CN102565980B - Optical element fixing device and installation method thereof - Google Patents
Optical element fixing device and installation method thereof Download PDFInfo
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- CN102565980B CN102565980B CN201010618427.XA CN201010618427A CN102565980B CN 102565980 B CN102565980 B CN 102565980B CN 201010618427 A CN201010618427 A CN 201010618427A CN 102565980 B CN102565980 B CN 102565980B
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Abstract
The invention provides an optical element fixing device and an installation method thereof. The optical element fixing device comprises a microscope base, flexible elements and ball pins, wherein at least three grooves are formed at equal intervals on the inner wall of the microscope base; the flexible elements are arranged in the grooves in a matching way; and the ball pins are used for connecting the flexible elements with the microscope base. The radial force of the fixing device is controlled by controlling the friction coefficient and transition matching way between the ball pins and corresponding conical sleeves as well as the friction coefficient and transition matching way between a cylindrical pin and a corresponding conical sleeve, so that the influences caused by the thermal deformation and assembly stress deformation of an optical element or optical assembly on the surface type of the optical element are controlled; a flexible element multipoint gluing support structure is adopted, so that the influence of gravity on the surface type is reduced, and release of the thermal stress of an annular optical element in a circumferential direction is realized simultaneously by using the low rigidity characteristics of the flexible elements in a direction which is vertical to the optical axis; and the fixing device provided by the invention has the advantages of simple structure, high stability, convenience for installing, accurate positioning, firm and reliable fixing and wide application range.
Description
Technical field
The present invention relates to optical field, particularly relate to a kind of optical element holding device and installation method thereof.
Background technology
What require along with photoetching resolution improves constantly, the designing requirement of the projection imaging object lens of exposed portion in advanced photolithographic equipment is also improved day by day, high resolution just requires that camera lens improves the requirement to aberration and system stability in the design, this just not only itself proposes higher requirement to Optical System Design, and also greatly increases photomechanical structural design difficulty simultaneously.In photomechanical structural design, by the unstressed fixing or low stress technique for fixing of optical element, effectively can solve the change of high-resolution lens face type, thus realize the control of aberration.Such as, in US Patent No. 7085080, realize fixing by cementing mode between lens and microscope base, and rely on microscope base three groups of flexible members to reach lens in radial translation and the stress relief horizontally rotated; In US Patent No. 20060056083, utilize spring leaf and ball pin fixing in rims of the lens groove, reach the object of disappear gravity deformation and axial location.In patent US20030179470, utilize two-sided spring supporting, realize disappearing the impact of gravity deformation.
Above-mentioned three patents, in lithographic objective field, have good representativeness, but, realizing, on low stress or unstressed technique for fixing, having some limitations.Patent US7085080, the camera lens that the layout of supported at three point requires in high-precision lenses face type is inapplicable, and meanwhile, microscope base is directly processed into this feature, also will control other form and position tolerance, manufacture has a big risk; Patent US20060056083, solve Article Ⅰ patent institute produced problem, but it has certain particular/special requirement to the manufacture shape of lens, little in the scope of application, and will control the comparison of coherence difficulty of multiple flexible member; Although patent US20030179470 overcomes the defect of above-mentioned two patents, it is when stress-removal, well can not carry out axial location.
Therefore, provide a kind of structure simple, easy for installation, registration, fixation are reliable, applied widely, the low stress flexibility fixing device of the high-precision optical element of good stability is very necessary.
Summary of the invention
The object of the present invention is to provide a kind of optical element holding device and installation method thereof, to eliminate stress in a certain direction deficiency in order to solve existing optical element holding device, structural stability is poor, manufacturability and the problem such as assembling capacity is not enough.
For solving the problem, the present invention proposes a kind of optical element holding device, comprising:
Microscope base, for mating the hollow-core construction of described optical element, described microscope base madial wall is to be provided with at least three grooves at equal intervals, and microscope base sidewall corresponding in the middle part of described groove is provided with through hole;
Flexible member, Matching installation, in described groove, comprises end support members and the switching supporting base being connected to end support members two ends, is provided with perforate in the middle part of described end support members;
Described optical element holding device also comprises ball pin, is installed in the through hole of described microscope base and the perforate of described end support members, and to connect described flexible member and microscope base, described ball pin outside surface contacts with the first friction factor rete be arranged in described perforate.
