CN101482641A - Lens fixing device and mounting method - Google Patents
Lens fixing device and mounting method Download PDFInfo
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- CN101482641A CN101482641A CNA2009100464842A CN200910046484A CN101482641A CN 101482641 A CN101482641 A CN 101482641A CN A2009100464842 A CNA2009100464842 A CN A2009100464842A CN 200910046484 A CN200910046484 A CN 200910046484A CN 101482641 A CN101482641 A CN 101482641A
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Abstract
The invention provides lens fixing device and mounting method, the lens fixing device is used for fixing the lens and comprises a lens base and a plurality of flexible balls, wherein, the lens base is matched with the lens, a plurality of stepped holes are provided on the lens base, the flexible balls are mounted in the stepped holes. The invention can effectively eliminate the thermal stress and the mechanical mounting stress generated during working, can implement the flexible assembly of the lens, and the lens fixing device has simple structure, convenient and fast mounting, firm fixing and high assembling accuracy.
Description
Technical field
The present invention relates to optical field, relate in particular to a kind of lens fixing device and installation method.
Background technology
At present, industry is applied in the flexible stationary installation of lens on the optical devices such as litho machine, mainly be to adopt the mode of glueing joint or using flexible member, for example U.S.Patent 4,929, disclosed the flexible field engineering of a kind of lens in 054, as shown in Figure 1 to Figure 3, the flexible stationary installation of described lens comprises: lens barrel 1, flexible member 2, lens 3 and cementing agent 4, wherein, offer three equally distributed grooves on the ladder of the shoulder hole of lens barrel 1, offer screw hole 5 in the described groove, it is in order to fixing flexible element 2, and an end of flexible member 2 overhangs out a thin slice as flexible body 6, offer cementing agent groove 7 on it, cementing agent groove 7 is in order to full-filling cementing agent 4.Adopt the installation process of the flexible stationary installation of these lens to be: earlier lens 3 are fixed in the lens barrel 1, regulate lens 3 then, obtain best optical effect after, in the cementing agent groove 7 of the flexible body 6 of flexible member 2, coat cementing agent 4 and fix lens 3.
But, this flexible stationary installation has following shortcoming: why the flexible body 6 on the flexible member 2 has flexibility, be because this part material thickness is very little, this also make material in this zone along the axis of lens to direction on rigidity very poor, even have flexible, this also just causes this fixed form to make lens 3 fixing in the axial direction firm inadequately, axial displacement may occur under the stressing conditions; In addition, cementing agent 4 is if adopt heat-curable glue, because retaining element is flexible, installing and can focus during heating the position changing of the relative positions, and solidifying rear lens 3 positions can't change, because flexible member 2 is limited with the contact area of lens 3,, can influence assembly quality and efficient again for ultraprecise lens arrangement; Cementing agent 4 is if adopt ultraviolet glue, because the ultraviolet glue full-filling is between flexible member 2 and lens 3, this feasible ultraviolet ray can not very sufficient irradiation ultraviolet glue, might cause the ultraviolet glue can not full solidification, and cause fixing not firm.
In view of this, provide a kind of simple in structure, easy for installation, quick, the location is accurate, and flexible stationary installation of the lens of fixation and installation method are very necessary.
Summary of the invention
The object of the present invention is to provide a kind of lens fixing device and installation method, fixing not firm in order to solve existing lens fixing device, the problem that assembly precision is not high, and can realize the flexible assembling of lens.
In order to realize above-mentioned purpose, the invention provides a kind of lens fixing device and installation method, comprising: microscope base; And a plurality of flexible ball; Wherein, described microscope base and described lens are complementary, and offer a plurality of shoulder holes on the described microscope base, and described flexible ball is installed in the described shoulder hole.
Further, described flexible ball is protruding sphere, and it has a plane and a protruding sphere, offers groove on the described plane, offers flute mark on the described protruding sphere.
Further, described groove is cylindrical, and it has a bottom surface, and the center of described bottom surface offers through hole.
