CN102478815A - Automatic calibration and compensation for a cnc machine table and an associated probe - Google Patents

Automatic calibration and compensation for a cnc machine table and an associated probe Download PDF

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Publication number
CN102478815A
CN102478815A CN2011103728958A CN201110372895A CN102478815A CN 102478815 A CN102478815 A CN 102478815A CN 2011103728958 A CN2011103728958 A CN 2011103728958A CN 201110372895 A CN201110372895 A CN 201110372895A CN 102478815 A CN102478815 A CN 102478815A
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probe
gauge
pen
cnc lathe
worktable
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CN102478815B (en
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J.古
J.S.阿加皮奥
S.K.科金
P.J.迪兹
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GM Global Technology Operations LLC
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GM Global Technology Operations LLC
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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/401—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for measuring, e.g. calibration and initialisation, measuring workpiece for machining purposes
    • G05B19/4015—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for measuring, e.g. calibration and initialisation, measuring workpiece for machining purposes going to a reference at the beginning of machine cycle, e.g. for calibration
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/50—Machine tool, machine tool null till machine tool work handling
    • G05B2219/50039—Two probe, one on turret, serves also to calibrate second probe on bed

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  • Engineering & Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)

Abstract

A method for calibrating a CNC machine comprises mounting a gauge to a table of the CNC machine and calibrating a probe to the gauge mounted on the CNC machine. A total deviation of the probe and an actual table center position from a nominal table center position for a coordinate system associated with the CNC machine are determined. A controller operatively connected to the CNC machine and the probe is programmed to compensate for the total deviation.

