CN102485636A - Synchronous lifting component and synchronous lifting and horizontal moving mechanism - Google Patents
Synchronous lifting component and synchronous lifting and horizontal moving mechanism Download PDFInfo
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- CN102485636A CN102485636A CN2010105757823A CN201010575782A CN102485636A CN 102485636 A CN102485636 A CN 102485636A CN 2010105757823 A CN2010105757823 A CN 2010105757823A CN 201010575782 A CN201010575782 A CN 201010575782A CN 102485636 A CN102485636 A CN 102485636A
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- lifting
- hinged slide
- slide bar
- lifting unit
- screw mandrel
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Abstract
The invention relates to a synchronous lifting component and a synchronous lifting and horizontal moving mechanism. The synchronous lifting component comprises a telescopic lifting unit, a handle, a gear box and a transmission shaft, wherein the two ends of the transmission shaft are meshed with the lifting unit through the gear box; the handle is arranged at one end of the lifting unit; the lifting unit connected with the handle is stretched or retracted by the rotation of the handle; and the stretching or retraction movement of the lifting unit is transferred to another lifting unit through a transmission unit composed of the gear box and the transmission shaft so as to realize synchronous ascending or descending of the two lifting units. In the synchronous lifting component and the synchronous lifting and horizontal moving mechanism provided by the invention, a transmission unit composed of two gear boxes and a transmission shaft realizes synchronization of two lifting units to ensure the stability of the lifting process; a pure-mechanical structure is adopted to lift an object; and each component has a simple structure, and the cost is low.
Description
Technical field
The present invention relates to the lift system in the lithographic equipment, relate in particular to a kind of synchronization lifting parts and synchronization lifting and horizontal mobile mechanism.
Background technology
In the integrated of litho machine and maintenance maintenance process, move in and out after often need mask platform being promoted certain altitude, guarantee that the stationarity of mask platform lifting process is very important.
At present, lift system adopts hydraulic pressure, air pressure more, comprises the mode such as electric system or hoist ceiling crane lifting of servomotor.Because litho machine than higher, therefore, adopts the gig of hydraulic pressure or air pressure mode not to be suitable for the lifting mask platform to environment requirement; It is higher that the electric system that employing comprises servomotor promotes the mask platform cost; Adopt hoist ceiling crane lifting mask platform then not have stationarity to say.
Summary of the invention
The object of the present invention is to provide a kind of synchronization lifting parts and synchronization lifting and horizontal mobile mechanism that is applicable to litho machine, its cost is low, stationarity good.
In order to reach above-mentioned purpose, the present invention provides a kind of synchronization lifting parts that are used for synchronization lifting and horizontal mobile mechanism, comprises telescopic lifting unit, handle, gear case and transmission shaft; The two ends of said transmission shaft are connected with a joggle through said gear case and said lifting unit; Said handle is arranged on an end of said lifting unit; The rotation stretching of said handle or contraction and said handle bonded assembly lifting unit; The stretching of this lifting unit or contractile motion pass to another lifting unit through the gear unit that is made up of said gear case and transmission shaft, realize the synchronous rising or the decline of two lifting units.
Above-mentioned synchronization lifting parts, wherein, said lifting unit comprises first lifting support, second lifting support, the first hinged slide bar, the second hinged slide bar and reverse thread screw mandrel; The two ends of said reverse thread screw mandrel are connected with the top of said first lifting support and second lifting support respectively; Said reverse thread screw mandrel comprises left-hand thread partial sum right-hand thread part; The left-hand thread part sliding block joint of one end of the said first hinged slide bar and said reverse thread screw mandrel; The other end of the said first hinged slide bar is connected with said first lifting support; The right-hand thread part sliding block joint of one end of the said second hinged slide bar and said reverse thread screw mandrel; The other end of the said second hinged slide bar is connected with said second lifting support; The said first hinged slide bar and the second hinged slide bar promote said reverse thread screw mandrel and rise or descend.
