CN102564456B - Device and method for testing three-axis micro gyroscope - Google Patents
Device and method for testing three-axis micro gyroscope Download PDFInfo
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- CN102564456B CN102564456B CN201110453332.1A CN201110453332A CN102564456B CN 102564456 B CN102564456 B CN 102564456B CN 201110453332 A CN201110453332 A CN 201110453332A CN 102564456 B CN102564456 B CN 102564456B
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Abstract
The invention discloses a device and a method for testing a three-axis micro gyroscope. The device comprises a test component and a drive piece for driving the test component to rotate; and an included angle between a rotating shaft of the drive piece and a test plane on which the three-axis micro gyroscope is mounted is alpha of more than 0 degree and less than 90 degrees. The test method comprises the following steps of: mounting the three-axis micro gyroscope on the test plane, and making the z axis of the three-axis micro gyroscope vertical to the test plane and the x axis and the y axis of the three-axis micro gyroscope parallel to the test plane; allowing the drive piece to drive the test component to rotate at an angular speed omega; reading angular speeds omega z, omega x and omega y output by the three-axis micro gyroscope on the z axis, the x axis and the y axis; and judging whether the angular speeds omega z, omega x and omega y are respectively equal to omega sin alpha, omega cos alpha cos gamma and omega cos alpha sin gamma. By the device and the method, the three-axis micro gyroscope can be tested in three axial directions without change of a test axis, the equipment is easy to implement, test time is shortened and the cost of the test device is reduced.
Description
Technical field
The present invention relates to a kind of detection precision for detection of sensor and whether meet the requirements of method of testing, relate in particular to a kind of method of testing of three axle minisize gyroscopes.
Background technology
Along with the development of MEMS (micro electro mechanical system) (MEMS, Micro-Electro-Mechanical System) technology, a lot of minisize gyroscopes based on MEMS technology emerge, and are widely used in the fields such as automobile, navigation, game.But for minisize gyroscopes, in development, encapsulation and other relevant processing and making process of device, can produce adverse influence to the performance of device unavoidably; In addition, device is after use after a while, because the reasons such as varying environment condition such as material aging, temperature, humidity cause its performance will inevitably produce certain drift, the error that causes after the accumulation of certain hour can be suitable large, therefore, be no matter finished product to just having dispatched from the factory or for product just in use, all need that one stable and test platform is efficiently demarcated and proofreaied and correct the performance of product.
In the equipment that gyrostatic performance is demarcated and proofreaied and correct, the simplest equipment is single axle table, only need just can complete the test to device performance by testing apparatuss such as a motor and corresponding base stations, but, for three-axis gyroscope, complete each axial performance test, what need to change device axially just can carry out the axial performance measurement of another one, obviously, for the measurement of three axle minisize gyroscopes, change complexity and cost that test has axially increased equipment.
Summary of the invention
An object of the present invention is to provide a kind of proving installation that test axially can complete the test on axially at three of three axle minisize gyroscopes that do not need to change.
The technical solution used in the present invention is: a kind of proving installation of three axle minisize gyroscopes, comprise test suite and the actuator that drives test suite to rotate, the rotating shaft of described actuator and test suite for the interplanar angle of test of three axle minisize gyroscopes to be tested is installed, be α, described α is greater than 0 degree and is less than 90 degree.
Wherein, described test suite comprises testing jig and the testing host of described test plane is provided, the rotation of described actuator drive testing jig; It is vertical with rotating shaft that the rotating shaft that is connected with rotating shaft actuator described testing jig connects plane, and it is relative that the mainboard connection plane connecting with testing host of described testing jig and rotating shaft are connected plane, and with the test plane parallel of testing host.
Wherein, the rotating shaft of described testing jig connects plane and is connected with the rotating shaft of actuator by a ring flange, and the rotating shaft that described rotating shaft connects plane and actuator fits at both sides and the ring flange of ring flange.
Wherein, the mainboard of described testing jig connects plane and is connected with testing host by a testing backboard, wherein, it is parallel to each other that mainboard connects plane, testing backboard and testing host, and testing host is connected plane and fits with the test back side in the both sides of testing backboard with mainboard.
