CN103607340A - SECS/GEM message exchange equipment and SECS/GEM message exchange method - Google Patents
SECS/GEM message exchange equipment and SECS/GEM message exchange method Download PDFInfo
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Abstract
The invention relates to the technical field of automation control in the semiconductor manufacturing process and particularly relates to a piece of SECS/GEM message exchange equipment which is used in communication between semiconductor equipment and a host. The SECS/GEM message exchange equipment comprises a configuration file manager, an equipment-end SECS/GEM driver, an equipment message buffer, a host-end SECS/GEM driver, a host message buffer and a transponder. The invention further relates to an SECS/GEM message exchange method. By the adoption of the equipment and the method of the invention, one piece of semiconductor equipment can be connected with a plurality of hosts and is enabled to simultaneously communicate with a plurality of hosts, thus increasing the message exchange rate and improving the production efficiency; effective decoupling can be carried out in the case of a plurality of upper systems, which enables the coupling degree of the systems to be the minimum and facilitates system maintenance; and the pressure of an EAP system is reduced and the time delay of the upper systems in data receiving is shortened.
Description
Technical field
The present invention relates to the technical field of automatic control in semiconductor fabrication, relate in particular to communicating by letter between semiconductor equipment and main frame, a kind of SECS(Semiconductor Equipment Communication Standard specifically, semiconductor equipment communication standard)/GEM(Generic Equipment Model, common apparatus model) message equipment and method.
Background technology
SECS/GEM, HSMS(High speed SECS Message System, high speed SECS message system) be by SEMI(Semiconductor Equipment and Materials Institute, semiconductor equipment and materials association) the semicon industry communication standard protocol formulated, most semiconductor equipments is all in accordance with this agreement at present, operate in the EAP(Equipment Automation Program on main frame (Host), equipment automatization program) system communicates by this agreement and equipment, realize and revise device parameter, assign instruction etc., thereby control appliance operation, also can collect metric data, equipment alarm etc.
But common CIM(Computer Integrated Manufacturing, computer integrated manufacturing system) upper system (as: FDC, APC, SPC, RMS, MES etc.) need to collect a large amount of real time datas from equipment, but due to SECS, HSMS is point-to-point communication protocol, so current scheme is to be all connected to collect data with semiconductor equipment by EAP system substantially, and reports and submits to upper system, there is following defect in this scheme:
1, EAP system pressure is very large, may cause system operation slowly, thereby impact is produced;
2, the data delay that upper system is received, has certain risk to production;
3, all upper systems all depend on EAP system, and when EAP system breaks down, all upper systems all cannot be worked;
4, because all upper systems all depend on EAP system, the height between this system is coupled and makes troubles to system maintenance;
5, for some early stage FAB(wafer factories), may cannot find the source code of EAP, EAP is as same camera bellows, cannot revise, but owing to being point-to-point communication, equipment can only be communicated by letter with a peripheral system, if increase new upper system (as FDC etc.), almost cannot realize.
Chinese patent (CN101552794A) discloses a kind of SECS communication means based on SEMI standard.Comprise that HSMS communication module realizes equipment to the connection of main frame, and carry out data transmission step by network; And carry out SECS II encoding and decoding by SECS protocol module, implementation data is collected, equipment is controlled and abnormality processing step.Adopt this invention can realize the automatic management of semiconductor factory, can meet the high vacuum in fabrication of semiconductor device, high cleanliness, the high characteristic requirements such as dustless, can make different apparatus control system standardization, enhance productivity, reduce production costs.
Chinese patent (CN102467467A) discloses a kind of communication switching device and information exchange method of semiconductor equipment communication standard, communication switching device comprises SECS-II message Department of Communication Force, translates portion and information-storing device access portion, wherein also comprises defining at least one group of data structure file and a message format file of the message content of SECS-II message and form.The portion that translates translates to SECS-II message the data of the format information memory of various information-storing devices according to this data structure file and message format file, and the data of the various format information memories of information-storing device are translated to SECS-II message, to make between board automated procedures and information-storing device, can carry out communication switching by communication switching device.Application information exchange method, at this kind of communication switching device, not only can be save the cost of program development, has more the higher stability of a system and industrial benefit simultaneously.
