CN102466982B - 一种线宽均匀性的测试方法 - Google Patents
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CN102466982A CN102466982A (zh) | 2012-05-23 |
CN102466982B true CN102466982B (zh) | 2015-07-29 |
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CN103676463A (zh) * | 2013-11-29 | 2014-03-26 | 上海华力微电子有限公司 | 测试图形设计方法及opc优化方法 |
TW201537304A (zh) * | 2014-03-28 | 2015-10-01 | Nuvoton Technology Corp | 曝光方法、光罩及晶片基板 |
CN105700290B (zh) * | 2014-11-27 | 2020-02-07 | 中芯国际集成电路制造(上海)有限公司 | 光罩的制作方法 |
CN106707697B (zh) * | 2017-01-04 | 2018-10-26 | 上海华虹宏力半导体制造有限公司 | 芯片的图形尺寸检测方法 |
CN106597732A (zh) * | 2017-02-05 | 2017-04-26 | 武汉华星光电技术有限公司 | 液晶面板及其光阻图案形成方法 |
CN107037694A (zh) * | 2017-05-25 | 2017-08-11 | 苏州灯龙光电科技有限公司 | 一种检测显示性能的检测板及其检测方法 |
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JP3328676B2 (ja) * | 1991-11-28 | 2002-09-30 | 株式会社ニコン | 投影光学系の検査方法、マスク基板、及びマーク形成方法 |
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Owner name: WUXI HUARUN SHANGHUA TECHNOLOGY CO., LTD. Free format text: FORMER OWNER: WUXI CSMC SEMICONDUCTOR CO., LTD. Effective date: 20140414 Free format text: FORMER OWNER: WUXI HUARUN SHANGHUA TECHNOLOGY CO., LTD. Effective date: 20140414 |
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Effective date of registration: 20140414 Address after: 214028 Xinzhou Road, Wuxi national hi tech Industrial Development Zone, Jiangsu, China, No. 8 Applicant after: Wuxi Huarun Shanghua Technology Co., Ltd. Address before: 214028 Wuxi provincial high tech Industrial Development Zone, Hanjiang Road, No. 5, Jiangsu, China Applicant before: Wuxi CSMC Semiconductor Co., Ltd. Applicant before: Wuxi Huarun Shanghua Technology Co., Ltd. |
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