Above-mentioned synchronization lifting parts, wherein, said lifting unit also comprises the first hinged slide block, the second hinged slide block, first hinged seat and second hinge seat; One end of the said first hinged slide bar is through the said first hinged slide block and said reverse thread screw mandrel sliding block joint, and the other end of this first hinged slide bar is connected with said first lifting support through said first hinged seat; One end of the said second hinged slide bar is through the said second hinged slide block and said reverse thread screw mandrel sliding block joint, and the other end of this second hinged slide bar is connected with said second lifting support through said second hinge seat; The said first hinged slide block and the second hinged slide block drive the said first hinged slide bar and the second hinged slide bar respectively and promote said reverse thread screw mandrel rising or decline along the counter motion of said reverse thread screw mandrel.
Above-mentioned synchronization lifting parts; Wherein, Said first lifting support and second lifting support include fixed support and telescoping shoring column; Said telescoping shoring column is arranged in the said fixed support, and stretch out from said support bracket fastened top on the top of this telescoping shoring column, and the said relatively fixed support of said telescoping shoring column rises or descends.
Another technical scheme provided by the invention is a kind of synchronization lifting and horizontal mobile mechanism, comprises above-mentioned synchronization lifting parts, and the parallel motion parts that comprise guide rail and fixing tool; Said guide rail is arranged on the said lifting unit; Said fixing tool is used for fixing and carrying object, is positioned at said guide rail top, and moves along said guide rail.
Above-mentioned synchronization lifting and horizontal mobile mechanism, wherein, at least one said lifting unit is provided with lockout mechanism, and this lockout mechanism is used to lock the rising or the descending motion of said lifting unit.
Above-mentioned synchronization lifting and horizontal mobile mechanism wherein, also comprise brace rod, and said brace rod is arranged between the said lifting unit.
The gear unit that synchronization lifting parts of the present invention and synchronization lifting and horizontal mobile mechanism utilize two gears case and transmission shaft to constitute has been realized the synchronism of two lifting units, has guaranteed the stationarity of lifting process;
Synchronization lifting parts of the present invention and synchronization lifting and horizontal mobile mechanism adopt pure physical construction to realize that object promotes, and each block construction is simple, and therefore, these synchronization lifting parts and synchronous lifting mechanism cost are low;
Lifting that synchronization lifting parts of the present invention and synchronization lifting and horizontal mobile mechanism are integrated and parallel motion (moving in and out) function; Can significantly reduce work flow; Adopt lift system, horizontal mobile mechanism to accomplish relatively respectively and promote and horizontally moving functions, synchronous lifting mechanism of the present invention can reduce and takes up room.
Description of drawings
Synchronization lifting parts of the present invention and synchronization lifting and horizontal mobile mechanism are provided by following embodiment and accompanying drawing.
Fig. 1 is the front view that the present invention is used for the synchronization lifting parts of synchronization lifting and horizontal mobile mechanism.
Fig. 2 is the structural representation of lifting unit among the present invention.
Fig. 3 is the gear transmission schematic diagram of gear unit among the present invention.
Fig. 4 is the front view of synchronization lifting of the present invention and horizontal mobile mechanism embodiment one.
Fig. 5 is the birds-eye view of synchronization lifting of the present invention and horizontal mobile mechanism embodiment one.
Fig. 6 is the block diagram of synchronization lifting of the present invention and horizontal mobile mechanism embodiment two.
The specific embodiment
Below will combine Fig. 1～Fig. 6 to synchronization lifting parts of the present invention and synchronization lifting and the further detailed description of horizontal mobile mechanism work.
A kind of synchronization lifting parts that are used for synchronization lifting and horizontal mobile mechanism comprise telescopic lifting unit, handle, gear case and transmission shaft;
The two ends of said transmission shaft are connected with a joggle through gear case and lifting unit;
Said handle is arranged on an end of said lifting unit,
The rotation stretching of said handle or contraction and said handle bonded assembly lifting unit; The stretching of this lifting unit or contractile motion pass to another lifting unit through the gear unit that is made up of said gear case and transmission shaft, realize the synchronous rising or the decline of two lifting units.