Above-mentioned two patents are the unresolved defect of communicating by letter and bringing between semiconductor equipment and upper system of being undertaken by EAP system all.
Summary of the invention
For the problem of above-mentioned existence, the present invention discloses a kind of SECS/GEM message equipment and method, to overcome in prior art by EAP system, carries out the defect problem of communicating by letter and bringing between semiconductor equipment and upper system.
To achieve these goals, the present invention adopts following technical scheme:
A SECS/GEM message equipment, is applied to, in communicating by letter between semiconductor equipment and main frame, wherein, comprising:
Profile Manager, for setting the configuration file that carries out message between described semiconductor equipment and described main frame;
Equipment end SECS/GEM driver, for when the described semiconductor equipment transmitting apparatus message, encodes, sends described equipment message; Or for the main frame of the coding message after forwarding is decoded, and the main frame message of decoding is sent to described semiconductor equipment;
Equipment message buffer, for when sending encoding device message, carries out buffer sorting by encoding device message;
Host side SECS/GEM driver, for when described main frame sends main frame message, encodes, sends described main frame message; Or for the message of encoding device after forwarding is decoded, and decoding device message is sent to described main frame;
Main frame message buffer, for carrying out buffer sorting to the message of encoding device after forwarding;
Transponder, for forwarding the message of encoding device after sending according to described configuration file; Or for the main frame of the coding message after sending being forwarded according to described configuration file.
Above-mentioned SECS/GEM message equipment, wherein, also comprise device port and a N host port that is arranged on nearly described host side SECS/GEM driver place that is arranged on nearly described equipment end SECS/GEM driver place, described device port and described host port are all for receiving and send the message data between described semiconductor equipment and described main frame;
Wherein, described device port connects a semiconductor equipment, and described in each, host port connects a main frame, and N described host port connects N platform main frame, make a semiconductor equipment to carry out message with N platform main frame, N is more than or equal to 1 natural number simultaneously.
Above-mentioned SECS/GEM message equipment, wherein, also comprise log manager, described configuration file comprises for the daily record rule configuration file of log recording rule is provided to described log manager, and described log manager is for according to all message daily records between semiconductor equipment described in the log recording regular record of described daily record rule configuration file and described main frame.
Above-mentioned SECS/GEM message equipment, wherein, also comprise filter, described configuration file comprises the filtering rule configuration file that filters proof rule for providing to described filter, described filter for filtering checking the important messages of verifying by filtration according to buffer sorting transmission when forwarding encoding device message according to the filtration proof rule of described filtering rule configuration file.
Above-mentioned SECS/GEM message equipment, wherein, described filter is also provided with for controlling the filter switch of described filter opening and closing, and when described filter switch opens, described filter starts.
Above-mentioned SECS/GEM message equipment, wherein, also comprises message monitoring device, for monitoring in real time the message data between described semiconductor equipment and described main frame.
Above-mentioned SECS/GEM message equipment, wherein, described message monitoring device is also provided with for controlling the pilot switch of described message monitoring device opening and closing, and when described pilot switch is opened, described message monitoring device starts.
Above-mentioned SECS/GEM message equipment, wherein, described configuration file comprises for provide forwarding regular forwarding rule configuration file to described transponder; Described transponder forwards according to the forwarding rule in described forwarding rule configuration file the message of encoding device receiving, or forwards according to the forwarding rule in described forwarding rule configuration file the main frame of the coding message receiving.
A SECS/GEM message switching method, is applied to, in communicating by letter between semiconductor equipment and main frame, wherein, comprise the steps:
S1, sets the configuration file that carries out message between described semiconductor equipment and described main frame;
S2, when described semiconductor equipment transmitting apparatus message, encodes to described equipment message, and encoding device message is carried out to buffer sorting and sent in order; Or when described main frame sends main frame message, described main frame message is encoded, sent;
S3, forwards the message of encoding device after sending according to described configuration file; Or according to described configuration file, the main frame of the coding message after sending is forwarded;
S4, carries out decoding after buffer sorting to the message of encoding device after forwarding, and decoding device message is sent to described main frame; Or the main frame of the coding message after forwarding is decoded, and the main frame message of decoding is sent to described semiconductor equipment.
