CN102468886A - Method for transmitting photoelectric signal, photoelectric sensor and microelectronic processing equipment - Google Patents
Method for transmitting photoelectric signal, photoelectric sensor and microelectronic processing equipment Download PDFInfo
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- CN102468886A CN102468886A CN2010105339305A CN201010533930A CN102468886A CN 102468886 A CN102468886 A CN 102468886A CN 2010105339305 A CN2010105339305 A CN 2010105339305A CN 201010533930 A CN201010533930 A CN 201010533930A CN 102468886 A CN102468886 A CN 102468886A
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Abstract
The invention provides a method for transmitting a photoelectric signal. The method makes an effective signal to be emitted mix with a specific carrier signal in the form of an electric signal at first, and then transforms the mixed electric signal into a related optical signal and transmits outwards through a transmitting terminal of the photoelectric sensor. A receiving terminal of the photoelectric senor transforms a received optical signal into a corresponding electric signal, and then makes a screening process to the transformed electric signal in order to gain an effective signal as requirement. The method can effectively resist the influence of environmental noise of the photoelectric signal in transmitting to the detection precision, thus higher detection precision of the photoelectric signal can be obtained. Moreover, the invention further provides a photoelectric sensor and microelectronic processing equipment.
Description
Technical field
The present invention relates to the photosignal transmission technique field, particularly, relate to a kind of photosignal transmission method, photoelectric sensor and microelectronics process equipment.
Background technology
Along with scientific and technological progress, semiconductor processing technology has obtained unprecedented achievement.As a kind of process technology of superhigh precision, control also is strict to the running precision of various mechanisms.For example; In the semiconductor processing equipment of ICP etching machine and PECVD etc.; Need realize operations such as the transfer of substrate and location by the transmission mechanism of mechanical arm and support plate transmission etc., wherein, need to use a large amount of operation and positioning accuracies that detect each transmission mechanism to level sensor.
Generally include following two kinds of situation to the application of level sensor in transmission control: one of which; As shown in Figure 1; Whether the sensor that puts in place drive disk assembly puts in place and to judging and control unit detection feedback result; Judge and control unit according to the feedback signal of level sensor and control drive unit, and then the operation of control drive disk assembly.Its two, only be used to detect drive disk assembly to level sensor and whether accurately arrive the target location, do not participate in control procedure to driver element; Mostly this situation is to adopt servomotor as driver element, comes accurately to control the position of drive disk assembly through the rotational angle of control servomotor.
In above-mentioned two kinds of drive control mode, all require level sensor to have the higher detection precision.At present, commonly mainly be divided into contact and contactless two big types to level sensor.Wherein, touch sensor need contact with drive disk assembly and pressurized after just can be triggered, thereby be only limited in the lower transmission mechanism of required precision and use; Noncontacting proximity sensor and then comprise Hall-type again and two kinds of photoelectric types, and Hall element causes its range of application narrower to the higher and examined distance limit of the material requirements of object to be detected; Comparatively speaking, photoelectric sensor has the advantage that detects outside the travel range that distance, precision Gao Bingke be installed in drive disk assembly etc., thereby is widely used in the transmission mechanism of semiconductor processing equipment.
Though comparing with the transducer of other type, photoelectric sensor has plurality of advantages; But because photoelectric sensor needs specific light beam to trigger; Thereby residing operational environment had higher requirement, influencing factors such as the illumination around the transducer, magnetic field, electric field all possibly cause faults such as transducer wrong report or inefficacy.Yet; Very complex operating environment that is flooded with various illumination, electric field and magnetic field exactly in semiconductor processing equipment; Obviously, existing photoelectric sensor is difficult in such complex operating environment and still can keeps sufficiently high accuracy of detection.Therefore, need a kind of better photoelectric detecting technology at present badly and detect needs with the transmission of satisfying semiconductor processing equipment.
Summary of the invention
For addressing the above problem, the present invention provides a kind of photosignal transmission method, and it can effectively resist the influence of ambient noise to photoelectric sensor, thereby effectively improves the accuracy of detection in the photosignal transmission course.
For addressing the above problem, the present invention also provides a kind of photoelectric sensor, and it can effectively resist noise jamming equally, thereby has the higher detection precision.
