CN102502201A - Processing equipment, conveying control device and conveying control method - Google Patents
Processing equipment, conveying control device and conveying control method Download PDFInfo
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- CN102502201A CN102502201A CN2011103582299A CN201110358229A CN102502201A CN 102502201 A CN102502201 A CN 102502201A CN 2011103582299 A CN2011103582299 A CN 2011103582299A CN 201110358229 A CN201110358229 A CN 201110358229A CN 102502201 A CN102502201 A CN 102502201A
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Abstract
A processing equipment is provided with a plurality of conveying paths between processing devices. The processing equipment weights separately a standby time of each object to be conveyed at each time, the load conditions of processing devices of a conveying destination and a conveying source, the entire load condition of the conveying zone of each object to be conveyed, and the load condition of each conveying means. The priority of each conveying treatment is calculated by the weighting variations corresponding to the condition of the conveying zone so as to determine which object should be conveyed to the processing devices in order to control the conveying means. The processing equipment will not become large-sized, will not increase the capacity or lead time, and has enough conveying ability. Based on the processing equipment, even if the load of the object to be conveyed to a conveying destination becomes higher, it is capable of shortening the production pitch time of the whole processing device. Based on the processing equipment, even if the conveying line is a vane-type conveying line, the data amount of processing operations will not be increased. It does not need to adopt large-scale operation processing device and can shorten the processing time of operation.
Description
The application be on June 22nd, 2009 that submit, application number be 200910142508.4, denomination of invention divides an application for the patent application of " treatment facility, conveying control device and conveyance control method ".
Technical field
The present invention relates to a kind of when having the transport path that between a plurality of processing equipment, has transported materials such as a plurality of substrates, on these transport paths, carry the supply unit of transported material treatment facility, control the supply unit of this treatment facility conveying control device, control the conveyance control method of the supply unit of this treatment facility.
Background technology
At present; Has a kind of like this treatment facility: between a plurality of processing equipment, have a plurality of the have branch of transported materials such as substrate or the transport paths at interflow; And have the supply unit of on these transport paths, carrying transported material, make a plurality of transported materials corresponding to a supply unit.
As treatment facility with the transport path that has such branch or interflow; Generally be the elevator that in each layer is provided with the room of processing equipment, has between each layer, to go up and down, across the treatment facility of between each processing equipment each storage bin being carried transported material.
In addition; The treatment facility of carrying as the thin plate of transported materials such as conveying substrate one by one; As record in the patent documentation 1; A kind of elevator of between each layer, going up and down of in each layer is provided with the room of processing equipment, having has been proposed, across the treatment facility of carrying transported material between each processing equipment.
In addition; As record in the patent documentation 2; Proposed a kind of like this treatment facility of multilevel hierarchy, the treatment facility of this multilevel hierarchy has: have the thin plate waggon of elevating function and carry out the load port that the transported material between this thin plate waggon and the processing equipment transmits.In this treatment facility, can also vertically arrange the layout of the saving installing space of processing equipment.
And, as record in the patent documentation 3, a kind of like this treatment facility having been proposed, this treatment facility has: the thin plate conveyer that can carry continuously; And be arranged between this thin plate conveyer and the processing equipment, can take care of the storage rack of transported material.
And, in such treatment facility,,, need control supply unit rightly about which processing equipment which transported material is flowed in order to realize handling efficiently.
In existing conveyance control method, supply unit according to the order that arrives this supply unit, according to the order of reservations such as due in, time of delivery and wait time, perhaps according to according to the order of scheduling in advance such as load condition, is carried transported material.
For example; A kind of feedway that uses following technology is disclosed in patent documentation 4; That is, can transported material be input in the equipment of processing device through a plurality of transport paths, select best traffic control at short notice; Make thus and carry the delay of steel plate in each equipment to become minimum limit, improve the operating efficiency of each treatment facility.This feedway has when generation is arranged on the traffic control of the feedway in each transport path, while revise bad a plurality of scheduling, the traffic control device of the scheduling that selection is best from a plurality of scheduling of generating of the scheduling that has generated.
In addition, in patent documentation 5, proposed the relevant technology of scheduling of a kind of and following such service unit, this service unit is carrying out carrying out reservation service according to the services request from each operation in the multistage operation of predetermined process to transported material.This technology can make the preferential scheduling of the treatment effeciency of total system.Promptly; Each transported material is calculated the accumulative total of the wait time in each operation through accumulative total wait time calculating part; Then; About being in each services request of wait state, obtain the peaked deviation in the processing time of processing time and each operation in the operation that has proposed services request through allowing the wait time calculating part.And, for example, will import relative importance value correction input part with the corresponding correction of urgency.Then, obtain relative importance value, select a services request according to this relative importance value through the relative importance value calculating part.
And in patent documentation 6, disclosing a kind of is basic with the FIFO mode handled in proper order according to the arrival of being made thing, solve the logistics control setup of the semiconductor factory of problems such as on unsettled basis of duration productive output reduction.In this logistics control setup; As calculating the poor of current time and the benchmark moment delay time; Said current time is the processing finish time of the logistics control unit of prime, and said benchmark is based on the moment that processing plan time that the ratio according to theoretical duration and actual processing time calculates calculates constantly.Then, this logistics control setup through from this delay time the maximum thing of being made begin preferentially to handle, can make the productive output of duration of being made thing, unit time stable like this.
