CN102539034A - High-performance ceramic tension sensor - Google Patents
High-performance ceramic tension sensor Download PDFInfo
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- CN102539034A CN102539034A CN2011104432068A CN201110443206A CN102539034A CN 102539034 A CN102539034 A CN 102539034A CN 2011104432068 A CN2011104432068 A CN 2011104432068A CN 201110443206 A CN201110443206 A CN 201110443206A CN 102539034 A CN102539034 A CN 102539034A
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- elastic body
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- tension
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Abstract
The invention discloses a high-performance ceramic tension sensor, which comprises a dynamometer rod, an elongated ceramic plate and a ceramic holder. The dynamometer rod is adhered to the front face of the elongated ceramic plate, and the elastic ceramic holder is adhered to the back of the elongated ceramic plate. The elongated ceramic plate serves as torque between the ceramic holder and the dynamometer rod. The elongated ceramic plate is a force-sensitive elastic part, two strain resistors are disposed at each of the front and the back of the force-sensitive elastic part respectively, and the four strain resistors are interconnected to form a Wheatstone bridge by the aid of through holes on the force-sensitive elastic part. The Wheatstone bridge is adjusted to a zero level through a laser trimming system. After the dynamometer rod senses tension signals, the whole tension sensor outputs millivolt-level linear voltage precisely and linearly relevant to the tension signals through the bridge by micro deformation of the force-sensitive elastic part.
Description
Technical field:
The present invention relates to the force sensor technologies field, particularly a kind of high-performance ceramic tension pick-up.
Background technology:
As everyone knows, tension pick-up is the wide force-sensing sensor of a kind of range of application.The quick sensing element of power that at present domestic and international applied various tension pick-ups nearly all adopt resistance strain gage to form.In fact resistance strain gage is after corroding into palisade by the amorphous semiconductor chip or by 0.02-0.05mm tinsel coiled palisade or by metallic membrane; Adopt adhering with epoxy resin to the stainless steel diaphragm; The stainless steel diaphragm produces micro-deformation and is delivered to resistance strain gage under the tension force effect, thereby the foil gauge change in resistance that has a resistance realizes tension force-resistance value physical quantity conversion.
Therefore, traditional tension pick-up is a kind of analog quantity conversion.Because resistance strain gage is a kind of metal material with higher piezoresistance coefficient; Its temperature drift rate is higher; Therefore traditional tension pick-up all must adopt all temps compensation technique in application process; The amorphous semiconductor chip temperature compensation that particularly temperature coefficient is big is more difficult, simultaneously also variation thereupon of the linear precision of sensor.Another fatal shortcoming of resistance strain gage is that the fatigue effect of metal material reduces the hysteresis of tension pick-up and repeatability greatly under the frequent effect of tension signal, and promptly the reliability and stability of sensor are lower.In addition, the tension pick-up sensitivity of being made up of resistance strain gage is hanged down with Low ESR and is exported the application of all having placed restrictions on it.
Summary of the invention:
In view of above-mentioned technical matters, the invention provides a kind of high-performance ceramic tension pick-up.This sensor is researched and developed with the needs of industrial automation control by adapting to Internet of Things, possess high sensitivity (>=3.3mV/V), high stability (low temperature wafts≤0.05%FS, waft when hanging down≤0.02FS), high precision (high linear precision≤0.02%/, hang down hysteresis≤0.02%FS, high duplication 0.02%FS).
Concrete technical scheme of the present invention is following:
The high-performance ceramic tension pick-up comprises dynamometer link, strip potsherd and ceramic holder; It is characterized in that the positive bonding dynamometer link of said strip potsherd, the back side bonding elastic body pottery holder; Said strip potsherd as from ceramic holder to the moment the dynamometer link; Said strip potsherd is the quick elastic body of a power, and the quick elastic body pros and cons of this power respectively is provided with two strain resistors, simultaneously through the through hole that is provided with on the quick elastic body of power with resistance bridge of the interconnected formation of these four strain resistors; And resistance bridge is transferred to zero-bit through the laser trimming system; Behind the said dynamometer link perception tension signal, produce micro-deformation, thereby make whole tension pick-up through the electric bridge output millivolt level linear voltage relevant with the tension signal precision linear through the quick elastic body of exerting all one's strength.