Above-mentioned SECS/GEM message switching method, wherein, in described step S2 and S4, receives and sends the message data between described semiconductor equipment and described main frame by a device port and N host port;
Wherein, described device port connects a semiconductor equipment, and described in each, host port connects a main frame, and N described host port connects N platform main frame, make a semiconductor equipment to carry out message with N platform main frame, N is more than or equal to 1 natural number simultaneously.
Above-mentioned SECS/GEM message switching method, wherein, in described step S1, described configuration file comprises for the daily record rule configuration file of log recording rule is provided; In described step S2-S4, according to all message daily records between semiconductor equipment described in the log recording regular record in described daily record rule configuration file and described main frame.
Above-mentioned SECS/GEM message switching method, wherein, in described step S1, described configuration file comprises the filtering rule configuration file that filters proof rule for providing; In described step S3-S4, according to the filtration proof rule in described filtering rule configuration file, when forwarding encoding device message, filter checking, and according to buffer sorting, send the important messages of verifying by filtration.
Above-mentioned SECS/GEM message switching method, wherein, in described step S2-S4, monitors the message data between described semiconductor equipment and described main frame in real time.
Above-mentioned SECS/GEM message switching method, wherein, in described step S1, described configuration file comprises for providing forwarding regular forwarding rule configuration file; In described step S3, according to the forwarding rule in described forwarding rule configuration file, forward the message of encoding device receiving, or forward according to the forwarding rule in described forwarding rule configuration file the main frame of the coding message receiving.
Tool of the present invention has the following advantages or beneficial effect:
1, can realize a semiconductor equipment and connect a plurality of main frames, a semiconductor equipment can be communicated by letter with a plurality of main frames simultaneously simultaneously, increase the speed of message, improve production efficiency.
2, effectively decoupling zero in the situation that having a plurality of upper system, makes each upper system degree of coupling minimum, is convenient to system maintenance.
3, reduce the pressure of EAP system, also shortened the delay of upper system when data receiver simultaneously.
4, by the filtering function of filter, can filter as required unwanted message, only send important messages.
5, adopt message monitoring device, can monitor in real time the message data between semiconductor equipment and main frame.
6, can plug and play, for Legacy System substantially without change.
Concrete accompanying drawing explanation
By reading the detailed description of non-limiting example being done with reference to the following drawings, the present invention and feature thereof, profile and advantage will become more apparent.In whole accompanying drawings, identical mark is indicated identical part.Can proportionally not draw accompanying drawing, focus on illustrating purport of the present invention.
Fig. 1 is the structural representation of first embodiment of the invention;
Fig. 2 is the structural representation of second embodiment of the invention.
Embodiment
Below in conjunction with accompanying drawing and specific embodiment, the present invention is further illustrated, but not as limiting to the invention.
The first execution mode of the present invention relates to a kind of SECS/GEM message equipment, be applied in communicating by letter between semiconductor equipment and main frame, as shown in Figure 1, comprise: Profile Manager, the equipment end SECS/GEM driver, equipment message buffer, transponder, main frame message buffer and the host side SECS/GEM driver that connect successively, Profile Manager is also connected with transponder.
