CN102467467A - Message exchange device and message exchange method for communication standard of semiconductor equipment - Google Patents
Message exchange device and message exchange method for communication standard of semiconductor equipment Download PDFInfo
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Abstract
A message exchange device and a message exchange method of semiconductor equipment communication standard are provided, the message exchange device comprises an SECS-II message communication part, a translation part and an information storage device access part, and also comprises at least one set of data structure file and a message format file for defining the message content and format of the SECS-II message. The translating part translates the SECS-II message into data of various information storage formats of the information storage device according to the data structure file and the message format file, and translates the data of various information storage formats of the information storage device into the SECS-II message, so that the machine automation program and the information storage device can exchange messages through the message exchange device. The application of the message exchange method in the message exchange device not only can save the cost of program development, but also has higher system stability and industrial benefit.
Description
Technical field
The application relates to a kind of communication switching device and information exchange method of semiconductor equipment communication standard, and is especially a kind of through revising communication switching device and the information exchange method that enactment document promptly has the semiconductor equipment communication function.
Background technology
Press; In order to make semi-conductive manufacture process more efficient; The semiconductor manufacturing factory merchant is through special communication protocol; With control and managing semiconductor board; For example: (Semiconductor Equipment and Material International, (SEMI Equipment Communication Standards, the board equipment that SECS) has become semiconductor industry carry out the communication standard that adopts when automated production and production data are collected to the semiconductor equipment communication standard of SEMI) being formulated by semiconductor equipment and materials institute.
At present; Except semiconductor industry board equipment uses; The semiconductor equipment communication standard also be applied in large quantities photoelectricity, light emitting diode (Light Emitting Diode, LED), the board equipment automatization of industry such as sun power produces on the communication process of collecting with production data.Generally speaking; Desire to make board equipment to have the SECS communication function; The research and development part must be earlier with reference to client product specification (spec) that provides and the SECS communication specification file of desiring to carry out; Carry out program code and write exploitation and test, thereafter, board equipment side has the SECS communication function that meets customer demand.
Yet this kind research and development mode not only need expend more time, money and human cost and carry out system development and test, more need have the programmer of program development ability and SECS professional knowledge and practical experience simultaneously concurrently.Secondly, through the signal procedure of program code writing exploitation, the initial stage has potential mistake easily and takes place, and has influence on the stability of board device fabrication operation.SECS signal procedure after exploitation is accomplished does not also possess enough ductility (extensibility) and elasticity (flexibility); That is to say; The expansion of follow-up SECS communication function is difficult for modification, and the research staff must reach the purpose that expands or revise the SECS communication function through the program code of revising signal procedure once more.
Based on above reason, how to solve the known program code that utilizes and write shortcoming and inconvenience that exploitation SECS signal procedure is produced, press for one of problem of solution at present for the correlative technology field person in fact.
Summary of the invention
In view of above problem, the application is to provide a kind of communication switching device and information exchange method of semiconductor equipment communication standard, uses the existing problem of prior art that solves.According to one of embodiment of the application, the host side (Host) that the communication switching device is fit to be installed on the semiconductor equipment board end with information-storing device or has information-storing device makes to possess the SECS communication function between board end and the host side.
The application relates to a kind of semiconductor equipment communication standard (SEMI Equipment Communication Standards; SECS) communication switching device; According to one of embodiment of the application, this communication switching device comprises: a SECS-II message Department of Communication Force, an enactment document (configuration file), are translated a portion and an information-storing device access portion.SECS-II message Department of Communication Force is responsible for the reception and the transmission of SECS-II message; Enactment document comprises in order to an at least one group of data structure file of definition SECS-II message content and form and a message format file; The portion that translates is interpreted as the data of the format information memory that meets information-storing device according to data structure file and message format file defined SECS-II message content and form with the SECS-II message, and the data set of being stored in the information-storing device is translated into the SECS-II message; Information-storing device access portion is responsible for information-storing device is carried out the access of data.