Further, described flute mark comprises first flute mark and second flute mark, and described first flute mark is perpendicular to the described bottom surface of described groove, and described second flute mark is parallel to the described bottom surface of described groove.
Further, the quantity of described first flute mark is three, is evenly distributed on the described protruding sphere.
Further, the quantity of described second flute mark is three, is evenly distributed on the described protruding sphere.
Further, described microscope base comprises cylinder body and the positioning convex that is connected with described cylinder body.
Further, described cylinder body has an internal diameter, and described lens have an external diameter, and the internal diameter of described cylinder body is greater than the external diameter of described lens.
Further, described shoulder hole comprises first cylindrical hole and second cylindrical hole that is connected with described first cylindrical hole, and its quantity is six, is evenly distributed on the circumference of described cylinder body.
Further, the internal diameter of described first cylindrical hole is greater than the internal diameter of described second cylindrical hole, and the diameter of described flexible ball equals the internal diameter of described second cylindrical hole.
Further, described shoulder hole and described flexible ball are interference fit.
The present invention also provides a kind of installation method of lens fixing device, comprises the steps: 1) lens are installed on the microscope base; 2) flexible ball is installed in the shoulder hole of described microscope base; 3) ultraviolet glue is injected in the described flexible ball; And 4) utilize ultraviolet ray to make described ultraviolet glue full solidification.
Further, in the described step 1), use the annulus sleeve that described lens are installed on the described microscope base.
Further, described step 2) in, described flexible ball moves axially along described shoulder hole.
Further, described step 2) specifically comprise: described flexible ball is installed on the guide rod; And use described guide rod that described flexible ball is installed in the described shoulder hole of described microscope base.
Further, described flexible ball is protruding sphere, and it has a plane and a protruding sphere, offers groove on the described plane, offers flute mark on the described protruding sphere.
Further, in the described step 3), use needle tubing that described ultraviolet glue is injected in the described groove of described flexible ball.
Further, described flexible ball has the described lens of an end breasting of groove.
Further, described groove is cylindrical, and it has a bottom surface, and the center of described bottom surface offers through hole.
Further, described guide rod comprises first columnar portion and second columnar portion that is connected with described first columnar portion, the diameter of described first columnar portion is identical with the diameter of described flexible ball through hole, and the length of described first columnar portion is equal to or less than the hole depth of described flexible ball through hole.
Further, the diameter of described second columnar portion is greater than the diameter of described first columnar portion.
Compared with prior art, the present invention has the following advantages:
1, effectively eliminates thermal stress and the mechanical erection stress that lens produce in the course of the work, can realize the flexible assembling of lens.
2, simple in structure, easy for installation, quick, the location accurately, and is fixed, can reach higher assembly precision.
Description of drawings
Fig. 1 is the B-B diagrammatic cross-section of the flexible stationary installation of lens of prior art;
Fig. 2 is the enlarged diagram of flexible member among Fig. 1;
Fig. 3 is the A-A diagrammatic cross-section of the flexible stationary installation of lens of prior art;
Fig. 4 is the A-A diagrammatic cross-section of the lens fixing device that one embodiment of the invention provided;
Fig. 5 is the B-B diagrammatic cross-section of the lens fixing device that one embodiment of the invention provided;
Fig. 6 is the diagrammatic cross-section of the flexible ball among Fig. 5;
Fig. 7 is the stereographic map of the flexible ball among Fig. 5;
The synoptic diagram of the employed guide rod of installation method of the lens fixing device that Fig. 8 one embodiment of the invention is provided;
Fig. 9 installs the synoptic diagram of described flexible ball for using the described guide rod of Fig. 8.
Embodiment
Below in conjunction with accompanying drawing and specific embodiments lens fixing device and the installation method that the present invention proposes is described in further detail.
