CN102468203A - Front open type wafer box configured with inflatable support member module - Google Patents

Abstract

The invention discloses a front open type wafer box, and a position next to a sidewall and a back wall of the box is configured with an inflatable support member module. The front open type wafer box is characterized in that: the inflatable support member module has a buffer air chamber, one end of the buffer air chamber is provided with an air inlet which is connected with an air valve at a bottom, an air vent channel is provided on the inflatable support member module in a direction facing an opening direction of the front open type wafer box, one side of the air vent channel is provided with a long slit, an air-flow channel is provided between the air vent channel and the buffer air chamber for mutual communication, and one side of the long slit is configured with a plurality of support ribs which are perpendicular to the long slit and are arranged with intervals.

Description

A kind of front-open wafer box that disposes inflatable strutting piece module

Technical field

The present invention relates to front-open wafer box; Particularly in front-open wafer box, dispose inflatable strutting piece module relevant for a kind of; And in inflatable strutting piece module, dispose a buffering air chamber, make gas can in front-open wafer box, form a uniform gas flow field.

Background technology

In the middle of semiconductor preparing process,, be transported to different preparation technology's work stations via automated system because semiconductor wafer need pass through various Different Preparation and preparation equipment.The carrying of wafer for ease and avoid wafer to receive external pollution, regular meeting utilizes an airtight container to carry for automation equipment.Please refer to shown in Figure 1ly, is the wafer case sketch map of prior art.This wafer case is a kind of front-open wafer box (Front Opening Unified Pod; FOUP), have a box body 10 and a body 20, box body 10 is made up of an end face 10T and the bottom surface 10B of pair of sidewalls 10L and adjacent this oppose side wall 10L; And form an opening 12 in a side; And another side of opposed openings 12 forms a rear wall 10B ', wherein on this oppose side wall 10L, respectively is provided with a plurality of slots 11 with the ccontaining a plurality of wafers of level, and door body 20 has an outer surface 21 and an inner surface 22; Door body 20 combines with the opening 12 of box body 10 through inner surface 22, in order to a plurality of wafers of protection box body 10 inside.In addition, at least one bolt perforate 23 of configuration on the outer surface 21 of door body 20 is in order to open or the sealing front-open wafer box.In above-mentioned front-open wafer box, because semiconductor wafer flatly places box body 10 inside, therefore, in the front-open wafer box handling process, need be furnished with wafer limiting piece, move because of opening 12 directions that vibrations produce dystopy or past box body 10 to avoid wafer.

Please refer to shown in Figure 2ly, is door body 20 structural representations of a kind of front-open wafer box of being disclosed of U.S. bulletin patent 6,736,268.As shown in Figure 2; The medial surface 22 of door body 20 disposes a sunk area 24; This sunk area 24 from the top 221 of medial surface 22 extend to bottom 222 and about between two latch mechanisms 230 (inner) in the door body; And in sunk area 24, further dispose wafer limiting piece module again, this wafer limiting piece module by about two 100 of wafer limiting pieces form, and on each wafer limiting piece 100, have a plurality of wafer contact heads 110; To utilize this wafer contact head 110 to hold its relative wafer, avoid wafer in transport process, to move because of the opening direction of vibrations dystopy or past box body.

