CN102455590A - Light shield clamp - Google Patents
Light shield clamp Download PDFInfo
- Publication number
- CN102455590A CN102455590A CN2010105222880A CN201010522288A CN102455590A CN 102455590 A CN102455590 A CN 102455590A CN 2010105222880 A CN2010105222880 A CN 2010105222880A CN 201010522288 A CN201010522288 A CN 201010522288A CN 102455590 A CN102455590 A CN 102455590A
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- China
- Prior art keywords
- dop
- support
- handle
- light shield
- anchor clamps
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Aiming, Guidance, Guns With A Light Source, Armor, Camouflage, And Targets (AREA)
- Facsimile Scanning Arrangements (AREA)
- Optical Elements Other Than Lenses (AREA)
Abstract
The invention discloses a light shield clamp for preventing sliding of the light shield when the light shield clamp clamps the light shield. The light shield clamp comprises a first handle (1), a first bracket (21), a second bracket (22) and a first chuck (3), wherein one end of the first bracket (21) is connected with the first handle (1), and the other end of the first bracket (21) is provided with a second chuck (4); the two ends of the second bracket (22) are respectively provided with a third chuck (5) and a fourth chuck (6), and are connected with the first bracket (21) in a crossed manner; one end of the first chuck (3) is movably connected with one end of the first bracket, and the other end of the first chuck (3) is connected with the first handle (1) by a first elastic piece (7); and the first handle (7) rotates towards the direction of the first handle (1) under traction force which is applied by the first elastic piece (7).
Description
Technical field
The present invention relates to the semiconductor device production field, particularly a kind of light shield anchor clamps.
Background technology
During light shield in producing semiconductor devices, need move, detect, install, perhaps other technology through anchor clamps clamping light shield.At present, be seamless between light shield and the box for photomask laterally, therefore, the structure of existing light shield anchor clamps is as shown in Figure 1, comprising: first handle 1, first support, 2, the first dops 3, and second dop 4.
Wherein, first handle 1 is connected with first end of first support 2; First end of first dop 3 and first support 2 flexibly connects, and first dop 3 is connected with first handle 1 through a spring; Second dop 4 is connected with second end of first support.
Can know that according to said structure present light shield anchor clamps have only on the direction location is arranged, and are as shown in Figure 1; Have only on the direction parallel the location arranged with first handle 1, promptly these anchor clamps only located the light shield plane vertically, like this; When anchor clamps clamping light shield shifts or checks; Light shield is easily from the other direction landing, and here, light shield is easily from horizontal landing.
Therefore, present light shield anchor clamps also are not very firm when the clamping light shield, landing easily.
Summary of the invention
The embodiment of the invention provides a kind of light shield anchor clamps, when preventing light shield anchor clamps clamping light shield, and the landing of light shield.
The embodiment of the invention provides a kind of light shield anchor clamps, comprising: first handle (1), first support (21), second support (22) and first dop (3), wherein,
One end of first support (21) is connected with said first handle (1), and the other end is provided with second dop (4);
Said second support (22) two ends are respectively arranged with the 3rd dop (5) and the 4th dop (6), and with cross connection of first support (21);
One end of said first dop (3) one ends and said first support (21) flexibly connects; The other end is connected with first handle (1) through first elastic component (7), and rotated to first handle (1) direction through the tractive force that first elastic component (7) applies by said first handle (1).
In the embodiment of the invention, through anchor clamps first support and second support, and the dop corresponding, light shield is located at both direction with each support, thereby when having prevented anchor clamps clamping light shield effectively, the landing of light shield.
Description of drawings
Fig. 1 is the structural drawing of light shield anchor clamps in the prior art;
Fig. 2 is the structural drawing of light shield anchor clamps in the embodiment of the invention one;
Fig. 3 is the structural drawing of light shield anchor clamps in the embodiment of the invention two;
Fig. 4 is the structural drawing of light shield anchor clamps in the embodiment of the invention three.
Embodiment
In the embodiment of the invention, existing light shield anchor clamps are transformed, not only located the vertical of light shield plane, also located the horizontal of light shield plane, avoided the light shield anchor clamps when the clamping light shield, the phenomenon of the easy landing of light shield.