For addressing the above problem, the present invention also provides a kind of microelectronics process equipment, and the photoelectric sensor in this equipment has the antinoise interference performance equally and reaches the high advantage of accuracy of detection by force.
For this reason; The present invention provides a kind of photosignal transmission method; Be used between the transmitting terminal of photoelectric sensor and receiving terminal, realizing effective transmission of photosignal; It comprises the steps: 10) armed useful signal is mixed with the particular carrier wave signal with the form of the signal of telecommunication mutually, via transmitting terminal the mixed signal of telecommunication is converted into corresponding light signal and outwards emission then; 20) receiving terminal is converted into the corresponding signal of telecommunication with the light signal that receives, and then the signal of telecommunication after transforming is carried out Screening Treatment, to obtain required useful signal.
Wherein, in step 10), through stack or carry out the mode of multiplying and useful signal is mixed with carrier signal mutually.
Wherein, step 20) in, Screening Treatment comprises: the carrier signal that is adopted in the signal of telecommunication after will transforming and the step 10) is carried out multiplying, carries out Filtering Processing afterwards again, finally obtains required useful signal.
Wherein, carrier signal is sinusoidal wave.
Wherein, transmitting terminal comprises light-emitting diode, and receiving terminal comprises photodiode.
Wherein, useful signal comprises direct current signal.
As another kind of technical scheme, the present invention also provides a kind of photoelectric sensor, comprises transmitting terminal, receiving terminal, signal input part, signal mixed cell, signal screening unit.Wherein, signal input part inputs to the signal mixed cell with the form of the signal of telecommunication with armed useful signal and particular carrier wave signal; The signal mixed cell mixes useful signal with carrier signal mutually, is sent to transmitting terminal then; Transmitting terminal is converted into corresponding light signal and outwards emission with the mixed signal of telecommunication; Receiving terminal is converted into the corresponding signal of telecommunication with the light signal that receives, and is sent to the signal screening unit; The signal screening unit carries out Screening Treatment to the signal of telecommunication that is sent by receiving terminal, to obtain required useful signal.
Wherein, the signal mixed cell comprises the signal laminating module or the first multiplying module, in order to through stack or carry out the mode of multiplying and useful signal is mixed with carrier signal mutually.
Wherein, The signal screening unit comprises second multiplying module and the filtration module; The signal of telecommunication through after the receiving terminal conversion carries out multiplying with the particular carrier wave signal in the second multiplying module, get into filtration module then and carry out Filtering Processing, to obtain required useful signal.
Wherein, transmitting terminal comprises light-emitting diode, and receiving terminal comprises photodiode.
Wherein, between signal mixed cell and transmitting terminal, be provided with the current-limiting protection unit, get into the current peak of transmitting terminal in order to restriction.
Wherein, useful signal comprises direct current signal.
In addition; The present invention also provides a kind of photoelectric sensor; Comprise transmitting terminal and receiving terminal, it is also used the photosignal transmission method that the invention described above provides and between transmitting terminal and receiving terminal, carries out the emission and the detection of photosignal, to obtain higher accuracy of detection and interference free performance.
In addition, the present invention also provides a kind of microelectronics process equipment, comprises transmission mechanism, and the photoelectric sensor that the invention described above provides is set on transmission mechanism, accurately detects in order to operation and positioning accuracy to transmission mechanism.
The present invention has following beneficial effect:
In the photosignal transmission method provided by the invention; Armed useful signal is mixed with the particular carrier wave signal with the form of the signal of telecommunication mutually, and the mixed signal of telecommunication is converted into corresponding light signal and outwards emission via the transmitting terminal of photoelectric sensor; Then, will be converted into the corresponding signal of telecommunication at the received light signal of the receiving terminal of photoelectric sensor, and the signal of telecommunication after the said conversion will be carried out Screening Treatment, to obtain said useful signal.In the transmission course of above-mentioned transmission and reception to photosignal; Respectively the useful signal that is used to trigger transducer mixed carrier and the processing of filtering carrier wave have been carried out; And owing to when carrying out filtration treatment, can effectively the noise signal in the external environment be filtered out in the lump; Thereby can obtain useful signal accurately, and then can effectively improve accuracy of detection and interference free performance in the photosignal transmission course.