In addition, in patent documentation 7, a kind ofly has the routing of carrying out, Yi Bian make the logistics control method of a plurality of operations that transported materials such as semifinished piece, product flow between several operations Yi Bian disclose.In this logistics control method; Equation of state below setting: use the information of the transported material quantity of in each current operation, handling and waiting for and the information of the transported material that can carry to next operation in the given time, according to material quantity to next each operation constantly of conveying instruction prediction of next operation.According to making about the transported material quantity of each operation and the evaluation function of control command is minimum separating, and obtains the conveying command value.For this carry instruction on the occasion of and greater than predetermined value, and transported material can carry, instruction is carried in output, particularly in the branch point or the junction of two streams in path, maximum to carrying command value, instruction is carried in output.
[patent documentation 1] spy opens flat 07-022488 communique
No. 4209572 communique of [patent documentation 2] special permission
[patent documentation 3] spy opens the 2005-167083 communique
[patent documentation 4] spy opens flat 06-328112 communique
[patent documentation 5] spy opens the 2000-033542 communique
[patent documentation 6] spy opens flat 9-123041 communique
No. 3400851 communique of [patent documentation 7] special permission
Summary of the invention
But, in the said existing treatment facility that each storage bin is carried,, increase the problem that the lead time is elongated so exist in product amount because when in storage bin, inserting the transported material of some, do not carry.
In addition, in vertically being arranged in patent documentation 1 during the processing equipment of record, because be that thin plate is carried, so exist the conveying number of times of elevator to become many, lifting action number of times and lifting action are apart from elongated problem.
In addition, in patent documentation 2 in the treatment facility of the multilevel hierarchy that possesses the thin plate waggon of record, exist since the capabilities limits of thin plate waggon the problem of traffic capacity.And, because need be used for the space of load port, so the problem that exists treatment facility to maximize.
And, in the treatment facility of in patent documentation 3, putting down in writing that possesses the thin plate conveyer, because before whole processing equipment, need the space of storage rack, so the problem that exists treatment facility to maximize.
In addition; In the conveyance control method of in said patent documentation 4 or patent documentation 5, putting down in writing; Because be predetermined the conveying destination (processing sequence) of each transported material according to scheduling; Even so under the high situation of the load of the conveying destination of transported material, also handle according to determined sequence of batching products.Therefore, might produce the obstruction of transported material, be difficult to shorten the productive temp time of whole conveying control.
In addition, in the conveying control device or method of record, particularly in the so-called thin plate travel line of a transported material of each conveying, the data volume of the processing that requires calculation is huge in patent documentation 6 or patent documentation 7.Therefore, because can't shorten the needed time of calculation process, so be difficult to shorten the productive temp time as processing equipment.In addition, also need large-scale arithmetic processing apparatus.
Therefore, the objective of the invention is to, provide a kind of and can not maximize, the semifinished piece amount can not gain and the lead time can be not elongated, can guarantee the treatment facility of enough traffic capacitys.And; The objective of the invention is to, a kind of conveying control device and conveyance control method are provided, even under the high situation of the load of the conveying destination of transported material; Also can shorten the productive temp time of entire process device; Even in so-called thin plate travel line, can not increase the data volume that requires calculation and handle yet, and not need large-scale arithmetic processing apparatus, the needed time of calculation process can be not elongated yet.
In order to solve above-mentioned problem, reach above-mentioned purpose, the present invention has following certain structure.
(structure 1)
There is the transport path of a plurality of transported materials in treatment facility of the present invention between a plurality of processing equipment; And have the supply unit of carrying transported material along said transport path, and make a plurality of transported materials corresponding with a said supply unit, this treatment facility possesses lifting unit; This lifting unit has crosses over the function that between said a plurality of supply units transported material is gone up and down; Said supply unit is configured to multistagely, between said processing equipment, carries transported material.Said lifting unit has the buffering access facility, can be as the energy disperser before and after dropping into to said processing equipment.
(structure 2)
Treatment facility of the present invention, in the treatment facility with structure 1, corresponding said supply unit with one-level disposes the said processing equipment that carries out continuous processing side by side, carries said transported material through the said supply unit with one-level.
(structure 3)
Treatment facility of the present invention, in the treatment facility with structure 1, corresponding supply unit with one-level disposes side by side and is estimated to be the many processing equipment of operational throughput, carries said transported material by the said supply unit with one-level.
(structure 4)
Conveying control device of the present invention; The transport path that between a plurality of processing equipment, has a plurality of transported materials; Has the supply unit of carrying transported material along said transport path; Make in a plurality of transported materials and the said supply unit corresponding processing equipment; Control said supply unit, possess the control unit of said each supply unit of control, said control unit; The weighting of being scheduled to separately of all load conditions in the conveyor zones to the load condition of the conveying destination processing equipment of the standby time of each said each transported material constantly, said each transported material and said each transported material; Use the relative importance value of the transport process of said each transported material of said weighted calculation, should which processing equipment which transported material in each transported material be transported to, according to the said supply unit of this decision control according to this result of calculation decision.
(structure 5)
Conveying control unit of the present invention is in having the conveying control unit of structure 4, also to the weighting of being scheduled to separately of the load condition of the load condition of the delivery source processing equipment of said each transported material and each supply unit.
(structure 6)
Conveying control device of the present invention in the conveying control device with structure 4 or 5, is logined a weighting pattern figure, and the situation in the corresponding conveyor zones changes said weighting pattern figure in-to-in value makes the weighting change.
(structure 7)
Conveying control device of the present invention in the conveying control device with structure 4 or 5, is logined a plurality of weighting pattern figure, and the situation in the corresponding conveyor zones is selected a weighting pattern figure, makes the weighting change thus.
