201012727 六、發明說明： 【發明所屬之技術領域】 本發明關於，在多數處理裝置間存在多數個基板等被 搬送物之搬送路徑時，具備於彼等搬送路徑上搬送被搬送 物之搬送手段的處理設備，及控制該處理設備之搬送手段 的搬送控制裝置，及控制該處理設備之搬送手段的搬送控 制方法。 【先前技術】 . 習知技術，在多數處理裝置間存在多數個基板等被搬 • 送物之分歧或合流之搬送路徑時，具備於彼等搬送路徑上 搬送被搬送物之搬送手段，對該1個搬送手段可對應於多 數被搬送物之處理設備存在。 作爲具有此種分歧或合流之搬送路徑的處理設備通常 爲，具有在各樓層被設置有處理設備之建物內使各樓層間 9 升降的升降機，在各處理裝置間依據每一收納匣進行被搬 送物之搬送的處理設備。 另外，作爲葉片式搬送之處理設備而對基板等被搬送 物進行一片片搬送時，係如專利文獻1所揭示：具有在各 樓層被設置有處理裝置之建物內使各樓層間升降的升降機 ，在各處理裝置間進行被搬送物之搬送的處理設備。 另外，如專利文獻2所揭示之多段構成之處理設備， 其具備：具有升降功能的葉片式搬送車；及進行該葉片式 搬送車與處理裝置間之被搬送物之受取的裝載口。於該處 -5- 201012727 理設備，可使處理裝置垂直並列而實現省空間之佈局。 另外，如專利文獻3所揭示之處理設備，其具備：可 連續搬送的葉片式搬送帶；及設於該葉片式搬送帶與處理 裝置間，可保管搬送物的保管架。 於此種處理設備，爲實現效率良好之處理，關於哪一 被搬送物需要被搬送至哪一處理裝置，需要適當進行搬送 手段之控制。 習知搬送控制方法，係依據到達該搬送手段之順序， φ 或依到達時刻、搬送時間、及等待時間等而被預約之順序 ，或依負荷狀況等而被事先排程之順序，使搬送手段進行 ， 被搬送物之搬送。 ： 例如，專利文獻4所揭示之搬送裝置，係在經由多數 搬送路徑可將被搬送物搬入加工處理裝置之設備中，藉由 選擇短時間最佳稼動排程’使搬送鋼板之各設備之滯留成· 爲最小限’而提升各處理設備之稼動效率的技術。該搬送 裝置’係具有稼動排程裝置’可在設於各搬送路徑之搬送 ❹ 裝置之稼動排程之作成時’修正作成之排程之不適合之點 之同時，作成多數排程，由多數排程之中選擇最適合之排 程。 另外，專利文獻5揭示，在對被搬送物進行特定處理 之多階段工程中’依據來自各工程之服務要求，進行特定 服務之服務手段之排程技術。該技術構成爲可以系統全體 之處理效率爲優先的排程。亦即，依據各個被搬送物，於 累計等待時間算出部算出各工程中等待時間之累計，之後 -6 - 201012727 ，針對處於等待狀態之各服務要求，於容許等待時 部算出提出服務要求之工程中之處理時間與各個工 理時間之最大値之間之偏差。另外，例如對應於緊 補正値被輸入優先度補正値輸入部，於優先度算出 優先度，依據該優先度來選擇1個服務要求。 另外，專利文獻6揭示，依據被搬送物到達順 處理之先進先出方式爲基本，解決工期不穩定所導 Φ 下降等問題的半導體工廠等之物流控制裝置。於該 制裝置，係以前段物流控制單位之處理終了時刻（ )與基準時刻之差作爲延遲時間予以算出，該基準 係依據由理論工期與實際處理時間之比所算出之處 時間被算出。之後，該該物流控制裝置，係以延遲 大之被製造物爲優先處理，而使被製造物之工期或 間之產出達穩定。 另外，專利文獻7揭示，進行路徑選擇之同時 φ 品、製品等之被搬送物流晶幾個工程之具有多數工 流控制方法。於該物流控制方法，係使用現在之各 處理中及等待之被搬送物數目之資訊與特定時間內 至次一工程之被搬送物之資訊，依據對次一工程之 令設定次一時刻之各工程中之材料數之預測用的狀 式。依據各工程之被搬送物數及控制指令相關評估 爲最小之解，算出搬送指令値。針對該搬送指令値 、大於特定之値，而且被搬送物可以被搬送之物發 指令，特別是，於路徑之分歧點或交流點，對搬送 間算出 程之處 急度之 部計算 序進行 致產出 物流控 現時刻 時刻， 理計畫 時間最 單位時 ，半製 程的物 工程之 可搬送 搬送指 態方程 函數設 爲正値 出搬送 指令値 201012727 最大之物發出搬送指令。 專利文獻1 :特開平07-022488號公報 專利文獻2:特許第4209572號公報 專利文獻3:特開2005-167083號公報 專利文獻4:特開平06-328112號公報 專利文獻5:特開2000-033542號公報 專利文獻6:特開平9-123 041號公報 專利文獻7:特許第3400851號公報 ❿ 【發明內容】 (發明所欲解決之課題） 但是，上述依據每一收納匣進行搬送的習知處理設備 ，在收納匣內被搬送物未被插入特定數之前無法進行搬送 ，存在待處理量增加、前置時間變長之問題。 另外，專利文獻1所揭示之使處理裝置垂直並列時， 爲進行葉片式搬送，升降機之搬送次數變多，升降動作次 G 數或升降動作距離變長之問題存在。 專利文獻2所揭示之具備葉片式搬送車的多段構成之 處理設備中，搬送能力受限於葉片式搬送車之能力，此爲 問題。另外，裝載口（ load port)之空間成爲必要，處理 設備變爲大型化之問題存在。 專利文獻3所揭示之具備葉片式搬送帶的處理設備中 ，於全部處理裝置之前需要保管架之空間，處理設備變爲 大型化之問題存在。 -8 - 201012727 專利文獻4或專利文獻5所揭示之搬送控制方法，各 被搬送物之搬送對象（處理順序）係事先依據排程被決定 ，即使被搬送物之搬送對象之負荷高的情況下，亦依據事 先決定之奔+順被處理。因此，有可能發生被搬送物滞留 之情況，難以縮短搬送控制全體之間歇時間。 專利文獻6或專利文獻7所揭示之搬送控制裝置或控 制方法，特別是，在對被搬送物進行1個個搬送的葉片式 Φ 搬送線上’運算處理所要之資料量成爲龐大。無法縮短運 算處理所要時間，因此，難以縮短處理裝置之間歇時間》 另外，需要大型之運算處理裝置。 本發明目的在於提供，不會變爲大型化，不會增大待 處理量，前置時間不會變長，可以確保充分之搬送能力的 處理設備。另外，本發明目的在於提供，被搬送物之搬送 對象之負荷變高的情況下，亦可以縮短處理裝置全體之間 歇時間，即使是所謂葉片式搬送線亦不會增大運算處理所 # 要資料量，不需要大型運算處理裝置，運算處理所要時間 亦不會變長的搬送控制裝置及搬送控制方法。 (用以解決課題的手段） 爲解決上述問題，達成上述目的，本發明具有以下構 成。 (構成1 ) 本發明之處理設備，係在多數處理裝置間存在多數個 201012727 被搬送物之搬送路徑，具有沿著上述搬送路徑進行被搬送 物之搬送的多數搬送手段，多數被搬送物被對應於1個上 述搬送手段者；其特徵爲：具備：升降手段，其具有在上 述多數搬送手段間升降被搬送物之功能；上述搬送手段， 係以多段被配置，於上述處理裝置間進行上述被搬送物之 搬送；上述升降手段，係具有緩衝部受取功能，可利用作 爲對上述處理裝置之投入前後之緩衝部。 (構成2) 本發明之處理設備，係在具有構成1之處理設備中， 進行連續處理之上述處理裝置係對應於同一段之上述搬送 手段被並列配置，上述被搬送物係藉由同一段之上述搬送 手段被搬送。 (構成3 )[Technical Field] The present invention relates to a transporting means for transporting a transported object on a transport path when a plurality of transport paths of a transported object such as a substrate are present between a plurality of processing apparatuses. A processing device, a transport control device that controls the transport means of the processing device, and a transport control method that controls the transport means of the processing device. [Prior Art] A conventional technique is a method of transporting a transported object on a transport path when a plurality of substrates are separated or conveyed by a plurality of substrates. One transport means can correspond to the processing equipment of a large number of conveyed objects. As a processing apparatus having such a branching or merging transport path, a lift having a floor space between each floor is provided in a building in which a processing apparatus is provided on each floor, and each of the processing apparatuses is transported in accordance with each storage unit. Processing equipment for transporting objects. In addition, when the conveyed object such as a substrate is conveyed in a single piece as a processing device for the blade type transfer, as disclosed in Patent Document 1, there is a lift having a structure in which a processing device is installed in each floor to raise and lower each floor. A processing device that transports the transported object between the processing devices. Further, the processing apparatus of the multi-stage configuration disclosed in Patent Document 2 includes: a vane type transport vehicle having a lifting function; and a loading port for receiving the conveyed object between the vane type transport vehicle and the processing device. Here -5- 201012727 The equipment can make the processing device vertically parallel and realize the space-saving layout. Further, the processing apparatus disclosed in Patent Document 3 includes: a blade type conveying belt that can be continuously conveyed; and a storage rack that can be stored between the blade type conveyor belt and the processing apparatus to store the conveyed objects. In such a processing apparatus, in order to achieve efficient processing, it is necessary to appropriately control the transport means as to which processing apparatus the transported object needs to be transported to. The conventional transport control method is based on the order in which the transport means is reached, φ or the order in which it is reserved according to the arrival time, the transport time, and the waiting time, or the order in which the schedule is scheduled in advance, etc., and the transport means We carry, and conveyed to conveyed. For example, the transport apparatus disclosed in Patent Document 4 is a device that can transport a conveyed object into a processing device via a plurality of transport paths, and selects a device for transporting the steel sheet by selecting a short-time optimal crop schedule A technique for improving the efficiency of the processing equipment for each of the minimum limits. The conveying device 'has a flow scheduling device' that can make a majority of the schedules and correct the schedules of the production schedules of the transporting devices provided in the respective transport paths. Choose the most suitable schedule in the process. Further, Patent Document 5 discloses a scheduling technique for performing a service of a specific service in accordance with a service request from each project in a multi-stage project for performing specific processing on a conveyed object. This technique is configured to give priority to the processing efficiency of the entire system. In other words, the accumulated waiting time calculation unit calculates the total of the waiting time in each project, and then -6 - 201012727, for each service request in the waiting state, calculates the request for the service request at the allowable waiting time. The deviation between the processing time and the maximum 各个 of each working time. Further, for example, the priority correction input unit is input in response to the correction, and the priority is calculated based on the priority, and one service request is selected based on the priority. Further, Patent Document 6 discloses a logistics control device such as a semiconductor factory that solves problems such as a decrease in the duration of the construction period based on the first-in-first-out method in which the conveyed object arrives at the processing. In the system, the difference between the processing end time ( ) and the reference time of the previous-stage logistics control unit is calculated as the delay time, and the reference is calculated based on the time calculated from the ratio of the theoretical period to the actual processing time. Thereafter, the flow control device prioritizes the manufactured article with a large delay, thereby stabilizing the production period or interval of the manufactured article. Further, Patent Document 7 discloses that most of the flow control methods are performed in several projects in which the φ product, the product, and the like are transported while the route is selected. In the logistics control method, the information of the number of objects to be transported and the number of objects to be transported in the current process and the information of the objects to be transported in the specific time to the next project are used, and the next time is set according to the order of the next project. The form of prediction of the number of materials in the project. The transfer command is calculated based on the minimum number of items to be transferred and the evaluation of the control instructions. In response to the transfer command 値, which is larger than the specified number, and the object to be transported can be transported, in particular, at the divergence