Particularly, Profile Manager, for setting the configuration file that carries out message between described semiconductor equipment and described main frame, can also check, modification, Reconfigurations file, automatic loading configuration file during the SECS/GEM message device start of present embodiment, configuration file can reload configuration file automatically without restarting just after upgrading.Equipment end SECS/GEM driver, for when the described semiconductor equipment transmitting apparatus message, encodes, sends described equipment message; Or for the main frame of the coding message after forwarding is decoded, and the main frame message of decoding is sent to described semiconductor equipment; This equipment end SECS/GEM driver adopts the SECS/GEM of third party's standard to drive agreement.Equipment message buffer, for when sending encoding device message, carries out buffer sorting by encoding device message according to time sequencing, when the amount of encoding device message is very large and cannot send in time, will be temporarily stored in equipment message buffer.Host side SECS/GEM driver, for when described main frame sends main frame message, encodes, sends described main frame message; Or for the message of encoding device after forwarding is decoded, and decoding device message is sent to described main frame; This host side SECS/GEM driver adopts the SECS/GEM of third party's standard to drive agreement.Main frame message buffer, for the message of encoding device to after forwarding, according to time sequencing, carry out buffer sorting by the prioritisation of messages of encoding device forwarding, when the amount of the message of encoding device forwarding is very large and cannot send in time, will be temporarily stored in equipment message buffer.Transponder, for forwarding the message of encoding device after sending according to described configuration file; Or for the main frame of the coding message after sending being forwarded according to described configuration file.
Adopt the SECS/GEM message equipment of present embodiment, without the communication of using between EAP systems exchange semiconductor equipment and main frame, effectively reduce the pressure of EAP system, also shortened the delay of main frame (being upper system) when data receiver, avoided especially the situation that all upper systems all cannot be worked when EAP system breaks down to occur simultaneously.
It is worth mentioning that, each device involved in present embodiment is logical device, and in actual applications, a logical block can be a physical location, can be also a part for a physical location, can also realize with the combination of a plurality of physical locations.In addition, for outstanding innovation part of the present invention, in present embodiment, the unit not too close with solving technical problem relation proposed by the invention do not introduced, but this does not show not exist in present embodiment other unit.
The second execution mode of the present invention relates to a kind of SECS/GEM message equipment.Present embodiment is improved on the basis of the first execution mode, referring to Fig. 2, be specially: also comprise device port and a N host port that is arranged on nearly described host side SECS/GEM driver place that is arranged on nearly described equipment end SECS/GEM driver place, described device port and described host port are all for receiving and send the message data between described semiconductor equipment and described main frame; Wherein, described device port adopts data wire to connect a semiconductor equipment, described in each, host port adopts data wire to connect a main frame, N described host port connects N platform main frame, can plug and play, for Legacy System, substantially without change, make a semiconductor equipment to carry out message with N platform main frame, N is more than or equal to 1 natural number simultaneously.Accordingly, main frame message buffer is also provided with N, the all corresponding main frame of each main frame message buffer, the message of encoding device that transponder forwards is according to the needs of certain several main frame, be sent in the main frame message buffer that these main frames are corresponding and sort, then by respective host port, send to main frame after decoding.
In addition, the message data between described semiconductor equipment and described main frame comprise the equipment message being sent by semiconductor equipment being mainly comprised of misdata, alarm data, tune-up data and message data etc. and the main frame message being sent by main frame.
In addition, the SECS/GEM message equipment of present embodiment also comprises for recording the log manager of all message daily records between described semiconductor equipment and described main frame, for filter checking when forwarding encoding device message, and the filter of the important messages of verifying by filtration according to time sequencing sequence transmission, and for monitoring in real time the message monitoring device of the message data between described semiconductor equipment and described main frame.
And the configuration file that Profile Manager is set comprises for the daily record rule configuration file of log recording rule is provided to described log manager, for the filtering rule configuration file that filters proof rule is provided to described filter, and forward regular forwarding rule configuration file for providing to described transponder.
Log recording rule in daily record rule configuration file comprises the catalogue that journal file is preserved, and the content type of the journal file of record etc., log manager is according to all message daily records between semiconductor equipment described in the log recording regular record in daily record rule configuration file and described main frame, the all message data between recording from device port to host port or from host port to device port, these message daily records can be complete be saved in corresponding catalogue, when engineer need to inquire about the history message interaction data between semiconductor equipment and main frame, directly in corresponding catalogue, search.
