CN101552794A - SECS Communication Method Based on SEMI Standard - Google Patents
SECS Communication Method Based on SEMI Standard Download PDFInfo
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- CN101552794A CN101552794A CNA2008100109121A CN200810010912A CN101552794A CN 101552794 A CN101552794 A CN 101552794A CN A2008100109121 A CNA2008100109121 A CN A2008100109121A CN 200810010912 A CN200810010912 A CN 200810010912A CN 101552794 A CN101552794 A CN 101552794A
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- 238000004891 communication Methods 0.000 title claims abstract description 27
- 238000000034 method Methods 0.000 title abstract description 8
- 238000013480 data collection Methods 0.000 claims abstract description 18
- 230000005540 biological transmission Effects 0.000 claims abstract description 14
- 230000015572 biosynthetic process Effects 0.000 claims description 33
- 238000012545 processing Methods 0.000 claims description 10
- 230000004044 response Effects 0.000 claims description 9
- 230000005856 abnormality Effects 0.000 claims description 8
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Abstract
The invention belongs to the network communication technology, in particular to an SECS communication method based on SEMI standard. The method comprises the steps that an HSMS communication module realizes the connection of equipment to a host computer, and data transmission is carried out through a network; and performing SECS II encoding and decoding through an SECS protocol module, and implementing data collection, equipment control and exception handling. The invention can realize the automatic management of a semiconductor factory, can meet the characteristic requirements of high vacuum, high cleanliness, high dust-free performance and the like in the manufacturing process of semiconductor devices, and can standardize different equipment control systems, improve the production efficiency and reduce the production cost.
Description
Technical field
The invention belongs to the network communications technology, specifically a kind of SECS communication means based on the SEMI standard.
Technical background
Present domestic semiconductor factory investment is towards 12 inches wafer development, and its wafer production operation is day by day complicated, and a lot of production equipment may come to different device fabrication manufacturers, and this just brings difficulty to wafer processing and equipment control.
Require manufacturing equipment that the operation of large tracts of land wafer material is had high vacuum, noble and unsullied degree, high characteristic such as dustless in the semiconductor industry, adopts traditional wafer mode of transport can not satisfy the needs high-quality in advanced person's the semiconductor production wafer.
Because the demand of wafer area continues to increase, the IC number increase that single wafer can be made, so manufacture develops into manufacturing in single wafer mode by the manufacturing of one-tenth batch.So just caused output to descend and the production cost raising.
At present domestic not company develops related software, does not have the software product of domestic independent development on the market.Software that domestic semiconductor-equipment maker uses mainly is directly to buy external product or buy mandate to carry out simple secondary development, and it is aging generally to face equipment and control system at present, does not meet problems such as SEMI standard.
Summary of the invention
The purpose of this invention is to provide a kind of SECS communication means based on the SEMI standard, can manage and monitor wafer production equipment easily by this assembly makes it and can work in noble and unsullied degree, high dustless environment, can realize that simultaneously cooperatively interacting of equipment room improve output, reduce cost, for the semiconductor factory that makes up automation provides effective way.