Specifically please refer to Fig. 4 to Fig. 7, described lens fixing device is in order to fixed lens 10, it specifically comprises: microscope base 20 and a plurality of flexible ball 30, and wherein, microscope base 20 is complementary with lens 10, detailed, microscope base 20 comprises cylinder body 21 and the positioning convex 22 that is connected with cylinder body 21, and cylinder body 21 has an internal diameter, and lens 10 have an external diameter, the internal diameter of described cylinder body 21 is greater than the external diameter of lens 10, and lens 10 are clearance fit with microscope base 20.Positioning convex 22 is tangent with the curved surface of lens 10, guarantees that lens 10 are that contact is installed, and guarantees that it is injury-free in installation process, and described lens fixing device is simple in structure.
Further, offer a plurality of shoulder holes 23 on the circumference of the cylinder body 21 of microscope base 20, flexible ball 30 is installed in the shoulder hole 23, shoulder hole 23 comprises first cylindrical hole 24 and second cylindrical hole 25 that is connected with first cylindrical hole 24, the quantity of shoulder hole 23 is six, is evenly distributed on the circumference of described cylinder body 21.The internal diameter of first cylindrical hole 24 is greater than the internal diameter of second cylindrical hole 25, the diameter of flexible ball 30 equals the internal diameter of second cylindrical hole 25, shoulder hole 23 is an interference fit with flexible ball 30, the magnitude of interference is determined according to the size characteristic and the material properties of lens 10, guarantee that the friction force that flexible ball 30 and shoulder hole 23 produce is less than or equal to the internal stress that lens 10 produce, flexible ball 30 is bonded on the microscope base 20 by ultraviolet glue 40.
Please specifically with reference to figure 6 to Fig. 7, wherein Fig. 6 is the diagrammatic cross-section of flexible ball, Fig. 7 is the stereographic map of flexible ball, flexible ball 30 is protruding sphere, is made by the high precision standard ball, the precision of flexible ball 30 is decided according to the installation requirement of lens 10.Flexible ball 30 has a plane and a protruding sphere, offers groove 31 on the described plane, and groove 31 is cylindrical, and it has a bottom surface, and the center of described bottom surface offers through hole 32.Offer flute mark on the described protruding sphere, described flute mark comprises first flute mark 33 and second flute mark, 34, the first flute marks 33 described bottom surface perpendicular to groove 31, and second flute mark 34 is parallel to the described bottom surface of groove 31.Wherein, the quantity of first flute mark 33 is three, is evenly distributed on the described protruding sphere, and the quantity of second flute mark 34 is three, is evenly distributed on the described protruding sphere.The width of described flute mark and the degree of depth are decided according to condition of work and actual installation situation.
Please continue with reference to figure 8 to Fig. 9, and in conjunction with Fig. 4 to Fig. 7, the installation method of the lens fixing device that one embodiment of the invention provided comprises the steps: to use the annulus sleeve that lens 10 are installed on the microscope base 20; Flexible ball 30 is installed on the guide rod 50; Use guide rod 50 flexible ball 30 to be installed in the shoulder hole 23 of microscope base 20; Use needle tubing ultraviolet glue 40 to be injected in the groove 31 of flexible ball 30; And utilize ultraviolet ray to make ultraviolet glue 40 full solidification.
Wherein, the external diameter of annulus sleeve is slightly less than the internal diameter of the cylinder body 21 of microscope base 20, utilizes the annulus sleeve that lens 10 are encased in the microscope base 20, lens 10 are carried out location just, need to prove that this step is not used in accurate location, microscope base 20 is a clearance fit with lens 10.