Description

The automatic calibration and the compensation of cnc machine tool worktable and associated probe
Technical field
The present invention relates generally to the calibration of CNC lathe, particularly relates to the calibration of platen and probe.
Background technology
Computer numerical control (CNC) lathe is usually used in making article, and said article need use process for machining.Coordinate system is used for the programming of CNC lathe is used for process for machining, and the center of coordinate system is associated with the central point of CNC platen.
In order to make the maximization of CNC processing throughput, stationary installation can be used to make each part to align with platen.It is processed in identical platen center that stationary installation allows to have the part of different location and clamp arrangements.Be installed on the worktable when stationary installation, maybe not can ideally align, for example, because fragment or other positioning error.
For the alignment error that prevents to cause because of the processing parts quality of compromising, the definite location of stationary installation can be detected electronically, and the result can covered in the operation of machine tool side-play amount (work offset).Yet in order to obtain probe result accurately, probe must at first be calibrated.Using the several method of calibrate probe at present.Yet each method needs experienced work of maintenance personnel to go to carry out accurate calculating and complicated process.Thus, use the probe correction of these methods to need several hours lathe stop time.
Summary of the invention
A kind of method that is used to calibrate the CNC lathe comprises that the worktable that gauge is installed to the CNC lathe is installed in the gauge calibration probe on the worktable with contrast.Confirm probe and from the nominal worktable center (position) of the coordinate system that is associated with the CNC lathe to the total departure of real work platform center.The controller that is operatively coupled to CNC lathe and probe is programmed, to compensate this total departure.
A kind of method that is used to contrast the gauge calibration probe that is installed on the CNC lathe comprises with probe and measures a plurality of points about the circumference of gauge and adopt a plurality of measured values that recorded by probe to calculate the central point of gauge.
A kind of coordinate system calibrate probe of CNC lathe and method at CNC platen center of contrasting comprises with probe and on the coordinate system of CNC lathe, measures the first actual gauge position.The worktable of rotation CNC lathe is measured the actual gauge position on coordinate system in the second actual gauge position.Probe and actual platen center use the first and second actual gauge positions to calculate to the total departure at nominal platen center.The controller that is operatively coupled to CNC lathe and probe is programmed, with the compensation total departure.
Above-mentioned characteristic of the present invention and advantage and other characteristics and advantage will be from the following detailed descriptions of the most preferred embodiment that is used for embodiment of the present invention and optimal mode and obvious together with accompanying drawing.
Description of drawings
Fig. 1 is the local perspective illustration of the part of CNC lathe, and this CNC lathe has probe, on the worktable of CNC lathe, is positioned at primary importance;
Fig. 2 is base portion stationary installation and the diagrammatic top view of coordinate system that is used for the CNC lathe of Fig. 1;
Fig. 3 is the local perspective illustration of the part of CNC lathe, and it illustrates first embodiment at the center of the probe of confirming that the CNC lathe with Fig. 1 uses;
Fig. 4 is the local perspective illustration of the part of CNC lathe, and it illustrates first embodiment of the side pen (stylus) of the probe that calibration uses with the CNC lathe of Fig. 1;
Fig. 5 is the local perspective illustration of the part of CNC lathe, and it illustrates first embodiment at worktable center of the CNC lathe of calibration chart 1;
Fig. 6 is the schematic flow diagram of first method of probe and the CNC lathe of calibration chart 1;
Fig. 7 is the local perspective illustration of the part of CNC lathe, and it illustrates first embodiment of the straight pen of the probe that calibration uses with the CNC lathe of Fig. 1;
Fig. 8 is the local perspective illustration of the part of CNC lathe, and it further illustrates first embodiment of the straight pen of the probe that calibration uses with the CNC lathe of Fig. 1 and 7;
Fig. 9 is the local perspective illustration of a part of the CNC lathe of Fig. 1, its illustrate utilize through calibration and through the probe of compensation and first embodiment in measurement of x-site, platen center (location);
Figure 10 is the local perspective illustration of a part of the CNC lathe of Fig. 1 and 9, its illustrate utilize through calibration and through the probe of compensation and first embodiment in measurement z-site, platen center; And
Figure 11 is the local perspective illustration of a part of the CNC lathe of Fig. 1 and 9-10, its illustrate utilize through calibration and through the probe of compensation and first embodiment in measurement y-site, platen center.