Referring to Fig. 1, a kind of synchronization lifting parts comprise first lifting unit 4, second lifting unit 4 ', one handle 1, first gear case 2, second gear case 2 ' and transmission shaft 3;
One end of said first lifting unit 4 is connected with a joggle through a bevel gear set in said first gear case 2 and an end of said transmission shaft 3;
Said second lifting unit 4 ' an end through said second gear case 2 ' in bevel gear set and the other end of said transmission shaft 3 be connected with a joggle;
Said handle 1 is arranged on a be connected with a joggle end of said first gear case 2 of said first lifting unit 4.
In the present embodiment; Said first lifting unit 4 and said second lifting unit 4 ' be parallel to each other, said first lifting unit 4 be connected with a joggle an end and said second lifting unit 4 ' said second gear case 2 that is connected with a joggle of said first gear case 2 ' an end be positioned at the same side.
Referring to Fig. 2, said first lifting unit 4 comprises the first lifting support 401a, the second lifting support 401b, the first hinged slide bar 402a, the second hinged slide bar 402b, the first hinged slide block 403a, the second hinged slide block 403b, reverse thread screw mandrel 405, the first hinged seat 404a and the second hinge seat 404b;
The two ends of said reverse thread screw mandrel 405 are connected with the top of the said first lifting support 401a and the second lifting support 401b respectively;
Said reverse thread screw mandrel 405 comprises left-hand thread part 405a and right-hand thread part 405b, and said left-hand thread part 405a and right-hand thread part 405b constitute the reverse thread group;
The end of the said first hinged slide bar 402a is threaded with the left-hand thread part 405a of said reverse thread screw mandrel 405 through the said first hinged slide block 403a; The other end of the said first hinged slide bar 402a is connected with the said first lifting support 401a through the said first hinged seat 404a;
The end of the said second hinged slide bar 402b is threaded with the right-hand thread part 405b of said reverse thread screw mandrel 405 through the said second hinged slide block 403b; The other end of the said second hinged slide bar 402b is connected with the said second lifting support 401b through the said second hinge seat 404b;
The said first lifting support 401a comprises fixed support 4011 and telescoping shoring column 4012; Said telescoping shoring column 4012 is arranged in the said fixed support 4011; Stretch out from the top of said fixed support 4011 on the top of this telescoping shoring column 4012, and said telescoping shoring column 4012 can rise or descend by said relatively fixed support 4011;
The structure of the structure of the said second lifting support 401b and the said first lifting support 401a is identical, repeats no more at this;
The two ends of said reverse thread screw mandrel 405 are connected with the telescoping shoring column 4012 of the first lifting support 401a and the top of the telescoping shoring column of the second lifting support 401b respectively;
The said first hinged seat 404a is fixedly mounted on the fixed support 4011 of the said first lifting support 401a; The said second hinge seat 404b is fixedly mounted on the fixed support of the said second lifting support 401b.
Said second lifting unit 4 ' the structure of structure and said first lifting unit 4 identical, repeat no more at this;
One end 405c of the reverse thread screw mandrel 405 of said first lifting unit 4 is connected with a joggle through a bevel gear set in said first gear case 2 and an end of said transmission shaft 3; Said handle 1 is arranged on this end of the reverse thread screw mandrel 405 of said first lifting unit 4;
Said second lifting unit 4 ' the reverse thread screw mandrel an end through said second gear case 2 ' in bevel gear set and the other end of said transmission shaft 3 be connected with a joggle.