(structure 8)
Conveyance control method of the present invention; The transport path that between a plurality of processing equipment, has a plurality of transported materials; Has the supply unit of carrying transported material along said transport path; Make in a plurality of transported materials and the said supply unit corresponding processing equipment; Control said supply unit, the relative importance value of the transport process of said each transported material of said weighted calculation is used in the weighting of being scheduled to separately of all load conditions in the conveyor zones to the load condition of the conveying destination processing equipment of the standby time of each said each transported material constantly, said each transported material and said each transported material; Should which processing equipment which transported material in the said transported material be transported to according to said result of calculation decision, according to the said supply unit of this decision control.
(structure 9)
Conveyance control method of the present invention is in the conveyance control method with structure 8, also to the weighting of being scheduled to separately of the load condition of the load condition of the delivery source processing equipment of said each transported material and each supply unit.
(structure 10)
Conveyance control method of the present invention in the conveyance control method with structure 8 or 9, is logined a weighting pattern figure, and the situation in the corresponding conveyor zones changes said weighting pattern figure in-to-in value makes the weighting change.
(structure 11)
Conveyance control method of the present invention in the conveyance control method with structure 8 or 9, is logined a plurality of weighting pattern figure, and the situation in the corresponding conveyor zones is selected a weighting pattern figure, makes the weighting change thus.
According to treatment facility with structure 1, on one side can carry (for example thin plate conveying),, reduce time lead time Yi Bian reduce the semifinished piece amount, and certain and save the space.In addition, because can shorten the miles of relative movement of lifting unit, so can seek saving in energy.And, because lifting unit has the buffering access facility, so even waiting the fluctuation that also can absorb transport process when causing stopping owing to maintenance.
Treatment facility of the present invention according to having structure 2 can reduce the semifinished piece amount, reduces time lead time.
Treatment facility of the present invention according to having structure 3 can reduce the semifinished piece amount.Reduce time lead time.
According to conveying control device of the present invention with structure 4, can reduce the generation frequency of obstruction, realize the high conveying of whole efficiency, and can seek to shorten the summation productive temp time in the conveyor zones.
According to conveying control device of the present invention with structure 5, can reduce the generation frequency of obstruction, realize the high conveying of whole efficiency, and can seek to shorten the summation productive temp time in the conveyor zones.
According to conveying control device of the present invention with structure 6, can select with conveyor zones in the conveying indication of the cooresponding the best of state, can reduce the generation frequency of obstruction.Therefore, can realize the conveying that whole efficiency is high, and can seek to shorten the summation productive temp time in the conveyor zones.
According to conveyance control method of the present invention with structure 8, can reduce the generation frequency of obstruction, realize the high conveying of whole efficiency, and can seek to shorten the summation productive temp time in the conveyor zones.
According to conveyance control method of the present invention with structure 9, can reduce the generation frequency of obstruction, realize the high conveying of whole efficiency, and can seek to shorten the summation productive temp time in the conveyor zones.
According to conveyance control method of the present invention with structure 10, can select with conveyor zones in the conveying indication of the cooresponding the best of state, can reduce the generation frequency of obstruction.Therefore, can realize the conveying that whole efficiency is high, and can seek to shorten the summation productive temp time in the conveyor zones.
According to conveyance control method of the present invention with structure 11, can select with conveyor zones in the conveying indication of the cooresponding the best of state, can reduce the generation frequency of obstruction.Therefore, can realize the conveying that whole efficiency is high, and can seek to shorten the summation productive temp time in the conveyor zones.
That is, the present invention provides a kind of and can not maximize, the semifinished piece amount can not gain and the lead time can be not elongated, can guarantee the treatment facility of enough traffic capacitys.In addition, according to the present invention,, also can shorten the productive temp time of entire process device even under the high situation of the load of the conveying destination of transported material.And; Even the present invention provides a kind of data volume that requires calculation and handle that in so-called thin plate travel line, also can not increase; And do not need large-scale device as arithmetic processing apparatus, conveying control device and conveyance control method that the needed time of calculation process can be not elongated yet.
Description of drawings
Fig. 1 is the lateral plan of structure of first embodiment of expression processing equipment of the present invention.
Fig. 2 is the lateral plan of structure of second embodiment of expression processing equipment of the present invention.
Fig. 3 is the lateral plan of structure of the 3rd embodiment of expression processing equipment of the present invention.
Fig. 4 is the block scheme of the structure of the expression treatment facility of carrying out conveyance control method of the present invention.
Fig. 5 is (a) planar view and (b) lateral plan of the structure of the expression treatment facility of having used conveying control device of the present invention.
Fig. 6 is the block scheme of the structure of expression conveying control device of the present invention.
Fig. 7 is the diagram of circuit of action of the indication management department of expression conveying control device of the present invention.
Fig. 8 is the diagram of circuit that the optimization of expression conveying control device of the present invention is handled.
Nomenclature
1 control unit; 2 process management portions; 3 carry indication portion; 4 indication management departments; 5 facility management portions; 6 equipment state portions; 102 processing equipment (treatments B); 103 processing equipment (handling C); 104 processing equipment (handling D); 106 supply units; 107 supply units
The specific embodiment
Following according to description of drawings embodiment of the present invention.
(first embodiment of treatment facility)
Fig. 1 is the lateral plan of structure of first embodiment of expression treatment facility of the present invention
In the treatment facility of this embodiment, as shown in Figure 1, at a plurality of processing equipment 101,102,103, there is the transport path of a plurality of transported materials between 104.In addition, along this transport path, a plurality of conveyers that have a branch road function that are provided with conveying substrate (transported material) 111 (below be called the branch road conveyer, FCV: supply unit) 107a, 7,107b, 107c, 107d.Make a plurality of substrates 111 corresponding to each branch road conveyer 107a, 7,107b, 107c, 107d.