Embodiment
With reference to accompanying drawing, wherein, identical Reference numeral runs through the same or analogous parts of several view shows, and Fig. 1 illustrates the partial view of the part of four axistyle B rotary table CNC lathe 10.CNC lathe 10 has worktable 12.Base portion stationary installation 14 is installed to worktable 12, and coordinate system 16 is associated with worktable 12 and base portion stationary installation 14.The vertical view of the schematically illustrated base portion stationary installation 14 of Fig. 2, coordinate system 16 shows above that.
With reference to Fig. 1 and 2, probe 18 is operatively coupled to CNC lathe 10.Probe 18 has side pen 22 and straight pen 20, is used to measure the some position that is associated with CNC lathe 10.Probe 18 can rotate about axle line 54, thereby side pen 22 can be positioned at many position of rotation with straight pen 20, and is as will be described in further detail below.Gauge ball 24 is installed to base portion stationary installation 14, is used for calibration operation platform 12 and probe 18.Probe 18 can obtain measured value from each site about the circumference of gauge ball 24.
Probe 18 is operatively coupled to controller 26 with worktable 12, from probe 18 and worktable 12 input to be provided.Controller 26 is also controlled CNC lathe 10, and it comprises the position of rotation of worktable 12.In the illustrated embodiment, CNC lathe 10 rotates about B-axis (illustrating 27).The rotation of CNC lathe 10 is by arrow 28 expressions.
Coordinate system 16 is centered in nominal operating position (X 0, Z 0) locate, this position is the center of being write down by the controller that is used for CNC lathe 10 26.Real work platform center (X 00, Z 00) depart from nominal worktable center (X 0, Z 0) have apart from (Δ Tx, Δ Tz).Except (X at the worktable center of reality 00, Z 00) and nominal worktable center (X 0, Z 0) between worktable deviation (Δ Tx, Δ Tz) outside, probe 18 is not calibrated.Thus, any measurement meeting of being undertaken by probe 18 is from the distance of the measured position deviation (Δ x, Δ z) of reality.
Gauge ball 24 is positioned on the worktable first site, and (x z) locates.First site (x, z) can be on the coordinate system 16 Anywhere, and gauge ball 24 need not be placed to worktable 12 and base portion stationary installation 14 at specific site.When worktable 12 and probe 18 are not calibrated, any measurement of carrying out will comprise from nominal worktable center (X 0, Z 0) to real work platform center (X 00, Z 00) deviation (Δ Tx, Δ Tz), and the deviation of probe 18 (Δ x, Δ z), the particularly deviation of side pen 22, it is illustrated when measuring gauge ball 24.Outside the worktable deviation (Δ x, Δ z) except probe 18 measured values, the calibration of probe 18 it is also conceivable that the deflection of side pen 22 and/or straight pen 20, which no matter uses measure.
With reference to figure 3-4, probe 18 contrast gauge balls 24 are calibrated.Probe 18 at first uses side pen 22 around gauge ball 24, to measure a plurality of sites.For example, side pen 22 is measured four sites about the circumference of gauge ball 24.Fig. 3 illustrates probe 18 on the circumference of gauge ball 24, measure in first site.The measurement that adds about the circumference of gauge ball 24, like what represent at 19 and 21 places by probe, shown in the dotted line (about a plurality of sites of gauge ball 24 only two be illustrated).Use these circumference measured values, carried out least square fitting calculating, to confirm to be located at position (x, the site, center of the gauge ball of z) locating 24 among Fig. 2.Thus, the center of gauge ball 24 is determined, and the side pen of probe 18 contrasts gauge ball 24 be calibrated for 22 this moments.
Aforesaid, in some instances, can also expect to confirm the deflection of side pen 22 or push away/draw deviation.If this is supposed to, probe 18 is measured two opposite points on the circumference of gauge ball 24 so, as shown in Figure 4.The first tested site is illustrated by probe 18, and the second tested site is shown in broken lines by probe 19.With these two opposite points with respect to as the expection measurement point at the center of top definite gauge ball 24 relatively.Inequality (average difference) between actual and expection measured value is any pushing away/draw result of deviation of probe 18.Probe 18 push away/draw deviation, be the deviation that the deflection (as the result who pushes away or draw on probe 18) owing to the side pen 22 of probe 18 takes place.The first deflection deviation of probe 18 is through on average calculating measured value.
Side pen 22 deviations of probe 18 (Δ x, Δ z) and name are to real work platform centre deviation (Δ Tx, Δ Tz) property co-linear with one another (collinear).Thus, the total departure (Δ Tx+ Δ x, Δ Tz+ Δ z) of the side pen 22 of worktable 12 and probe 18 must still be calibrated.
