CN102538710B - Measurement method and device for angle of film-coated surface of polarization splitting prism - Google Patents
Measurement method and device for angle of film-coated surface of polarization splitting prism Download PDFInfo
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- CN102538710B CN102538710B CN201010616841.7A CN201010616841A CN102538710B CN 102538710 B CN102538710 B CN 102538710B CN 201010616841 A CN201010616841 A CN 201010616841A CN 102538710 B CN102538710 B CN 102538710B
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Abstract
The invention relates to a measurement method and device for an angle of a film-coated surface of a polarization splitting prism. The measurement method for the angle of the film-coated surface of the polarization splitting prism comprises the following steps of: providing a loading platform, a first rotary table and a second rotary table, which are connected; arranging a reflecting mirror which is parallel to the loading platform on the second rotary table and recording initial positions of the first rotary table and the second rotary table; arranging the polarization splitting prism to be detected on the loading platform; arranging a first light diaphragm and a second light diaphragm, and enabling a laser beam to sequentially pass through the first light diaphragm and the second light diaphragm to enter into the polarization splitting prism to be detected, so as to be reflected by the film-coated surface and be reflected by the reflecting mirror; adjusting the first rotary table and the second rotary table and enabling light reflected by the reflecting mirror to sequentially enter into the polarization splitting prism, be reflected by the film-coated surface, and pass through the second light diaphragm and the first light diaphragm; and recording current positions of the first rotary table and the second rotary table. The measurement device provided by the invention has the advantages of simple structure and easiness of operation.
Description
Technical field
The present invention relates to a kind of measuring method, relate in particular to a kind of measuring method for coated surface of polarized beam splitter angle.
The invention still further relates to a kind of measurement mechanism, relate in particular to a kind of measurement mechanism for coated surface of polarized beam splitter angle.
Background technology
Polarization splitting prism referred to as PBS, PBS itself is combined by two right angle trigonometry prisms, and on cemented surface, plates the polarizing coating of specific wavelength.When incident light is injected, PBS light can be divided into P light and S light is propagated respectively.Under normal conditions, at 45 ° between cemented surface and prism bottom surface.If cemented surface and bottom surface be deviation to some extent, incident light with respect to the incident angle of cemented surface just not on the Brewster angle of polarizing coating, will inevitably greatly reduce by the ratio of P light after crystal and S light, in by P light after PBS crystal doped with a large amount of S light time, the effect of crystal own has just reduced, and there will be in use larger error.In quantizing to produce at laser instrument, the position of corresponding PBS is fixed by frame member, if PBS coated surface deflection angle surpasses tolerance, can cause that the deflection of S light goes out the problem of position, laser design hole, if propagation distance is longer, will inevitably produce light deflect away from mirror holder can range of adjustment situation, will inevitably produce very large inconvenience to the production of through engineering approaches.So the problem of PBS polarization face and bottom surface angle (or surface level) of measuring just seems particularly important.
Existing measurement mechanism is before two triangular prisms just do not glue together, and measures the angle of each triangular prism, and the angle between inclined-plane and bottom surface can be similar to the angle of deviation of thinking crystals cemented surface like this.But crystal, may be due to problems such as techniques after plated film gummed, can cause error between gummed seam, will change to some extent deflection angle like this, real to be improved.Meanwhile, coated surface is mutually far short of what is expected with setting angle of deviation, can cause the impure phenomenon of polarized light polarization state, so greatly affects the light quality that of laser instrument.If angle of deviation differs greatly simultaneously, also can cause the deviation of sensing, in producing, industrialization laser instrument can greatly reduce production efficiency.
Inconvenience in the use of prior art is with not enough, real to be improved.
Summary of the invention
In view of this, be necessary to take measurement of an angle and all mismachining tolerances will be taken into account from whole removing, propose a kind ofly can measure from integral body the method and apparatus of polarization splitting prism crystal polarizing coating and surface level deflection angle.
Another object of the present invention is to measure the method and apparatus that not quick detachable inside has the transparent substance of reflecting surface.
