CN102453444A - Polishing solution used for amorphous alloy and polishing method of amorphous alloy - Google Patents

Polishing solution used for amorphous alloy and polishing method of amorphous alloy Download PDF

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CN102453444A
CN102453444A CN2010105196250A CN201010519625A CN102453444A CN 102453444 A CN102453444 A CN 102453444A CN 2010105196250 A CN2010105196250 A CN 2010105196250A CN 201010519625 A CN201010519625 A CN 201010519625A CN 102453444 A CN102453444 A CN 102453444A
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polishing
sodium
salt
ammonium
amorphous metal
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CN102453444B (en
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曹朝波
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BYD Co Ltd
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BYD Co Ltd
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Abstract

The invention provides a polishing solution used for an amorphous alloy and a polishing method of an amorphous alloy. The polishing solution comprises: a sodium salt, an ammonium salt and a brightener, i.e. ceric sulfate. The polishing method includes plasma polishing to an amorphous alloy. And the plasma polishing method consists of: connecting the amorphous alloy to a positive electrode, and immersing the amorphous alloy into an electrolytic cell containing the polishing solution, and taking the electrolytic cell body as a negative electrode for plasma polishing. The amorphous alloy prepared with the polishing solution provided in the invention and by the plasma polishing method of the invention has a smooth surface and high surface reflectivity.

Description

A kind of polishing fluid of non-crystaline amorphous metal and a kind of finishing method of non-crystaline amorphous metal of being used for
Technical field
The present invention relates to the field of surface treatment of non-crystaline amorphous metal, specifically, relate to a kind of polishing fluid of non-crystaline amorphous metal and a kind of finishing method of non-crystaline amorphous metal of being used for.
Background technology
At present, increasingly high to the appearance requirement of metalwork, in particular for the metalwork of electronic product, strict further to its surfaceness and the isoparametric composite request of surface albedo.The surface treatment of common metal spare comprises polishing, anodic oxidation, differential arc oxidation, plating etc.Wherein, effectively improve the metalwork surface property, also can be used as the operation in early stage of various (comprising features) process for modifying surface, for subsequent disposal is provided convenience thereby polishing can be used as metalwork surface-treated selection process.
Non-crystaline amorphous metal is that composed atom is that long-range is unordered, one type of novel alloy material of short range order, has the performances such as mechanics, physics and chemistry more excellent than conventional crystalline metallic material.Usually; The cooling rate of the non-crystaline amorphous metal of traditional method preparation is up to 104-106K/s; Because non-crystaline amorphous metal is in order to obtain so high rate of cooling; Need the metal or alloy that melts is ejected in the good substrate of thermal conductivity, the non-crystaline amorphous metal of acquisition also can only be some strips or filament, and people are through the AMORPHOUS ALLOY to low critical cooling rate in recent years; Found that some amorphous form critical speed and are low to moderate the alloy system below the 100K/s, can prepare bulk amorphous alloys through simple melt water quenching or copper mold casting method.Enjoy people to pay close attention to owing to the zirconium base large amorphous alloy possesses good amorphous formation ability, mechanical property and thermostability, wherein the Zr-Al-Cu-Ni system is one of best up to now bulk amorphous alloys formation system.
Amorphous alloy material with lot of advantages such as intensity height, hardness are high, wear resistance is good has received extensive concern at present; Consumer product area such as mobile phone have also been brought into use; But, also rest on the level of mechanical polishing at present for the polishing of amorphous alloy material about the rare bibliographical information of the technology of its polishing.Yet; Not only production efficiency is low, environmental pollution is serious to adopt mechanical polishing process; And because the high firmness of non-crystaline amorphous metal itself makes employing mechanical polishing very difficult for the mirror polish of non-crystaline amorphous metal, polishing effect is poor; Can't reach the mirror polish effect, this has also restricted the application of non-crystaline amorphous metal product.
Summary of the invention
The technical problem that the present invention will solve is that existing non-crystaline amorphous metal adopts mechanical polishing, and polishing efficiency is low, polishing effect is poor, is difficult to reach the shortcoming of mirror polish effect.
