CN102545031B - High-power continuous wave deuterium fluoride/hydrogen fluoride chemical laser - Google Patents

High-power continuous wave deuterium fluoride/hydrogen fluoride chemical laser Download PDF

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CN102545031B
CN102545031B CN 201210013060 CN201210013060A CN102545031B CN 102545031 B CN102545031 B CN 102545031B CN 201210013060 CN201210013060 CN 201210013060 CN 201210013060 A CN201210013060 A CN 201210013060A CN 102545031 B CN102545031 B CN 102545031B
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mirror
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deuterium
hydrogen fluoride
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CN102545031A (en
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刘泽金
刘文广
许晓军
袁圣付
华卫红
陈金宝
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National University of Defense Technology
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Abstract

The invention discloses a high-power continuous wave deuterium fluoride/hydrogen fluoride chemical laser. The high-power continuous wave deuterium fluoride/hydrogen fluoride chemical laser comprises a main oscillator and 2N+1 amplification levels arranged at the back of the main oscillator, wherein the N is a nonnegative integer, the main oscillator mainly comprises an unstable resonator mirror and a gain module, and one light beam overturning device is at least arranged on an optical path between the first level of the 2N+1 amplification levels and the main oscillator and/or an optical path between any two adjacent amplification levels. The high-power continuous wave deuterium fluoride/hydrogen fluoride chemical laser disclosed by the invention has a function of correcting deviation of transmission directions of light beams, has capabilities of light intensity homogenization and stray light inhibition, and can be used for outputting high-quality laser beams.

Description

The high power continuous wave is fluoridized deuterium/hydrogen fluoride chemical laser
Technical field
The present invention relates to laser technology field, relate in particular to a kind of deuterium/hydrogen fluoride chemical laser of fluoridizing.
Background technology
Fluoridizing deuterium/hydrogen fluoride laser is the superlaser device of present continuous wave output power maximum, has important use and is worth.For further expanding the range of application of fluoridizing deuterium/hydrogen fluoride laser, the power output level of fluoridizing deuterium/hydrogen fluoride laser need obtain further lifting.Make and fluoridize deuterium/hydrogen fluoride laser power level and promote two kinds of technological approaches are arranged, the first is continued to use single resonance chamber scheme in the past, only increase the quantity of gain module, but this mode makes that the power termination on the mirror of chamber is too big, laser moves the very risky of lumen mirror generation fire damage, therefore uses single resonance chamber scheme only actual application value can be arranged just under the certain power level; Other method just is to use main oscillations-power amplification (MOPA) technical scheme, with one have high output beam quality, a low power level fluoridize deuterium/hydrogen fluoride laser as seed source, adopt a plurality of amplifying stages to carry out power amplification, as shown in Figure 1.This method can keep certain output beam quality, and the power termination on the mirror of chamber simultaneously is lower, and the risk of minute surface fire damage is lower, so the MOPA scheme is the preferred version that the high power continuous wave is fluoridized deuterium/hydrogen fluoride laser.
Yet experiment finds that the high power continuous wave of existing use MOPA scheme is fluoridized deuterium/hydrogen fluoride laser and had following three problems, causes the Laser Output Beam quality lower.
The first is owing to the distribution of fluoridizing the gain media longshore current field direction of deuterium/hydrogen fluoride laser is heterogeneous, so the output intensity skewness.Under the high-output power level, light distribution heterogeneous will make minute surface produce bigger higher order aberratons, and these higher order aberratons can not effectively be compensated by ADAPTIVE OPTICS SYSTEMS, cause output beam quality to descend.
The 2nd, because distributing, output intensity has the characteristics that the upstream is strong, the downstream is weak, the non-homogeneous hot spot irradiation of high power density will produce bigger inclined aberration on minute surface, make laser beam transmission direction off-design value, because amplifying stage length is longer, faint tilt quantity will cause light beam when long Distance Transmission, segment beam irradiation is on the mirror holder of a following speculum, and the mirror holder thermal deformation that causes also can make eyeglass further produce the imbalance of wide-angle.
The 3rd, amplifying stage length reaches about several meters, and the light beam of main oscillations level output is the hollow light beam, therefore amplified spont-aneous emission (ASE) effect is remarkable, through behind a plurality of amplifying stages, produced stronger veiling glare in the light beam, these strong veiling glares will cause the difficulty of laser heat management, veiling glare has heating effect to mirror holder, the mirror holder thermal deformation that causes also can make eyeglass produce the imbalance of wide-angle, make beam Propagation direction substantial deviation design load, even surpass the correcting range of ADAPTIVE OPTICS SYSTEMS, finally cause the decline of output beam quality.