In this treatment facility, be provided with each processing equipment 101,102,103,104 and each branch road conveyer 107a, 7,107b, 107c, 107d multistagely.The higher level first processing equipment 101 and the 3rd processing equipment 103 are set, in subordinate second processing equipment 102 and are set and manage device 104 everywhere.And, the higher level the first～the road junction conveyer 107a, 7,107b, 107c are set, in subordinate the 4th and the 5th branch road conveyer 107d, 107e are set.
In this treatment facility, outside operation, substrate 111 is sent to the first branch road conveyer 107a via sending into conveyer 106a.This first branch road conveyer 107a can carry out the transmission of substrate 111 with first processing equipment 101.Between this first branch road conveyer 107a and the second and the 4th branch road conveyer 107b, 107d, be provided with have first vertically carry (up-downs) function conveyer (below be called longitudinal conveyor, vertical CV elevator: lifting unit) 108.
The 4th branch road conveyer 107d can carry out the transmission of substrate 111 with second processing equipment 102.Between this second and the 4th branch road conveyer 107b, 107d and the 3rd and the 5th branch road conveyer 107c, 107e, be provided with second longitudinal conveyor 109.
In this treatment facility, first and second longitudinal conveyor 108,109 has the buffering access facility, can be as the energy disperser before and after dropping into substrate to each processing equipment 101,102,103,104.That is, in first and second longitudinal conveyor 108,109 temporary transient be detained from certain processing equipment till carrying to next processing equipment during substrate 111.
In this processing equipment, branch road conveyer best and with one-level is set up in parallel the processing equipment that carries out continuous processing accordingly, uses the branch road conveyor delivery substrate 111 with one-level.Through configuration process device so, can reduce the semifinished piece amount, and can reduce the lead time.
In addition, in this treatment facility, branch road conveyer best and with one-level is set up in parallel accordingly and is estimated to be the many processing equipment of operational throughput, uses the branch road conveyor delivery substrate 111 with one-level.Through configuration process device so, can reduce the semifinished piece amount, and can reduce the lead time.
In this processing equipment,, be transported to processing equipment 101,102,103,104 arbitrarily to the substrate of sending into from machine for input and output 106a 111 through each branch road conveyer 107a, 107b, 107c, 107d and each longitudinal conveyor 108,109.In addition, see substrate 111 off from each processing equipment 101,102,103,104.Manage throughout in the device 101,102,103,104, substrate 111 is implemented predetermined process (inspection).Each longitudinal conveyor 108,109 carries out lifting action (branch of transport path) as required, substrate 111 is flowed to the branch road conveyer of at the same level or other grades.
(second embodiment of treatment facility)
Fig. 2 is the lateral plan of structure of second embodiment of expression treatment facility of the present invention.
In the treatment facility of this embodiment, as shown in Figure 2, disposed sending into mouth and seeing mouth off of substrate 111 in an identical side.That is, in this treatment facility, first～the 3rd processing equipment 101,102,103 is set, the 4th～the 6th processing equipment 104,115,116 is set in subordinate the higher level.And, the higher level the first～the road junction conveyer 107a, 107b, 107c are set, in subordinate the 4th～the 6th branch road conveyer 107d, 107e, 107f are set.
In this treatment facility, outside operation, the first branch road conveyer 107a is sent into substrate 111.In addition, outside operation, see substrate 111 off from the 6th branch road conveyer 107f.
The first branch road conveyer 107a can carry out the transmission of substrate 111 with first processing equipment 101.In addition, the second branch road conveyer 107b can carry out the transmission of substrate 111 with second processing equipment 102.Road junction conveyer 107c can carry out the transmission of substrate 111 with the 3rd processing equipment 103.The 4th branch road conveyer 107d can with manage device 104 everywhere and carry out the transmission of substrate 111.The 5th branch road conveyer 107e can carry out the transmission of substrate 111 with the 5th processing equipment 115.The 6th branch road conveyer 107f can carry out the transmission of substrate 111 with the 6th processing equipment 116.
Between the first and the 6th branch road conveyer 107a, 107f and the second and the 5th branch road conveyer 107b, 107e, disposed first longitudinal conveyor 108.
In addition, between the second and the 5th branch road conveyer 107b, 107e and the 3rd and the 4th branch road conveyer 107c, 107d, be provided with second longitudinal conveyor 109.And, be provided with the 3rd longitudinal conveyor 110 in the end of the 3rd and the 4th branch road conveyer 107c, 107d.
In this treatment facility, first～the 3rd longitudinal conveyor 108,109,110 has the buffering access facility, can be as the energy disperser before and after dropping into substrate to each processing equipment 101,102,103,104,115,116.
In this processing equipment, branch road conveyer best and with one-level is set up in parallel the processing equipment that carries out continuous processing accordingly, uses the branch road conveyor delivery substrate 111 with one-level.Through configuration process device so, can reduce the semifinished piece amount, and can reduce the lead time.
In addition, in this treatment facility, branch road conveyer best and with one-level is set up in parallel accordingly and is estimated to be the many processing equipment of operational throughput, uses the branch road conveyor delivery substrate 111 with one-level.Through configuration process device so, can reduce the semifinished piece amount, and can reduce the lead time.