The wafer limiting piece module of slot 11 on the above-mentioned box body 10 two side 10L and door body 20 inner surfaces 22 is used for supporting and limiting the box body 10 inner a plurality of wafers that carry of taking advantage of respectively; Yet; These strutting pieces and limited part all produce friction with wafer easily in the process that wafer case is transported, cause the generation of particulate (particle).When box body 10 inside of wafer case had particulate to occur, particulate may rest on wafer surface or pollute wafer, caused follow-up chip to produce the decline of its yield.Therefore, in the design of its strutting piece of wafer case and limited part, can make the material of apparatus antiwear characteristic usually, produce too many particulate when avoiding strutting piece and limited part to contact with wafer.As shown in Figure 3, be a kind of generalized section that places the strutting piece module of wafer case two side that U.S.'s publication 2006/0283774 is disclosed.500 of the strutting pieces that this strutting piece module is arranged by a plurality of perpendicular separations are formed, and are coating one deck resin 501 on the surface of strutting piece 500, and this layer resin 501 has low frictional behavior, therefore can avoid strutting piece 500 to produce particulate with the wafer friction.Yet, in the middle of this kind design, because resin 501 has an inclined-plane; Therefore when wafer support during, only can support near the edge of wafer in resin 501, and when the size of wafer than greatly the time; Then make the sagging or sinking of wafer easily; Except causing wafer to produce the slight crack easily, robotic arm also makes wafer produce fragmentation easily or wrecks when the output wafer.

In addition, also some design is in the inside of wafer case, for example: wafer contact with above-mentioned strutting piece or limiting piece module near, a jet opening or an edge of a knife is provided, then can fricative particulate band be left wafer.As shown in Figure 4, be U.S. bulletin patent US6,899,145 a kind of sketch mapes that place the inner inflatable strutting piece module of wafer case of being disclosed.This inflation strutting piece module comprises a hollow body 600, hollow body 600 be fixed in wafer case box body sidewall and be extended with a plurality of vertical strutting pieces 601 to the inside of box body, support the inner a plurality of wafers of box bodys with the upper surface 602 that utilizes strutting piece.And have the opening of a horizontal stripe shape at the side surface 603 of strutting piece, can be with the horizontal stripe shape opening ejection thus of hollow body 600 gas inside, to avoid being formed at wafer surface because of fricative particulate.Said structure because horizontal stripe shape opening places the side surface 603 of strutting piece 601, causes the holding power deficiency easily and then makes wafer generation dystopy or overlapping, causes the more serious damage of wafer.In addition, when crystal chip bearing during in strutting piece 601 its upper surfaces 602, suitable big of the contact area between wafer and the strutting piece 601, this more is easy to generate particulate.And, because its length of opening of horizontal stripe shape is suitable with wafer, therefore, possibly cause air-flow faint or need the bigger charger of use that bigger throughput is provided, can form effective gas flowfield.Therefore, the inside of present wafer case needs the more thorough inflatable strutting piece module of a kind of design, can avoid particulate to produce and be formed at wafer surface effectively.

Summary of the invention

Cause easily that the wafer support power is not enough, contact area is excessive and be easy to generate problem such as particulate according to the inner inflatable strutting piece module of its box body of the wafer case of prior art; A main purpose of the present invention is to provide a kind of front-open wafer box with inflatable strutting piece module; Inflatable strutting piece block configuration in box side wall and rear wall adjacent locate and it has at least one slit towards opening direction; Slit can spray the state of gas in order to its internal environment of control front-open wafer box, for example: the kind of inner atmospheric pressure, humidity or gas etc.

Of the present invention one other main purpose is to provide a kind of front-open wafer box with inflatable strutting piece module; Inflatable strutting piece module has at least one slit towards opening direction; Slit can spray gas and form a gas flowfield; Can the particulate on the wafer be taken away, be formed at the wafer top to avoid particulate.

A main purpose more of the present invention is to provide a kind of front-open wafer box with inflatable strutting piece module; Inflatable strutting piece module tool one cushions air chamber and disposes an air inlet in an end that cushions air chamber; The buffering air chamber is connected with the slit of outlet passageway, when the buffering air chamber is in when satisfying pressure condition, can spray a uniform airflow and form a gas flowfield through slit; Particulate on the wafer is taken away, be formed at the wafer top to avoid particulate.

Of the present invention also have a main purpose to be to provide a kind of front-open wafer box with inflatable strutting piece module; On the sidewall of wafer case, dispose the strutting piece module; It has strutting piece or ribs that a plurality of perpendicular separations are arranged, and has a wear-resisting support round end on strutting piece or the ribs, and strutting piece or ribs can utilize this wear-resisting support round end to contact with wafer; Except can reducing area with wafer contact, generation particulate in the time of also avoiding rub with wafer.