Summary of the invention
The technical problem to be solved in the present invention is to overcome the deficiencies in the prior art, provides a kind of and can proofread and correct the deflection of beam Propagation direction, has light intensity homogenizing ability and veiling glare inhibition high power continuous wave ability, high output beam quality and fluoridize deuterium/hydrogen fluoride chemical laser.
For solving the problems of the technologies described above, the technical scheme that the present invention proposes is that a kind of high power continuous wave is fluoridized deuterium/hydrogen fluoride chemical laser, 2N+1 amplifying stage after described laser comprises master oscillator and is positioned at master oscillator, and N is nonnegative integer; Described master oscillator mainly is made of unsteady cavity mirror and gain module, on the light path between the 1st grade of described amplifying stage and described master oscillator and/or arbitrarily is provided with a beam reversal device at least on the light path between adjacent two amplifying stages.
Above-mentioned high power continuous wave is fluoridized in deuterium/hydrogen fluoride chemical laser, being located at beam reversal device between two arbitrarily adjacent amplifying stages preferably includes and turns to plane mirror, input plane speculum and output plane speculum, described plane mirror, input plane speculum and the output plane speculum of turning to is laid on the light path of last amplifying stage output beam successively, through entering an adjacent back amplifying stage after the output of output plane speculum.The beam reversal device of being located on the light path between the 1st grade of described amplifying stage and described master oscillator (namely being positioned at the beam reversal device of forefront) preferably includes input plane speculum and output plane speculum, and described input plane speculum and output plane speculum are laid on the light path of described master oscillator output beam successively; This moment, the described plane mirror that turns to was directly served as by the corresponding output coupling mirror in the described unsteady cavity mirror.
Above-mentioned high power continuous wave is fluoridized in deuterium/hydrogen fluoride chemical laser, and the center of described input plane speculum preferably offers veiling glare and derives aperture.
Above-mentioned high power continuous wave is fluoridized in deuterium/hydrogen fluoride chemical laser, the described the place ahead correspondence of plane mirror that turns to preferably is equiped with the infrared light spot monitoring device, and described output plane speculum is installed on the adjusting mirror holder that can receive the conditioning signal that the infrared light spot monitoring device sends.Described infrared light spot monitoring device can be monitored the deviation post that turns to hot spot on the plane mirror in real time, and go out the beam deflection angle according to the facula deviation position calculation, and the angular adjustment signal is passed to (automatically controlled) adjusting mirror holder to proofread and correct the deflection of beam Propagation direction.
Each above-mentioned high power continuous wave is fluoridized in deuterium/hydrogen fluoride chemical laser, described unsteady cavity mirror preferably includes concave mirror, output coupling mirror and convex reflecting mirror, described gain module places between described concave mirror and the convex reflecting mirror, and described output coupling mirror places between described gain module and the convex reflecting mirror and close convex reflecting mirror; The gain region center of described gain module and the optical axis coincidence of described unsteady cavity mirror.
Each above-mentioned high power continuous wave is fluoridized in deuterium/hydrogen fluoride chemical laser, as further improvement and optimization, at least be provided with a beam reversal device between described arbitrarily adjacent two amplifying stages and preferably refer on the light path between the 2M+1 level of the 2M level of described amplifying stage and described amplifying stage, be provided with a beam reversal device at least, wherein M=1,2,3 ..., N.
Each above-mentioned high power continuous wave is fluoridized in deuterium/hydrogen fluoride chemical laser, has included gain module in described each amplifying stage, and the flow field direction of described each gain module is all identical; Be equipped with a beam reversal device (namely being provided with N+1 beam reversal device altogether) on the light path on the light path between the 1st grade of described amplifying stage and described master oscillator, between the 2M+1 level of the 2M level of described amplifying stage and described amplifying stage; Wherein, the suitable distance of amplifying stage longshore current field direction described relatively unsteady cavity mirror light shaft offset of part is so that the light beam of light path the place ahead next-door neighbour's beam reversal device output can be parallel in the amplifying stage after optical axis incides skew.Described each amplifying stage also can be along perpendicular to the suitable distance of flow field direction translation, in order to place described beam reversal device between corresponding amplifying stage.
Above-mentioned high power continuous wave is fluoridized in deuterium/hydrogen fluoride chemical laser, and the light beam of described master oscillator output is preferably the hollow light beam, and two rim raies of described hollow light beam pass through upstream, flow field and the downstream, flow field of described gain module respectively; Article two, after rim ray is exported through described output coupling mirror reflection, again by the adjustment of described beam reversal device, make two rim raies alternately pass through downstream, flow field and the upstream, flow field of described amplifying stage respectively.
