CN101318166A - Ultrasonic spray generator special for preparing large-area transparent conductive film - Google Patents

Ultrasonic spray generator special for preparing large-area transparent conductive film Download PDF

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Publication number
CN101318166A
CN101318166A CNA2008100535044A CN200810053504A CN101318166A CN 101318166 A CN101318166 A CN 101318166A CN A2008100535044 A CNA2008100535044 A CN A2008100535044A CN 200810053504 A CN200810053504 A CN 200810053504A CN 101318166 A CN101318166 A CN 101318166A
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CN
China
Prior art keywords
casing
ultrasonic
transparent conductive
spray generator
conductive film
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Pending
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CNA2008100535044A
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Chinese (zh)
Inventor
赵庚申
郭天勇
梁凯
王庆章
赵二刚
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Nankai University
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Nankai University
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Priority to CNA2008100535044A priority Critical patent/CN101318166A/en
Publication of CN101318166A publication Critical patent/CN101318166A/en
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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Abstract

The invention discloses a special ultrasonic spray generator for preparing large-area transparent conductive membrane, comprising a case and a plurality of ultrasonic atomizers arranged on the soleplate at the bottom of the case; outer flange is arranged at periphery of the top of the case; an upper cover is arranged on the outer flange at the top of the case; at the same time a corrosion-resistant rubber insert is arranged between the upper cover and the outer flange of the case; a carrier gas inlet is arranged on a side of the case; besides, foundation bolts are arranged at the four sides at the bottom of the case; the upper cover of the case is hermetically connected with the case through bolts and the corrosion-resistant rubber insert; the carrier gas inlet, a solution inlet and a spray outlet are respectively arranged on the upper cover of the case; the plurality of ultrasonic atomizers are corrosion-resistant ultrasonic atomizers. The ultrasonic spray generator provided by the invention arranges a plurality of corrosion-resistant atomizers in the case to be directly contacted with chemical solution, has the advantages of even solution pulverization and high spray efficiency, and can meet the requirements for preparing the large-area transparent conductive membrane effectively and stably.