Photoelectric sensor provided by the invention, useful signal and the particular carrier wave signal that will import via signal input part by its signal mixed cell mix, and through transmitting terminal the mixed signal of telecommunication are converted into corresponding light signal and outwards emission then; Receiving terminal is converted into the corresponding signal of telecommunication with the light signal that receives, and by the signal screening unit this signal of telecommunication is carried out Screening Treatment, filtering out mixed signal and external environment noise signal, thereby obtains required useful signal.Therefore, photoelectric sensor provided by the invention has strong etc. the advantage of accuracy of detection height and antijamming capability equally.
In addition; In the another kind of technical scheme of photoelectric sensor provided by the invention; Application of aforementioned photosignal transmission method provided by the present invention and the transmission of polarity photosignal between the transmitting terminal of transducer and receiving terminal, thereby it has strong etc. the advantage of accuracy of detection height and antijamming capability equally.
In addition, microelectronics process equipment provided by the invention comprises transmission mechanism, and in this transmission mechanism, is provided with the photoelectric sensor that the invention described above provides.Because this photoelectric sensor can effectively be resisted the influence of ambient noises such as illumination in the microelectronics process equipment, magnetic field, electric field to accuracy of detection; Therefore, microelectronics process equipment provided by the invention can carry out effectively and accurate the detection the operation and the positioning accuracy of its transmission mechanism, and then realizes the operation of each transmission mechanism and the accurate control of location.
Description of drawings
Fig. 1 is to the work sketch map of level sensor in a kind of driving control system commonly used;
Fig. 2 is the schematic flow sheet of photosignal transmission method provided by the invention;
Fig. 3 is the schematic flow sheet of a specific embodiment of photosignal transmission method provided by the invention;
Fig. 4 A and 4B are respectively the signal launching phase and the signal processing principle schematic in signal reception stage in the flow chart shown in Figure 3;
Fig. 5 is the structural principle block diagram of photoelectric sensor provided by the invention;
Fig. 6 A and Fig. 6 B are respectively the circuit diagram of signal emission part and signal receive section in the specific embodiment of photoelectric sensor provided by the invention; And
Fig. 7 is the circuit diagram of the signal emission part in second kind of specific embodiment of photoelectric sensor provided by the invention.
Embodiment
For making those skilled in the art understand technical scheme of the present invention better, photosignal transmission method provided by the invention and photoelectric sensor are described in detail below in conjunction with accompanying drawing.
See also Fig. 2, be the schematic flow sheet of photosignal transmission method provided by the invention.This method is used between the transmitting terminal of photoelectric sensor and receiving terminal, realizing effective transmission of photosignal; Mainly comprise the steps: step 10); Armed useful signal is mixed with the particular carrier wave signal with the form of the signal of telecommunication mutually, via transmitting terminal the mixed signal of telecommunication is converted into corresponding light signal and outwards emission then.Above-mentioned steps 10) after the execution, the signal of being launched gets into external environment with the form of light signal, and light signal can be sneaked into a large amount of ambient noise signals in the external environment transmission course; Thereby in step 20) in all need carry out certain processing to the signal that is received.Step 20), receiving terminal is converted into the corresponding signal of telecommunication with the light signal that receives, and then the signal of telecommunication after transforming is carried out Screening Treatment, to remove the noise jamming in the environment and to obtain required useful signal.
Here, said useful signal is meant and can makes photoelectric sensor by the signal that effectively triggers that this useful signal is the enough big direct current signal of a segment signal intensity usually; And said carrier signal adopts the sine wave that frequency is higher, amplitude is less usually; Thereby, in above-mentioned steps 20) in carry out Screening Treatment to the received signal, promptly be meant operation, thereby only keep the DC component can effectively trigger photoelectric sensor the alternating current component filtering in the received signal.In addition, transmitting terminal generally includes light-emitting diode, and when the electric current of amplitude and specific passed through, this light-emitting diode will send and power frequency and the corresponding light signal of intensity; Receiving terminal then comprises photodiode, when the rayed of certain intensity is on photodiode, will produce certain electric current in this photodiode.