Further, described optical element holding device also comprises straight pin, and connect described end support members and switching supporting base, described straight pin one end outside surface contacts with the second friction factor rete be arranged on end support members.
Further, the friction factor of described first friction factor rete and the second friction factor rete is all less than 0.1.
Further, described perforate is taper, has step surface in described perforate, and the both sides of described perforate are provided with threaded hole and fix described flexible member and microscope base by loading screw with auxiliary.
Further, described perforate is built with perforate taper sheath, and described perforate taper sheath is misclosure structure, outside surface has groove, the endoporus of described perforate taper sheath is cylindrical hole, and with described ball pin transition fit, and described first friction factor rete is plated on described perforate taper sheath inner hole wall.
Further, described end support members two ends have the bellmouth reverse with described perforate and the additional threaded bores reverse with described threaded hole.
Further, step surface is had in described bellmouth, and bellmouth taper sheath is installed, described bellmouth taper sheath is misclosure structure, outside surface has the endoporus of bellmouth taper sheath described in the second groove to be cylindrical hole, and described second friction factor rete is plated on the inner hole wall of bellmouth taper sheath.
Further, described switching supporting base middle wall has the pin-and-hole of coupling described end support members two ends bellmouth.
Further, the taper sheath of described straight pin and described pin-and-hole and bellmouth carries out transition fit, and loads screw in the additional threaded bores of described bellmouth both sides, connects described end support members and switching supporting base.
Further, described switching supporting base adopts resilient material to make.
Further, described switching supporting base inside surface has groove, in described groove, has hole for injecting glue.
Further, described ball pin one end be cylindrical screw in order to connect the through hole of described microscope base, one end is bulb, and middle part is the shaft shoulder.
Further, the middle part of described end support members is halfpace, and described halfpace central authorities are provided with described perforate.
Further, described microscope base is provided with mounting hole, external for described microscope base.
According to another side of the present invention, a kind of installation method applying one of above-mentioned optical element holding device is provided, comprises:
Described switching supporting seat is installed to described end support members two ends to complete the assembling of described flexible member;
Described flexible member is installed in the groove of described microscope base;
Be positioned over by described optical element in described microscope base, the position of adjustment optical element, reaches matching requirements;
By described hole for injecting glue injecting glue, and colloid is made to have solidified installation completely.
Compared with prior art, the present invention is by the friction factor between control ball pin and corresponding taper sheath and transition fit mode, friction factor between straight pin and corresponding taper sheath and transition fit mode, thus control described stationary installation radial force, reach control both optical element or lighting apparatus component because thermal deformation and erection stress distortion are on the face type impact of optical element; By adopting the cementing supporting construction of flexible member multiple spot, reaching the impact reducing gravity opposite type, meanwhile, utilizing flexible member in the axial Low rigidity feature of vertical light, realize the release of the thermal stress of ring optical element circumferencial direction; In the present invention, optical element non-working surface glueds joint, and does not have particular/special requirement to optical element shape, applied widely; Fixture structure of the present invention is simple, and eigenfrequency is high, good stability, easy for installation, registration, and fixation is reliable.
Accompanying drawing explanation
Fig. 1 is the optical element holding device profile diagram of the specific embodiment of the invention;
Fig. 2 is the optical element holding device cut-open view of the specific embodiment of the invention;
Fig. 3 is the microscope base schematic diagram of the optical element holding device of the specific embodiment of the invention;
Fig. 4 is the flexible member profile diagram of the specific embodiment of the invention, cut-open view and taper sheath structural representation;
Fig. 5 is the end support members structural representation of the specific embodiment of the invention;
Fig. 6 is the switching bearing arrangement schematic diagram of the specific embodiment of the invention.
Embodiment
The optical element holding device proposed the present invention below in conjunction with the drawings and specific embodiments and installation method thereof are described in further detail.It should be noted that, accompanying drawing all adopts the form simplified very much, only for object that is convenient, the aid illustration embodiment of the present invention lucidly.
As illustrated in fig. 1 and 2, the present invention proposes a kind of optical element holding device, comprise: microscope base 10, flexible member 20, ball pin 50, wherein microscope base 10 is the hollow-core construction of mating described optical element 30, ball pin 50 connects microscope base 10 and flexible member 20, one end is cylindrical screw, and one end is that bulb connects flexible member 20, and middle part is the shaft shoulder.