Wherein, an angular transducer is installed on described testing host, described angular transducer axially parallel with the direction of testing plane.
Another object of the present invention is to provide a kind of method of testing of applying above-mentioned proving installation.
The technical solution used in the present invention is: method of testing of the present invention comprises the steps:
Step 1: three axle minisize gyroscopes to be tested are installed in the test plane of test suite, make the z axle of three axle minisize gyroscopes vertical with test plane, x axle and y axle and test plane parallel;
Step 2: make actuator drive test suite to rotate with angular velocity omega;
Step 3: read the angular velocity omega that three axle minisize gyroscopes are exported respectively on z axle, x axle and y axle
z, ω
xand ω
y;
Step 4: judgement angular velocity omega
z, ω
xand ω
ydo you whether equal respectively ω sin α, ω cos α cos γ and ω cos α sin γ? wherein, γ be the rotating shaft of actuator in test the projection in plane and the angle between the x axle of three axle minisize gyroscopes.
Beneficial effect of the present invention is: adopt proving installation of the present invention and method of testing axially can complete the test on axially at three of three axle minisize gyroscopes without changing test, equipment is realized simple, not only reduce the test duration, also reduced the cost of proving installation.
Accompanying drawing explanation
Fig. 1 shows according to the structural representation of a kind of embodiment of the proving installation of three axle minisize gyroscopes of the present invention;
Fig. 2 shows the position relationship between the rotating shaft of actuator and three axles of three axle minisize gyroscopes.
Embodiment
What the proving installation of three axle minisize gyroscopes of the present invention comprised test suite and drove test suite rotation is for example the actuator of motor, as shown in Figure 1, the rotating shaft 11 of this actuator 1 and test suite for the angle of 51, the test plane of three axle minisize gyroscopes to be tested is installed, be α, described α is greater than 0 degree and is less than 90 degree.
As a kind of enforcement structure of test suite, as shown in Figure 1, this test suite can comprise testing jig 3 and the testing host 5 of above-mentioned test plane 51 is provided, motor 1 drive testing jig 3 rotations; It is vertical with rotating shaft 11 that the rotating shaft being connected with rotating shaft 11 motor 1 testing jig 3 connects plane 31, and the mainboard connection plane 32 connecting with testing host 5 of testing jig 3 is connected plane 31 with rotating shaft relative, and parallel with the test plane 51 of testing host 5.This testing jig 3, as the intermediate connector between testing host 5 and motor 1, mainly can prevent from moving interference between testing host 5 and motor 1, affects the degree of accuracy of above-mentioned angle α.
If increase connection assist when assembling and testing device, can improve the degree of accuracy of angle that 51, rotating shaft 11 and test plane is, at this, the rotating shaft of this testing jig 3 connects plane 31 and can be connected with rotating shaft 11 by a ring flange 2, and rotating shaft connects plane 31 and rotating shaft 11 fits at both sides and the ring flange of ring flange 2.In addition, the mainboard of this testing jig 3 connects plane 32 and can be connected with testing host 5 by a testing backboard 4, wherein, it is parallel to each other that mainboard connects plane 32, testing backboard 4 and testing host 5, testing host 5 is connected plane 32 and fits with the test back side 4 in the both sides of testing backboard 4 with mainboard, wherein, the plane parallel fitting with testing backboard of the test plane 51 of testing host and testing host.
When testing, proving installation of the present invention generally makes the rotating shaft 11 along continuous straight runs settings of motor 1, each parts of proving installation for the same along continuous straight runs setting in interconnective installation axle center, and the angle that makes to test between plane and surface level is above-mentioned α.
In order to detect the installation position of each parts of proving installation, can on testing jig 3 and motor 1, along center of rotation separately, one obliquity sensor be installed, according to the output of obliquity sensor, whether the installation position that judges the two meets the demands, if the installation position of each parts all meets the demands, the angle getting final product between basic guarantee test plane 51 and surface level is above-mentioned α.
