CN102565980A - Optical element fixing device and installation method thereof - Google Patents
Optical element fixing device and installation method thereof Download PDFInfo
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- CN102565980A CN102565980A CN201010618427XA CN201010618427A CN102565980A CN 102565980 A CN102565980 A CN 102565980A CN 201010618427X A CN201010618427X A CN 201010618427XA CN 201010618427 A CN201010618427 A CN 201010618427A CN 102565980 A CN102565980 A CN 102565980A
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- optical element
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- holding device
- microscope base
- element holding
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Abstract
The invention provides an optical element fixing device and an installation method thereof. The optical element fixing device comprises a microscope base, flexible elements and ball pins, wherein at least three grooves are formed at equal intervals on the inner wall of the microscope base; the flexible elements are arranged in the grooves in a matching way; and the ball pins are used for connecting the flexible elements with the microscope base. The radial force of the fixing device is controlled by controlling the friction coefficient and transition matching way between the ball pins and corresponding conical sleeves as well as the friction coefficient and transition matching way between a cylindrical pin and a corresponding conical sleeve, so that the influences caused by the thermal deformation and assembly stress deformation of an optical element or optical assembly on the surface type of the optical element are controlled; a flexible element multipoint gluing support structure is adopted, so that the influence of gravity on the surface type is reduced, and release of the thermal stress of an annular optical element in a circumferential direction is realized simultaneously by using the low rigidity characteristics of the flexible elements in a direction which is vertical to the optical axis; and the fixing device provided by the invention has the advantages of simple structure, high stability, convenience for installing, accurate positioning, firm and reliable fixing and wide application range.
Description
Technical field
The present invention relates to optical field, relate in particular to a kind of optical element holding device and installation method thereof.
Background technology
Improve constantly along with what photoetching resolution required; Designing requirement to the projection imaging object lens of exposed portion in the advanced photolithographic equipment also improves day by day; High resolution just requires camera lens in design, to improve the requirement to aberration and system stability; This just not only has higher requirement to design of Optical System itself, and photomechanical structural design difficulty is also increased simultaneously greatly.In photomechanical structural design, through the unstressed fixing or low stress technique for fixing of optical element, the variation that can solve high-resolution lens face type effectively, thereby the control of realization aberration.For example, in U.S. Pat 7085080, the mode through gluing between lens and the microscope base realizes fixing, and relies on three groups of flexible members on the microscope base to reach lens in radial translation and the stress relief that horizontally rotates; In U.S. Pat 20060056083, utilize spring leaf and ball pin fixing in the rims of the lens groove, reach the purpose of disappear gravity deformation and axial location.In patent US20030179470, utilize two-sided spring to support, the influence of the gravity deformation of realizing disappearing.
Above-mentioned three patents in the lithographic objective field, have good representativeness, still, are realizing there is certain limitation on low stress or the unstressed technique for fixing.Patent US7085080, the layout of supported at three point is inapplicable at the camera lens that high-precision lenses face type requires, and simultaneously, on microscope base, directly is processed into this characteristic, also will control other form and position tolerance, and manufacturing has a big risk; Patent US20060056083 solve the problem that the Article patent is occurred, but its manufacturing shape to lens has certain specific (special) requirements, and is little on the scope of application, and the consistance that will control a plurality of flexible members difficulty relatively; Though patent US20030179470 has overcome the defective of above-mentioned two patents, it can not well carry out axial location in stress-removal.
Therefore, provide a kind of simple in structure, easy for installation, location accurately, the flexible stationary installation of low stress of the high-precision optical element of reliable, applied widely, the good stability of fixation is very necessary.
Summary of the invention
The object of the present invention is to provide a kind of optical element holding device and installation method thereof, in order to solve the existing optical element holding device deficiency that on some direction, eliminates stress, structural stability is poor, problems such as manufacturability and assembling capacity deficiency.
For addressing the above problem, the present invention proposes a kind of optical element holding device, comprising:
Microscope base, for mating the hollow-core construction of said optical element, said microscope base madial wall is uniformly-spaced to be provided with at least three grooves, and the corresponding microscope base sidewall in said groove middle part is provided with through hole;
Flexible member, coupling is installed in the said groove, comprises end support part and the switching supporting base that is connected in end support part two ends, and said end support part middle part is provided with perforate;
Said optical element holding device also comprises the ball pin, is installed in the perforate of through hole and said end support part of said microscope base, and connecting said flexible member and microscope base, said ball pin outside surface contacts with the first friction factor rete in being arranged on said perforate.
Further, said optical element holding device also comprises straight pin, connects said end support part and switching supporting base, and said straight pin one end outside surface contacts with the second friction factor rete on being arranged on the end support part.
