization, assembling, welding, can be used for satellite travelling wave tube.This multi-level depressurization collector electrode; The problem that avoided common karbate impervious graphite and anisotropy pyrolysis graphite-structure to loosen, intensity is low, is easy to generate graphite dust; Kept the low secondary electron emission characteristic of graphite type material, for the high efficiency satellite travelling wave tube provides new technical support.
For achieving the above object, technical solution of the present invention is:
A kind of isotropism pyrolytic graphite multi-level depressurization collector comprises electrode, transition compensation becket, contact conductor, insulating porcelain piece, outer sleeve; It makes electrode with the isotropism pyrolyzing graphite material, on the transition compensation becket behind the affixed contact conductor, again with isotropism pyrolytic graphite electrode and transition compensate becket, insulating porcelain piece, outer sleeve is concentric is nested with the affixed single-stage buck collector that forms;
Stretch out in the fairlead of contact conductor by insulating porcelain piece;
Assembling a plurality of single-stage buck collectors affixed is multi-level depressurization collector.
Described multi-level depressurization collector, on its said isotropism pyrolytic graphite electrode, welding region is covered with the titanium that thickness is 5-15 μ m (Ti) layer.
Described multi-level depressurization collector, its said transition compensation becket, for oxygenless copper material processes, its thickness depends on the size of collector external diameter, between 0.5-2mm; Contact conductor is nickel wire.
Described multi-level depressurization collector, its said insulating porcelain piece is 95%, 99% aluminium oxide (Al
2O
3) or beryllium oxide (BeO) pottery, the solder side of insulating porcelain piece is handled through metallization process, and is coated with nickel (Ni) layer.
A kind of manufacturing approach of described multi-level depressurization collector, it comprises:
A) prepare isotropism pyrolytic graphite electrode, transition compensation becket by designing requirement;
B) isotropism pyrolytic graphite electrode is done metalized;
C) contact conductor is welded on the transition compensation becket;
D) to insulating porcelain piece metallization, nickel plating and annealing in hydrogen atmosphere;
E) one pole assembling, welding get one pole collector finished product;
F) a plurality of one pole collector finished products are carried out overall package, welding, get multipole collector finished product.
Described manufacturing approach, its said A) step, comprise step:
A1 adopts high temperature (more than 2000 ℃) chemical vapor deposition (CVD) method to prepare the isotropism pyrolytic graphite;
A2 puts into the mould punch forming with the isotropism pyrolytic graphite that a1 goes on foot gained;
B) in the step, comprise step:
B1 covers up non-welding region on the electrode with the stainless steel block card;
B2 carries out vacuum ionic titanizing (Ti) to the welding region on the electrode.
Described manufacturing approach, its said C) step, be in the hydrogen stove, compensate on the becket, in transition with the nickel wire soldering of solder wire as the lead-in wire of electrode with φ 0.3-0.6mm; 10-40 ℃/minute of heating-cooling speed, welding temperature are higher than 10-20 ℃ of indication solder fusing temperature, are incubated 1-5 minute.
Described manufacturing approach, its said E) step, comprise step:
1) according to the requirement of one pole package assembly, isotropic graphite electrode, transition compensation becket, insulating porcelain piece, outer sleeve are assemblied on the stainless steel mould of handling through melanism successively, lay φ 0.4-0.6mm solder wire in welded joints;
2) put into vacuum furnace again, welding temperature is higher than 20-40 ℃ of indication solder fusing temperature, and 10-20 ℃/minute of heating-cooling speed is incubated 1-5 minute, gets one pole collector finished product.
Described manufacturing approach, its said F) step, comprise step:
A) according to the requirement of multi-level depressurization collector integral assembling structure, in mould, with a plurality of through E) one pole collector that step welding is good is assembled into multi-level depressurization collector; B) put into vacuum furnace again and weld, welding temperature is higher than 10-20 ℃ of indication solder fusing temperature, and 10-20 ℃/minute of heating-cooling speed is incubated 1-5 minute, gets the multi-level depressurization collector finished product; C) detect, confirm qualified product.