With reference to figure 1,2 and 5, and first site of side pen 22 measurement gauge balls 24 (x, z).Because probe 18 does not contrast worktable 12 calibrations, reaches at nominal worktable center (X 0, Z 0) and real work platform center (X 00, Z 00) between difference, the first measured gauge ball, 24 positions are actual to be (X 1, Z 1).The first measured x-site (X wherein 1) the actual x-position (x) that equals gauge ball 24 add the upper table center x-deviation (Δ Tx), add the x-deviation (Δ x) of the side pen 22 of probe 18.Likewise, the first measured z-site (Z 1) equal gauge ball 24 actual z-position (z), add the upper table center z-deviation (Δ Tz), add the z-deviation (Δ z) of probe 18.The first gauge ball position (X 1, Z 1) at the first position of rotation B about table axis 27 1Place (shown in Fig. 5) is measured.This is by following formulate:
X 1=x+ Δ Tx+ Δ x; And
Z 1＝z+ΔTz+Δz。
So worktable 14 can rotate about B-axis 27, thereby gauge ball 24 is in second place B 2In the illustrated embodiment, second worktable, 12 position of rotation turn over the B angle from original worktable 12 position of rotation.When worktable 12 and base portion stationary installation 14 were rotated, coordinate system 16 did not rotate.The second operating position B of base portion stationary installation 14 2In Fig. 2, illustrate at 15 places with dotted line.Gauge ball 24 is about the worktable center (X of reality 00, Z 00) rotation, rather than about nominal worktable center (X 0, Z 0) rotation.Thus, after worktable 12 and base portion stationary installation 14 had been rotated, gauge ball 24 was at this moment at the second operating position B 2The place is positioned at point with respect to original coordinate system 16, and (xx zz) locates.The difference B of the position of rotation of worktable is B=B 2-B 1
Measurement can be at the first position of rotation B 1About B-axis 27 is 0 anglec of rotation and the second position of rotation B 2Be to carry out under the situation of 90 anglecs of rotation about B-axis 27.Yet when about B-axis 27 during at 0-degree position of rotation, probe 18 may not arrive gauge ball 24.Thus, can use any two position of rotation B of gauge ball 24 1, B 2These two positions should distribute thereby the total departure of calculating (Δ Tx+ Δ x, Δ Tz+ Δ z) will have similar precision to x with the z direction at a distance of about 90-degree.In addition, following total departure (Δ Tx+ Δ x, Δ Tz+ Δ z) equation is to only two the position of rotation B that use gauge ball 24 1, B 2Yet the total departure that describes below (Δ Tx+ Δ x, Δ Tz+ Δ z) equation can be adjusted, to be employed in the measurement of carrying out more than two gauge ball 24 positions.Those skilled in the art can revise equation, calculate total departure (Δ Tx+ Δ x, Δ Tz+ Δ z) to use more than two tested sites.
(xx zz) is measured by probe 18 the second actual ball position, measures (in Fig. 5, illustrating at 19 places with dotted line) by side pen 22 especially.As before, the second measured ball site (X 2, Z 2) comprise the deviation (Δ x, Δ z) of probe 18.Thus, for two positions of worktable 18, the position of gauge ball 24 is known.Two known location for gauge ball 24 have been arranged, so can solve at known location and nominal worktable center (X 0, Z 0) between total departure (Δ Tx+ Δ x, Δ Tz+ Δ z).This is by following formulate, wherein B=B 2-B 1:
Δ Tx + Δ x = ( X 1 + X 2 ) [ 1 - Cos ( B 1 - B 2 ) ] + ( - Z 1 + Z 2 ) Sin ( B 1 - B 2 ) 2 [ 1 - Cos ( B 1 - B 2 ) ] ; And
ΔTz + Δz = ( X 1 - X 2 ) ( sin B 1 - sin B 2 ) + ( Z 1 + Z 2 ) [ 1 - cos ( B 1 - B 2 ) ] 2 [ 1 - cos ( B 1 - B 2 ) ]
Thus, the total departure (Δ Tx+ Δ x, Δ Tz+ Δ z) of worktable 12 and probe 18 (particularly the side pen 22) is known.Total departure (Δ Tx+ Δ x, Δ Tz+ Δ z) can be imported into the controller 26 that is used for CNC lathe 10 subsequently, and can squint in name work coordinate center 16, with compensation total departure (Δ Tx+ Δ x, Δ Tz+ Δ z).Thus, worktable 12 centers are found, and probe 18 is calibrated in single process.
With reference to figure 1 and 6, the method 30 of the sum of errors that is used for automatic calibrate probe 18 (particularly the side pen 22) and worktable 12 centers has been described.Step 32, coordinate system 16 are imported in the controller 26, to establish nominal worktable center.Step 34, gauge 24 is placed on the worktable 12.Step 36, side pen 22 are moved to first gauge ball, 24 sites.Step 38, side pen 22 carries out a plurality of measurements about the circumference of gauge ball 24, is used to contrast the center and definite first measured ball site (X that gauge ball 24 is confirmed probe 18 1, Z 1).Step 40 is used a plurality of measured values, uses least square fitting to calculate the center that is used to seek gauge ball 24.If expectation, step 42, probe 18 is the first deflection deviation of calibrate probe 18 then, promptly pushes away/draw deviation.Step 44, no matter whether the first deflection deviation of probe 18 is calibrated, worktable is about 27 rotations of B-axis, so that gauge ball 24 is moved to second site.Step 46, side pen 22 carries out a plurality of measurements about the circumference of gauge ball 24, to confirm the second measured ball site (X 2, Z 2).Step 48 reuses least square fitting and calculates, to the second ball site (X 2, Z 2) center of calculating gauge ball 24.Step 50, CNC lathe 10 uses first and second measured values subsequently, with the total departure (Δ Tx+ Δ x, Δ Tz+ Δ z) of evaluation work platform 12 centers and probe 18.Step 52, the coordinate system 16 of CNC lathe 10 are used for measurement and control in the future by centering again with the compensation total departure.Again the coordinate system 116 of centering is shown in Fig. 9-11.