Further, the friction factor of the said first friction factor rete and the second friction factor rete is all less than 0.1.
Further, said perforate is taper, in the said perforate step surface is arranged, the both sides of said perforate be provided with threaded hole and through the screw of packing into said flexible member of auxiliary fixing and microscope base.
Further, the perforate taper sheath is housed in the said perforate, said perforate taper sheath is the misclosure structure; Outside surface has groove; The endoporus of said perforate taper sheath is a cylindrical hole, and with said ball pin transition fit, and the said first friction factor rete is plated on the said perforate taper sheath inner hole wall.
Further, said end support part two ends have and reverse bellmouth of said perforate and the additional threaded bores reverse with said threaded hole.
Further; In the said bellmouth step surface is arranged; And the bellmouth taper sheath is installed, and said bellmouth taper sheath is the misclosure structure, it is cylindrical hole that outside surface has the endoporus of the said bellmouth taper sheath of second groove; And the said second friction factor rete is plated on the inner hole wall of bellmouth taper sheath.
Further, have the pin-and-hole of the said end support part of coupling two ends bellmouth on the said switching supporting base middle wall.
Further, the taper sheath of said straight pin and said pin-and-hole and bellmouth carries out transition fit, and the screw of in the additional threaded bores of said bellmouth both sides, packing into, connects said end support part and switching supporting base.
Further, said switching supporting base adopts resilient material to make.
Further, have groove on the said switching supporting base inside surface, in the said groove hole for injecting glue is arranged.
Further, said ball pin one end be cylindrical screw in order to connect the through hole of said microscope base, an end is a bulb, the middle part is the shaft shoulder.
Further, the middle part of said end support part is a halfpace, and said halfpace central authorities are provided with said perforate.
Further, said microscope base is provided with mounting hole, and it is external to be used for said microscope base.
According to another side of the present invention, a kind of installation method of using one of above-mentioned optical element holding device is provided, comprising:
Said switching supporting seat is installed to said end support part two ends to accomplish the assembling of said flexible member;
Said flexible member is installed in the groove of said microscope base;
Said optical element is positioned in the said microscope base, and the position of adjustment optical element reaches matching requirements;
Through said hole for injecting glue injecting glue, and colloid is solidified to accomplish installation fully.
Compared with prior art; The present invention is through friction factor and transition fit mode between control ball pin and the corresponding taper sheath; Friction factor between straight pin and the corresponding taper sheath and transition fit mode; Thereby control said stationary installation radial force, reach control optical element or lighting apparatus component because thermal deformation and erection stress are out of shape the face type influence to optical element; Through adopting the glued supporting construction of flexible member multiple spot, reach the influence that reduces gravity opposite type, simultaneously, utilize flexible member at the axial low stiffness characteristics of vertical light, realize the release of the thermal stress of ring optical element circumferencial direction; The optical element non-working surface glueds joint among the present invention, and the optical element shape there is not specific (special) requirements, and is applied widely; Fixture structure of the present invention is simple, and eigenfrequency is high, and good stability is easy for installation, and the location is accurate, and fixation is reliable.
Description of drawings
Fig. 1 is the optical element holding device profile diagram of the specific embodiment of the invention;
Fig. 2 is the optical element holding device cut-open view of the specific embodiment of the invention;
Fig. 3 is the microscope base synoptic diagram of the optical element holding device of the specific embodiment of the invention;
Fig. 4 is flexible member profile diagram, cut-open view and the taper sheath structural representation of the specific embodiment of the invention;
Fig. 5 is the end support part structural representation of the specific embodiment of the invention;
Fig. 6 is the switching supporting base structural representation of the specific embodiment of the invention.
Embodiment
Below in conjunction with accompanying drawing and specific embodiment optical element holding device and installation method thereof that the present invention proposes are done further explain.What need explanation is, accompanying drawing all adopts the form of simplifying very much, only is used for conveniently, the purpose of the aid illustration embodiment of the invention lucidly.
As illustrated in fig. 1 and 2, the present invention proposes a kind of optical element holding device, comprising: microscope base 10; Flexible member 20, ball pin 50, wherein microscope base 10 is the hollow-core construction of the said optical element 30 of coupling; Ball pin 50 connects microscope base 10 and flexible member 20; One end is a cylindrical screw, and an end is that bulb connects flexible member 20, and the middle part is the shaft shoulder.