For achieving the above object, the present invention adopts following technical scheme:
A kind of coated surface of polarized beam splitter angle measurement method, comprise: an article carrying platform, first turntable being connected with article carrying platform and second turntable being connected with the first turntable are provided, this first turntable and the second turntable be planar rotation all, and the Plane of rotation of article carrying platform place plane, the first turntable and the Plane of rotation of the second turntable cross one another; A catoptron is set in this second turntable, regulates one or more in this first turntable, the second turntable and this catoptron, make this mirror reflection surface and this article carrying platform place plane parallel, record the initial position of this first turntable and the second turntable; Polarization splitting prism to be measured is arranged on to this article carrying platform; First diaphragm and second diaphragm are set, make laser beam by this first diaphragm and the second diaphragm, be formed into irradiating light beam and be made incident beam inject this polarization splitting prism to be measured successively, this incident light reflects to form the first emergent light to this catoptron direction outgoing through the coated surface of polarization splitting prism to be measured; Regulate this first turntable and the second turntable, make this catoptron reflect this first emergent light and form reflected light, make this reflected light reflect to form the second emergent light through the coated surface of this polarization splitting prism to be measured, make this second emergent light successively by this second diaphragm and the first diaphragm; Record the current location of this first turntable and the second turntable.
Further, regulate the spacing between this first diaphragm and the second diaphragm, make this spacing be greater than or equal to 500 millimeters.
Further, regulate the aperture center position of this first diaphragm and the second diaphragm, make the aperture center of this first diaphragm and this second diaphragm in the same side of this article carrying platform place plane, and identical apart from the vertical range of this article carrying platform place plane.
Further, the height of this polarization splitting prism to be measured is H, regulates the aperture center position of this first diaphragm and the second diaphragm, and the aperture center that makes this first diaphragm and the second diaphragm is 0.4H to 0.6H apart from the distance of this article carrying platform place plane.
Further, before recording this first turntable initial position, regulate this first turntable, make the Plane of rotation of this first turntable vertical with this article carrying platform place plane; Before recording this first turntable initial position, regulate this second turntable, make the Plane of rotation of this second turntable vertical with the Plane of rotation of the first turntable, simultaneously also vertical with article carrying platform place plane.
Further, one or more in regulating this first turntable, the second turntable and this catoptron, makes in this mirror reflection surface and this parallel plane step in article carrying platform place, and the device being conditioned is this catoptron.
Further, first angle measurement equipment is set, for recording the rotary angle position of this first turntable; Second angle measurement equipment is set, for recording the rotary angle position of this second turntable.
Further, a catoptron is being set in this second turntable, regulate one or more in this first turntable, the second turntable and this catoptron, this mirror reflection surface and this parallel plane step in article carrying platform place are comprised the distance adjustment of this mirror reflection surface and article carrying platform place plane to being greater than or equal to 100 millimeters.
Further, a through hole is set on this article carrying platform, the size of this through hole is less than the size of this polarization splitting prism to be measured; The step that this polarization splitting prism to be measured is arranged on to this article carrying platform comprises this polarization splitting prism to be measured is arranged on to this through hole, and the face that this polarization splitting prism to be measured is contacted with this article carrying platform covers this through hole; This incident light through the coated surface of polarization splitting prism to be measured reflect to form the first emergent light to the step of this catoptron direction outgoing comprise this first emergent light through this through hole to this catoptron direction outgoing.
A coated surface of polarized beam splitter angle measurement unit, comprising: one for placing the article carrying platform of polarization splitting prism to be measured, the first turntable that is connected with article carrying platform, second turntable being connected with the first turntable, a catoptron, first diaphragm, second diaphragm and a laser instrument; This first turntable and the second turntable be planar rotation all, and this article carrying platform place plane, the Plane of rotation of the first turntable and the Plane of rotation of the second turntable cross one another; This catoptron is arranged on this second turntable, its reflecting surface and this article carrying platform place plane parallel; This laser instrument is for generation of laser, and the laser of generation is successively by entering polarization splitting prism to be measured after this first diaphragm and this second diaphragm; This catoptron is for reflecting the light beam of outgoing in this polarization splitting prism.