According to one of embodiment of the application; Data structure file wherein is in order to definition SECS-II message content, and comprise a plurality of fields of the following stated: index file, information flow (Stream), function (Function), SECS-II message label, item label, index of articles, storage position information, data length, SECS-II data type, end field and message drive the memory location.
According to one of embodiment of the application, data structure file wherein can be more than one file, be responsible for definition the SECS-II message content and the identification code that might receive and send, and storage position information.
According to one of embodiment of the application; Message format file wherein is according to SECS communication specification file; Utilize the message format of unified message format (Unified Message Format) definition SECS-II message; And be connected in series with data structure file, provide the portion of translating to translate and decipher according to the group that data structure file and message format file defined SECS-II message content and form carry out the SECS-II message.
According to one of embodiment of the application; Wherein enactment document comprises: one first data structure file, one second data structure file and a message format file; The SECS-II message content that first data structure file definition SECS-II message Department of Communication Force wherein receives, the SECS-II message content that second data structure file definition SECS-II message Department of Communication Force sends.
The application comprises that also (SEMI Equipment Communication Standards, information exchange method SECS) is suitable for an information-storing device is translated and write to the SECS-II message a kind of semiconductor equipment communication standard.This information exchange method comprises: set up an enactment document (configuration file), this enactment document has an at least one group of data structure file and a message format file, with the content and the form of definition SECS-II message; According to the content and the form of data structure file and the defined SECS-II message of message format file, a SECS-II message is interpreted as one first data message of the format information memory that meets information-storing device; And the first data message after the decipher write this information-storing device.
According to one of embodiment of the application's information exchange method; Its step also comprises: according to the content and the form of data structure file and the defined SECS-II message of message format file, the one second data message group of being stored in this information-storing device is translated into one the 2nd SECS-II message; And send the two SECS-II message of group after translating.
SECS communication switching device and information exchange method that the application proposes; Provide by data structure file and be connected in series the enactment document that forms with the message format file; The SECS communication specification file content that makes the research staff only need to provide according to the client carries out the setting of enactment document; After setting completion, board equipment promptly has the SECS communication function that meets customer demand.
According to communication switching device and information exchange method that the application proposes, not only the stability of system is high, setting and mode of operation intuition simply, compared to the known mode of utilizing the program code writing, have more advantage with low cost, that industrial benefit is big etc.
Above explanation and the explanation of following embodiment about teachings herein is in order to demonstration and spirit and the principle of explaining the application, and the application's patent claim explanation further is provided.
Description of drawings
Fig. 1 is the communication switching device according to the semiconductor equipment communication standard of the application one embodiment, its System Application Architecture figure.
Fig. 2 is the System Application Architecture figure that has an above file according to the data structure file of Fig. 1.
Fig. 3 A and Fig. 3 B are respectively the synoptic diagram according to first data structure file and second data structure file of the application embodiment.
The communication switching that Fig. 4 A and Fig. 4 B are respectively according to the application embodiment is installed on the system architecture synoptic diagram when receiving the SECS-II message and sending the SECS-II message.
Fig. 5 is the communication switching device according to the semiconductor equipment communication standard of another embodiment of the application, its System Application Architecture figure.
Fig. 6 A is the flow chart of steps according to the information exchange method of the semiconductor equipment communication standard of the application embodiment.
Fig. 6 B is the flow chart of steps according to the another embodiment of the information exchange method of Fig. 6 A.
[main element symbol description]
10 the one SECS-II messages
12 the 2nd SECS-II messages
20 first data messages
The 20a drive signal
The 20b data content
22 second data messages
The 22a drive signal
The 22b data content
100 communication switching devices
110 SECS-II message Department of Communication Forces
120 translate portion
130 information-storing device access portions
140 data structure file
140a first data structure file
140b second data structure file
150 message format files
160 message structures
200 board automated procedures
300 information-storing devices
The 300a message drives the memory block
The 300b information storage area
Embodiment
Below in embodiment, be described in detail the application's detailed features and advantage; Its content is enough to make those skilled in the art to understand the application's technology contents and implements according to this; And according to the disclosed content of this instructions, claims and accompanying drawing, those skilled in the art can understand purpose and the advantage that the application is correlated with easily.