See also Fig. 3; In the present embodiment; Microscope base 10 is a circular ring structure, and the annulus madial wall is uniformly-spaced to be provided with three grooves 103, and said groove 103 middle parts are provided with cylindrical hole 102 in order to the cylindrical screw end of ball pin 50 to be installed; The bottom surface of microscope base 10 also is provided with the mounting hole 101 of equidistant distribution, is used to connect optical element 30 and other devices (like lens barrel etc.).Among other embodiment, groove 103 can be more than three.
See also Fig. 2 and Fig. 3, flexible member 20 couplings are installed in the said groove 103.
See also Fig. 4 to Fig. 6, flexible member 20 comprises end support part 21 and the switching supporting base 22 that is connected in end support part two ends 21,
In the present embodiment, end support part 21 all is one section annulus with switching supporting base 22, and encircles radius in the switching supporting base 22 less than ring radius in the end support member 21.Said end support part 21 middle parts are halfpace; Halfpace central authorities are provided with perforate 211, and said perforate 211 is taper, and there is step surface inside; The endoporus of can packing into is the perforate taper sheath 24 of cylindrical hole, both sides be provided with threaded hole 210 and through the screw 26 of packing into said flexible member 20 of auxiliary fixing and microscope base; Said end support part 21 two ends have bellmouth 213 and the additional threaded bores 212 reverse respectively with threaded hole 210 with said perforate 211, in the said bellmouth 213 step surface are arranged, and the endoporus of can packing into is the bellmouth taper sheath 23 of cylindrical hole; Said switching supporting base 22 adopts resilient material to make; Have the cylindrical pin-and-hole 221 of the said end support part 21 two ends bellmouths 213 of coupling on the middle wall; There is " T " pin sidewall 224 at said switching supporting base 22 two ends in order to realize that flexible member 20 has flexible in the horizontal direction; Easily deformable, but big rigidity had in the axial direction, not yielding.Shown in have groove 222 in order to hold glue on the footing inside surface of " T " pin sidewall 224, hole for injecting glue 223 is arranged in the groove 222.Wherein, Said perforate taper sheath 24 is the misclosure structure; Endoporus 242 is a cylindrical hole, and outside surface has the plating first friction factor rete on the inner hole wall of groove 241 (in order to increase flexibility) and step surface 243 (in order to mounting screw 26) and endoporus 242, and ball pin 50 carries out transition fit with perforate taper sheath 24; Contact with the first friction factor rete, connect flexible member 20 and microscope base 10.Said bellmouth taper sheath 23 and said perforate taper sheath 24 structural similarities; Length is than said perforate taper sheath 24 weak points; Be similarly the misclosure structure; Endoporus is a cylindrical hole, and outside surface has the plating second friction factor rete on second groove (in order to increase flexibility) and step surface (in order to mounting screw 27) and the inner hole wall, and straight pin 25 bellmouth taper sheaths 23 carry out transition fit with pin-and-hole 221; Straight pin 25 1 end outside surfaces contact with the second friction factor rete, connect end support part 21 and switching supporting base 22.The friction factor of the first friction factor rete and the second friction factor rete is lower friction factor all less than 0.1 relatively.
According to another side of the present invention, a kind of installation method of using above-mentioned optical element holding device is provided, comprising:
S1, the switching supporting seat that will have hole for injecting glue is installed to end support part two ends to accomplish the assembling of flexible member.
Referring to Fig. 4 to 6; In the present embodiment; Said end support part 21 two ends respectively through bellmouth 213 that bellmouth taper sheath 23 is packed in; Straight pin 25 is packed in the pin-and-hole 221 of endoporus and switching supporting seat 22 of bellmouth taper sheath 23, and in additional threaded bores 212, pack into screw 27 and locking are to accomplish the assembling of flexible member 20.
S2 is installed to said flexible member in the groove of said microscope base successively.
Referring to Fig. 2 to Fig. 4; In the present embodiment; Earlier the cylindrical screw with ball pin 50 is installed in the cylindrical hole 102 of microscope base 10, perforate taper sheath 24 is packed in the perforate 211 again, and ball pin 50 remainders are installed in the perforate taper sheath 24; The screw 26 of in threaded hole 212, packing into is also locked, and finally successively a plurality of flexible members is installed in the groove of microscope base.
S3 is positioned over said optical element in the said microscope base, and the position of adjustment optical element reaches matching requirements.
Referring to Fig. 2, in the present embodiment, lens 30 are installed in the ring that flexible member 20 and microscope base 10 enclosed; Through the degree of depth of control ball pin 50 in perforate taper sheath 24; Control the consistance of a plurality of ball pins, also through the friction factor between control ball pin 50 and the perforate taper sheath 24, straight pin 25 and to the friction factor between the bellmouth taper sheath 23; Thereby the control structure radial force reaches control lens 30 or lighting apparatus component because thermal deformation and erection stress are out of shape the face type influence to lens 30
S4 through said hole for injecting glue injecting glue, and solidifies to accomplish installation colloid fully.