Filtration proof rule in filtering rule configuration file comprise checking important messages by and shield non-important messages, filter filters checking when forwarding encoding device message according to the filtration proof rule in filtering rule configuration file, and sends according to time sequencing sequence the important messages of verifying by filtration.Filter is also provided with for controlling the filter switch of described filter opening and closing, and when described filter switch opens, described filter starts.If filter does not start, the message of encoding device after forwarding so will directly send to main frame by main frame message buffer.
Message monitoring device, for real-time message data between the described semiconductor equipment of monitoring and described main frame, for example departure place of message (as device port) and destination (as certain or certain several host ports).Message monitoring device is also provided with for controlling the pilot switch of described message monitoring device opening and closing, and when described pilot switch is opened, described message monitoring device starts.When not needing monitoring, can close message watch-dog, do not affect message.
Forward forwarding rule in rule configuration file and comprise encoding device message is forwarded to different main frame message buffer, and the main frame of the coding message that handle receives is directly forwarded to equipment end SECS/GEM driver etc.Described transponder forwards according to the forwarding rule in described forwarding rule configuration file the message of encoding device receiving, or according to the forwarding rule in described forwarding rule configuration file, forward the main frame of the coding message receiving, equipment end SECS/GEM driver is decoded the main frame of the coding message of the forwarding receiving.Transponder is forwarded to different main frame message buffer by the message of encoding device receiving, and send to several main frames by different host ports, the equipment message that semiconductor equipment sends over is after transponder, and same message can send to a plurality of main frame message buffer (that is to say and can send to a plurality of main frames simultaneously) simultaneously.
Adopt the SECS/GEM message equipment of present embodiment, can realize a semiconductor equipment and connect a plurality of main frames, a semiconductor equipment can be communicated by letter with a plurality of main frames simultaneously simultaneously, increased the speed of message, improved production efficiency.Meanwhile, effectively decoupling zero in the situation that having a plurality of upper systems (being main frame), makes each upper system degree of coupling minimum, is convenient to system maintenance.In addition, by the filtering function of filter, can filter as required unwanted message, only send important messages.
The 3rd execution mode of the present invention relates to a kind of SECS/GEM message switching method, be applied in communicating by letter between semiconductor equipment and main frame, communicating by letter between semiconductor equipment and main frame comprises that semiconductor equipment sends to main frame by equipment message and main frame sends to main frame message the method for these two message of semiconductor equipment.
Semiconductor equipment sends to main frame by equipment message and comprises the steps:
S1, sets the configuration file that carries out message between described semiconductor equipment and described main frame;
S2, when described semiconductor equipment transmitting apparatus message, encodes to described equipment message, and encoding device message is carried out to buffer sorting and sent in order;
S3, forwards the message of encoding device after sending according to described configuration file;
S4, carries out decoding after buffer sorting to the message of encoding device after forwarding, and decoding device message is sent to described main frame.
Main frame sends to semiconductor equipment by main frame message and comprises the steps:
S1, sets the configuration file that carries out message between described semiconductor equipment and described main frame;
S2, when described main frame sends main frame message, encodes, sends described main frame message;
S3, forwards the main frame of the coding message after sending according to described configuration file;
S4, decodes to the main frame of the coding message after forwarding, and the main frame message of decoding is sent to described semiconductor equipment.
The step of the whole bag of tricks is divided above, just in order being described clearly, can to merge into a step or some step is split while realizing, and is decomposed into a plurality of steps, as long as comprise identical logical relation, all in the protection range of this patent; To adding inessential modification in algorithm or in flow process or introducing inessential design, but the core design that does not change its algorithm and flow process is all in the protection range of this patent.
Be not difficult to find, present embodiment is the embodiment of the method corresponding with the first execution mode, present embodiment can with the enforcement of working in coordination of the first execution mode.The correlation technique details of mentioning in the first execution mode is still effective in the present embodiment, in order to reduce repetition, repeats no more here.Correspondingly, the correlation technique details of mentioning in present embodiment also can be applicable in the first execution mode.
