CN102466808B - 非晶硅碘化铯数字x射线平板探测器 - Google Patents
非晶硅碘化铯数字x射线平板探测器 Download PDFInfo
- Publication number
- CN102466808B CN102466808B CN201010540060.4A CN201010540060A CN102466808B CN 102466808 B CN102466808 B CN 102466808B CN 201010540060 A CN201010540060 A CN 201010540060A CN 102466808 B CN102466808 B CN 102466808B
- Authority
- CN
- China
- Prior art keywords
- cesium iodide
- amorphous silicon
- scintillation crystal
- ray
- film transistor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 229910021417 amorphous silicon Inorganic materials 0.000 title claims abstract description 62
- YYVBVQHOYCOOJR-UHFFFAOYSA-I [I-].[Cs+].[Si+4].[I-].[I-].[I-].[I-] Chemical compound [I-].[Cs+].[Si+4].[I-].[I-].[I-].[I-] YYVBVQHOYCOOJR-UHFFFAOYSA-I 0.000 title claims abstract description 19
- 239000013078 crystal Substances 0.000 claims abstract description 50
- XQPRBTXUXXVTKB-UHFFFAOYSA-M caesium iodide Chemical compound [I-].[Cs+] XQPRBTXUXXVTKB-UHFFFAOYSA-M 0.000 claims abstract description 49
- 239000010409 thin film Substances 0.000 claims abstract description 13
- 239000011521 glass Substances 0.000 claims abstract description 11
- 239000000758 substrate Substances 0.000 claims abstract description 11
- 239000010408 film Substances 0.000 claims description 30
- 229910052710 silicon Inorganic materials 0.000 claims description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 7
- 229910002804 graphite Inorganic materials 0.000 claims description 7
- 239000010439 graphite Substances 0.000 claims description 7
- 239000002344 surface layer Substances 0.000 claims description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 6
- 239000010703 silicon Substances 0.000 claims description 6
- 239000003822 epoxy resin Substances 0.000 claims description 5
- 229920000647 polyepoxide Polymers 0.000 claims description 5
- 239000003990 capacitor Substances 0.000 claims description 3
- 230000005855 radiation Effects 0.000 claims description 3
- BKVIYDNLLOSFOA-UHFFFAOYSA-N thallium Chemical group [Tl] BKVIYDNLLOSFOA-UHFFFAOYSA-N 0.000 claims description 3
- 239000000463 material Substances 0.000 description 5
- 229910004205 SiNX Inorganic materials 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 229910001182 Mo alloy Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Images
Landscapes
- Solid State Image Pick-Up Elements (AREA)
- Measurement Of Radiation (AREA)
Abstract
Description
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201010540060.4A CN102466808B (zh) | 2010-11-09 | 2010-11-09 | 非晶硅碘化铯数字x射线平板探测器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201010540060.4A CN102466808B (zh) | 2010-11-09 | 2010-11-09 | 非晶硅碘化铯数字x射线平板探测器 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102466808A CN102466808A (zh) | 2012-05-23 |
CN102466808B true CN102466808B (zh) | 2014-06-18 |
Family
ID=46070698
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201010540060.4A Expired - Fee Related CN102466808B (zh) | 2010-11-09 | 2010-11-09 | 非晶硅碘化铯数字x射线平板探测器 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN102466808B (zh) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104218045A (zh) * | 2013-06-05 | 2014-12-17 | 朱兴华 | 碘化铅光电导层基数字x射线平板探测器 |
CN104730563A (zh) * | 2013-12-24 | 2015-06-24 | 上海新漫传感技术研究发展有限公司 | 通道式人员放射性监测仪 |
CN103837555A (zh) * | 2014-03-19 | 2014-06-04 | 烟台华科检测设备有限公司 | 一种x射线数字平板成像检测技术 |
WO2017213622A1 (en) * | 2016-06-06 | 2017-12-14 | Terapede Systems Inc. | Integrated scintillator grid with photodiodes |
CN107703533B (zh) * | 2016-08-05 | 2024-03-05 | 京东方科技集团股份有限公司 | 探测面板及探测装置 |
CN109387639A (zh) * | 2017-08-07 | 2019-02-26 | 上海易孛特光电技术有限公司 | 一种非晶硅平板探测器 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5381014A (en) * | 1993-12-29 | 1995-01-10 | E. I. Du Pont De Nemours And Company | Large area X-ray imager and method of fabrication |
WO1999066352A1 (en) * | 1998-06-15 | 1999-12-23 | General Electric Company | Robust cover plate for radiation imager |
CN1530667A (zh) * | 2003-03-12 | 2004-09-22 | ������������ʽ���� | 放射线检测装置及其制造方法 |