Description

Preparation large-area transparent conductive film ultrasonic spray generator special
Technical field
The present invention relates to optoelectronic thin-film material film plating field, particularly relate to a kind of preparation large-area transparent conductive film ultrasonic spray generator special.
Background technology
Amorphous silicon thin-film solar cell has good Semiconductor Optic Electronics performance, and low-cost, large-scale produce make it with the competition of other semiconductor devices in have outstanding advantage, in addition, the hull cell manufacturing process technology is simple, be convenient to the large tracts of land serialization and produce, and the nesa coating needed material on basis the most that is thin-film solar cells.
The solar cell nesa coating is a kind of transparent semiconductor material, has excellent optics and electric property, has broad application prospects in other electronic device, display device and building material field.The major sedimentary technology that present preparation solar cell nesa coating is adopted is the chemical vapour deposition technique (based on Low Pressure Chemical Vapor Deposition LPCVD and plasma chemical vapor deposition PECVD) under physical gas phase deposition technology (specifically based on radio frequency and magnetically controlled DC sputtering) and the vacuum condition.In view of chemical vapor deposition (CVD) technology devices needed complexity, and carry out conducting film production cost height, the production cost of therefore present solar cell nesa coating remains the bottleneck of solar cell large-scale promotion application.
Ullrasonic spraying fast deposition technology utilizes the ins and outs of the vaporific particle of nanometer in chemical membrane to improve the deficiency of conventional deposition greatly.The method that this technology prepares the solar cell nesa coating adopts ultrasonic atomizatio fast deposition technology, compares with other coating process, and this technology has production equipment, technology is simple; The advantage of uniformity and good reproducibility, and its manufacturing process can reach the effect identical with other coating method, can be the Chinese invention patent of ZL99116819.4 referring to the patent No. specifically.But, because ultrasonic spray generator power that this patent of invention adopted is little, and ultrasonic wave must penetrate the special-purpose bottle that hazes, so its efficient that hazes is low, and being not suitable for preparing large-area transparent conductive film, it only can be used by small size test in the laboratory at present.
Summary of the invention
In view of this, the purpose of this invention is to provide the high preparation large-area transparent conductive film ultrasonic spray generator special of a kind of efficient that hazes, can realize efficiently, stably prepare large-area transparent conductive film.
For this reason, the invention provides a kind of preparation large-area transparent conductive film ultrasonic spray generator special, comprise casing and a plurality of ultrasonic atomizers that are installed on the bottom half base plate, be provided with flanging around at described casing top, on the flanging of described casing top, loam cake is installed, simultaneously between the flanging of described casing and described loam cake, the anti-corrosive rubber pad is installed, is provided with carrier gas inlet, be respectively arranged with lower margin on bottom half four limits in addition in described casing side; Described box cover is connected with box sealing by bolt, anti-corrosive rubber pad; Be respectively arranged with carrier gas inlet, solution inlet port and spray outlet on described box cover, described a plurality of ultrasonic atomizers are the ultrasonic atomizer of corrosion resistant type.
Preferably, the box bottom that is used for fixing described ultrasonic atomizer is a polyethylene board.
Preferably, described ultrasonic atomizer is fixed at the base plate reverse side of described casing by self-tapping screw, and described self-tapping screw exceeds with the base plate front that does not see through described casing 1.
Preferably, described flanging is tightly connected by described bolt, described anti-corrosive rubber pad and described loam cake.
Preferably, the material of described casing flanging and loam cake is transparent polyethylene.
Preferably, be provided with the carrier gas inlet that is threaded in described casing side.
Preferably, the described solution inlet port and the plug that cover setting on described are threaded, and described spray outlet is connected with the jet pipe threaded one end, and the described jet pipe other end is connected with a nozzle.
By above technical scheme provided by the invention as seen, casing is interior directly to be contacted with chemical solution ultrasonic spray generator provided by the invention because a plurality of corrosion resistance atomizers of employing are installed in, thereby make that the solution atomization in the ultrasonic spray generator is very even, and must penetrate and carry out solution atomization after atomizing bottle owing to need not the existing ullrasonic spraying method ultrasonic wave of picture, but the ullrasonic spraying precursor aqueous solution is directly poured in the ultrasonic spray generator casing, thereby can be so that the atomizing of precursor aqueous solution is very even, and make atomization quantity increase, and ultrasonic spray generator of the present invention is to the atomization process inactivity loss of precursor aqueous solution, thereby ultrasonic spray generator provided by the invention can supply large-area nozzle continuous operation, and it is big to have power, the efficient height, atomizing is the characteristics of even good stability all.
In addition, because the loam cake and the side of ultrasonic spray generator of the present invention are provided with two orthogonal carrier gas air inlets, more evenly simultaneously can be thereby make so that the increasing of the adjustable range of carrier gas flux improves the precision that carrier gas is regulated in atomizing.And a plurality of ultrasonic atomizers that ultrasonic spray generator of the present invention comprised can all be worked, and also can partly work according to the power needs, and therefore ultrasonic spray generator of the present invention is flexible and convenient to use, and the adjusting range of atomization quantity is big.
Description of drawings
Fig. 1 is a kind of stereogram for preparing the large-area transparent conductive film ultrasonic spray generator special provided by the invention.
Among the figure: casing 1 loam cake 2 ultrasonic atomizers 3 carrier gas inlet 4 solution inlet port 5 spray outlet 6 lower margins 7 anti-corrosive rubber pads 8 flangings 9 bolts 10
The specific embodiment
In order to make those skilled in the art person understand the present invention program better, the present invention is described in further detail below in conjunction with drawings and embodiments.
Fig. 1 is a kind of stereogram for preparing the large-area transparent conductive film ultrasonic spray generator special provided by the invention, referring to Fig. 1, large-area transparent conductive film ultrasonic spray generator provided by the invention includes: casing 1 and 18 ultrasonic atomizers 3 that are installed on described casing 1 bottom base panel, be positioned at described casing 1 top flanging 9 all around, be installed on the loam cake 2 on the described flanging 9, at the flanging 9 of described casing 1 and the anti-corrosive rubber pad 8 between the described loam cake 2, the carrier gas inlet 4 that on the side of described casing 1 and described loam cake 2, is provided with, spray outlet 6 and solution set on the loam cake 2 of described casing 1 enter the mouth 5, and the lower margin 7 that is positioned at four limits, described casing 1 bottom.