In view of the above, a kind of polishing salt that is used for non-crystaline amorphous metal provided by the invention comprises: sodium salt, ammonium salt and brightening agent, wherein, said brightening agent is a cerous sulfate.
In said polishing fluid, said sodium salt is selected from one or more in sodium-chlor, yellow soda ash, SODIUMNITRATE, sodium phosphate, sodium oxalate, sodium sulfate, Sodium orthomolybdate, sodium acetate, the sodium tartrate; Said ammonium salt is selected from one or more in ammonium chloride, ammonium molybdate, ammonium sulfate, monoammonium sulfate, an ammonium nitrate, volatile salt, bicarbonate of ammonia, Neutral ammonium fluoride, the matt salt; And the content of said sodium salt is 10-30g/L, and the content of said ammonium salt is 10-30g/L, and the content of said cerous sulfate is 10-100ppm.
In said polishing fluid, said sodium salt is a sodium sulfate, and content is 10-30g/L; Said ammonium salt is ammonium sulfate, ammonium molybdate and matt salt, and wherein, the content of ammonium sulfate is 10-28g/L, and the content of ammonium molybdate is 1-10 g/L, and the content of matt salt is 1-5 g/L.
In said polishing fluid, the content of said cerous sulfate is 30-50ppm.
In said polishing fluid, the content of said inhibiter is 1-20 g/L, includes at least two kinds in machine phosphonic acid and salt thereof, benzotriazole and the ammonium molybdate.
In said polishing fluid, said polishing fluid further contains one or both in complexing agent, the tensio-active agent; Said complexing agent is a Citrate trianion, and content is 10-30 g/L; Said tensio-active agent is selected from one or both in sulfo-succinic acid fat sodium salt, the ethylhexyl sodium sulfonate, and content is 0.5-7g/L.
The present invention also provides a kind of finishing method of non-crystaline amorphous metal, it is characterized in that, this method comprises carries out the plasma polishing to non-crystaline amorphous metal, wherein; The method of said plasma polishing comprises: non-crystaline amorphous metal is linked to each other with anode, and immersion accommodating in the electrolyzer of polishing fluid, is negative electrode with the cell body; Carry out the plasma polishing, wherein, the operating voltage of electrolyzer is the direct impulse voltage of 190-380V; Service temperature is 60-95 ℃, and the operating voltage frequency is 10-20KHz, dutycycle 5-50%.
In said finishing method, the operating voltage of electrolyzer is the forward square wave pulse voltage of 300-320V, and electric voltage frequency is 15-18KHz, and service temperature is 88-95 ℃.
In said finishing method, to carry out under the mild acid conditions that described plasma polishing is 5-7 at pH value, the time is 20s-10min.
In said finishing method, said finishing method also is included in non-crystaline amorphous metal is carried out earlier non-crystaline amorphous metal being carried out mechanical polishing before the plasma polishing.
Adopt finishing method of the present invention and polishing fluid that non-crystaline amorphous metal is polished, polishing efficiency is high, can reduce health harm and environmental hazard to the operator to a certain extent, and, the smooth surface of the non-crystaline amorphous metal that obtains after the polishing, surface albedo is high.Confirm that through overtesting adopt the non-crystaline amorphous metal after finishing method of the present invention polishes, its surfaceness is the 0.04-0.06 micron, surface albedo can reach 80%-85%.
Embodiment
The present invention provides a kind of finishing method of non-crystaline amorphous metal, and this method comprises carries out the plasma polishing to non-crystaline amorphous metal.Be useful on the surface-treated plasma polishing of magnesiumalloy in the prior art; The contriver is through a large amount of discovering in the non-crystaline amorphous metal field; The same plasma that is suitable for polishes, still, and the polishing fluid that the plasma polishing is adopted, polishing condition and existing plasma polishing and inequality.