In addition, also an angular transducer can be installed on testing host, make the axially parallel with the direction of test plane 51 of angular transducer, the output signal value A of angular transducer is always the value along gravity direction, like this, and by judging whether A equals A
0cOS α, can judge, whether this proving installation in use for some time, also can make to test between plane and surface level to be angle α, wherein, and A
0for angular transducer axially along gravity direction time output signal value.Output signal value A
0can determine by the method for averaging after repeatedly measuring.By this angular transducer, can accurately measure proving installation when the Static and dynamic, whether testing host is offset, skew precision generally need to be controlled in 0.2 degree, is particularly controlled in 0.1 degree, and this kind of angular transducer can be for example gravity sensor.
Proving installation of the present invention also can arrange a primary controller and be controlled by the alarm of primary controller, when primary controller, according to the output judgement corresponding component of obliquity sensor and angular transducer, skew occurs, surpass 0.2 degree, primary controller sends alarm operating personnel by alarm and adjusts.
The step of applying the method for testing of above-mentioned proving installation is:
Step 1: three axle minisize gyroscopes to be tested are installed in the test plane 51 of test suite, make the z axle of three axle minisize gyroscopes vertical with test plane, x axle and y axle and test plane parallel; Those skilled in the art should be understood that, this technical characterictic is vertical with test plane with the x axle that makes three axle minisize gyroscopes, y axle and z axle and test plane parallel, and make the y axle of three axle minisize gyroscopes vertical with test plane, z axle and x axle are equal to the parallel plane technical characterictic of test, even if an axle is vertical with test plane, two other axle and test plane parallel;
Step 2: make motor 1 drive test suite to rotate with angular velocity omega, at this, be generally uniform rotation, can certainly certain interval of time (making the time that measurement result is stable) speed change, to provide many group judged results;
Step 3: read the angular velocity omega that three axle minisize gyroscopes are exported respectively on z axle, x axle and y axle
z, ω
xand ω
y;
Step 4: judgement angular velocity omega
z, ω
xand ω
ydo you whether equal respectively ω sin α, ω cos α cos γ and ω cos α sin γ? if equal or deviation in the allowed band of using, illustrate that three axle minisize gyroscopes can normally be used, wherein, as shown in Figure 2, the projection that γ is rotating shaft 11 in test plane (crossing or be parallel to the plane of x axle and y axle) and the angle between the x axle of three axle minisize gyroscopes, γ is conventionally greater than 0 degree and is less than 90 degree, can certainly be 0 degree and 90 degree.
The foregoing is only preferably embodiment of the present invention, be not used for limiting practical range of the present invention, the equivalence of in every case doing in protection scope of the present invention changes and modifies, and all should think and fall in protection scope of the present invention.
Claims (3)
1. the proving installation of an axle minisize gyroscopes, it is characterized in that, comprise test suite and the actuator that drives test suite to rotate, the rotating shaft of described actuator and test suite for the interplanar angle of test of three axle minisize gyroscopes to be tested is installed, be α, described α is greater than 0 degree and is less than 90 degree; Described test suite comprises testing jig and the testing host of described test plane is provided, the rotation of described actuator drive testing jig; It is vertical with rotating shaft that the rotating shaft that is connected with rotating shaft actuator described testing jig connects plane, and it is relative that the mainboard connection plane connecting with testing host of described testing jig and rotating shaft are connected plane, and with the test plane parallel of testing host; The rotating shaft of described testing jig connects plane and is connected with the rotating shaft of actuator by a ring flange, and the rotating shaft that described rotating shaft connects plane and actuator fits at both sides and the ring flange of ring flange.
2. proving installation according to claim 1, it is characterized in that, the mainboard of described testing jig connects plane and is connected with testing host by a testing backboard, wherein, it is parallel to each other that mainboard connects plane, testing backboard and testing host, and testing host is connected plane and fits at both sides and the testing backboard of testing backboard with mainboard.