Need to prove that described spray outlet 6 is connected with the threaded one end of a jet pipe, and also is connected with a nozzle at the other end of described jet pipe, realize spraying at last by described nozzle.
Ultrasonic spray generator of the present invention power-on after pouring precursor aqueous solution into, thereby this solution is atomizing rapidly under the effect of the ripple of overfulfiling a production target, after gas to be atomized is full of the whole box body of this ultrasonic spray generator, open the carrier gas source of the gas, thereby the carrier gas that makes the carrier gas source of the gas be imported is being carried atomization gas from spray outlet 6 ejections.
Characteristics of the present invention are: ultrasonic spray generator of the present invention is after connecting power supply, solution of dress can atomize rapidly under action of ultrasonic waves in it, after gas to be atomized is full of whole generator casing, make carrier gas enter casing 1 respectively by opening the carrier gas source of the gas by orthogonal carrier gas inlet 4, thereby make carrier gas carry atomization gas from spray outlet 6 ejections, is connected by the jet pipe that links to each other with spray outlet 6 then and enters nozzle, thereby final the realization sprayed.
In view of present general ullrasonic spraying method is with the solution atomizing bottle of packing into; The bottle that will atomize then is placed in the ultrasonic atomizer that adds clear water, makes ultrasonic wave penetrate the purpose that the atomizing bottle reaches solution atomization.This ullrasonic spraying method atomizes to solution owing to making ultrasonic wave penetrate the atomizing bottle, so the atomizing effect of this method is undesirable, and hyperacoustic power loss is bigger.And ultrasonic spray generator of the present invention is owing to adopt the ultrasonic atomizer of corrosion resistant type, thereby the present invention need not to carry out depositing of precursor aqueous solution by the atomizing bottle, atomize in the ultrasonic spray generator casing and the ullrasonic spraying precursor aqueous solution directly can be poured into, thereby can be, and make atomization quantity increase so that the atomizing of precursor aqueous solution is very even.Because the solution atomization process of ultrasonic spray generator of the present invention is directly carried out in atomizer, therefore the atomization process inactivity loss of being carried out, thereby mean the ultrasonic spray generator provided by the invention efficient height that hazes, can be for the work of spraying continuously of large-area nozzle.Therefore in concrete practice, ultrasonic spray generator of the present invention can satisfy the demand of preparation large-area transparent conductive film.
In the concrete production practices, the casing of ultrasonic spray generator of the present invention can be set to: length is 450mm (millimeter), and width is 230mm, highly is 180mm.Ultrasonic spray generator of the present invention is provided with 18 ultrasonic atomizers at bottom half, and carrying out reverse side with self-tapping screw by base plate fixes, it is positive and do not leak solution and be as the criterion not see through the base plate of described casing 1 with screw, on the specific implementation, fixedly can to adopt thickness be the polyethylene board of 20mm to the box bottom of ultrasonic atomizer (3), the atomization quantity of each atomizer can be 300ML/H (milliliter/hour), operating frequency is 1.7MHZ (megahertz), operating current is 800MA (milliampere), and the power supply of atomizer all is connected in parallel, and is powered by the dc source of 24V.
Need to prove that on specific implementation, the dc source of the required use of ultrasonic spray generator provided by the invention can be selected the commercially available prod for use, in addition, the circuit of ultrasonic spray generator provided by the invention is simple, can make by oneself.
Introduce the concrete course of work of ultrasonic spray generator provided by the invention below:
At first, pour in the casing 1 of ultrasonic spray generator of the present invention by solution inlet port 5, screw the plug on the solution inlet port 5 then configuring a certain amount of ullrasonic spraying precursor aqueous solution;
After pouring precursor aqueous solution into and opening the ultrasonic spray generator power supply, precursor aqueous solution is realized atomizing rapidly under action of ultrasonic waves, after gas to be atomized is full of whole generator casing 1, open the carrier gas source of the gas, make carrier gas enter casing 1 respectively by two orthogonal carrier gas inlet 4 that are located at loam cake 2 and casing 1 side, carrier gas is evenly carried atomization gas by spray outlet 6 ejections then, and enters nozzle by the jet pipe connection that links to each other, thus final realization spraying.
On the specific implementation, the carrier gas that the present invention adopts can be the compressed air of drying.
Need to prove that the casing 1 of ultrasonic spray generator provided by the invention adopts the transparent polyethylene board making.Because casing 1 adopts the transparent polyethylene board making, therefore the user can observe directly the duty of each atomizing generator, and can change simultaneously the access number of concrete atomizer according to desired power neatly, thereby ultrasonic spray generator of the present invention can satisfy the needs of different atomization quantities.
Because the carrier gas of ultrasonic spray generator provided by the invention enters in the casing by two orthogonal carrier gas inlet in loam cake 2 and casing 1 side, thereby overcome the deficiency that general atomizing bottle single tube air inflow is difficult for adjusting, and make that the atomization gas that is sprayed can be more even, ultrasonic spray generator provided by the invention is more prone to the adjustment of air inflow.
In sum, because the atomization process of precursor aqueous solution need not to pass the atomizing bottle in the ultrasonic spray generator of the present invention, but the direct ultrasonic atomization that in atomizer, carries out solution, thereby can be so that the atomizing of precursor aqueous solution is very even, and make atomization quantity increase, and the atomization process inactivity that is carried out loss, thereby mean the ultrasonic spray generator provided by the invention efficient height that hazes, can be for the work of spraying continuously of large-area nozzle, thereby adopt ultrasonic spray generator provided by the invention can satisfy the demand of preparation large-area transparent conductive film, every technical indicator of the large-area transparent conductive film of preparing all reaches application requirements, can lay the first stone for industrialized large-scale production.
The above only is a preferred implementation of the present invention; should be pointed out that for those skilled in the art, under the prerequisite that does not break away from the principle of the invention; can also make some improvements and modifications, these improvements and modifications also should be considered as protection scope of the present invention.