Contriver of the present invention discovers and under the hf and hv pulse electric field, produces nonequilibrium plasma in the polishing fluid.Waveform and pulse parameter through the adjustment pulsed electrical field; Make that the energy state of each point all is in the fusion on the polished workpiece surface on time and space; Away from equilibrium process; This moment, plasma body produced intensive handing-over effect on polishing body surface, made workpiece surface microscopic protrusions position hit flat rapidly and reached polishing effect.Therefore; Compare traditional finishing method, the plasma polishing can increase substantially the surface gloss of non-crystaline amorphous metal workpiece, reduces surfaceness; Remove the burr burr that produce in the course of processing efficiently, improve when being in particular in surfaceness and surface albedo.
In addition, the plasma polishing is based on the principle of the bombardment effect and the polishing action of plasma body, applicable to various baroque workpiece.On the other hand; Adopt the high-frequency impulse electric field to replace DC electric field; In polishing process, can utilize pulse effects to quicken flowing of polishing fluid and renewal; Thereby with more efficiently, more excellent performance accomplishes the polishing to workpiece, also can save the electric energy that production process consumes simultaneously, reduce production costs.
The finishing method of non-crystaline amorphous metal provided by the present invention specifically comprises: non-crystaline amorphous metal being linked to each other with anode, and immerse and to accommodate in the electrolyzer of polishing fluid, is negative electrode with the cell body; Carry out the plasma polishing; Wherein, the operating voltage of electrolyzer is the forward square wave pulse voltage of 190-380V, and the operating voltage frequency is 10-20KHz; Service temperature is 60-95 ℃, and dutycycle is 5%-50%.
Under preferable case, the operating voltage of electrolyzer is 300-320V, and electric voltage frequency is 15-18KHz, and service temperature is 88-95 ℃, more helps reaching the effect of excellent polishing.
Among the present invention, the plasma polishing time is 20s-10min, and preferred 1-3min if polishing time is long, causes the non-crystaline amorphous metal workpiece surface by the acidic solution excessive corrosion easily; Polishing time is too short, and the plasma bombardment effect is not obvious, and the workpiece surface luminance brightness is poor.
Among the present invention, under mild acid conditions, carry out the polishing of non-crystaline amorphous metal workpiece, this mainly is to utilize the corrosive nature of acidic solution to workpiece.It can preferentially corrode the protruding part of workpiece surface, thereby finally obtains the better workpiece of surfaceness.If acidity is stronger, corrode too fastly, be prone to cause excessive erosion.On the other hand, corrosive nature is unfavorable for improving the surface albedo of workpiece, needs to combine isoionic effect, the two is carried out balance regulation could realize best polishing effect.In the present invention, the pH value of preferred said polishing fluid is 5-7.
Adopt square-wave pulse among the present invention; Because; Square wave can provide concentrated energy to be applied on the workpiece; Can in the extremely short time, form air film workpiece and electrolytic solution are isolated at the workpiece surface activated plasma, thus maximum efficiency workpiece is carried out the plasma bombardment effect, the realization polishing effect.Frequency is high more, just means that also the off time of each pulse square wave is short more, and the plasma air film that a last square wave causes just will disappear, and next square wave just can excite new air film again, thereby almost can form the successive air film, and the polishing effect of workpiece is better.
Plasma polishing of the present invention is that with the main difference part of existing plasma polishing the polishing fluid that is adopted is different from existing polishing fluid; Contain ammonium salt, sodium salt, brightening agent in the polishing fluid of the present invention; And, also optionally contain in complexing agent, inhibiter, tensio-active agent, the pH value regulator one or more; Solvent of the present invention can for existing can be with polishing salt dissolved all kinds of SOLVENTS, preferred deionized water.