In this processing equipment; Through each branch road conveyer 107a, 107b, 107c, 107d, 107e, 107f and each longitudinal conveyor 108,109,110, be transported to processing equipment 101,102,103,104,115,116 arbitrarily to the substrate 111 that is sent among the first branch road conveyer 107a.In addition, see substrate 111 off from each processing equipment 101,102,103,104,115,116.Manage throughout in the device 101,102,103,104,115,116, substrate 111 is implemented predetermined process (inspection).Each longitudinal conveyor 108,109,110 carries out lifting action (branch of transport path) as required, substrate 111 is flowed to the branch road conveyer of at the same level or other grades.
(the 3rd embodiment of treatment facility)
Fig. 3 is the lateral plan of structure of the 3rd embodiment of expression treatment facility of the present invention.
In the treatment facility of this embodiment, as shown in Figure 3, divide three grades of ground to be provided with processing equipment and branch road conveyer.That is, in this treatment facility, first and second processing equipment 101,102 is set, is provided with the 3rd and at middle rank and manages device 103,104 everywhere, the 5th and the 6th processing equipment 115,116 is set in subordinate the higher level.And, the higher level the first～the road junction conveyer 107a, 107b, 107c are set, at middle rank the 4th～the 6th branch road conveyer 107d, 107e, 107f are set, in subordinate the 7th～the 9th branch road conveyer 107g, 107h, 107i are set.
In this treatment facility, outside operation, the first branch road conveyer 107a is sent into substrate 111.In addition, outside operation, see substrate 111 off from the 4th or the 7th branch road conveyer 107d, 107g.
The first branch road conveyer 107a can carry out the transmission of substrate 111 with first processing equipment 101.In addition, the second branch road conveyer 107b can carry out the transmission of substrate 111 with second processing equipment 102.The 4th branch road conveyer 107d can with manage device 104 everywhere and carry out the transmission of substrate 111.The 6th branch road conveyer 107f can carry out the transmission of substrate 111 with the 3rd processing equipment 103.The 8th branch road conveyer 107h can carry out the transmission of substrate 111 with the 5th processing equipment 115.The 9th branch road conveyer 107i can carry out the transmission of substrate 111 with the 6th processing equipment 116.
Between the first, the 4th and the 7th branch road conveyer 107a, 107d, 107g and second, the 5th and the 8th branch road conveyer 107b, 107e, 107h, disposed first longitudinal conveyor 108.
In addition, between the second, the 5th and the 8th branch road conveyer 107b, 107e, 107h and the 3rd, the 6th and the 9th branch road conveyer 107c, 107f, 107i, be provided with second longitudinal conveyor 109.And, be provided with the 3rd longitudinal conveyor 110 in the end of the 3rd, the 6th and the 9th branch road conveyer 107c, 107f, 107i.And, be provided with to send into and see longitudinal conveyor 112 off in the end of the first, the 4th and the 7th branch road conveyer 107a, 107d, 107g (send into mouth and see mouth off).
In this treatment facility, first～the 3rd longitudinal conveyor 108,109,110 has the buffering access facility, can be as the energy disperser before and after dropping into substrate to each processing equipment 101,102,103,104,115,116.
In this processing equipment, branch road conveyer best and with one-level is set up in parallel the processing equipment that carries out continuous processing accordingly, uses the branch road conveyor delivery substrate 111 with one-level.Through configuration process device so, can reduce the semifinished piece amount, and can reduce the lead time.
In addition, in this treatment facility, branch road conveyer best and with one-level is set up in parallel accordingly and is estimated to be the many processing equipment of operational throughput, uses the branch road conveyor delivery substrate 111 with one-level.Through configuration process device so, can reduce the semifinished piece amount, and can reduce the lead time.
In this processing equipment; Through each branch road conveyer 107a, 107b, 107c, 107d, 107e, 107f, 107g, 107h, 107i and each longitudinal conveyor 108,109,110, be transported to processing equipment 101,102,103,104,115,116 arbitrarily to the substrate 111 that is sent among the first branch road conveyer 107a.In addition, see substrate 111 off from each processing equipment 101,102,103,104,115,116.Manage throughout in the device 101,102,103,104,115,116, substrate 111 is implemented predetermined process (inspection).The branch of each longitudinal conveyor 108,109,110 corresponding transport path etc., and carry out lifting action as required, substrate 111 is flowed to the branch road conveyer of at the same level or other grades.
(embodiment of conveyance control method)
Fig. 4 is the block scheme of the structure of the expression treatment facility of carrying out conveyance control method of the present invention.
As shown in Figure 4; The conveyance control method of this embodiment is the conveyance control method of control supply unit in treatment facility (treatment facility of for example said first～the 3rd embodiment); This treatment facility at a plurality of processing equipment 101,102,103, have the transport path of a plurality of transported materials between 104; Have a plurality of supply units that carry out the conveying of transported material along this transport path, make the corresponding supply unit of a plurality of transported materials.
In this treatment facility; According to the mail message between the processing equipment of obtaining from upper system 101,102,103,104 (handle A, treatments B, processing C, handle D); Successively at processing equipment 101,102,103, transported material (for example, FPD or glass substrate of in quartz conductor, using etc.) between 104 in the travel line.The conveyance control method of this embodiment improves the transport efficiency of such treatment facility.
In such treatment facility, put into the transported material of gangway 105, be transported to each processing equipment 101,102,103,104 successively, implement predetermined process, and turn back to gangway 105 once more.But, in this treatment facility, the next processing equipment (operation) that is transported to of result (for example, check result) change in might corresponding each processing equipment.In addition, in this processing equipment,, between each processing equipment, there are a plurality of branches or interflow because sometimes a plurality of transported materials are transported to same processing equipment (for example testing fixture).
The conveyance control method of this embodiment is particularly suitable for carrying the thin plate travel line of a transported material at every turn.In the thin plate travel line, because carry the quantity of the transported material of control to become huge simultaneously, so control is very difficult in existing conveyance control method.