In the such scheme, said strip potsherd is the quick elastic body of power of material for adopting the alundum (Al pottery.
In the such scheme, said strain resistor be resistance slurry adopt accurate Hybrid technology at 850 ℃ of sintering on the quick elastic body of power.
In the such scheme, four laser zero-bits that strain resistor was connected into of said sensor are repaiied and are transferred resistance also to be provided with PTC resistance and the NTC resistance that is used for overcoming the temperature drift, to reduce the temperature drift of sensor.
In the such scheme, four strain resistor axle center of said dynamometer link axle center and pros and cons are perpendicular.Be used for overcoming the dynamometry parts behind the perception tension signal not with the strip elastic body on strain resistor form a component, signal of sensor will produce than large deviation, thereby make linear precision and sensitivity generation considerable influence.
High-performance ceramic tension pick-up of the present invention through signal conditioning circuit, can convert tension signal into I owing to be the bridge circuit output form
2C digital signal and 0-5V voltage signal, PWM pulse-width control signal and current signal output also can carry RS-232, IEEE485 communication port and RF radio-frequency power module through tension controller and realize functions such as tension signal wireless remote transmission, and the Internet of Things information such as industrial automation control, earthquake prediction that realize transmit and function such as control.
Description of drawings:
Further specify the present invention below in conjunction with accompanying drawing and embodiment.
Fig. 1 is a ceramic tension pick-up side structure synoptic diagram according to the invention.
Fig. 2 is a ceramic tension pick-up Facad structure synoptic diagram according to the invention.
Fig. 3 is a via hole image structural drawing in the tension pick-up according to the invention.
Custom-designed negative pressure controller synoptic diagram when Fig. 4 prepares tension pick-up for the present invention.
Embodiment:
For technological means, creation characteristic that the present invention is realized, reach purpose and effect and be easy to understand and understand, below in conjunction with concrete diagram, further set forth the present invention.
As depicted in figs. 1 and 2, high-performance ceramic tension pick-up of the present invention comprises dynamometer link 3, strip potsherd 1 and ceramic holder 2.
Wherein, the alundum (Al that strip potsherd 1 adopts that linear expansion coefficient is little, physics (electricity, mechanics) and chemical stability are high is ceramic.And the positive bonding dynamometer link 3 of strip potsherd, the back side bonding elastic body pottery holder 2.Formation from ceramic holder 2 to the moment the dynamometer link 3.
In addition, strip potsherd 1 can adopt 96% alundum (Al strip pottery elastic body as the quick elastic body of a power, and its thickness is confirmed according to tension range, generally in the 0.12-1.2mm scope.The quick elastic body pros and cons of this power respectively is provided with two strain resistors (4,5), simultaneously through the through hole that is provided with on the quick elastic body of power with resistance bridge of this interconnected formation of four strain resistors (4,5); And resistance bridge is transferred to zero-bit (0-0.5mV) through the laser trimming system.This is the low zero-bit output of the irrealizable bridge circuit of domestic and international various tension pick-up institutes.It is to be noted this four strain resistors be high piezoresistance coefficient low temperature waft proprietary resistance slurry adopt accurate Hybrid technology at 850 ℃ of sintering on the quick elastic body of power.
So; Behind dynamometer link perception tension signal; Alundum (Al strip pottery elastic body can produce micro-deformation; This moment, otherwise positive two bridge resistance,s made resistance increase two bridge resistance,s of reverse side because the compression resistance reduces owing to stretching, and what must stress is: the Changing Pattern of four bridge resistance,s of pros and cons that the elastomeric deformation of strip pottery is caused under the tension force effect is relevant with tension force size precision linear fully.In a closed resistance bridge loop, work as the bridge circuit opposite ends and apply driving voltage, and other opposite ends of bridge circuit will be exported and the relevant output voltage of tension force size precision linear, thereby realize the linear transformation of physical quantity.
The also promising temperature drift that reduces sensor to greatest extent, sensor also are provided with PTC resistance 6 and NTC resistance 7, thereby realize the temperature coefficient high-accuracy compensation.
Certainly, dynamometer link is the core component of perception tension signal.Guarantee that in structural design the perpendicular and moment in four bridge resistance, axle center of dynamometer link axle center and pros and cons equates.Must guarantee simultaneously that tension signal vertically acts on the bridge resistance, of sensor tow sides design.After making sensor bonding like this, guaranteed that through the anchor clamps location each tension pick-up has identical output characteristics and good bonding strength.