Claims (7)

1, a kind of preparation large-area transparent conductive film ultrasonic spray generator special, comprise casing (1) and be installed in a plurality of ultrasonic atomizers (3) on casing (1) bottom base panel, it is characterized in that, be provided with flanging (9) around at described casing (1) top, loam cake (2) is installed on described casing (1) top flanging (9), simultaneously between the flanging (9) of described casing (1) and described loam cake (2), anti-corrosive rubber pad (8) is installed, be provided with carrier gas inlet (4) in described casing (1) side, be respectively arranged with lower margin (7) on four limits, casing (1) bottom in addition; Described box cover (2) is tightly connected by bolt (10), anti-corrosive rubber pad (8) and casing (1); Be respectively arranged with carrier gas inlet (4), solution inlet port (5) and spray outlet (6) on described box cover (2), described a plurality of ultrasonic atomizers (3) are the ultrasonic atomizer of corrosion resistant type.
2, preparation large-area transparent conductive film ultrasonic spray generator special according to claim 1 is characterized in that, the box bottom of fixing described ultrasonic atomizer (3) is a polyethylene board.
3, preparation large-area transparent conductive film ultrasonic spray generator special according to claim 1 and 2, it is characterized in that, described ultrasonic atomizer (3) is fixed at the base plate reverse side of described casing (1) by self-tapping screw, and described self-tapping screw exceeds with the base plate front that does not see through described casing (1).
4, preparation large-area transparent conductive film ultrasonic spray generator special according to claim 1 is characterized in that, described flanging (9) is tightly connected with described loam cake (2) by described bolt (10), described anti-corrosive rubber pad (8).
5, preparation large-area transparent conductive film ultrasonic spray generator special according to claim 1 is characterized in that, the material of described casing (1), flanging (9) and loam cake (2) is transparent polyethylene.
6, preparation large-area transparent conductive film ultrasonic spray generator special according to claim 1 is characterized in that, is provided with the carrier gas inlet (4) that is threaded in described casing (1) side.
7, preparation large-area transparent conductive film ultrasonic spray generator special according to claim 1, it is characterized in that, going up the described solution inlet port (5) and the plug that are provided with at described loam cake (2) is threaded, described spray outlet (6) is connected with the jet pipe threaded one end, and the described jet pipe other end is connected with a nozzle.
CNA2008100535044A 2008-06-13 2008-06-13 Ultrasonic spray generator special for preparing large-area transparent conductive film Pending CN101318166A (en)