In polishing fluid of the present invention, the content of said sodium salt is 10-30g/L, and the content of said ammonium salt is 10-30g/L.Wherein, one or more in the preferred sodium-chlor of sodium salt, yellow soda ash, SODIUMNITRATE, sodium phosphate, sodium oxalate, sodium sulfate, Sodium orthomolybdate, sodium acetate, the sodium tartrate; More preferably, sodium salt is a sodium sulfate, and addition is 10-30 g/L; In the preferred ammonium chloride of ammonium salt, ammonium molybdate, ammonium sulfate, monoammonium sulfate, an ammonium nitrate, volatile salt, bicarbonate of ammonia, Neutral ammonium fluoride, the matt salt one or more; More preferably; Ammonium salt is ammonium sulfate, ammonium molybdate and matt salt, and the addition of said ammonium sulfate is 10-28g/L; The addition of said ammonium molybdate is 1-10 g/L, and the addition of said matt salt is 1-5 g/L; The effect of said sodium salt and ammonium salt is as ionogen, for the plasma polishing provides plasma body.The sodium salt of the above-mentioned various components of mentioning and ammonium salt all can be through being purchased acquisition.
In the plasma polishing process, plasma body produces intensive handing-over effect on the polishing body surface, and it is flat to make workpiece surface microscopic protrusions position hit rapidly; When adopting general plasma polishing fluid to carry out the plasma polishing, the control polishing degree of depth should not be dark excessively, is generally the 5-20 micron; Because the polishing degree of depth is dark excessively, not only can removes workpiece surface microscopic protrusions position, and can produce impact other position of workpiece; Can form defective on the surface of workpiece, still, the polishing degree of depth is less; Can cause the plasma polishing can only remove the burr of workpiece surface again, the surface brightness after the plasma polishing is unsatisfactory.
Thereby, containing brightening agent in the polishing fluid of the present invention, said brightening agent is a cerous sulfate, and in polishing fluid of the present invention, the content of cerous sulfate is 10-100ppm, and more preferably, the content of cerous sulfate is 30-50ppm, helps obtaining better polishing effect.Said cerous sulfate is a kind of strong oxidizer, can facilitate the non-crystaline amorphous metal workpiece surface to form the fine and close sull of one deck, covers the defective of non-crystaline amorphous metal workpiece self; For example: owing to reasons such as moulding process and material purities; There are defectives such as microscopic protrusions and slight current mark in the non-crystaline amorphous metal workpiece surface, through the plasma polishing workpiece surface microscopic protrusions and rejected region are hit rapidly flat in, can remove sull partly; Two kinds of effects are carried out at workpiece surface simultaneously; Thereby the degree of depth of plasma polishing can be dark relatively, and polishing time also can be longer relatively; Microscopic protrusions and defective until workpiece surface is removed in the plasma polishing make the surface of polished workpiece reach a kind of polishing effect of intimate minute surface.
Preferably, contain inhibiter in the said polishing fluid, said inhibiter can be this area inhibiter commonly used, for example: oleic acid diethylolamine, water glass, imidazoles, sodium alkyl benzene sulfonate, trolamine, benzotriazole or the like.But in polishing fluid of the present invention, inhibiter is preferably the combination inhibiter, includes at least two kinds in machine phosphonic acid and salt thereof, benzotriazole and the ammonium molybdate, and the content of combination inhibiter is 1-20 g/L.Wherein, said organic phosphonate, for example: ATMP four sodium, ATMP potassium, HEDP sodium, ethylene diamine tetra methylene phosphonic acid five sodium etc.Said inhibiter preferred package contains organic phospho acid, benzotriazole and ammonium molybdate, and the addition of organic phospho acid is 1-5 g/L, and the addition of benzotriazole is 1-10g/L, and the addition of ammonium molybdate is 1-10g/L; In addition, what deserves to be mentioned is that said ammonium molybdate has concurrently as ammonium salt and as the effect of inhibiter simultaneously, wherein, the ammonium radical ion plays polishing action, and molybdenum acid ion plays corrosion inhibition, thereby, preferably in polishing fluid, add ammonium molybdate.Said combination inhibiter can make the polishing speed convergence of each metal ingredient in the non-crystaline amorphous metal workpiece identical; For example: with the Zr-Al-Cu-Ni amorphous alloy material is example, and generally speaking, the dissolution rate of Cu is higher, adds the polishing speed that the combination inhibiter can effectively reduce Cu, and identical with the polishing speed convergence of other several kinds of metals; And help the control of polishing time and effect.