A main purpose more of the present invention is to provide a kind of front-open wafer box with inflatable strutting piece module; Inflatable strutting piece block configuration in box side wall and rear wall adjacent locate and it has the limited part that strutting piece that a plurality of perpendicular separations of a row arrange or ribs and a plurality of perpendicular separations of a row are arranged; These a plurality of strutting pieces near a plurality of limited parts of the sidewall of box body then near the rear wall of box body; Therefore; But this inflatable strutting piece module also can avoid wafer to move toward the direction of rear wall except supporting wafers, produces to reduce particulate.

A main purpose more of the present invention is to provide a kind of front-open wafer box with inflatable strutting piece module; Each ribs front end on this inflatable strutting piece module can dispose a protrusion piece; In order to contact with the back side of wafer; Therefore can make that through the length of ribs bigger wafer can obtain preferable support and can not produce deformation or sinking, so can increase the yield on the waper fabrication process.

For reaching above-mentioned projects, the present invention discloses a kind of front-open wafer box, comprise a box body; By pair of sidewalls, form adjacent to an end face and a bottom surface of pair of sidewalls respectively; And form an opening in a side, and form a rear wall with respect to another side of opening, on pair of sidewalls, respectively dispose a strutting piece module with ccontaining a plurality of wafers; And respectively dispose an inflatable strutting piece module in pair of sidewalls and rear wall adjacent; And a body, having an outer surface and an inner surface, the door body combines with the opening of box body with inner surface; And in order to the inner a plurality of wafers of protection box body; Wherein front-open wafer box is characterised in that: each inflatable strutting piece module has a buffering air chamber and disposes an air inlet in an end of buffering air chamber, and this air inlet is connected with an air valve of bottom surface, disposes an outlet passageway on the direction of opening and disposes a slit in a side of outlet passageway facing of inflatable strutting piece module; Outlet passageway and buffering have a gas channel so that outlet passageway and buffering air chamber can be interconnected between the air chamber, and on a side of slit, dispose a plurality of perpendicular to slit spaced ribs.In addition, inflatable strutting piece module can also further comprise the limited part that a plurality of perpendicular separations are arranged, and moves with the direction of restriction wafer toward the box body rear wall.

Description of drawings

Fig. 1 is the sketch map of existing front-open wafer box;

Fig. 2 is the door body sketch map of existing front-open wafer box;

Fig. 3 is the generalized section of existing strutting piece module;

Fig. 4 is the sketch map of existing inflatable strutting piece module;

Fig. 5 is the perspective view of a kind of its box body of front-open wafer box of the present invention;

Fig. 6 only keeps the sketch map of inflatable strutting piece module for its box body of a kind of front-open wafer box of the present invention;

Fig. 7 is the sketch map of a kind of its box body of front-open wafer box of the present invention;

Fig. 8 A and Fig. 8 B are the sketch map of its inflatable strutting piece module of a kind of front-open wafer box of the present invention;

Fig. 9 A～Fig. 9 F is the execution mode sketch map of the slit of its inflatable strutting piece module of a kind of front-open wafer box of the present invention;

It does not install the sketch map of inflatable strutting piece module to Figure 10 as yet for a kind of front-open wafer box of the present invention;

Figure 11 is the enlarged diagram of its inflatable strutting piece module of a kind of front-open wafer box of the present invention;

It disposes the partial schematic diagram of inflatable strutting piece module to Figure 12 for a kind of front-open wafer box of the present invention;

Figure 13 A and Figure 13 B are another design of its inflatable strutting piece module of a kind of front-open wafer box of the present invention.