Below in conjunction with Figure of description the embodiment of the invention is described in further detail.
Embodiment one, and referring to Fig. 2, the light shield anchor clamps comprise in the present embodiment: first handle 1, first support 21, second support, 22, the first dop 3, the second dops, 4, the three dops 5 and the 4th dops 6.
Wherein, the cross connection between first support 21 and second support 22 is just cross connection, and perhaps the Saint Andrew's cross type connects.Generally, first support 21 is vertical with second support 22, and the point of crossing between first support 21 and second support 22 can be positioned at the optional position on first support 21 or second support 22.Preferably, first support 21 is about center, point of crossing symmetry, and second support 22 is also about center, point of crossing symmetry.
In the present embodiment, the annexation of first handle 1, first support 21, first dop 3 and second dop 4 can be consistent with light shield anchor clamps of the prior art.Promptly can form mask clips of the prior art by first handle 1, first support 21, first dop 3 and second dop 4.Concrete structure is:
One end of first support 21 is connected with first handle 1, and the other end is provided with second dop 4.Can be set at vertically with first handle 1 parallel direction in the embodiment of the invention, as shown in Figure 2, first handle 1 is generally parallel fixed connection with an end of first support 21, and promptly first support is vertical frame.
Here, first support 21 and second dop 4 can be integrative-structures, and perhaps, second dop 4 is connected with the other end of first support 21, and this connection comprises: be fixedly connected, perhaps flexibly connect.When for flexible connection, the other end of this second dop 4 also need be connected with first support 21 through an elastic component.In structure as shown in Figure 2, second dop 4 and first support 21 are integrative-structures.
One end of one end of first dop 3 and first support 21 flexibly connects; And; The other end of this first dop 3 is connected with first handle 1 through first elastic component 7, and receives first handle 1 and rotate to first handle 1 direction through the tractive force that first elastic component 7 applies.
In said structure, first dop 3 and second dop 4 all are the structure that has hook generally, like this; Operation first handle 1; Let it move up and down, like this, can drive first dop 3 through first elastic component 7 and be axial first handle direction rotation with first support 21; Thereby, can pick up or unclamp light shield.
For preventing the light shield anchor clamps when the clamping light shield, light shield is from horizontal landing, and the present invention has also comprised second support 22 in implementing. Second support 22 and 21 cross connections of first support, when first support 21 was vertical frame, second support 22 was a transverse strands.And these second support, 22 two ends are respectively arranged with the 3rd dop 5 and the 4th dop 6.
The 3rd dop 5, the four dops 6 and second support 22 can be structure as a whole; Perhaps; The 3rd dop 5 and second support 22 are structure as a whole, and the 4th dop 6 is connected with second support 22, perhaps; The 3rd dop 5 is connected with second support 22, and and the 4th dop 6 and second support 22 are structure as a whole.Wherein, connection comprises: be fixedly connected or flexibly connect.
In anchor clamps as shown in Figure 2, the 3rd dop 5, the 4th dop and second support 22 are structure as a whole.
Like this, can confirm the distance between the 3rd dop 5 and the 4th dop 6 according to the widthwise size of light shield, make this distance be slightly larger than the widthwise size of light shield, perhaps, distance slightly equals the widthwise size of light shield, like this, is convenient to the clamping of light shield.And the 3rd dop 5 or the 4th dop 6 are baffle plate, thereby, when this anchor clamps clamping light shield and since the 3rd dop 5 and the 4th dop 6 stop that light shield is not easy from horizontal landing.
Embodiment two, in the above-described embodiments, the 3rd dop 5, the four dops 6 and second support 22 are formed integrative-structures.When the distance between the 3rd dop 5 and the 4th dop 6 is slightly larger than the widthwise size of light shield, when this anchor clamps clamping light shield, still cause moving of light shield easily.For the steadiness of these anchor clamps further is provided, in this embodiment, improve being connected between the 3rd dop 5 and the 4th dop 6 and second support 22 respectively.