To achieve these goals, technical solution of the present invention is as follows: comprise the connection of HSMS communication module realization equipment to main frame, and carry out data transmission step by network; And carry out SECS II encoding and decoding by the SECS protocol module, implementation data collection, Equipment Control and abnormality processing step;
The step that HSMS module device end connects host side is: if connected then withdraw from this step, do not connect and judge then whether the connection interval timer is overtime, if do not have overtime then withdraw from this step, as connect the overtime then network layer socket that carries out of interval timer and connect, start and receive the data thread, start and connect interval timer, connection status is set, start and select timer, send to select request data package to main frame, if before selecting timer expired, do not receive the reply data bag that main frame sends then disconnect and being connected of main frame; Forwarding step in the transmission of HSMS request msg is: adopt the HSMS message format that request message is encoded, if this request need be replied request message added and to reply in the formation and start the revertive clocking device, do not close the revertive clocking device if this request message does not need to reply; Packet after host/device sends coding; If it is overtime then disconnect and being connected of host/device to send packet failure or revertive clocking device, closes the revertive clocking device and also this request message is removed from reply formation; Not closing the revertive clocking device if transmission packet success and revertive clocking device are overtime also removes this request message from reply formation; Reception response steps in the transmission of HSMS request msg is: the message data that receives is carried out the HSMS decoding, if this message is in replying formation then the incident of replying, if this message is not in replying formation then judge that further this message is whether in request queue, if not in request queue then withdraw from this step and abandon this packet, otherwise this response message response request incident then in request queue;
SECS II coding step is: first synthesis type length position, with type length position pop down, with the data length pop down, if type of coding for the tabulation obtain list items successively and repeat this coding step, if type of coding for the tabulation with the data content pop down; SECS II decoding step is: pop in type length position, data length is popped, if type of coding for the tabulation obtain list items successively and repeat this decoding step, if type of coding for the tabulation data content is popped; The step of data collection is: when main frame carries out Dynamic Data Acquiring, main frame sends report initialization request packet to equipment, in the time interval when non-vanishing, receive that fully the variable identification list being put into local report after this request data package identifies pairing data collection formation, and start at interval according to acquisition time and to follow the tracks of timer and enter the data collection circulation, if follow the tracks of timer expired then according to the variable sign fetch equipment IO data of definition in the report, and the IO data of variable are sent to main frame, wait for that main frame returns confirmation; If the acquisition interval time was set to zero when main frame sent report initialization request packet to equipment, then equipment is then closed the tracking timer, removes the pairing data collection formation of report sign;
The step of Equipment Control is: main frame sends control request to equipment, and equipment is received to instruct after this request and carried out and return confirmation to main frame; The step of abnormality processing is: when the equipment generation is reported to the police or be unusual, check at first whether the shielding formation of reporting to the police contains this warning sign, if being included in the shielding formation of reporting to the police, this warning sign withdraws from this step, if this warning sign Bao Wei is contained in the shielding formation of reporting to the police, equipment does not send the warning request data package to main frame when being eliminated, being provided with flag bit when equipment alarm and be 1, and main frame returns the affirmation packet to equipment after receiving this alert data bag; When equipment alarm is eliminated, change flag bit and be 0, equipment sends the warning request data package to main frame, main frame returns the affirmation packet to equipment after receiving this alert data bag.
The present invention has following advantage:
1. the present invention adopts the soft communication agreement standard of the cluster that semiconductor equipment and materials association (SEMI) formulated, and can make different software or control system standardization.By encapsulation to the operating system physical layer interface, realized cross-platform mechanism, improve the cluster control ability of wafer manufacturing equipment, thereby effectively solved communication and control problem between the wafer manufacturing equipment, and improved the automatization level of semiconductor factory's wafer processing and equipment control.
2. the present invention passes through the encapsulation to data collection, Equipment Control and the abnormality processing function of SECS II, thereby avoided manually participating in directly, whole process of production is in high vacuum, noble and unsullied degree, the high dustless environment, satisfied needs high-quality in the semiconductor production process wafer.
3. the present invention is by the request-reply treatment mechanism, the communication of perfect apparatus control system and factory's main frame, effectively solve the loss that causes owing to unit exception, alarm content in time can have been fed back to the operator simultaneously, avoided unnecessary warning that current technical process is impacted.
Description of drawings
Fig. 1 is a SECS communication standard structure.
Fig. 2 is the HSMS message format.
Fig. 3 connects flow chart for the HSMS equipment end.
Fig. 4 is HSMS request transmission flow figure.
Fig. 5 receives responding process figure for HSMS.
Fig. 6 is SECS II coding flow chart.
Fig. 7 is SECS II decoding process figure.
Fig. 8 is SECS II data collection flow process figure.
Fig. 9 is a SECS II Equipment Control flow chart.
Figure 10 is a SECS II abnormality processing flow chart.
Embodiment
Below in conjunction with accompanying drawing the present invention is described in further detail.
The SECS communication means that the present invention is based on the SEMI standard comprises: HSMS communication module realization equipment is to the connection of main frame, and carries out data transmission step by network; And carry out SECS II encoding and decoding by the SECS protocol module, implementation data collection, Equipment Control and abnormality processing step.