The present invention is through adding specific brightening agent; Plasma polishing fluid with the combination inhibiter; Different with general plasma polishing fluid, the non-crystaline amorphous metal surface of adopting plasma polishing fluid of the present invention to carry out after plasma polishes has luminance brightness and lower roughness preferably.
Polishing fluid of the present invention also optionally contains complexing agent, and said complexing agent is a Citrate trianion, and addition is 10-30 g/L; Its role is to complexing and be polished to the metals ion in the polishing fluid, and can prolong the work-ing life of polishing fluid, in polishing fluid of the present invention; Complexing agent is preferably Trisodium Citrate and/or ammonium citrate; The combination of Trisodium Citrate and ammonium citrate more preferably, both are used, and the complexing effect is better.
Polishing fluid of the present invention also optionally contains tensio-active agent, and in the polishing fluid of the present invention, the content of tensio-active agent is 0.5-7 g/L.Said tensio-active agent is selected from one or both in sulfo-succinic acid ester sodium salt, the ethyl hexane sodium sulfonate (TC-EHS), is low alveolitoid tensio-active agent, its role is to reduce the surface tension of polishing fluid, promotes that polishing fluid fully contacts with workpiece.Under preferable case, said tensio-active agent contains sulfo-succinic acid ester sodium salt and TC-EHS simultaneously, and the addition of said sulfo-succinic acid ester sodium salt is 0.5-2g/L, and the addition of said TC-EHS is 1-5 g/L.
In order to make plasma polishing is to carry out under the mild acid conditions of 5-7 at pH value; Can adopt the PH regulator that the pH value of polishing fluid is regulated; Said PH regulator can be pH value regulator commonly used in this area; For example: can be in Hydrocerol A, YD 30, tartrate, the oxalic acid one or more, add according to required pH value.
The finishing method of non-crystaline amorphous metal of the present invention also comprises pre-treatment step before the plasma polishing; After the plasma polishing, also comprise post-processing step; Described pre-treatment step comprises that mechanical polishing, UW remove the wet goods step, and described post-processing step comprises steps such as pickling, neutralization.Concrete glossing is: mechanical polishing-UW oil removing-washing-plasma polishing-washing-pickling-washing-neutralization-washing-oven dry.
Wherein, Said mechanical polishing is that the non-crystaline amorphous metal workpiece is slightly thrown with the coarse cloth wheel earlier; Carry out half smart the throwing with wind wheel then, carry out essence with the calico wheel at last and throw, carry out mechanical polishing and can remove this burr that in press casting procedure, produces of non-crystaline amorphous metal workpiece, oxide debris etc.; Reduce the roughness on surface, improve the surface-brightening effect.The present invention utilizes the plasma polishing to combine with mechanical polishing, has improved polishing efficiency greatly, also reduces operator's health harm and environmental hazard simultaneously to a certain extent.
The purpose of said UW oil removing is to remove the grease and the oxide compound thereof of workpiece surface.The method of UW oil removing is a ultrasonic deoiling method known in those skilled in the art.For example: in the present invention, can the non-crystaline amorphous metal workpiece be placed sodium salt solution, be heated to 40 ℃ ± 5 ℃, ultrasonic cleaning 3-5 minute; Said sodium salt solution comprises Na 2CO 3With Na 3(PO 3) 2Mixing solutions, Na wherein 2CO 3Concentration be 15-20g/L, Na 3(PO 3) 2Concentration be 20-25g/L.
Said pickling is the non-crystaline amorphous metal workpiece to be immersed in the pickle solution soak, and purpose is to remove the sull and the metamorphic layer on surface, makes the non-crystaline amorphous metal surface active.The method of pickling is conventionally known to one of skill in the art.For example: in the present invention; Can the non-crystaline amorphous metal workpiece be immersed in the pickle solution and embathe 10-50s, said pickle solution is that content of hydrochloric acid is the acidic solution of 8wt%, also can be for containing the mixing solutions of nitric acid and sodium hydrogen fluoride; Wherein the concentration of nitric acid is 4.12-4.50g/L, NH 4HF 2Concentration be 75-85g/L.