CN101199055A (zh) * | 2005-06-17 | 2008-06-11 | 特里赛尔公司 | 辐射检测器 |
CN201926763U (zh) * | 2010-11-09 | 2011-08-10 | 北京大基康明医疗设备有限公司 | 非晶硅碘化铯数字x射线平板探测器 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6642524B2 (en) * | 2002-01-09 | 2003-11-04 | Ge Medical Systems Global Technology Company, Llc | Scintillator sealing for solid state X-ray detector |
US7078702B2 (en) * | 2002-07-25 | 2006-07-18 | General Electric Company | Imager |
-
2010
- 2010-11-09 CN CN201010540060.4A patent/CN102466808B/zh not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5381014A (en) * | 1993-12-29 | 1995-01-10 | E. I. Du Pont De Nemours And Company | Large area X-ray imager and method of fabrication |
US5381014B1 (en) * | 1993-12-29 | 1997-06-10 | Du Pont | Large area x-ray imager and method of fabrication |
WO1999066352A1 (en) * | 1998-06-15 | 1999-12-23 | General Electric Company | Robust cover plate for radiation imager |
CN1530667A (zh) * | 2003-03-12 | 2004-09-22 | ������������ʽ���� | 放射线检测装置及其制造方法 |
CN101199055A (zh) * | 2005-06-17 | 2008-06-11 | 特里赛尔公司 | 辐射检测器 |
CN201926763U (zh) * | 2010-11-09 | 2011-08-10 | 北京大基康明医疗设备有限公司 | 非晶硅碘化铯数字x射线平板探测器 |
Non-Patent Citations (2)
Title |
---|
桂朝伟等.碘化铯非晶硅平板探测器的原理及应用.《中国医学装备》.2009,第6卷(第09期), |
碘化铯非晶硅平板探测器的原理及应用;桂朝伟等;《中国医学装备》;20090915;第6卷(第09期);10-13 * |
Also Published As
Publication number | Publication date |
---|---|
CN102466808A (zh) | 2012-05-23 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN102466808B (zh) | 非晶硅碘化铯数字x射线平板探测器 | |
JP5744861B2 (ja) | フラットパネルx線イメージャ内のフォトダイオード及び他のセンサ構造、並びに薄膜電子工学を利用したフラットパネルx線イメージャ内のフォトダイオード及び他のセンサ構造のトポロジー均一性の改善方法 | |
CN102401906B (zh) | 辐射探测器及其成像装置、电极结构和获取图像的方法 | |
US11309451B2 (en) | Flat panel detector and manufacturing method thereof | |
US8541751B2 (en) | Method of managing radiation detectors, radiographic image capturing apparatus, and radiographic image capturing system | |
CN109830563B (zh) | 探测面板及其制作方法 | |
CN104685629B (zh) | 放射线检测元件以及放射线图像检测装置 | |
CN104218045A (zh) | 碘化铅光电导层基数字x射线平板探测器 | |
US20220310683A1 (en) | Detection substrate, manufacturing method thereof and flat panel detector | |
CN201852941U (zh) | 辐射探测器及其成像装置和电极结构 | |
JP2005114731A (ja) | 後方照射を有する半導体放射線撮像装置 | |
US8916833B2 (en) | Imaging device and imaging display system | |
WO2021017716A1 (zh) | 基于钙钛矿材料的x射线数字图像探测器 | |
CN201926763U (zh) | 非晶硅碘化铯数字x射线平板探测器 | |
EP3241041B1 (en) | X-ray detector assembly | |
CN101159283A (zh) | X射线平板探测器 | |
CN202305447U (zh) | 数字x射线影像检查装置 | |
CN112531116A (zh) | 一种钙钛矿超快x射线探测器及其制备方法 | |
CN209199927U (zh) | 平板探测器 | |
CN210575956U (zh) | 一种探测基板及平板探测器 | |
CN202523710U (zh) | 一种高效dr非晶硅探测板 | |
US20170062510A1 (en) | Radiation detector fabrication | |
JP2009025258A (ja) | 放射線検出器 | |
EP2757389A2 (en) | High resolution x-ray imaging with thin, flexible digital sensors | |
KR20110003627A (ko) | 엑스레이 검출기 및 이의 제조 방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
PP01 | Preservation of patent right |
Effective date of registration: 20160831 Granted publication date: 20140618 |
|
RINS | Preservation of patent right or utility model and its discharge | ||
PD01 | Discharge of preservation of patent |
Date of cancellation: 20170228 Granted publication date: 20140618 |
|
PD01 | Discharge of preservation of patent | ||
PP01 | Preservation of patent right |
Effective date of registration: 20170228 Granted publication date: 20140618 |
|
PP01 | Preservation of patent right | ||
PD01 | Discharge of preservation of patent |
Date of cancellation: 20190828 Granted publication date: 20140618 |
|
PD01 | Discharge of preservation of patent | ||
PP01 | Preservation of patent right |
Effective date of registration: 20190828 Granted publication date: 20140618 |
|
PP01 | Preservation of patent right | ||
PD01 | Discharge of preservation of patent |
Date of cancellation: 20220828 Granted publication date: 20140618 |
|
PD01 | Discharge of preservation of patent | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140618 |
|
CF01 | Termination of patent right due to non-payment of annual fee |