(structure of conveying control device)
Fig. 5 is (a) planar view and (b) lateral plan of the structure of the expression treatment facility of having used conveying control device of the present invention.
In the treatment facility of the conveying control device of having used this embodiment, shown in Fig. 5 (a), drop into transported material from the port A～E that becomes gangway 105.Through conveyer (supply unit) 106,107 at a plurality of processing equipment 101,102,103, carry transported material between 104.
Shown in Fig. 5 (b), conveyer 107 is made up of branch road conveyer (FCV) 107 and longitudinal conveyor (vertically CV) 108,109,110.Conveyer 107 on even keels in branch road are carried transported material, and carry out the transmission of transported material with processing equipment 101,102,103,104.Longitudinal conveyor 108,109,110 has the buffering access facility.
In this processing equipment, disposed the processing equipment 101 of handling A and the processing equipment 104 of handling D up and down with loading, in addition, disposed the processing equipment 102 and the processing equipment 103 of handling C of treatments B up and down with loading.And, between the initiating terminal and terminal, processing equipment 101 and processing equipment 104 and processing equipment 102 and processing equipment 103 of travel line, be provided with longitudinal conveyor 108,109,110 respectively.In these longitudinal conveyors 108,109,110 temporary transient be detained from certain processing equipment till carrying to next processing equipment during transported material.
In this processing equipment; Conveying control device control conveyer 106,107 through this embodiment; Thus each transported material is transported to the such arbitrary site of each processing equipment 101,102,103,104 and each longitudinal conveyor 108,109,110, manages throughout in the device 101,102,103,104 each transported material is implemented predetermined process (inspection).
Fig. 6 is the block scheme of structure of the conveying control device of this embodiment of expression.
As shown in Figure 6, the conveying control device of this embodiment has the control unit 1 of control supply unit 106,107.This control unit 1 has the process management portion 2 that receives the mail message between handling from upper system 201.Conveying indication information between the processing equipment in the conveyor zones of these process management portion 2 generation transported materials, and accumulate in the conveying indication portion 3.Read the conveying indication information that accumulates in the conveying indication portion 3 through indication management department 4, send to facility management portion 5.
On the other hand, see the result of the action information and status information of equipment (track data) off, accumulate in the equipment state portion (track data DB) 6 via facility management portion 5 from each supply unit 106,107.The result of the action information and the status information of equipment that accumulates in the equipment state portion 6 read by management department 4 by indication, uses it for to generate and carries indication information.
Facility management portion 5 according to the conveying indication information that receives, generates the action indication information of each supply unit 106,107 of control, and sends it to each supply unit 106,107.Then, according to each supply unit 106,107 of action indication information control it is moved.
In this conveying control device, the processing relative importance value of transported material calculates in indication management department 4 when generating the conveying indication information, carries out which transported material in a plurality of transported materials being flowed to the optimization processing of which processing equipment.
In this optimization is handled, when calculating the processing relative importance value of transported material, a plurality of projects of from the result of the action information of each supply unit 106,107 and status information of equipment, extracting the decision relative importance value out, and to each the project settings weighting in these projects.About the setting of weighting, login a mode chart, this mode chart of situation change in the corresponding conveyor zones.Perhaps can login a plurality of mode charts, the situation in the corresponding conveyor zones is selected a mode chart.
Promptly; The weighting of being scheduled to separately (situation in the corresponding conveyor zones makes the weighting change) of the load condition of all load condition and each supply unit in the load condition of the load condition of the standby time of each each transported material constantly of 4 pairs of management departments of indication, the conveying destination processing equipment 101,102,103.104 of each transported material, the delivery source processing equipment 101,102,103,104 of each transported material, the conveyor zones of each transported material calculates the relative importance value of the transport process of each transported material.Then, indication management department 4 is according to this result of calculation, and decision flows to which processing equipment 101,102,103,104 to which transported material in each transported material, according to this decision control supply unit 106,107.
(action of conveying control device (conveyance control method))
Fig. 7 is the diagram of circuit of action of the indication management department 4 of expression conveying control device.
In step st1, confirm the result of the action information and the status information of equipment that in equipment state portion 6, accumulate.In step st2, judging has the completed transported material of non-processor.If have the completed transported material of processing, then enter into step st9, if do not handle completed transported material, enter into step st3.In step st9, the status information of carrying the completed transported material of indication is changed to " completion ".
In step st3, judge to have or not the transported material in the standby, if there is the transported material in the standby, then enter into step st4, if there is not the transported material in the standby, then enters into step st13 processing and finish.
In step st4, confirm the state of supply unit 106,107.In step st5, judge whether to carry out the optimization processing of supply unit 106,107.Carry out optimization if desired and handle, then enter into step st10, do not handle then enter into step st6 if need not carry out optimization.
In step st10, carry out optimization and handle.In this optimization is handled, as after state, a plurality of projects of from the result of the action information of each supply unit 106,107 and status information of equipment, extracting the decision relative importance value out are to each the project settings weighting in these projects.In step st111, the conveying destination in the indication information is carried in change.
In step st6, decision is to the conveying destination in the job command of mobile unit 106,107.In step st7, generate job command to mobile unit 106,107.
In step st8, judge and carry whether indication information is in the standby.If in the standby, then get into step st12, in standby, then get into step st13, processing finishes.
In step st12, carry the status information of the transported material of indication to change to " in the conveying " with having begun, enter into step st13 processing and finish.
Fig. 8 is that the optimization in the expression conveying control device is handled the diagram of circuit of (st10 of Fig. 7).