Said neutralization is the non-crystaline amorphous metal workpiece to be immersed in the basic soln soak; Purpose be the neutralization because of above-mentioned acid pickling step at the residual acidic solution of workpiece surface; The neutral method is conventionally known to one of skill in the art; For example: in the present invention, can the amorphous alloy workpiece be soaked 10-30s in ammonia content is the ammoniacal liquor of 3-5wt%.
Finishing method of the present invention also is included in the washing step between each treatment process; To the not special restriction of the washing times between said each operation; As long as fully remove the treatment solution on non-crystaline amorphous metal surface clean; Under the preferable case, the washing times that after said ultrasonic oil removing, carries out is 1-3 time; The washing times that after said pickling, carries out is 4-6 time; The used water of washing step is various water of the prior art, and like municipal tap water, deionized water, zero(ppm) water, pure water or their mixture, the present invention is preferably deionized water.
Said exsiccant method can adopt the method for well known to a person skilled in the art, like vacuum-drying, seasoning, forced air drying.The present invention is preferably in temperature is 40-100 ℃ baking oven workpiece is dried.
In a word; Finishing method provided by the invention utilizes effective combination of plasma polishing and mechanical polishing; The polishing fluid of plasma polishing simultaneously adopts special polishing fluid of the present invention, and polishing efficiency is high, and makes the non-crystaline amorphous metal workpiece surface reach the effect of mirror-smooth.
Embodiment below in conjunction with concrete explains the present invention.
Embodiment 1
Embodiment 1 is used for explaining the finishing method of non-crystaline amorphous metal workpiece of the present invention and the polishing fluid of employing thereof;
Step 1, pre-treatment: 1) mechanical polishing: to being of a size of 150 * 50 mm 2The non-crystaline amorphous metal workpiece carry out mechanical polishing, slightly throw earlier with the coarse cloth wheel, carry out half smart the throwing with wind wheel then, carry out essence throwing with the calico wheel at last, make that the roughness of non-crystaline amorphous metal workpiece surface is the 0.08-0.15 micron; 2) UW oil removing: with the Na of 20g/L 2CO 3Na with 25g/L 3(PO 3) 2Mixing solutions 1000mL be heated to 40 ℃; With said non-crystaline amorphous metal workpiece in above-mentioned solution with ultrasonic cleaning 5 minutes, take out, be cooled to room temperature; 3) washing: again the non-crystaline amorphous metal workpiece was soaked in pure water 1 minute;
Step 2, plasma polishing:
1), the preparation polishing fluid: is solvent preparation 1L polishing fluid with the deionized water, the pH regulator to 6.5 of polishing fluid, in polishing fluid, each components contents is:
Sodium sulfate: 10g/L ammonium sulfate: 10g/L ammonium molybdate: 2g/L matt salt: 2g/L
Cerous sulfate: 50ppm organic phospho acid: 1g/L benzotriazole: 2g/L Trisodium Citrate: 15g/L
Ammonium citrate: 5g/L sulfo-succinic acid ester sodium salt: 1.5mL/L ethylhexyl sodium sulfonate: 2ml/L
2) plasma polishing: will pass through the non-crystaline amorphous metal workpiece of pre-treatment, and put into and adopt the plasma polishing in the polishing trough, be negative electrode with the stainless steel plate around in the polishing trough; Workpiece is an anode, is conducting medium with above-mentioned polishing fluid, and polishing condition is: pulsed operation voltage is set at 320V; Pulse-repetition is set at 15KHz; Dutycycle is 15%, and service temperature is 85 ℃, polishes 3 minutes;
Step 3, aftertreatment:
Non-crystaline amorphous metal workpiece after the polishing is handled through washing-pickling-washing-neutralization-washing-process steps such as oven dry; Wherein, pickling is that the non-crystaline amorphous metal workpiece is soaked 20s in content of hydrochloric acid is the acidic solution of 8wt%; Neutralization is that the amorphous alloy workpiece is soaked 150s in ammonia content is the ammoniacal liquor of 4wt%; Washing between each step all is in deionized water, to soak 1 minute; Then in temperature is 80 ℃ baking oven with obtaining non-crystaline amorphous metal spare A1 after the oven dry of amorphous alloy workpiece.