point or the exchange point of the route, the calculation of the accuracy of the calculation process during the transfer is performed. When the output logistics is controlled at the moment, when the unit is the most unit of the planning time, the transferable transfer equation function of the semi-process material project is set to the positive transfer command 値201012727. Patent Document 1: Japanese Laid-Open Patent Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. Japanese Unexamined Patent Publication No. Hei No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. The processing apparatus cannot carry out the conveyance in the storage cassette until the specific number is inserted, and there is a problem that the amount of the processing to be processed increases and the lead time becomes long. Further, when the processing apparatus is vertically aligned as disclosed in Patent Document 1, there is a problem in that the number of times of transporting the elevator is increased, and the number of times of raising and lowering the number of lifts or the length of the lifting and lowering operation is long. In the processing equipment of the multi-stage configuration including the vane type transport vehicle disclosed in Patent Document 2, the transport capability is limited by the capability of the vane type transport vehicle, which is a problem. In addition, the space of the load port becomes necessary, and the problem that the processing equipment becomes large is existing. In the processing apparatus including the blade type conveyor belt disclosed in Patent Document 3, it is necessary to store the space of the rack before all the processing apparatuses, and the processing apparatus becomes a problem of enlargement. -8 - 201012727 The transport control method disclosed in Patent Document 4 or Patent Document 5, in which the object to be transported (processing order) is determined in advance according to the schedule, even if the load of the object to be transported is high. It is also processed according to the prior decision. Therefore, there is a possibility that the conveyed material is retained, and it is difficult to shorten the intermittent time of the entire conveyance control. In the conveyance control device or the control method disclosed in Patent Document 6 and Patent Document 7, in particular, the amount of data required for the arithmetic processing of the blade type Φ transport line for transporting the object to be transported is enormous. Since it is impossible to shorten the time required for the operation processing, it is difficult to shorten the intermittent time of the processing device. In addition, a large-scale arithmetic processing device is required. SUMMARY OF THE INVENTION An object of the present invention is to provide a processing apparatus which can ensure a sufficient carrying capacity without increasing the amount of processing, increasing the amount of processing to be performed, and not increasing the lead time. In addition, it is an object of the present invention to provide an intermittent time for the entire processing apparatus when the load of the object to be transported is increased, and it is not necessary to increase the calculation processing even for the so-called blade type transport line. The amount does not require a large-scale arithmetic processing device, and the transport control device and the transport control method do not require a long time for the arithmetic processing. (Means for Solving the Problem) In order to solve the above problems and achieve the above object, the present invention has the following constitution. (Construction 1) The processing apparatus of the present invention has a plurality of transport paths for the transported objects of the 201012727 between the plurality of processing apparatuses, and has a plurality of transport means for transporting the transported objects along the transport path, and the plurality of transported objects are corresponding to each other. In the above-described transport means, the method includes: a lifting means having a function of elevating and dropping the object between the plurality of conveying means; and the conveying means being disposed in a plurality of stages, wherein the processing is performed between the processing apparatuses The conveyance of the conveyed object; the above-described lifting means has a buffer receiving function, and can be used as a buffer portion before and after the input of the processing device. (Configuration 2) The processing apparatus according to the present invention is characterized in that, in the processing apparatus having the configuration 1, the processing means for performing continuous processing is arranged in parallel with the transport means corresponding to the same segment, and the transported object is by the same segment. The above transport means is transported. (construction 3)
本發明之處理設備，係在具有構成1之處理設備中， Q 推斷爲搬送量多的處理裝置係對應於同一段之搬送手段被 並列配置，上述被搬送物係藉由同一段之上述搬送手段被 搬送。 (構成4 ) 本發明之搬送控制裝置，係在多數處理裝置間存在多 數個被搬送物之搬送路徑，具有沿著上述搬送路徑進行被 搬送物之搬送的多數搬送手段，多數被搬送物被對應於1 -10- 201012727 個上述搬送手段的處理設備中，控制上述搬送手段者；其 特徵爲具備：控制手段，用於控制上述各搬送手段；上述 控制手段，係針對各時點之上述各被搬送物之待機時間' 上述各被搬送物之搬送對象處理裝置之負荷狀態、及上述 各被搬送物之搬送區域內全體之負荷狀態，各別進行特定 之權値附加，使用上述權値附加來算出上述各被搬送物之 搬送處理之優先度，依據該算出結果，來決定上述各被搬 送物之其中任一被搬送物應被搬送至哪一處理裝置，依據 該決定來控制上述搬送手段。 (構成5 ) 本發明之搬送控制裝置，係在具有構成4之搬送控制 裝置中，針對上述各被搬送物之搬送源處理裝置之負荷狀 態、及各搬送手段之負荷狀態，亦各別進行特定之權値附 加。 (構成6) 本發明之搬送控制裝置，係在具有構成4或5之搬送 控制裝置中.，被登錄1個權値附加圖案，對應於搬送區域 內之狀況來變動上述權値附加圖案內部之値，變動權値附 加。 (構成7 ) 本發明之搬送控制裝置，係在具有構成4或5之搬送 -11 - 201012727 控制裝置中，被登錄多數個權値附加圖案，對應於搬送區 域內之狀況來選擇1個權値附加圖案，依此而變動權値附 加。 (構成8)In the processing apparatus according to the present invention, in the processing apparatus having the configuration 1, Q is estimated that the processing means having a large amount of transport is arranged in parallel in accordance with the transport means of the same stage, and the transported object is transported by the same means. It is carried. (Construction 4) The transport control device of the present invention has a plurality of transport paths for the transported objects between the plurality of processing devices, and has a plurality of transport means for transporting the transported objects along the transport path, and the plurality of transported objects are corresponding to each other. In the processing apparatus of the above-mentioned transport means, the above-mentioned transport means is controlled by a control means for controlling each of the transport means, and the control means is transported for each of the above-mentioned points. The standby state of the object 'the load state of the transport target processing device of each of the transported objects and the load state of the entire transported area of each of the transported objects are individually assigned, and the weight is added using the weight addition The priority of the transport processing of each of the transported objects is determined based on the calculation result, and which processing device should be transported to any of the transported objects, and the transport means is controlled in accordance with the determination. (Configuration 5) In the transport control device according to the present invention, the load state of the transport source processing device for each of the transported objects and the load state of each transport means are individually specified. The right is attached. (Construction 6) The transport control device according to the present invention is configured to have a transfer control device having the configuration 4 or 5, and a single additional pattern is registered, and the inside of the transfer additional pattern is changed in accordance with the situation in the transfer area. Hey, the right to change is attached. (Configuration 7) The transport control device according to the present invention is configured such that the control device of the transport -11 - 201012727 having the configuration 4 or 5 is registered with a plurality of rights addition patterns, and one weight is selected corresponding to the situation in the transport area. The additional pattern is changed accordingly. (Composition 8)