Fig. 1 is according to the semiconductor equipment communication standard of the application one embodiment (SEMI Equipment Communication Standards, communication switching device SECS), its System Application Architecture figure.The communication switching device 100 that the application proposes is applicable to board automated procedures (Equipment Automatic Program; EAP) 200 and one information-storing device 300 carries out the SECS-II communication switching, and wherein SECS-II is defined as semiconductor equipment communication standard message.
Information-storing device 300 can be but be not limited to programmable logic controller (PLC) (Programmable Logic Controller; PLC), based on the industry standard interface of object linking and embedded technology (Object Linking and Embedding (OLE) for Process Control, server OPC) or database server one of them.The application of communication switching device 100 is not as limit.In other embodiment of the application; The host side (Host) that communication switching device 100 also can be installed on the semiconductor equipment board end with information-storing device or have information-storing device; It is for example: in personal computer, flat computer, portable computer device, the embedded system, to make these equipment have meeting the communication function of SECS-II communication specification.For ease of specifying, below be applied to the SECS-II communication switching between board automated procedures 200 and the information-storing device 300, as the explanation of the application's preferred embodiment with communication switching device 100.
SECS-II message Department of Communication Force 110 is electrically connected at board automated procedures 200, and is suitable for carrying out with board automated procedures 200 reception and the transmission of SECS-II message.Translating portion 120 sets up electric signal with SECS-II message Department of Communication Force 110, information-storing device access portion 130, data structure file 140 with message format file 150 and is connected (electrical signals connection); And can make up with form with message format file 150 defined SECS-II message contents according to data structure file 140 and be connected in series, to form message structure 160 corresponding to the SECS-II message.Wherein, data structure file 140 can comprise one or more file, with the message content of definition SECS-II message.150 message format of being responsible for defining the SECS-II message of message format file according to SECS communication specification file.For example; Message format file 150 can be according to unified message format (Unified Message Format); For example: SECS Message Language (or claiming the SML form) sets the message format of SECS message; With with after data structure file 140 is connected in series, the content and the form of definition SECS-II message are formed the message structure 160 corresponding to the SECS-II message in the lump.
Fig. 2 is the System Application Architecture figure that has an above file according to the data structure file of Fig. 1.As shown in the figure; Data structure file 140 comprises one first data structure file 140a and one second data structure file 140b; When SECS-II message Department of Communication Force 110 receives the SECS-II message 10 that board automated procedures 200 send; Translate content and the form of portion 120 according to the first data structure file 140a and message format file 150 defined SECS-II messages; The one SECS-II message 10 is interpreted as one first data message 20, and information-storing device access portion 130 can be with the first data message, 20 writing information memory storages 300.
When sending one second data message 22 when information-storing device 300; Translating portion 120 also can be according to the content and the form of the second data structure file 140b and message format file 150 defined SECS-II messages; The second data message 22 is compiled as one the 2nd SECS-II message 12, and SECS-II message Department of Communication Force 110 can be sent to board automated procedures 200 with the 2nd SECS-II message 12.
Wherein, when SECS-II message Department of Communication Force 110 received the SECS-II message 10 that board automated procedures 200 send, the first data structure file 140a defined the message content of a SECS-II message 10; As for when SECS-II message Department of Communication Force 110 desires to send the 2nd SECS-II message 12, the second data structure file 140b is then in order to define the message content of the 2nd SECS-II message 12.
In detail, the first data structure file 140a and the second data structure file 140b fundamental purpose are possibly receive and the SECS-II message content that possibly transmit in order to definition message switch 100 respectively, respectively following form:
It has field separately: index file (Index), information flow (Stream), function (Function), SECS-II message label (Message Name), index of articles (Tag Index), item label (Tag Name), data storage location (Data Address), data length (Data Length), SECS-II data type (SECS Data Type), end field (End Item Bit) drive memory location (Event Dada Address/Trigger Address) with message; Wherein, Message among the first data structure file 140a and the second data structure file 140b drives the memory location; Write the position of data respectively in order to definition, and the data position of reading.