The principle of work of synchronization lifting parts of the present invention is:
Referring to Fig. 2, be the y direction of principal axis, be that the x direction of principal axis is set up three-dimensional system of coordinate with the length direction of said transmission shaft 3 with the length direction of said reverse thread screw mandrel 405;
Through shaking said handle 1 said reverse thread screw mandrel 405 is rotated; Because said reverse thread screw mandrel 405 comprises left-hand thread part 405a and right-hand thread part 405b; Therefore; The said first hinged slide block 403a and the second hinged slide block 403b oppositely move (being that the said first hinged slide block 403a and the second hinged slide block 403b oppositely move along the y direction of principal axis, shown in the arrow of horizontal direction among Fig. 2) along said reverse thread screw mandrel 405, and reverse the moving of the said first hinged slide block 403a and the second hinged slide block 403b drives the said first hinged slide bar 402a and the second hinged slide bar 402b backward rotation; Thereby promote whole said reverse thread screw mandrel 405 and move (i.e. rising or decline along the z direction of principal axis; Shown in the arrow of vertical direction among Fig. 2), thus, realized the rising or the descending motion of said first lifting unit 4;
And, utilizing the finishing bevel gear cuter 201,202 in the gear case to be meshing with each other by said first gear case 2, second gear case 2 ' and gear unit of constituting of transmission shaft 3, finishing bevel gear cuter 203,204 is meshing with each other; Constitute two bevel gear set; Finishing bevel gear cuter 201 is captiveed joint with reverse screw rod 405, and finishing bevel gear cuter 202,203 and transmission shaft 3 is fixing, finishing bevel gear cuter 204 and reverse screw rod 405 ' captive joint; When rotating, reverse screw rod 405 makes transmission shaft 3 motions through bevel gear set 201,202; Then power is passed to bevel gear set 203,204, drives reverse screw rod 405 ' motion thus, realize reverse screw rod 405 and reverse screw rod 405 ' be synchronized with the movement; Make said second lifting unit 4 ' can rise synchronously or descend with said first lifting unit 4, as shown in Figure 3.
Synchronization lifting parts of the present invention utilize said first gear case 2, second gear case 2 ' and the gear unit that constitutes of transmission shaft 3 realized said first lifting unit 4 and second lifting unit 4 ' synchronism, guaranteed the stationarity of lift mechanism lifts process;
Synchronization lifting parts of the present invention adopt pure physical construction to realize that object promotes, and each block construction is simple, and therefore, this synchronous lifting mechanism cost is low.
Shown in Figure 4 is the front view of synchronization lifting and horizontal mobile mechanism embodiment one; Said synchronization lifting and horizontal mobile mechanism use above-mentioned synchronization lifting parts; Comprise first lifting unit 4, second lifting unit 4 ', one handle 1, first gear case 2, second gear case 2 ', a transmission shaft 3 and a horizontal movement unit; Said first lifting unit 4 and said second lifting unit 4 ' fixed support be supported on ground or other horizontal stands; Between two fixed supports of said first lifting unit 4 and said second lifting unit 4 ' the same side, be provided with brace rod 9; Said brace rod 9 comprises two horizontal brace rods 901 and Duo Gen diagonal ligament muscle 902, and said two horizontal brace rods 901 are parallel to each other, and the two ends of every said horizontal brace rod 901 are connected with two fixed supports respectively; The two ends of every said diagonal ligament muscle 902 are connected with said two horizontal brace rods 901 respectively, and said many diagonal ligament muscle 902 form zig-zag;
Said horizontal movement unit be arranged on said first lifting unit 4 and second lifting unit 4 ' on, this horizontal movement unit comprises two guide rails 5 and the plummer 6 that can move along said two guide rails 5;
Said two guide rails 5 be separately positioned on said first lifting unit 4 and second lifting unit 4 ' on, can or descend with said first lifting unit 4 and second lifting unit 4 ' rising
Said plummer 6 be arranged on said first lifting unit 4 and second lifting unit 4 ' on,
Said plummer 6 can be the dolly with four pulleys, the groove that said two guide rails 5 are complementary for the pulley with this dolly; Being raised object is installed on the said dolly;
Said guide rail 5 can be again an air-float guide rail, and said plummer 6 is the rectangular platform that four angles are provided with aerostatic slide, and said aerostatic slide can slide along said air-float guide rail;
Referring to Fig. 5, parallelly on the said plummer 6 be provided with two fixing tools 7, be raised object 10 and be placed on the said plummer 6, tightly be stuck between said two fixing tools 7;
The rising of said reverse thread screw mandrel or descending motion drive said plummer 6 rises or descends, and is raised object 10 risings or decline thereby drive;
Said plummer 6 realizes being raised moving in and out of object 10 along said guide rail 5 translations.
