CN102553753A - Thin film spray coating machine and thin film preparation method - Google Patents
Thin film spray coating machine and thin film preparation method Download PDFInfo
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- CN102553753A CN102553753A CN2011104585237A CN201110458523A CN102553753A CN 102553753 A CN102553753 A CN 102553753A CN 2011104585237 A CN2011104585237 A CN 2011104585237A CN 201110458523 A CN201110458523 A CN 201110458523A CN 102553753 A CN102553753 A CN 102553753A
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Abstract
The invention discloses a thin film spray coating machine, which comprises a spray head, and is characterized in that: the spray head is fixed on a three-dimensional adjusting frame and can move in a three-dimensional way; a post-treatment tank is arranged below the spray head; the bottom of the post-treatment tank is provided with a heat conducting plate; an electric heating plate is arranged below the heat conducting plate; and the post-treatment tank and a cover plate form a closed space. The invention also discloses a thin film preparation method, which comprises the following steps of: spray coating in the post-treatment tank to form a thin film; and then directly performing solvent vapor infiltration post-treatment on the thin film in the post-treatment tank. The thin film spray coating machine provided by the invention can be used for preparing a large-area thin film with uniform thickness, small error, high accuracy and adjustable shape and has high filming repeatability. Heating and solvent infiltration treatment functions are integrated; and laboratory film preparation and small-scale industrial film preparation are facilitated.
Description
Technical field
The present invention relates to film preparation and post processing field, specifically is a kind of thin film coatings machine and method for manufacturing thin film.
Background technology
Spraying technology is after utilizing spraycan such as spray gun the coating atomizing, to be ejected into the coating process that is coated with on the workpiece.Generally be used in fields such as five metals, plastic cement, family property, military project, boats and ships.In recent years, also be widely used in large tracts of land organic photovoltaic film preparation field.But existing spray equipment all has its specific use object, has limitation in change film morphology field, is not suitable for preparation organic photovoltaic film.Shown in advanced function material (Adv. Funct. Mater, 2010,20,3538) document; Film observation under AFM of electrostatic coating method preparation generally is bulky grain island pattern, sees Fig. 1, and this structure is unfavorable for the separation of electric charge carrier; And use another kind of solvent gas to carry out the film surface post processing, and can eliminate this phase separation structure, see Fig. 2; What film became is fine and close compact, and device efficiency has improved 9 times, improves the organic photovoltaic devices performance greatly.But; The general method that obtains solvent atmosphere has two kinds: a kind of is with the filter paper parcel film substrate of dipping in solvent; Through solvent spontaneous evaporation mode film surface is carried out modification; Another kind is to be put in substrate in the beaker that fills solvent, is put in beaker in the common supersonic wave cleaning machine and produces solvent atmosphere, and these two kinds the method operation is very loaded down with trivial details and condition is wayward.
Application number is that 02150786.4 Chinese invention patent discloses a kind of scanning means that sprays scanning large tracts of land homogeneous transparent conductive film.Spray deposited large tracts of land homogeneous transparent conductive film scanning means belongs to the Application of Solar Energy field.Accomplish the master unit of heating process and spraying process, the auxiliary unit of completion annealing function, the arranged side by side successively or capable arrangement of L of auxiliary unit with the function of preheating; Auxiliary unit with the function of preheating is positioned at master unit one side of accomplishing heating process and spraying process; The auxiliary unit of accomplishing the annealing function is positioned at the opposite side of the master unit of accomplishing heating process and spraying process; Accomplish the transmission of glass substrate between each unit by manipulator; Master unit comprises: substrate warming portion, shower nozzle part, these two parts are separated from each other.The SnO that adopts this invention to obtain
2The square resistance of transparent conductive film can reach 4W/; Transmitance reaches 90%; The thickness at thin film center and edge, electrical properties unevenness be less than 10%, adopts the device of substrate warming portion and shower nozzle part (two) cooperation can obtain thickness, electrical properties unevenness less than 5% ultra uniform transparent conductive film.
Application number is the equipment that the Chinese invention patent of 200810012913.X discloses a kind of shaping compound proton exchange film by spray coating, comprises workbench, basement membrane control system, spray gun transmission system, spraying and feeding system and accessory system.Basement membrane control system comprises steel framework, cylinder, support bar and servomotor; The spray gun transmission system comprises servomotor, screw mandrel, mechanical arm; Spraying and feeding system comprise spray gun, hopper, magnetic valve, liquid pump and air supply system; Accessory system comprises heating platform and vavuum pump; Transmission framework leg, heating platform and cylinder are fixed on the workbench.The advantage of this invention is: process route is simple, is convenient to realize large-scale production, and production efficiency is high, and the control technology of expanded PTFE microporous membrane is simple; The compound proton exchange membrane of use spraying equipment moulding can be realized accurate control to the thickness and the structure of PEM, has higher repeatability.