By technique scheme, the beneficial effect of measuring method of the present invention is:
1, measurement mechanism is simple in structure, is a direct measurement result, has comprised all mismachining tolerance problems, has advantages of precisely and measures comprehensively;
2, can provide for the installation of each polarization splitting prism in suitability for industrialized production corresponding reference information, the measurement of angle can propose its quantizating index aborning, for the crystal beyond margin tolerance, will not, to use, in follow-up suitability for industrialized production, can greatly enhance productivity like this.
Accompanying drawing explanation
Fig. 1 is the structural representation of coated surface of polarized beam splitter angle measurement unit of the present invention.
Embodiment
Measurement mechanism of the present invention is mainly to measure polarization splitting prism crystal polarizing coating and surface level deflection angle.In addition this measurement mechanism also can measure that those are not quick detachable, and the inner transparent substance with reflecting surface.Basic thought of the present invention is: utilize cleverly reversibility of optical path principle, thereby can conveniently measure polarization splitting prism with respect to the angle of deviation of the plane of incidence, can provide for the installation of each polarization splitting prism in suitability for industrialized production corresponding reference information like this.
Normal light is after passing through polarization splitting prism, the exit direction of S light is (can be level can be also vertical) that can control, in order to make Fixture Design compact, and allow each several part center of gravity at vertical direction, in the present embodiment can make to measure time downward by the exit direction of S light after polarization splitting prism.
Fig. 1 is the structural representation of coated surface of polarized beam splitter angle measurement unit of the present invention.Set up XYZ rectangular coordinate system, be defined in paper and be XY plane, X-axis level to the right, Y-axis desk upwards, Z axis is inside perpendicular to paper.Coated surface of polarized beam splitter angle measurement unit 100 of the present invention comprises an objective table 101, YZ turntable 103, XY turntable 105, catoptron 107, first diaphragm 109, the second diaphragm 111 and a laser instrument 113.
This article carrying platform 101 is horizontally disposed with, and is used for carrying polarization splitting prism 115 to be measured, this first diaphragm 109 and this second diaphragm 111.
103 one-tenth " L " types of this YZ turntable, comprise a YZ rotating shaft 103 and one first index dial (not shown), and this YZ turntable 103 is fixed on this article carrying platform by this YZ rotating shaft 123; And this YZ turntable 103 is around axes O 1 left rotation and right rotation in YZ plane of this YZ rotating shaft 123, and this first index dial is for recording this YZ turntable around the angle position of this axes O 1 rotation, and its angle precision is 0.05 degree, and recording interval is that-10 degree are to+10 degree; In this first index dial angle, be 0 while spending, this YZ turntable 103 is perpendicular with this article carrying platform 101.
The YZ turntable 103 of " L " type of being somebody's turn to do matches with this article carrying platform 101 and becomes on the whole " ㄈ " type.This YZ turntable 103 also comprises a boss (not indicating), and this boss extends to these article carrying platform 101 directions from these YZ turntable 103 bodies.This XY turntable 105 comprises an XY rotating shaft 125, a continuing surface (not indicating) and a second index dial (not shown).This XY turntable 105 is connected with this boss by this XY rotating shaft 125.This rotating shaft 125 has an axes O 2, and this axes O 2 is parallel with Z axis.This XY turntable can be around this axes O 2 left rotation and right rotation in XY plane.This continuing surface is used for fixing this catoptron 107, and this catoptron 107 is silver mirror, and its reflecting surface is towards this article carrying platform 101.This second index dial is identical with this first index dial parameter, is used for recording this XY turntable 105 around the angle position of axes O 2 rotations.When this YZ turntable 103 is vertical with this article carrying platform 101, regulate this XY turntable 105, even the reflecting surface that makes catoptron 107 with the reflecting surface of the parallel catoptron 107 of article carrying platform 101 in horizontal plane, the number of degrees that now define this second index dial are 0, and now reflecting surface is 100 millimeters apart from the vertical range of this article carrying platform 101.
This first diaphragm 109 and this second diaphragm 111 are arranged on this article carrying platform 101, and both central small hole 109 are positioned in sustained height, and both central small hole 109 are identical apart from the vertical range L of article carrying platform 101.The line of the central small hole 109 of this first diaphragm 109 and the second diaphragm 111 is parallel with X-axis.Two central small hole 109 are measure-alike, are 1.5 millimeters, and both air line distance is 500 millimeters.The light beam that this laser instrument 113 is launched is successively by this first diaphragm 109 and this second diaphragm 111.This laser instrument 113 can adopt He-Ne laser instrument, the better effects if when wavelength of the wavelength of the light that it sends and the generation linear polarization effect of polarization splitting prism 115 to be measured is different.