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Application Number Priority Date Filing Date Title
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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103866259A (en) * 2014-03-17 2014-06-18 江苏汇景薄膜科技有限公司 Binary tree texture surface making equipment for transparent conducting film
CN106560305A (en) * 2015-10-01 2017-04-12 奥音科技(北京)有限公司 Loudspeaker Membrane And Method Of Making Same Via Spray Coating Process
CN107803297A (en) * 2017-11-16 2018-03-16 叶志徐 A kind of integrated ultrasonic atomizing device
CN108211746A (en) * 2018-03-22 2018-06-29 厚德九天(湖北)环保科技集团有限公司 Industrially desulfurized system based on ultrasonic atomization technique
CN108431969A (en) * 2016-08-24 2018-08-21 周星工程股份有限公司 Solar cell and its manufacturing method
CN112793302A (en) * 2021-01-29 2021-05-14 北京嘉鸿汇众技术有限公司 Impression cleaning transfer box of printing machine

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103866259A (en) * 2014-03-17 2014-06-18 江苏汇景薄膜科技有限公司 Binary tree texture surface making equipment for transparent conducting film
CN103866259B (en) * 2014-03-17 2016-03-02 江苏汇景薄膜科技有限公司 A kind of nesa coating binary tree etching device
CN106560305A (en) * 2015-10-01 2017-04-12 奥音科技(北京)有限公司 Loudspeaker Membrane And Method Of Making Same Via Spray Coating Process
CN106560305B (en) * 2015-10-01 2019-08-16 奥音科技(北京)有限公司 Loud-speaker diaphragm and the method that loud-speaker diaphragm is produced by spraying process
US10710282B2 (en) 2015-10-01 2020-07-14 Ssi New Material (Zhenjiang) Co., Ltd. Method of manufacturing a membrane for an electro-acoustic transducer
US12042960B2 (en) 2015-10-01 2024-07-23 Ssi New Material (Zhenjiang) Co., Ltd. Loudspeaker membrane with spray-coated elastomer layer
CN108431969A (en) * 2016-08-24 2018-08-21 周星工程股份有限公司 Solar cell and its manufacturing method
CN108431969B (en) * 2016-08-24 2021-06-01 周星工程股份有限公司 Solar cell and method for manufacturing same
CN107803297A (en) * 2017-11-16 2018-03-16 叶志徐 A kind of integrated ultrasonic atomizing device
CN108211746A (en) * 2018-03-22 2018-06-29 厚德九天(湖北)环保科技集团有限公司 Industrially desulfurized system based on ultrasonic atomization technique
CN112793302A (en) * 2021-01-29 2021-05-14 北京嘉鸿汇众技术有限公司 Impression cleaning transfer box of printing machine

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Open date: 20081210