Application number is spray equipment and the spraying method thereof that 201010126040.2 Chinese invention patent discloses a kind of liquid material film, belongs to the semiconductor device production field.Guarantee enough atomizing flows when obtaining enough thin ultrasonic atomizatio liquid particles for solution, said spray equipment comprises: the atomizing container; Ultrasonic oscillator is used to carry out the ultrasonic atomizatio operation; The fluent material input unit is used to feed liquid charging stock; The carrier gas input unit is used to feed carrier gas, and said carrier gas is used for mixing formation fog with the particle of said fluent material atomizing back row; The fog output device is used to export said fog; Nozzle is used to receive fog and it is sprayed on wafer to be sprayed.This technical scheme possesses characteristic: each functional module independently is provided with in the scheme, improves device whole ability to work and efficient; Significantly reduce the waste of fluent material, and then reduce environmental pollution; Can obtain thinner more uniformly spraying effect, produce thinner, the better fluid film of the uniformity; Can spray step surface.
Application number is that 201010129104.4 Chinese invention patent discloses a kind of liquid material film spray equipment and method based on ultrasonic vibration table, belongs to technical field of semiconductors.For improving the uniformity that applies film, this invention provides a kind of fluent material applying device based on ultrasonic vibration table, comprises that nozzle moving mechanism is used for moving ultrasonic atomizing nozzle, and ultrasonic atomizing nozzle is used for atomized liquid and forms fine droplets; Device adsorbing mechanism spare is arranged at the ultrasonic wave atomizing nozzle below, is used for the fixing substrate device to be sprayed of absorption; The ultrasonic vibration member is arranged at device adsorption element lower end, is used for substrate device to be sprayed is carried out the vibration of above-below direction.Through this method, when the uniformity of coating the photoresist of wafer increases, use amount with photoresist reduce greatly, and consequent environmental problem has also reduced.
In the existing thin film coatings machine; The employing ultrasonic vibration shower nozzle that has strengthens atomizing effect; The employing ultrasonic vibration chip bench that has increases film equality, soak into functional unit and change film surface appearance but solvent all is set, the closed environment that becomes film to move on to have the solvent vapour atmosphere just can carry out the solvent post processing; Become artificially to damage film in the film substrate process moving, influence film quality.
Summary of the invention
The present invention is directed to the prior art deficiency, the thin film coatings that a kind of film-forming temperature is even, film morphology is controlled machine is provided.
The present invention also provides a kind of method for manufacturing thin film.
A kind of thin film coatings machine; Comprise shower nozzle, it is characterized in that: shower nozzle is fixed on the three-dimensional trim holder, and shower nozzle can three-dimensional motion; The below of shower nozzle is provided with rear treating groove; The bottom of rear treating groove is a heat-conducting plate, is provided with electric hot plate below the heat-conducting plate, and rear treating groove and cover plate can form confined space.
Further, electric hot plate below be provided with thermal insulation board.
Further, three-dimensional trim holder is the three-D electric adjustment rack.
Further, also comprise controller, the three-D electric adjustment rack is controlled by the controller.
Further, also comprise the temperature sensor of the temperature that is used to detect heat-conducting plate, controller is controlled the electric current of electric hot plate according to the temperature signal of temperature sensor.
Further, cover plate is fixed on the three-D electric adjustment rack, only can move by one dimension.
Further, be provided with solvent bottle in the rear treating groove.
Further, the bottom or the side of solvent bottle are provided with supersonic generator, and supersonic generator is controlled by the controller; Perhaps the arranged outside at solvent bottle has the electrical heating cover, and the electrical heating cover is controlled by the controller, and can also the supersonic generator that be controlled by the controller be set in the bottom of solvent bottle simultaneously.
A kind of method for manufacturing thin film is characterized in that, adopts above-mentioned thin film coatings machine, and at first spraying forms film in rear treating groove, directly in rear treating groove, film is carried out solvent vapour then and soaks into post processing.
Among the present invention, rear treating groove and cover plate can be formed confined space, after spraying is accomplished, can carry out solvent vapour to film and soak into post processing.Through the temperature of temperature sensor detection heat-conducting plate, the electric current that passes through controller adjusting electric hot plate then is to realize constant temperature.
Electric hot plate uses the METAL HEATING PROCESS silk that gathers as heating source, encapsulates with stainless sheet steel with empire cloth parcel back.