Refer to Fig. 3, in the present embodiment, microscope base 10 is circular ring structure, annulus madial wall is to be provided with three grooves 103 at equal intervals, cylindrical hole 102 is provided with in order to install the cylindrical screw end of ball pin 50 in the middle part of described groove 103, the bottom surface of microscope base 10 is also provided with the mounting hole 101 of equidistantly distribution, for connecting optical element 30 and other devices (as lens barrel etc.).In other embodiments, groove 103 can more than three.
Refer to Fig. 2 and Fig. 3, flexible member 20 Matching installation is in described groove 103.
Refer to Fig. 4 to Fig. 6, flexible member 20 comprises end support members 21 and is connected to the switching supporting base 22 at end support members two ends 21,
In the present embodiment, end support members 21 and switching supporting base 22 are all one section of annulus, and switching supporting base 22 inner ring radius is less than end support member 21 inner ring radius.Be halfpace in the middle part of described end support members 21, halfpace central authorities are provided with perforate 211, and described perforate 211 is taper, and there is step surface inside, can load the perforate taper sheath 24 that endoporus is cylindrical hole, both sides are provided with threaded hole 210 and fix described flexible member 20 and microscope base by loading screw 26 with auxiliary; Described end support members 21 two ends have distinguishes reverse bellmouth 213 and additional threaded bores 212 with described perforate 211 and threaded hole 210, has step surface, can load the bellmouth taper sheath 23 that endoporus is cylindrical hole in described bellmouth 213; Described switching supporting base 22 adopts resilient material to make, middle wall has the cylindrical pin hole 221 of coupling described end support members 21 two ends bellmouth 213, described switching supporting base 22 two ends have " T " pin sidewall 224 to have flexibility in the horizontal direction in order to realize flexible member 20, easily deformable, but there is comparatively large rigidity in the axial direction, not yielding.The footing inside surface of shown " T " pin sidewall 224 has groove 222 in order to hold glue, in groove 222, has hole for injecting glue 223.Wherein, described perforate taper sheath 24 is misclosure structure, endoporus 242 is cylindrical hole, outside surface has groove 241 (in order to increase flexibility) and step surface 243 (in order to mounting screw 26) and plating first friction factor rete on the inner hole wall of endoporus 242, ball pin 50 and perforate taper sheath 24 carry out transition fit, contact with the first friction factor rete, connect flexible member 20 and microscope base 10.Described bellmouth taper sheath 23 is similar to described perforate taper sheath 24 structure, length is shorter than described perforate taper sheath 24, be similarly misclosure structure, endoporus is cylindrical hole, outside surface has the second groove (in order to increase flexibility) and step surface (in order to mounting screw 27) and plating second friction factor rete on inner hole wall, straight pin 25 bellmouth taper sheath 23 and pin-and-hole 221 carry out transition fit, straight pin 25 one end outside surface contacts with the second friction factor rete, connects end support members 21 and switching supporting base 22.The friction factor of the first friction factor rete and the second friction factor rete is all less than 0.1, is lower friction factor relatively.
According to another side of the present invention, a kind of installation method applying above-mentioned optical element holding device is provided, comprises:
S1, is installed to end support members two ends to complete the assembling of flexible member by the switching supporting seat with hole for injecting glue.
See Fig. 4 to 6, in the present embodiment, load in bellmouth 213 at described end support members 21 two ends respectively by by bellmouth taper sheath 23, straight pin 25 is loaded in the endoporus of bellmouth taper sheath 23 and the pin-and-hole 221 of switching supporting seat 22, in additional threaded bores 212, load screw 27 and lock with the assembling completing flexible member 20.
S2, is installed to successively by described flexible member in the groove of described microscope base.
See Fig. 2 to Fig. 4, in the present embodiment, first the cylindrical screw of ball pin 50 is installed in the cylindrical hole 102 of microscope base 10, again perforate taper sheath 24 is loaded in perforate 211, ball pin 50 remainder is installed in perforate taper sheath 24, in threaded hole 212, load screw 26 and lock, finally successively multiple flexible member being installed in the groove of microscope base.
S3, is positioned over described optical element in described microscope base, and the position of adjustment optical element, reaches matching requirements.