The 4th execution mode of the present invention relates to a kind of SECS/GEM message switching method.Present embodiment is improved on the basis of the 3rd execution mode, is specially: in described step S2 and S4, by a device port and N host port, receive and send the message data between described semiconductor equipment and described main frame; Wherein, described device port connects a semiconductor equipment, and described in each, host port connects a main frame, and N described host port connects N platform main frame, make a semiconductor equipment to carry out message with N platform main frame, N is more than or equal to 1 natural number simultaneously.
In described step S1, described configuration file comprises for the daily record rule configuration file of log recording rule is provided; In described step S2-S4, according to all message daily records between semiconductor equipment described in the log recording regular record in described daily record rule configuration file and described main frame.
In described step S1, described configuration file comprises the filtering rule configuration file that filters proof rule for providing; In described step S3-S4, according to the filtration proof rule in described filtering rule configuration file, when forwarding encoding device message, filter checking, and send according to time sequencing sequence the important messages of verifying by filtration.
In described step S2-S4, monitor in real time the message data between described semiconductor equipment and described main frame.
In described step S1, described configuration file comprises for providing forwarding regular forwarding rule configuration file; In described step S3, according to the forwarding rule in described forwarding rule configuration file, forward the message of encoding device receiving, or forward according to the forwarding rule in described forwarding rule configuration file the main frame of the coding message receiving.
Equally, present embodiment can with the enforcement of working in coordination of the second execution mode.The correlation technique details of mentioning in the second execution mode is still effective in the present embodiment, in order to reduce repetition, repeats no more here.Correspondingly, the correlation technique details of mentioning in present embodiment also can be applicable in the second execution mode.
It should be appreciated by those skilled in the art that those skilled in the art, realizing described variation example in conjunction with prior art and above-described embodiment, do not repeat at this.Such variation example does not affect flesh and blood of the present invention, does not repeat them here.
Above preferred embodiment of the present invention is described.It will be appreciated that, the present invention is not limited to above-mentioned specific implementations, and the equipment of wherein not describing in detail to the greatest extent and structure are construed as with the common mode in this area to be implemented; Any those of ordinary skill in the art, do not departing from technical solution of the present invention scope situation, all can utilize method and the technology contents of above-mentioned announcement to make many possible changes and modification to technical solution of the present invention, or being revised as the equivalent embodiment of equivalent variations, this does not affect flesh and blood of the present invention.Therefore, every content that does not depart from technical solution of the present invention,, all still belongs in the scope of technical solution of the present invention protection any simple modification made for any of the above embodiments, equivalent variations and modification according to technical spirit of the present invention.
Claims (14)
1. a SECS/GEM message equipment, is applied to, in communicating by letter between semiconductor equipment and main frame, it is characterized in that, comprising:
Profile Manager, for setting the configuration file that carries out message between described semiconductor equipment and described main frame;
Equipment end SECS/GEM driver, for when the described semiconductor equipment transmitting apparatus message, encodes, sends described equipment message; Or for the main frame of the coding message after forwarding is decoded, and the main frame message of decoding is sent to described semiconductor equipment;
Equipment message buffer, for when sending encoding device message, carries out buffer sorting by encoding device message;
Host side SECS/GEM driver, for when described main frame sends main frame message, encodes, sends described main frame message; Or for the message of encoding device after forwarding is decoded, and decoding device message is sent to described main frame;
Main frame message buffer, for carrying out buffer sorting to the message of encoding device after forwarding;
Transponder, for forwarding the message of encoding device after sending according to described configuration file; Or for the main frame of the coding message after sending being forwarded according to described configuration file.
2. SECS/GEM message equipment according to claim 1, it is characterized in that, also comprise device port and a N host port that is arranged on nearly described host side SECS/GEM driver place that is arranged on nearly described equipment end SECS/GEM driver place, described device port and described host port are all for receiving and send the message data between described semiconductor equipment and described main frame;
Wherein, described device port connects a semiconductor equipment, and described in each, host port connects a main frame, and N described host port connects N platform main frame, make a semiconductor equipment to carry out message with N platform main frame, N is more than or equal to 1 natural number simultaneously.