Above-mentioned high power continuous wave is fluoridized in deuterium/hydrogen fluoride chemical laser, and described plane mirror and the described unsteady cavity mirror optical axis direction of turning to preferably is the 45 placement; Described input plane speculum and described unsteady cavity mirror optical axis direction preferably are the α angle to be placed, and α is acute angle, and crosses described input plane speculum center and turn to straight line that the plane mirror center becomes perpendicular to described unsteady cavity mirror optical axis direction with described; Described output plane speculum and described unsteady cavity mirror optical axis direction preferably are the β angle and place (β=45 °+α).Distance between each speculum is adjustable, in order to transmission direction and aforementioned lights direction of principal axis through the output beam of beam reversal device are consistent.
Compared with prior art, beneficial effect of the present invention is:
(1) by adopting the beam reversal device, make main oscillations level or previous stage amplify the strong part of light intensity of output by the more weak position of one stage gain coefficient, back, and light intensity is passed through the strong part of back one amplifying stage light intensity than weak part, thereby improved the uniformity that output intensity distributes, suppress the high-order composition of chamber mirror thermal deformation, thereby improved the quality of output beam.
(2) derive aperture by veiling glare is set, can effectively reduce the veiling glare of the minute surface center position that amplified spont-aneous emission (ASE) effect and diffraction cause, thereby can further improve the quality of output beam.
(3) by the facula position on the infrared light spot supervising device monitoring minute surface, carry out tilt adjustment to drive the adjusting mirror holder, can control departing from of high energy laser beam transmission direction, avoid mirror holder Stimulated Light irradiation to cause the imbalance of minute surface wide-angle.
Description of drawings
Fig. 1 fluoridizes the schematic diagram of deuterium/hydrogen fluoride laser for existing MOPA scheme high power continuous wave.
Fig. 2 is laser small signal gain coefficient longshore current field direction distribution map in the embodiment of the invention 1.
Fig. 3 is that the small signal gain of laser before and after beam reversal distributes and the stacking chart in the embodiment of the invention 1.
Fig. 4 is the schematic diagram of MOPA scheme laser in the embodiment of the invention 1.
Fig. 5 provides the schematic diagram of correction signal for the embodiment of the invention 1 mid-infrared light spot monitoring device.
Fig. 6 is the schematic diagram of MOPA scheme laser in the embodiment of the invention 2.
Fig. 7 is MOPA scheme laser output intensity distribution map in the embodiment of the invention 2.
Fig. 8 is the output intensity distribution map of existing MOPA scheme laser.
Marginal data:
1, gain module; 2, concave mirror; 3, output coupling mirror; 4, convex reflecting mirror; 5, turn to plane mirror; 6, output plane speculum; 7, input plane speculum; 8, automatically controlled adjusting mirror holder; 9, infrared light spot monitoring device; 10, veiling glare is derived aperture; 11, second rim ray; 12, optical axis; 13, first rim ray.
Embodiment
Below in conjunction with Figure of description and specific embodiment the present invention is further described.
Embodiment 1:
A kind of high power continuous wave of the present invention is as shown in Figure 4 fluoridized deuterium/hydrogen fluoride chemical laser, 2N+1 amplifying stage (N nonnegative integer) after comprising master oscillator and being positioned at master oscillator, master oscillator mainly are made of unsteady cavity mirror (positive-branch confocal unstable resonator that has output coupling mirror) and gain module 1.Gain module 1 is to produce excitation state to fluoridize deuterium/hydrogen fluoride molecule and make it to accelerate to the device that supersonic speed flows, gas flow direction is vertical with the optical axis 12 of unsteady cavity, because it is heterogeneous that the gas flow characteristic causes gain media longshore current field direction to distribute, the distribution of its small signal gain coefficient longshore current field direction as shown in Figure 2.The unsteady cavity mirror comprises concave mirror 2, output coupling mirror 3 and convex reflecting mirror 4, gain module 1 places between concave mirror 2 and the convex reflecting mirror 4, output coupling mirror 3 places between gain module 1 and the convex reflecting mirror 4 and close convex reflecting mirror 4, offer the plane mirror of slotted eye (or rectangular opening) centered by the output coupling mirror 3, the center of output coupling mirror 3 overlaps with the optical axis of unsteady cavity 12; The gain region center of gain module 1 overlaps with the optical axis 12 of unsteady cavity mirror.The light beam of master oscillator output is the hollow light beam, this hollow light beam comprises two rim raies, be respectively first rim ray 13 and second rim ray 11, by upstream, flow field and downstream, flow field (flow field direction is referring to the arrow among Fig. 4) of gain module 1,3 reflections are exported through output coupling mirror then respectively for first rim ray 13 and second rim ray 11.