[main element symbol description]

10 box bodys

The 10L sidewall

The 10T end face

The 10B bottom surface

10B ' rear wall

100 wafer limiting pieces

110 wafer contact heads

11 slots

12 openings

20 bodies

21 outer surfaces

221 tops

222 bottoms

22 inner surfaces

23 bolt perforates

230 latch mechanisms

24 sunk areas

200 inflatable strutting piece modules

The 200B main body

201 ribs

202 limited parts

The 203a slit

The 203b transverse joint

204 dividing plates

205 gas outlets

206 buffering air chambers

207 air inlets

The 208a gas channel

209 support round end

210 jacks

211 fixed pedestals

212 circular openings

300 strutting piece modules

401 intake valves

500 strutting pieces

501 resins

600 hollow bodies

601 strutting pieces

602 upper surfaces

603 side surfaces

Embodiment

For technology contents, goal of the invention that the present invention is used and the effect reached thereof have more complete and clearly disclose,, and please consult the diagram and the figure number of being taken off in the lump now in specifying down.

At first, see also Fig. 5, Fig. 6 and Fig. 7, be the box body perspective view of a kind of front-open wafer box of the present invention, sketch map that box body only keeps inflatable strutting piece module with and end view.The box body 10 of front-open wafer box is made up of an end face 10T and the bottom surface 10B of pair of sidewalls 10L and adjacent this oppose side wall 10L; And form an opening 12 in a side; And another side of opposed openings 12 forms a rear wall 10B '; Wherein respectively dispose a strutting piece module 300 near near opening 12, and respectively dispose an inflatable strutting piece module 200 in this oppose side wall 10L place adjacent with rear wall 10B ' at this oppose side wall 10L.Aforesaid strutting piece module 300 can be the form of existing strutting piece, does not limit at this.

Please follow with reference to shown in figure 8A and Fig. 8 B, be a kind of embodiment sketch map of a kind of inflatable strutting piece module of the present invention.At first; Shown in Fig. 8 A; Inflatable strutting piece module 200 of the present invention mainly comprises a main body 200B and two parts that can be used to supporting wafers that extended out by main body 200B; Wherein first part is made up of 201 of the ribs of a plurality of perpendicular separations arrangements; And 202 of the limited parts that second portion is arranged by a plurality of perpendicular separations are formed, and between the interval of these ribs 201 and these limited parts 202, are provided with an outlet passageway 208b, and dispose a slit 203a in the side of outlet passageway 208b; Through the design of this gas passage 208b and slit 203a, make that gas can be by slit 203a to box body 10 inner inflatable; In addition, also through a plurality of ribs 201 and a plurality of limited part 202 and with pair of sidewalls 10L on the mutual configuration of strutting piece module 300 under, can a plurality of wafers of together support.And inflatable strutting piece module 200 of the present invention, the structure that is formed in one, and mode that can ejection formation is made.