Lifting that synchronization lifting of the present invention and horizontal mobile mechanism are integrated and parallel motion (moving in and out) function; Can significantly reduce work flow; Adopt lift system, horizontal mobile mechanism to accomplish relatively respectively and promote and horizontally moving functions, the synchronization lifting mechanism minimizing of present embodiment takes up room.
Shown in Figure 6 is the front view of synchronization lifting and horizontal mobile mechanism embodiment two, and embodiment two is that with the difference of embodiment one this synchronization lifting and horizontal mobile mechanism also are provided with lockout mechanism 8;
Said lockout mechanism 8 is arranged on the telescoping shoring column of lifting unit, and this lockout mechanism 8 is used to lock the rising or the descending motion of said telescoping shoring column; Said lockout mechanism 8 has further strengthened the stability of synchronous lifting mechanism lifting process.
Claims (7)
1. synchronization lifting parts that are used for synchronization lifting and horizontal mobile mechanism is characterized in that, comprise telescopic lifting unit, handle, gear case and transmission shaft;
The two ends of said transmission shaft are connected with a joggle through said gear case and said lifting unit;
Said handle is arranged on an end of said lifting unit,
The rotation stretching of said handle or contraction and said handle bonded assembly lifting unit; The stretching of this lifting unit or contractile motion pass to another lifting unit through the gear unit that is made up of said gear case and transmission shaft, realize the synchronous rising or the decline of two lifting units.
2. synchronization lifting parts as claimed in claim 1 is characterized in that, said lifting unit comprises first lifting support, second lifting support, the first hinged slide bar, the second hinged slide bar and reverse thread screw mandrel;
The two ends of said reverse thread screw mandrel are connected with the top of said first lifting support and second lifting support respectively;
Said reverse thread screw mandrel comprises left-hand thread partial sum right-hand thread part;
The left-hand thread part sliding block joint of one end of the said first hinged slide bar and said reverse thread screw mandrel; The other end of the said first hinged slide bar is connected with said first lifting support;
The right-hand thread part sliding block joint of one end of the said second hinged slide bar and said reverse thread screw mandrel; The other end of the said second hinged slide bar is connected with said second lifting support;
The said first hinged slide bar and the second hinged slide bar promote said reverse thread screw mandrel and rise or descend.
3. synchronization lifting parts as claimed in claim 2 is characterized in that, said lifting unit also comprises the first hinged slide block, the second hinged slide block, first hinged seat and second hinge seat;
One end of the said first hinged slide bar is through the said first hinged slide block and said reverse thread screw mandrel sliding block joint, and the other end of this first hinged slide bar is connected with said first lifting support through said first hinged seat;
One end of the said second hinged slide bar is through the said second hinged slide block and said reverse thread screw mandrel sliding block joint, and the other end of this second hinged slide bar is connected with said second lifting support through said second hinge seat;
The said first hinged slide block and the second hinged slide block drive the said first hinged slide bar and the second hinged slide bar respectively and promote said reverse thread screw mandrel rising or decline along the counter motion of said reverse thread screw mandrel.
4. like claim 2 or 3 described synchronization lifting parts; It is characterized in that; Said first lifting support and second lifting support include fixed support and telescoping shoring column; Said telescoping shoring column is arranged in the said fixed support, and stretch out from said support bracket fastened top on the top of this telescoping shoring column, and the said relatively fixed support of said telescoping shoring column rises or descends.
