CN102520561B - Preparation method of large thickness period polarization ferroelectric crystal material - Google Patents
Preparation method of large thickness period polarization ferroelectric crystal material Download PDFInfo
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- CN102520561B CN102520561B CN 201110431555 CN201110431555A CN102520561B CN 102520561 B CN102520561 B CN 102520561B CN 201110431555 CN201110431555 CN 201110431555 CN 201110431555 A CN201110431555 A CN 201110431555A CN 102520561 B CN102520561 B CN 102520561B
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Abstract
The invention discloses a preparation method of a large thickness period polarization ferroelectric crystal material, which includes evaporating a transparent electrode on the +z face of the large thickness period polarization ferroelectric crystal material, bonding the +z face of the ferroelectric crystal material evaporated with the transparent electrode with the +z face of another ferroelectric crystal material to obtain a composite ferroelectric crystal, evaporating metal electrodes on the upper face and the lower face of the composite ferroelectric crystal and polarizing the ferroelectric crystal of the metal electrodes evaporated with the metal electrodes to obtain the large thickness period polarization ferroelectric crystal material. By means of the preparation method, the large thickness period polarization ferroelectric crystal material can be prepared.
Description
Technical field
The present invention relates to the crystalline material processing technology field, disclose a kind of preparation method of large thickness period polarized ferroelectric crystal material.
Background technology
Accurate phase matching (Quasi-phase-matching) is a kind of important technology of nonlinear optics frequency inverted, its thought is proposed in 1962 by people such as J.Armstrong the earliest, V.Berger was generalized to two-dimensional structure in 1998, and proposed the concept of non-linear photon crystal non-linear photon crystal.Require momentum conservation during non-linear frequency transforms, in common nonlinear crystal due to the more difficult realization of the existence of dispersion, particularly a plurality of nonlinear interactions simultaneously, the reciprocal lattice vector that the non-linear cycle structure provides can realize phase matching relatively easily.By structure periodic structure (non-linear photon crystal) in nonlinear medium, it can effectively realize that non-linear frequency transforms.Relatively common perfect phase matching (Temperature Matching, angle automatching), this method is called accurate phase matching, and it can more easily utilize larger nonlinear factor.Therefore, present this technology has been widely used in non-linear optical field, and has realized the phenomenon that is difficult to accomplish in some common crystal.
By extra electric field polarization method manufacturing cycle sex reversal ferroelectric crystal, particularly manufacturing cycle, quasi periodic reversion ferroelectric crystal, it is one of focus of research both at home and abroad.According to document 1: " M.Yamada; N.Nada; M.Saitoh; and K.Watanabe; Appl.Phys.Lett.1993 (62): 435 ", document 2: " Shi-ning Zhu; Yong-yuan Zhu, Zhi-yong Zhang, Hong Shu, Hai-feng Wang, Jing-fen Hong, and Chuan-zhen Ge, J.Appl.Phys.1995 (77): 1995 " in the method for open report, utilize room temperature applying pulse electric field can make lithium niobate or the polarization of lithium tantalate property performance period.
In current accurate phase matching optical superlattice medium, PPLN (periodic polarized lithium niobate) crystal is a kind of colory nonlinear crystal, its effective nonlinear coefficient is large, large by scope, can utilize PPLN crystal experiment wavelength continuously, wide region, high-precision tuning.But due to the restriction that is subject to coercive electric field, its polarization thickness is generally only 0.5mm, has so just limited the clear aperature of crystal, and discomfort is fit to do the frequency transformation under high-power, has limited the range of application of accurate phase matching medium.At present, the LiNb0 of stoichiometric(al)
3be expected to solve an above-mentioned difficult problem with the lithium niobate of mixing magnesium, utilize this novel LiNb0
3can prepare the PPLN that thickness surpasses 1mm.
No matter the PPLN crystal mass was in laboratory or had commercially all obtained significant progress in recent years, external crystal thickness has developed into the 5mm coml 3mm and laboratory from initial 0.5mm.Due to the restriction of domestic crystal breakdown threshold voltage, the PPLN crystal thickness is generally 0.5～1.0mm.But, for obtaining the generation of relatively high power nonlinear effect, must increase the thickness of polarized crystal, and then increase its logical light cross-sectional area.