Embodiment 2
The difference of embodiment 2 and embodiment 1 is in the polishing fluid in the plasma polishing step that each components contents and polishing condition are different: wherein,
1) in said polishing fluid, each components contents is:
Sodium sulfate: 12g/L ammonium sulfate: 15g/L matt salt: 1g/L
Cerous sulfate: 30ppm organic phospho acid: 2g/L benzotriazole: 1g/L Trisodium Citrate: 20g/L
Sulfo-succinic acid ester sodium salt: 1mL/L ethylhexyl sodium sulfonate: 3ml/L
2) condition of plasma polishing is: pulsed operation voltage is set at 340V, and pulse-repetition is set at 12KHz, and dutycycle is 10%, and service temperature is 80 ℃, polishes 4 minutes;
Obtain non-crystaline amorphous metal spare A2 after the plasma polishing.
Embodiment 3
Embodiment 3 is that with the difference of embodiment 1 content of the cerous sulfate in the polishing fluid is 15ppm, obtains non-crystaline amorphous metal spare A3 after the plasma polishing.
Embodiment 4
Embodiment 4 is not contain in the polishing fluid in the plasma polishing step inhibiter (promptly not containing organic phospho acid, benzotriazole and ammonium molybdate) with the difference of embodiment 1, obtains non-crystaline amorphous metal spare A4 after the plasma polishing.
Embodiment 5
Embodiment 5 is not contain in the polishing fluid in the plasma polishing step complexing agent (promptly not containing Trisodium Citrate) with the difference of embodiment 1, obtains non-crystaline amorphous metal spare A5 after the plasma polishing.
Embodiment 6
Embodiment 6 is not contain in the polishing fluid in the plasma polishing step tensio-active agent (promptly not containing sulfo-succinic acid ester sodium salt and ethylhexyl sodium sulfonate) with the difference of embodiment 1, obtains non-crystaline amorphous metal spare A6 after the plasma polishing.
Comparative Examples 1
Comparative Examples 1 is with the difference of embodiment 1: do not contain cerous sulfate in the polishing fluid of employing, obtain non-crystaline amorphous metal spare R1 after the plasma polishing.
Comparative Examples 2
Comparative Examples 2 is with the difference of embodiment 1; The plasma polishing is replaced with the electric arc polished finish; The non-crystaline amorphous metal workpiece is immersed one contain in the electrolyzer of 5% oxalic acid and carry out the electric arc polished finish, the operating voltage of this electrolyzer is 300V, and actuating current is that 180A, service temperature are 95 ℃; Running time is 2 minutes, after washing, drying, obtains non-crystaline amorphous metal spare R2 through the non-crystaline amorphous metal that obtains after the polishing.
Performance test
1, surfaceness
Carry out the surfaceness test according to GB/T 3505-2000, adopt the TR200 hand-held roughmeter of Beijing Time Incorporation to measure;
2, surface albedo
Carry out the surface albedo test according to GB2680-1994, the ETF-05A type surface albedo tester that adopts Shenzhen to open special Science and Technology Ltd. is measured.
According to above-mentioned testing method, to the non-crystaline amorphous metal spare A1-A6 of embodiment 1-6, and the non-crystaline amorphous metal R1 of Comparative Examples 1-2, R2 carry out the performance test of surfaceness and surface albedo, and test result is as shown in table 1:
Table 1
The non-crystaline amorphous metal numbering Surfaceness (micron μ m) Surface albedo (%)
A1 (embodiment 1) 0.04 85
A2 (embodiment 2) 0.05 83
A3 (embodiment 3) 0.04 82
A4 (embodiment 4) 0.06 80
A5 (embodiment 5) 0.05 81
A6 (embodiment 6) 0.06 81
? ? ?
