CN102519904A - Automatic constant temperature type photoacoustic detection device for SF6 decomposed components and experiment method thereof - Google Patents
Automatic constant temperature type photoacoustic detection device for SF6 decomposed components and experiment method thereof Download PDFInfo
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Abstract
The invention which relates to an automatic constant temperature type photoacoustic detection device for SF6 decomposed components and an experiment method thereof belongs to the technical field of SF6 gas insulation device partial discharge online monitoring. The device is characterized in that an automatic constant temperature system is arranged in present infrared photoacoustic spectrum monitoring systems; and according to the method, the device is utilized to detect the SF6 gas partial discharge decomposed components in a GIS (gas insulated substation) simulation element under automatic preset temperature constancy conditions. According to the invention, the influence of external environment can be eliminated, the gas components of SO2, CO2, CF4, SO2F2, SOF2 and the like with the concentrations of low to 0.01muL/L can be effectively detected, the accuracy, the detection precision and the stability are high, and performances of a solid state relay are stable, so the long-term effective working of the automatic constant temperature system can be guaranteed. The device which can be widely applied to the field of the SF6 gas insulation equipment partial discharge online monitoring is especially suitable for detecting the SF6 gas partial discharge decomposed components in the GIS.
Description
Technical field
The invention belongs to sulfur hexafluoride (SF
6) the on-line monitoring technique field of gas insulated electric apparatus shelf depreciation (PD), be specifically related to SF among the GIS
6The automatic constant-temperature type optoacoustic spectroscopy pick-up unit and the experimental technique of decomposition components under the shelf depreciation.
Background technology
Gas insulated combined electrical equipment (GIS) is with SF
6Gas is as insulating medium, has dielectric strength height, stable, advantage such as floor area is few and maintenance workload is little, in electric system, especially in city, big and medium-sized cities net is built and transformed, obtains using more and more widely.But see that from ruuning situation in recent years many problems have in use appearred in GIS both domestic and external, its inner inevitably defective can cause fault and constantly enlarge along with the growth of working time that wherein outstanding behaviours is the fault that insulation defect causes.Insulation defect partial discharge phenomenon can occur before the penetrability fault that causes insulating medium, when shelf depreciation takes place, and SF
6Gas can decompose down in heat, electric effect, and with little water (H of GIS device interior existence
2O), little oxygen (O
2) wait impurity to react, generate some fault type is judged valuable characteristic gas, like sulphuric dioxide (SO
2), fluoridize thionyl (SOF
2), fluoridize sulfonyl (SO
2F
2), hydrogen fluoride (HF) etc., if the position of shelf depreciation appears near the solid dielectric insulation, also have carbon dioxide (CO
2), carbon tetrafluoride (CF
4) wait composition to produce.Therefore, can pass through SF
6Gas detects and component analysis; Type and the degree of judging insulation defect through the type and the content of gas composition; For the judgement and the repair based on condition of component of the dielectric level of GIS equipment provides foundation; Thereby avoiding the generation of the catastrophic failure and the accident of having a power failure on a large scale, is to guarantee safe operation of power system so study the pick-up unit and the experimental technique of decomposition components under the sulfur hexafluoride shelf depreciation, guarantees one of important means that national product normally carries out.
The photo-acoustic detection device and the experimental technique of decomposition components under the existing sulfur hexafluoride shelf depreciation: application number is 201010295554.0 patent " office puts down infrared photoacoustic spectra pick-up unit and the method that sulfur hexafluoride decomposes component ", and disclosed device mainly comprises corona free experimental transformer, induction voltage regulator, no shelf depreciation protective resistance, noninductive resistance, standard capacitor divider, GIS analog element, wideband high speed vast capacity digital storage oscilloscope, infrared photoacoustic spectra system etc.; Disclosed experimental technique comprises: the preparation before (1) is detected; (2) detection office puts down the concentration of sulfur hexafluoride decomposition components; (3) cleaning and maintenance.The major defect of this patent is that its infrared photoacoustic spectra system that adopts is an open devices; Can not automatic constant-temperature; When actual field detects, receive the influence of environment temperature bigger, the stability of photo-acoustic detection device, the accuracy of detection and precision can not get guaranteeing, are not suitable for on-line monitoring.
Summary of the invention
The objective of the invention is to weak point to the photo-acoustic detection device and method of decomposition components under the existing sulfur hexafluoride shelf depreciation; A kind of automatic constant-temperature type photo-acoustic detection device and experimental technique of sulfur hexafluoride decomposition components are provided; Have highly sensitive, sensing range is wide, detection speed is fast, accuracy of detection is high, do not need consume carrier gas, can automatic constant-temperature and be not affected by the external environment, be particularly suitable for advantage such as on-line monitoring, for further improving SF
6The optoacoustic spectroscopy on-line monitoring system of shelf depreciation decomposition components is laid a good foundation.
Principal feature of the present invention is in existing infrared photoacoustic spectra detection system, to set up automatic thermostatic device, and the principle of its automatic constant-temperature is to control the break-make of heating circuit through detecting photoacoustic cell temperature inside signal, to reach the purpose of constant temperature.Because optoacoustic spectroscopy gas detection method is to have utilized the acoustic theory of gas infra-red heat absorption effect and photoacoustic cell in essence; Variation of temperature can influence the infrared absorption effect of gas and the various performance parameters of photoacoustic cell; Thereby have influence on the accuracy of detection and the stability of optoacoustic spectroscopy detection system; Therefore the present invention has added automatic thermostatic device for existing infrared photoacoustic spectra detection system; Make system constant, help improving the stability of infrared photoacoustic spectra detection system and the accuracy of detection in preset temperature.
The technical scheme that realizes the object of the invention is: a kind of automatic constant-temperature type photo-acoustic detection device of sulfur hexafluoride decomposition components, mainly comprise do not have dizzy experimental transformer, pressure regulator, no office put protective resistance, noninductive resistance, capacitive divider, GIS analog element, wideband high speed vast capacity digital storage oscilloscope, infrared photoacoustic spectra detection system, automatic constant temperature system etc.Wherein: described infrared photoacoustic spectra detection system, mainly form by wideband infrared light supply, zinc selenide lens, mechanical chopper, chopper controller, optical filter wheel, optical filter, zinc selenide window, photoacoustic cell, rain glass, microphone, signal-transmitting cable, gas valve, gas piping, vacuum pump, optics support, lock-in amplifier and computing machine etc.Characteristic of the present invention is: the outside installing automatic constant temperature system of the photoacoustic cell in described infrared photoacoustic spectra detection system.Described automatic constant temperature system mainly is made up of Switching Power Supply, solid-state relay, intelligent digital humidostat, annular heating tape, thermopair etc.