Referring to Fig. 2 and Fig. 6, in the present embodiment, injecting glue in the hole for injecting glue 223 of said switching supporting seat 22, groove 222 can hold annotates the glue of coming in, and makes colloid solidify final formation glue-line 40 fully and installs to accomplish lens fixing device.
In sum; The present invention is through friction factor and transition fit mode between control ball pin and the corresponding taper sheath; Friction factor between straight pin and the corresponding taper sheath and transition fit mode; Thereby control said stationary installation radial force, reach control optical element or lighting apparatus component because thermal deformation and erection stress are out of shape the face type influence to optical element; Through adopting the glued supporting construction of flexible member multiple spot, reach the influence that reduces gravity opposite type, simultaneously, utilize flexible member at the axial low stiffness characteristics of vertical light, realize the release of the thermal stress of ring optical element circumferencial direction; The optical element non-working surface glueds joint among the present invention, and the optical element shape there is not specific (special) requirements, and is applied widely; Fixture structure of the present invention is simple, and eigenfrequency is high, and good stability is easy for installation, and the location is accurate, and fixation is reliable.
Obviously, those skilled in the art can carry out various changes and modification to invention and not break away from the spirit and scope of the present invention.Like this, belong within the scope of claim of the present invention and equivalent technologies thereof if of the present invention these are revised with modification, then the present invention also is intended to comprise these changes and modification interior.
Claims (15)
1. optical element holding device comprises:
Microscope base, for mating the hollow-core construction of said optical element, said microscope base madial wall is uniformly-spaced to be provided with at least three grooves, and the corresponding microscope base sidewall in said groove middle part is provided with through hole;
Flexible member, coupling is installed in the said groove, comprises end support part and the switching supporting base that is connected in end support part two ends, and said end support part middle part is provided with perforate; It is characterized in that, also comprise
The ball pin is installed in the perforate of through hole and said end support part of said microscope base, and connecting said flexible member and microscope base, said ball pin outside surface contacts with the first friction factor rete in being arranged on said perforate.
2. optical element holding device as claimed in claim 1 is characterized in that, also comprises straight pin, connects said end support part and switching supporting base, and said straight pin one end outside surface contacts with the second friction factor rete on being arranged on the end support part.
3. optical element holding device as claimed in claim 2 is characterized in that, the friction factor of the said first friction factor rete and the second friction factor rete is all less than 0.1.
4. optical element holding device as claimed in claim 2 is characterized in that, said perforate is taper, in the said perforate step surface is arranged, the both sides of said perforate be provided with threaded hole and through the screw of packing into said flexible member of auxiliary fixing and microscope base.
5. optical element holding device as claimed in claim 4; It is characterized in that, the perforate taper sheath is housed in the said perforate, said perforate taper sheath is the misclosure structure; Outside surface has groove; The endoporus of said perforate taper sheath is a cylindrical hole, and with said ball pin transition fit, and the said first friction factor rete is plated on the said perforate taper sheath inner hole wall.
6. optical element holding device as claimed in claim 5 is characterized in that, said end support part two ends have and reverse bellmouth of said perforate and the additional threaded bores reverse with said threaded hole.
7. optical element holding device as claimed in claim 6; It is characterized in that; In the said bellmouth step surface is arranged, and the bellmouth taper sheath is installed, said bellmouth taper sheath is the misclosure structure; It is cylindrical hole that outside surface has the endoporus of the said bellmouth taper sheath of second groove, and the said second friction factor rete is plated on the inner hole wall of bellmouth taper sheath.
8. optical element holding device as claimed in claim 7 is characterized in that, has the pin-and-hole of the said end support part of coupling two ends bellmouth on the said switching supporting base middle wall.
9. optical element holding device as claimed in claim 8; It is characterized in that; The taper sheath of said straight pin and said pin-and-hole and bellmouth carries out transition fit, and the screw of in the additional threaded bores of said bellmouth both sides, packing into, connects said end support part and switching supporting base.
10. optical element holding device as claimed in claim 1 is characterized in that, said switching supporting base adopts resilient material to make.
11. optical element holding device as claimed in claim 1 is characterized in that, has groove on the said switching supporting base inside surface, in the said groove hole for injecting glue is arranged.
12. optical element holding device as claimed in claim 1 is characterized in that, said ball pin one end be cylindrical screw in order to connect the through hole of said microscope base, an end is a bulb, the middle part is the shaft shoulder.