Up to the present, the cycle of little thickness, quasi-periodicity, the polarization method of lithium columbate crystal was tending towards ripe, but, for fear of the homogeneity of Crystal Growth of Lithium Niobate and the restriction of extra electric field polarization method, be greater than at thickness on the crystal of 2mm and realize that periodic polarized also being difficult to of extra electric field realize.Therefore, we reduce to half by the mode of lithium niobate-transparency electrode-lithium niobate bonding by the ferroelectric crystal required voltage of same thickness, break through the restriction that the extra electric field polarization method prepares large thickness periodical poled crystal.
Summary of the invention
(1) technical matters that will solve
In view of this, fundamental purpose of the present invention is to provide a kind of preparation method of large thickness period polarized ferroelectric crystal material, with solve the large thickness of preparation periodically and quasi-periodicity periodic inversion ferroelectric crystal material problem, reach the large thickness periodicity of preparation and quasi-periodicity periodic inversion ferroelectric crystal material purpose.
(2) technical scheme
For achieving the above object, the invention provides a kind of preparation method of large thickness period polarized ferroelectric crystal material, comprising: the ferroelectric crystal material+z face evaporation transparency electrode; This evaporation is had transparency electrode the ferroelectric crystal material+z face and another ferroelectric crystal material+the z face carries out bonding, obtains the compound iron electric crystal; At the equal evaporation metal electrode of this compound iron electric crystal upper and lower surface, then the compound iron electric crystal of evaporation metal electrode polarized, obtain large thickness period polarized ferroelectric crystal material.
In such scheme, described ferroelectric crystal material is lithium niobate, or is lithium tantalate, or is KTP, or is other ferroelectric crystal materials.
In such scheme, the large thickness period polarized ferroelectric crystal material of described preparation, its thickness is a millimeter magnitude, is greater than 1 millimeter, its ferroelectric domain direction is periodically or quasi periodic changes.
In such scheme, described transparency electrode is cycle or aperiodic transparent metal electrode, and thickness is between 20-1000nm.Described transparent metal electrode is tin indium oxide (ITO), or is other transparent metal electrodes.
In such scheme, the described electric crystal of the compound iron to the evaporation metal electrode is polarized, and its required polarizing voltage is half of same thickness ferroelectric crystal polarizing voltage.
In such scheme, the described electric crystal of the compound iron to the evaporation metal electrode is polarized, and is to connect negative pole at the upper and lower two surface metal electrodes of compound iron electric crystal, and the central, clear metal electrode connects positive pole, then this compound iron electric crystal is applied to high pulse voltage.
In such scheme, it is strong that described high pulse voltage refers to that its electric field intensity is greater than the coercive field of crystal, and its size is tens kV/mm.
(3) beneficial effect
From technique scheme, can find out, the present invention has following beneficial effect:
1, the preparation method of this large thickness period polarized ferroelectric crystal material provided by the invention, can realize the crystal preparation of large thickness cycle or quasi-periodic periodic polarized farmland reversion, can solve cross growth consolidation problem in farmland in polarization process, reach the purpose of the periodic polarized ferroelectric crystal of the evenly large thickness of preparation.
2, the preparation method of this large thickness period polarized ferroelectric crystal material provided by the invention, can both realize any ferroelectric material.
3, the preparation method of this large thickness period polarized ferroelectric crystal material provided by the invention, due to the maturation of bonding technology, be easy to realize.
The accompanying drawing explanation
Fig. 1 is the method flow diagram according to the large thickness period polarized ferroelectric crystal of the preparation material of the embodiment of the present invention;
Fig. 2-1 is to Fig. 2-3rd, according to the process chart of the large thickness period polarized ferroelectric crystal of the preparation material of the embodiment of the present invention;
Fig. 3 is the schematic diagram of the device that polarized of the compound iron electric crystal to evaporation plain metal electrode according to the embodiment of the present invention.
Embodiment
For making the purpose, technical solutions and advantages of the present invention clearer, below in conjunction with specific embodiment, and, with reference to accompanying drawing, the present invention is described in more detail.