As shown in Figure 1, communication protocol belongs to the equipment automatization/software standard in the SEMI standard, comprises SECS-I, HSMS, SECS-II and four standards of GEM, the standard No. of this standard of expression in the round parentheses among the figure.Wherein, SECS-I and HSMS belong to transport protocol standard, have described data and how to have transmitted before equipment and main frame by physical media.SECS-II belongs to the message format standard, has defined employed message format when carrying out bi-directional session before equipment and main frame.GEM belongs to the specific function standard, has defined the equipment interface that can see by communication link, specified according to particular message equipment the corresponding behavior that should take.
As shown in Figure 2, HSMS message is transmitted as single stream in the mode of byte.Wherein, message-length: one 4 byte signless integer, represent that message header adds the byte number that Message-text is total thereafter, its minimum value is the cross joint.Message header: message header length is the cross joint, and wherein every being described as follows: device identification: 16 bit unsigned integer, highest order are necessary for zero, and remaining 15 bits are used for equipment of unique identification.Control bit: for dissimilar message value differences.The expression type: be eight bit unsigned integer, be used to enumerate the presentation layer type of message, promptly message header and message content are encoded in which way.Conversation type: be eight bit unsigned integer, 0 represents data-message otherwise the expression control messages.Message identifier: the nybble signless integer is used for interacting message of unique identification.
As shown in Figure 3, the step that HSMS module device end connects host side is: if connected then withdraw from this step, do not connect and judge then whether connection interval timer T5 is overtime, if do not have overtime then withdraw from this step, as connect the overtime then network layer socket that carries out of interval timer T5 and connect, start and receive the data thread, start and connect interval timer T5, connection status is set, start and select timer T7, send to select request data package to main frame, if before selecting timer T7 overtime, do not receive the reply data bag that main frame sends then disconnect and being connected of main frame.
As shown in Figure 4, forwarding step in the transmission of HSMS request msg is: adopt the HSMS message format that request message is encoded, if this request need be replied request message added and to reply in the formation and start revertive clocking device T3, close revertive clocking device T3 if this request message does not need to reply; Packet after host/device sends coding; If it is overtime then disconnect and being connected of host/device to send packet failure or revertive clocking device T3, closes revertive clocking device T3 and also this request message is removed from reply formation; Not closing revertive clocking device T3 if transmission packet success and revertive clocking device T3 are overtime also removes this request message from reply formation.
As shown in Figure 5, reception response steps in the transmission of HSMS request msg is: the message data that receives is carried out the HSMS decoding, if this message is in replying formation then the incident of replying, if this message is not in replying formation then judge that further this message is whether in request queue, if not in request queue then withdraw from this step and abandon this packet, otherwise this response message response request incident then in request queue.
As shown in Figure 6, SECS II coding step is: first synthesis type length position, with type length position pop down, with the data length pop down, if type of coding is tabulation then obtains list items successively and repeat this coding step, if type of coding is for tabulation then with the data content pop down.
As shown in Figure 7, SECS II decoding step is: pop in type length position, data length is popped, if type of coding for the tabulation obtain list items successively and repeat this decoding step, if type of coding for the tabulation data content is popped.
As shown in Figure 8, the step of data collection is: when main frame carries out Dynamic Data Acquiring, main frame sends report initialization request packet to equipment, wherein packet content comprises the report sign, variable identification list and acquisition time are at interval, in the time interval when non-vanishing, receive that fully the variable identification list being put into local report after this request data package identifies pairing data collection formation, and start at interval according to acquisition time and to follow the tracks of timer TR and enter the data collection circulation, variable if tracking timer TR is overtime according to definition in the report identifies fetch equipment IO data, and the IO data of variable are sent to main frame, wait for that main frame returns confirmation; If the acquisition interval time was set to zero when main frame sent report initialization request packet to equipment, then equipment is then closed and is followed the tracks of timer TR, removes the pairing data collection formation of report sign.
As shown in Figure 9, the step of Equipment Control is: main frame sends control request to equipment, and equipment is received to instruct after this request and carried out and return confirmation to main frame.