本發明之搬送控制方法，係在多數處理裝置間存在多 數個被搬送物之搬送路徑，具有沿著上述搬送路徑進行被 搬送物之搬送的多數搬送手段，多數被搬送物被對應於1 參 個上述搬送手段的處理設備中，控制上述搬送手段者；其 特徵爲：針對各時點之上述各被搬送物之待機時間、上述 各被搬送物之搬送對象處理裝置之負荷狀態、及上述各被 搬送物之搬送區域內全體之負荷狀態，各別進行特定之權 値附加，使用上述權値附加來算出上述各被搬送物之搬送 處理之優先度；依據該算出結果，來決定上述各被搬送物 之其中任一被搬送物應被搬送至哪一處理裝置，依據該決 定來控制上述搬送手段。 Q (構成9) 本發明之搬送控制方法，係在具有構成8之搬送控制 方法中，針對上述各被搬送物之搬送源處理裝置之負荷狀 態、及各搬送手段之負荷狀態，亦各別進行特定之權値附 加0 (構成10) -12- 201012727 本發明之搬送控制方法，係在具有構成8或9 控制方法中，被登錄1個權値附加圖案，對應於搬 內之狀況來變動上述權値附加圖案內部之値，變動 加。 (構成1 1 ) 本發明之搬送控制方法，係在具有構成8或9 % 控制方法中，被登錄多數個權値附加圖案，對應於 域內之狀況來選擇1個權値附加圖案，而變動權値 【實施方式】 以下參照圖面說明本發明之實施形態。 (處理設備之第1實施形態） 圖1爲本發明第1實施形態之處理設備之構成 圖。 本實施形態之處理設備，係如圖1所示，在多 裝置（製程裝置）101、102、103 ' 104間存在多數 遊物之搬送路徑。另外，沿著該搬送路徑，設置進 (被搬送物）111之搬送的多數附加分岔功能的輸 以下稱分岔輸送帶，FCV:搬送手段）107a、107b ' l〇7d° 於各分岔輸送帶 107a、107b、107c' 107d 應多數基板1 Π。 於該處理設備，各處理裝置101、102、103、 之搬送 送區域 權値附 之搬送 搬送區 付加。 之側面 數處理 個被搬 行基板 送帶（ 、107c ，被對 104及 -13- 201012727 各分岔輸送帶l〇7a、107b、107c、107d，係以多段設置。 第1處理裝置101及第3處理裝置103係設置於上段，第 2處理裝置1〇2及第4處理裝置104係設置於下段。第1 〜第3分岔輸送帶107a、107b、107c係設置於上段，第4 〜第5分岔輸送帶107d、107e係設置於下段。 於該處理設備，基板111，係由工程外，經由搬入輸 送帶106a，被搬送至第1分岔輸送帶107a。第1分岔輸 送帶107a，可在和第1處理裝置101之間進行基板111之 參 受取。於第1分岔輸送帶107a與第2、第4分岔輸送帶 107b、107d之間，設置附加第1縱搬送功能的輸送帶（以 下稱縱搬送輸送帶，縱CV·升降機：搬送手段）1〇8。 第4分岔輸送帶107d，可在和第2處理裝置102之間 進行基板111之受取。於第2、第4分岔輸送帶l〇7b、 10 7d與第3、第5分岔輸送帶l〇7c、107e之間，設置第2 縱搬送輸送帶1〇9。 第3分岔輸送帶107c，可在和第3處理裝置103之間 · 進行基板111之受取。第5分岔輸送帶l〇7e，可在和第4 處理裝置104之間進行基板111之受取。於第3、第5分 岔輸送帶l〇7c、l〇7e與將基板111搬出工程外的搬出輸 送帶106b之間，設置第3縱搬送輸送帶11〇。 於該處理設備’第1、第2縱搬送輸送帶1〇8、i 09， 係具有緩衝部受取功能，可作爲對各處理裝置101、102、 103、104之投入前後之緩衝部使用。亦即，由任一處理裝 置被搬送至次一處理裝置之前的基板U1，係暫時滯留在 -14- 201012727 第1、第2縱搬送輸送帶1〇8、109。 於該處理設備，較好是進行連續處理之處理裝置係對 應於同一段之分岔輸送帶被並列配置，基板111藉由同一 段之分岔輸送帶被搬送。藉由將處理裝置如此配置，可減 少待處理量，可減少間歇時間。 另外，於該處理設備，較好是推斷爲搬送量多的處理 裝置’係對應於同一段之分岔輸送帶被並列配置，基板 • ill係藉由同一段之分岔輸送帶被搬送。藉由將處理裝置 如此配置，可減少待處理量，可減少間歇時間。 於該處理設備，由搬入輸送帶106a被搬入之基板ill ，係藉由各分岔輸送帶107a、107b、107c、107d及各縱 搬送輸送帶108、109被搬送至任意之處理裝置101、i〇2 、103、104。另外，基板ill，係由各處理裝置101、ι〇2 、103、104被搬出。於各處理裝置i〇1、W2、1〇3、104 ，於基板111被施予特定處理（檢測），各縱搬送輸送帶 • 108、109 ’必要時可進行升降動作（搬送路徑之分歧）， 將基板111搬送至同一段或他段之分岔輸送帶。 (處理設備之第2實施形態） 圖2爲本發明第2實施形態之處理設備之構成之側面 圖。 本實施形態之處理設備，係如圖2所示，基板111之 搬入口與搬出口被配置於同一側。亦即，於該處理設備， 第1〜第3處理裝置1〇1、1〇2、1〇3係設置於上段，第4 -15- 201012727 〜第6處理裝置104、115、116係設置於下段。第1〜第 3分岔輸送帶l〇7a、107b、107c係設置於上段’第4〜第 6分岔輸送帶l〇7d、107e、107f係設置於下段。 於該處理設備’基板111’係由工程外，被搬入第1 分岔輸送帶l〇7a。另外’基板111，係由第6分岔輸送帶 l〇7f被搬出工程外。 第1分岔輸送帶l〇7a’可在和第1處理裝置101之間 進行基板111之受取。第2分岔輸送帶l〇7b’可在和第2 φ 處理裝置102之間進行基板111之受取。第3分岔輸送帶 107c，可在和第3處理裝置103之間進行基板111之受取 。第4分岔輸送帶10 7d，可在和第4處理裝置104之間進 行基板111之受取。第5分岔輸送帶l〇7e’可在和第5處 理裝置115之間進行基板111之受取。第6分岔輸送帶 l〇7f，可在和第6處理裝置1 16之間進行基板1 1 1之受取 〇 於第1、第6分岔輸送帶107a、107f與第2、第5分 〇 岔輸送帶l〇7b' 107e之間，設置第1縱搬送輸送帶108。 於第2、第5分岔輸送帶107b、107e與第3、第4分 岔輸送帶107c、107d之間，設置第.2縱搬送輸送帶109。 另外，於第3、第4分岔輸送帶107c、10 7d之端部，設置 第3縱搬送輸送帶11〇。 於該處理設備，第1〜第3縱搬送輸送帶108、109、 110’係具有緩衝部受取功能，可作爲對各處理裝置1〇1、 102、103、104、1 15、1 16之投入前後之緩衝部使用。 -16- 201012727 於該處理設備，較好是進行連續處理之處理裝置係對 應於同一段之分岔輸送帶被並列配置，基板111藉由同一 段之分岔輸送帶被搬送。藉由將處理裝置如此配置，可減 少待處理量，可減少間歇時間。 另外，於該處理設備，較好是推斷爲搬送量多的處理 裝置，係對應於同一段之分岔輸送帶被並列配置，基板 111係藉由同一段之分岔輸送帶被搬送。藉由將處理裝置 Φ 如此配置，可減少待處理量，可減少間歇時間。 於該處理設備，被搬入至第1分岔輸送帶107a之基 板111，係藉由各分岔輸送帶10 7a、107b、107c、l〇7d、 107e、107f及各縱搬送輸送帶108、109、110被搬送至任 意之處理裝置101、102、103、104、115、116。另外，基 板 111，係由各處理裝置 101、102、103、104、115、116 被搬出。於各處理裝置101、102、103、104、115、116, 於基板111被施予特定處理（檢測），各縱搬送輸送帶 φ 108、109、110，必要時可進行升降動作（搬送路徑之分 歧），將基板111搬送至同一段或他段之分岔輸送帶。 (處理設備之第3實施形態） 圖3爲本發明第3實施形態之處理設備之構成之側面 圖。 本實施形態之處理設備，係如圖3所示，處理裝置及 分岔輸送帶被以3段配置。亦即’於該處理設備，第1〜 第2處理裝置101、102係設置於上段，第3〜第4處理裝 -17- 201012727 置103、1〇4係設置於中段，第5〜第6處理裝置115、 116係設置於下段。第1〜第3分岔輸送帶107a、107b、 107c係設置於上段，第4〜第6分岔輸送帶l〇7d、107e、 107f係設置於中段，第7〜第9分岔輸送帶107g、107h、 107i係設置於下段。 於該處理設備，基板111，係由工程外，被搬入第1 分岔輸送帶107a。另外，基板111’係由第4或第7分岔 輸送帶l〇7d、107g被搬出工程外。 第1分岔輸送帶l〇7a，可在和第1處理裝置101之間 進行基板111之受取。第2分岔輸送帶107b’可在和第2 處理裝置102之間進行基板111之受取。第4分岔輸送帶 107d，可在和第4處理裝置104之間進行基板111之受取 。第6分岔輸送帶l〇7f，可在和第3處理裝置103之間進 行基板111之受取。第8分岔輸送帶107h’可在和第5處 理裝置115之間進行基板111之受取。第9分岔輸送帶 107i，可在和第6處理裝置116之間進行基板111之受取 〇 於第1、第4，第7分岔輸送帶10 7a、107d、107g與 第2、第5、第8分岔輸送帶l〇7b、107e、107h之間’設 置第1縱搬送輸送帶1〇8。 於第2、第5、第8分岔輸送帶l〇7b、10 7e、10 7h與 第3、第6、第9分岔輸送帶l〇7c、107f、107i之間’設 置第2縱搬送輸送帶1〇9。另外’於第3、第6、第9分岔 輸送帶107c、107f、107i之端部’設置第3縱搬送輸送帶 201012727 110。另外，於第1、第4、第7分岔輸送帶i〇7a、l〇7d、 l〇7g之端部（搬入口及搬出口），設置搬出入縱搬送輸送 帶 1 12。 於該處理設備，第1〜第3縱搬送輸送帶1〇8、109、 110’係具有緩衝部受取功能，可作爲對各處理裝置101、 102、103、104、115、116之投入前後之緩衝部使用。 於該處理設備，較好是進行連續處理之處理裝置係對 φ 應於同一段之分岔輸送帶被並列配置，基板111藉由同一 段之分岔輸送帶被搬送。藉由將處理裝置如此配置，可減 少待處理量，可減少間歇時間。 另外’於該處理設備，較好是推斷爲搬送量多的處理 裝置’係對應於同一段之分岔輸送帶被並列配置，基板 111係藉由同一段之分岔輸送帶被搬送。藉由將處理裝置 如此配置’可減少待處理量，可減少間歇時間。 於該處理設備，被搬入至第1分岔輸送帶107a之基 φ 板111，係藉由各分岔輸送帶107a、107b、107c、l〇7d' 107e、107f、107g、107h、l〇7i 及各縱搬送輸送帶 108、 109、110被搬送至任意之處理裝置101、1〇2、103、104 、115、116。另外’基板111，係由各處理裝置1〇1、102 、103、104、115、116被搬出。於各處理裝置1〇1、102 、103、104、115、116，於基板ill被施予特定處理（檢 測）。各縱搬送輸送帶108、109、110，可依搬送路徑之 分歧等之必要時進行升降動作，將基板111搬送至同一段 或他段之分岔輸送帶。 -19- 201012727 (搬送控制方法之實施形態） 圖4爲實施本發明之搬送控制方法的處理設備之構成 之方塊圖。 本實施形態之搬送控制方法，係如圖4所示，.在多數 處理裝置101、102、103、104間存在多數個被搬送物之 搬送路徑，具有沿著該搬送路徑進行被搬送物之搬送的多 數搬送手段，1個搬送手段被對應於多數被搬送物的處理 ❹ 設備（例如上述第1〜第3實施形態之處理設備）中，控 制搬送手段的搬送控制方法。In the transport control method of the present invention, a plurality of transported objects are transported between a plurality of processing apparatuses, and a plurality of transport means for transporting the transported objects along the transport path are provided, and a plurality of transported objects are associated with one of the above-mentioned transported objects. In the processing apparatus of the transport means, the transport means is controlled, and the standby time of each of the transported objects at each time point, the load state of the transport target processing apparatus of each of the transported objects, and each of the transported objects In the load state of the entire transport area, a specific right is added, and the priority of the transport processing of each of the transported objects is calculated using the above-described weight addition; and the respective transported objects are determined based on the calculation result. Which processing device should be transported to any of the transported objects, and the above-described transport means is controlled in accordance with the decision. (Construction 9) In the transport control method according to the present invention, the load state of the transport source processing apparatus for each of the transported objects and the load state of each transport means are separately performed. 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 The weight is added to the inside of the pattern, and the change is added. (Configuration 1 1) The transport control method according to the present invention is characterized in that, in the control method having the configuration 8 or 9%, a plurality of weight addition patterns are registered, and one weight addition pattern is selected corresponding to the situation in the domain, and the change is made. [Embodiment] Hereinafter, embodiments of the present invention will be described with reference to the drawings. (First Embodiment of Processing Apparatus) Fig. 1 is a configuration diagram of a processing apparatus according to a first embodiment of the present invention. As shown in Fig. 1, the processing apparatus of the present embodiment has a plurality of transport paths for traveling between the plurality of devices (process devices) 101, 102, and 103'. In addition, along with the transfer path, a plurality of additional branching functions for transporting the (transported object) 111 are provided, and the following is called a split conveyor belt, FCV: transport means) 107a, 107b' l〇7d° for each branch The conveyor belts 107a, 107b, 107c' 107d should have a plurality of substrates 1 Π. In the processing apparatus, each of the processing apparatuses 101, 102, and 103 and the transfer area of the transfer area are attached. The side processing number of the transported substrate feeding belts (, 107c, the paired 104 and -13 - 201012727, each of the branching conveyor belts l〇7a, 107b, 107c, 107d are provided in multiple stages. The first processing apparatus 101 and the 3 The processing device 103 is disposed in the upper stage, and the second processing device 1〇2 and the fourth processing device 104 are disposed in the lower stage. The first to third branching conveyor belts 107a, 107b, and 107c are disposed in the upper stage, and the fourth to the fourth The fifth branch conveyor belts 107d and 107e are disposed in the lower stage. In the processing apparatus, the substrate 111 is transported to the first branch conveyor belt 107a via the carry-in conveyor belt 106a, and the first branch conveyor belt 107a. The substrate 111 can be taken up and received between the first processing device 101. The first vertical transfer function is provided between the first branch conveyor 107a and the second and fourth branch conveyors 107b and 107d. Conveyor belt (hereinafter referred to as vertical transport conveyor, vertical CV, elevator: transport means) 1〇8. The fourth branch conveyor belt 107d can receive the substrate 111 between the second processing device 102. The fourth branch conveyor belt l〇7b, 10 7d and the third and fifth branch conveyor belts l〇7c, 107e The second vertical transport conveyor belt 1〇9 is provided. The third branch conveyor belt 107c can receive the substrate 111 between the third processing device 103 and the fifth branch conveyor belt l〇7e. The substrate 111 is taken up between the fourth processing apparatuses 104. The third vertical conveyance is provided between the third and fifth branching conveyors 11a and 7e and the carrying conveyor 106b that carries the substrate 111 out of the work. The conveyor belt 11〇 has the buffer unit receiving function for the first and second vertical conveying conveyors 1〇8 and