See also Fig. 3, be the schematic flow sheet of a specific embodiment of photosignal transmission method provided by the invention.The photosignal transmission method that is provided in the present embodiment comprises the steps: step 11), through stack or carry out the mode of multiplying and useful signal is mixed with carrier signal mutually; Step 12) is converted into the signal of telecommunication and outwards emission via transmitting terminal with mixed signal; Step 21), receiving terminal is converted into the corresponding signal of telecommunication with the light signal that receives; Step 22), the signal of telecommunication and above-mentioned carrier signal after transforming are carried out multiplying, carry out Filtering Processing afterwards again.
See also Fig. 4 A and 4B, be respectively the signal processing principle schematic that middle signal launching phase embodiment illustrated in fig. 3 and signal receive the stage.Wherein, the signal processing of the signal generation of step 11) and step 12) representative branch is shown in Fig. 4 A.To make useful signal be mixed into example mutually through stacked system, use s with carrier signal
0Expression is the useful signal of output in advance, and s
0=E
0Carrier signal is s=A
sSin ω
0T, wherein A
sBe the amplitude of carrier signal, ω
0Angular frequency for carrier signal; Both comprised DC component in the then mixed signal, and comprised alternating current component again, this mixed signal can be expressed as: s
In=E
0+ A
0Sin ω
0T.Here, because carrier signal and useful signal can make the amplitude of the alternating current component of mixed signal change, thereby use A through processing the time
0The amplitude of representing the alternating current component in the mixed signal.
Above-mentioned mixed signal is converted into corresponding light signal through transmitting terminal and outwards emission, and this light signal has been sneaked into the noise signal in the external environment condition when arriving receiving terminal.Usually can noise signal be regarded as white noise, use s
e=E
e+ A
eSin ω
eT representes, wherein, and E
eBe the DC component of noise signal, A
eBe the amplitude of alternating current component in the noise signal, ω
eBe the angular frequency of alternating current component in the noise signal, so arrive the signal s of receiving terminal
iCan be represented as:
s
i＝E
0+A
0sinω
0t+E
e+A
esinω
et。
See also Fig. 4 B, be step 21) and step 22) principle schematic handled to the received signal.Wherein, step 22) with the signal s that receives
iThe computational process of carrying out multiplying with carrier signal s is as follows:
s
ii＝s
i*s＝(E
0+A
0sinω
0t+E
e+A
esinω
et)*A
ssinω
0t
＝2A
0A
s+2A
eA
0cos(ω
0-ω
e)t+A
s(E
0+E
e)sinω
0t
-2A
e*A
scos(ω
0+ω
e)t-2A
0*A
scos2ω
0t
Find that easily the signal after the process multiplication process is by the DC component 2A that is superimposed
0A
sConstitute DC component 2A wherein with several alternating current components
0A
sBe the useful signal that photoelectric sensor is effectively triggered.The above-mentioned signal of handling through multiplying is carried out low-pass filtering treatment can be with the whole filterings of alternating current component, thereby extract required useful signal.
Can know by foregoing description, in the photosignal transmission method provided by the invention, through the stack or the mode of multiplying useful signal mixed mutually with specific filtering signal, then mixed signal is converted into light signal and outwards launch at the signal launching phase; And receive stage signal that receiving terminal is received and above-mentioned particular carrier wave signal multiplication and Filtering Processing and obtain effectively to trigger the useful signal of photoelectric sensor at signal; Because can be in this process with the noise interferences in signals transmission filtering in the lump; Thereby effectively improve antijamming capability in the photosignal transmission course, and then improve the accuracy of detection of photosignal.
As another kind of technical scheme, the present invention also provides a kind of photoelectric sensor.See also Fig. 5, be the theory diagram of photoelectric sensor provided by the invention.Particularly, this photoelectric sensor comprises: signal input part, signal mixed cell, transmitting terminal, receiving terminal, signal screening unit.Wherein
Signal input part inputs to the signal mixed cell with the form of the signal of telecommunication with armed useful signal and particular carrier wave signal; The signal mixed cell mixes useful signal with carrier signal mutually, is sent to transmitting terminal then; Transmitting terminal is converted into corresponding light signal and outwards emission with the mixed signal of telecommunication; Receiving terminal is converted into the corresponding signal of telecommunication with the light signal that receives, and is sent to the signal screening unit; Said signal screening unit carries out Screening Treatment to the signal of telecommunication that is sent by said receiving terminal, to obtain required useful signal.