Thus, CNC worktable 12 is calibrated with probe 18, particularly side pen 22, and total departure (Δ Tx+ Δ x, Δ Tz+ Δ z) is compensated through controller 26.After this, in fact the XZ direction that is installed in the feature 58 (being illustrated among Fig. 9-11) on the stationary installation 56 on the CNC lathe 10 can be detected through the side pen after the compensation 22.In addition, straight pen 20 can be through detecting the top of gauge ball 24 two axle positions and on the Y-direction, be calibrated, and describes with reference to figure 7 and 8 as following.
Can make calibration steps 30 robotizations through controller 26, thereby the whole calibration process that is used for CNC worktable 12 centers and probe 18 will spend a few minutes for CNC lathe 10.
Fig. 7 and 8 illustrates a kind of being used for the method for probe 18 at y-direction colonel collimation pen 20, or is used to the method for using unregulated straight pen 20 to measure.In the above embodiments, as shown in Fig. 4 and 6, side pen 22 is used to carry out the measurement of gauge ball 24 and be calibrated.Yet the straight pen 20 of probe 18 also is not calibrated.Straight pen 20 must be calibrated, when probe is measured, to consider the deflection in straight pen 20.Thus, the second deflection deviation must be determined, to consider the deflection of straight pen 20.Replacedly, following method can repeat when measuring with straight pen 20 at every turn simply.
When probe 18 was positioned at 90 degree orientation, first of the top through in y-direction position, carrying out gauge ball 24 with straight pen 20 was measured, and straight pen 20 can be calibrated with respect to CNC lathe 10.90 degree orientation are meant that probe 18 is about 54 rotations of axle line.The zero anglec of rotation of probe 18 is meant when side pen 22 position of side pen 22 when CNC worktable 12 extends downwards.In Fig. 7, side pen 22 is rotated counterclockwise 90 degree about axle line 54, and first measurement of gauge ball 24 is carried out with straight pen 20.The result that first straight pen 20 is measured is imported in the controller 26.So probe 18 can be rotated to 270 degree orientation, second measurement is carried out and is input in the controller 26.Average first and second measured values are with the actual y-position of seeking the ball top and the second deflection deviation of the straight pen 20 of calibrate probe 18 thus.With the known actual y-position and the bulb diameter of empirical tests, straight pen 20 is calibrated on the y-direction through common calibration process.
The foregoing description that is used to calibrate CNC lathe 10 worktable centers and probe 18 can be used to have level or the CNC lathe 10 of the stationary installation of vertically installing, to seek X and the Z position through calibration.Further, although used gauge ball 24, also can use ring gauge.Those skilled in the art can confirm whether ring gauge or gauge ball should be used for concrete calibration process and CNC lathe 10.After probe 18 and worktable center 12 be calibrated, flexible fixing device 56 (being illustrated among Fig. 9-11) can be installed to base portion stationary installation 14.Flexible fixing device 56 can measured by CNC lathe 10 through the probe 18 of calibration in being to use before.
Fig. 9-11 illustrates the probe 18 that uses through calibration and comes measurement and positioning feature 58, and said location feature parts are positioned at the flexible fixing device 56 that is used for CNC lathe 10.Coordinate system 116 has used said method to feel relieved again.Flexible fixing device 56 is installed on the base portion stationary installation 14.Flexible fixing device 56 comprises a plurality of location feature parts 58 (only illustrates).Fig. 9 illustrates probe 18 and can how to be positioned, using the x-site of side pen 22 measurement and positioning features 58, said side pen 22 by as above-described being calibrated.Figure 10 illustrates probe 18 and can how to be positioned, to use the z-site of side pen 22 measurement and positioning features 58.Figure 11 illustrates probe 18 and can how to be positioned, and to use the y-site of straight pen 20 measurement and positioning features 58, what said straight pen was as above described in Fig. 7-8 is calibrated.Replacedly, if straight pen 20 also is not calibrated before flexible fixing device 56 being installed on the base portion stationary installation 14, the y-site of location feature parts 58 can still be measured by straight pen 20.As stated, (as shown in Fig. 7-8) measures with straight pen 20 when probe 18 is located on the axle line 54 at a distance of in two gyrobearings of 180 degree each.Average measurement value is to confirm the y-site of location feature parts 58.
Although carried out detailed description to carrying out better model of the present invention, those skilled in the art can learn the many replacement designs and the embodiment that are used for embodiment of the present invention in the scope of appended claim.