Described Switching Power Supply is commercial product; Output voltage is 60V; Maximum current is 5A, and the input end of said Switching Power Supply is connected with the power supply of 220V/50Hz through lead, after the positive pole of the output terminal of said Switching Power Supply passes through lead and the positive pole of said solid-state relay output terminal is connected; The negative pole of said solid-state relay output terminal is connected with described annular heating tape positive terminal through lead; The negative pole of the output terminal of described Switching Power Supply is connected with described annular heating tape negative terminal through lead, is used for for the described annular heating tape that is installed in the photoacoustic cell outside surface direct supply being provided, so that to described photoacoustic cell heating.
Described solid-state relay is commercial product; The controlled end of described solid-state relay is connected with the control signal output ends of described intelligent digital humidostat through lead; In order to receiving the output control signal of intelligent digital humidostat, thereby the duty of controlling the heating circuit of said Switching Power Supply and said annular heating tape forming reaches the purpose of regulating said photoacoustic cell internal temperature.
Described annular heating tape is a tailor-made product; Number is 2 ~ 6; Each annular heating tape width is that 20 ~ 50mm, thickness are that the external diameter of 1 ~ 1.5mm, internal diameter and said photoacoustic cell is complementary, and described annular heating tape is installed in the outside surface of said photoacoustic cell respectively, and two end connectors of each annular heating tape are connected with said Switching Power Supply with said solid-state relay respectively through lead; Be used for directly photoacoustic cell being heated heating power 100 ~ 250W.
Described thermopair is commercial product; Constitute by thermocouple temperature sensor and thermopair controller; Described thermopair is installed on the outside surface of said photoacoustic cell; The input end of the thermocouple temperature sensor of said thermopair is connected with the output terminal of thermopair controller through lead; The output terminal of thermocouple temperature sensor is connected with the input end of said intelligent digital humidostat, is used to detect the photoacoustic cell internal temperature, and temperature signal is passed to the intelligent digital humidostat and shows and as the control signal of said solid-state relay.
Described intelligent digital humidostat is commercial product; The input end of said intelligent digital humidostat is connected with described thermopair through lead; In order to receive the detected photoacoustic cell temperature signal of described thermopair; The output terminal of described intelligent digital humidostat is connected with the input end of described solid-state relay through lead, in order to the conducting and the shutoff of control solid-state relay.
Described optical filter and optical filter wheel are commercial product; Optical filter is installed in the hole of optical filter wheel; Optical filter wheel is through the step motor drive rotation, and in order to switch the different character optical filter in light path, each optical filter centre wavelength is respectively 7350nm (SO on the optical filter wheel
2Absorption peak centre wavelength), 4260nm (CO
2Absorption peak centre wavelength), 7780nm (CF
4Absorption peak centre wavelength), 18550nm (SO
2F
2Absorption peak centre wavelength), 7440nm (SOF
2Absorption peak centre wavelength); Only allow the infrared light of its centre wavelength to pass through; Filter the infrared light of residue frequency band, through signal cable optical filter wheel is connected with computing machine, computing machine sends the stepper motor rotation in the signal controlling optical filter wheel; And then the infrared light of control different characteristic wavelength injects in the photoacoustic cell through the zinc selenide window through optical filter, and the detection under different wave length has promptly reflected the gas with various components contents.
A kind of experimental technique of automatic constant-temperature type photo-acoustic detection of sulfur hexafluoride decomposition components utilizes apparatus of the present invention, to the SF in the GIS analog element
6The concrete steps that the shelf depreciation decomposition components of gas detects are following:
(1) experiment is prepared
1. photoacoustic cell and the Installation and Debugging of automatic constant temperature system parts
At first clean the inwall of photoacoustic cell with anhydrous alcohol; Remove the impurity of pond inwall; After treating that photoacoustic cell is air-dry; Parts such as microphone, thermopair, rain glass, turnover tracheae, air valve, zinc selenide diaphragm are installed again, when the zinc selenide diaphragm is installed, are compressed with bolt behind the pad silica gel sheet earlier at zinc selenide diaphragm and photoacoustic cell contact position.Add raw material band and fluid sealant in each threaded connection place, good air-tightness is arranged to guarantee photoacoustic cell; The three-dimensional of adjusting wideband infrared light supply and photoacoustic cell is then adjusted the up-down optics support of optics support, chopper, optical filter wheel, zinc selenide lens; The center that guarantees each parts and photoacoustic cell is on same horizontal line; Make infrared light accurately direct projection see through each parts, inject photoacoustic cell.The heating circuit and the control loop of automatic constant temperature system are connected through lead respectively successively, connect with the mains, confirm each element operate as normal, annular heating tape is installed in the photoacoustic cell outside surface, and tighten the screws guarantees that annular heating tape is close to the photoacoustic cell outside surface.
2. air tightness test
After the completion of (1)-1. step, at first close air intake valve, open the valve of giving vent to anger; Start the vacuum pump of this device then, photoacoustic cell is vacuumized, when the rain glass of this device shows that air pressure is 0.005～0.01MPa; Close give vent to anger valve and vacuum pump successively, left standstill photoacoustic cell 10～15 hours, go to observe the rain glass registration again; As remain unchanged basically, explain that then the impermeability of photoacoustic cell under vacuum of this device is good; Open the air intake valve and the nitrogen (N of this device
2) bottle valve, in photoacoustic cell, pour N
2Gas to rain glass registration is 0.2～0.25MPa, closes air intake valve and N successively
2Bottle valve left standstill photoacoustic cell 10～15 hours, went to observe the rain glass registration again, as remaining unchanged basically, explained that then photoacoustic cell impermeability under anticyclonic situation of this device is good.
3. clean photoacoustic cell
After the completion of (1)-2. step, open the valve of giving vent to anger earlier, start described vacuum pump, described photoacoustic cell is vacuumized, when described photoacoustic cell vacuum tightness is 0.005～0.01MPa, close give vent to anger valve and vacuum pump successively, open described SF again
6The valve of gas cylinder and air intake valve charge into SF in described photoacoustic cell
6Gas, when photoacoustic cell internal gas pressure value is 0.2～0.25MPa till, close SF then successively
6The valve of gas cylinder and air intake valve clean described photoacoustic cell.Then, vacuumize earlier, charge into SF again by the aforementioned operation step
6Purge of gas so repeats to wash 2～4 times, cleans the back and through vacuum pump photoacoustic cell is vacuumized, and passes through draft tube and air intake valve at last with the SF in the GIS analog element to be detected
6The shelf depreciation decomposed gas component feeds in the photoacoustic cell.
(2) parameter measurement under the steady temperature
After the completion of (1) step; At first open wideband infrared light supply, copped wave controller, chopper, optical filter wheel, microphone, rain glass, thermopair, Switching Power Supply, solid-state relay, intelligent digital humidostat and lock-in amplifier, lock-in amplifier 1s integral time.
Control the temperature in the photoacoustic cell again, make it constant between 30 ℃ ~ 50 ℃.Promptly control the conducting and the shutoff of described solid-state relay through described intelligent digital humidostat output square-wave signal; What of low-voltage direct electric energy the conducting of described solid-state relay and the output terminal that turn-offs the Switching Power Supply control this device again carry to described annular heating tape; Thereby temperature in the photoacoustic cell is increased or reduce, the described intelligent digital humidostat of manual adjustments setting value is t
1, described thermopair will detect actual temperature signal t in the photoacoustic cell
2Being transferred to described intelligent digital humidostat shows and compares: work as t
2>t
1(be the Shi Jizhi > of temperature in the photoacoustic cell; Setting value) time, the ON time that the square-wave signal of described intelligent digital humidostat output is controlled described solid-state relay shortens, and the low-voltage direct electric energy that flows to annular heating tape is reduced, thereby the photoacoustic cell temperature is reduced; Otherwise, work as t
2<t
1(be the actual value of temperature in the photoacoustic cell<setting value) time; It is elongated that the square-wave signal of described intelligent digital humidostat output is controlled the ON time of described solid-state relay; The low-voltage direct electric energy that flows to annular heating tape is increased; Thereby the photoacoustic cell temperature is raise, and this comparison procedure constantly repeats, up to the photoacoustic cell temperature stabilization at setting value t
1(be t
1=t
2) till, thereby reached the purpose of photoacoustic cell constant temperature.
After temperature constant, measure the parameters performance of photoacoustic cell then.At first measure the resonant frequency of photoacoustic cell
f, the frequency of regulating the copped wave controller is observed the photoacoustic signal that lock-in amplifier shows simultaneously, and when the photoacoustic signal of lock-in amplifier demonstration reached maximum, the frequency that record copped wave this moment controller shows was the resonant frequency of photoacoustic cell under this temperature
f
Then measure the various noises of photoacoustic cell.Measure the external environmental noise value earlier: wideband infrared light supply and chopper are closed, and the record value that this moment, lock-in amplifier showed is the neighbourhood noise value; Measure the chopper noise figure again: keep the wide range infrared light supply to close and open chopper, the frequency of regulating chopper is to resonant frequency, and record is the registration of lock-in amplifier at this moment, and this registration deducts the neighbourhood noise value and is the chopper noise figure.Measure at last by the zinc selenide diaphragm and absorb the noise figure that absorption is caused with the photoacoustic cell inwall: through draft tube with charging into high pure nitrogen in the photoacoustic cell; Open chopper and wideband infrared light supply; The record numerical value that this moment, lock-in amplifier showed; Be the overall system noise, deduct neighbourhood noise and chopper noise with the overall system noise and be the zinc selenide diaphragm and absorb the noise figure that absorption causes with the photoacoustic cell inwall.
The coefficient of relationship of measurement gas photoacoustic signal and gas concentration is a response coefficient again
kWith gas distributing system with the gas that will measure be made into the calibrating gas of variable concentrations; Charge into photoacoustic cell through draft tube and air intake valve respectively; Write down the photoacoustic signal value that lock-in amplifier records under the various concentration gases; Adopt the mode of one-variable linear regression match to calculate the coefficient of relationship between gas concentration and the photoacoustic signal, i.e. response coefficient
k
Calculate the LDL of photo-acoustic detection system at last.For sulfur hexafluoride shelf depreciation decomposed gas component, with the overall system noise divided by separately response coefficient
kGet final product the LDL of all gases component.
(3) detection of sulfur hexafluoride shelf depreciation decomposition components concentration
After the completion of (2) step; Under its condition; Through escape pipe, give vent to anger valve and vacuum pump photoacoustic cell is evacuated earlier, the back charges into the sulfur hexafluoride shelf depreciation decomposition components in the GIS analog element to be detected through draft tube and air intake valve, and air pressure is 0.1MPa; Through the rotation of computer control optical filter wheel, successively centre wavelength is respectively 7350nm (SO again
2Absorption peak centre wavelength), 4260nm (CO
2Absorption peak centre wavelength), 7780nm (CF
4Absorption peak centre wavelength), 18550nm (SO
2F
2Absorption peak centre wavelength), 7440nm (SOF
2Absorption peak centre wavelength) optical filter rotates in the light path, and writes down the pairing photoacoustic signal value of each characteristic optical filter successively
S i (
i=1 ..., 6), the photoacoustic signal value input computing machine that at last lock-in amplifier is recorded passes through formula on computers
S i =
k*
C i +
d(
i=1 ..., 6) calculate (in the formula
kBe response coefficient,
S i Be the photoacoustic signal value,
dBe intercept, promptly all gases component photoacoustic signal and gas concentration concern the intersection point of straight line and ordinate, and ordinate is the photoacoustic signal value), obtain SO accurately
2, CO
2, CF
4, SO
2F
2, SOF
2Concentration value
C i , (
i=1 ..., 6).
(4) plant maintenance
After the completion of (3) step, open give vent to anger valve and vacuum pump earlier, the gas in the photoacoustic cell is evacuated to outdoor discharging; Close give vent to anger valve and vacuum pump then, open nitrogen cylinder valve and air intake valve and charge into nitrogen, open give vent to anger valve and vacuum pump then successively; Gas in the photoacoustic cell is evacuated to outdoor discharging; Repeat above operation 2～4 times, photoacoustic cell is cleaned up, prevent SF with nitrogen
6Sour gas corrosion photoacoustic cell in the shelf depreciation decomposition components.
After the present invention adopts technique scheme, mainly contain following effect:
(1) apparatus of the present invention is highly sensitive, can effectively detect the SO that is low to moderate 0.01 μ L/L
2, CO
2, CF
4, SO
2F
2, SOF
2Etc. gas composition, can carry out qualitative and quantitative analysis accurately to decomposition components under the sulfur hexafluoride shelf depreciation, accuracy is high.
(2) apparatus of the present invention are automatic constant-temperature type optoacoustic spectroscopy pick-up units; The temperature that ability is regulated photoacoustic cell automatically according to preset temperature value; Make it constant at preset value; Its advantage is: the one, eliminated of the influence of photo-acoustic detection system external environment condition to its accuracy of detection, and with respect to existing optoacoustic spectroscopy pick-up unit, accuracy of detection and stability all are greatly improved; The 2nd, can regulate the photoacoustic cell temperature automatically is the photo-acoustic detection optimal temperature of decomposition components.
(3) stable performance of the solid-state relay of apparatus of the present invention employing can be cut-off under the normal running conditions 1,000,000 times, and the permanently effective work of ability lays the first stone for guaranteeing the permanently effective work of automatic constant temperature system.
The present invention can be widely used in SF
6The on-line monitoring of shelf depreciation in the gas insulated electric apparatus is specially adapted to SF in the GIS equipment
6The detection of gas shelf depreciation decomposition components, for scientific research institutions and electric system to GIS equipment SF
6The theoretical analysis of state-detection and applied research provide a kind of simple and reliable method and experiment porch.
Description of drawings:
The whole wiring diagram that Fig. 1 detects for existing infrared photoacoustic spectra;
Fig. 2 is the principle schematic of existing infrared photoacoustic spectra detection system;
Fig. 3 is the automatic constant temperature system structural drawing of embodiment 1.
Among the figure: 1 induction voltage regulator; 2 do not have dizzy experimental transformer; 3 no shelf depreciation protective resistances; 4 standard capacitor dividers; 5 noninductive resistances; 6 GIS analog elements; 7 infrared photoacoustic spectra system and automatic constant temperature systems; 8 wideband high speed vast capacity digital storage oscilloscopes; 9 wide range infrared light supplies; 10 zinc selenide lens; 11 choppers; 12 chopper controllers; 13 optical filter wheels; 14 optical filters; 15 zinc selenide diaphragms; 16 photoacoustic cells; 17 thermocouple temperature sensors; 18 rain glasss; 19 microphones; 20 signal cables; 21 air intake valves; 22 valves of giving vent to anger; 23 draft tube; 24 escape pipes; 25 vacuum pumps; 26 optics supports; 27 lock-in amplifiers; 28 computing machines; 29 Switching Power Supplies; 30 solid-state relays; 31 intelligent digital humidostats; 32 annular heating tapes.
Embodiment
Below in conjunction with embodiment, further specify the present invention.
Embodiment 1
Shown in Fig. 1 ~ 3; A kind of automatic constant-temperature type photo-acoustic detection device of sulfur hexafluoride decomposition components mainly comprises not having dizzy experimental transformer 2, induction voltage regulator 1, no shelf depreciation protective resistance 3, standard capacitor divider 4, noninductive resistance 5, GIS analog element 6, wideband high speed vast capacity digital storage oscilloscope 8, automatic constant temperature system 7, infrared photoacoustic spectra detection system 7 etc.Wherein: described infrared photoacoustic spectra detection system, mainly form by wideband infrared light supply 9, zinc selenide lens 10, mechanical chopper 11, chopper controller 12, optical filter wheel 13, optical filter 14, zinc selenide diaphragm 15, photoacoustic cell 16, rain glass 18, microphone 19, signal cable 20, air intake valve 21, the valve 22 of giving vent to anger, draft tube 23, escape pipe 24, vacuum pump 25, optics support 26, lock-in amplifier 27 and computing machine 28 etc.Characteristic of the present invention is: the outside installing automatic constant temperature system of the photoacoustic cell in described infrared photoacoustic spectra detection system.Described automatic constant temperature system mainly is made up of Switching Power Supply 29, solid-state relay 30, intelligent digital humidostat 31, annular heating tape 32, thermopair 17 etc.
Described Switching Power Supply 29 is commercial product; Output voltage is 60V; Maximum current is 5A, and the input end of Switching Power Supply 29 is connected with the power supply of 220V/50Hz through lead, after the positive pole of the output terminal of said Switching Power Supply 29 passes through lead and the positive pole of said solid-state relay 30 output terminals is connected; The negative pole of said solid-state relay 30 output terminals is connected with described annular heating tape 32 positive terminals through lead; The negative pole of the output terminal of described Switching Power Supply 29 is connected with described annular heating tape 32 negative terminals through lead, is used for for the said annular heating tape 32 that is installed in photoacoustic cell 16 outside surfaces direct supply being provided, so that to described photoacoustic cell 16 heating.
Described solid-state relay 30 is commercial product; The controlled end of described solid-state relay 30 is connected with the control signal output ends of described intelligent digital humidostat 31 through lead; In order to receiving the output control signal of intelligent digital humidostat 31, thereby the duty of controlling the heating circuit of said Switching Power Supply 29 and said annular heating tape 32 being formed reaches the purpose of regulating said photoacoustic cell 16 internal temperatures.
Described annular heating tape 32 is a tailor-made product; Number is 2; The width of each annular heating tape 32 is that 50mm, thickness are that the external diameter of 1.5mm, internal diameter and said photoacoustic cell 16 is complementary, and said annular heating tape 32 is installed in the outside surface of said photoacoustic cell 16 respectively, and two end connectors of each annular heating tape 32 are connected with said Switching Power Supply 29 with said solid-state relay 30 respectively through lead; Be used for directly photoacoustic cell 16 being heated heating power 250W.
Described thermopair 17 is commercial product; Constitute by thermocouple temperature sensor and thermopair controller; Described thermopair 17 is installed on the outside surface of photoacoustic cell; The input end of the thermocouple temperature sensor of said thermopair 17 is connected with the output terminal of thermopair controller through lead; The output terminal of thermocouple temperature sensor is connected with the input end of said intelligent digital humidostat 31, is used to detect said photoacoustic cell 16 internal temperatures, and temperature signal is passed to intelligent digital humidostat 31 and shows and as the control signal of said solid-state relay 30.
Described intelligent digital humidostat 31 is commercial product; The input end of said intelligent digital humidostat 31 is connected with described thermopair 17 through lead; Be used to receive the temperature signal of described thermopair 17 detected said photoacoustic cells 16; The output terminal of described intelligent digital humidostat 31 is connected with the input end of described solid-state relay 30 through lead, in order to the conducting and the shutoff of control solid-state relay 30.
Described optical filter 14 is commercial product with optical filter wheel 13; Optical filter 14 is installed in the hole of optical filter wheel 13; Optical filter wheel 13 is through the step motor drive rotation, and in order to switch the different character optical filter in light path, each optical filter 14 centre wavelength is respectively 7350nm (SO on the optical filter wheel 13
2Absorption peak centre wavelength), 4260nm (CO
2Absorption peak centre wavelength), 7780nm (CF
4Absorption peak centre wavelength), 18550nm (SO
2F
2Absorption peak centre wavelength), 7440nm (SOF
2Absorption peak centre wavelength); Only allow the infrared light of its centre wavelength to pass through; Filter the infrared light of residue frequency band, through signal cable 20 optical filter wheel 13 is connected with computing machine 28, computing machine 28 sends the stepper motor rotation in the signal controlling optical filter wheel 13; And then the infrared light of control different characteristic wavelength through optical filter 14 in zinc selenide window 15 is injected described photoacoustic cell 16, the detection under different wave length has promptly reflected the gas with various components contents.
Embodiment 2
A kind of automatic constant-temperature type photo-acoustic detection device of sulfur hexafluoride decomposition components; With embodiment 1; Wherein: described annular heating tape 32 numbers are 4, and the width of each annular heating tape 32 is that 40mm, thickness are that the external diameter of 1.2mm, internal diameter and photoacoustic cell 16 is complementary, and heating power is 200W.
A kind of automatic constant-temperature type photo-acoustic detection device of sulfur hexafluoride decomposition components; With embodiment 1; Wherein: described annular heating tape 32 numbers are 6, and the width of each annular heating tape 32 is that 20mm, thickness are that the external diameter of 1mm, internal diameter and photoacoustic cell 16 is complementary, and heating power is 100W.
Embodiment 4
A kind of experimental technique of automatic constant-temperature type photo-acoustic detection of sulfur hexafluoride decomposition components, concrete steps are following:
(1) experiment is prepared
1. photoacoustic cell and the Installation and Debugging of automatic constant temperature system parts
At first clean the inwall of photoacoustic cell 16 with anhydrous alcohol; Remove the impurity of pond inwall; After treating that photoacoustic cell 16 is air-dry; Parts such as microphone 19, thermopair 17, rain glass 18, draft tube 23, escape pipe 24, air intake valve 21, the valve 22 of giving vent to anger, zinc selenide diaphragm 15 are installed again, when zinc selenide diaphragm 15 is installed, are compressed with bolt behind the pad silica gel sheet earlier in zinc selenide diaphragm 15 and photoacoustic cell 16 contact positions.Add raw material band and fluid sealant in each threaded connection place, to guarantee that photoacoustic cell 16 has good air-tightness; The three-dimensional of adjusting wideband infrared light supply 9 and photoacoustic cell 16 is then adjusted the up-down optics support of optics support, chopper 11, optical filter wheel 13, zinc selenide lens 10; The center that guarantees each parts and photoacoustic cell 16 is on same horizontal line; Make infrared light accurately direct projection see through each parts, inject photoacoustic cell 16.The heating circuit and the control loop of automatic constant temperature system are connected through lead respectively successively; Connect with the mains, confirm each element operate as normal, annular heating tape 32 is installed on the outside surface of photoacoustic cell 16; Tighten the screws guarantees that annular heating tape 32 is close to photoacoustic cell 16 outside surfaces.
2. air tightness test
After the completion of (1)-1. step, at first close air intake valve 21, open the valve 22 of giving vent to anger; Start the vacuum pump 25 of this device then, photoacoustic cell 16 is vacuumized, when the rain glass 18 of this device shows that air pressure is 0.005MPa; Close give vent to anger valve 22 and vacuum pump 25 successively, left standstill photoacoustic cell 12 hours, go to observe rain glass 18 registrations again; As remain unchanged basically, explain that then the impermeability of photoacoustic cell 16 under vacuum of this device is good; Open the air intake valve 21 and the nitrogen (N of this device
2) bottle valve, in photoacoustic cell 16, pour N
2Gas to rain glass 18 registrations are 0.2MPa, close air intake valve 21 and N successively
2Bottle valve left standstill photoacoustic cell 12 hours, went to observe rain glass 18 registrations again, as remaining unchanged basically, explained that then photoacoustic cell 16 impermeability under anticyclonic situation of this device is good.
3. clean photoacoustic cell
After the completion of (1)-2. step, open the valve 22 of giving vent to anger earlier, start described vacuum pump 25, described photoacoustic cell 16 is vacuumized, when described photoacoustic cell 16 vacuum tightnesss are 0.005MPa, close give vent to anger valve 22 and vacuum pump 25 successively, open described SF again
6The valve of gas cylinder and air intake valve 21 charge into SF in described photoacoustic cell 16
6Gas, when photoacoustic cell 16 internal gas pressure values are 0.2MPa till, close SF then successively
6The valve of gas cylinder and air intake valve 21 clean described photoacoustic cell 16.Then, vacuumize earlier, charge into SF again by the aforementioned operation step
6Purge of gas so repeats to wash 2～4 times, cleans the back and through vacuum pump 25 photoacoustic cell 16 is vacuumized, and passes through draft tube 23 and air intake valve 21 at last with the SF in the GIS analog element 6 to be detected
6The shelf depreciation decomposed gas component feeds in the photoacoustic cell 16.
(2) parameter measurement under the steady temperature
After the completion of (1) step; At first open wideband infrared light supply 9, copped wave controller 12, chopper 11, optical filter wheel 13, microphone 19, rain glass 18, thermopair 17, Switching Power Supply 29, solid-state relay 30, intelligent digital humidostat 31 and lock-in amplifier 27, lock-in amplifier 1s integral time.
Control the temperature in the photoacoustic cell 16 again, make it constant between 30 ℃ ~ 50 ℃.Promptly control the conducting and the shutoff of described solid-state relay 30 through described intelligent digital humidostat 31 output square-wave signals; What of low-voltage direct electric energy the conducting of described solid-state relay 30 and the output terminal that turn-offs the Switching Power Supply 29 control this device again carry to described annular heating tape 32; Thereby temperature in the photoacoustic cell 16 are increased or reduce, described intelligent digital humidostat 31 setting values of manual adjustments are t
1, described thermopair 17 will detect actual temperature signal t in the photoacoustic cell 16
2Being transferred to described intelligent digital humidostat 31 shows and compares: work as t
2>t
1(be the Shi Jizhi > of temperature in the photoacoustic cell; Setting value) time, the ON time that the square-wave signal of described intelligent digital humidostat 31 outputs is controlled described solid-state relay 30 shortens, and the low-voltage direct electric energy that flows to annular heating tape 32 is reduced, thereby photoacoustic cell 16 temperature are reduced; Otherwise, work as t
2<t
1(be the actual value of temperature in the photoacoustic cell<setting value) time; It is elongated that the square-wave signal of described intelligent digital humidostat 31 outputs is controlled the ON time of described solid-state relay 30; The low-voltage direct electric energy that flows to annular heating tape 32 is increased; Thereby photoacoustic cell 16 temperature are raise, and this comparison procedure constantly repeats, up to photoacoustic cell 16 temperature stabilizations at setting value t
1(be t
1=t
2) till, thereby reached the purpose of photoacoustic cell 16 constant temperature.
After temperature constant, measure the parameters performance of photoacoustic cell 16 then.At first measure the resonant frequency of photoacoustic cell 16
fRegulate the frequency of copped wave controller 12, observe the photoacoustic signal that lock-in amplifier 27 shows simultaneously, when the photoacoustic signal of lock-in amplifier 27 demonstrations reaches maximum; The frequency that record copped wave this moment controller 12 shows is the resonant frequency of photoacoustic cell 16 under this temperature
f
Then measure the various noises of photoacoustic cell 16.Measure the external environmental noise value earlier: wideband infrared light supply 9 and chopper 11 are closed, and the value that record lock-in amplifier this moment 27 shows is the neighbourhood noise value; Measure chopper 11 noise figures again: keep wide range infrared light supply 9 to close and open chopper 11, the frequency of regulating chopper 11 is to resonant frequency, and record is the registration of lock-in amplifier 27 at this moment, and this registration deducts the neighbourhood noise value and is the chopper noise figure.Measure at last by zinc selenide diaphragm 15 and absorb the noise figure that absorption is caused with photoacoustic cell 16 inwalls: through draft tube 23 with charging into high pure nitrogen in the photoacoustic cell 16; Open chopper 11 and wideband infrared light supply 9; The numerical value that record lock-in amplifier this moment 27 shows; Be the overall system noise, deduct neighbourhood noise and chopper noise with the overall system noise and be zinc selenide diaphragm 15 and absorb the noise figure that absorption causes with photoacoustic cell 16 inwalls.
The coefficient of relationship of measurement gas photoacoustic signal and gas concentration is a response coefficient again
kWith gas distributing system with the gas that will measure be made into the calibrating gas of variable concentrations; Charge into photoacoustic cell 16 through draft tube 23 and air intake valve 21 respectively; Write down the photoacoustic signal value that lock-in amplifier 27 records under the various concentration gases; Adopt the mode of one-variable linear regression match to calculate the coefficient of relationship between gas concentration and the photoacoustic signal, i.e. response coefficient
k
Calculate the LDL of photo-acoustic detection system at last.For sulfur hexafluoride shelf depreciation decomposed gas component, with the overall system noise divided by separately response coefficient
kGet final product the LDL of all gases component.
(3) detection of sulfur hexafluoride shelf depreciation decomposition components concentration
After the completion of (2) step; Under its condition; Through escape pipe 24, give vent to anger valve 22 and vacuum pump 25 photoacoustic cell 16 is evacuated earlier, the back charges into the sulfur hexafluoride shelf depreciation decomposition components in the GIS analog element 6 to be detected through draft tube 23 and air intake valve 21, and air pressure is 0.1MPa; Through 13 rotations of computing machine 28 control optical filter wheels, successively centre wavelength is respectively 7350nm (SO again
2Absorption peak centre wavelength), 4260nm (CO
2Absorption peak centre wavelength), 7780nm (CF
4Absorption peak centre wavelength), 18550nm (SO
2F
2Absorption peak centre wavelength), 7440nm (SOF
2Absorption peak centre wavelength) optical filter 14 rotates in the light path, and writes down each characteristic optical filter 14 pairing photoacoustic signal value successively
S i (
i=1 ..., 6), the photoacoustic signal value input computing machine 28 that at last lock-in amplifier 27 is recorded passes through formula on computing machine 28
S i =
k*
C i +
d(
i=1 ..., 6) calculate (in the formula
kBe response coefficient,
S i Be the photoacoustic signal value,
dBe intercept, promptly all gases component photoacoustic signal and gas concentration concern the intersection point of straight line and ordinate, and ordinate is the photoacoustic signal value), obtain SO accurately
2, CO
2, CF
4, SO
2F
2, SOF
2Concentration value
C i , (
i=1 ..., 6).
(4) plant maintenance
After the completion of (3) step, open give vent to anger valve 22 and vacuum pump 25 earlier, the gas in the photoacoustic cell 16 is evacuated to outdoor discharging; Close give vent to anger valve 22 and vacuum pump 25 then, open the nitrogen cylinder valve, open give vent to anger valve 22 and vacuum pump 25 then successively with air intake valve 21 charges into nitrogen; Gas in the photoacoustic cell 16 is evacuated to outdoor discharging; Repeat above operation 2～4 times, photoacoustic cell 16 is cleaned up, prevent SF with nitrogen
6Sour gas corrosion photoacoustic cell 16 in the shelf depreciation decomposition components.
Claims (2)
1. the automatic constant-temperature type photo-acoustic detection device of a sulfur hexafluoride decomposition components; Mainly comprise and do not have dizzy experimental transformer (2), induction voltage regulator (1), no shelf depreciation protective resistance (3), standard capacitor divider (4), noninductive resistance (5), GIS analog element (6), wideband high speed vast capacity digital storage oscilloscope (8), automatic constant temperature system (7), infrared photoacoustic spectra detection system (7); Wherein: described infrared photoacoustic spectra detection system; Mainly form by wideband infrared light supply (9), zinc selenide lens (10), mechanical chopper (11), chopper controller (12), optical filter wheel (13), optical filter (14), zinc selenide diaphragm (15), photoacoustic cell (16), rain glass (18), microphone (19), signal cable (20), air intake valve (21), the valve of giving vent to anger (22), draft tube (23), escape pipe (24), vacuum pump (25), optics support (26), lock-in amplifier (27) and computing machine (28) etc.; It is characterized in that; The outside installing automatic constant temperature system of the photoacoustic cell (16) in described infrared photoacoustic spectra detection system, described automatic constant temperature system mainly is made up of Switching Power Supply (29), solid-state relay (30), intelligent digital humidostat (31), annular heating tape (32), thermopair (17) etc.;
The input end of described Switching Power Supply (29) is connected with the power supply of 220V/50Hz through lead; After the positive pole of the output terminal of said Switching Power Supply (29) passes through lead and the positive pole of said solid-state relay (30) output terminal is connected; The negative pole of said solid-state relay (30) output terminal is connected with described annular heating tape (32) positive terminal through lead, and the negative pole of the output terminal of described Switching Power Supply (29) is connected with described annular heating tape (32) negative terminal through lead;
The controlled end of described solid-state relay (30) is connected with the control signal output ends of described intelligent digital humidostat (31) through lead;
The number of described annular heating tape (32) is 2 ~ 6; The width of each annular heating tape (32) is that 20 ~ 50mm, thickness are that the external diameter of 1 ~ 1.5mm, internal diameter and said photoacoustic cell (16) is complementary; Said annular heating tape (32) is installed in the outside surface of said photoacoustic cell (16) respectively; Two end connectors of each annular heating tape (32) are connected heating power 100 ~ 250W with said solid-state relay (30) with said Switching Power Supply (29) respectively through lead;
Described thermopair (17) is made up of thermocouple temperature sensor and thermopair controller; Described thermopair (17) is installed on the outside surface of photoacoustic cell; The input end of the thermocouple temperature sensor of said thermopair (17) is connected with the output terminal of thermopair controller through lead; The output terminal of thermocouple temperature sensor is connected with the input end of said intelligent digital humidostat (31), and temperature signal is passed to that intelligent digital humidostat (31) shows and as the control signal of said solid-state relay (30);
The input end of described intelligent digital humidostat (31) is connected with described thermopair (17) through lead, and the output terminal of described intelligent digital humidostat (31) is connected with the input end of described solid-state relay (30) through lead;
Described optical filter (14) is installed in the hole of said optical filter wheel (13), and optical filter wheel (13) is through the step motor drive rotation, and it is SO that last each optical filter (14) centre wavelength of optical filter wheel (13) is respectively 7350nm
2Absorption peak centre wavelength, 4260nm are CO
2Absorption peak centre wavelength, 7780nm are CF
4Absorption peak centre wavelength, 18550nm are SO
2F
2Absorption peak centre wavelength, 7440nm are SOF
2Absorption peak centre wavelength; Only allow the infrared light of its centre wavelength to pass through; Filter the infrared light of residue frequency band, through signal cable (20) optical filter wheel (13) is connected with computing machine (28), computing machine (28) sends the stepper motor rotation in the signal controlling optical filter wheel (13); And then the infrared light of control different characteristic wavelength through optical filter (14) in zinc selenide window (15) is injected described photoacoustic cell (16), the detection under different wave length has promptly reflected the gas with various components contents.
2. the experimental technique of the automatic constant-temperature type photo-acoustic detection of a sulfur hexafluoride decomposition components utilizes the automatic constant-temperature type photo-acoustic detection device of the described sulfur hexafluoride decomposition components of claim 1, to the SF in the GIS analog element
6The shelf depreciation decomposition components of gas detects, and it is characterized in that the concrete steps of said method are following:
(1) experiment is prepared
1. photoacoustic cell and the Installation and Debugging of automatic constant temperature system parts
At first clean the inwall of photoacoustic cell (16) with anhydrous alcohol; Remove the impurity of pond inwall, treat that photoacoustic cell (16) is air-dry after, microphone (19), thermopair (17), rain glass (18), draft tube (23), escape pipe (24), air intake valve (21), the valve of giving vent to anger (22), zinc selenide diaphragm parts such as (15) are installed again; When zinc selenide diaphragm (15) is installed; Compress with bolt behind the pad silica gel sheet earlier in zinc selenide diaphragm (15) and photoacoustic cell (16) contact position, add raw material band and fluid sealant, good air-tightness is arranged to guarantee photoacoustic cell (16) in each threaded connection place; The three-dimensional of adjusting wideband infrared light supply (9) and photoacoustic cell (16) is then adjusted the up-down optics support of optics support, chopper (11), optical filter wheel (13), zinc selenide lens (10); The center that guarantees each parts and photoacoustic cell (16) on same horizontal line, make infrared light accurately direct projection see through each parts, inject photoacoustic cell (16); The heating circuit and the control loop of automatic constant temperature system are connected through lead respectively successively; Connect with the mains, confirm each element operate as normal, annular heating tape (32) are installed on the outside surface of photoacoustic cell (16); Tighten the screws guarantees that annular heating tape (32) is close to photoacoustic cell (16) outside surface;
2. air tightness test
After the completion of (1)-1. step, at first close air intake valve (21), open the valve of giving vent to anger (22); Start the vacuum pump (25) of this device then, photoacoustic cell (16) is vacuumized, when the rain glass (18) of this device shows that air pressure is 0.005 ~ 0.01MPa; Close valve of giving vent to anger (22) and vacuum pump (25) successively; Left standstill photoacoustic cell 10 ~ 15 hours, and went to observe rain glass (18) registration again, as remaining unchanged basically; The impermeability of photoacoustic cell (16) under vacuum that this device then is described is good, opens the air intake valve (21) and the nitrogen (N of this device
2) bottle valve, in photoacoustic cell (16), pour N
2Gas to rain glass (18) registration is 0.2 ~ 0.25MPa, closes air intake valve (21) and N successively
2Bottle valve left standstill photoacoustic cell 10 ~ 15 hours, went to observe rain glass (18) registration again, as remaining unchanged basically, explained that then photoacoustic cell (16) impermeability under anticyclonic situation of this device is good;
3. clean photoacoustic cell
After the completion of (1)-2. step, open the valve of giving vent to anger (22) earlier, start described vacuum pump (25); Described photoacoustic cell (16) is vacuumized; When described photoacoustic cell (16) vacuum tightness is 0.005 ~ 0.01MPa, close valve of giving vent to anger (22) and vacuum pump (25) successively, open described SF again
6The valve of gas cylinder and air intake valve (21) charge into SF in described photoacoustic cell (16)
6Gas, when photoacoustic cell (16) internal gas pressure value is 0.2 ~ 0.25MPa till, close SF then successively
6The valve of gas cylinder and air intake valve (21) clean described photoacoustic cell (16), then by the aforementioned operation step, vacuumize earlier, charge into SF again
6Purge of gas so repeats to wash 2～4 times, cleans the back and through vacuum pump (25) photoacoustic cell (16) is vacuumized, and passes through draft tube (23) and air intake valve (21) at last with the SF in the GIS analog element (6) to be detected
6The shelf depreciation decomposed gas component feeds in the photoacoustic cell (16);
(2) parameter measurement under the steady temperature
After the completion of (1) step; At first open wideband infrared light supply (9), copped wave controller (12), chopper (11), optical filter wheel (13), microphone (19), rain glass (18), thermopair (17), Switching Power Supply (29), solid-state relay (30), intelligent digital humidostat (31) and lock-in amplifier (27); Lock-in amplifier 1s integral time; Control the temperature in the photoacoustic cell (16) again; Make it constant between 30 ℃ ~ 50 ℃; Promptly control the conducting and the shutoff of described solid-state relay (30) through described intelligent digital humidostat (31) output square-wave signal; What of low-voltage direct electric energy the conducting of described solid-state relay (30) and the output terminal that turn-offs the Switching Power Supply (29) control this device again carry to described annular heating tape (32), thereby temperature in the photoacoustic cell (16) is increased or reduce, and the described intelligent digital humidostat of manual adjustments (31) setting value is t
1, described thermopair (17) will detect the interior actual temperature signal t of photoacoustic cell (16)
2Be transferred to described intelligent digital humidostat (31) and show and compare, work as t
2>t
1, i.e. the Shi Jizhi > of temperature in the photoacoustic cell; During setting value; The ON time that the square-wave signal of described intelligent digital humidostat (31) output is controlled described solid-state relay (30) shortens, and the low-voltage direct electric energy that flows to annular heating tape (32) is reduced, thereby photoacoustic cell (16) temperature is reduced; Otherwise, work as t
2<t
1, i.e. the actual value of temperature in the photoacoustic cell<during setting value; It is elongated that the square-wave signal of described intelligent digital humidostat (31) output is controlled the ON time of described solid-state relay (30); The low-voltage direct electric energy that flows to annular heating tape (32) is increased; Thereby photoacoustic cell (16) temperature is raise, and this comparison procedure constantly repeats, up to photoacoustic cell (16) temperature stabilization at setting value t
1, i.e. t
1=t
2The time till, thereby reached the purpose of photoacoustic cell (16) constant temperature, after temperature constant, measure the parameters performance of photoacoustic cell (16) then, at first measure the resonant frequency of photoacoustic cell (16)
fRegulate the frequency of copped wave controller (12), observe the photoacoustic signal that lock-in amplifier (27) shows simultaneously, when the photoacoustic signal of lock-in amplifier (27) demonstration reaches maximum; The frequency that record copped wave controller this moment (12) shows is the resonant frequency of photoacoustic cell (16) under this temperature
fThen measure the various noises of photoacoustic cell (16); Measure the external environmental noise value earlier: wideband infrared light supply (9) and chopper (11) are closed, and the value that record lock-in amplifier this moment (27) shows is the neighbourhood noise value; Measure chopper (11) noise figure again: keep wide range infrared light supply (9) to close and open chopper (11); The frequency of regulating chopper (11) is to resonant frequency, and record is the registration of lock-in amplifier (27) at this moment, and this registration deducts the neighbourhood noise value and is the chopper noise figure; Measure at last by zinc selenide diaphragm (15) and absorb the noise figure that absorption is caused with photoacoustic cell (16) inwall: through draft tube (23) with charging into high pure nitrogen in the photoacoustic cell (16); Open chopper (11) and wideband infrared light supply (9), the numerical value that record lock-in amplifier this moment (27) shows is the overall system noise; Deduct neighbourhood noise and chopper noise with the overall system noise and be zinc selenide diaphragm (15) and absorb the noise figure that absorption causes with photoacoustic cell (16) inwall, the coefficient of relationship of measurement gas photoacoustic signal and gas concentration is a response coefficient again
kWith gas distributing system with the gas that will measure be made into the calibrating gas of variable concentrations; Charge into photoacoustic cell (16) through draft tube (23) and air intake valve (21) respectively; Write down the photoacoustic signal value that lock-in amplifier under the various concentration gases (27) records, adopt the mode of one-variable linear regression match to calculate the coefficient of relationship between gas concentration and the photoacoustic signal, i.e. response coefficient
k, calculate the LDL of photo-acoustic detection system at last, for sulfur hexafluoride shelf depreciation decomposed gas component, with the overall system noise divided by separately response coefficient
kGet final product the LDL of all gases component;
(3) detection of sulfur hexafluoride shelf depreciation decomposition components concentration
After the completion of (2) step; Under its condition; Through escape pipe (24), the valve of giving vent to anger (22) and vacuum pump (25) photoacoustic cell (16) is evacuated earlier, the back charges into the sulfur hexafluoride shelf depreciation decomposition components in the GIS analog element (6) to be detected through draft tube (23) and air intake valve (21), and air pressure is 0.1MPa; Through computing machine (28) control optical filter wheel (13) rotation, successively centre wavelength being respectively 7350nm is SO again
2Absorption peak centre wavelength, 4260nm are CO
2Absorption peak centre wavelength, 7780nm are CF
4Absorption peak centre wavelength, 18550nm are SO
2F
2Absorption peak centre wavelength, 7440nm are SOF
2The optical filter 14 of absorption peak centre wavelength rotates in the light path, and writes down the pairing photoacoustic signal value of each characteristic optical filter (14) successively
S i ,
i=1 ..., 6, the photoacoustic signal value input computing machine (28) that at last lock-in amplifier (27) is recorded passes through formula on computing machine (28)
S i =
k*
C i +
d,
i=1 ..., 6, calculate, in its Chinese style
kBe response coefficient,
S i Be the photoacoustic signal value,
dBe intercept, promptly all gases component photoacoustic signal and gas concentration concern the intersection point of straight line and ordinate, and ordinate is the photoacoustic signal value, obtain SO accurately
2, CO
2, CF
4, SO
2F
2, SOF
2Concentration value
C i ,
i=1 ..., 6;
(4) plant maintenance
After the completion of (3) step, open valve of giving vent to anger (22) and vacuum pump (25) earlier, the gas in the photoacoustic cell (16) is evacuated to outdoor discharging; Close valve of giving vent to anger (22) and vacuum pump (25) then, open nitrogen cylinder valve and air intake valve (21) and charge into nitrogen, open valve of giving vent to anger (22) and vacuum pump (25) then successively; Gas in the photoacoustic cell (16) is evacuated to outdoor discharging; Repeat above operation 2～4 times, photoacoustic cell (16) is cleaned up, prevent SF with nitrogen
6Sour gas corrosion photoacoustic cell (16) in the shelf depreciation decomposition components.
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Application publication date: 20120627 |