The three-D electric adjustment rack is made up of orthogonal three axles in twos, respectively by first motor, second motor, the 3rd motor through the transmission of feed screw nut's mode, can be according to demand adjustment movement speed and track route within the specific limits.
Shower nozzle is an automatics, and through the air solenoid control, solution adopts the self-priming mode, can pass through Flow-rate adjustment knob regulator solution flow velocity.
Through the program setting, the use that can artificial set parts such as electric hot plate, supersonic generator, electrical heating cover whether with order and time parameter, the movement velocity and the track route of shower nozzle can artificial be set.
The control method of above-mentioned thin film coatings machine:
1) through the keyboard in the controller spraying scope, speed and track route are set.
2) use that electric hot plate, supersonic generator and electrical heating cover is set through the keyboard in the controller whether, parameter and sequencing.
3) controller is controlled parts such as first motor, second motor, the 3rd motor, shower nozzle, electric hot plate and is accomplished spraying process according to the parameter that is provided with.
4) controller is accomplished the solvent post processing according to parts such as the parameter control electric hot plate that is provided with, supersonic generator, electrical heating covers, effectively changes film morphology.
The present invention can realize that solvent soaks into post-processing function, is convenient to after film forming the film surface modification.Controller is accomplished in rear treating groove according to setup parameter automatically, avoids introducing in the moving process uncertain factor.
The present invention sets gradually thermal insulation board, electric hot plate, heat-conducting plate on pedestal, make film forming substrate surface Controllable Temperature and more even, and it is little to fluctuate, and directly in rear treating groove, carrying out annealing in process after the film forming, is convenient to form high conforming film.
Rear treating groove uses stainless sheet steel to process among the present invention, has good corrosion resistance, is convenient to clean.Cover plate uses sheets of glass, is convenient to observe and clean.
The present invention adopts stepper motor to drive the transmission of feed screw nut's mode, and the control shower nozzle is at three-dimensional space motion, and is simple in structure, and precision is high, and cost is low.
The present invention adopts automatic nozzle, whether sprays through air solenoid control shower nozzle, imports solution with the self-priming mode, can pass through Flow-rate adjustment knob controlling liquid inventory.The factor that has varied with each individual when having got rid of hand spray, repeatability is better.
The present invention is simple to operate, can prepare the large area film that thickness is even, error is little, precision is high, shape is adjustable, the film forming good reproducibility.Integrated heating and solvent soak into processing capacity, effectively change film morphology, are convenient to laboratory and Small Scale Industry system film.
Description of drawings
Fig. 1 is the spray-coated film surface topography;
Fig. 2 is that film carries out the surface topography after the solvent surface modification among Fig. 1;
Fig. 3 is one of flush coater structural representation;
Fig. 4 is two of a flush coater structural representation;
Fig. 5 connects sketch map for spray unit;
Fig. 6 is electrical heating cover scheme of installation;
Fig. 7 is the supersonic generator scheme of installation;
Shown in the figure: 1: the first motor; 2: the second motors; 3: the three motors; 4: the first handwheels; 5: the second handwheels; 6: the three handwheels; 7: pedestal; 8: thermal insulation board; 9: electric hot plate; 10: heat-conducting plate; 11:x axle left side polished rod; The right polished rod of 12:x axle; 13:y axle left side polished rod; 14:y axial filament bar; The right polished rod of 15:y axle; 16: the Flow-rate adjustment knob; 17: the right side pinching screw; 18: the right side clamp; 19: the solution pipe interface; 20: the compression gas pipe interface; 21: shower nozzle; 22: rear treating groove; 23: supersonic generator; 24: left portal frame; 25: right portal frame; 26: cover plate; 27: flange; 28: shaft coupling; 29: the left side pinching screw; 30: the left side clamp; 31: the solution bottle; 32: the air magnetic valve; 33: atomization air flow; 34: become film substrate; 35: high-pressure air source; 36: controller; 37 solvent bottles; 38 solvents; 39 electrical heating covers.
The specific embodiment
To shown in Figure 5, the thin film coatings machine that relates among the present invention mainly is made up of three-D electric adjustment rack, rear treating groove 22, cover plate 26 and controller 36 etc. like Fig. 3.Through controller 36 control first motor 1, second motor 2 and the 3rd motor 3, thereby realize the motion of shower nozzle 21 in three dimensions; Unlatching through controller 36 control supersonic generators 23 and/or electrical heating cover 39; Switching through air magnetic valve 32 control shower nozzles; Be controlled to the temperature of film substrate 34 through temperature sensor (not shown) and electric hot plate 9.