Described manufacturing approach, its said brazing solder silk is pure Ag, Au-Cu or Ag-Cu eutectic solder; The welding vacuum atmosphere, vacuum pressure during for solder fusing＜3 * 10
-3Pa.
A kind of isotropism pyrolytic graphite multi-level depressurization collector of the present invention and manufacturing approach; Its isotropism pyrolytic graphite multi-level depressurization collector can be used for satellite travelling wave tube, can be under the condition that does not reduce other performance index the gross efficiency of satellite travelling wave tube be improved several percentage points.
Description of drawings
Fig. 1 is the used isotropism pyrolytic graphite fracture SEM photo of the present invention;
Fig. 2 is an isotropism pyrolytic graphite multi-level depressurization collector structural representation of the present invention.
Label declaration in the diagram: 1. isotropism pyrolytic graphite electrode; 2. transition compensates becket (oxygen-free copper); 3. contact conductor; 4. insulating porcelain piece; 5. outer sleeve.
Embodiment
Isotropism pyrolytic graphite multi-level depressurization collector of the present invention and manufacturing approach; Be to be electrode material with the isotropism pyrolytic graphite; Adopt ion-plating technique that the need welding region is carried out metalized; Assemble, weld through transition compensation becket and the metallized insulating porcelain piece of process then, obtain isotropism pyrolytic graphite multi-level depressurization collector assembly.
The making of the isotropism pyrolytic graphite electrode in the isotropism pyrolytic graphite multi-level depressurization collector of the present invention:
1. adopt high temperature (more than 2000 ℃) chemical vapor deposition (CVD) method to prepare the isotropism pyrolytic graphite: have fine and close aplitic texture (as shown in Figure 1), arrangement trend that graphite grains is omnidirectional shows as the isotropism characteristic;
2. with the isotropism pyrolytic graphite of 1 step gained, put into the mould punch forming;
3. adopt the metallization of ion-plating technique to the metallized zone realization of needs pyrolytic graphite, metallization thickness (being titanium (Ti) layer thickness) is 5-15 μ m;
4. do not need metallized zone to block with stainless steel retaining tool.
The manufacturing approach of isotropism pyrolytic graphite multi-level depressurization collector of the present invention comprises step:
1. wire bonds: in the hydrogen stove; Nickel wire (contact conductor 3) soldering of φ 0.3-0.6mm is compensated on the becket 2 in transition, as the lead-in wire of electrode, 10-40 ℃/minute of heating-cooling speed; Welding temperature is higher than 10-20 ℃ of indication solder fusing temperature, is incubated 1-5 minute.
2. assembling and welding:
(1) one pole assembling and welding (referring to shown in Figure 2):
A) according to shown in Figure 2, isotropic graphite electrode 1, transition compensation becket 2, insulating porcelain piece 4, outer sleeve 5 are assemblied on the stainless steel mould of handling through melanism successively, lay φ 0.4-0.6mm solder wire in welded joints;
B) atmosphere is vacuum (vacuum pressure during solder fusing＜3 * 10
-3Pa), 10-20 ℃/minute of heating-cooling speed, welding temperature are higher than 20-40 ℃ of indication solder fusing temperature, are incubated 1-5 minute, get one pole collector finished product.
(2) overall package, welding:, in mould, after the good one pole collector of step (1) welding is assembled into multi-level depressurization collector, puts into vacuum furnace and weld with a plurality of according to the requirement of multi-level depressurization collector integral assembling structure.Vacuum pressure＜3 * 10
-3Pa, 10-20 ℃/minute of heating-cooling speed, welding temperature are higher than 10-20 ℃ of indication solder fusing temperature, are incubated 1-5 minute, get the multi-level depressurization collector finished product.
Multi-level depressurization collector electrode of the present invention has utilized the characteristic of the low secondary of graphite type material; The problem that avoided again simultaneously that common karbate impervious graphite and anisotropy pyrolysis graphite-structure loosen, intensity is low, is easy to generate graphite dust is for the development of high efficiency satellite travelling wave tube provides new technical support.
Embodiment:
1. process isotropism pyrolytic graphite electrode 1 (level Four) by the design drawing requirement, external diameter unified for Φ 32mm (tolerance :-0.06～-0.02mm).