Be equipped with on the 2M level of the amplifying stage of present embodiment and the light path between the 2M+1 level beam reversal device (wherein M=1,2,3 ..., N).Particularly, the light beam of amplifying stage first order output directly enters the amplifying stage second level, places the beam reversal device between the second level and the third level.Repeat above-mentioned steps, at the even number amplifying stage be right after and place the beam reversal device between thereafter the odd number amplifying stage, and at the odd number amplifying stage be right after and do not place the beam reversal device between thereafter the even number amplifying stage, finally make the light beam of master oscillator outgoing by 2N+1 amplifying stage.Be located at beam reversal device between adjacent two amplifying stages and comprise and turn to plane mirror 5, input plane speculum 7 and output plane speculum 6, turn to plane mirror 5, input plane speculum 7 and output plane speculum 6 to be laid in successively on the light path of last amplifying stage (i.e. 2M level) output beam.
In addition, also be provided with a beam reversal device on the first order of the amplifying stage of present embodiment and the light path between the master oscillator, this beam reversal device comprises input plane speculum 7 and output plane speculum 6, output coupling mirror 3 in the master oscillator then directly serves as and turns to plane mirror 5, and this moment, output coupling mirror 3, input plane speculum 7 and output plane speculum 6 were laid on the light path of master oscillator output beam successively.
In the present embodiment, turn to plane mirror 5 and optical axis 12 directions of beam reversal device are the 45 placement, input plane speculum 7 is α ° of angle with optical axis 12 directions and places (α is acute angle), and the straight line that the center of input plane speculum 7 links to each other with the center that turns to plane mirror 5 is perpendicular to optical axis 12 directions, and output plane speculum 6 is β=α+45 with optical axis 12 directions and places; Distance between each minute surface is adjustable, makes through the beam Propagation direction of beam reversal device outgoing identical with optical axis 12 directions.
Its cross section of light beam by the master oscillator outgoing is the hollow hot spot of circle or rectangle, after the amplifying stage transmission, because diffraction effect and ASE effect, strong veiling glare will appear in spot center, these veiling glares will have a strong impact on beam quality and heat management generation, therefore, introduced veiling glare in the beam reversal device of present embodiment and derived aperture 10, namely offered veiling glare at the center of input plane speculum 7 and derive aperture 10.This veiling glare is derived the aperture that aperture 10 is suitable shapes of processing at input plane speculum 7, the shape of aperture on perpendicular to the face of beam Propagation direction projection and output coupling mirror 3 perpendicular to the face upslide shade of optical axis 12 directions with also smaller.The ASE effect can be effectively suppressed like this, thereby the output beam quality of laser can be improved.
In the present embodiment, be equiped with infrared light spot monitoring device 9 in the place ahead correspondence that turns to plane mirror 5, infrared light spot monitoring device 9 is made of thermal infrared imager and data acquisition and processing (DAP) system, and the thermal imager optical lens optical axis direction of infrared light spot monitoring device 9 turns to plane mirror 5 perpendicular to the beam reversal device.Can regulate the incline direction of eyeglass on the automatically controlled adjusting mirror holder 8 that the two dimension that is installed in output plane speculum 6 tilts in real time.When infrared hot spot monitoring device 9 detects the facula position off-design scope that turns on the plane mirror 5, it will provide a correction signal and drive automatically controlled adjusting mirror holder 8, automatically controlled adjusting mirror holder 8 can carry out the tilt adjustment of the angle of pitch and left and right corner according to the correction signal that infrared light spot monitoring device 9 provides, make the hot spot that turns on the plane mirror 5 get back to design attitude, departing from of laser beams transmission direction in real time by this method, the picture frame of avoiding high energy laser beam to be radiated at causing on the picture frame is heated and the minute surface imbalance of wide-angle.Need not to use infrared light spot monitoring device 9 in the beam reversal device before the amplifying stage first order.
In the present embodiment, the principle that infrared light spot monitoring device 9 provides correction signal as shown in Figure 5.Beam center after turning to plane mirror 5 reflection is decided to be initial point, is the z axle with the beam Propagation direction, perpendicular to paper inwardly for the x direction of principal axis for setting up rectangular coordinate system.When high energy laser beam is radiated at when turning to plane mirror 5, because there is faint scattering effect in minute surface, the hot spot that thermal infrared imager may detect on the minute surface distributes; Can find by data acquisition and processing unit that actual hot spot is compared with the desirable facula position of design in x, y direction and be offset Δ x and Δ y (carry out the software that these side-play amounts calculate and be the ripe software of commercialization) respectively.If be L from turning to plane mirror 5 centers to the distance upper level beam reversal device output plane speculum 6 centers along optical axis direction, then by the output plane speculum 6 of upper level to beam reversal device at the corresponding levels turn to plane mirror 5 transmission the time, the angle of pitch of laser beam and the deflecting angle of left and right corner are respectively:
Figure BDA0000131336120000051
Infrared light spot monitoring device 9 obtains the driving signal of giving automatically controlled adjusting mirror holder 8 correspondences of upper level behind this deflecting angle signal, make the output plane speculum 6 of upper level beam reversal device carry out the adjusting of corresponding inclination angle, make beam reversal device at the corresponding levels turn to the hot spot on the plane mirror 5 to get back to design attitude.