i09, and can be used as an input to the processing units 101, 102, 103, and 104. The buffer unit is used, that is, the substrate U1 before being transported to the next processing device by any of the processing devices is temporarily held in the first and second vertical transfer conveyors 1〇8 and 109 of -14 to 201012727. Preferably, the processing means for performing continuous processing is arranged side by side in accordance with the same section of the branching conveyor belt, and the substrate 111 is transported by the same section of the branching conveyor belt. By configuring the processing apparatus in this way, the waiting for the processing apparatus can be reduced The amount of treatment can reduce the intermittent time. In addition, the processing equipment It is preferable that the processing device that is estimated to have a large amount of conveyance is arranged in parallel with the branching conveyors of the same stage, and the substrate ill is transported by the same-stage branching conveyor. By configuring the processing apparatus in this way, The amount of the treatment can be reduced, and the intermittent time can be reduced. In the processing apparatus, the substrate ill carried by the loading conveyor 106a is carried by the respective branch conveyors 107a, 107b, 107c, 107d and the respective longitudinal conveyor belts 108, 109 is transported to any of the processing devices 101, i〇2, 103, and 104. Further, the substrate ill is carried out by the respective processing apparatuses 101, ιs 2, 103, and 104. In each of the processing apparatuses i〇1, W2, 1〇3, and 104, a specific process (detection) is applied to the substrate 111, and each of the vertical transfer conveyors 108, 109' can be lifted and lowered (difference in the transport path). , the substrate 111 is transported to the same or a section of the forked conveyor belt. (Second Embodiment of Processing Apparatus) Fig. 2 is a side view showing the configuration of a processing apparatus according to a second embodiment of the present invention. In the processing apparatus of this embodiment, as shown in Fig. 2, the entrance and the transfer port of the substrate 111 are disposed on the same side. In other words, in the processing apparatus, the first to third processing apparatuses 1〇1, 1〇2, and 1〇3 are provided in the upper stage, and the 4th-15th to the 12th to 12th to 12th to the sixth processing units 104, 115, and 116 are provided. The next paragraph. The first to third branch conveyor belts 10a, 107b, and 107c are provided in the upper stage. The fourth to sixth branch conveyor belts l7d, 107e, and 107f are provided in the lower stage. The processing apparatus 'substrate 111' is carried outside the project and carried into the first branch conveyor belt 10a. Further, the substrate 111 is carried out by the sixth branch conveyor belt l〇7f. The first branch conveyor belt 10a'a can receive the substrate 111 between the first branching device and the first processing device 101. The second branch conveyor belt 10b' can receive the substrate 111 between the second branch conveyor 102 and the second φ processing unit 102. The third branch conveyor belt 107c can receive the substrate 111 between the third branching device 103 and the third processing device 103. The fourth branch conveyor belt 10 7d allows the substrate 111 to be taken between the fourth processing unit 104 and the fourth processing unit 104. The fifth branch conveyor belt 10'' can receive the substrate 111 between the fifth branching device and the fifth processing device 115. The sixth branch conveyor belt l〇7f can receive the substrate 1 1 1 between the first and sixth branch conveyor belts 107a and 107f and the second and fifth branches between the sixth processing unit and the sixth processing unit 1 16 . A first vertical conveyance belt 108 is provided between the conveyance belts l7b' 107e. A second longitudinal conveyance belt 109 is provided between the second and fifth branch conveyor belts 107b and 107e and the third and fourth branch conveyor belts 107c and 107d. Further, at the end portions of the third and fourth branching conveyor belts 107c and 10 7d, a third vertical conveying conveyor belt 11 is provided. In the processing apparatus, the first to third vertical conveyance belts 108, 109, and 110' have a buffer receiving function, and can be used as inputs to the respective processing apparatuses 1〇1, 102, 103, 104, 1115, and 16 Used before and after the buffer. In the processing apparatus, it is preferable that the processing means for performing continuous processing is arranged side by side in accordance with the branching conveyor belts of the same stage, and the substrate 111 is conveyed by the branching conveyor belt of the same stage. By configuring the processing device in this way, the amount of processing to be processed can be reduced, and the intermittent time can be reduced. Further, in the processing apparatus, it is preferable that the processing apparatus having a large amount of conveyance is arranged in parallel with the branching conveyors of the same stage, and the substrate 111 is conveyed by the same-stage branching conveyor. By configuring the processing device Φ in this way, the amount to be processed can be reduced, and the intermittent time can be reduced. In the processing apparatus, the substrate 111 carried into the first branching conveyor belt 107a is supported by the respective branching conveyor belts 10 7a, 107b, 107c, 10〇7d, 107e, 107f and the respective longitudinal conveying conveyor belts 108, 109. The 110 is transferred to any of the processing devices 101, 102, 103, 104, 115, and 116. Further, the substrate 111 is carried out by the respective processing devices 101, 102, 103, 104, 115, and 116. Each of the processing apparatuses 101, 102, 103, 104, 115, and 116 is subjected to a specific process (detection) on the substrate 111, and each of the vertical transporting belts φ108, 109, and 110 can be lifted and lowered as necessary (transport path) Divided), the substrate 111 is transported to the same or a section of the forked conveyor belt. (Third Embodiment of Processing Apparatus) Fig. 3 is a side view showing the configuration of a processing apparatus according to a third embodiment of the present invention. In the processing apparatus of this embodiment, as shown in Fig. 3, the processing apparatus and the branching conveyor are arranged in three stages. That is, in the processing apparatus, the first to second processing apparatuses 101 and 102 are provided in the upper stage, and the third to fourth processing units -17 to 201012727 are provided in the middle stage, and the fifth to sixth stages are arranged in the middle stage. The processing devices 115 and 116 are disposed in the lower stage. The first to third branch conveyor belts 107a, 107b, and 107c are disposed in the upper stage, and the fourth to sixth branch conveyor belts 10, 7b, 107f are disposed in the middle stage, and the seventh to ninth branch conveyor belts 107g are provided. The 107h and 107i are set in the lower section. In the processing apparatus, the substrate 111 is carried into the first branch conveyor belt 107a by engineering. Further, the substrate 111' is carried out by the fourth or seventh branching conveyor belts 7a, 107g. The first branch conveyor belt 101a can receive the substrate 111 between the first branching device 101 and the first processing device 101. The second branch conveyor belt 107b' can receive the substrate 111 between the second branching device 102 and the second processing device 102. The fourth branch conveyor 107d can receive the substrate 111 between the fourth processing unit 104 and the fourth processing unit 104. The sixth branch conveyor belt 10f can receive the substrate 111 between the third processing device 103 and the third processing device 103. The eighth branch conveyor belt 107h' can receive the substrate 111 between the fifth branch conveyor 107 and the fifth processing unit 115. The 9th branch conveyor belt 107i can receive the substrate 111 between the sixth processing device 116 and the first, fourth, and seventh branch conveyor belts 10 7a, 107d, 107g and the second and fifth sides. The first vertical conveyance belt 1〇8 is set between the eighth branch conveyor belts l〇7b, 107e, and 107h. 