As shown in Figure 1, Fig. 1 shows the method flow diagram according to the large thickness period polarized ferroelectric crystal of the preparation material of the embodiment of the present invention, and the method comprises: the ferroelectric crystal material+z face evaporation transparency electrode; This evaporation is had transparency electrode the ferroelectric crystal material+z face and another ferroelectric crystal material+the z face carries out bonding, obtains the compound iron electric crystal; At the equal evaporation metal electrode of this compound iron electric crystal upper and lower surface, then the compound iron electric crystal of evaporation metal electrode polarized, obtain large thickness period polarized ferroelectric crystal material.
Wherein, the ferroelectric crystal material+z face evaporation transparency electrode by tin indium oxide (ITO) or other transparency electrode evaporations to ferroelectric crystal material+z face; This evaporation is had transparency electrode the ferroelectric crystal material+z face and another ferroelectric crystal material+the z face carries out bonding, by another ferroelectric crystal material+z face and the ferroelectric crystal material that evaporation ITO is arranged+the z face carries out bonding, obtains the compound iron electric crystal.At the equal evaporation metal electrode of this compound iron electric crystal upper and lower surface, then the compound iron electric crystal of evaporation metal electrode polarized, be the compound iron electric crystal upper and lower surface evaporation plain metal electrode obtained at bonding, then the compound iron electric crystal of evaporation plain metal electrode polarized.Utilize the present invention can prepare large thickness period polarized ferroelectric crystal material.
Wherein, described ferroelectric crystal material is lithium niobate, or is lithium tantalate, or is KTP, or is other ferroelectric crystal material.Described thickness is a millimeter magnitude, is greater than 1 millimeter.Described large thickness period polarized ferroelectric crystal material refers to that its ferroelectric domain direction is cyclical variation.In the described first step, required transparency electrode is the transparent metal electrode, and as materials such as ITO, the thickness of transparent metal electrode, between 20-1000nm, needs to guarantee that this electrode is transparent.Described the method also comprises minor cycle of preparing large thickness, large period, quasi-periodicity polarized crystal.Described transparent metal electrode is cycle or aperiodic transparent metal electrode.The described electric crystal of the compound iron to the evaporation metal electrode is polarized, and is to connect negative pole at the upper and lower two surface metal electrodes of compound iron electric crystal, and the central, clear metal electrode connects positive pole, then this compound iron electric crystal is applied to high pulse voltage.It is strong that this high pulse voltage refers to that its electric field intensity is greater than the coercive field of crystal, and its size is tens kV/mm.The described electric crystal of the compound iron to the evaporation metal electrode is polarized, and its required polarizing voltage is half of same thickness ferroelectric crystal polarizing voltage.
The method of the large thickness period polarized ferroelectric crystal of the preparation based on shown in Fig. 1 material, Fig. 2 shows the process chart for preparing large thickness period polarized ferroelectric crystal material according to the embodiment of the present invention, and the method comprises:
As shown in Fig. 2-1, ferroelectric crystal+transparent metal electrode that the z face evaporation cycle is 29 μ m.
As shown in Fig. 2-2, by another ferroelectric crystal+z face and evaporation have the transparent metal electrode+the z face carries out bonding, obtains the compound iron electric crystal; In Fig. 2-1 and Fig. 2-2, the described polarization crystal cycle is identical, and thickness is 0.5～1mm.
As Figure 2-3, at the upper and lower surface difference evaporation plain metal electrode of the compound iron electric crystal obtained, the arrow label direction is the direction that crystal need to polarize.
Finally, to evaporation, have the compound iron electric crystal of plain metal electrode to be polarized, the surperficial plain metal electrode of crystal upper and lower two connects negative pole, and the central, clear metal electrode connects positive pole, as shown in Figure 3.
In the present embodiment, obtaining thickness by bonding is 2mm, the cycle lithium niobate periodical poled crystal that is 29 μ m, the optical parametric oscillator output that to be applicable to wavelength be the 1064nm light wave.
Fig. 3 is the schematic diagram of the device that polarized of the compound iron electric crystal to evaporation plain metal electrode according to the embodiment of the present invention, needed random waveform pulse occurs in function signal generator, amplify pulse signal and be applied on the ferroelectric crystal sample through signal amplifier, oscillograph detects the pulse signal voltage applied and reaches by the current waveform of resistance R.The compound iron electric crystal of evaporation plain metal electrode is placed at the sample place.