R1 (Comparative Examples 1) 0.10 65
R2 (Comparative Examples 2) 0.08 77
By knowing in the table 1; The non-crystaline amorphous metal of the finishing method preparation of the non-crystaline amorphous metal that the non-crystaline amorphous metal of the finishing method of the non-crystaline amorphous metal that embodiment of the invention 1-6 provides preparation provides compared to Comparative Examples 1-2 of the present invention; Have lower surfaceness, also have higher surface albedo height simultaneously.Prove absolutely, adopt the finishing method of non-crystaline amorphous metal provided by the present invention can reduce the surfaceness of non-crystaline amorphous metal effectively, can also effectively improve the surface albedo of non-crystaline amorphous metal simultaneously.

Claims (10)

1. polishing fluid that is used for non-crystaline amorphous metal, comprise: sodium salt, ammonium salt and brightening agent is characterized in that said brightening agent is a cerous sulfate.
2. polishing fluid according to claim 1 is characterized in that said sodium salt is selected from one or more in sodium-chlor, yellow soda ash, SODIUMNITRATE, sodium phosphate, sodium oxalate, sodium sulfate, Sodium orthomolybdate, sodium acetate, the sodium tartrate; Said ammonium salt is selected from one or more in ammonium chloride, ammonium molybdate, ammonium sulfate, monoammonium sulfate, an ammonium nitrate, volatile salt, bicarbonate of ammonia, Neutral ammonium fluoride, the matt salt; And the content of said sodium salt is 10-30g/L, and the content of said ammonium salt is 10-30g/L, and the content of said cerous sulfate is 10-100ppm.
3. polishing fluid according to claim 2 is characterized in that, said sodium salt is a sodium sulfate, and content is 10-30g/L; Said ammonium salt is ammonium sulfate, ammonium molybdate and matt salt, and wherein, the content of ammonium sulfate is 10-28g/L, and the content of ammonium molybdate is 1-10 g/L, and the content of matt salt is 1-5 g/L.
4. polishing fluid according to claim 1 and 2 is characterized in that, the content of said cerous sulfate is 30-50ppm.
5. polishing fluid according to claim 1 is characterized in that, also contains inhibiter in the said polishing fluid, and the content of said inhibiter is 1-20 g/L, includes at least two kinds in machine phosphonic acid and salt thereof, benzotriazole and the ammonium molybdate.
6. polishing fluid according to claim 1 is characterized in that said polishing fluid further contains one or both in complexing agent, the tensio-active agent; Said complexing agent is a Citrate trianion, and content is 10-30 g/L; Said tensio-active agent is selected from one or both in sulfo-succinic acid fat sodium salt, the ethylhexyl sodium sulfonate, and content is 0.5-7 g/L.
7. the finishing method of a non-crystaline amorphous metal is characterized in that, said finishing method comprises that non-crystaline amorphous metal is carried out plasma to be polished, and wherein, the method for said plasma polishing comprises:
Non-crystaline amorphous metal being linked to each other with anode, and immerse and to accommodate in the electrolyzer like any described polishing fluid of claim 1-6, is negative electrode with the cell body; Carry out the plasma polishing; Wherein, the operating voltage of electrolyzer is the direct impulse voltage of 190-380V, and the operating voltage frequency is 10-20KHz; Service temperature is 60-95 ℃, and dutycycle is 5-50%.
8. finishing method according to claim 7 is characterized in that, the operating voltage of electrolyzer is the forward square wave pulse voltage of 300-320V, and electric voltage frequency is 15-18KHz, and service temperature is 88-95 ℃.
9. finishing method according to claim 7 is characterized in that, carries out under the mild acid conditions that described plasma polishing is 5-7 at pH value, and the time is 20s-10min.
10. finishing method according to claim 7 is characterized in that, said finishing method also is included in non-crystaline amorphous metal is carried out earlier non-crystaline amorphous metal being carried out mechanical polishing before the plasma polishing.
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