As shown in Figure 5, solution pipe interface 19 connects solution bottle 31, air magnetic valve 32 1 termination compressed air interface tubes 20, another termination high-pressure air source 35, the switching of controller 36 control air magnetic valves 32.When air magnetic valve 32 was connected, high pressure gas sprayed to into film substrate 34 surfaces through shower nozzle 21, and formed negative pressure at solution pipe interface 19 places solution is sucked, shower nozzle 21 with become formation atomization air flow 33 between the film substrate 34.Can the regulator solution flow velocity through Flow-rate adjustment knob 16.The three-D electric adjustment rack drives shower nozzle 21 and in three dimensions, moves, thereby is becoming the film that forms desired thickness and shape on the film substrate 34.
The three-D electric adjustment rack is made up of orthogonal three axles in twos, respectively with stepper motor through the transmission of feed screw nut's mode.Second motor 2 is fixed on the left portal frame 24 through flange 27, connects y axial filament bars 14 through shaft coupling 28, on the y axle under polished rod 13 and the y axle polished rod 15 play the effect of location, load-bearing and balance, other diaxons also are above-mentioned connected modes.First handwheel 4 and second handwheel 5 connect corresponding screw mandrel, and the 3rd handwheel 6 is connected on the 3rd motor 3 afterbodys for handled easily, is convenient to the position of manual adjustments shower nozzle 21.
Rear treating groove 22 usefulness stainless sheet steels are prepared from, and its bottom is a heat-conducting plate 10.Stainless sheet steel heat conduction is good, and antiseptic property is strong, is convenient to clean.Solution splashes in the spraying process, and rear treating groove 22 has played the effect that intercepts the solution that splashes simultaneously.Rear treating groove 22 can form confined space with cover plate 26, guarantees the post processing closed environment.Become film substrate 34 to place rear treating groove 22.
Rear treating groove 22 inner fixing all around one or more solvent bottles 37 that have supersonic generator 23 and/or electrical heating cover 39; Solvent in the solvent bottle 37 is carried out ultrasonic atomizatio processing and/or electrical heating atomizing processing; The solvent gas molecular energy that is produced further carries out modification to film surface, obtains desirable film morphology.
In the spraying process, left portal frame 24 drives cover plate 26 with right portal frame 25 and moves to the stroke end, and cover plate 26 is close to rear treating groove 22 upper surfaces, forms a confined space with rear treating groove 22.Treat the post processing completion, first motor 1 drives shower nozzle 21 and cover plate 26 returns initial position again, is convenient to take out into film substrate 34.
Heat treatment and solvent soak into the organic polymer solar cell properties of handling the solwution method preparation to be influenced very big.Thin film coatings machine of the present invention is integrated, and heating function and solvent soak into processing capacity; In spraying process, can directly heat-treat film; Can directly heat-treat film and/or the processing of solvent surface infiltration after accomplishing spraying, reduce intermediate link, quality of forming film is higher; Device efficiency based on spray-coated film technology is able to promote, and repeatability is better.
Solution impregnation is handled, and promptly places certain hour under the solvent gas environment to the film with the solwution method preparation, and film surface dissolves once more, thereby film morphology is changed.If institute's solvent boiling point of containing is higher in the solvent bottle 37, available electrical heating is overlapped 39 and is wrapped up solvent bottles, also supersonic generator 23, accelerated solvent evaporation rate can be set in the bottom of solvent bottle 37 simultaneously.If the boiling point of the solvent of containing is lower in the solvent bottle 37, directly electricity consumption heating jacket 39 quickens to produce the solvent gas molecule, carries out film surface modification post processing.
The track route of shower nozzle 21 generally adopts " bow " font route, and spray area is overlapping 50% between adjacent two, so can obtain the uniform film of thickness, is equipped with post-processing function and can makes film surface more smooth, and inside is fine and close more, and pattern is easier to regulation and control.
Claims (10)
1. thin film coatings machine; Comprise shower nozzle (21), it is characterized in that: shower nozzle (21) is fixed on the three-dimensional trim holder, and shower nozzle (21) can three-dimensional motion; The below of shower nozzle (21) is provided with rear treating groove (22); The bottom of rear treating groove (22) is heat-conducting plate (10), is provided with electric hot plate (9) below the heat-conducting plate (10), and rear treating groove (22) and cover plate (26) can form confined space.
2. thin film coatings machine according to claim 1, it is characterized in that electric hot plate (9) below be provided with thermal insulation board (8).
3. thin film coatings machine according to claim 2 is characterized in that three-dimensional trim holder is the three-D electric adjustment rack.