Upset about the above-mentioned beam reversal device of present embodiment can make the cross section of light beam produce, and have functions such as light beam translation, beam deflection and veiling glare inhibition.
The 2N+1 of a present embodiment amplifying stage is made of 2N+1 gain module 1 respectively, each gain module 1 that constitutes amplifying stage is identical with the gain module 1 that master oscillator uses, the flow field direction of all gain modules 1 is identical, and each gain module 1 is same along the identical length of optical axis 12 directions.But each amplifying stage longshore current field direction or perpendicular to the flow field direction translation suitably distance in order between gain module 1, lay the beam reversal device.In the present embodiment, every adjacent two amplifying stages form one group (for example the first order and the second level form one group, the third level and the fourth stage form one group ...), the suitable distance of optical axis 12 skews of each group amplifying stage longshore current field direction relative unsteady cavity mirror is so that the light beam that the beam reversal device that should group amplifying stage the place ahead be close to is exported can be parallel in this group amplifying stage after optical axis 12 incides skew; The distance of the amplifying stage group skew after more leaning on the optical path direction is more big, thereby forms similar stepped distribution; Each amplifying stage also can be along perpendicular to the suitable distance of flow field direction translation, so as between the corresponding amplifying stage (for example between the second level and the third level, between the fourth stage and the level V ...) placement beam reversal device.
The high power continuous wave with high output beam quality of above-mentioned present embodiment is fluoridized deuterium/hydrogen fluoride chemical laser, its operation principle is as follows: because the light intensity longshore current field direction of master oscillator output is heterogeneous, and this heterogeneity distributes corresponding with small signal gain coefficient, the light intensity of the position correspondence that gain coefficient is big is strong (i.e. first rim ray 13), and the light intensity of the position correspondence that gain coefficient is less is weak (i.e. second rim ray 11); The light beam of master oscillator output is behind the beam reversal device, beam cross-section spins upside down, behind the light intensity of flow field upstream position correspondence (i.e. first rim ray 13) light intensity (the i.e. second rim ray 11) switch corresponding with the flow field downstream position, the first order that enters amplifying stage; Because the direction in flow field is identical with the direction in master oscillator flow field in the amplifying stage, this makes the light intensity weak (i.e. second rim ray 11) of the position correspondence that gain in the first order is stronger, and the light intensity of the more weak position correspondence of gain strong (i.e. first rim ray 13), therefore the heterogeneity of light intensity is improved after amplifying through this one-level, the high-order composition is inhibited in the thermal deformation of chamber mirror, and output beam quality improves; Directly enter the second level of amplifying stage from the light beam of the first order of amplifying stage output, this moment, light beam was not through upset, light distribution is identical with the first order, through partial amplification, the distribution of light intensity longshore current field direction shows heterogeneity again, therefore between the second level of amplifying stage and the third level, the beam reversal device is set again, the light beam of second level output passes through the upset of the beam reversal device in the amplifying stage more like this, enter the third level of amplifying stage, the heterogeneity of amplifying the back light intensity through the third level improves again, output intensity becomes again evenly, and the quality of output beam improves again.By that analogy, N all after date altogether circulates, final beam is from the 2N+1 level output of amplifying stage, light beam after 2N+1 amplifying stage outgoing has uniform light distribution, thereby it is comparatively even to make high energy fluoridize in the follow-up internal channel of deuterium/hydrogen fluoride laser laser irradiation suffered on numerous laser relaying minute surfaces, can suppress the higher order aberratons that is difficult to proofread and correct that numerous laser relaying minute surfaces produce in the internal channel, thereby can make the laser of output have very high beam quality.
We also can understand beam reversal from another angle can make output intensity realize the principle of homogenizing.Beam reversal also can be equal to the small signal gain coefficient distribution of the gain module 1 longshore current field direction in the amplifying stage first order and overturn, small signal gain coefficient after the upset distributes and the small signal gain of unturned master oscillator gain module 1 distributes the stack back divided by 2, obtain comprehensive small signal gain and distribute, as shown in Figure 3.Small signal gain distributed and improves significantly before the uniformity that comprehensive small signal gain distributes was overturn, so the uniformity of output intensity can obtain corresponding improvement.
