Background technology
Vacuum coating technology (PVD) is a very film technique of environmental protection.With the formed rete of the mode of vacuum plating have high firmness, high-wearing feature, good chemicalstability, with matrix bond firmly and advantage such as bright metal appearance, so vacuum plating is more and more wider in the application of the ornamental process field of metallic substrate surface such as aluminium, duraluminum, magnesium, magnesiumalloy and stainless steel.
Yet; Because the significant disadvantages of magnesium or magnesiumalloy is corrosion-resistant poor; And inevitably can there be micro pores in itself the PVD decorative coating, therefore, directly has the PVD decorative coating of erosion resistance in magnesium or magnesium alloy matrix surface plating such as TiN layer, TiNO layer, TiCN layer, CrN layer, CrNO layer, CrCN layer or other; Can not effectively prevent said magnesium or magnesium alloy substrate generation galvanic corrosion, simultaneously this PVD decorative coating itself also can take place heterochromatic, phenomenon such as come off.
Summary of the invention
Given this, a kind of housing with good anti-corrosion and decorative appearance is provided.
A kind of method of manufacture of above-mentioned housing also is provided in addition.
A kind of housing comprises magnesium or magnesium alloy substrate, is formed at magnesium silicide layer and color layers on this magnesium or the magnesium alloy substrate successively, and this color layers is the electric insulation layer with Corrosion Protection.
A kind of method of manufacture of housing may further comprise the steps:
Magnesium or magnesium alloy substrate are provided;
Magnetron sputtering forms the magnesium silicide layer on this magnesium or magnesium alloy substrate;
Magnetron sputtering forms color layers on this magnesium silicide layer, and this color layers is the electric insulation layer with Corrosion Protection.
The housing that forms through above-mentioned method of manufacture has good anti-corrosion; Major cause has following 3 points: (1) is because said color layers is an electric insulation layer; Make housing be difficult for forming needed negative electrode of galvanic corrosion and anode take place, thereby improved the erosion resistance of housing; (2) Mg-Si in the said magnesium silicide layer has good mutual diffusion property mutually and between the MAGNESIUM METAL 99; Not only can strengthen the bonding force between magnesium silicide layer and magnesium or the magnesium alloy substrate; Also can improve the compactness of said magnesium silicide layer; So can hinder corrosive gases/liquid to magnesium silicide layer internal divergence, thereby improve the erosion resistance of said housing; (3) because Mg-Si itself has erosion resistance preferably mutually, can further improve the erosion resistance of said housing.
In addition, because the raising of said housing corrosion resistance nature, and this color layers itself has Corrosion Protection, can avoid therefore that color layers is heterochromatic, the generation of failure phenomenon such as come off, thereby makes this housing after long-time use, still have decorative appearance preferably.
Embodiment
See also Fig. 1, the housing 10 of the present invention's one preferred embodiment comprises magnesium or magnesium alloy substrate 11, is formed at magnesium silicide (Mg on this magnesium or the magnesium alloy substrate 11 successively
2Si) layer 13 and color layers 15.This housing 10 can be the housing of 3C electronic product, also can be the component of the vehicles such as rims of spectacle, building appliance and automobile etc.
Said Mg
2The thickness of Si layer 13 is 300~1000nm.
Said color layers 15 is for having the electric insulation layer of Corrosion Protection.This color layers comprises and is formed at Mg successively
2Titanium oxide (TiO on the Si layer 13
2) layer 151 and silicon-dioxide (SiO
2) layer 153.This TiO
2The thickness of layer 151 is 50~150nm, this SiO
2The thickness of layer 153 is 50~150nm.
Said Mg
2Si layer 13 and color layers 15 all can be passed through the magnetron sputtering method formation of deposits.Be appreciated that said Mg
2Si layer 13 and color layers 15 also can be passed through other Vacuum Coating methods such as arc ion plating method, evaporation coating method and form.
The method of the said housing 10 of manufacturing of the present invention's one preferred embodiment mainly comprises the steps:
Magnesium or magnesium alloy substrate 11 are provided, and magnesium or magnesium alloy substrate 11 are ground and electropolishing successively.Behind the electropolishing, with deionized water and absolute ethyl alcohol this magnesium or magnesium alloy substrate 11 surfaces are carried out wiping successively again.Again the magnesium after the wiping or magnesium alloy substrate 11 are put into the ultrasonic cleaner that is loaded with acetone soln and shake cleaning, with the impurity of removing magnesium or magnesium alloy substrate 11 surfaces and greasy dirt etc.Dry up subsequent use after cleaning finishes.