In addition, sensor pottery holder is moment and an installation requirement of guaranteeing that tension pick-up and dynamometer link adhere to specification.The consistance and the output characteristics consistance of tension pick-up installation dimension have been guaranteed.As for tension force in the tension pick-up-output voltage curve.Its output characteristic curve meets following linear equation: Y=a+bx.
In the present invention, via hole image design and processes technology is to guarantee linear sensor precision and highly sensitive key, in design and implementation process, adopts following scheme:
As shown in Figure 3, on 301 of serigraphy machine worktables, offer through hole in the corresponding point of section bar 302.And control negative pressure of vacuum through custom-designed negative pressure controller, if negative pressure too greatly then the through hole slurry suck too soon, be difficult to make the substrate endoporus evenly to cover, do not reach the through hole purpose; Otherwise if negative pressure is too little, then the vacuum suction is too slow, also is difficult to make the substrate through-hole inwall to suck slurry, does not reach the through hole purpose equally.
For this reason, the present invention as shown in Figure 4 is provided with negative pressure controller, and negative pressure of vacuum input end 403 connects vacuum pump among the figure, negative pressure of vacuum output terminal 404 connects on the printer table face 301.Regulating bolt 401 is that negative pressure of vacuum is regulated bolt, and it is pointed bolt, when the adjusting bolt is regulated downwards, reduce owing to reduce vacuum resistance increase negative pressure with the vacuum cavity gap, otherwise negative pressure increases.Set nut 402 is to be used for the locking that negative pressure is regulated bolt among the figure.
In addition, in Fig. 3, R1 is the substrate through-hole radius, and it uses die punching before by laser boring or substrate raw material sintering.H is a substrate thickness, and R is the via pad radius.Being connected conduction band with sensor in order to ensure the pros and cons through hole has good electrical connection, and R >=R1 then during design is 10mils like the conduction band bandwidth, R1=25mils, R=45mils.
The design of serigraphy via hole image meets following formula:
A＝(πR
2-πR1
2)+2πR1h
Aperture opening ratio and silk screen screen cloth line owing to half tone when actual design directly influence; All be difficult to guarantee slurry evenly to be transferred to the substrate through-hole place through via hole image when the printing machine scraper; Slurry flows along the through hole wall under the negative pressure of vacuum effect; The expectation value of design is: slurry preferably flow to another cross section end of reverse side through hole substrate, if design R value is too big, then through hole cross section end is owing to slurry drips to vacuum system or stained substrate through-hole reverse side too much.Take advantage of 2/3 can reach the via design expectation value through test in following formula (2 π R1h) front.That is:
A＝π(R
2-R1
2)+1.33πR1h
In the formula: A via pad area
Through to four via process tests, confirmed the levelling of Graphics Design and silk-screen printing technique parameter, make through-hole rate reach 99%.
More than show and described ultimate principle of the present invention and principal character and advantage of the present invention.The technician of the industry should understand; The present invention is not restricted to the described embodiments; That describes in the foregoing description and the instructions just explains principle of the present invention; Under the prerequisite that does not break away from spirit and scope of the invention, the present invention also has various changes and modifications, and these variations and improvement all fall in the scope of the invention that requires protection.The present invention requires protection domain to be defined by appending claims and equivalent thereof.
Claims (5)
1. the high-performance ceramic tension pick-up comprises dynamometer link, strip potsherd and ceramic holder; It is characterized in that the positive bonding dynamometer link of said strip potsherd, the back side bonding elastic body pottery holder; Said strip potsherd as from ceramic holder to the moment the dynamometer link; Said strip potsherd is the quick elastic body of a power, and the quick elastic body pros and cons of this power respectively is provided with two strain resistors, simultaneously through the through hole that is provided with on the quick elastic body of power with resistance bridge of the interconnected formation of these four strain resistors; And resistance bridge is transferred to zero-bit through the laser trimming system; Behind the said dynamometer link perception tension signal, produce micro-deformation, thereby make whole tension pick-up through the electric bridge output millivolt level linear voltage relevant with the tension signal precision linear through the quick elastic body of exerting all one's strength.