Claims (10)

1. method that is used to calibrate the CNC lathe comprises:
Gauge is installed to the worktable of CNC lathe;
Contrast is installed in the gauge calibration probe on the worktable;
Confirm probe and from the nominal worktable center of the coordinate system that is associated with the CNC lathe to the total departure of real work platform center; And
With the controller programming that is operatively coupled to CNC lathe and probe, with the compensation total departure.
2. the method for claim 1, wherein calibrate probe comprises:
Measure a plurality of points with probe about the periphery of gauge; And
The central point of gauge is calculated in employing by a plurality of points of probe measurement.
3. method as claimed in claim 2 also comprises:
On the periphery of gauge, measure two opposite points with probe, wherein, each in the opposite point is measured with the corresponding relative side of probe; With
Based on two opposite points, calculate the first deflection deviation of probe, to use the gauge calibrate probe through measuring.
4. method as claimed in claim 2, wherein, calibrate probe also comprises:
When the side pen of probe is positioned in first orientation about the axle line, with the y-site of the straight pen measurement features parts of probe;
When the side pen of probe was positioned in second orientation about the axle line, with the y-site of the straight pen measurement features parts of probe, said second orientation and first orientation were at a distance of 180 degree; And
Through average first and second measured values, the actual y-site of calculated characteristics parts.
5. the total departure of the method for claim 1, wherein confirming probe and real work platform center also comprises:
With the first actual gauge position of probe measurement on coordinate system;
Rotary table and with the second actual gauge position of probe measurement on coordinate system;
Use the side-play amount of the total departure at the first actual gauge position and the second actual gauge position calculation probe and actual platen center; And
Controller programming with will be used for the CNC lathe through the total departure of calculating with calibrate probe and platen center, is used for calculating in the future.
6. the method for claim 1 also comprises the measurement of carrying out gauge with the side pen of probe.
7. the method for claim 1, wherein said gauge is a gauge ball.
8. method that is used to contrast the gauge calibration probe that is installed on the CNC lathe comprises:
Measure a plurality of points with probe about the periphery of gauge; And
The central point of gauge is calculated in employing by a plurality of points of probe measurement.
9. method as claimed in claim 8 also comprises:
On the periphery of gauge, measure two opposite points with probe, wherein, each in the opposite point is measured with the corresponding opposite side of probe; With
Based on the first deflection deviation of calculating probe through two opposite points measuring, to use the gauge calibrate probe.
10. method as claimed in claim 9 also comprises:
When the side pen of probe with respect to downward location positioning about 90 degree orientation of axle line the time, with the straight pen gauge site of probe;
When the side pen of probe with respect to downward location positioning about 270 degree orientation of axle line the time, with the straight pen gauge site of probe; And
First and second measured values that use the straight pen with probe to carry out, the second deflection deviation of the straight pen of calculating probe.
CN201110372895.8A 2010-11-22 2011-11-22 Automatic calibration and compensation for a cnc machine table and an associated probe Active CN102478815B (en)

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CN107978540A (en) * 2016-10-24 2018-05-01 中芯国际集成电路制造(上海)有限公司 Self-regulation track method and system for measurement platform
CN107978540B (en) * 2016-10-24 2020-04-10 中芯国际集成电路制造(上海)有限公司 Automatic adjusting method and system for measuring machine

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