Argon plasma is carried out on the surface of magnesium after above-mentioned processing or magnesium alloy substrate 11 clean, further remove the greasy dirt on magnesium or magnesium alloy substrate 11 surfaces, to improve magnesium or magnesium alloy substrate 11 surfaces and follow-up coating's adhesion.Concrete operations and processing parameter that this plasma body cleans can be: adopt a medium frequency magnetron sputtering coating equipment (figure does not show); Magnesium or magnesium alloy substrate 11 are put on the work rest of coating chamber of this coating equipment, to this coating chamber vacuumize handle to vacuum tightness be 8.0 * 10
-3Pa; In coating chamber, feeding purity with the flow of 250~500sccm (standard state ml/min) is 99.999% argon gas; On magnesium or magnesium alloy substrate 11, apply-500~-bias voltage of 800V, magnesium or magnesium alloy substrate 11 surfaces are carried out plasma clean, scavenging period is 3~10min.
After magnesium or magnesium alloy substrate 11 are carried out plasma clean, on this magnesium or magnesium alloy substrate 11, form Mg
2Si layer 13.Form this Mg
2The concrete operations and the processing parameter of Si layer 13 are following: be working gas with the argon gas; Regulating argon flow amount is 150~300s ccm; It is 30%~70% that dutycycle is set; On magnesium or magnesium alloy substrate 11, apply-50~-bias voltage of 300V, and heating coating chamber to 50~150 ℃ (being that sputter temperature is 50~150); Open the magnesium silicide (Mg that has been installed in this coating equipment
2Si) power supply of target, it is 5~10kw that its power is set, deposition Mg
2Si layer 13.Deposit this Mg
2The time of Si layer 13 is 30~120min.
Form said Mg
2Behind the Si layer 13, on this magnesium or magnesium alloy substrate 11, form color layers 15, this color layers 15 comprises and is formed at this Mg successively
2TiO on the Si layer 13
2 Layer 151 and SiO
2Layer 153.Form said color layers 15 concrete operations and processing parameter following:
Close the power supply of said magnesium silicide target; With oxygen is reactant gases; In coating chamber, feeding flow is the oxygen of 10~80sccm, keep said argon gas flow, put on magnesium or magnesium alloy substrate 11 bias voltage and sputter temperature constant, open the power supply that has been installed on titanium (Ti) target in the said coating chamber; It is 5~10kw that its power is set, in said Mg
2Depositing Ti O on the Si layer 13
2Layer 151.Deposit this TiO
2The time of layer 151 is 2~30min.
Form this TiO
2Behind the layer 151, keep flow, the oxygen of said argon gas flow, put on magnesium or magnesium alloy substrate 11 bias voltage and sputter temperature constant, open the power supply that has been installed on silicon (Si) target in the coating chamber, it is 5~10kw that its power is set, in said TiO
2Deposit SiO on the layer 151
2Layer 153.Deposit this SiO
2The time of layer 153 is 2~30min.
The housing 10 that forms through above-mentioned method of manufacture has good anti-corrosion, and major cause has following 3 points: (1) is because said TiO
2 Layer 151 and SiO
2 Layer 153 is an insulation layer, makes housing 10 be difficult for forming needed negative electrode of galvanic corrosion and anode take place, thereby improved the erosion resistance of housing 10; (2) said Mg
2Mg-Si in the Si layer 13 has good mutual diffusion property mutually and between the MAGNESIUM METAL 99, not only can strengthen Mg
2Bonding force between Si layer 13 and magnesium or the magnesium alloy substrate 11 also can improve said Mg
2The compactness of Si layer 13 so can hinder corrosive gases/liquid to Mg
2Si layer 13 internal divergence, thus the erosion resistance of said housing 10 improved; (3) said Mg-Si itself has erosion resistance preferably mutually, can further improve the erosion resistance of said housing 10.
In addition; Because the raising of said housing 10 corrosion resistance natures; Therefore and this color layers 15 itself has non-corrosibility, can avoid that color layers is 15 heterochromatic, the generation of failure phenomenon such as come off, thereby makes this housing 10 after long-time use, still have decorative appearance preferably.
In addition; When guaranteeing to have preferably bonding force, erosion resistance; Also can change the composition of color layers 15 through control to the flow of reactant gases oxygen and depositing time; Thereby make color layers 15 demonstrate the intermediate color of colors such as green, blueness, yellow and redness and above-mentioned color, to enrich the decorative appearance of said housing 10.