See Fig. 2, in the present embodiment, lens 30 are installed in the ring that flexible member 20 and microscope base 10 enclose, by controlling the degree of depth of ball pin 50 in perforate taper sheath 24, control the consistance of multiple ball pin, also by controlling the friction factor between ball pin 50 and perforate taper sheath 24, straight pin 25 and to the friction factor between bellmouth taper sheath 23, thus control structure radial force, reach and control lens 30 or lighting apparatus component because thermal deformation and erection stress distortion are on the face type impact of lens 30
S4, by described hole for injecting glue injecting glue, and makes colloid solidify installation completely.
See Fig. 2 and Fig. 6, in the present embodiment, injecting glue in the hole for injecting glue 223 of described switching supporting seat 22, groove 222 can hold the glue that note is come in, and makes colloid solidify the final glue-line 40 that formed completely and installs to complete lens fixing device.
In sum, the present invention is by the friction factor between control ball pin and corresponding taper sheath and transition fit mode, friction factor between straight pin and corresponding taper sheath and transition fit mode, thus control described stationary installation radial force, reach control both optical element or lighting apparatus component because thermal deformation and erection stress distortion are on the face type impact of optical element; By adopting the cementing supporting construction of flexible member multiple spot, reaching the impact reducing gravity opposite type, meanwhile, utilizing flexible member in the axial Low rigidity feature of vertical light, realize the release of the thermal stress of ring optical element circumferencial direction; In the present invention, optical element non-working surface glueds joint, and does not have particular/special requirement to optical element shape, applied widely; Fixture structure of the present invention is simple, and eigenfrequency is high, good stability, easy for installation, registration, and fixation is reliable.
Obviously, those skilled in the art can carry out various change and modification to invention and not depart from the spirit and scope of the present invention.Like this, if these amendments of the present invention and modification belong within the scope of the claims in the present invention and equivalent technologies thereof, then the present invention is also intended to comprise these change and modification.
Claims (13)
1. an optical element holding device, comprising:
Microscope base, for mating the hollow-core construction of described optical element, described microscope base madial wall is to be provided with at least three grooves at equal intervals, and microscope base sidewall corresponding in the middle part of described groove is provided with through hole;
Flexible member, Matching installation, in described groove, comprises end support members and the switching supporting base being connected to end support members two ends, is provided with perforate in the middle part of described end support members; Also comprise
Ball pin, be installed in the through hole of described microscope base and the perforate of described end support members, to connect described flexible member and microscope base, described ball pin outside surface contacts with the first friction factor rete be arranged in described perforate, it is characterized in that, also comprise straight pin, connect described end support members and switching supporting base, described straight pin one end outside surface contacts with the second friction factor rete be arranged on end support members.
2. optical element holding device as claimed in claim 1, it is characterized in that, the friction factor of described first friction factor rete and the second friction factor rete is all less than 0.1.
3. optical element holding device as claimed in claim 1, it is characterized in that, described perforate is taper, has step surface in described perforate, and the both sides of described perforate are provided with threaded hole and pass through to load screw with auxiliary fixing described flexible member and microscope base.
4. optical element holding device as claimed in claim 3, it is characterized in that, described perforate is built with perforate taper sheath, described perforate taper sheath is misclosure structure, outside surface has groove, the endoporus of described perforate taper sheath is cylindrical hole, and with described ball pin transition fit, and described first friction factor rete is plated on described perforate taper sheath inner hole wall.
5. optical element holding device as claimed in claim 4, it is characterized in that, described end support members two ends have the bellmouth reverse with described perforate and the additional threaded bores reverse with described threaded hole.
6. optical element holding device as claimed in claim 5, it is characterized in that, step surface is had in described bellmouth, and bellmouth taper sheath is installed, described bellmouth taper sheath is misclosure structure, outside surface has the endoporus of bellmouth taper sheath described in the second groove to be cylindrical hole, and described second friction factor rete is plated on the inner hole wall of bellmouth taper sheath.
7. optical element holding device as claimed in claim 6, is characterized in that, described switching supporting base middle wall has the pin-and-hole of coupling described end support members two ends bellmouth.
8. optical element holding device as claimed in claim 7, it is characterized in that, the taper sheath of described straight pin and described pin-and-hole and bellmouth carries out transition fit, and loads screw in the additional threaded bores of described bellmouth both sides, connects described end support members and switching supporting base.
9. optical element holding device as claimed in claim 1, is characterized in that, described switching supporting base adopts resilient material to make.
10. optical element holding device as claimed in claim 1, is characterized in that, described ball pin one end be cylindrical screw in order to connect the through hole of described microscope base, one end is bulb, and middle part is the shaft shoulder.