Then; Please continue with reference to figure 8A, Fig. 8 B and Fig. 9 A; One buffering air chamber 206 is arranged in above-mentioned main body 200B inside, and its highly about can identical with main body 200B (shown in Fig. 9 A), or the height of buffering air chamber 206 can be entire body 200B half the (shown in Fig. 8 A).Please refer to Fig. 8 A and Fig. 9 A, all dispose an air inlet 207 at an end that cushions air chamber 206, it can further be connected with an air valve or the intake valve 401 (being shown among Figure 10) of box body 10 bottom surface 10B.No matter and the height of buffering air chamber 206 is made an appointment with identical with main body 200B (shown in Fig. 9 A); Or be entire body 200B half the (shown in Fig. 8 A); An end that has air inlet 207 at buffering air chamber 206 all disposes a gas channel 208a; And when the height of buffering air chamber 206 approximately can be identical with main body 200B (shown in Fig. 9 A); Then can further all respectively dispose a gas channel 208a,, can be interconnected with outlet passageway 208b through gas channel 208a so cushion air chamber 206 because gas channel 208a is disposed between outlet passageway 208b and the buffering air chamber 206 in the opposite end that cushions air chamber 206.Therefore; When the air valve of box body 10 bottom surface 10B or intake valve 401 connect aerating devices (not being shown among the figure); Gas can get in the buffering air chamber 206 via air inlet 207, and the gas in getting into buffering air chamber 206 reaches when satisfying pressure condition, because air inlet 207 contacts and seals with air valve or intake valve 401 ends; So gas only can get into outlet passageway 208b via gas channel 208a in the buffering air chamber 206, is sprayed by the slit 203a on the outlet passageway 208b again; To stress especially at this; Because the bore of this slit 203a is very little with respect to gas channel 208a; The width of its bore is about 0.01mm～5mm, thus in charging into buffering air chamber 206 gas when charging into outlet passageway 208b again via gas channel 208a, most gas can be introduced into to gas channel 208a that outlet passageway 208b communicates in; As gas channel 208a once more behind the gassy, can flow into outlet passageway 208b at last and via slit 203a ejection gas; Therefore; Design through slit 203a of the present invention; Make to spray gas like air knife, and the difference of the gas pressure gradient that is sprayed at slit 203a two ends is not too large, makes to have certain pressure from the gas of slit 203a ejection from slit 203a; Can be supported in the flow field that forms gas between ribs 201 and each limited part 202 at each; So can be distributed between ribs 201 and the limited part 202 and wafer near particulate, take to the direction of opening 12 through the flow field of this gas, to avoid these contaminate wafers.

In addition, in an embodiment of the present invention, the bore of slit 203a can also be that (promptly from the 1st to the 25th of wafer) diminishes gradually or become big from down to up; Please refer to Fig. 9 A, for the bore of slit 203a becomes the sketch map of big execution mode from down to up gradually, at a end near air inlet 207; The bore of its slit 203a is less, and extends toward the direction of air inlet 207 opposite ends, and it is big that the bore of its slit 203a then becomes gradually; Please refer to Fig. 9 B again, for diminish the gradually from down to up sketch map of execution mode of the bore of slit 203a, at a end near air inlet 207; The bore of its slit 203a is bigger; And extend toward the direction of air inlet 207 opposite ends, the bore of its slit 203a diminishes gradually, yet under the prerequisite that comparatively meets physical phenomenon; The bore of slit 203a becomes big design gradually by the 1st to the 25th of wafer and can be superior to by the 1st to the 25th design that diminishes gradually of wafer, so that the pressure of the gas of its ejection is more consistent.Likewise, the form of above-mentioned slit 203a can be strip, shown in Fig. 8 A, or in slit 203a, disposes a plurality of dividing plate 204 perpendicular separations to form a plurality of gas outlets 205, shown in Fig. 9 C; Go up longitudinal extension in slit 203a and form a plurality of transverse joint 203b; Between these transverse joints 203b, all have a spacing, whether the present invention is identical in the distance that this does not limit between these spacings, and transverse joint 203b can be to be the center with slit 203a; Longitudinal extension shape in both sides forms to the left and right respectively; Shown in Fig. 9 D, also can be only to the left or to the right wherein a side longitudinal extension shape form, respectively shown in Fig. 9 E and Fig. 9 F.Because the operating process of the inflatable strutting piece module shown in Fig. 9 A to Fig. 9 F is identical with Fig. 8 A and Fig. 8 B, it is different that its difference place is merely the design of slit 203a, so no longer repeat to give unnecessary details.In addition, the gas of slit 203a ejection can be the combination of inert gas, dry cold air, nitrogen or above gas.

In the middle of the embodiment of above-mentioned Fig. 8 A to Fig. 8 B and Fig. 9 A to Fig. 9 F; Also can the bottom surface of box body 10 10B near opening 12 near configuration another air valve or air outlet valve (not being shown among Figure 10) at least; When aerating device to box body 10 inflation the time; Can allow box body 10 inside gas slightly to flow out, except can box body 10 inner particulates being removed, also shorten and fill the required time of full box body 10 through near air valve the opening 12 or air outlet valves.Certainly, box body 10 of the present invention can also include two pairs and be different from above-mentioned intake valve and air outlet valve, to meet the standard of front-open wafer box.