Specifically please refer to Fig. 8, guide rod 50 comprises first columnar portion 51 and second columnar portion 52 that is connected with first columnar portion 51, the diameter of first columnar portion 51 is identical with the diameter of the through hole 32 of flexible ball 30, the length of first columnar portion 51 can be equal to or less than the hole depth of the through hole 32 of flexible ball 30, in an embodiment of the present invention, the length of first columnar portion 51 is less than the hole depth of through hole 32, and the diameter of second columnar portion 52 is greater than the diameter of first columnar portion 51.Flexible ball 30 is installed on the guide rod 50, utilizes guide rod 50 flexible ball 30 to be installed in the shoulder hole 23 of cylinder body 21 of microscope base 20.Wherein, the diameter of second columnar portion 52 can play guide effect greater than the diameter of first columnar portion 51 in installation process.Guarantee in the installation process that flexible ball 30 has end breasting lens 10 of groove.
Utilize needle tubing ultraviolet glue 40 to be injected in the groove 31 of flexible ball 30, ultraviolet glue 40 is with regard in the gap of full-filling between flexible ball 30 and lens 10 like this, lens 10 are adjusted to best optical position, with through hole 32 irradiation ultraviolet radiations of ultraviolet ray along microscope base 20 equally distributed shoulder holes 23 and flexible ball 30, see through lens 10 simultaneously from microscope base 20 two ends, to ultraviolet glue 40 irradiation ultraviolet radiations that are injected between flexible ball 30 and the lens 10.At this moment, ultraviolet glue 40 full solidification, lens 10 are fixed in the microscope base 20, and the location is accurate, and fixation is reliable.
Though equally distributed shoulder hole 23 belongs to interference fit on flexible ball 30 and the microscope base 20, but under stressing conditions, the diameter of flexible ball 30 is easy to change, if this moment is stressed along axially going up of equally distributed shoulder hole 23, flexible ball 30 will moving axially along shoulder hole 23.When lens 10 produce thermal stress or mechanical stress in the course of the work, when the trace variation takes place in its diameter or face shape, the flexible ball 30 that firmly sticks on its external diameter will be subjected to thrust or extruding, this moment, flexible ball 30 will be along equally distributed shoulder hole 23 outwards or move inward, thermal stress and mechanical erection stress that lens 10 produce have in the course of the work effectively been eliminated, can realize the flexible assembling of lens 10, and described lens fixing device is simple in structure, installation process is convenient, fast.
Because the quantity of shoulder hole 23 is six, is evenly distributed on the circumference of cylinder body 21, promptly six flexible ball evenly are fixed on the microscope base, make that lens 10 are stressed even, therefore can guarantee that the optical axis position of lens 10 is constant, can reach higher assembly precision.
In sum, the invention provides a kind of lens fixing device and installation method, described lens fixing device comprises: microscope base; And a plurality of flexible ball; Wherein, described microscope base and described lens are complementary, offer a plurality of shoulder holes on the described microscope base, described flexible ball is installed in the described shoulder hole, and the present invention has effectively eliminated thermal stress and mechanical erection stress that lens produce in the course of the work, can realize the flexible assembling of lens, and described lens fixing device is simple in structure, easy for installation, quick, fixation is reliable, can reach higher assembly precision.
Obviously, those skilled in the art can carry out various changes and modification to the present invention and not break away from the spirit and scope of the present invention.Like this, if of the present invention these revise and modification belongs within the scope of claim of the present invention and equivalent technologies thereof, then the present invention also is intended to comprise these change and modification.
Claims (21)
1, a kind of lens fixing device in order to fixed lens, is characterized in that, comprising:
Microscope base; And
A plurality of flexible ball;
Wherein, described microscope base and described lens are complementary, and offer a plurality of shoulder holes on the described microscope base, and described flexible ball is installed in the described shoulder hole.
2, lens fixing device as claimed in claim 1 is characterized in that, described flexible ball is protruding sphere, and it has a plane and a protruding sphere, offers groove on the described plane, offers flute mark on the described protruding sphere.
3, lens fixing device as claimed in claim 2 is characterized in that, described groove is cylindrical, and it has a bottom surface, and the center of described bottom surface offers through hole.
4, lens fixing device as claimed in claim 3 is characterized in that, described flute mark comprises first flute mark and second flute mark, and described first flute mark is perpendicular to the described bottom surface of described groove, and described second flute mark is parallel to the described bottom surface of described groove.