According to the application's embodiment, the data storage location of the first data structure file 140a is can be written into the storage position information in the information storage area in order to definition SECS-II message through the data after the decipher.And the data that store the message of the first data structure file 140a and second data structure file 140b driving memory location are when change; Then can notify the board device fires action that receives or send the SECS-II message respectively, and this normally define reception or the transmission action which incident can be used to trigger the SECS-II message by the Event triggered program in the board equipment.
Reguest_Online：S1F79W
<B[1]tag＝CMDCD>
EQ_Online_Rpy：S1F80
<B[1]tag＝GRANT_S1F80>
And can be with after the message label (Message Name) of the first data structure file 140a and the second data structure file 140b combines; Serial connection forms the message structure 160 corresponding to the SECS-II message; Its field association comprises: message label (Message Name) is in order to combine two relevant messages, " Request_Online " in the for example above-mentioned message format file 150 and " EQ_Online_Rpy "; Index file (Index) is in order to combine two relevant data structure file 140; If have only a data structured file 140; Then index file still can be endowed an index value, just can not find another data structure file with same index value 140; Item label (Tag Name) then is in order to combine the related field in two relevant data structure file 140.
Hold the embodiment with the application, then the index file of the first data structure file 140a and the second data structure file 140b is in order to mutual pairing, uses to cooperate a SECS-II message 10 and the 2nd SECS-II message 12.The first data structure file 140a and the Stream of the second data structure file 140b and the Stream and the Function part of Function field corresponding SECS-II message 10 of difference and the 2nd SECS-II message 12.The SECS-II message label of the first data structure file 140a and the second data structure file 140b is the message label of definition message switch 100 a SECS-II message 10 that receives and the 2nd SECS-II message 12 of sending respectively.The identification label of responsible respectively definition the one SECS-II message 10 projects of the item label of the first data structure file 140a and the second data structure file 140b and the 2nd SECS-II message 12 projects (for example: the B in the message format file 150 [1] tag=CMDCD).The index of articles of the first data structure file 140a and the second data structure file 140b is responsible for the identification label index value of definition the one SECS-II message 10 projects and the 2nd SECS-II message 12 projects respectively.For example, when in fact this project has many tab indexes values (for example: have 25 wafer in the wafer cassette (Cassette)), then index of articles can be decided to be 0 to 24.
Mainly define the memory location in a SECS-II message 10 corresponding writing information memory storage corresponding stored districts and the memory location that the 2nd SECS-II message 12 corresponding informance memory storage corresponding stored districts read information as for the first data structure file 140a respectively with the data storage location of the second data structure file 140b.The data length of the first data structure file 140a and the second data structure file 140b is respectively in order to define the data length of a SECS-II message 10 projects and the 2nd SECS-II message 12 projects.In order to define the SECS-II data type of a SECS-II message 10 projects and the 2nd SECS-II message 12 projects, whether its end field has separately set the sign of completion respectively to the SECS-II data type of the first data structure file 140a and the second data structure file 140b in order to the message project of judging a SECS-II message 10 and the 2nd SECS-II message 12 respectively.At last, the first data structure file 140a drives the memory location with the message of the second data structure file 140b and then defines the corresponding memory location in information-storing device corresponding stored district and the memory location that communication switching device 100 driving transmissions the 2nd SECS-II message 12 corresponds to information-storing device corresponding stored district of writing to of a SECS-II message 10 driving communication switching devices 100 processing respectively.
Fig. 3 A and Fig. 3 B are respectively the synoptic diagram according to first data structure file and second data structure file of the application embodiment.Wherein, The first data structure file 140a and the second data structure file 140b comprise fields such as its index file, Stream, Function, SECS-II message label, SECS-II data type, item label, index of articles, data length, end field separately, the message content of the 2nd SECS-II message 12 that a SECS-II message 10 that receives with definition message switch 100 respectively and communication switching device 100 send.