4. thin film coatings machine according to claim 3 is characterized in that also comprising controller, and the three-D electric adjustment rack is controlled by the controller.
5. thin film coatings machine according to claim 4 is characterized in that also comprising the temperature sensor of the temperature that is used to detect heat-conducting plate (10), and controller is controlled the electric current of electric hot plate (9) according to the temperature signal of temperature sensor.
6. thin film coatings machine according to claim 5 is characterized in that cover plate (26) is fixed on the three-D electric adjustment rack, only can move by one dimension.
7. according to each described thin film coatings machine of claim 1 to 6, it is characterized in that being provided with in the rear treating groove (22) solvent bottle (37).
8. thin film coatings machine according to claim 7 is characterized in that the bottom of solvent bottle (37) is provided with supersonic generator (23), and supersonic generator (23) is controlled by the controller.
9. thin film coatings machine according to claim 8 is characterized in that the arranged outside of solvent bottle (37) has electrical heating cover (39), and electrical heating cover (39) is controlled by the controller.
10. a method for manufacturing thin film is characterized in that, adopts the said thin film coatings machine of claim 7, and at first spraying forms film in rear treating groove, directly in rear treating groove, film is carried out solvent vapour then and soaks into post processing.
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| CN104890266A (en) * | 2015-04-14 | 2015-09-09 | 上海森韦得实业有限公司 | Film production technology and processing equipment thereof |
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| CN104338626B (en) * | 2013-08-07 | 2019-01-04 | 江西众光照明科技有限公司 | A kind of spraying demoulding equipment of LED encapsulation |
| CN104890266B (en) * | 2015-04-14 | 2017-08-01 | 上海森韦得实业有限公司 | Film production process and process equipment |
| CN104890266A (en) * | 2015-04-14 | 2015-09-09 | 上海森韦得实业有限公司 | Film production technology and processing equipment thereof |
| CN105032647A (en) * | 2015-06-17 | 2015-11-11 | 江苏大学 | Electrostatic liquid medicine spraying platform |
| CN106238248A (en) * | 2016-08-09 | 2016-12-21 | 广西佳华医疗卫生用品有限公司 | Laundry sheet monolithic spraying process units |
| CN106238248B (en) * | 2016-08-09 | 2018-11-23 | 台州知通科技有限公司 | Laundry sheet monolithic sprays process units |
| CN106611637A (en) * | 2016-10-28 | 2017-05-03 | 郑州大学 | Device and method for continuous large-scale preparation of transparent conductive film |
| CN106816637A (en) * | 2017-01-16 | 2017-06-09 | 王奉瑾 | A kind of system for preparing graphene battery |
| CN106848369A (en) * | 2017-01-16 | 2017-06-13 | 王奉瑾 | A kind of equipment for preparing graphene battery |
| CN106847538A (en) * | 2017-01-16 | 2017-06-13 | 王奉瑾 | A kind of equipment that Graphene electric capacity is prepared based on laser battle array mirror |
| CN106848370A (en) * | 2017-01-16 | 2017-06-13 | 王奉瑾 | A kind of equipment that graphene battery is prepared based on laser battle array mirror |
| CN107068418A (en) * | 2017-01-16 | 2017-08-18 | 王奉瑾 | A kind of system for preparing graphene electric capacity |
| CN106898505A (en) * | 2017-01-16 | 2017-06-27 | 王奉瑾 | A kind of equipment for preparing Graphene electric capacity |
| CN106940244A (en) * | 2017-02-14 | 2017-07-11 | 中国航天空气动力技术研究院 | A kind of shear-sensitive liquid crystal coating production |
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| CN107744894B (en) * | 2017-11-29 | 2019-09-17 | 南通贝思特机械工程有限公司 | A kind of spray equipment and its application method with reparation recess function |
| CN108789791A (en) * | 2018-08-06 | 2018-11-13 | 江西佳宇陶瓷有限公司 | A kind of right angle watt production dyeing apparatus with drying function |
| CN109795112A (en) * | 2019-01-31 | 2019-05-24 | 厦门瑶光半导体科技有限公司 | Ultrasonic 3D jet printing appts and its purposes for being used to prepare transparent conductive film |
| CN110548636A (en) * | 2019-09-05 | 2019-12-10 | 大连理工大学 | Automatic spraying device for preparing film material |
| CN113275173A (en) * | 2021-05-16 | 2021-08-20 | 西北工业大学 | Electrostatic spraying device and method for preparing large-area thin film by adopting same |
| CN115971003A (en) * | 2022-12-29 | 2023-04-18 | 王道胜 | Photovoltaic film assembly coating process |
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| CN102553753B (en) | 2014-07-02 |
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