2. according to the high-performance ceramic tension pick-up of claim 1, it is characterized in that said strip potsherd is the quick elastic body of power of material for adopting the alundum (Al pottery.
3. according to the high-performance ceramic tension pick-up of claim 1, it is characterized in that, said strain resistor be resistance slurry adopt accurate Hybrid technology at 850 ℃ of sintering on the quick elastic body of power.
4. according to the high-performance ceramic tension pick-up of claim 1, it is characterized in that four laser zero-bits that strain resistor was connected into of said sensor are repaiied and transferred resistance also to be provided with PTC resistance and the NTC resistance that is used for overcoming the temperature drift.
5. according to the high-performance ceramic tension pick-up of claim 1, it is characterized in that four strain resistor axle center of said dynamometer link axle center and pros and cons are perpendicular.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110443206.8A CN102539034B (en) | 2011-12-27 | 2011-12-27 | High-performance ceramic tension sensor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110443206.8A CN102539034B (en) | 2011-12-27 | 2011-12-27 | High-performance ceramic tension sensor |
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| CN102539034A true CN102539034A (en) | 2012-07-04 |
| CN102539034B CN102539034B (en) | 2015-01-28 |
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| CN201110443206.8A Expired - Fee Related CN102539034B (en) | 2011-12-27 | 2011-12-27 | High-performance ceramic tension sensor |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104401807A (en) * | 2014-11-28 | 2015-03-11 | 浙江凯成纺织机械有限公司 | Pressure sensor control system and method for yarn production device |
| CN104792443A (en) * | 2014-01-17 | 2015-07-22 | 徐兴才 | Micro-tension piezoresistive ceramic tension sensor |
| CN105761454A (en) * | 2016-03-22 | 2016-07-13 | 宁波元鼎电子科技有限公司 | Intelligent sitting posture corrector |
| WO2022170459A1 (en) * | 2021-02-09 | 2022-08-18 | Goertek Inc. | Apparatus and method for force sensing, and electronic device |
Citations (4)
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| JPH02223836A (en) * | 1989-02-23 | 1990-09-06 | Delphi Co Ltd | Thick film type load gauge |
| CN2247331Y (en) * | 1995-09-13 | 1997-02-12 | 中国科学院合肥智能机械研究所 | Strain type thick film force sensor |
| CN1215157A (en) * | 1998-10-31 | 1999-04-28 | 中国科学院合肥智能机械研究所 | Thick film micropressure sensor and making method thereof |
| CN202393535U (en) * | 2011-12-27 | 2012-08-22 | 无锡市中昊微电子有限公司 | High-property ceramic tension sensor |
-
2011
- 2011-12-27 CN CN201110443206.8A patent/CN102539034B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02223836A (en) * | 1989-02-23 | 1990-09-06 | Delphi Co Ltd | Thick film type load gauge |
| CN2247331Y (en) * | 1995-09-13 | 1997-02-12 | 中国科学院合肥智能机械研究所 | Strain type thick film force sensor |
| CN1215157A (en) * | 1998-10-31 | 1999-04-28 | 中国科学院合肥智能机械研究所 | Thick film micropressure sensor and making method thereof |
| CN202393535U (en) * | 2011-12-27 | 2012-08-22 | 无锡市中昊微电子有限公司 | High-property ceramic tension sensor |
Non-Patent Citations (1)
| Title |
|---|
| 刘藏芬: "振动法测量钢筋的预应力", 《西安工业学院学报》 * |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104792443A (en) * | 2014-01-17 | 2015-07-22 | 徐兴才 | Micro-tension piezoresistive ceramic tension sensor |
| CN104401807A (en) * | 2014-11-28 | 2015-03-11 | 浙江凯成纺织机械有限公司 | Pressure sensor control system and method for yarn production device |
| CN104401807B (en) * | 2014-11-28 | 2017-04-12 | 浙江凯成纺织机械有限公司 | Pressure sensor control system and method for yarn production device |
| CN105761454A (en) * | 2016-03-22 | 2016-07-13 | 宁波元鼎电子科技有限公司 | Intelligent sitting posture corrector |
| WO2022170459A1 (en) * | 2021-02-09 | 2022-08-18 | Goertek Inc. | Apparatus and method for force sensing, and electronic device |
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| CN102539034B (en) | 2015-01-28 |
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