Shown in Fig. 3 A; When the direction of the first data structure file 140a is defined as E ← H; The second data message 22 of promptly representing host side (Host) to be sent is through coded program; And becoming the SECS-II message 10 that supply equipment end (Equipment) is received, data content wherein then is available for users to self-defined.For example, when instruction code was 00H, main frame can require equipment to transfer connection state to; And instruction code is when being 01H, and then main frame is notified in definition when equipment transfers connection state to.
Shown in Fig. 3 B; When being defined as E → H as for direction as the second data structure file 140b; The second data message 22 of then representing equipment end (Equipment) to be sent is through decoding program; And become a SECS-II message 10 that supplies host side (Host) to be received, and that data content wherein is available for users to equally is self-defined.For example, when instruction code when authorizing code and be all 00H, the device replied main frame is for can transfer connection state to; And when instruction code is 00H, when authorizing code and being 01H, equipment is then replied main frame can't transfer connection state to.More than be merely relevant for the definition of data content and be used for explaining the example that present techniques is takeed, be not in order to limit the application's invention scope.Therefore; The deviser can be according to specification (spec) and the communication specification that the client provided; Make or revise the message content of the first data structure file 140a and the second data structure file 140b by oneself; After linking with 150 combinations of message format file again, define the content and the form of SECS-II message in the lump, meet the message structure 160 of this SECS-II message communication specification with formation.
It should be noted that the first data structure file 140a and the second data structure file 140b optionally merge into same data structure file, and distinguish, perhaps be divided into different blocks hereof and also can through increasing field hereof newly.
Receive and the explanation of sending the SECS-II message about communication switching device 100, please know clearly and read following Fig. 4 A and Fig. 4 B.The communication switching that Fig. 4 A and Fig. 4 B are respectively according to the application embodiment is installed on the system architecture synoptic diagram when receiving the SECS-II message and sending the SECS-II message.Shown in Fig. 4 A; When SECS-II message Department of Communication Force 110 receives a SECS-II message 10; Translate portion 120 at first according to the content and the form of the first data structure file 140a and message format file 150 defined SECS-II messages, a SECS-II message 10 is decoded as the first data message 20.Wherein, the first data message 20 comprises drive signal 20a and data content 20b, and data content 20b can be transmitted and be temporary in the information storage area 300b in the information-storing device 300 earlier.Drive signal 20a then drives the storing value of memory block 300a before receiving the first data message 20 in order to the message in the modification information memory storage 300.Therefore; After this storing value is changed by drive signal 20a; Information-storing device 300 promptly can remove to read the data content 20b that is temporary in the first data message 20 among the information storage area 300b in advance; At this, accomplish a SECS-II message 10 is decoded as the first data message 20, and the step of writing information memory storage 300.
Continuous see also Fig. 4 B, when information-storing device 300 sends the second data message 22, also comprise drive signal 22a and data content 22b in the second data message 22.Wherein, data content 22b likewise also can be transmitted earlier and be temporary among the information storage area 300b, and drive signal 22a then drives the storing value of memory block 300a before sending out the second data message 22 in order to the change message.Therefore, after this storing value was changed by drive signal 22a, information-storing device access portion 130 promptly can remove to read the data content 22b that is temporary in the second data message 22 among the information storage area 300b in advance.Thereafter; Translating portion 120 can be according to the content and the form of the second data structure file 140b and message format file 150 defined SECS-II messages; The second data message 22 is encoded to the 2nd SECS-II message 12, and SECS-II message Department of Communication Force 110 continues and can the 2nd SECS-II message 12 be sent to board automated procedures 200, at this; Completion is encoded to the 2nd SECS-II message 12 with the second data message 22, and is sent to the step of board automated procedures 200.
Embodiment according to the application; SECS-II message Department of Communication Force 110, translate portion 120 and information-storing device access portion 130; Can be utilize software program code the real function of doing out; That is to say, itself promptly be a kind of SECS communication application program that is ductile according to the communication switching device 100 of the application embodiment.