Please consult Fig. 6 A and 6B in the lump, be respectively the circuit diagram of signal emission part and signal receive section in the specific embodiment of photoelectric sensor provided by the invention.
Shown in Fig. 6 A, in the present embodiment, comprise a signal laminating module at the signal mixed cell of signal emission part, it can mix useful signal with carrier signal through the mode of stack mutually.This signal laminating module is specially the circuit part at A1, A2, R1, R2 place; Wherein, Vr is a useful signal, and Vm is a carrier signal, and the two is all with the form input signal laminating module of voltage signal; Output mixed signal Vi after the signal laminating module carries out overlap-add procedure, concrete additive process is shown below:
In the present embodiment, preferably, after above-mentioned signal mixed cell, be provided with signal amplification unit.This signal amplification unit is specially A3, R3, R4 and belongs to circuit part.Mixed signal representes with Vo that after signal amplification unit amplifies the numerical value ratio of Vo and Vi can be confirmed by following formula:
Signal after signal amplification unit is handled gets into transmitting terminal.In the present embodiment, said transmitting terminal comprises one group of V/I change-over circuit and LED Light-Emitting Diode.The circuit part that the V/I change-over circuit specifically comprises VCC, R6, PNP, A4, R7 to be formed; Above-mentioned signal Vo after the signal amplification unit processing and amplifying gets into the pin one of A4; Indistinguishably conducted to the output of R6 afterwards, i.e. Vc=Vo, thus form potential difference at the R6 two ends; Obtain corresponding current signal i thus with voltage signal Vo, shown in the formula specific as follows:
Afterwards, this current signal i LED light-emitting diode of flowing through, and make the LED light-emitting diode send corresponding light signal with current signal i, thus accomplish the outside emission process of photosignal.
As a kind of preferred embodiment, between above-mentioned signal amplification unit and transmitting terminal, also be provided with a current-limiting protection unit.Shown in Fig. 6 A; This current-limiting protection unit specifically comprises the circuit part that A5, R5, diode D are constituted; Its effect is to prevent to get into the amplitude of the current signal i of LED light-emitting diode to surpass its lowest high-current value Imax of passing through of allowing; Thereby can effectively protect light-emitting diode not breakdown, and prolong its working life.If this current-limiting protection unit not, in case current signal i surpasses Imax, then photodiode is promptly breakdown, causes permanent damages.The operation principle of this current-limiting protection unit is following: under all constant situation of other element; When not having the current-limiting protection unit; Voltage Vo is the input voltage of A4, when the value of Vo is too small, will correspondingly increase the value of the current signal i of the LED light-emitting diode of flowing through; And be provided with after the current-limiting protection unit, can obtain a voltage Vq by the output at A5 through the value of setting resistance R 5, and make the value of Vq have following characteristics: (Vq-Vd)/R6＜Imax, wherein, Vd is the forward conduction voltage of diode D; When operate as normal, Vo＞Vq, not conducting of diode D, this moment A4 input voltage Vh=Vo, current signal i=(the Vcc-Vo)/R6 of the LED light-emitting diode of flowing through; When because accidental cause when causing Vo＜Vq, then diode D conducting, A4 input voltage Vh=Vq-Vd, current signal i=(the Vq-Vd)/R6 of the LED light-emitting diode of flowing through this moment, thus the electric current of the LED light-emitting diode of will flowing through is limited in below the Imax.
It is pointed out that in the foregoing description, also one of them in signalization amplifying unit and the current-limiting protection unit individually; And, also a plurality of signal amplification units can be set in foregoing circuit, in order to the signal that is in the different disposal stage in the circuit is amplified.
See also Fig. 6 B, be the circuit diagram of the signal receive section in the present embodiment.This signal receive section comprises receiving terminal, signal screening unit.Wherein
Receiving terminal comprises a photodiode and one group of I/V change-over circuit, and the I/V change-over circuit is specially the circuit part that A6, R8 constituted among the figure.Its course of work does, photodiode is converted into corresponding current signal with received light signal, and current signal is handled the back via the I/V change-over circuit and obtained the correspondent voltage signal at the output of A6.Because the light signal that transmitting terminal sent can receive the interference of noise signal in external environment; Therefore; The signal that photodiode received of above-mentioned receiving terminal is the pollution signal of having sneaked into noise signal; Obtain accurate sensing control, will be with wherein ambient noise signal filtering, and the purpose of signalization filter element just is being this.