3. a method of testing for the proving installation described in claim 1 or 2, is characterized in that, comprises the steps:
Step 1: three axle minisize gyroscopes to be tested are installed in the test plane of test suite, make the z axle of three axle minisize gyroscopes vertical with test plane, x axle and y axle and test plane parallel;
Step 2: make actuator drive test suite to rotate with angular velocity omega;
Step 3: read the angular velocity omega that three axle minisize gyroscopes are exported respectively on z axle, x axle and y axle
z, ω
xand ω
y;
Step 4: judgement angular velocity omega
z, ω
xand ω
ywhether equal respectively ω sin α, ω cos α cos γ and ω cos α sin γ, wherein, γ be the rotating shaft of actuator in test the projection in plane and the angle between the x axle of three axle minisize gyroscopes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110453332.1A CN102564456B (en) | 2011-12-29 | 2011-12-29 | Device and method for testing three-axis micro gyroscope |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110453332.1A CN102564456B (en) | 2011-12-29 | 2011-12-29 | Device and method for testing three-axis micro gyroscope |
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| Publication Number | Publication Date |
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| CN102564456A CN102564456A (en) | 2012-07-11 |
| CN102564456B true CN102564456B (en) | 2014-12-03 |
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Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103389112B (en) * | 2013-07-16 | 2016-06-01 | 安徽北方芯动联科微系统技术有限公司 | Three axle minisize gyroscopes test set and testing method thereof |
| CN107289969A (en) * | 2016-04-01 | 2017-10-24 | 南京理工大学 | A kind of MEMS inertial sensor automatic batch scaling method and system |
| TWI686610B (en) * | 2016-08-12 | 2020-03-01 | 國家中山科學研究院 | Calibration system of inertial measurement device |
| CN106594473A (en) * | 2016-12-28 | 2017-04-26 | 沈阳圣飞航空科技有限公司 | Portable three-axis fully-automatic rotary table |
| US10466067B2 (en) * | 2017-01-19 | 2019-11-05 | The Boeing Company | System and method for gyro rate computation for a Coriolis Vibrating Gyroscope |
| CN109506673B (en) * | 2017-09-15 | 2022-08-19 | 神讯电脑(昆山)有限公司 | Gyroscope detection device |
| CN110044383B (en) * | 2019-04-30 | 2024-01-26 | 安徽芯动联科微系统股份有限公司 | Triaxial microsensor high-low temperature testing device and testing method thereof |
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| CN1554991A (en) * | 2003-12-25 | 2004-12-15 | 中国科学院长春光学精密机械与物理研 | AC motor driven analogue three shaft rocking device |
| CN1821721A (en) * | 2006-03-27 | 2006-08-23 | 北京航空航天大学 | Precise decoupling detecting method for gyroscope scale factor and input shaft default angle |
| CN101509785A (en) * | 2009-03-16 | 2009-08-19 | 浙江大学 | Misalignment evaluating method for optical fibre gyro input axis |
| CN102062589A (en) * | 2010-12-16 | 2011-05-18 | 浙江省计量科学研究院 | Fiber-optic gyroscope based angular displacement measuring device and method |
| CN202471088U (en) * | 2011-12-29 | 2012-10-03 | 深迪半导体(上海)有限公司 | Test device for triaxial miniature gyroscope |
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2011
- 2011-12-29 CN CN201110453332.1A patent/CN102564456B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1554991A (en) * | 2003-12-25 | 2004-12-15 | 中国科学院长春光学精密机械与物理研 | AC motor driven analogue three shaft rocking device |
| CN1821721A (en) * | 2006-03-27 | 2006-08-23 | 北京航空航天大学 | Precise decoupling detecting method for gyroscope scale factor and input shaft default angle |
| CN101509785A (en) * | 2009-03-16 | 2009-08-19 | 浙江大学 | Misalignment evaluating method for optical fibre gyro input axis |
| CN102062589A (en) * | 2010-12-16 | 2011-05-18 | 浙江省计量科学研究院 | Fiber-optic gyroscope based angular displacement measuring device and method |
| CN202471088U (en) * | 2011-12-29 | 2012-10-03 | 深迪半导体(上海)有限公司 | Test device for triaxial miniature gyroscope |
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Application publication date: 20120711 Assignee: Danyang deep well Microelectronics Technology Co., Ltd. Assignor: Senodia Semiconductor (Shanghai) Co., Ltd. Contract record no.: 2012320000413 Denomination of invention: Device and method for testing three-axis micro gyroscope License type: Common License Record date: 20120406 |
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