'Setting the second vertical transfer between the second, fifth, and eighth sub-conveyor belts l〇7b, 10 7e, and 10 7h and the third, sixth, and ninth branching conveyor belts l〇7c, 107f, and 107i Conveyor belt 1〇9. Further, a third vertical transport conveyor belt 201012727 110 is provided at the end portions of the third, sixth, and ninth branch conveyor belts 107c, 107f, and 107i. Further, at the end portions (porting and carrying) of the first, fourth, and seventh branching conveyor belts i7a, 7a, and 7g, the vertical transport conveyor belt 1 12 is provided. In the processing apparatus, the first to third vertical transporting conveyors 1 to 8, 109, and 110' have a buffer receiving function, and can be used as inputs to and after the processing devices 101, 102, 103, 104, 115, and 116. The buffer is used. In the processing apparatus, it is preferable that the processing means for performing continuous processing is arranged side by side for the branching conveyor belts of the same section, and the substrate 111 is conveyed by the branching conveyor belt of the same section. By configuring the processing device in this way, the amount of processing to be processed can be reduced, and the intermittent time can be reduced. Further, in the processing apparatus, it is preferable that the processing apparatus which is estimated to have a large amount of conveyance is arranged in parallel in accordance with the same-stage branching conveyor, and the substrate 111 is conveyed by the same-stage branching conveyor. By configuring the processing device in this way, the amount of work to be processed can be reduced, and the intermittent time can be reduced. The processing apparatus is carried into the base φ plate 111 of the first branch conveyor belt 107a by the respective branch conveyor belts 107a, 107b, 107c, 10〇7d' 107e, 107f, 107g, 107h, l〇7i. The vertical transport conveyors 108, 109, and 110 are transported to any of the processing devices 101, 1, 2, 103, 104, 115, and 116. Further, the substrate 111 is carried out by the respective processing apparatuses 1〇1, 102, 103, 104, 115, and 116. Each of the processing apparatuses 1〇1, 102, 103, 104, 115, and 116 is subjected to a specific process (detection) on the substrate ill. Each of the vertical conveyance belts 108, 109, and 110 can be moved up and down as necessary depending on the difference in the conveyance path, and the substrate 111 can be conveyed to the same or a branching conveyor belt of the same stage. -19-201012727 (Embodiment of the conveyance control method) Fig. 4 is a block diagram showing the configuration of a processing apparatus for carrying out the conveyance control method of the present invention. In the transport control method of the present embodiment, as shown in FIG. 4, a plurality of transported objects are transported between the plurality of processing apparatuses 101, 102, 103, and 104, and the transported objects are transported along the transport path. In the case of the plurality of conveyance means, the conveyance control means for controlling the conveyance means is controlled in the processing equipment (for example, the processing apparatuses of the first to third embodiments described above) corresponding to the plurality of conveyed objects.
於該處理設備，係依據由上位系統取得之處理裝置 101、102、103、104(製程A、製程B、製程C、製程D )間之搬送資訊，使線內之被搬送物（例如FPD或半導體 使用之玻璃基板等）於處理裝置102、103、104依 序被搬送。本實施形態之搬送控制方法，可改善該處理設 備中之搬送效率。 G 於該處理設備，被投入出入口 1〇5的被搬送物，係於 各處理裝置101、102、103、104依序被搬送，被施予特 定處理，再度回至出入口 1〇5。但是，於該處理設備，被 搬送物，係對應於各處理裝置中之處理結果（例如檢測結 果），可以變更次一被搬送之處理裝置（工程）。另外， 於該處理設備，被搬送物亦有可能於同一處理裝置（例如 檢測裝置）被多數次搬送，因此，於各處理裝置間之搬送 路徑存在多數分歧或合流。 -20- 201012727 本實施形態之搬送控制方法，特別是適用於將被 物一片片搬送的葉片式搬送線。於葉片式搬送線，同 搬送控制之被搬送物之數量龐大，因此，依據習知搬 制方法極爲難以控制。 (搬送控制裝置之構成） 圖5爲本發明之搬送控制裝置適用的處理設備之 ，（a)爲平面圖，（b)爲側面圖。 本實施形態之搬送控制裝置適用的處理設備，係 5(a)所示，被搬送物係由成爲出入口 1〇5的裝載口 E被投入，被搬送物係藉由輸送帶（搬送手段）1〇6、 被搬送於多數處理裝置101、102、103、104間。 輸送帶107，係如圖5(b)所示，由分岔輸送 FCV) 107，縱搬送輸送帶（縱 CV) 108、109、110 。分岔輸送帶107係將被搬送物搬送於水平之同時， 處理裝置101、102、103、104之間進行被搬送物之 。縱搬送輸送帶（縱CV) 108、109、110，係具有緩 受取功能。 於該處理設備，製程A之處理裝置101與製程： 處理裝置104係以上下疊載方式被配置，製程B之處 置102與製程C之處理裝置103係以上下疊載方式被 。於線之始端、而且爲終端，與處理裝置101及處理 104與處理裝置102及處理裝置103之各個之間，設 搬送輸送帶1〇8、109、110。由任一處理裝置被搬送 搬送 時被 送控 構成 如圖 A〜 107 帶（ 構成 在和 受取 衝部 D之 理裝 配置 裝置 置縱 至次 -21 - 201012727 一處理裝置之間的被搬送物會暫時滯留於彼等縱搬送輸送 帶 108 、 109 、 110。 於該處理設備，係藉由本實施形態之搬送控制裝置進 行輸送帶106、107之控制，使各被搬送物被搬送至各處 理裝置101、102、103、104及各縱搬送輸送帶108、109 、110之任意場所，於各處理裝置101、102、103、104對 各被搬送物進行特定處理（檢測）。 圖6爲本發明之搬送控制裝置之構成之方塊圖。 @ 本實施形態之搬送控制裝置，係如圖6所示，具有控 制手段1，用於控制搬送手段1 06、1 07。控制手段1，係 具有工程管理部2用於由上位系統201接收製程間之搬送 資訊。該工程管理部2，係作成被搬送物之搬送區域內之 處理裝置間之搬送指示資訊，儲存於搬送指示部3。儲存 於搬送指示部3之搬送指示資訊，係由指示管理部4被讀 出傳送至設備管理部5。 另外，由各搬送手段106、107被傳送出動作結果資 參 訊及機器狀態資訊（追蹤資料），經由設備管理部5被儲 存於設備狀態部（追蹤資料DB ) 6。儲存於設備狀態部6 的動作結果資訊及機器狀態資訊，係由指示管理部4被讀 出作爲搬送指示資訊之產生之用。 設備管理部5，係依據接收之搬送指示資訊，產生控 制各搬送手段106、107的動作指示資訊，傳送至各搬送 手段106、107。各搬送手段106、107則依據動作指示資 訊被控制進行動作。 -22- 201012727 於該搬送控制裝置，指示管理部4，在搬送指示資訊 之產生時係算出被搬送物之處理優先度，進行多數被搬送 物之其中任一被搬送物應被搬送至其中任一處理裝置之最 適化處理。 於該最適化處理，算出被搬送物之處理優先度時，係 由各搬送手段106、107之動作結果資訊及機器狀態資訊 抽出優先度決定用的多數項目，對彼等每一項目設定權値 φ 附加。關於權値附加之設定，可以登錄1圖案，使該1圖 案對應於搬送區域內之狀況而被變動，亦可以登錄多數圖 案，對應於搬送區域內之狀況而選擇1個圖案。 亦即，指示管理部4，係針對各時點之各被搬送物之 待機時間、各被搬送物之搬送對象處理裝置101、102、 103、104之負荷狀態、各被搬送物之搬送來源處理裝置 101、102、103、104之負荷狀態、各被搬送物之搬送區域 內全體之負荷狀態、及各搬送手段之負荷狀態，各別進行 Φ 特定之權値附加（對應於搬送區域內之狀況而變動權値附 加），算出各被搬送物之搬送處理之優先度。指示管理部 4，係依據該算出結果，來決定各被搬送物之其中哪一被 搬送物應被搬送至其中哪一處理裝置101、1.02、103、104 ，依據該決定來控制搬送手段106、107。 (搬送控制裝置之動作（搬送控制方法）） 圖7爲搬送控制裝置之指示管理部4之動作流程圖。 於步驟st 1，確認儲存於設備狀態部6之動作結果資 -23- 201012727 訊與機器狀態資訊。於步驟st2，判斷處理完了之被搬送 物之有無。處理完了之被搬送物有時進入步驟st9，處理 完了之被搬送物無時進入步驟st 3。於步驟st 9，將搬送指 示完了之被搬送物之狀態資訊變更爲「完了」。 於步驟st3，判斷待機狀態之被搬送物之有無。待機 狀態之被搬送物有時進入步驟st4，待機狀態之被搬送物 無時進入步驟stl3，結束處理。 於步驟st4，確認搬送手段106、107之狀態。於步驟 _ st5，判斷搬送手段106、107之最適化處理是否必要。最 適化處理必要時進入步驟stlO，最適化處理不必時進入步 驟 st6。 於步驟stIO被進行最適化處理，該最適化處理，係如 後述說明，由各搬送手段106、107之動作結果資訊及機 器狀態資訊抽出優先度決定用的多數項目，對彼等每一項 目設定權値附加。於步驟st 1 1變更搬送指示資訊中之搬送 對象。 _ 於步驟st6決定對於搬送手段106、107中之作業指令 之搬送對象。於步驟st7作成對於搬送手段1 06、1 07之作 業指令。 於步驟st8判斷搬送指示資訊是否爲待機狀態。若爲 待機狀態則進入步驟st 1 2，若非爲待機狀態則進入步驟 stl3結束處理。 於步驟stl2，將搬送指示已開始之被搬送物之狀態資 訊變更爲「搬送中」，進入步驟st 13結束處理。 -24- 201012727 圖8爲搬送控制裝置之最適化處理（圖7之步驟 )之流程圖。 上述最適化處理，係如圖8所示，於步驟st2 1受 適化要求，於步驟st22進行各種資訊資料之讀取。之 於步驟st23抽出對於成爲對象之搬送手段106、107 搬送指示。之後，於步驟st24確認搬送指示可否執行 確認搬送指示可執行時，於步驟st2 5暫時決定搬 示中之搬送對象。之後，於步驟st26算出搬送指示之 度。之後，於步驟st27選擇執行之搬送指示。於 st2 8將執行之搬送指示予以輸出，結束最適化處理。 優先度，係如以下表1所示，依各項目被進行權 加，對應於該權値附加被算出。 ❹ st 1 0 理最 後， 之各 〇 送指 優先 步驟 値附 -25- 201012727 (表1) 被搬送物之前之優先度條件The processing device is based on the information transmitted between the processing devices 101, 102, 103, and 104 (process A, process B, process C, and process D) obtained by the host system, so that the objects to be transported in the line (for example, FPD or The glass substrate or the like used in the semiconductor is sequentially transferred to the processing apparatuses 102, 103, and 104. The transport control method of the present embodiment can improve the transport efficiency in the processing apparatus. In the processing equipment, the objects to be transported to and from the entrances and exits 1 to 5 are sequentially transported to the respective processing apparatuses 101, 102, 103, and 104, and are subjected to a specific process, and are returned to the entrance and exit 1〇5 again. However, in the processing apparatus, the conveyed object can be changed to the processing device (engineering) to be transported next to the processing result (e.g., the detection result) in each processing device. Further, in this processing apparatus, the objects to be transported may be transported many times in the same processing apparatus (e.g., the detecting apparatus). Therefore, there are many differences or confluences in the transport paths between the processing apparatuses. -20- 201012727 The transport control method according to the present embodiment is particularly suitable for a blade type transport line that transports a plurality of objects. In the blade type conveying line, the number of objects to be transported under the same conveyance control is large, and therefore, it is extremely difficult to control according to the conventional moving method. (Configuration of the conveyance control device) Fig. 5 is a plan view to which the conveyance control device of the present invention is applied, (a) is a plan view, and (b) is a side view. In the processing device to which the conveyance control device of the present embodiment is applied, as shown in FIG. 5(a), the conveyed object is loaded by the load port E which is the entrance/exit port 1〇5, and the conveyed object is conveyed by the conveyance belt (transport means) 1 Then, it is transported between the plurality of processing devices 101, 102, 103, and 104. As shown in Fig. 5(b), the conveyor belt 107 transports the FCV) 107 from the branch and the transport conveyor (vertical CV) 108, 109, and 110 in the vertical direction. The branch conveyor belt 107 transports the conveyed objects to the horizontal level, and the conveyed objects are conveyed between the processing apparatuses 101, 102, 103, and 104. The vertical transport conveyors (vertical CV) 108, 109, and 110 have a function of absorbing. In the processing apparatus, the processing device 101 of the process A and the process: the processing device 104 are arranged in the above-described stacking mode, and the processing device 103 in the process B and the process C in the process C are stacked in the upper and lower modes. Conveyor belts 1〇8, 109, and 110 are disposed between the processing device 101 and the processing