CN102540365B - Optical integrated structure and manufacturing method thereof - Google Patents
Optical integrated structure and manufacturing method thereof Download PDFInfo
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- CN102540365B CN102540365B CN201210040365.8A CN201210040365A CN102540365B CN 102540365 B CN102540365 B CN 102540365B CN 201210040365 A CN201210040365 A CN 201210040365A CN 102540365 B CN102540365 B CN 102540365B
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- passive component
- optical
- optical passive
- metal
- detector
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- 230000003287 optical effect Effects 0.000 title claims abstract description 138
- 238000004519 manufacturing process Methods 0.000 title abstract description 7
- 239000002184 metal Substances 0.000 claims abstract description 85
- 238000000034 method Methods 0.000 claims abstract description 17
- 238000004806 packaging method and process Methods 0.000 claims description 23
- 239000000758 substrate Substances 0.000 claims description 16
- 239000004606 Fillers/Extenders Substances 0.000 claims description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 6
- 230000008878 coupling Effects 0.000 claims description 6
- 238000010168 coupling process Methods 0.000 claims description 6
- 238000005859 coupling reaction Methods 0.000 claims description 6
- 238000005538 encapsulation Methods 0.000 claims description 6
- 238000000605 extraction Methods 0.000 claims description 6
- 238000004080 punching Methods 0.000 claims description 6
- 229910052710 silicon Inorganic materials 0.000 claims description 6
- 239000010703 silicon Substances 0.000 claims description 6
- 239000000523 sample Substances 0.000 claims description 4
- 230000007246 mechanism Effects 0.000 claims description 3
- 238000001312 dry etching Methods 0.000 claims description 2
- 239000011521 glass Substances 0.000 claims description 2
- 238000007747 plating Methods 0.000 claims description 2
- 238000001039 wet etching Methods 0.000 claims description 2
- 238000005516 engineering process Methods 0.000 description 11
- 230000005622 photoelectricity Effects 0.000 description 4
- 230000010354 integration Effects 0.000 description 3
- 239000013307 optical fiber Substances 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000035800 maturation Effects 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012536 packaging technology Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
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- Optical Integrated Circuits (AREA)
Abstract
Description
Claims (16)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210040365.8A CN102540365B (en) | 2011-12-14 | 2012-02-20 | Optical integrated structure and manufacturing method thereof |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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CN201110418105.5 | 2011-12-14 | ||
CN201110418105 | 2011-12-14 | ||
CN201210040365.8A CN102540365B (en) | 2011-12-14 | 2012-02-20 | Optical integrated structure and manufacturing method thereof |
Publications (2)
Publication Number | Publication Date |
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CN102540365A CN102540365A (en) | 2012-07-04 |
CN102540365B true CN102540365B (en) | 2014-01-29 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201210040365.8A Active CN102540365B (en) | 2011-12-14 | 2012-02-20 | Optical integrated structure and manufacturing method thereof |
Country Status (1)
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CN (1) | CN102540365B (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106158998B (en) * | 2016-06-30 | 2017-08-04 | 浙江大学 | A kind of visible ray and near infrared band silicon substrate fiber waveguide integrated photodetector |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101153939A (en) * | 2006-09-28 | 2008-04-02 | 中国科学院半导体研究所 | Mixed integral single fibre three-way device |
CN101180562A (en) * | 2004-12-07 | 2008-05-14 | 里夫莱克斯光子公司 | Optically enabled hybrid semiconductor package |
CN101464540A (en) * | 2007-12-19 | 2009-06-24 | 中国科学院半导体研究所 | Mixed integral single fibre three-way device |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5977567A (en) * | 1998-01-06 | 1999-11-02 | Lightlogic, Inc. | Optoelectronic assembly and method of making the same |
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2012
- 2012-02-20 CN CN201210040365.8A patent/CN102540365B/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101180562A (en) * | 2004-12-07 | 2008-05-14 | 里夫莱克斯光子公司 | Optically enabled hybrid semiconductor package |
CN101153939A (en) * | 2006-09-28 | 2008-04-02 | 中国科学院半导体研究所 | Mixed integral single fibre three-way device |
CN101464540A (en) * | 2007-12-19 | 2009-06-24 | 中国科学院半导体研究所 | Mixed integral single fibre three-way device |
Non-Patent Citations (2)
Title |
---|
光发射模块中激光器与光纤的无源耦合;杨存永等;《半导体技术》;20050131;第30卷(第1期);第66-68页 * |
杨存永等.光发射模块中激光器与光纤的无源耦合.《半导体技术》.2005,第30卷(第1期),第66页. |
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Publication number | Publication date |
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CN102540365A (en) | 2012-07-04 |
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Legal Events
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GR01 | Patent grant | ||
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Owner name: CHENGDU RHOPTICS OPTOELECTRONIC TECHNOLOGY CO., LT Free format text: FORMER OWNER: INST OF MICROELECTRONICS, C. A. S Effective date: 20140806 |
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C41 | Transfer of patent application or patent right or utility model | ||
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Free format text: CORRECT: ADDRESS; FROM: 100029 CHAOYANG, BEIJING TO: 610041 CHENGDU, SICHUAN PROVINCE |
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TR01 | Transfer of patent right |
Effective date of registration: 20140806 Address after: 610041, Sichuan, Chengdu hi tech Development Zone, 188 Rui Rui Road, No. 6, No. 2 building Patentee after: CHENGDU RUIHUA OPTOELECTRONIC TECHNOLOGY Co.,Ltd. Address before: 100029 Beijing city Chaoyang District Beitucheng West Road No. 3 Patentee before: Institute of Microelectronics of the Chinese Academy of Sciences |
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TR01 | Transfer of patent right |
Effective date of registration: 20210220 Address after: 214028 building D1, China Sensor Network International Innovation Park, No. 200, Linghu Avenue, New District, Wuxi City, Jiangsu Province Patentee after: National Center for Advanced Packaging Co.,Ltd. Address before: 2 / F, no.188-6, Zirui Avenue, Chengdu hi tech Development Zone, Sichuan 610041 Patentee before: CHENGDU RUIHUA OPTOELECTRONIC TECHNOLOGY Co.,Ltd. |