Referring to Fig. 3, these anchor clamps comprise: first handle 1, first support 21, second support 22, first dop, 3, the second dops, 4, the three dops 5, the 4th dop 6, first elastic component 7, second elastic component 8 and the 3rd elastic component 9.
In the present embodiment, described in the annexation such as embodiment one of first handle 1, first support 21, first dop 3, second dop 4 and first elastic component 7, concrete just no longer tired having stated.But being connected between the 3rd dop 5 and the 4th dop 6 and second support 22 improves, and is specially:
First end of the 3rd dop 5 one ends and second support 22 flexibly connects, and the other end of the 3rd dop 5 is connected with second support 22 through second elastic component 8.
Second end of the 4th dop 6 one ends and second support 22 flexibly connects, and the other end of the 4th dop 6 is connected with second support 22 through the 3rd elastic component 9.
As shown in Figure 3, first end of the 3rd dop 5 one ends and second support 22 adopts movable axis to join, and second end of the 4th dop 6 one ends and second support 22 also adopts movable axis to join.
Like this, the 3rd dop 5 can serve as that axle spins upside down with second support 22, and is same, and the 4th dop 6 serves as that axle spins upside down with second support 22 also.
When using these anchor clamps; Earlier the 3rd dop 5 and the 4th dop 6 are rolled up, treat this anchor clamps clamping light shield then after, again the 3rd dop 5 and the 4th dop 6 are turned down; Thereby; These anchor clamps can be fixed light shield firmly, prevent moving and landing of light shield, have further improved the steadiness of anchor clamps.
In above-mentioned two embodiment, the 3rd dop 5, the four dops 6 and second support 22 are formed integrative-structure.Perhaps, first end of the 3rd dop 5 and second support 22 flexibly connects, and second end of the 4th dop 6 and second support 22 flexibly connects.Certainly, in other embodiment of the present invention, the 3rd dop 5 is fixedly connected with first end of second support 22, and second end of the 4th dop 6 and second support 22 flexibly connects.Perhaps, first end of the 3rd dop 5 and second support 22 flexibly connects, and the 4th dop 6 is fixedly connected with second end of second support 22.Perhaps, the 3rd dop 5 is fixedly connected with first end of second support 22, and the 4th dop 6 and second support 22 are formed integrative-structure.Perhaps, first end of the 3rd dop 5 and second support 22 flexibly connects, and the 4th dop 6 and second support 22 are formed integrative-structure.Perhaps, the 3rd dop 5 and second support 22 are formed integrative-structure, and second end of the 4th dop 6 and second support 22 flexibly connects.Perhaps, the 3rd dop 5 and second support 22 are formed integrative-structure, and the 4th dop 6 is fixedly connected with second end of second support 22.Concrete syndeton is just no longer tired to be stated.
Embodiment three, present embodiment have carried out further transformation to the light shield anchor clamps, through increase a second handle control the 3rd dop or, the 4th dop or, the 3rd dop and the 4th dop.Thereby, can operate the light shield anchor clamps more easily.
Referring to Fig. 4, these anchor clamps not only comprise: first handle 1, first support, 21, the second supports, 22, the first dops, 3, the second dops, 4, the three dops 5, the 4th dop 6, first elastic component 7, second elastic component 8 and the 3rd elastic component 9.And, also comprise: second handle 10.Wherein, the second handle 10 and second support 22 flexibly connect.Tie point can be positioned at the optional position of second support 22, and preferably, this tie point is the central point of second support 22.
The annexation such as the embodiment one of first handle 1, first support 21, first dop 3, second dop 4 and first elastic component 7 or implement described in two concrete just no longer tired having stated.
Here, the 3rd dop 5, and the connected mode of the 4th dop 6 changes again, is specially:
First end of the 3rd dop 5 one ends and second support 22 flexibly connects; And; The 3rd dop 5 other ends are connected with second handle 10 through second elastic component 8, thereby the 3rd dop 5 receives tractive force that second handle 10 applies through second elastic component 8 to rotating with second support, 22 vertical directions.