11. optical element holding devices as claimed in claim 1, is characterized in that, the middle part of described end support members is halfpace, and described halfpace central authorities are provided with described perforate.
12. optical element holding devices as claimed in claim 1, it is characterized in that, described microscope base is provided with mounting hole, external for described microscope base.
13. 1 kinds as the installation method of the optical element holding device of one of claim 1 to 12, is characterized in that, comprising:
Switching supporting seat is installed to end support members two ends to complete the assembling of flexible member, described switching supporting base inside surface has groove, in described groove, has hole for injecting glue;
Described flexible member is installed in the groove of microscope base;
Described optical element is positioned in described microscope base, adjusts the position of described optical element, reach matching requirements;
By hole for injecting glue injecting glue, and colloid is made to have solidified installation completely.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010618427.XA CN102565980B (en) | 2010-12-30 | 2010-12-30 | Optical element fixing device and installation method thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010618427.XA CN102565980B (en) | 2010-12-30 | 2010-12-30 | Optical element fixing device and installation method thereof |
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| Publication Number | Publication Date |
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| CN102565980A CN102565980A (en) | 2012-07-11 |
| CN102565980B true CN102565980B (en) | 2015-06-17 |
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Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
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| DE102012218769B4 (en) * | 2012-10-15 | 2018-09-06 | Trumpf Laser Gmbh | optics assembly |
| CN103885302B (en) * | 2014-04-04 | 2016-03-30 | 中国科学院光电技术研究所 | A kind of accurate bracing or strutting arrangement of force feedback of the optical element that is installed |
| CN106383395A (en) * | 2015-07-29 | 2017-02-08 | 上海微电子装备有限公司 | Large-diameter side vertical mirror group structure |
| CN105467544B (en) * | 2015-12-21 | 2017-12-26 | 中国科学院长春光学精密机械与物理研究所 | A kind of multi-point flexibly support meanss for high-precision optical element |
| CN106772884B (en) * | 2016-12-21 | 2019-01-25 | 北京空间机电研究所 | A kind of low-temperature lens compress release type and disappear thermal stress support construction |
| CN207216250U (en) * | 2017-07-31 | 2018-04-10 | 深圳市光峰光电技术有限公司 | Optical mirror slip fixing device and optical projection system |
| CN108181686A (en) * | 2017-11-18 | 2018-06-19 | 青岛海信宽带多媒体技术有限公司 | A kind of optical transmitting set |
| CN108980543B (en) * | 2018-07-20 | 2019-10-11 | 中国科学院长春光学精密机械与物理研究所 | It can the in-orbit parallel support system for replacing optics load |
| CN110955058B (en) * | 2019-12-17 | 2021-08-10 | 中国工程物理研究院应用电子学研究所 | Three-freedom stress releaser |
| CN111123470B (en) * | 2020-01-16 | 2020-09-29 | 中国科学院西安光学精密机械研究所 | Large-caliber variable-azimuth reflector assembly adaptive to radial thermodynamic flexibility |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2839788B1 (en) * | 2002-05-14 | 2004-11-05 | Essilor Int | INDIVIDUAL OPTICAL LENS SUPPORT |
| US6922293B2 (en) * | 2002-07-02 | 2005-07-26 | Nikon Corporation | Kinematic optical mounting assembly with flexures |
| JP2007188010A (en) * | 2006-01-16 | 2007-07-26 | Fujinon Corp | Lens device, lens barrel and lens holding method |
| EP1901101A1 (en) * | 2006-09-14 | 2008-03-19 | Carl Zeiss SMT AG | Optical element unit and method of supporting an optical element |
| JP2008309903A (en) * | 2007-06-12 | 2008-12-25 | Canon Inc | Optical element holding structure, exposing device, and device manufacturing method |
| CN101216590A (en) * | 2008-01-21 | 2008-07-09 | 上海微电子装备有限公司 | Three freedom degree reflector adjusting apparatus |
| CN101482641B (en) * | 2009-02-23 | 2010-09-15 | 上海微电子装备有限公司 | Lens fixing device and mounting method |
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Address after: 201203, No. 1525 Zhang Dong Road, Shanghai, Shanghai, Pudong New Area Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203, No. 1525 Zhang Dong Road, Shanghai, Shanghai, Pudong New Area Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |