CN102508034A - Method and device for measuring parameters of micro solid gyroscope equivalent circuit - Google Patents
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Abstract
The invention discloses a method and a device for measuring parameters of a micro solid gyroscope equivalent circuit. The micro-solid modal gyro equivalent circuit is formed by two branches in parallel connection, wherein one branch includes a static capacitance circuit, and the other branch is a serial-connection circuit of a dynamic resistor, a dynamic capacitor and a dynamic inductor. The device comprises a variable-frequency oscillator, two terminal networks and a detector. The variable-frequency oscillator supplies a constant current to the measurement circuit and the detector is a voltage meter and is used for detecting voltage across two ends of each terminal network when the frequency is varied. The measurement method which utilizes the measurement device and is based on a maximal output frequency and a capacitance bridge can be used for solving each parameter of the equivalent circuit. In order to improve the analyzability the micro-solid modal gyro in a driving or a detecting equivalent circuit, the method and the device for measuring the parameters of the micro-solid modal gyro equivalent circuit are very necessary to provide.
Description
Technical Field
The invention relates to a parameter measuring method and a parameter measuring device of a gyroscope equivalent circuit, in particular to a parameter measuring method and a parameter measuring device of a micro-solid mode gyroscope equivalent circuit.
Background
The measurement of relevant electrical parameters is of great importance in the development, production and application of piezoelectric devices. Therefore, the research on the measurement method of these parameters is very important both at home and abroad. Obtaining an accurate equivalent circuit of the piezoelectric device is the basis of parameter measurement.
Equivalent circuits refer to different representations of the same circuit. When a certain part of the circuit is replaced by an equivalent circuit, the voltage and the current of the part which is not replaced do not change, that is, the part with unchanged voltage and current is only the circuit outside the equivalent part, so the circuit is called 'external equivalence'. The types and positions of the elements are the same, but when a circuit is drawn, a different drawing method is adopted, namely an equivalent circuit is drawn. In many cases, one often recognizes and addresses complex problems with the same effect of action. In modern electronic technology, when analyzing a complex circuit, people often only pay attention to the input and output relationships of the whole circuit (or a certain part of the circuit), namely the variation relationship of current and voltage. This allows a simple circuit to be used instead of a complex circuit, simplifying the problem. This simple circuit is the equivalent of a complex circuit.
The parameter measuring method of the equivalent circuit of the piezoelectric device comprises a transmission method, a pi network zero phase method (a pi network method), an impedance meter method, an admittance chart method and the like. The transmission method is to insert a piezoelectric element into a transmission line, and measure the maximum and minimum transmission frequencies of the entire network, thereby obtaining parameters such as the frequency to be measured. The transmission line method has the advantages of simple measurement method, high accuracy and the like, and is widely applied in the research and production processes of piezoelectric materials and piezoelectric devices. The networks for transmission thereof mainly have pi-type networks and T-type networks. The pi network method is a piezoelectric element electrical parameter measuring method recommended by IEC (International electrotechnical Commission), the frequency measuring range is 1-250 MHZ, the uncertainty of the dynamic resonance frequency is within +/-1 ppm, and the uncertainty of the dynamic resonance resistance is +/-12% - +/-5%. But the requirements for instrumentation are relatively high. The impedance meter method is one of the most convenient measuring methods, and when a quartz crystal near a specific frequency is measured, parameters such as the resonant frequency of the quartz crystal can be measured relatively accurately by properly adjusting the parameters of the electronic components of the oscillating circuit in advance, but the measurement accuracy is relatively low. The admittance chart method can accurately measure parameters such as dynamic resonance frequency of the piezoelectric vibrator, but requires a certain ratioThe more complex devices are relatively complex to implement.
For the existing micro solid modal gyroscope（novel micro solid gyroscope，K. Maenaka, H. Kohara, etc, Istanbul, 19th IEEE International conference on Micro Electro Mechanical Systems, 2006），Comprises a substrate, a driving electrode, a reference electrode and a sensing electrode. The substrate is made of a micro-elastic solid material, and the driving electrode, the reference electrode and the sensing electrode are distributed on the two sides of the upper surface and the lower surface of the substrate and are completely symmetrical on the upper side and the lower side of the substrate. Two driving electrodes, two reference electrodes and four sensing electrodes are arranged on the upper surface and the lower surface of the substrate, and the driving electrodes, the reference electrodes and the four sensing electrodes are bilaterally symmetrical on the surface of the substrate. The driving electrode is used for guiding the detector to start vibrating and is input into the gyro equivalent circuit; the reference electrode is mainly used for obtaining the vibration state of the gyroscope; the sensing electrode is used for acquiring a detection signal of the input angular velocity of the gyroscope. The driving electrode, the reference electrode and the sensing electrode are all made of piezoelectric materials. At present, the micro solid modal gyroscope is more and more widely applied in various fields of automobiles, electronics, biology, military affairs and the like, but the analysis of an equivalent circuit is not available. For a micro-solid mode gyroscope, it is different from a typical piezoelectric resonator: the electrodes of a common piezoelectric resonator completely cover the upper surface and the lower surface of the resonator, and a plurality of driving, sensing and reference electrodes of the micro-solid mode gyroscope are only distributed on part of the upper surface and the lower surface of the gyroscope. In order to improve the analyzability of the micro solid mode gyroscope in circuits such as driving or detecting, the parameter measuring method and device aiming at the micro solid mode gyroscope equivalent circuit are very necessary。
Disclosure of Invention
The technical problem to be solved by the invention is to provide a parameter measuring method and device for a micro solid modal gyroscope equivalent circuit, so that the analyzability of the micro solid modal gyroscope in circuits such as driving or detection is improved.
In order to achieve the above object, the technical solution of the present invention is as follows:
the equivalent circuit of the micro-solid modal gyroscope comprises a branch circuit formed by connecting a dynamic capacitor, a dynamic inductor and a dynamic resistor in series and a static capacitor connected with the branch circuit in parallel. The static capacitance in the equivalent circuit represents the stray capacitance between the electrodes of the gyroscope in a static state; the dynamic resistance, the dynamic capacitance and the dynamic inductance in the equivalent circuit respectively represent the mechanical impedance, the mechanical compliance and the mechanical quality of the gyroscope.
In order to measure the parameters of the equivalent circuit of the micro solid mode gyroscope, the invention adopts the following measuring devices: the system comprises a constant current variable frequency oscillator, two terminal networks and a detector. The constant-current variable-frequency oscillator is arranged at two driving ends of the gyroscope and sweeps frequency near the resonant frequency of the gyroscope, and because the resonant mode related to the gyroscope is generally independent of other resonant modes, the parameters of the equivalent circuit of the gyroscope are constant when the constant-current variable-frequency oscillator sweeps frequency of the gyroscope. The terminal network is a parallel connection of a resistor and a capacitor, and is symmetrical at the input end and the output end of the equivalent circuit. The shunt capacitance is a stray capacitance, which affects the measurement accuracy of the equivalent parameter. The detector is a voltmeter and is connected with the terminal network in parallel. When the input frequency of the constant current variable frequency oscillator changes, the voltage of two ends of a parallel resistor in the terminal network is measured by the detector.
The invention utilizes the measuring device to respectively measure four parameters of the micro solid modal gyroscope equivalent circuit by adopting the following method:
firstly, the static capacitance is represented by the average value of two static capacitances measured by a capacitance bridge under two frequencies, and the two frequencies are distributed at equal intervals above and below the resonance frequency of the gyroscope;
second, measurement of dynamic resistance is through the gyro portion in a circuit for alternative measurement of specific resistanceRespectively, acquiring the maximum output voltage which is the same as the gyro, and then obtaining the dynamic resistance of the gyro through a relational expression between the dynamic resistance and the substitute resistance;
thirdly, under the condition of two different load capacitances, the value of the dynamic capacitance can be obtained according to the relational expression between the frequency and the dynamic capacitance by measuring the maximum output frequency of the equivalent circuit;
fourth, the value of the dynamic inductance is then found when the dynamic capacitance and the dynamic resonant frequency are known.
The measuring method of the micro-solid modal gyroscope equivalent circuit enables the gyroscope to be equivalent to a specific circuit consisting of basic elements of resistance, capacitance and inductance in various circuit analyses, so that the circuit where the gyroscope is located is more visual and easier to understand, and the analyzability of the circuit where the gyroscope is located is greatly improved. The measuring device of the micro-solid mode gyroscope equivalent circuit provides hardware support for the parameter measuring method.
Drawings
Fig. 1 is a schematic structural diagram of a micro solid modal gyroscope according to an embodiment of the invention;
FIG. 2 is a schematic diagram of a parameter measuring device of an equivalent circuit of a micro solid modal gyroscope according to an embodiment of the present invention;
fig. 3 is a schematic diagram of parameter measurement of an equivalent circuit of a micro solid-mode gyroscope according to an embodiment of the present invention.
Detailed Description
The following detailed description of the embodiments of the present invention is provided, and the embodiments and specific operations of the embodiments are provided on the premise of the technical solution of the present inventionThe scope of the invention is not limited to the examples described below.
As shown in fig. 1, the micro-solid mode structure according to the present embodiment is simple, and the material of the substrate 5 is silicon, and high-quality glass or metal may be selected, and the shape thereof is a rectangular parallelepiped, and the specification of 4mm × 5mm × 3mm may be selected. The electrode materials on the two sides of the surface are PZT piezoelectric ceramics, and the piezoelectric effect of the materials is utilized in the vibration process of the gyroscope. The number of the electrodes on two sides of the surface is 16, and the electrodes comprise a driving electrode, a reference electrode and a sensing electrode, wherein 1, 9, 10 and 17 are the driving electrodes, 4, 7, 11 and 15 are the reference electrodes, and 2, 3, 6, 8, 12, 13, 14 and 16 are the sensing electrodes. The drive, reference and sense electrodes of the upper and lower surfaces are all perfectly symmetrical. The driving electrodes are used for guiding the gyroscope to start to vibrate, when two paths of sinusoidal voltages with equal frequency and amplitude and 180-degree phase difference are simultaneously added between the driving electrodes 1 and 9 and between the driving electrodes 10 and 17 on the two sides of the base body 5, corresponding voltages are generated on the reference electrodes, and when angular speed is input on the gyroscope, the information of the angular speed can be obtained on the sensing electrodes.
As shown in fig. 2, in this embodiment, the parameter measuring device of the micro solid-mode gyroscope equivalent circuit includes a constant current variable frequency oscillator, two terminal networks, and a detector. The constant current variable frequency oscillator provides constant current for the test circuit; the two-terminal network is a resistor RT, whose parasitic capacitance CT (as in fig. 3) is not negligible at high frequencies, which affects the measurement accuracy of the equivalent parameter. The detector in the figure is a voltmeter and is connected with the terminal network in parallel. When the input frequency of the constant current variable frequency oscillator changes, the detector measures the voltage at two ends of the parallel resistor RT in the terminal network. The portion between the drive electrodes P1-P2 of the micro solid-mode gyroscope may be equivalent to a simple circuit consisting of a resistor, a capacitor and an inductor, as shown by the dashed box in fig. 3. Here, P1 may be the driving electrode 1 or 9 in fig. 1, and P2 may be the driving electrode 10 or 17.
As shown in FIG. 3, the micro solid modal gyroscope in the present embodiment uses itThe equivalent circuit is replaced by two branches connected in parallel, one branch is a capacitor C0, and the other branch is a series branch of a resistor R1, a capacitor C1 and an inductor L1, as shown by a dashed line frame in the figure. Wherein C0 represents the static capacitance of the driving end of the gyroscope and represents the capacitance between the electrodes of the gyroscope in a static state; the dynamic resistor R1, the dynamic capacitor C1, and the dynamic inductor L1 represent the mechanical impedance, mechanical compliance, and mechanical mass, respectively, of the gyroscope. The method of measuring these 4 parameters is as follows: the static capacitance C0 can be measured by a capacitance bridge method, and due to the high permittivity characteristic of the micro solid mode gyroscope, the frequency selection during measurement is not a resonance frequency point. Generally, two frequencies which are equidistant to the resonance frequency are selected from the upper and lower parts of the resonance frequency point to measure the static capacitance C0, and then the average value of the two frequencies is taken as the value of the static capacitance C0;
the dynamic resistor R1 measures the gyro part in the alternative measuring circuit through the specific resistor RST, the maximum output voltage same as the gyro can be obtained by adjusting the value of the resistor RST, and the dynamic resistor R1 of the gyro can be replaced by the resistor RST. By selecting the appropriate L when switch SW1 is closed
0
Value of loop L
0
R1C 1L 1 is in a resonance state, and RST obtained by measurement is equal to R1 at the time, so that measurement errors can be reduced.
The maximum output frequency of the gyro, i.e. the frequency point at which the output voltage on the voltmeter is maximum when the frequency changes, is measured under two different load capacitances CL1 and CL2, respectively, and three conditions in which the switch SW2 is closed without a string of CL. Then, the value of the dynamic capacitance C1 can be obtained according to the relation (1) between the dynamic resonance frequency and the dynamic capacitance:
wherein the load capacitances CL1 and CL2 are respectively usedMeasuring by a capacitance bridge method; dynamic resonant frequency for three cases of two different load capacitances CL1 and CL2 and closing switch SW2 to a non-string CL
、
And
the maximum output frequency in these three cases is replaced separately because the difference between the dynamic resonance frequency and the maximum output frequency is negligible at an accuracy requirement of 1%. The parallel coil L0 of the equivalent circuit of the gyroscope in the figure is mainly used for exciting the oscillation to make the resonant frequency of the gyroscope be
。
Accordingly, the value of the dynamic inductance L1 can be obtained from the following relation (2):
wherein,
for the dynamic resonant frequency when switch SW2 is closed,
is a dynamic capacitance.
Despite the fact thatWhile the invention has been described in detail with reference to the preferred embodiments thereof, it should be understood that the above description should not be taken as limiting the invention. Various modifications and alterations to this invention will become apparent to those skilled in the art upon reading the foregoing description. Accordingly, the scope of the invention should be determined from the following claims.
Claims (7)
1. The utility model provides a parameter measurement device of micro solid mode top equivalent circuit which characterized in that: the parameter measuring device comprises a constant current variable frequency oscillator, two terminal networks and a detector, wherein: constant-current variable-frequency oscillators are added at the two driving ends of the gyroscope and sweep frequency near the resonant frequency of the gyroscope; the terminal network is formed by connecting a resistor and a capacitor in parallel and is symmetrical at the input end and the output end of the equivalent circuit of the micro solid mode gyroscope; the detector is a voltmeter and is connected with the terminal network in parallel, and when the input frequency of the constant-current variable-frequency oscillator changes, the detector measures the voltage at two ends of the parallel resistor in the terminal network.
2. The apparatus of claim 1, wherein the equivalent circuit comprises a branch consisting of a dynamic capacitor, a dynamic inductor and a dynamic resistor connected in series, and a static capacitor connected in parallel with the branch, and the static capacitor in the equivalent circuit represents a stray capacitance between electrodes of the gyroscope in a static state; the dynamic resistance, the dynamic capacitance and the dynamic inductance in the equivalent circuit respectively represent the mechanical impedance, the mechanical compliance and the mechanical quality of the gyroscope.
3. The apparatus according to claim 1 or 2, wherein the parameters of the equivalent circuit of the micro solid-state gyroscope are constant when the constant current variable frequency oscillator sweeps the frequency of the gyroscope.
4. The apparatus of claim 1 or 3, wherein the constant current variable frequency oscillator provides a constant current for the measurement circuit.
5. The apparatus of claim 1, wherein the parallel capacitor in the termination network is a stray capacitor.
6. A method for measuring parameters of an equivalent circuit of a micro solid-state gyroscope by using the device of any one of claims 1 to 5, wherein the following methods are used to measure four parameters of the equivalent circuit of the micro solid-state gyroscope respectively:
firstly, the static capacitance is represented by the average value of two static capacitances measured by a capacitance bridge under two frequencies, and the two frequencies are distributed at equal intervals above and below the resonance frequency of the gyroscope;
secondly, the dynamic resistance is measured by a gyroscope part in a replacement measuring circuit of a specific resistance to obtain the maximum output voltage same as that of the gyroscope, and then the dynamic resistance of the gyroscope is obtained by a relational expression between the dynamic resistance and the replacement resistance;
thirdly, under the condition of two different load capacitances, the value of the dynamic capacitance can be obtained according to the relational expression between the frequency and the dynamic capacitance by measuring the maximum output frequency of the equivalent circuit;
fourth, the value of the dynamic inductance is then found when the dynamic capacitance and the dynamic resonant frequency are known.
7. The method for measuring the parameters of the equivalent circuit of the micro-solid modal gyroscope according to claim 6, wherein the static capacitance is measured by a capacitance bridge method, the frequency during measurement is not selected to be a resonance frequency point, two frequencies which are equidistant from the resonance frequency are selected above and below the resonance frequency point to measure the static capacitance, and then the average value of the two frequencies is taken as the value of the static capacitance.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104020357A (en) * | 2014-05-29 | 2014-09-03 | 南京航空航天大学 | Capacitance test circuit and test method under DC bias condition |
| CN105841683A (en) * | 2016-05-20 | 2016-08-10 | 上海交通大学 | Piezoelectric gyro equivalent circuit capable of considering energy loss |
| CN106093641A (en) * | 2016-06-08 | 2016-11-09 | 福州大学 | The DC bias characteristics test circuit of a kind of electric capacity and method of testing |
| CN113779927A (en) * | 2021-08-12 | 2021-12-10 | 华中科技大学 | Method and device for determining equivalent circuit parameters of quartz crystal resonator |
| US20220107361A1 (en) * | 2020-08-14 | 2022-04-07 | The 13Th Research Institute Of China Electronics Technology Group Corporation | Two-Port On-Wafer Calibration Piece Circuit Model and Method for Determining Parameters |
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| CN105841683B (en) * | 2016-05-20 | 2019-01-11 | 上海交通大学 | A kind of piezolectric gyroscope equivalent circuit considering energy loss |
| CN106093641A (en) * | 2016-06-08 | 2016-11-09 | 福州大学 | The DC bias characteristics test circuit of a kind of electric capacity and method of testing |
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| CN113779927A (en) * | 2021-08-12 | 2021-12-10 | 华中科技大学 | Method and device for determining equivalent circuit parameters of quartz crystal resonator |
| CN113779927B (en) * | 2021-08-12 | 2023-12-01 | 华中科技大学 | Method and device for determining equivalent circuit parameters of quartz crystal resonator |
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