On this article carrying platform 101, be provided with a square hole 117.This square hole 117 runs through this article carrying platform 101, and its size is less than polarization splitting prism 121 to be measured.Generally, the size of this square hole 117 can be 7.5mm * 7.5mm.
In use, according to following steps, operate:
Step S101, is adjusted to horizontality by article carrying platform 101; YZ state 103 is adjusted to vertical state, and the reading that makes the first index dial is 0; The reflecting surface of catoptron 107 is adjusted to horizontality, and the reading that makes the second index dial is 0; This step can be adjusted as aid by usage level instrument;
Step S103, is arranged on polarization splitting prism 115 to be measured on this article carrying platform 101; Regulate the position of this polarization splitting prism 115 to be measured, the face (being defined as bottom surface) that this polarization splitting prism 115 to be measured is contacted with this article carrying platform 101 covers this square hole 117, make the center of square hole 117 in this bottom surface, make a side of this polarization splitting prism 115 to be measured as far as possible parallel with YZ plane, while making laser beam from a side incident of this polarization splitting prism 115 to be measured, the coated surface 121 of this polarization splitting prism 115 to be measured can be by this laser beam reflection direction outgoing to catoptron 107 through this square hole 117 from bottom surface;
Step S105, regulates height L and the position of the central small hole 109 of this first diaphragm 109 and the second diaphragm 111, makes the line of two central small hole 109 parallel with X-axis; The value of L equals half of height H of this polarization splitting prism 115 to be measured; Distance between this first diaphragm 109 and the second diaphragm 111 is 500 millimeters; Defining this polarization splitting prism 115 to be measured is the plane of incidence (not indicating) towards the side of this second diaphragm 111;
Step S107, make laser instrument 113 Output of laser light beams, regulate laser instrument 113 positions and height, make the light beam of laser instrument 113 outputs pass through successively this first diaphragm 109 and this second diaphragm 111, directive this polarization splitting prism 115 to be measured this coated surface 121 of directive; Laser beam after coated surface 121 reflection from this polarization splitting prism 115 to be measured and bottom surface outgoing, definition laser beam is now the first emergent light; This first emergent light is through the reflecting surface of this this catoptron 107 of square hole 117 directives;
Step S109, this YZ turntable 103 of coarse adjustment, makes it around axes O 1 rotation, and the XZ of coarse adjustment simultaneously turntable 105 makes it around axes O 2 rotations, makes the first emergent light at the reflection of the reflecting surface place of this catoptron 107, this square hole 117 of directive; This light beam light that is reflected face reflection is after coated surface 121 reflections of this polarization splitting prism 115 to be measured, and from the plane of incidence outgoing of this polarization splitting prism 115 to be measured, definition is the second emergent light from the light of this plane of incidence outgoing;
Step S109, regulates this YZ turntable 103 to make it around axes O 1 rotation subtly, regulates subtly XZ turntable 105 simultaneously, makes it around axes O 2 rotations, makes this second emergent light successively through this second diaphragm 111 and this first diaphragm 109;
Step S111, records the angle B that angle A that this YZ turntable turns over and this XY turntable turn over.
After completing above step, according to the refraction law of light and reflection law, can calculate the error angle of the coated surface 121 of this polarization splitting prism 115 to be measured.
Because the present invention utilizes the principle of reflection of light path, by the position of accommodation reflex mirror 107, make laser instrument 113 import and exports inject this polarization splitting prism to be measured 115 outgoing to the light of this catoptron 107 and these catoptron 107 reflections and reenter this polarization splitting prism 115 to be measured also the light of outgoing overlap completely, thereby make the position of the coated surface 121 of this polarization splitting prism 115 to be measured, the position of angle information and this catoptron 107, angle information produces the relation that can calculate, thereby according to the position of measuring this catoptron 107, angle information calculates the position of this coated surface 121, angle information.