6 one sections second ends with second support 22 of the 4th dop flexibly connect; And; The 4th dop 6 other ends are connected with second handle 10 through the 3rd elastic component 9, thereby the 4th dop 6 receives tractive force that second handle 10 applies through the 3rd elastic component 9 to rotating with second support, 22 vertical directions.
Like this; Because the second handle 10 and second support 22 flexibly connect; Operation second handle 10 can serve as that axle is swung with second support 22 through second elastic component 8 control the 3rd dop 5 just, and to control the 4th dop 6 through the 3rd elastic component 9 serve as spool to swing with second support 22.
In the present embodiment, when using these anchor clamps, depress second handle 10 like 1 direction of arrow among Fig. 4 earlier; Like this, drive the 3rd dop 5 towards the swing of arrow 2 directions, drive the 4th dop 6 through the 3rd elastic component 9 and also swing towards arrow 2 directions through second elastic component 8; Then, treat this anchor clamps clamping light shield after, unclamp second handle 10 again and make it return to original position; Like this, the 3rd dop 5 and the 4th dop 6 also return to initial position, thereby; These anchor clamps are also fixed light shield firmly, prevent moving and landing of light shield, have improved the steadiness of anchor clamps.And, in the use, can control the motion of dop through handle, made things convenient for the use of these anchor clamps, increased the practicality of these anchor clamps.
Equally, in this embodiment, second handle 10 has been controlled the motion of the 3rd dop 5 and the 4th dop 6 simultaneously.Certainly, in other embodiment of the present invention, second handle 10 can only be controlled the motion of the 3rd dop 5 or the 4th dop 6.Like this; First end of the 3rd dop one end 5 and second support 22 flexibly connects; And the 3rd dop other end is connected with second handle 10 through second elastic component 8, and the 4th dop 6 one ends can be shown in above-mentioned embodiment one or embodiment two with being connected of second end of second support 22.Perhaps; The 3rd dop 5 with in being connected of second support 22 can be shown in above-mentioned embodiment one or embodiment two; And second end of the 4th dop 6 one ends and second support 22 flexibly connects, and the 4th dop other end is connected with second handle 10 through the 3rd elastic component 9.
In above-mentioned all embodiment, flexible connection comprises: folding or movable axis join.Elastic component comprises: spring or atmospheric pressure pole.
In above-mentioned all embodiment, preferably, first dop 3 and second dop 4 are for having the structure of hook.The 3rd dop 5 and the 4th dop 6 are baffle arrangement, and its shape comprises: rectangle or cylindrical.Certainly, among other embodiment of the present invention, also can be that first dop 3 and second dop 4 are baffle arrangement, and the 3rd dop 5 and the 4th dop 6 be for having the structure of hook.Perhaps, first dop 3, second dop 4, the 3rd dop 5 and the 4th dop 6 all are the structure that has hook.
In above-mentioned all embodiment, the material of dop is generally antistatic material, for example: teflon or pottery.
In the embodiment of the invention, the light shield anchor clamps comprise: first support and second support, and the dop corresponding respectively with every end of first support and second support; Like this; These anchor clamps can be located light shield at both direction, thereby when having prevented anchor clamps clamping light shield effectively, the landing of light shield.And anchor clamps clamping light shield can the vary angle, thereby conveniently from all directions light shield is checked.
And in the embodiment of the invention, each dop that is connected with second support can be up and down or swing, can further improve the steadiness of anchor clamps.In addition, in the embodiment of the invention,,, be convenient to the use of these light shield anchor clamps, improved the practicality of light shield anchor clamps through the dop that second handle control is connected with second support through the dop that first handle control is connected with first support.
Obviously, those skilled in the art can carry out various changes and modification to the present invention and not break away from the spirit and scope of the present invention.Like this, belong within the scope of claim of the present invention and equivalent technologies thereof if of the present invention these are revised with modification, then the present invention also is intended to comprise these changes and modification interior.