Embodiment 2:
A kind of high power continuous wave of the present invention for having 3 amplifying stages is as shown in Figure 6 fluoridized deuterium/hydrogen fluoride chemical laser.Three amplifying stages (being N=1) after this laser comprises master oscillator and is positioned at master oscillator, master oscillator mainly are made of unsteady cavity mirror (positive-branch confocal unstable resonator that has output coupling mirror) and gain module 1.Gain module 1 is to produce excitation state to fluoridize deuterium/hydrogen fluoride molecule and make it to accelerate to the device that supersonic speed flows, and gas flow direction is vertical with the optical axis 12 of unsteady cavity, is heterogeneous because the gas flow characteristic causes gain media longshore current field direction to distribute.The unsteady cavity mirror comprises concave mirror 2, output coupling mirror 3 and convex reflecting mirror 4, gain module 1 places between concave mirror 2 and the convex reflecting mirror 4, output coupling mirror 3 places between gain module 1 and the convex reflecting mirror 4 and close convex reflecting mirror 4, offer the plane mirror of rectangular opening centered by the output coupling mirror 3, this rectangular opening is being 15mm * 45mm perpendicular to the projection size on optical axis 12 planes, and the center of output coupling mirror 3 overlaps with the optical axis of unsteady cavity 12; The gain region center of gain module 1 overlaps with the optical axis 12 of unsteady cavity mirror.The light beam of master oscillator output is the hollow light beam, and this hollow beam cross-section is the hollow, rectangular hot spot, and its outside dimension is 45mm * 135mm, and endoporus is of a size of 15mm * 45mm.This hollow light beam comprises two rim raies, be respectively first rim ray 13 and second rim ray 11, by upstream, flow field and downstream, flow field (flow field direction is referring to the arrow among Fig. 6) of gain module 1,3 reflections are exported through output coupling mirror then respectively for first rim ray 13 and second rim ray 11.
The laser of present embodiment includes two beam reversal devices, particularly, the first order and the light path between the master oscillator at amplifying stage are provided with a beam reversal device, also are placed with a beam reversal device in addition between the second level of amplifying stage and the third level.Be located at a back beam reversal device between adjacent two amplifying stages and comprise and turn to plane mirror 5, input plane speculum 7 and output plane speculum 6, turn to plane mirror 5, input plane speculum 7 and output plane speculum 6 to be laid in successively on the light path of second level output beam.And first beam reversal device of being located at behind the master oscillator comprises input plane speculum 7 and output plane speculum 6,3 of output coupling mirrors in the master oscillator directly serve as and turn to plane mirror 5, output coupling mirror 3 is 45 with optical axis 12 directions and places, input plane speculum 7 is 15 ° of angles with optical axis 12 directions and places, the center of the center of input plane speculum 7 and output coupling mirror 3 is at a distance of 450mm, and the line Q1 at both centers is perpendicular to optical axis 12 directions, the center of output plane speculum 6 and amplifying stage first order central lines, and with the distance of straight line Q1 be 86mm.Output coupling mirror 3, input plane speculum 7 and output plane speculum 6 are laid on the light path of master oscillator output beam successively at this moment.
In the present embodiment, the light beam of amplifying stage first order output directly enters the amplifying stage second level, and light beam enters the 3rd amplifying stage through the beam reversal device after the outgoing of the second level.At this moment, the center that turns to plane mirror 5 of beam reversal device and second level central lines, and be 45 with optical axis 12 directions and place; Input plane speculum 7 is ° angle, α=15 with optical axis 12 directions and places; The center of input plane speculum 7 and the center that turns to plane mirror 5 are at a distance of 450mm, and the straight line Q2 that both centers link to each other is perpendicular to optical axis 12 directions; The central lines of the center of output plane speculum 6 and the amplifying stage third level, and output plane speculum 6 is ° angle, β=60 with optical axis 12 directions and places, and the distance of the center of output plane speculum 6 and straight line Q2 is 86mm; Distance between each minute surface is adjustable, makes through the beam Propagation direction of beam reversal device outgoing identical with optical axis 12 directions.