Meanwhile, ingehious design YZ turntable 103 of the present invention and XY turntable 105, make position, the angle information of catoptron 107 be convenient to measure, and aforementioned calculating is simplified as much as possible, makes the measurements and calculations of coated surface 121 more simple and convenient.
Meanwhile, the present invention only comprises two diaphragms, a platform, two turntables and a catoptron, and structure is very easy, making aspect, operate simple and easy.
An embodiment who is more than inventive concept of the present invention embodies, and the present invention can also have following change embodiment:
One, this article carrying platform 101 does not comprise square hole 117, this first diaphragm 109, this second diaphragm 111, this laser instrument 113 are positioned at the side towards this catoptron 107 of this article carrying platform 101, that is, this polarization splitting prism 115 to be measured is arranged between this catoptron 107 and this article carrying platform 101 during use.
Two, the light of these laser instrument 113 outgoing is not this first diaphragm 109 of direct directive, but passes through two 45 degree catoptrons at this first diaphragm 109 of directive, now can reduce the length of whole measuring system.
Three, set up a plurality of diaphragms, be used for better collimation laser device 113 emitting laser bundles and check from the second emergent light of polarization splitting prism 115 plane of incidence outgoing to be measured.
Four, the distance of the first diaphragm 109 and the second diaphragm 111 is not 500 millimeters, can be any distances that can determine straight line such as 400 millimeters, 600 millimeters, 700 millimeters.This catoptron 107 can not be 100 millimeters apart from this article carrying platform 101, for example, can also be 200 millimeters, in theory, distance larger precision higher, in the present invention, this distance be controlled at 1 meter better below.This catoptron 107 can not be also silver mirror, but adopts high-reflecting film to be plated on this XY turntable 105, and the latter adopts other high anti-devices to be arranged on this XY turntable 105.
Five, the central small hole size of diaphragm can not be 1.5 millimeters, also 1 millimeter, 2 millimeters etc. can the clearly errorless light beam of recognizing size; Concrete size be take and is less than 3 millimeters as good.The first index dial and the second index dial can be also that full angle is measured, i.e. 360 degree measurement of angle; This first index dial and the second index dial are not manual read's counting apparatus yet simultaneously, can be electronic goniometer amount systems; Diaphragm central small hole 119 can not be half of polarization splitting prism 115 height H to be measured to the vertical range L of this article carrying platform 101, and for ease of measuring, the value of L can be 0.4H to 0.6H.
Six, the size of square hole 117 can be other sizes, is only less than the size of this polarization splitting prism 115 to be measured, and this polarization splitting prism 115 to be measured that can make can be placed on this article carrying platform stably.
Seven, this article carrying platform 103 can now arrange an immobilising device not in horizontal direction, and this polarization splitting prism 115 to be measured is not subjected to displacement when this detection system is used.
Eight, the Plane of rotation of this YZ turntable 103 can be not vertical with these article carrying platform 101 place planes, for example its Plane of rotation and the angled C of this article carrying platform 101 place plane, C is less than 180 degree, and C is not equal to 90 degree, now, only the final angle B of the final angle A of YZ turntable, XY turntable need to be carried out to rectangular coordinate system conversion in conjunction with this angle C, be converted into A1 and B1, carry out again afterwards refraction and the reflection calculating of light, thereby draw the deviation angle of this coated surface 121.So-called angle C is actually the angle of the straight line of the direction of these YZ turntable 103 initial positions and central small hole 119 formation of this first diaphragm 109 and this second diaphragm 113.
Nine, similar with the 8th kind of situation, the Plane of rotation of this XY turntable 105 can be not vertical with this article carrying platform place plane yet, simultaneously can be not vertical with the Plane of rotation of this YZ turntable 103 yet, for example, with the angled D of this article carrying platform 101, D is less than 180 degree, and be not equal to 90 degree, now, only the final angle B of the final angle A of YZ turntable, XY turntable need to be carried out to rectangular coordinate system conversion in conjunction with this angle D, be converted into A2 and B2, carry out again afterwards refraction and the reflection calculating of light, thereby draw the deviation angle of this coated surface 121.So-called angle D is actually the angle of the straight line of the direction of these XY turntable 105 initial positions and central small hole 119 formation of this first diaphragm 109 and this second diaphragm 113.