3. SECS/GEM message equipment according to claim 1, it is characterized in that, also comprise log manager, described configuration file comprises for the daily record rule configuration file of log recording rule is provided to described log manager, and described log manager is for according to all message daily records between semiconductor equipment described in the log recording regular record of described daily record rule configuration file and described main frame.
4. SECS/GEM message equipment according to claim 1, it is characterized in that, also comprise filter, described configuration file comprises the filtering rule configuration file that filters proof rule for providing to described filter, described filter for filtering checking the important messages of verifying by filtration according to buffer sorting transmission when forwarding encoding device message according to the filtration proof rule of described filtering rule configuration file.
5. SECS/GEM message equipment according to claim 4, is characterized in that, described filter is also provided with for controlling the filter switch of described filter opening and closing, and when described filter switch opens, described filter starts.
6. SECS/GEM message equipment according to claim 1, is characterized in that, also comprises message monitoring device, for monitoring in real time the message data between described semiconductor equipment and described main frame.
7. SECS/GEM message equipment according to claim 6, is characterized in that, described message monitoring device is also provided with for controlling the pilot switch of described message monitoring device opening and closing, and when described pilot switch is opened, described message monitoring device starts.
8. SECS/GEM message equipment according to claim 1, is characterized in that, described configuration file comprises for provide forwarding regular forwarding rule configuration file to described transponder; Described transponder forwards according to the forwarding rule in described forwarding rule configuration file the message of encoding device receiving, or forwards according to the forwarding rule in described forwarding rule configuration file the main frame of the coding message receiving.
9. a SECS/GEM message switching method, is applied to, in communicating by letter between semiconductor equipment and main frame, it is characterized in that, comprises the steps:
S1, sets the configuration file that carries out message between described semiconductor equipment and described main frame;
S2, when described semiconductor equipment transmitting apparatus message, encodes to described equipment message, and encoding device message is carried out to buffer sorting and sent in order; Or when described main frame sends main frame message, described main frame message is encoded, sent;
S3, forwards the message of encoding device after sending according to described configuration file; Or according to described configuration file, the main frame of the coding message after sending is forwarded;
S4, carries out decoding after buffer sorting to the message of encoding device after forwarding, and decoding device message is sent to described main frame; Or the main frame of the coding message after forwarding is decoded, and the main frame message of decoding is sent to described semiconductor equipment.
10. SECS/GEM message switching method according to claim 9, is characterized in that, in described step S2 and S4, by a device port and N host port, receives and send the message data between described semiconductor equipment and described main frame;
Wherein, described device port connects a semiconductor equipment, and described in each, host port connects a main frame, and N described host port connects N platform main frame, make a semiconductor equipment to carry out message with N platform main frame, N is more than or equal to 1 natural number simultaneously.
11. SECS/GEM message switching methods according to claim 9, is characterized in that, in described step S1, described configuration file comprises for the daily record rule configuration file of log recording rule is provided; In described step S2-S4, according to all message daily records between semiconductor equipment described in the log recording regular record in described daily record rule configuration file and described main frame.
12. SECS/GEM message switching methods according to claim 9, is characterized in that, in described step S1, described configuration file comprises the filtering rule configuration file that filters proof rule for providing; In described step S3-S4, according to the filtration proof rule in described filtering rule configuration file, when forwarding encoding device message, filter checking, and according to buffer sorting, send the important messages of verifying by filtration.
13. SECS/GEM message switching methods according to claim 9, is characterized in that, in described step S2-S4, monitor in real time the message data between described semiconductor equipment and described main frame.
14. SECS/GEM message switching methods according to claim 9, is characterized in that, in described step S1, described configuration file comprises for providing forwarding regular forwarding rule configuration file; In described step S3, according to the forwarding rule in described forwarding rule configuration file, forward the message of encoding device receiving, or forward according to the forwarding rule in described forwarding rule configuration file the main frame of the coding message receiving.
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