5, lens fixing device as claimed in claim 4 is characterized in that, the quantity of described first flute mark is three, is evenly distributed on the described protruding sphere.
6, lens fixing device as claimed in claim 4 is characterized in that, the quantity of described second flute mark is three, is evenly distributed on the described protruding sphere.
7, lens fixing device as claimed in claim 1 is characterized in that, described microscope base comprises cylinder body and the positioning convex that is connected with described cylinder body.
8, lens fixing device as claimed in claim 7 is characterized in that, described cylinder body has an internal diameter, and described lens have an external diameter, and the internal diameter of described cylinder body is greater than the external diameter of described lens.
9, lens fixing device as claimed in claim 7 is characterized in that, described shoulder hole comprises first cylindrical hole and second cylindrical hole that is connected with described first cylindrical hole, and its quantity is six, is evenly distributed on the circumference of described cylinder body.
10, lens fixing device as claimed in claim 9 is characterized in that, the internal diameter of described first cylindrical hole is greater than the internal diameter of described second cylindrical hole, and the diameter of described flexible ball equals the internal diameter of described second cylindrical hole.
11, lens fixing device as claimed in claim 10 is characterized in that, described shoulder hole and described flexible ball are interference fit.
12, a kind of installation method of lens fixing device is characterized in that, comprises the steps:
1) lens is installed on the microscope base;
2) flexible ball is installed in the shoulder hole of described microscope base;
3) ultraviolet glue is injected in the described flexible ball; And
4) utilize ultraviolet ray to make described ultraviolet glue full solidification.
13, installation method as claimed in claim 12 is characterized in that, in the described step 1), uses the annulus sleeve that described lens are installed on the described microscope base.
14, installation method as claimed in claim 12 is characterized in that, described step 2) in, described flexible ball moves axially along described shoulder hole.
15, installation method as claimed in claim 12 is characterized in that, described step 2) specifically comprise:
Described flexible ball is installed on the guide rod; And
Use described guide rod that described flexible ball is installed in the described shoulder hole of described microscope base.
16, installation method as claimed in claim 15 is characterized in that, described flexible ball is protruding sphere, and it has a plane and a protruding sphere, offers groove on the described plane, offers flute mark on the described protruding sphere.
17, installation method as claimed in claim 16 is characterized in that, in the described step 3), uses needle tubing that described ultraviolet glue is injected in the described groove of described flexible ball.
18, installation method as claimed in claim 16 is characterized in that, described flexible ball has the described lens of an end breasting of groove.
19, installation method as claimed in claim 16 is characterized in that, described groove is cylindrical, and it has a bottom surface, and the center of described bottom surface offers through hole.
20, installation method as claimed in claim 19, it is characterized in that, described guide rod comprises first columnar portion and second columnar portion that is connected with described first columnar portion, the diameter of described first columnar portion is identical with the diameter of described flexible ball through hole, and the length of described first columnar portion is equal to or less than the hole depth of described flexible ball through hole.