Ten, in conjunction with the 8th and the 9th kind of situation, the Plane of rotation of this YZ turntable 103 and the angled C of this article carrying platform 101, C is less than 180 degree, and C is not equal to 90 degree; The Plane of rotation of this XY turntable 105 also can with the angled D of this article carrying platform 101, D is less than 180 degree, and is not equal to 90 degree; These article carrying platform 101 place planes, the Plane of rotation of this YZ turntable 103, the Plane of rotation of this XY turntable 105 intersect mutually; Now, only need to the final angle B of the final angle A of YZ turntable, XY turntable be carried out to rectangular coordinate system conversion in conjunction with this angle D in conjunction with angle C and angle D, be converted into A3 and B3, carry out again afterwards refraction and the reflection calculating of light, thereby draw the deviation angle of this coated surface 121.So-called angle C is actually the angle of the straight line of the direction of these YZ turntable 103 initial positions and central small hole 119 formation of this first diaphragm 109 and this second diaphragm 113.So-called angle D is actually the angle of the straight line of the direction of these initial 105 positions of XY turntable and central small hole 119 formation of this first diaphragm 109 and this second diaphragm 113.
11, on the 8th, nine, ten basis, can comprise the turntable that a plurality of connections successively and Plane of rotation intersect, on a turntable in terminal, catoptron is set.Record initial angle before the measurement of a plurality of platforms and and measure after the information such as total angle, thereby calculate the angle information of coated surface.
What 12, on all devices, be provided with automatic controlled height, position and angle does precision electric stepper part, thereby realize high precision, regulates.
The present invention not only can be applied to the measurement of coated surface of polarized beam splitter angle, can also be with using the measurement that has the angle of reflecting surface in other crystal.
Certainly; along with using the difference of polarization splitting prism 115 sizes to be measured; this measuring method also has certain change with some steps and parameter in device; for the person of ordinary skill of the art; without departing from the inventive concept of the premise; can also make some distortion and improvement, these all belong to protection scope of the present invention.
Claims (10)
1. a coated surface of polarized beam splitter angle measurement method, is characterized in that, this measuring method comprises:
An article carrying platform, first turntable being connected with article carrying platform and second turntable being connected with the first turntable are provided, this first turntable and the second turntable be planar rotation all, the orthogonal intersection of Plane of rotation of the Plane of rotation of article carrying platform place plane, the first turntable and the second turntable;
A catoptron is set in this second turntable, regulates one or more in this first turntable, the second turntable and this catoptron, make this mirror reflection surface and this article carrying platform place plane parallel, record the initial position of this first turntable and the second turntable;
Polarization splitting prism to be measured is arranged on to this article carrying platform;
First diaphragm and second diaphragm are set, make laser beam by this first diaphragm and the second diaphragm, be formed into irradiating light beam and be made incident beam inject this polarization splitting prism to be measured successively, this incident light reflects to form the first emergent light to this catoptron direction outgoing through the coated surface of polarization splitting prism to be measured;
Regulate this first turntable and the second turntable, make this catoptron reflect this first emergent light and form reflected light, make this reflected light reflect to form the second emergent light through the coated surface of this polarization splitting prism to be measured, make this second emergent light successively by this second diaphragm and the first diaphragm;
Record the current location of this first turntable and the second turntable.
2. measuring method according to claim 1, is characterized in that, this measuring method also comprises the spacing regulating between this first diaphragm and the second diaphragm, makes this spacing be greater than or equal to 500 millimeters.
3. measuring method according to claim 2, it is characterized in that, this measuring method also comprises the aperture center position that regulates this first diaphragm and the second diaphragm, make the aperture center of this first diaphragm and this second diaphragm in the same side of this article carrying platform place plane, and identical apart from the vertical range of this article carrying platform place plane.
4. measuring method according to claim 3, it is characterized in that, this measuring method also comprises, the height that defines this polarization splitting prism to be measured is H, regulate the aperture center position of this first diaphragm and the second diaphragm, the aperture center that makes this first diaphragm and the second diaphragm is 0.4H to 0.6H apart from the distance of this article carrying platform place plane.