Fig. 5 is semiconductor equipment communication standard (SEMI Equipment Communication Standards, communication switching device SECS), its System Application Architecture figure according to another embodiment of the application.As shown in the figure, communication switching device 100 is not limited to the SECS-II communication switching between board automated procedures and the information-storing device 300, also can be applicable to the SECS-II communication switching between each communication switching device 100 levels.That is to say; Another embodiment according to the application; SECS-II message through translating after portion 120 compiles is not limited to be sent to semiconductor equipment board end (for example board automated procedures), also can be sent to another host side with information-storing device 300.
Fig. 6 A is semiconductor equipment communication standard (SEMI Equipment Communication Standards, the flow chart of steps of information exchange method SECS) according to the application embodiment.This kind information exchange method is applicable to aforesaid communication switching device 100; Being installed on semiconductor equipment board end with information-storing device or host side (for example: personal computer, flat computer, portable computer device, embedded system), to make these equipment have meeting the communication function of SECS communication specification with information-storing device.Information exchange method also applicable to the board automated procedures (Equipment Automatic Program, EAP) and information-storing device (for example: the SECS-II communication switching database servers such as OPC, PLC).Below be applied to of the explanation of aforesaid communication switching device 100 with information exchange method as the application one embodiment, so it is used not as limit.
Please consult Fig. 2 and Fig. 6 A in the lump, the information exchange method that the application proposes may further comprise the steps S602 to S606:
Step S602: set up an enactment document, this enactment document has an at least one group of data structure file 140 and a message format file 150, with the content and the form of definition SECS-II message;
Step S604:, a SECS-II message 10 is interpreted as the first data message 20 of the format information memory that meets information-storing device 300 according to the content and the form of data structure file 140 with message format file 150 defined SECS-II messages; And
Step S606: with the first data message, the 20 writing information memory storages 300 after the decipher.
Wherein, according to one of embodiment of the application, data structure file 140 can comprise the first data structure file 140a, the message content of a SECS-II message 10 that receives with definition message switch 100.150 of message format files are according to unified message format (Unified Message Format), for example: SECS Message Language (or claiming the SML form) sets the message format of a SECS-II message 10.Data structure file 140 promptly is connected in series content and the form that has defined the SECS-II message with message format file 150.Then; The pass is interpreted as a SECS-II message 10 at step S604 to S606 the program of the first data message 20 and writing information memory storage 300; Then be same as the explanation of the application's earlier figures 4A, so no longer repeat at this relevant for communication switching device 100 embodiment.
Fig. 6 B is the flow chart of steps according to the another embodiment of the information exchange method of Fig. 6 A, and it comprises step S602 to S606, and step S608 and step 610 are following:
Step S608:, the second data message of being stored in the information-storing device 300 is translated into the 2nd SECS-II message 12 for 22 groups according to the content and the form of data structure file 140 with message format file 150 defined SECS-H messages; And
Step S610: the 2nd SECS-II message 12 after group translated is sent to board end or host side.
Wherein, Another embodiment according to the application; Data structure file 140 more can comprise the second data structure file 140b; The message content of the 2nd SECS-II message 12 of sending with definition message switch 100 is be connected in series content and the form that the back defines the SECS-II message with message format file 150 in the lump.Then; The pass is translated into the 2nd SECS-II message 12 with 22 groups of the second data messages and is sent to the program of board end (for example board automated procedures) or host side at step S608 to S610; Then be same as the explanation of the application's earlier figures 4B, so no longer repeat at this relevant for communication switching device 100 embodiment.
Therefore; In sum, the communication switching device of the semiconductor equipment communication standard that proposes according to the application, the communication switching device is when starting; The portion of translating can be written into data structure file and the message format file that meets customer demand, and serial connection defines the content and the form of SECS-II message according to this.At this, the communication switching device can have the SECS communication function that meets customer demand.