21, installation method as claimed in claim 20 is characterized in that, the diameter of described second columnar portion is greater than the diameter of described first columnar portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009100464842A CN101482641B (en) | 2009-02-23 | 2009-02-23 | Lens fixing device and mounting method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009100464842A CN101482641B (en) | 2009-02-23 | 2009-02-23 | Lens fixing device and mounting method |
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| Publication Number | Publication Date |
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| CN101482641A true CN101482641A (en) | 2009-07-15 |
| CN101482641B CN101482641B (en) | 2010-09-15 |
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|---|---|---|---|
| CN2009100464842A Active CN101482641B (en) | 2009-02-23 | 2009-02-23 | Lens fixing device and mounting method |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102073119A (en) * | 2010-12-24 | 2011-05-25 | 深圳市大族激光科技股份有限公司 | Centering adjustment frame of lens |
| CN102221786A (en) * | 2010-04-16 | 2011-10-19 | 上海微电子装备有限公司 | Axial positioning maintaining device of optical element |
| CN102221787A (en) * | 2010-04-16 | 2011-10-19 | 上海微电子装备有限公司 | Integrated mounting and calibrating device of high-precision exposure lens unit |
| CN102230997A (en) * | 2009-10-07 | 2011-11-02 | 鸿富锦精密工业（深圳）有限公司 | Lens holding fixture |
| CN102486564A (en) * | 2010-12-06 | 2012-06-06 | 上海微电子装备有限公司 | Lens flexibility fixing device |
| CN102565980A (en) * | 2010-12-30 | 2012-07-11 | 上海微电子装备有限公司 | Optical element fixing device and installation method thereof |
| CN102893217A (en) * | 2010-05-18 | 2013-01-23 | Asml荷兰有限公司 | Lithographic apparatus and device manufacturing method |
| CN103048761A (en) * | 2011-10-11 | 2013-04-17 | Hoya株式会社 | Lens support frame |
| CN112068277A (en) * | 2020-08-31 | 2020-12-11 | 中国科学院长春光学精密机械与物理研究所 | Multistage flexible supporting structure of large-caliber optical lens |
| CN112154378A (en) * | 2018-05-16 | 2020-12-29 | Asml控股股份有限公司 | High stability collimator assembly, lithographic apparatus and method |
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2009
- 2009-02-23 CN CN2009100464842A patent/CN101482641B/en active Active
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102230997A (en) * | 2009-10-07 | 2011-11-02 | 鸿富锦精密工业（深圳）有限公司 | Lens holding fixture |
| CN102230997B (en) * | 2009-10-07 | 2013-04-24 | 鸿富锦精密工业（深圳）有限公司 | Lens holding fixture |
| CN102221786B (en) * | 2010-04-16 | 2012-12-12 | 上海微电子装备有限公司 | Axial positioning maintaining device of optical element |
| CN102221786A (en) * | 2010-04-16 | 2011-10-19 | 上海微电子装备有限公司 | Axial positioning maintaining device of optical element |
| CN102221787A (en) * | 2010-04-16 | 2011-10-19 | 上海微电子装备有限公司 | Integrated mounting and calibrating device of high-precision exposure lens unit |
| CN102893217A (en) * | 2010-05-18 | 2013-01-23 | Asml荷兰有限公司 | Lithographic apparatus and device manufacturing method |
| CN102486564A (en) * | 2010-12-06 | 2012-06-06 | 上海微电子装备有限公司 | Lens flexibility fixing device |
| CN102073119B (en) * | 2010-12-24 | 2012-07-25 | 深圳市大族激光科技股份有限公司 | Centering adjustment frame of lens |
| CN102073119A (en) * | 2010-12-24 | 2011-05-25 | 深圳市大族激光科技股份有限公司 | Centering adjustment frame of lens |
| CN102565980A (en) * | 2010-12-30 | 2012-07-11 | 上海微电子装备有限公司 | Optical element fixing device and installation method thereof |
| CN103048761A (en) * | 2011-10-11 | 2013-04-17 | Hoya株式会社 | Lens support frame |
| CN103048761B (en) * | 2011-10-11 | 2016-12-21 | Hoya株式会社 | Camera lens bracing frame |
| CN112154378A (en) * | 2018-05-16 | 2020-12-29 | Asml控股股份有限公司 | High stability collimator assembly, lithographic apparatus and method |
| CN112068277A (en) * | 2020-08-31 | 2020-12-11 | 中国科学院长春光学精密机械与物理研究所 | Multistage flexible supporting structure of large-caliber optical lens |
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|---|---|
| CN101482641B (en) | 2010-09-15 |
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Address after: 201203 Zhangjiang High Tech Park, Shanghai, Zhang Dong Road, No. 1525 Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Zhangjiang High Tech Park, Shanghai, Zhang Dong Road, No. 1525 Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |
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