2. adopt the processing of 1Cr18Ni9Ti stainless steel to block jig, to block the zone (with transition compensation becket 2 welding regions) that does not need ion plating Ti.
3. will keep off tool and be contained on each isotropism pyrolytic graphite electrode 1, and carry out ion plating Ti and handle, metallization layer thickness is controlled at 8-10 μ m.
4. the size of transition compensation becket 2: external diameter 35mm (according to cooperating requirement, tolerance confirms as-0.04～-0.02mm), internal diameter 32mm (margin of tolerance confirms as+0.02～+ 0.04mm).
5. insulating porcelain piece 4 is selected 95%Al for use
2O
3Pottery, external diameter 51mm (metallization back tolerance confirms as-0.05～-0.02mm), internal diameter 35mm (metallization back tolerance is confirmed as :+0.02～+ 0.05mm), the metallization of welding region high temperature Mo-Mn method, nickel plating, annealing in hydrogen atmosphere are enough subsequent use.
6. outer sleeve 5 is formed by the materials processing of no magnetic Monel, wall thickness 0.8mm, internal diameter be 51mm (tolerance confirms as+0.02～+ 0.04mm).
7. erection welding
(1) lead-in wire 3 welding: with the Au80Cu20 solder wire of two circle φ 0.3 nickel wire of φ 0.6mm is welded in transition and compensates on the fairlead of becket 2.Weld in the hydrogen stove, the heating-cooling rate controlled is not more than 35 ℃/minute, welding temperature 900-930 ℃, is incubated 1.5 minutes.
(2) welding of electrode 1-transition compensation becket 2-insulating porcelain piece 4-outer sleeve 5: electrode 1 and outer sleeve 5 are positioned with mould; On each weld seam, settle a circle φ 0.6mm Ag-Cu eutectic solder silk; Weld in the vacuum furnace, the interior vacuum pressure of stove remains on 2.5 * 10 during solder fusing
-3Below the Pa.15-20 ℃/minute of heating-cooling speed, is incubated 1.5 minutes by welding temperature 800-820 ℃.
(3) overall package welding: each utmost point that requires to weld according to package assembly assembles; Lead-in wire 3 passes from the fairlead of insulation porcelain ring 4; On the cylindrical circumference of two electrode jacket tubes 5, load onto a circle φ 0.6mm Ag-Cu eutectic solder silk, weld 15-20 ℃/minute of heating-cooling speed in the vacuum furnace; Welding temperature 790-810 ℃, be incubated 1.5 minutes.
Multi-level depressurization collector structural reliability and the insulation property made according to the method described above all meet design requirement.
Claims (10)
1. an isotropism pyrolytic graphite multi-level depressurization collector comprises electrode, transition compensation becket, contact conductor, insulating porcelain piece, outer sleeve; It is characterized in that; Make electrode with the isotropism pyrolyzing graphite material; On the transition compensation becket behind the affixed contact conductor, again with isotropism pyrolytic graphite electrode and transition compensate becket, insulating porcelain piece, outer sleeve is concentric is nested with the affixed single-stage buck collector that forms;
Stretch out in the fairlead of contact conductor by insulating porcelain piece;
Assembling a plurality of single-stage buck collectors affixed is multi-level depressurization collector.
2. multi-level depressurization collector as claimed in claim 1 is characterized in that, on the said isotropism pyrolytic graphite electrode, welding region is covered with the titanium layer that thickness is 5-15 μ m.
3. multi-level depressurization collector as claimed in claim 1 is characterized in that, said transition compensation becket, and for oxygenless copper material processes, its thickness depends on the size of collector external diameter, between 0.5-2mm; Contact conductor is nickel wire.
4. multi-level depressurization collector as claimed in claim 1 is characterized in that, said insulating porcelain piece is 95%, 99% aluminium oxide or beryllium oxide ceramics, and the solder side of insulating porcelain piece is handled through metallization process, and is coated with nickel dam.