Please, be the enlarged diagram of inflatable strutting piece module of the present invention again with reference to Figure 11.Inflatable strutting piece module 200 is combined by 201 of a plurality of ribs; The structure of each ribs 201 similar platform wherein; Ribs 201 can be materials such as a wear-resisting consumptive material, thermoplasticity material, macromolecule material or elastic material; Therefore, when wafer is supported on ribs 201 or the platform, can avoid generation particulate because rub.Certainly, shown in figure 11, can include one on the ribs 201 and support round end 209, make ribs 201 utilize this to support round end 209 and contact the area that contacts with wafer to reduce with wafer, can further reduce the generation of particulate.Certainly, ribs 201 can be arranged to that only to have this to support round end 209 are wear-resisting consumptive materials, and other is not wear-resisting consumptive material with place of wafer contact, produces required cost to reduce.And a plurality of limited parts of inflatable strutting piece module 200 202 because near or be suspended in the place ahead (shown in figure 12) of rear wall 10B '; Move so can limit the directions that are supported in the past rear wall 10B ' of wafer on ribs 201 or ribs 201 its support round ends 209, to avoid wafer bump rear wall 10B '.And limited part 202 can be by padded coaming or the made flat board of wear-resisting consumptive material, also or by the formed shallow grooves structure of above-mentioned material, gets into this shallow grooves structure to hold wafer.In addition, also can further comprise at least one limiting piece module (not being shown among the figure) at the door body inner surface of front-open wafer box, this limiting piece module then is used for limiting wafer and moves toward the direction of opening 12.

Aforementioned inflatable strutting piece module 200 includes the limited part 202 and a slit 203a of a main body 200B, the ribs 201 of a plurality of perpendicular separation arrangement, the arrangement of a plurality of perpendicular separation, and the structure that it can be integrally formed is to reduce production cost.Certainly; Inflatable strutting piece module 200 can be assembled mutually by these elements; Shown in Figure 13 A and Figure 13 B; Two sides of the main body 200B of inflatable strutting piece module 200 have the jack 210 that a plurality of perpendicular separations are arranged, and insert and assemble and be fixed on the main body 200B to allow a plurality of ribs 201, to form a plurality of spaced ribs 201.And since ribs 201 with the assembling mode be fixed on the main body 200B, therefore, each ribs 201 all has a fixed pedestal 211, can with the main body 200B tabling of strutting piece module 200.In addition, each ribs 201 can also have a circular opening 212, and the support round end 209 that can let a script separate is filled in and is fixed on the ribs 201, makes ribs 201 can utilize this to support round end 209 and contacts with wafer.And this support round end 209 can be materials such as a wear-resisting consumptive material, thermoplasticity material, macromolecule material or elastic material, and other is not wear-resisting consumptive material with place of wafer contact, produces required cost to reduce.In addition; A ribs 201 and a slit 203a that its inflatable strutting piece module 200 of front-open wafer box of the present invention can only be arranged by a main body 200B, a plurality of perpendicular separation form; Such structure can have supporting wafers equally concurrently and get rid of near the particulate of wafer.In addition; Also can between the ribs 201 that a plurality of perpendicular separations are arranged, form a plurality of ventholes (not being shown among the figure); Make inflatable strutting piece module 200 except utilizing slit 203a ejection gas, also can utilize these a plurality of ventholes that near the particulate band the wafer is left.Certainly, inflatable strutting piece module 200 can also be made up of ribs 201, another ribs 201 and slit 203a who arranges a plurality of perpendicular separations arrangements that a main body 200B, a plurality of perpendicular separations of a row are arranged, and the present invention does not limit.In addition, its body of front-open wafer box of the present invention can be provided with a sunk area in door body inner surface, and between door external surface and inner surface, dispose at least one bolt structure like the door body of prior art, and wafer case can be operated smoothly.