As shown in Figure 8, described optimization is handled the optimization request of in step st21, accepting.In step st22, read various information datas.Then, in step st23, extract each conveying indication out to the supply unit 106,107 that becomes object.Then, in step st24, affirmation could be carried out and carry indication.
Then, carry indication if can carry out, then in step st25, offhand decision is carried the conveying destination in the indication.Then, in step st26, calculate the relative importance value of carrying indication.Then, in step st27, the conveying indication that selection will be carried out.Then, in step st28, the conveying indication that output will be carried out, the optimization processing finishes.
Shown in following table (1), each project is carried out weighting, according to this weighted calculation relative importance value.
Table 1
The relative importance value condition of the front and back of transported material
That is, about each in batches, formerly begin the batch handled, make the relative importance value height make weighting become " greatly ".Thus, each is carried out preferential processing in batches.In same batch, become identical relative importance value.Can also be applicable to urgent batch etc.In addition,, use the relative importance value height of the processing equipment of energy disperser, make weighting become " greatly " about carrying the destination.Thus, can try one's best and do not use the selection of energy disperser.
About the standby time of transported material, standby time is long more, makes relative importance value high more, makes weighting become " greatly ".When keeping out of the way transported material in energy disperser, because can't surmount, so do not consider standby time.
About the receptive phase of carrying the destination device and carrying destination CV, its quantity makes relative importance value high more more, make weighting become " in ".Thus, confirm the load condition of the device in travel line downstream.When having a plurality of acceptable device, use the total of the load condition of each device.When carrying the destination identical, relative importance value is identical.
About the receptive phase of delivery source device and delivery source CV, its quantity makes relative importance value high more more less, make weighting become " in ".Thus, confirm the load condition of the device at the travel line upper reaches.But when having a plurality of receiving device, use the total of the load condition of each device.When delivery source was identical, relative importance value was identical.
About the number of keeping out of the way to energy disperser, when transported material was in the energy disperser, its number made relative importance value high more more, so because can surmount and influence for a short time, make weighting become " little ".In addition, when transported material was among the CV, its number made relative importance value low more more, so because can surmount and influence for a short time, make weighting become " little ".
Conveying about supply unit needs the time, needs the shorter relative importance value that makes of time high more, makes weighting become " little ".Thus, the time of management transport process cost.No matter be from CV or from energy disperser, thinking needs the time not have too big variation.
About the order of seeing off, because be not limited to the order of seeing off, so the transported material that formerly begins to handle makes relative importance value high more from storage bin from storage bin.So influence for a short time because can surmount, make weighting become " little ".
And the relative importance value condition about whole travel line is illustrated in following " table 2 ".About the number of the transported material of in-process, number makes the relative importance value of transport direction high more more, makes weighting become " greatly ".Thus, consider the whole flow process of travel line, prevention is blocked and deadlock.
About other the conveying instruction condition of supply unit, few towards distributing, make relative importance value high more, make weighting become " in ".Thus, consider the whole flow process of travel line, prevention is blocked and deadlock.At the upper reaches and both sides, downstream when not having other supply unit, do not need to consider.
Table 2
The relative importance value condition of whole travel line
Table 3
Relative importance value calculates the weighting table (the fixing setting) with projects
In addition, when making the weighting change, shown in following " table 4 ", the situation of the travel line when correspondence is calculated relative importance value changes weighting.
Table 4
Relative importance value calculates the weighting table (weighting change method) with projects
In addition, add temporary from a plurality of mode charts, selecting, shown in following " table 5 ", the situation of corresponding travel line when calculating relative importance value is selected appropriate weighting pattern figure.
Table 5
Relative importance value calculates the weight table (a plurality of mode chart login method) with projects
Then, following such relative importance value that calculates.Setting adds temporary or when making the weighting change (table 4), from above-mentioned table (table 3 or table 4), obtain weighting, through the computes relative importance value fixing.
(carrying the relative importance value of indication)
=(relative importance value calculates with project 1) * (weight 1)
+ (relative importance value calculates with project 2) * (weight 2)
+……
+ (relative importance value calculates and uses project N) * (weight N)
Then, from a plurality of mode charts, selecting to add temporary (table 5), according to the heavy mode chart of state option right from weighting table of in-process, through the computes relative importance value.
(carrying the relative importance value of indication)
=(relative importance value calculates with project 1) * (weight mode chart N-1)
+ (relative importance value calculates with project 2) * (weight mode chart N-2)
+……
+ (relative importance value calculates and uses project N) * (weight mode chart N-N)
In addition, as stated, relative importance value calculates the project of use, for example for the number of the transported material of the standby time of the load of conveying destination processing equipment, transported material, in-process etc.
The present invention is applicable to when between a plurality of processing equipment, having the transport path of a plurality of transported materials, is used to be controlled at conveying control device and the conveyance control method of carrying the supply unit of transported material on this transport path.
Claims (8)
1. conveying control device; It is used for controlling supply unit at following treatment facility; There is the transport path of many transported materials in said treatment facility between a plurality of processing equipment, and has a plurality of supply units along said transport path conveying transported material, makes a plurality of transported materials corresponding with a said supply unit; This conveying control device is characterised in that
The control unit that possesses said each supply unit of control,
Said control unit; The weighting that all load conditions in the conveyor zones of the load condition of the conveying destination processing equipment of the standby time of each said each transported material constantly, said each transported material and said each transported material are scheduled to respectively; Use the relative importance value of the transport process of said each transported material of said weighted calculation; Should which processing equipment which transported material in said each transported material be transported to according to this result of calculation decision, according to the said supply unit of this decision control.