Shown in Fig. 6 B, the filtering signals unit is made up of the second multiplying module and filtration module.Particularly, this second multiplying module is a multiplier, and this filtration module is one group of low-pass filter circuit.In multiplier; With the above-mentioned voltage signal that obtains by the I/V change-over circuit with multiply each other in the carrier signal that signal emission part adopted; Thereby make above-mentioned voltage signal be decomposed into a DC component and several alternating current component; Pass through low-pass filter circuit then with the whole filterings of all alternating current components, thereby obtain DC component as useful signal.As for the step 20 in concrete signal multiplication processing procedure and the photosignal transmission method that the invention described above provides) identical or similar, do not repeat them here.
See also Fig. 7, be the circuit diagram of the signal emission part in second kind of specific embodiment of photoelectric sensor provided by the invention.The difference of embodiment shown in present embodiment and above-mentioned Fig. 6 A and Fig. 6 B is; In the signal emission part of photoelectric sensor; Adopt the first multiplying module to replace the signal laminating module as the signal mixed cell, in order to useful signal is mixed with the mode of multiplying with the particular carrier wave signal.And this first multiplying module is identical or similar with the structure of the first multiplying module shown in above-mentioned Fig. 6 B, thereby repeats no more.In addition, the composition of other part of the photoelectric sensor in the present embodiment and structure are all identical or similar with above-mentioned first kind of embodiment, will not give unnecessary details equally.
Can know by foregoing description; Photoelectric sensor provided by the invention mixes with carrier signal useful signal through the signal mixed cell at transmitting terminal through the mode that superposes or multiply each other; And carry out multiplication and Filtering Processing to the received signal through the signal screening unit in signal receive section; The alternating current component of noise signal in the environment and signal that transmitting terminal adds is removed in the lump, finally obtained accurate useful signal, thereby improved the accuracy of detection of photoelectric sensor effectively.
It is understandable that; The circuit structure that is adopted among each embodiment of the photoelectric sensor that the invention described above provides; Only be for the exemplary circuitry structure that the course of work and principle proposed of each component units is described, those skilled in the art can make various deformation and improvement to each component units in the foregoing circuit structure or module according to substantive principle of the present invention fully.But it is pointed out that the distortion that all are made based on principle of the present invention and improve and to be regarded as protection scope of the present invention.
In addition; The present invention also provides a kind of photoelectric sensor; It comprises transmitting terminal and receiving terminal; And this photoelectric sensor is also used photosignal transmission method that the invention described above provides between its transmitting terminal and receiving terminal, carrying out the emission and the detection of photosignal, thereby effectively improves the accuracy of detection of photoelectric sensor.
In addition; The present invention also provides a kind of microelectronics process equipment; This equipment comprises that at least being used to drive substrate, loading part or device carries out multi-direction mobile transmission mechanism; And, in the inside of above-mentioned transmission mechanism and/or movement travel and/or the place, initial and final position of operation be provided with the photoelectric sensor that the invention described above provides, accurately detect in order to operation and positioning accuracy above-mentioned transmission mechanism.In practical application, above-mentioned microelectronics process equipment for example can be that plasma etching equipment, plasma enhanced chemical vapor deposition equipment, substrate transmission equipment, substrate load/unloading equipment and other can be applicable to the integrated circuit/solar cell/transmission of semiconductor products such as LED and the equipment of processing.
Because the photoelectric sensor that the invention described above provides can effectively be resisted influence of environmental noise, and has the higher detection precision; Therefore, microelectronics process equipment provided by the invention can to the operation of its transmission mechanism and location whether accurately situation detect accurately, and then effectively improve substrate transmitted and the precision of processed.
It is understandable that above execution mode only is the illustrative embodiments that adopts for principle of the present invention is described, yet the present invention is not limited thereto.For the one of ordinary skilled in the art, under the situation that does not break away from spirit of the present invention and essence, can make various modification and improvement, these modification also are regarded as protection scope of the present invention with improving.