device 102 and the processing device 103 at the beginning of the line and at the terminal. When any of the processing devices is transported and transported, it is transported to form a transported object between the processing device as shown in Figs. A to 107 (which is formed between the processing device and the receiving device of the receiving and punching portion D). The processing equipment is controlled by the conveyance control devices of the present embodiment to control the conveyance belts 106 and 107, and the conveyed objects are conveyed to the respective processing apparatuses 101. In any of the positions 102, 103, and 104 and each of the vertical conveyance conveyors 108, 109, and 110, each of the conveyed objects is subjected to specific processing (detection) in each of the processing apparatuses 101, 102, 103, and 104. Fig. 6 is a view of the present invention. A block diagram of the configuration of the transport control device. The transport control device of the present embodiment has a control means 1 for controlling the transport means 106 and 07 as shown in Fig. 6. The control means 1 has an engineering management unit. (2) for receiving the transfer information between the processes by the host system 201. The project management unit 2 is configured to transmit the transfer instruction information between the processing devices in the transfer area of the transported object, and store the information in the transfer instruction unit. 3. The transfer instruction information stored in the transfer instructing unit 3 is read and transferred to the device management unit 5 by the instruction management unit 4. In addition, the operation result information and machine status information are transmitted from the respective transfer means 106 and 107. (Tracking data) is stored in the device status unit (tracking data DB) 6 via the device management unit 5. The operation result information and the device status information stored in the device status unit 6 are read by the instruction management unit 4 as a transport instruction. The device management unit 5 generates operation instruction information for controlling each of the transport means 106 and 107 based on the received transport instruction information, and transmits the information to each of the transport means 106 and 107. Each of the transport means 106 and 107 operates according to the action. -22-201012727 In the transport control device, the instruction management unit 4 calculates the processing priority of the transported object when the transport instruction information is generated, and performs the transport of any of the plurality of transported objects. The object should be transported to the optimum processing of any of the processing devices. When the optimization process is performed to calculate the processing priority of the object to be transported, A plurality of items for determining the priority are extracted from the operation result information and the machine status information of each of the transport means 106 and 107, and the weight φ is added to each of the items. For the setting of the weight addition, the 1 pattern can be registered. The pattern is changed in accordance with the situation in the transport area, and a plurality of patterns may be registered, and one pattern may be selected in accordance with the situation in the transport area. That is, the instruction management unit 4 is for each of the transported objects at each time point. The standby state, the load state of the transport target processing apparatuses 101, 102, 103, and 104, and the load state of the transport source processing apparatuses 101, 102, 103, and 104 of each transported object, and the transport area of each transported object The load state of each of the conveyance means and the load state of each conveyance means are separately added (specifically, the change right is added in accordance with the situation in the conveyance area), and the priority of the conveyance process of each conveyed object is calculated. The instruction management unit 4 determines, according to the calculation result, which of the objects to be conveyed is transported to which of the processing apparatuses 101, 1.02, 103, and 104, and controls the transport means 106 according to the determination. 107. (Operation of the conveyance control device (transportation control method)) Fig. 7 is a flowchart showing the operation of the instruction management unit 4 of the conveyance control device. In step st 1, the operation result information stored in the device status unit 6 is confirmed. At step st2, it is judged whether or not the processed object has been processed. The processed object to be processed may proceed to step st9, and when the processed object is not processed, the process proceeds to step st3. In step st9, the state information of the conveyed object indicating the conveyance is changed to "completed". In step st3, it is determined whether or not the object to be transported in the standby state is present. The conveyed object in the standby state may proceed to step st4, and if the object to be conveyed in the standby state does not enter the step st1, the process ends. At step st4, the states of the transport means 106, 107 are confirmed. In step _ st5, it is judged whether or not the optimization processing of the transport means 106, 107 is necessary. The optimization process proceeds to step st1O if necessary, and the optimization process does not have to proceed to step st6. In step stIO, the optimization process is performed, and as described later, the operation result information and the machine state information of each of the transport means 106 and 107 are used to extract a plurality of items for determining the priority, and each item is set. The right is attached. The transfer destination in the transfer instruction information is changed in step st 1 1 . In step st6, the object to be transported to the work orders in the transport means 106, 107 is determined. In step st7, a job instruction for the transport means 106 and 07 is created. In step st8, it is judged whether or not the conveyance instruction information is in the standby state. If it is in the standby state, the process proceeds to step st 1 2, and if it is not in the standby state, the process proceeds to step stl3 to end the process. In step st12, the status information of the transported object whose transport instruction has been started is changed to "transfer", and the process proceeds to step st13 to end the process. -24- 201012727 Figure 8 is a flow chart showing the optimization process of the transport control device (step of Figure 7). The above-described optimization processing is performed as shown in Fig. 8, and is required to be processed in step st2, and various information materials are read in step st22. In step st23, an instruction to transfer the target transport means 106, 107 is extracted. Then, in step st24, it is confirmed whether or not the conveyance instruction is executable. When the confirmation conveyance instruction is executable, the transfer destination in the transfer is temporarily determined in step st2 5. Thereafter, the degree of the conveyance instruction is calculated in step st26. Thereafter, the execution of the transfer instruction is selected in step st27. The execution instruction is outputted in st2 8 to end the optimization process. The priority is calculated as shown in the following Table 1, and is added for each item, and is calculated corresponding to the weight. ❹ st 1 0 Finally, each 送 send finger is preferred. Steps Attached -25- 201012727 (Table 1) Priority conditions before being transported