As shown in figure 10, the step of abnormality processing is: when the equipment generation is reported to the police or be unusual, check at first whether the shielding formation of reporting to the police contains this warning sign, if being included in the shielding formation of reporting to the police, this warning sign withdraws from this step, if this warning sign Bao Wei is contained in the shielding formation of reporting to the police, equipment does not send the warning request data package to main frame when being eliminated, being provided with flag bit when equipment alarm and be 1, wherein packet content comprises alarm code, reporting to the police identifies and the warning text, and main frame returns the affirmation packet to equipment after receiving this alert data bag; When equipment alarm is eliminated, change flag bit and be 0, equipment sends the warning request data package to main frame, main frame returns the affirmation packet to equipment after receiving this alert data bag.
Claims (9)
1. the SECS communication means based on the SEMI standard is characterized in that: comprise the connection of HSMS communication module realization equipment to main frame, and carry out data transmission step by network; And carry out SECS II encoding and decoding by the SECS protocol module, implementation data collection, Equipment Control and abnormality processing step.
2. according to the described SECS communication means of claim 1 based on the SEMI standard, it is characterized in that: the step that HSMS module device end connects host side is: if connected then withdraw from this step, do not connect and judge then whether connection interval timer (T5) is overtime, if do not have overtime then withdraw from this step, as connect the overtime then network layer socket that carries out of interval timer (T5) and connect, start and receive the data thread, start and connect interval timer (T5), connection status is set, start and select timer (T7), send to select request data package to main frame, if before selecting timer (T7) overtime, do not receive the reply data bag that main frame sends then disconnect and being connected of main frame.
3. according to the described SECS communication means of claim 1 based on the SEMI standard, it is characterized in that: the forwarding step in the transmission of HSMS request msg is: adopt the HSMS message format that request message is encoded, if this request need be replied request message added and to reply in the formation and start revertive clocking device (T3), close revertive clocking device (T3) if this request message does not need to reply; Packet after host/device sends coding; If it is overtime then disconnect and being connected of host/device to send packet failure or revertive clocking device (T3), closes revertive clocking device (T3) and also this request message is removed from reply formation; Not closing revertive clocking device (T3) if transmission packet success and revertive clocking device (T3) are overtime also removes this request message from reply formation.
4. according to the described SECS communication means of claim 1 based on the SEMI standard, it is characterized in that: the reception response steps in the transmission of HSMS request msg is: the message data that receives is carried out the HSMS decoding, if this message is in replying formation then the incident of replying, if this message is not in replying formation then judge that further this message is whether in request queue, if not in request queue then withdraw from this step and abandon this packet, otherwise this response message response request incident then in request queue.
5. according to the described SECS communication means of claim 1 based on the SEMI standard, it is characterized in that: SECS II coding step is: first synthesis type length position, with type length position pop down, with the data length pop down, if type of coding is tabulation then obtains list items successively and repeat this coding step, if type of coding is for tabulation then with the data content pop down.
6. according to the described SECS communication means of claim 1 based on the SEMI standard, it is characterized in that: SECS II decoding step is: pop in type length position, data length is popped, if type of coding is tabulation then obtains list items successively and repeat this decoding step, if type of coding is not tabulation then data content is popped.
7. according to the described SECS communication means of claim 1 based on the SEMI standard, it is characterized in that: the step of data collection is: when main frame carries out Dynamic Data Acquiring, main frame sends report initialization request packet to equipment, in the time interval when non-vanishing, receive that fully the variable identification list being put into local report after this request data package identifies pairing data collection formation, and start at interval according to acquisition time and to follow the tracks of timer (TR) and enter the data collection circulation, identify fetch equipment IO data if tracking timer (TR) is overtime according to the variable of definition in the report, and the IO data of variable are sent to main frame, wait for that main frame returns confirmation; If the acquisition interval time was set to zero when main frame sent report initialization request packet to equipment, then equipment is then closed and is followed the tracks of timer (TR), removes the pairing data collection formation of report sign.
8. according to the described SECS communication means based on the SEMI standard of claim 1, it is characterized in that: the step of Equipment Control is: main frame sends control request to equipment, and equipment is received to instruct after this request and carried out and return confirmation to main frame.