Its cross section of light beam by the master oscillator outgoing is the hollow hot spot of rectangle, after the amplifying stage transmission, because diffraction effect and ASE effect, strong veiling glare will appear in spot center, these veiling glares will can produce beam quality and heat management and have a strong impact on, therefore, introduced veiling glare in the beam reversal device of present embodiment and derived aperture 10, namely offer veiling glare derives aperture 10 and (is of a size of 14mm * 44mm) at the center of input plane speculum 7.This veiling glare is derived the aperture that aperture 10 is suitable shapes of processing at input plane speculum 7, the shape of aperture on perpendicular to the face of beam Propagation direction projection and output coupling mirror 3 perpendicular to the face upslide shade of optical axis 12 directions with also smaller.The ASE effect can be effectively suppressed like this, thereby the output beam quality of laser can be improved.
In the present embodiment, be equiped with infrared light spot monitoring device 9 in the place ahead correspondence that turns to plane mirror 5, infrared light spot monitoring device 9 is made of thermal infrared imager and data acquisition and processing (DAP) system, and the thermal imager optical lens optical axis direction of infrared light spot monitoring device 9 turns to plane mirror 5 perpendicular to the beam reversal device.(being 60 ° of angles with optical axis direction places) can regulate the incline direction of eyeglass in real time on the automatically controlled adjusting mirror holder 8 that the two dimension that is installed in output plane speculum 6 tilts.When infrared hot spot monitoring device 9 detects the facula position off-design scope that turns on the plane mirror 5, it will provide a correction signal and drive automatically controlled adjusting mirror holder 8, automatically controlled adjusting mirror holder 8 can carry out the tilt adjustment of the angle of pitch and left and right corner according to the correction signal that infrared light spot monitoring device 9 provides, make the hot spot that turns on the plane mirror 5 get back to design attitude, departing from of laser beams transmission direction in real time by this method, the picture frame of avoiding high energy laser beam to be radiated at causing on the picture frame minute surface imbalance (operation principle of infrared light spot monitoring device 9 is identical with embodiment 1) with wide-angle of being heated.Need not to use infrared light spot monitoring device 9 in the beam reversal device before the amplifying stage first order.
Upset about the above-mentioned beam reversal device of present embodiment can make the cross section of light beam produce, and have functions such as light beam translation, beam deflection and veiling glare inhibition.
Three amplifying stages of present embodiment are made of three gain modules 1 respectively, each gain module 1 that constitutes amplifying stage is identical with the gain module 1 that master oscillator uses, the flow field direction of all gain modules 1 is all identical, and each gain module 1 is same along the identical length of optical axis 12 directions.But each amplifying stage longshore current field direction or perpendicular to the flow field direction translation suitably distance in order between gain module 1, lay the beam reversal device.In the present embodiment, the first order of amplifying stage and the second level are formed one group, the distance of optical axis 12 skew of the relative unsteady cavity mirror of center line longshore current field direction of this group amplifying stage is 300mm, so that the light beam of the output of the beam reversal device before the first order can be parallel in this group amplifying stage after optical axis 12 incides skew; The distance of the amplifying stage skew after more leaning on the optical path direction is more big, for example the distance of third level disalignment second level center line is similarly 300mm, 12 on optical axis of skew reaches 600mm, thereby to form similar stepped distribution (be not must be stepped, place if the beam reversal device is made symmetry, the third level also can revert to the position with optical axis coincidence again so); Each amplifying stage also can be along perpendicular to the suitable distance of flow field direction translation, so that (for example between the second level and the third level) places the beam reversal device between corresponding amplifying stage.
The high power continuous wave with high output beam quality of above-mentioned present embodiment is fluoridized deuterium/hydrogen fluoride chemical laser, its operation principle is as follows: because the light intensity longshore current field direction of master oscillator output is heterogeneous, and this heterogeneity distributes corresponding with small signal gain coefficient, the light intensity of the position correspondence that gain coefficient is big is strong (i.e. first rim ray 13), and the light intensity of the position correspondence that gain coefficient is less is weak (i.e. second rim ray 11); The light beam of master oscillator output is behind the beam reversal device, beam cross-section spins upside down, behind the light intensity of flow field upstream position correspondence (i.e. first rim ray 13) light intensity (the i.e. second rim ray 11) switch corresponding with the flow field downstream position, the first order that enters amplifying stage; Because the direction in flow field is identical with the direction in master oscillator flow field in the amplifying stage, this makes the light intensity weak (i.e. second rim ray 11) of the position correspondence that gain in the first order is stronger, and the light intensity of the more weak position correspondence of gain strong (i.e. first rim ray 13), therefore the heterogeneity of light intensity is improved after amplifying through this one-level, the high-order composition is inhibited in the thermal deformation of chamber mirror, and output beam quality improves; Directly enter the second level of amplifying stage from the light beam of the first order of amplifying stage output, this moment, light beam was not through upset, light distribution is identical with the first order, through partial amplification, the distribution of light intensity longshore current field direction shows heterogeneity again, therefore between the second level of amplifying stage and the third level, the beam reversal device is set again, the light beam of second level output passes through the upset of the beam reversal device in the amplifying stage more like this, enter the third level of amplifying stage, the heterogeneity of amplifying the back light intensity through the third level improves again, output intensity becomes again evenly, and the quality of output beam improves again.In the present embodiment, the light beam of master oscillator output is respectively through exporting behind first beam reversal device, the amplifying stage first order, the amplifying stage second level, second beam reversal device, the amplifying stage third level, light distribution on the output beam cross section that obtains as shown in Figure 7, if directly the light distribution that obtains according to prior art shown in Figure 1 is as shown in Figure 8.As seen the contrast back is used method of the present invention can significantly improve uniformity and effective inhibition veiling glare of output intensity, thereby can be obtained the laser output of high output beam quality.