Claims (10)
1. light shield anchor clamps is characterized in that, comprising: first handle (1), first support (21), second support (22) and first dop (3), wherein,
One end of first support (21) is connected with said first handle (1), and the other end is provided with second dop (4);
Said second support (22) two ends are respectively arranged with the 3rd dop (5) and the 4th dop (6), and with cross connection of first support (21);
One end of said first dop (3) one ends and said first support (21) flexibly connects; The other end is connected with first handle (1) through first elastic component (7), and rotated to first handle (1) direction through the tractive force that first elastic component (7) applies by said first handle (1).
2. anchor clamps as claimed in claim 1 is characterized in that, first end of said the 3rd dop (5) one ends and said second support (22) flexibly connects, and the other end is connected with second support (22) through second elastic component (8).
3. according to claim 1 or claim 2 anchor clamps is characterized in that, second end of said the 4th dop (6) one ends and said second support (22) flexibly connects, and the other end is connected with second support (22) through the 3rd elastic component (9).
4. anchor clamps as claimed in claim 1 is characterized in that, also comprise: second handle (10);
Said second handle (10) flexibly connects with said second support (22).
5. anchor clamps as claimed in claim 4; It is characterized in that; First end of said the 3rd dop (5) one ends and said second support (22) flexibly connects; The other end is connected with second handle (10) through second elastic component (8), and rotated to the direction vertical with second support (22) through the tractive force that second elastic component (8) applies by said second handle (10).
6. like claim 4 or 5 described anchor clamps; It is characterized in that; Second end of said the 4th dop (6) one ends and said second support (22) flexibly connects; The other end is connected with second handle (10) through the 3rd elastic component (9), and rotated to the direction vertical with second support (22) through the tractive force that the 3rd elastic component (9) applies by said second handle (10).
7. like claim 1 or 4 described anchor clamps, it is characterized in that said first dop (3) and second dop (4) are for having the structure of hook.
8. like claim 1 or 4 described anchor clamps, it is characterized in that said second dop (5) or the 4th dop (6) are baffle arrangement, its shape comprises: rectangle or cylindrical.
9. like claim 1 or 4 described anchor clamps, it is characterized in that said first dop (3), second dop (4), second dop (5) or the 4th dop (6) are antistatic material.
10. like claim 1 or 4 described anchor clamps, it is characterized in that said flexible connection comprises: folding or movable axis join.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010105222880A CN102455590A (en) | 2010-10-22 | 2010-10-22 | Light shield clamp |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010105222880A CN102455590A (en) | 2010-10-22 | 2010-10-22 | Light shield clamp |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102455590A true CN102455590A (en) | 2012-05-16 |
Family
ID=46038927
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010105222880A Pending CN102455590A (en) | 2010-10-22 | 2010-10-22 | Light shield clamp |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102455590A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW556959U (en) * | 2002-12-05 | 2003-10-01 | Gudeng Prec Ind Co Ltd | Mask holder |
| CN201188170Y (en) * | 2008-03-14 | 2009-01-28 | 深圳深爱半导体有限公司 | Clamper for photolithography edition |
| CN101625528A (en) * | 2008-07-08 | 2010-01-13 | 中芯国际集成电路制造(上海)有限公司 | Mask clamp |
| TW201015211A (en) * | 2008-07-21 | 2010-04-16 | Min Kuan Technology Co | Photo mask holder |
-
2010
- 2010-10-22 CN CN2010105222880A patent/CN102455590A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW556959U (en) * | 2002-12-05 | 2003-10-01 | Gudeng Prec Ind Co Ltd | Mask holder |
| CN201188170Y (en) * | 2008-03-14 | 2009-01-28 | 深圳深爱半导体有限公司 | Clamper for photolithography edition |
| CN101625528A (en) * | 2008-07-08 | 2010-01-13 | 中芯国际集成电路制造(上海)有限公司 | Mask clamp |
| CN101625528B (en) * | 2008-07-08 | 2010-09-29 | 中芯国际集成电路制造(上海)有限公司 | Mask clamp |
| TW201015211A (en) * | 2008-07-21 | 2010-04-16 | Min Kuan Technology Co | Photo mask holder |
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Application publication date: 20120516 |