CN102534803A - 立式扩散炉电器控制系统及控制方法 - Google Patents
立式扩散炉电器控制系统及控制方法 Download PDFInfo
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- CN102534803A CN102534803A CN2012100011825A CN201210001182A CN102534803A CN 102534803 A CN102534803 A CN 102534803A CN 2012100011825 A CN2012100011825 A CN 2012100011825A CN 201210001182 A CN201210001182 A CN 201210001182A CN 102534803 A CN102534803 A CN 102534803A
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- 238000000034 method Methods 0.000 title claims abstract description 48
- 238000009792 diffusion process Methods 0.000 title claims abstract description 14
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 98
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- 239000007789 gas Substances 0.000 claims description 42
- 238000012545 processing Methods 0.000 claims description 26
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 7
- 239000001301 oxygen Substances 0.000 claims description 7
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- 238000012544 monitoring process Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 239000004065 semiconductor Substances 0.000 abstract description 3
- 238000005516 engineering process Methods 0.000 description 4
- 238000012369 In process control Methods 0.000 description 3
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- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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CN201210001182.5A CN102534803B (zh) | 2012-01-04 | 2012-01-04 | 立式扩散炉电器控制系统及控制方法 |
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CN201210001182.5A CN102534803B (zh) | 2012-01-04 | 2012-01-04 | 立式扩散炉电器控制系统及控制方法 |
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CN102534803A true CN102534803A (zh) | 2012-07-04 |
CN102534803B CN102534803B (zh) | 2014-11-19 |
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Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103092230A (zh) * | 2013-01-07 | 2013-05-08 | 济南大学 | 一种扩散炉智能温控系统 |
CN103134635A (zh) * | 2012-09-07 | 2013-06-05 | 上饶光电高科技有限公司 | 荷兰tempress扩散炉的小氮超出压力标准报警系统 |
CN103696020A (zh) * | 2013-12-31 | 2014-04-02 | 北京七星华创电子股份有限公司 | 一种用于负压扩散炉的源流量控制系统 |
CN104162889A (zh) * | 2013-05-15 | 2014-11-26 | 上海和辉光电有限公司 | 一种机械臂控制系统及控制方法 |
CN105887205A (zh) * | 2016-06-27 | 2016-08-24 | 无锡宏纳科技有限公司 | 扩散用高温炉 |
CN106012025A (zh) * | 2016-07-22 | 2016-10-12 | 桂林电子科技大学 | 一种扩散炉气体浓度及扩散方式的自动控制装置 |
CN108919739A (zh) * | 2018-07-25 | 2018-11-30 | 嘉兴市合工业电炉有限公司 | 工业电炉控制系统 |
CN109814535A (zh) * | 2019-02-20 | 2019-05-28 | 上海奕信半导体设备有限公司 | 基于维纳模型辨识方法的扩散炉在线诊断方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4276603A (en) * | 1979-10-30 | 1981-06-30 | Btu Engineering Corporation | Diffusion furnace microcontroller |
JPS6316618A (ja) * | 1986-07-08 | 1988-01-23 | Yokogawa Electric Corp | 半導体拡散炉制御方法 |
CN200964448Y (zh) * | 2006-06-13 | 2007-10-24 | 上海太阳能科技有限公司 | 晶体硅硅片扩散炉 |
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2012
- 2012-01-04 CN CN201210001182.5A patent/CN102534803B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4276603A (en) * | 1979-10-30 | 1981-06-30 | Btu Engineering Corporation | Diffusion furnace microcontroller |
JPS6316618A (ja) * | 1986-07-08 | 1988-01-23 | Yokogawa Electric Corp | 半導体拡散炉制御方法 |
CN200964448Y (zh) * | 2006-06-13 | 2007-10-24 | 上海太阳能科技有限公司 | 晶体硅硅片扩散炉 |
Non-Patent Citations (3)
Title |
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刘涛: "基于微机测控网络的扩散/氧化系统的研究与开发", 《中国优秀硕士学位论文全文数据库信息科技辑》 * |
时良仁: "基于DSP的机械手开放式运动控制器设计", 《齐齐哈尔大学学报》 * |
董毅、何勇: "基于PC机和单片机的多机械手远程控制系统", 《电气自动化》 * |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103134635A (zh) * | 2012-09-07 | 2013-06-05 | 上饶光电高科技有限公司 | 荷兰tempress扩散炉的小氮超出压力标准报警系统 |
CN103134635B (zh) * | 2012-09-07 | 2015-06-17 | 上饶光电高科技有限公司 | 荷兰tempress扩散炉的小氮超出压力标准报警系统 |
CN103092230A (zh) * | 2013-01-07 | 2013-05-08 | 济南大学 | 一种扩散炉智能温控系统 |
CN104162889A (zh) * | 2013-05-15 | 2014-11-26 | 上海和辉光电有限公司 | 一种机械臂控制系统及控制方法 |
CN103696020A (zh) * | 2013-12-31 | 2014-04-02 | 北京七星华创电子股份有限公司 | 一种用于负压扩散炉的源流量控制系统 |
CN105887205A (zh) * | 2016-06-27 | 2016-08-24 | 无锡宏纳科技有限公司 | 扩散用高温炉 |
CN106012025A (zh) * | 2016-07-22 | 2016-10-12 | 桂林电子科技大学 | 一种扩散炉气体浓度及扩散方式的自动控制装置 |
CN108919739A (zh) * | 2018-07-25 | 2018-11-30 | 嘉兴市合工业电炉有限公司 | 工业电炉控制系统 |
CN109814535A (zh) * | 2019-02-20 | 2019-05-28 | 上海奕信半导体设备有限公司 | 基于维纳模型辨识方法的扩散炉在线诊断方法 |
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CN102534803B (zh) | 2014-11-19 |
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Address after: 100016 Jiuxianqiao East Road, Beijing, No. 1, No. Patentee after: North China Science and technology group Limited by Share Ltd. Address before: 100016, No. 1, Jiuxianqiao East Road, Beijing, Chaoyang District, building No. 2, M2 Patentee before: BEIJING SEVENSTAR ELECTRONIC Co.,Ltd. |
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Effective date of registration: 20180316 Address after: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Patentee after: BEIJING NAURA MICROELECTRONICS EQUIPMENT Co.,Ltd. Address before: 100016 Jiuxianqiao East Road, Beijing, No. 1, No. Patentee before: North China Science and technology group Limited by Share Ltd. |