2. conveying control device according to claim 1 is characterized in that,
Said control unit, the weighting of also load condition of the load condition of the delivery source processing equipment of said each transported material and each supply unit being scheduled to respectively.
3. conveying control device according to claim 1 and 2 is characterized in that,
Said control unit is logined a weighting pattern figure, and the situation in the corresponding conveyor zones changes said weighting pattern figure in-to-in value and makes the weighting change.
4. conveying control device according to claim 1 and 2 is characterized in that,
Said control unit is logined a plurality of weighting pattern figure, and the situation in the corresponding conveyor zones is selected a weighting pattern figure, makes the weighting change thus.
5. conveyance control method; It is used for controlling supply unit at following treatment facility; There is the transport path of a plurality of transported materials in this treatment facility between a plurality of processing equipment, and has a plurality of supply units along said transport path conveying transported material, makes a plurality of transported materials corresponding with a said supply unit; This conveyance control method is characterised in that
The weighting that all load conditions in the conveyor zones of the load condition of the conveying destination processing equipment of the standby time of each said each transported material constantly, said each transported material and said each transported material are scheduled to respectively; Use the relative importance value of the transport process of said each transported material of said weighted calculation
Should which processing equipment which transported material in said each transported material be transported to according to said result of calculation decision, according to the said supply unit of this decision control.
6. conveyance control method according to claim 5 is characterized in that,
The weighting of also load condition of the load condition of the delivery source processing equipment of said each transported material and each supply unit being scheduled to respectively.
7. according to claim 5 or 6 described conveyance control methods, it is characterized in that,
Login a weighting pattern figure, the situation in the corresponding conveyor zones changes said weighting pattern figure in-to-in value makes the weighting change.
8. according to claim 5 or 6 described conveyance control methods, it is characterized in that,
Login a plurality of weighting pattern figure, the situation in the corresponding conveyor zones is selected a weighting pattern figure, makes the weighting change thus.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008161971 | 2008-06-20 | ||
| JP2008-161971 | 2008-06-20 | ||
| JP2009-091878 | 2009-04-06 | ||
| JP2009091878A JP5458633B2 (en) | 2008-06-20 | 2009-04-06 | Processing equipment and transfer control method |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CNA2009101425084A Division CN101607634A (en) | 2008-06-20 | 2009-06-22 | Treatment facility, conveying control device and conveyance control method |
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| CN102502201A true CN102502201A (en) | 2012-06-20 |
| CN102502201B CN102502201B (en) | 2014-09-17 |
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| CN201110358229.9A Expired - Fee Related CN102502201B (en) | 2008-06-20 | 2009-06-22 | Conveying control device and conveying control method |
| CNA2009101425084A Pending CN101607634A (en) | 2008-06-20 | 2009-06-22 | Treatment facility, conveying control device and conveyance control method |
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| CNA2009101425084A Pending CN101607634A (en) | 2008-06-20 | 2009-06-22 | Treatment facility, conveying control device and conveyance control method |
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| JP (1) | JP5458633B2 (en) |
| CN (2) | CN102502201B (en) |
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| CN111489986A (en) * | 2019-01-28 | 2020-08-04 | 东京毅力科创株式会社 | Substrate processing apparatus and substrate processing method |
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| DE102010022582A1 (en) * | 2010-06-03 | 2011-12-08 | Brötje-Automation GmbH | Method for controlling a cycled production line |
| US9287150B2 (en) * | 2012-10-09 | 2016-03-15 | Taiwan Semiconductor Manufacturing Company, Ltd. | Reticle transfer system and method |
| JP5981307B2 (en) * | 2012-11-07 | 2016-08-31 | 東京エレクトロン株式会社 | Processing method and processing apparatus |
| JP6216530B2 (en) * | 2013-03-29 | 2017-10-18 | 株式会社日立ハイテクノロジーズ | Operation method of vacuum processing equipment |
| CN103824794B (en) * | 2014-03-07 | 2016-09-28 | 上海华虹宏力半导体制造有限公司 | For controlling the control device of SMIF and board, conveying arrangement |
| JP6487649B2 (en) * | 2014-08-08 | 2019-03-20 | 株式会社イシダ | Inspection distribution system |
| CN105668233B (en) * | 2014-11-19 | 2020-03-31 | 日东电工株式会社 | Buffer device |
| TWI595587B (en) * | 2015-01-20 | 2017-08-11 | 亞智科技股份有限公司 | Double layer transfer-treatment apparatus and double layer transfer-treatment method |
| CN105668206B (en) | 2016-03-23 | 2019-02-12 | 深圳市华星光电技术有限公司 | Shunt method, part flow arrangement and the system of processing of glass substrate |
| CN105870008B (en) * | 2016-04-18 | 2018-10-23 | 武汉华星光电技术有限公司 | Etching machines and engraving method |
| EP3328765B1 (en) * | 2016-07-12 | 2021-01-20 | LISEC Austria GmbH | Conveying apparatus |
| CN106743326B (en) * | 2017-03-17 | 2020-09-11 | 惠科股份有限公司 | Material conveying method and system |
| JP6729465B2 (en) * | 2017-03-28 | 2020-07-22 | 株式会社ダイフク | Goods transport facility |
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Also Published As
| Publication number | Publication date |
|---|---|
| JP5458633B2 (en) | 2014-04-02 |
| JP2010028090A (en) | 2010-02-04 |
| CN101607634A (en) | 2009-12-23 |
| TW201012727A (en) | 2010-04-01 |
| TWI445653B (en) | 2014-07-21 |
| CN102502201B (en) | 2014-09-17 |
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