13. optical element holding device as claimed in claim 1 is characterized in that, the middle part of said end support part is a halfpace, and said halfpace central authorities are provided with said perforate.
14. optical element holding device as claimed in claim 1 is characterized in that, said microscope base is provided with mounting hole, and it is external to be used for said microscope base.
15. the installation method like the optical element holding device of one of claim 1 to 14 is characterized in that, comprising:
Said switching supporting seat is installed to said end support part two ends to accomplish the assembling of said flexible member;
Said flexible member is installed in the groove of said microscope base;
Said optical element is positioned in the said microscope base, and the position of adjustment optical element reaches matching requirements;
Through said hole for injecting glue injecting glue, and colloid is solidified to accomplish installation fully.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010618427.XA CN102565980B (en) | 2010-12-30 | 2010-12-30 | Optical element fixing device and installation method thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010618427.XA CN102565980B (en) | 2010-12-30 | 2010-12-30 | Optical element fixing device and installation method thereof |
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| CN102565980A true CN102565980A (en) | 2012-07-11 |
| CN102565980B CN102565980B (en) | 2015-06-17 |
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| CN103885302A (en) * | 2014-04-04 | 2014-06-25 | 中国科学院光电技术研究所 | Force feedback precision supporting device for clamping optical element |
| CN104838302A (en) * | 2012-10-15 | 2015-08-12 | 通快激光有限责任公司 | Optical arrangement |
| CN105467544A (en) * | 2015-12-21 | 2016-04-06 | 中国科学院长春光学精密机械与物理研究所 | Multi-point flexible supporting device used for high-precision optical component |
| CN106383395A (en) * | 2015-07-29 | 2017-02-08 | 上海微电子装备有限公司 | Large-diameter side vertical mirror group structure |
| CN106772884A (en) * | 2016-12-21 | 2017-05-31 | 北京空间机电研究所 | A kind of low-temperature lens compress release type and disappear thermal stress supporting construction |
| CN108181686A (en) * | 2017-11-18 | 2018-06-19 | 青岛海信宽带多媒体技术有限公司 | A kind of optical transmitting set |
| CN108980543A (en) * | 2018-07-20 | 2018-12-11 | 中国科学院长春光学精密机械与物理研究所 | It can the in-orbit parallel support system for replacing optics load |
| WO2019024473A1 (en) * | 2017-07-31 | 2019-02-07 | 深圳市光峰光电技术有限公司 | Optical lens fixing device and optical projection system |
| CN110955058A (en) * | 2019-12-17 | 2020-04-03 | 中国工程物理研究院应用电子学研究所 | Three-freedom stress releaser |
| CN111123470A (en) * | 2020-01-16 | 2020-05-08 | 中国科学院西安光学精密机械研究所 | Large-caliber variable-azimuth reflector assembly adaptive to radial thermodynamic flexibility |
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| CN106383395A (en) * | 2015-07-29 | 2017-02-08 | 上海微电子装备有限公司 | Large-diameter side vertical mirror group structure |
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| CN106772884A (en) * | 2016-12-21 | 2017-05-31 | 北京空间机电研究所 | A kind of low-temperature lens compress release type and disappear thermal stress supporting construction |
| CN106772884B (en) * | 2016-12-21 | 2019-01-25 | 北京空间机电研究所 | A kind of low-temperature lens compress release type and disappear thermal stress support construction |
| WO2019024473A1 (en) * | 2017-07-31 | 2019-02-07 | 深圳市光峰光电技术有限公司 | Optical lens fixing device and optical projection system |
| CN108181686A (en) * | 2017-11-18 | 2018-06-19 | 青岛海信宽带多媒体技术有限公司 | A kind of optical transmitting set |
| CN108980543A (en) * | 2018-07-20 | 2018-12-11 | 中国科学院长春光学精密机械与物理研究所 | It can the in-orbit parallel support system for replacing optics load |
| CN108980543B (en) * | 2018-07-20 | 2019-10-11 | 中国科学院长春光学精密机械与物理研究所 | It can the in-orbit parallel support system for replacing optics load |
| CN110955058A (en) * | 2019-12-17 | 2020-04-03 | 中国工程物理研究院应用电子学研究所 | Three-freedom stress releaser |
| CN110955058B (en) * | 2019-12-17 | 2021-08-10 | 中国工程物理研究院应用电子学研究所 | Three-freedom stress releaser |
| CN111123470A (en) * | 2020-01-16 | 2020-05-08 | 中国科学院西安光学精密机械研究所 | Large-caliber variable-azimuth reflector assembly adaptive to radial thermodynamic flexibility |
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| CN102565980B (en) | 2015-06-17 |
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