No. 條件 優先度 權値 備考 1 每一批次 越先開始處理之批 次優先度越高 大 依每一批次優先實施處理。批次 內爲同一優先度。亦能適用緊急 批次等。 2 搬送對象 非緩衝部者之優先 度高 大 設爲盡量不使用緩衝部。 3 繊送物之待機時 間 越長優先度越高 大 退避至緩衝部時，不予以考慮Τ 因爲無法越級。 4 搬送對象裝置及搬 送對象CV之受Μ 可能狀態 越多優先度越高 中 確認前方裝置之負荷狀態。存在 多數裝置時使用各裝置之合計。 搬送對象相同時爲同一優先度。 5 搬送源裝置及搬送 源CV之受取可能 狀態 越少優先度越高 中 確認後方裝置之負荷狀態。存在 多數裝置時使用各裝置之合計。 搬送源相同時爲同一優先度。 6 對緩衝部之退避個 數 越多優先度越高 小 被搬送物存在於緩衝部時。可以 越級，因而影響少。 越多優先度越低 小 被搬送物存在於CV時。可以越 級，因而影響少。 7 搬送手段之搬送所 要時間 越短優先度越高 小 需要管理搬送處理花費之時間。 考慮爲不論來自CV或來自緩衝 部，所要時間均未有大變動。 8 從收納匣之搬出順 序 越先開始處理之被 搬送物優先度越高 小 搬送順序不受從收納匣之搬出順 序之拘束。可以越級，影響少 亦即’針對每一批次，越是先開始處理之批次其優先 度被設爲越高’權値附加被設爲「大」。如此則，依每一 批次執行優先處理。同一批次內成爲同一優先度。亦適用 緊急批次等。另外’關於搬送對象，並非緩衝部而是處理 裝置之優先度被設爲較高，權値附加被設爲「大」。如此 -26- 201012727 則可設爲盡量不使用緩衝部之選擇。 關於被搬送物之待機時間，待機時間越長其優先度被 設爲越高，權値附加被設爲「大」。被搬送物退避於緩衝 部時，無法越級因而未被考慮。 關於搬送對象裝置及搬送對象CV之收納可能狀態， 其數目越多優先度被設爲越高，權値附加被設爲「中J 。 如此則，可以確認線上下流之裝置之負荷狀態。收納可能 0 之裝置存在多數時，使用各裝置之負荷狀態之合計。搬送 對象相同時，優先度成爲相同。 關於搬送源裝置及搬送源CV之收納可能狀態，其數 目越少優先度被設爲越高，權値附加被設爲「中」。如此 則，可以確認線上上流之裝置之負荷狀態。收納可能之裝 置存在多數時，使用各裝置之負荷狀態之合計。搬送源相 同時，優先度成爲相同。 關於對緩衝部之退避個數，被搬送物存在於緩衝部時 Φ ’其個數越多優先度被設爲越高，可以越級，因而影響較 小，權値附加被設爲「小」。另外，被搬送物存在於C V 時，其個數越多優先度被設爲越低，可以越級，因而影響 少，權値附加被設爲「小」。 關於對搬送手段之搬送所要時間，所要時間越短優先 度被設爲越高，權値附加被設爲「小」。如此則，可管理 搬送處理所花費時間。另外，不論由CV或由緩衝部，可 考慮爲所要時間之變化不大。 針對從收納匣之搬出順序，未對收納匣之搬出順序有 -27- 201012727 任何拘束，因此先開始處理之被搬送物優先度被設爲越高 。可以越級，影響少，因而權値附加被設爲「小」。 線上全體之優先度條件，係如以下（表2)所示。關 於工程內之被搬送物之個數，個數越多搬出方向之優先度 被設爲越高，權値附加被設爲「大」。如此則，可考慮線 上全體之流程，可預防滯留或停頓（dead lock)。 關於其他搬送手段之搬送指令狀況，越是朝分配少者 其優先度被設爲越高，權値附加被設爲「中」。如此則， 可考慮線上全體之流程，可預防滯留或停頓。另外’於上 流或下流之兩側無其他搬送手段時，無須予以考慮。 (表2) 線上全體之優先度條件No. Conditions Priority Weight Remarks 1 Each batch The batch that starts processing first The higher the priority. The processing is prioritized according to each batch. The same priority is within the batch. Emergency batches, etc. can also be applied. 2 Transfer target The priority of the non-buffer part is set to be as high as possible. 3 The standby time of the delivery object is longer. The higher the priority is, the larger the retraction to the buffer section, the lower the priority. (4) The target device and the target CV are subject to the possible status. The higher the priority, the higher the medium. The total of each device is used in the presence of most devices. The same priority is given when the objects are the same. 5 The source device and the source CV are likely to be taken. The less the priority is, the higher the medium is. The total of each device is used in the presence of most devices. The same priority is given when the transport sources are the same. 6 The number of retractions in the buffer unit is higher. The higher the priority is, the smaller the object to be transported is in the buffer unit. It can be leapfrogged and therefore less affected. The more the priority is, the smaller the small object is in the CV. It can be advanced and thus has less impact. 7 Transfer means of transport means The shorter the priority, the smaller the time required to manage the transfer process. It is considered that there is no significant change in the time required from either the CV or the buffer. 8 The order of moving out of the storage unit The higher the priority of the conveyed item, which is the first to be processed, is small. The order of transportation is not restricted by the order of removal from the storage area. It can be leapfrogged, and the impact is small. That is, for each batch, the batch that starts processing first has its priority set to be higher, and the bonus is set to "large". In this case, priority processing is performed for each batch. Become the same priority within the same batch. Also applicable to emergency batches, etc. In addition, the priority of the processing device is set to be higher than the buffer unit, and the weight addition is set to "large". So -26- 201012727 can be set as much as possible without using the buffer. Regarding the waiting time of the object to be transported, the priority is set to be higher as the standby time is longer, and the weight addition is set to "large". When the object to be transported is evacuated to the buffer portion, it cannot be overstepped and is not considered. In the storage possible state of the transport target device and the transport target CV, the priority is set to be higher, and the weight addition is set to "medium J." Therefore, the load state of the device that is flowing down the line can be confirmed. When there are a large number of devices, the total load state of each device is used. When the objects to be transported are the same, the priority is the same. The lower the number of possible storage states of the transport source device and the transport source CV, the higher the priority is set. , the weight attachment is set to "medium". In this way, the load state of the device that is on the line can be confirmed. When there is a large number of possible storage devices, the total load state of each device is used. When the source is transferred, the priority is the same. When the number of retracted parts of the buffer unit is present in the buffer unit, the number of Φ's is higher as the number of Φ's is higher, and the level can be increased, so that the influence is smaller and the weight addition is set to "small". Further, when the object to be transported exists in C V , the higher the number of priorities is, the lower the priority is, and the more the level can be, the less the influence is, and the weight addition is set to "small". Regarding the time required for the transfer of the transport means, the shorter the required time is, the higher the priority is set, and the weight addition is set to "small". In this way, it takes time to manage the transfer processing. In addition, regardless of the CV or the buffer portion, it can be considered that the change in the required time is small. In the order of removal from the storage cassette, there is no restriction on the order of removal of the storage cassettes. Therefore, the priority of the conveyed items that have been processed first is set to be higher. It can be leapfrogged with less impact, so the weight append is set to "small". The priority conditions for the entire line are as shown below (Table 2). Regarding the number of items to be transported in the project, the higher the number of the items to be moved out, the higher the priority is set, and the weight addition is set to "large". In this case, consider the entire process on the line to prevent deadlock or deadlock. Regarding the status of the transfer command of other transfer means, the lower the priority is, the higher the priority is, and the higher the priority is set to "medium". In this case, the entire online process can be considered to prevent detention or pause. In addition, there is no need to consider when there are no other means of transport on either side of the upstream or downstream. (Table 2) Priority conditions for all online
No. 條件 優先度 權値 備考 1 工程內之被搬送物 之個數 越多，搬出方向之 優先度越高 大 考慮線上全體之流程。滯留或 停頓之預防。 2 其他搬送手段之搬 送指令狀況 越是朝分配少者優 先度越高 中 考慮線上全體之流程。滯留或 停頓之預防。兩側無其他搬送 手段時，無須考慮。 (表3) 優先度算出用之各項目之權値附加表格（固定設定） 優先度算出用之項目編號 權値設定 設定値例 1 大 20 2 小 10 • • • N 大 20 -28- 201012727 另外，變動該權値附加時，係如以下（表4)所示， 對應於優先度算出時之線上狀況而使權値附加變化。 (表4) 優先度算出用之各項目之權値附加表格（權値附加變動方 法） 優先度算出用之項目編號 權値設定 設定値例 變動條件例及變動値例 1 大 20 搬送對象製程裝置全爲待機狀態時 爲40 2 小 10 待機時間大於一定時間時爲20 • • * N 大 20 工程內之工件數達一定以上時爲20No. Conditions Priority 备 Remarks 1 The more the number of objects to be transported in the project, the higher the priority of the moving out direction. Consider the entire process of the line. Prevention of stay or pause. 2 The status of the transfer instructions of other transport means The higher the priority of the transfer, the higher the priority. Consider the entire online process. Prevention of stay or pause. There is no need to consider when there are no other means of transport on both sides. (Table 3) The weight of each item for the calculation of the priority calculation table (fixed setting) The item number for the priority calculation 値 setting setting Example 1 Large 20 2 Small 10 • • • N Large 20 -28- 201012727 When the weight is added, as shown in the following (Table 4), the weight is additionally changed in accordance with the online condition at the time of priority calculation. (Table 4) 値 表格 表格 ( ( ( ( ( ( ( 优先 优先 优先 优先 优先 优先 优先 优先 优先 优先 优先 优先 优先 优先 优先 优先 优先 优先 优先 优先 优先 优先 优先 优先 优先 优先 优先When it is in standby mode, it is 40 2 small 10 When the standby time is longer than a certain time, it is 20 • • * N Large 20 When the number of workpieces in the project reaches a certain level or more, it is 20
另外，權値附加由多數圖案被選擇時，如以下（表5 )所示，對應於優先度算出時之線上之狀況，而選擇適當 之權値附加圖案。 (表5) 優先度算出用之各項目之權値表格（多數圖案登錄方法） 優先度算出用之項目編號 權値設定 圖案1 圖案2 • · · 圖案N 1 大 大 • · · 小 2 小 大 » · · 小 • • • • • N 大 小 • · · 大 -29- 201012727 優先度係如以下被算出。權値附加被固定設定（表3 )或使權値附加變動（表4)時，係由上述表格（表3或 表4)取得權値附加，優先度係藉由下式被算出。 (搬送指示之優先度） =(優先度算出用項目l)x(權値1) + (優先度算出用項目2) x(權値2) +..... © + (優先度算出用項目N)x(權値N) 另外，權値附加由多數圖案被選擇（表5)時，由上 述權値附加表格對應於工程內之狀態來選擇權値圖案，優 先度藉由下式被算出。 (搬送指示之優先度） =(優先度算出用項目丨）x(權値圖案N-1) + (優先度算出用項目2) x(權値圖案N-2) +..... ❹ + (優先度算出用項目N) x(權値圖案N-N ) 另外，如上述說明，優先度算出用項目，係搬送對象 製程裝置之負荷、或被搬送物之待機時間、或工程內之被 搬送物之個數等。 (產業上可利用性） 本發明適用於搬送控制裝置及搬送控制方法，其在多 數處理裝置間存在多數被搬送物之搬送路徑時，控制在該 -30- 201012727 搬送路徑上搬送被搬送物之搬送手段。 (發明效果） 依據具有構成1之處理設備，進行搬送（例如葉片式 搬送）之同時，減少待處理量，減少前置時間，可達成省 空間化。另外，可縮短升降手段之移動距離，可達成省空 間化。另外，升降手段具有緩衝部受取功能，即使在維修 Φ 保養等之停止時亦可吸收搬送處理之脈動。 依據具有構成2之本發明之處理設備，可減少待處理 量，減少前置時間。 依據具有構成3之本發明之處理設備，可減少待處理 量，減少前置時間。 依據具有構成4之本發明之搬送控制裝置，可降低滯 留之產生頻度，實現全體之良好效率之搬送，可縮短搬送 區域內之總合間歇時間。 φ 依據具有構成5之本發明之搬送控制裝置，可降低滯 留之產生頻度，實現全體之良好效率之搬送，可縮短搬送 區域內之總合間歇時間。 依據具有構成6之本發明之搬送控制裝置，可對應於 搬送區域內之狀態選擇最適合之搬送指令，可降低滯留之 產生頻度。因此，可實現全體之良好效率之搬送’可縮短 搬送區域內之總合間歇時間。 依據具有構成7之本發明之搬送控制裝置，可對應於 搬送區域內之狀態選擇最適合之搬送指令，可降低滯留之 -31 - 201012727 產生頻度。因此’可實現全體之良好效率之搬送，可縮短 搬送區域內之總合間歇時間。 依據具有構成8之本發明之搬送控制方法，可降低滞 留之產生頻度，實現全體之良好效率之搬送，可縮短搬送 區域內之總合間歇時間。 依據具有構成9之本發明之搬送控制方法，可降低滯 留之產生頻度，實現全體之良好效率之搬送，可縮短搬送 區域內之總合間歇時間。 . 依據具有構成10之本發明之搬送控制方法，可對應 於搬送區域內之狀態選擇最適合之搬送指令，可降低滯留 之產生頻度。因此，可實現全體之良好效率之搬送，可縮 短搬送區域內之總合間歇時間。 依據具有構成1 1之本發明之搬送控制方法，可對應 於搬送區域內之狀態選擇最適合之搬送指令，可降低滯留 之產生頻度。因此，可實現全體之良好效率之搬送，可縮 短搬送區域內之總合間歇時間。 @ 亦即，本發明係提供，不會構成大型化，不會增大待 處理量，前置時間不會變長，可以確保充分之搬送能力的 處理設備。另外，依據本發明，即使被搬送物之搬送對象 之負荷變高的情況下，亦可以縮短處理裝置全體之間歇時 間。