Though the present invention discloses as above with aforesaid preferred embodiment; Right its is not in order to limit the present invention; Anyly have the knack of similar art; Do not breaking away from the spirit and scope of the present invention, when can doing a little change and retouching, therefore scope of patent protection of the present invention must be looked the appended claim person of defining of this specification and is as the criterion.

Claims (10)

1. a front-open wafer box comprises a box body, is made up of an end face and a bottom surface of pair of sidewalls and adjacent this oppose side wall; And form an opening in a side, and another side of this opening forms a rear wall relatively, on this oppose side wall, respectively disposes a strutting piece module with ccontaining a plurality of wafers simultaneously; And respectively dispose an inflatable strutting piece module in this oppose side wall and this rear wall adjacent; And a body, having an outer surface and an inner surface, this body combines with this opening of this box body with this inner surface; In order to protect these inner a plurality of wafers of this box body, it is characterized in that: this front-open wafer box:

Each this inflatable strutting piece module has a buffering air chamber and disposes an air inlet in an end of this buffering air chamber; This air inlet is connected with an air valve of this bottom surface; This inflatable strutting piece module in the face of disposing an outlet passageway on this opening direction and disposing a slit in a side of this outlet passageway; Have a gas channel between this outlet passageway and this buffering air chamber so that this outlet passageway and this buffering air chamber can be interconnected, and on a side of this slit the configuration a plurality of perpendicular to this slit spaced ribs.

2. front-open wafer box as claimed in claim 1 is characterized in that this slit is partitioned into a plurality of gas outlets by a plurality of divider upright.

3. front-open wafer box as claimed in claim 1 is characterized in that, becomes big gradually to last under being shaped as of this slit.

4. front-open wafer box as claimed in claim 1 is characterized in that, further forms a plurality of transverse joints in this slit longitudinal extension, and has a spacing between said a plurality of transverse joint.

5. front-open wafer box as claimed in claim 1 is characterized in that, this gas channel is disposed at the end that this buffering air chamber has this air inlet.

6. front-open wafer box as claimed in claim 1 is characterized in that this gas channel is disposed at the opposite end of this buffering air chamber.

7. front-open wafer box as claimed in claim 1 is characterized in that, further disposes venthole between the ribs that these a plurality of perpendicular separations are arranged.

8. front-open wafer box as claimed in claim 1 is characterized in that this slit can spray a gas, and this gas is by selecting one or combine in the following group: inert gas, dry cold air and nitrogen.

9. front-open wafer box as claimed in claim 1 is characterized in that, the structure that this inflatable strutting piece module is formed in one.

10. a front-open wafer box comprises a box body, is made up of an end face and a bottom surface of pair of sidewalls and adjacent this oppose side wall; And form an opening in a side, and another side of this opening forms a rear wall relatively, on this oppose side wall, respectively disposes a strutting piece module with ccontaining a plurality of wafers simultaneously; And respectively dispose an inflatable strutting piece module in this oppose side wall and this rear wall adjacent, and a body, an outer surface and an inner surface had; This body combines with this opening of this box body with this inner surface; In order to protect these inner a plurality of wafers of this box body, it is characterized in that this front-open wafer box:

Each this inflatable strutting piece module comprises a main body; This main body has a buffering air chamber and disposes an air inlet in an end of this buffering air chamber; This air inlet is connected with an air valve of this bottom surface; And the ribs and that a plurality of perpendicular separations of a row are arranged is arranged the limited part that a plurality of perpendicular separations are arranged; Make those these a plurality of wafers of strutting piece module together support on these a plurality of ribs and this a plurality of limited parts and this oppose side wall; Wherein between these a plurality of ribs and these a plurality of limited parts, dispose an outlet passageway, and dispose a slit, have a gas channel between this outlet passageway and this buffering air chamber so that this outlet passageway and this buffering air chamber can be interconnected in a side of this outlet passageway.

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