5. the manufacturing approach of a multi-level depressurization collector as claimed in claim 1 is characterized in that, comprising:
A) prepare isotropism pyrolytic graphite electrode, transition compensation becket by designing requirement;
B) isotropism pyrolytic graphite electrode is done metalized;
C) contact conductor is welded on the transition compensation becket;
D) to insulating porcelain piece metallization, nickel plating and annealing in hydrogen atmosphere;
E) one pole assembling, welding get one pole collector finished product;
F) a plurality of one pole collector finished products are carried out overall package, welding, get multipole collector finished product.
6. manufacturing approach as claimed in claim 5 is characterized in that, said A), comprise step:
A1 adopts the high temperature chemical vapor deposition method to prepare the isotropism pyrolytic graphite;
A2 puts into the mould punch forming with the isotropism pyrolytic graphite that a1 goes on foot gained;
B) in the step, comprise step:
B1 covers up non-welding region on the electrode with the stainless steel block card;
B2 carries out the vacuum ionic titanizing to the welding region on the electrode.
7. manufacturing approach as claimed in claim 5 is characterized in that, said C) step, be in the hydrogen stove, compensate on the becket, in transition with the nickel wire soldering of solder wire as the lead-in wire of electrode with φ 0.3-0.6mm; 10-40 ℃/minute of heating-cooling speed, welding temperature are higher than 10-20 ℃ of indication solder fusing temperature, are incubated 1-5 minute.
8. manufacturing approach as claimed in claim 5 is characterized in that, said E) step, comprise step:
1) according to the requirement of one pole package assembly, isotropic graphite electrode, transition compensation becket, insulating porcelain piece, outer sleeve are assemblied on the stainless steel mould of handling through melanism successively, lay φ 0.4-0.6mm solder wire in welded joints;
2) put into vacuum furnace again, welding temperature is higher than 20-40 ℃ of indication solder fusing temperature, and 10-20 ℃/minute of heating-cooling speed is incubated 1-5 minute, gets one pole collector finished product.
9. manufacturing approach as claimed in claim 5 is characterized in that, said F) step, comprise step:
A) according to the requirement of multi-level depressurization collector integral assembling structure, in mould, with a plurality of through E) one pole collector that step welding is good is assembled into multi-level depressurization collector; B) put into vacuum furnace again and weld, welding temperature is higher than 10-20 ℃ of indication solder fusing temperature, and 10-20 ℃/minute of heating-cooling speed is incubated 1-5 minute, gets the multi-level depressurization collector finished product; C) detect, confirm qualified product.
10. like claim 6,7,8 or 9 described manufacturing approaches, it is characterized in that said brazing solder silk is pure Ag, Au-Cu or Ag-Cu eutectic solder; The welding vacuum atmosphere, vacuum pressure during for solder fusing＜3 * 10
-3Pa; High temperature is＞2000 ℃.
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| Application Number | Priority Date | Filing Date | Title |
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| CN2010106065355A CN102568984A (en) | 2010-12-27 | 2010-12-27 | Multi-stage depressed collector adopting isotropic pyrographite and manufacturing method of multi-stage depressed collector |
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|---|---|---|---|
| CN2010106065355A CN102568984A (en) | 2010-12-27 | 2010-12-27 | Multi-stage depressed collector adopting isotropic pyrographite and manufacturing method of multi-stage depressed collector |
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| CN102568984A true CN102568984A (en) | 2012-07-11 |
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4527092A (en) * | 1983-09-30 | 1985-07-02 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Multistage spent particle collector and a method for making same |
| CN101752168A (en) * | 2008-12-03 | 2010-06-23 | 中国科学院电子学研究所 | Double-layer electrode for multi-level depressed collector and preparation process thereof |
-
2010
- 2010-12-27 CN CN2010106065355A patent/CN102568984A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4527092A (en) * | 1983-09-30 | 1985-07-02 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Multistage spent particle collector and a method for making same |
| CN101752168A (en) * | 2008-12-03 | 2010-06-23 | 中国科学院电子学研究所 | Double-layer electrode for multi-level depressed collector and preparation process thereof |
Non-Patent Citations (1)
| Title |
|---|
| 马天军 等: "各向同性热解石墨表面金属化及AgCu钎料的润湿性能", 《微波学报》 * |
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Application publication date: 20120711 |