另外，本發明提供，即使在所謂葉片式搬送線，亦不 會增大運算處理所要資料量，不需要大型運算處理裝置， 運算處理所要時間亦不會變長的搬送控制裝置及搬送控制 方法。 -32- 201012727 【圖式簡單說明】 圖丨爲本發明第1實施形態之處理設備之構成之側面 圖。 圖2爲本發明第2實施形態之處理設備之構成之側面 圖。 圖3爲本發明第3實施形態之處理設備之構成之側面 0 圖。 圖4爲實施本發明之搬送控制方法的處理設備之構成 之方塊圖。 圖5爲本發明之搬送控制裝置適用的處理設備之構成 ’ （a )爲平面圖，（b )爲側面圖。 圖6爲本發明之搬送控制裝置之構成之方塊圖。 圖7爲本發明之搬送控制裝置之指示管理部之動作流 程圖。 ® 圖8爲本發明之搬送控制裝置之最適化處理之流程圖 [主要元件符號說明】 1 :控制手段 2 :工程管理部 3 :搬送指示部 4 :指示管理部 5 :設備管理部 -33- 201012727 6 :設備狀態部 101:處理裝置（製程A) 102 :處理裝置（製程B ) 103 :處理裝置（製程C ) 104 :處理裝置（製程D) 1 05 :出入口 106、1 7 :搬送手段 106a :搬入輸送帶 l〇6b :搬出輸送帶 1 07a〜1 07h :分岔輸送帶 108 :第1縱搬送輸送帶 109:第2縱搬送輸送帶 110 :第3縱搬送輸送帶 1 1 1 :基板 112:搬出入縱搬送輸送帶 115: 116:處理裝置 2 0 1 :上位系統 -34-Further, when the weight addition is selected by a plurality of patterns, as shown in the following (Table 5), an appropriate weight addition pattern is selected in accordance with the situation on the line at the time of priority calculation. (Table 5) Weight table for each item for priority calculation (many pattern registration method) Item number for priority calculation 値 Setting pattern 1 Pattern 2 • · · Pattern N 1 Large • · · Small 2 Small » · · Small • • • • • N Size • · · Large -29- 201012727 Priority is calculated as follows. When the weight addition is fixed (Table 3) or the weight is added (Table 4), the weight is added from the above table (Table 3 or Table 4), and the priority is calculated by the following formula. (Priority of the transfer instruction) = (Priority calculation item l) x (Right 1) + (Priority calculation item 2) x (Right 2) +..... © + (Priority calculation) Item N)x (Right N) In addition, when the weight is added by the majority pattern (Table 5), the weighting pattern is selected corresponding to the state in the project, and the priority is selected by the following formula. Calculated. (Priority of the transfer instruction) = (Priority calculation item 丨) x (Right weight pattern N-1) + (Priority calculation item 2) x (Right weight pattern N-2) +..... ❹ + (Priority calculation item N) x (weight pattern NN) As described above, the priority calculation item is the load of the transfer target processing device, the standby time of the object to be transported, or the transfer in the project. The number of things, etc. (Industrial Applicability) The present invention is applied to a transport control device and a transport control method, and controls the transport of the transported object on the transport path of the -30-201012727 when there is a plurality of transport paths for the transported objects between the plurality of processing devices. Means of transportation. (Effect of the Invention) According to the processing apparatus having the configuration 1, the conveyance (for example, the blade type conveyance) is performed, and the amount of the treatment to be processed is reduced, and the lead time is reduced, thereby achieving space saving. In addition, the moving distance of the lifting means can be shortened, and space saving can be achieved. Further, the lifting means has a buffer receiving function, and the pulsation of the conveying process can be absorbed even when the maintenance Φ is stopped. According to the processing apparatus of the invention having the configuration 2, the amount of processing to be processed can be reduced, and the lead time can be reduced. According to the processing apparatus of the present invention having the configuration 3, the amount of processing to be processed can be reduced, and the lead time can be reduced. According to the transport control device of the present invention having the configuration 4, the frequency of occurrence of the stagnation can be reduced, and the overall efficient transport can be achieved, and the total intermittent time in the transport area can be shortened. φ According to the transport control device of the present invention having the configuration 5, the frequency of occurrence of the stagnation can be reduced, and the entire efficient transfer can be achieved, and the total intermittent time in the transport area can be shortened. According to the transport control device of the present invention having the configuration 6, the most suitable transport command can be selected in accordance with the state in the transport area, and the frequency of occurrence of the stay can be reduced. Therefore, it is possible to achieve a good efficiency of all transports, which can shorten the total intermittent time in the transport area. According to the transport control device of the present invention having the configuration 7, the most suitable transport command can be selected in accordance with the state in the transport area, and the frequency of occurrence of the stay -31 - 201012727 can be reduced. Therefore, it is possible to achieve a good overall efficiency of transportation, and it is possible to shorten the total intermittent time in the transport area. According to the transport control method of the present invention having the configuration 8, the frequency of occurrence of the stagnation can be reduced, and the overall efficient transport can be achieved, and the total intermittent time in the transport area can be shortened. According to the transport control method of the present invention having the configuration 9, the frequency of occurrence of the stagnation can be reduced, and the overall efficient transport can be achieved, and the total intermittent time in the transport area can be shortened. According to the transport control method of the present invention having the configuration 10, the most suitable transport command can be selected in accordance with the state in the transport area, and the frequency of occurrence of the stay can be reduced. Therefore, it is possible to achieve a good overall efficiency of transportation, and it is possible to shorten the total intermittent time in the transport area. According to the transport control method of the present invention having the configuration 11, the optimum transport command can be selected in accordance with the state in the transport area, and the frequency of occurrence of the stay can be reduced. Therefore, it is possible to achieve a good overall efficiency of transportation, and it is possible to shorten the total intermittent time in the transport area. That is, the present invention provides a processing apparatus which does not constitute a large-scale, does not increase the amount of processing to be processed, does not have a long lead time, and can secure a sufficient carrying capacity. Further, according to the present invention, even when the load of the object to be transported by the object is increased, the intermittent time of the entire processing apparatus can be shortened. Further, the present invention provides a transport control device and a transport control method that do not require a large-scale arithmetic processing device and do not require a long time for arithmetic processing, even in a so-called blade type transport line. -32-201012727 [Brief Description of the Drawings] Fig. 侧面 is a side view showing the configuration of a processing apparatus according to the first embodiment of the present invention. Fig. 2 is a side view showing the configuration of a processing apparatus according to a second embodiment of the present invention. Fig. 3 is a side view showing the configuration of a processing apparatus according to a third embodiment of the present invention. Fig. 4 is a block diagram showing the configuration of a processing apparatus for carrying out the transport control method of the present invention. Fig. 5 is a plan view showing a configuration of a processing apparatus to which the transport control device of the present invention is applied, (a) is a plan view, and (b) is a side view. Fig. 6 is a block diagram showing the configuration of a conveyance control device of the present invention. Fig. 7 is a flow chart showing the operation of the instruction management unit of the transport control device of the present invention. Fig. 8 is a flow chart showing the optimization process of the conveyance control device of the present invention. [Main component symbol description] 1 : Control means 2: Project management unit 3: Transport instruction unit 4: Instruction management unit 5: Device management unit - 33- 201012727 6 : Device status unit 101 : Processing device (Process A) 102 : Processing device (Process B ) 103 : Processing device (Process C ) 104 : Processing device (Process D ) 1 05 : Entrance and exit 106 , 1 7 : Transport means 106a : Carrying in conveyor belt l〇6b : Carrying out conveyor belt 1 07a to 1 07h : Branching conveyor belt 108 : First vertical conveying conveyor belt 109 : Second vertical conveying conveyor belt 110 : Third vertical conveying conveyor belt 1 1 1 : Substrate 112: Carrying in and out of the transport conveyor belt 115: 116: Processing device 2 0 1 : Upper system -34-