Claims (6)

1. a high power continuous wave is fluoridized deuterium/hydrogen fluoride chemical laser, 2N+1 amplifying stage after described laser comprises master oscillator and is positioned at master oscillator, N is nonnegative integer, described master oscillator mainly is made of unsteady cavity mirror and gain module, it is characterized in that: on the light path between the 1st grade of described amplifying stage and described master oscillator and/or arbitrarily be provided with a beam reversal device at least on the light path between adjacent two amplifying stages; The beam reversal device of being located on the light path between the 1st grade of described amplifying stage and described master oscillator comprises input plane speculum and output plane speculum, and described input plane speculum and output plane speculum are laid on the light path of described master oscillator output beam successively; Be located at beam reversal device between two arbitrarily adjacent amplifying stages and comprise and turn to plane mirror, input plane speculum and output plane speculum that described plane mirror, input plane speculum and the output plane speculum of turning to is laid on the light path of last amplifying stage output beam successively; The center of described input plane speculum offers veiling glare and derives aperture; Described plane mirror and the described unsteady cavity mirror optical axis direction of turning to is the 45 placement; Described input plane speculum and described unsteady cavity mirror optical axis direction are the α angle to be placed, and α is acute angle, and crosses described input plane speculum center and turn to straight line that the plane mirror center becomes perpendicular to described unsteady cavity mirror optical axis direction with described; Described output plane speculum and described unsteady cavity mirror optical axis direction are 45 °+α angle and place.
2. high power continuous wave according to claim 1 is fluoridized deuterium/hydrogen fluoride chemical laser, it is characterized in that: the described the place ahead correspondence of plane mirror that turns to is equiped with the infrared light spot monitoring device, and described output plane speculum is installed on the adjusting mirror holder that can receive the conditioning signal that the infrared light spot monitoring device sends.
3. high power continuous wave according to claim 1 and 2 is fluoridized deuterium/hydrogen fluoride chemical laser, it is characterized in that: described unsteady cavity mirror comprises concave mirror, output coupling mirror and convex reflecting mirror, described gain module places between described concave mirror and the convex reflecting mirror, and described output coupling mirror places between described gain module and the convex reflecting mirror and close convex reflecting mirror; The gain region center of described gain module and the optical axis coincidence of described unsteady cavity mirror.
4. high power continuous wave according to claim 3 is fluoridized deuterium/hydrogen fluoride chemical laser, it is characterized in that: be provided with a beam reversal device between described arbitrarily adjacent two amplifying stages at least and specifically refer on the light path between the 2M+1 level of the 2M level of described amplifying stage and described amplifying stage, be provided with a beam reversal device at least, wherein M=1,2,3 ..., N.
5. high power continuous wave according to claim 4 is fluoridized deuterium/hydrogen fluoride chemical laser, it is characterized in that: included gain module in described each amplifying stage, the flow field direction of described each gain module is all identical; Be equipped with a beam reversal device on the light path on the light path between the 1st grade of described amplifying stage and described master oscillator, between the 2M+1 level of the 2M level of described amplifying stage and described amplifying stage; The suitable distance of amplifying stage longshore current field direction described relatively unsteady cavity mirror light shaft offset of part is so that the light beam of light path the place ahead next-door neighbour's beam reversal device output can incide in the amplifying stage after the skew.
6. high power continuous wave according to claim 5 is fluoridized deuterium/hydrogen fluoride chemical laser, it is characterized in that: the light beam of described master oscillator output is the hollow light beam, and two rim raies of described hollow light beam pass through upstream, flow field and the downstream, flow field of described gain module respectively; Article two, after rim ray is exported through described output coupling mirror reflection, again by the adjustment of described beam reversal device, make two rim raies alternately pass through downstream, flow field and the upstream, flow field of described amplifying stage respectively.
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