Claims (14)
1. photosignal transmission method is used between the transmitting terminal of photoelectric sensor and receiving terminal, realizing effective transmission of photosignal, it is characterized in that, comprises the steps:
10) armed useful signal is mixed mutually with the form of the signal of telecommunication with the particular carrier wave signal, via said transmitting terminal the mixed signal of telecommunication is converted into corresponding light signal and outwards emission then;
20) said receiving terminal is converted into the corresponding signal of telecommunication with the light signal that receives, and then the signal of telecommunication after the said conversion is carried out Screening Treatment, to obtain required useful signal.
2. photosignal transmission method according to claim 1 is characterized in that, in the step 10), through stack or carry out the mode of multiplying and said useful signal is mixed with carrier signal mutually.
3. photosignal transmission method according to claim 1; It is characterized in that step 20) in, said Screening Treatment comprises: the carrier signal that is adopted in the signal of telecommunication after will transforming and the step 10) is carried out multiplying; Carry out Filtering Processing afterwards again, finally obtain required useful signal.
4. photosignal transmission method according to claim 1 is characterized in that, said carrier signal is sinusoidal wave.
5. photosignal transmission method according to claim 1 is characterized in that said transmitting terminal comprises light-emitting diode, and said receiving terminal comprises photodiode.
6. photosignal transmission method according to claim 1 is characterized in that said useful signal comprises direct current signal.
7. a photoelectric sensor comprises transmitting terminal and receiving terminal, it is characterized in that, said photoelectric sensor also comprises: signal input part, signal mixed cell, signal screening unit, wherein
Said signal input part inputs to the signal mixed cell with the form of the signal of telecommunication with armed useful signal and particular carrier wave signal;
Said signal mixed cell mixes said useful signal with carrier signal mutually, is sent to said transmitting terminal then;
Said transmitting terminal is converted into corresponding light signal and outwards emission with the mixed signal of telecommunication;
Said receiving terminal is converted into the corresponding signal of telecommunication with the light signal that receives, and is sent to said signal screening unit;
Said signal screening unit carries out Screening Treatment to the signal of telecommunication that is sent by said receiving terminal, to obtain required useful signal.
8. photoelectric sensor according to claim 7; It is characterized in that; Said signal mixed cell comprises the signal laminating module or the first multiplying module, in order to through stack or carry out the mode of multiplying and said useful signal is mixed with carrier signal mutually.
9. photoelectric sensor according to claim 7; It is characterized in that; Said signal screening unit comprises second multiplying module and the filtration module; The signal of telecommunication through after the said receiving terminal conversion carries out multiplying with said particular carrier wave signal in the said second multiplying module, get into said filtration module then and carry out Filtering Processing, to obtain required useful signal.
10. photoelectric sensor according to claim 7 is characterized in that said transmitting terminal comprises light-emitting diode, and said receiving terminal comprises photodiode.
11. photoelectric sensor according to claim 7 is characterized in that, between said signal mixed cell and said transmitting terminal, is provided with the current-limiting protection unit, gets into the current peak of said transmitting terminal in order to restriction.
12. photoelectric sensor according to claim 7 is characterized in that, said useful signal comprises direct current signal.
13. a photoelectric sensor comprises transmitting terminal and receiving terminal, it is characterized in that, application rights requires any described photosignal transmission method among the 1-6 and between said transmitting terminal and receiving terminal, carries out the emission and the detection of photosignal.
14. a microelectronics process equipment comprises transmission mechanism, it is characterized in that, said transmission mechanism is provided with any described photoelectric sensor among the claim 7-12, accurately detects in order to operation and positioning accuracy to said transmission mechanism.
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| CN2282691Y (en) * | 1996-07-05 | 1998-05-27 | 中国科学院安徽光学精密机械研究所 | Durable optoelectric transducer light filtering focusing element |
| EP0868043A2 (en) * | 1997-03-26 | 1998-09-30 | Nortel Networks Corporation | Multiplexed optical transmission systems |
| CN1272989A (en) * | 1997-07-31 | 2000-11-08 | 艾利森电话股份有限公司 | Communication using spread spectrum methods over optical fibers |
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Application publication date: 20120523 |