Secondly; The information exchange method of the semiconductor equipment communication standard that proposes according to the application; The user can be through the mode of direct modification data structure file and message format file; Make the communication switching device under the prerequisite that does not need again the writing system program code, can have the SECS communication function that meets customer demand immediately.
In sum; Communication switching device and information exchange method according to the application's proposition; Not only its system stability is high, setting is simple with the mode of operation intuition, compared to the known mode of utilizing the program code writing, have more with low cost, industrial benefit big, the advantage of saving importing time and cost etc.
Claims (18)
1. the communication switching device of a semiconductor equipment communication standard SECS; Be fit to be installed on one have an information-storing device semiconductor equipment board end or have the host side of this information-storing device; Make this have between semiconductor equipment board end and this host side with this information-storing device of an information-storing device and possess the SECS communication function, this communication switching device comprises:
One SECS-II message Department of Communication Force is responsible for carrying out the reception and the transmission of a SECS-II message;
One enactment document has an at least one group of data structure file and a message format file, and with content and the form that defines this SECS-II message, wherein SECS-II is defined as semiconductor equipment communication standard message;
One translates portion; According to the content of this SECS-II message of this data structure file and this message format document definition and form this SECS-II message is interpreted as the data of the format information memory of this information-storing device, and the data set of the format information memory of this information-storing device is translated into this SECS-II message; And
One information-storing device access portion sets up electric signal with this portion of translating and is connected,
This information-storing device access portion is responsible for this information-storing device is carried out the access of data.
2. communication switching device as claimed in claim 1, wherein this message format file utilizes the message format of unified this SECS-II message of message format definition according to SECS communication specification file.
3. communication switching device as claimed in claim 2; Wherein this data structure file comprises a plurality of fields: index file, information flow, function, SECS-II message label, item label, index of articles, storage position information, data length, SECS-II data type, end field and message drive the memory location; The message format of this this SECS-II message of message format document definition; And be connected in series with the message label of this data structure file, the group that provides this portion of translating to carry out this SECS-II message is translated and decipher.
4. communication switching device as claimed in claim 1; Wherein this data structure file comprises one first data structure file; When this SECS-II message Department of Communication Force receives one the one SECS-II message; This translates content and the form of portion according to this data structure file and defined this SECS-II message of this message format file, and a SECS-II message is interpreted as one first data message, and this information-storing device access portion writes this information-storing device with this first data message.
5. communication switching device as claimed in claim 4, wherein the message content of a SECS-II message of this this SECS-II message Department of Communication Force reception of first data structure file definition.
6. communication switching device as claimed in claim 4; Wherein this first data message comprises a drive signal and a data content; This drive signal is in order to change the storing value of this information-storing device before receiving this first data message; When this storing value by after changing, this information-storing device reads this data content from this first data message of this information-storing device access portion output.
7. communication switching device as claimed in claim 1; Wherein this data structure file comprises one second data structure file; When this information-storing device sends one second data message; This translates content and the form of portion according to this data structure file and defined this SECS-II message of this message format file; This second data message is compiled as one the 2nd SECS-II message, and this SECS-II message Department of Communication Force is sent to this semiconductor equipment board end with an information-storing device with the 2nd SECS-II message, and maybe this has the host side of this information-storing device.
8. communication switching device as claimed in claim 7, wherein the message content of the 2nd SECS-II message of this this SECS-II message Department of Communication Force transmission of second data structure file definition.
9. communication switching device as claimed in claim 7; Wherein this second data message comprises a drive signal and a data content; This drive signal is in order to change the storing value of this information-storing device before sending this second data message; When this storing value by after changing, this information-storing device access portion reads this data content of this second data message of sending from this information-storing device.
10. communication switching device as claimed in claim 1, wherein this information-storing device be programmable logic controller (PLC) PLC, based on the server of object linking and the industry standard interface that embeds the OLE technology or database server one of them.