Above-described specific embodiment; purpose of the present invention, technical scheme and beneficial effect are further described; institute is understood that; the foregoing is only specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any modification of making, be equal to replacement, improvement etc., within all should being included in protection scope of the present invention.
Claims (8)
1. the preparation method of a large thickness period polarized ferroelectric crystal material, is characterized in that, comprising:
The ferroelectric crystal material+z face evaporation transparency electrode;
This evaporation is had transparency electrode the ferroelectric crystal material+z face and another ferroelectric crystal material+the z face carries out bonding, obtains the compound iron electric crystal;
At the equal evaporation metal electrode of this compound iron electric crystal upper and lower surface, then the compound iron electric crystal of evaporation metal electrode polarized, obtain large thickness period polarized ferroelectric crystal material.
2. the preparation method of large thickness period polarized ferroelectric crystal material according to claim 1, is characterized in that, described ferroelectric crystal material is lithium niobate, or be lithium tantalate, or be KTP.
3. the preparation method of large thickness period polarized ferroelectric crystal material according to claim 1, it is characterized in that, the large thickness period polarized ferroelectric crystal material of described preparation, its thickness is a millimeter magnitude, be greater than 1 millimeter, its ferroelectric domain direction is periodically or quasi periodic changes.
4. the preparation method of large thickness period polarized ferroelectric crystal material according to claim 1, is characterized in that, described transparency electrode is cycle or aperiodic transparent metal electrode, and thickness is between 20-1000nm.
5. the preparation method of large thickness period polarized ferroelectric crystal material according to claim 4, is characterized in that, described transparent metal electrode is tin indium oxide, or be other transparent metal electrodes.
6. the preparation method of large thickness period polarized ferroelectric crystal material according to claim 1, is characterized in that, the described electric crystal of the compound iron to the evaporation metal electrode is polarized, and its required polarizing voltage is half of same thickness ferroelectric crystal polarizing voltage.
7. the preparation method of large thickness period polarized ferroelectric crystal material according to claim 1, it is characterized in that, the described electric crystal of the compound iron to the evaporation metal electrode is polarized, to connect negative pole at the upper and lower two surface metal electrodes of compound iron electric crystal, the central, clear metal electrode connects positive pole, then this compound iron electric crystal is applied to high pulse voltage.
8. the preparation method of large thickness period polarized ferroelectric crystal material according to claim 7, is characterized in that, it is strong that described high pulse voltage refers to that its electric field intensity is greater than the coercive field of crystal, and its size is tens kV/mm.
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| JP2004020749A (en) * | 2002-06-13 | 2004-01-22 | Nippon Telegr & Teleph Corp <Ntt> | Manufacturing method for thin film substrate for wavelength transducer, and manufacturing method of wavelength transformation element |
| CN101308311A (en) * | 2008-06-25 | 2008-11-19 | 北京交通大学 | Differential frequency mixing frequency cascade magnesium-doped near-stoichiometric ratio lithium niobate optical wavelength converter |
| CN101880913A (en) * | 2009-05-06 | 2010-11-10 | 胡文 | Method for preparing lithium niobate thin-film materials |
| CN102109730A (en) * | 2009-12-24 | 2011-06-29 | 福建福晶科技股份有限公司 | Nonlinear crystal frequency multiplier |
| CN102122105A (en) * | 2011-03-15 | 2011-07-13 | 中国科学院半导体研究所 | Polarization method for ferroelectric crystal material |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2004020749A (en) * | 2002-06-13 | 2004-01-22 | Nippon Telegr & Teleph Corp <Ntt> | Manufacturing method for thin film substrate for wavelength transducer, and manufacturing method of wavelength transformation element |
| CN101308311A (en) * | 2008-06-25 | 2008-11-19 | 北京交通大学 | Differential frequency mixing frequency cascade magnesium-doped near-stoichiometric ratio lithium niobate optical wavelength converter |
| CN101880913A (en) * | 2009-05-06 | 2010-11-10 | 胡文 | Method for preparing lithium niobate thin-film materials |
| CN102109730A (en) * | 2009-12-24 | 2011-06-29 | 福建福晶科技股份有限公司 | Nonlinear crystal frequency multiplier |
| CN102122105A (en) * | 2011-03-15 | 2011-07-13 | 中国科学院半导体研究所 | Polarization method for ferroelectric crystal material |
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