9. according to the described SECS communication means of claim 1 based on the SEMI standard, it is characterized in that: the step of abnormality processing is: when the equipment generation is reported to the police or be unusual, check at first whether the shielding formation of reporting to the police contains this warning sign, if being included in the shielding formation of reporting to the police, this warning sign withdraws from this step, if this warning sign Bao Wei is contained in the shielding formation of reporting to the police, equipment does not send the warning request data package to main frame when being eliminated, being provided with flag bit when equipment alarm and be 1, and main frame returns the affirmation packet to equipment after receiving this alert data bag; When equipment alarm is eliminated, change flag bit and be 0, equipment sends the warning request data package to main frame, main frame returns the affirmation packet to equipment after receiving this alert data bag.
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| CN2008100109121A CN101552794B (en) | 2008-04-03 | 2008-04-03 | SECS communicating method based on SEMI standard |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102467467A (en) * | 2010-11-16 | 2012-05-23 | 财团法人工业技术研究院 | Message exchange device and message exchange method for communication standard of semiconductor equipment |
| CN103389700A (en) * | 2013-07-16 | 2013-11-13 | 沈阳中科博微自动化技术有限公司 | Factory automation communication software event report managing method |
| CN103491059A (en) * | 2012-06-12 | 2014-01-01 | 中国科学院沈阳自动化研究所 | Data collection implementation method of semiconductor manufacturing equipment |
| CN103513639A (en) * | 2013-10-08 | 2014-01-15 | 周炳君 | Label-based communication method for semiconductor device in remote control |
| CN108965271A (en) * | 2018-07-02 | 2018-12-07 | 汕头超声印制板（二厂）有限公司 | A kind of SECS/GEM means of communication |
| CN110290194A (en) * | 2019-06-20 | 2019-09-27 | 苏州工业园区恒越自动化科技有限公司 | A kind of SECS communication means based on SEMI standard |
| CN115022384A (en) * | 2022-05-05 | 2022-09-06 | 北京北方华创微电子装备有限公司 | HSMS communication connection method and device |
Families Citing this family (1)
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| CN103399881A (en) * | 2013-07-16 | 2013-11-20 | 沈阳中科博微自动化技术有限公司 | Rapid collecting and distributing method of real-time data for integrated circuit production equipment |
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| JP2003006063A (en) * | 2001-06-22 | 2003-01-10 | Nec Corp | Communication monitoring system and monitoring server |
| CN100437398C (en) * | 2006-05-17 | 2008-11-26 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Cluster controller for etching devices |
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2008
- 2008-04-03 CN CN2008100109121A patent/CN101552794B/en not_active Expired - Fee Related
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102467467A (en) * | 2010-11-16 | 2012-05-23 | 财团法人工业技术研究院 | Message exchange device and message exchange method for communication standard of semiconductor equipment |
| CN103491059A (en) * | 2012-06-12 | 2014-01-01 | 中国科学院沈阳自动化研究所 | Data collection implementation method of semiconductor manufacturing equipment |
| CN103389700A (en) * | 2013-07-16 | 2013-11-13 | 沈阳中科博微自动化技术有限公司 | Factory automation communication software event report managing method |
| CN103389700B (en) * | 2013-07-16 | 2016-03-30 | 沈阳中科博微自动化技术有限公司 | A kind of factory automation communication software event report management method |
| CN103513639A (en) * | 2013-10-08 | 2014-01-15 | 周炳君 | Label-based communication method for semiconductor device in remote control |
| CN103513639B (en) * | 2013-10-08 | 2015-10-07 | 周炳君 | Based on the communication means of label in the Long-distance Control of semiconductor equipment |
| CN108965271A (en) * | 2018-07-02 | 2018-12-07 | 汕头超声印制板（二厂）有限公司 | A kind of SECS/GEM means of communication |
| CN110290194A (en) * | 2019-06-20 | 2019-09-27 | 苏州工业园区恒越自动化科技有限公司 | A kind of SECS communication means based on SEMI standard |
| CN115022384A (en) * | 2022-05-05 | 2022-09-06 | 北京北方华创微电子装备有限公司 | HSMS communication connection method and device |
| CN115022384B (en) * | 2022-05-05 | 2023-10-13 | 北京北方华创微电子装备有限公司 | HSMS communication connection method and device |
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