11. the information exchange method of a semiconductor equipment communication standard SECS; Be fit to be installed on one have an information-storing device semiconductor equipment board end or have the host side of this information-storing device; Make this have between semiconductor equipment board end and this host side with this information-storing device of an information-storing device and possess the SECS communication function, this information exchange method comprises:
Set up an enactment document, this enactment document has an at least one group of data structure file and a message format file, and with the content and the form of definition SECS-II message, wherein SECS-II is defined as semiconductor equipment communication standard message;
According to the content and the form of this data structure file and the defined SECS-II message of this message format file, one the one SECS-II message is interpreted as one first data message of the format information memory that meets this information-storing device; And
This first data message after the decipher is write this information-storing device.
12. information exchange method as claimed in claim 11 also comprises:
Content and form according to this data structure file and the defined SECS-II message of this message format file are translated into one the 2nd SECS-II message with the one second data message group of being stored in this information-storing device; And
The 2nd SECS-II message after group translated is sent to this semiconductor equipment board end with an information-storing device, and maybe this has the host side of this information-storing device.
13. information exchange method as claimed in claim 12, wherein this message format file utilizes the message format of unified message format definition the one SECS-II message and the 2nd SECS-II message according to SECS communication specification file.
14. information exchange method as claimed in claim 12; This data structure file comprises a plurality of fields: index file, information flow, function, SECS-II message label, item label, index of articles, storage position information, data length, SECS-II data type, end field and message drive the memory location; The message format of this message format document definition SECS-II message; And be connected in series with the message label of this data structure file, provide the group of SECS-II message to translate and decipher.
15. information exchange method as claimed in claim 12; This data structure file comprises one first data structure file and one second data structure file; The message content of the SECS-II message that this first data structure file definition receives, the message content of the 2nd SECS-II message that this second data structure file definition is sent.
16. information exchange method as claimed in claim 12; Wherein this second data message comprises a drive signal and a data content; This drive signal is in order to change the storing value of this information-storing device before sending this second data message; When this storing value by after changing, this semiconductor equipment board end with an information-storing device maybe this host side with this information-storing device is received from this data content of this second data message that this information-storing device sends.
17. information exchange method as claimed in claim 11; Wherein this first data message comprises a drive signal and a data content; This drive signal is in order to change the storing value of this information-storing device before receiving this first data message; When this storing value by after changing, this information-storing device reads this data content of this first data message.
18. information exchange method as claimed in claim 11, wherein this information-storing device can be programmable logic controller (PLC) PLC, based on the server of object linking and the industry standard interface that embeds the OLE technology or database server one of them.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW099139393A TWI408922B (en) | 2010-11-16 | 2010-11-16 | Semi equipment communication standards communication device and method thereof |
| TW099139393 | 2010-11-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102467467A true CN102467467A (en) | 2012-05-23 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010105763557A Pending CN102467467A (en) | 2010-11-16 | 2010-12-01 | Message exchange device and message exchange method for communication standard of semiconductor equipment |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US20120124066A1 (en) |
| CN (1) | CN102467467A (en) |
| TW (1) | TWI408922B (en) |
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| CN103607340A (en) * | 2013-10-23 | 2014-02-26 | 上海华力微电子有限公司 | SECS/GEM message exchange equipment and SECS/GEM message exchange method |
| CN108965271A (en) * | 2018-07-02 | 2018-12-07 | 汕头超声印制板（二厂）有限公司 | A kind of SECS/GEM means of communication |
| CN114281035A (en) * | 2021-12-03 | 2022-04-05 | 北京京仪自动化装备技术股份有限公司 | Production safety operation and maintenance monitoring and management system |
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| CN103513639B (en) * | 2013-10-08 | 2015-10-07 | 周炳君 | Based on the communication means of label in the Long-distance Control of semiconductor equipment |
| KR102233812B1 (en) | 2014-07-30 | 2021-03-31 | 삼성전자주식회사 | Method and system for processing a data from equipment |
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Also Published As
| Publication number | Publication date |
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| US20120124066A1 (en) | 2012-05-17 |
| TW201223208A (en) | 2012-06-01 |
| TWI408922B (en) | 2013-09-11 |
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