5. synchronization lifting and horizontal mobile mechanism is characterized in that, comprise like each described synchronization lifting parts in the claim 1～4, and the parallel motion parts that comprise guide rail and fixing tool;
Said guide rail is arranged on the said lifting unit;
Said fixing tool is used for fixing and carrying object, is positioned at said guide rail top, and moves along said guide rail.
6. synchronization lifting as claimed in claim 5 and horizontal mobile mechanism is characterized in that, at least one said lifting unit is provided with lockout mechanism, and this lockout mechanism is used to lock the rising or the descending motion of said lifting unit.
7. synchronization lifting as claimed in claim 5 and horizontal mobile mechanism is characterized in that, also comprise brace rod, and said brace rod is arranged between the said lifting unit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010105757823A CN102485636A (en) | 2010-12-06 | 2010-12-06 | Synchronous lifting component and synchronous lifting and horizontal moving mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010105757823A CN102485636A (en) | 2010-12-06 | 2010-12-06 | Synchronous lifting component and synchronous lifting and horizontal moving mechanism |
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| Publication Number | Publication Date |
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| CN102485636A true CN102485636A (en) | 2012-06-06 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010105757823A Pending CN102485636A (en) | 2010-12-06 | 2010-12-06 | Synchronous lifting component and synchronous lifting and horizontal moving mechanism |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017000718A1 (en) * | 2015-07-01 | 2017-01-05 | 意力(广州)电子科技有限公司 | Photomask circuit detector |
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| JP3761157B2 (en) * | 2001-10-15 | 2006-03-29 | 株式会社椿本チエイン | Step leveler |
| CN2832524Y (en) * | 2005-06-09 | 2006-11-01 | 杭州宏华数码科技股份有限公司 | Synchronous lifting device for printing head of digital jet printing machine |
| JP2007119128A (en) * | 2005-10-26 | 2007-05-17 | Mitsubishi Materials Techno Corp | Non-powered descending and conveying device |
| CN201193978Y (en) * | 2008-05-19 | 2009-02-11 | 苏州世力源科技有限公司 | Lifting device for falling experiment bench |
| CN201232021Y (en) * | 2008-05-16 | 2009-05-06 | 江阴市华澄特种机械工程有限公司 | Crankweb self-propelled high-altitude operation platform arm support capable of implementing two arms synchronous amplitude lifting |
| CN101759120A (en) * | 2009-12-31 | 2010-06-30 | 四川虹欧显示器件有限公司 | Lifting device |
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2010
- 2010-12-06 CN CN2010105757823A patent/CN102485636A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3761157B2 (en) * | 2001-10-15 | 2006-03-29 | 株式会社椿本チエイン | Step leveler |
| CN2832524Y (en) * | 2005-06-09 | 2006-11-01 | 杭州宏华数码科技股份有限公司 | Synchronous lifting device for printing head of digital jet printing machine |
| JP2007119128A (en) * | 2005-10-26 | 2007-05-17 | Mitsubishi Materials Techno Corp | Non-powered descending and conveying device |
| CN201232021Y (en) * | 2008-05-16 | 2009-05-06 | 江阴市华澄特种机械工程有限公司 | Crankweb self-propelled high-altitude operation platform arm support capable of implementing two arms synchronous amplitude lifting |
| CN201193978Y (en) * | 2008-05-19 | 2009-02-11 | 苏州世力源科技有限公司 | Lifting device for falling experiment bench |
| CN101759120A (en) * | 2009-12-31 | 2010-06-30 | 四川虹欧显示器件有限公司 | Lifting device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017000718A1 (en) * | 2015-07-01 | 2017-01-05 | 意力(广州)电子科技有限公司 | Photomask circuit detector |
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Application publication date: 20120606 |