5. measuring method according to claim 1, is characterized in that, before recording this first turntable initial position, this measuring method also comprises this first turntable of adjusting, makes the Plane of rotation of this first turntable vertical with this article carrying platform place plane; Before recording this first turntable initial position, regulate this second turntable, make the Plane of rotation of this second turntable vertical with the Plane of rotation of the first turntable, simultaneously also vertical with article carrying platform place plane.
6. measuring method according to claim 5, it is characterized in that, one or more in regulating this first turntable, the second turntable and this catoptron, makes in this mirror reflection surface and this parallel plane step in article carrying platform place, and the device being conditioned is this catoptron.
7. measuring method according to claim 1, is characterized in that, this measuring method also comprises first angle measurement equipment is set, for recording the rotary angle position of this first turntable; Second angle measurement equipment is set, for recording the rotary angle position of this second turntable.
8. measuring method according to claim 7, it is characterized in that, a catoptron is being set in this second turntable, regulate one or more in this first turntable, the second turntable and this catoptron, this mirror reflection surface and this parallel plane step in article carrying platform place are comprised the distance adjustment of this mirror reflection surface and article carrying platform place plane to being greater than or equal to 100 millimeters.
9. measuring method according to claim 1, is characterized in that, this measuring method also comprises and a through hole is set on this article carrying platform, and the size of this through hole is less than the size of this polarization splitting prism to be measured; The step that this polarization splitting prism to be measured is arranged on to this article carrying platform comprises this polarization splitting prism to be measured is arranged on to this through hole, and the face that this polarization splitting prism to be measured is contacted with this article carrying platform covers this through hole; This incident light through the coated surface of polarization splitting prism to be measured reflect to form the first emergent light to the step of this catoptron direction outgoing comprise this first emergent light through this through hole to this catoptron direction outgoing.
10. a coated surface of polarized beam splitter angle measurement unit, it is characterized in that, this measurement mechanism comprises: one for placing the article carrying platform of polarization splitting prism to be measured, the first turntable that is connected with article carrying platform, second turntable being connected with the first turntable, a catoptron, first diaphragm, second diaphragm and a laser instrument; This first turntable and the second turntable be planar rotation all, the Plane of rotation of this article carrying platform place plane, the first turntable and the orthogonal intersection of Plane of rotation of the second turntable; This catoptron is arranged on this second turntable, its reflecting surface and this article carrying platform place plane parallel; This laser instrument is for generation of laser, and the laser of generation is successively by entering polarization splitting prism to be measured after this first diaphragm and this second diaphragm; This catoptron is for reflecting the light beam of outgoing in this polarization splitting prism.
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| CN201010616841.7A CN102538710B (en) | 2010-12-31 | 2010-12-31 | Measurement method and device for angle of film-coated surface of polarization splitting prism |
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| CN201010616841.7A CN102538710B (en) | 2010-12-31 | 2010-12-31 | Measurement method and device for angle of film-coated surface of polarization splitting prism |
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| CN1475780A (en) * | 2003-06-18 | 2004-02-18 | 中国科学院上海光学精密机械研究所 | Measuring apparatus of wide angle wide spectrum polarization beam splitting film characteristics |
| JP2004348041A (en) * | 2003-05-26 | 2004-12-09 | Olympus Corp | Eccentric optical system and optical device using the same |
| CN101017081A (en) * | 2005-12-22 | 2007-08-15 | 松下电器产业株式会社 | Method and apparatus for measuring interfacial positions |
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| JPH10268225A (en) * | 1997-03-27 | 1998-10-09 | Konica Corp | Adjusting method of optical deflection device and adjusting device therefor |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004348041A (en) * | 2003-05-26 | 2004-12-09 | Olympus Corp | Eccentric optical system and optical device using the same |
| CN1475780A (en) * | 2003-06-18 | 2004-02-18 | 中国科学院上海光学精密机械研究所 | Measuring apparatus of wide angle wide spectrum polarization beam splitting film characteristics |
| CN101017081A (en) * | 2005-12-22 | 2007-08-15 | 松下电器产业株式会社 | Method and apparatus for measuring interfacial positions |
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