CN102445670A - Alternating current Hall system - Google Patents
Alternating current Hall system Download PDFInfo
- Publication number
- CN102445670A CN102445670A CN2010105136442A CN201010513644A CN102445670A CN 102445670 A CN102445670 A CN 102445670A CN 2010105136442 A CN2010105136442 A CN 2010105136442A CN 201010513644 A CN201010513644 A CN 201010513644A CN 102445670 A CN102445670 A CN 102445670A
- Authority
- CN
- China
- Prior art keywords
- circuit
- hall
- sine wave
- isolating transformer
- magnetic field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Measuring Magnetic Variables (AREA)
Abstract
The invention relates to an alternating current Hall system which is used for detecting a magnetic field. The system comprises a sine wave generating circuit (1), a comparator (2), an isolation transformer (3), a load current sampling circuit (4), a Hall piece (5), a linear correction circuit (6), a key switch switching circuit (7), an isolation transformer (8), a sampling amplification circuit (9), an absolute value amplification circuit (10) and an output amplification circuit (11). Constant alternating current signals are injected into two input electrodes of the Hall device, the Hall piece (5) outputs the response of a magnetic field in an alternating current mode, and the design of the isolation transformer (3) and the isolation transformer (8) can effectively isolate parasitic direct current potential and prevent output drift. The method has the characteristics of strong interference prevention capability, high detection precision, convenience in debugging and the like.
Description
Technical field
The present invention relates to a kind of Hall system that is used to detect magnetic field, the interchange Hall system in particularly a kind of ion implantation apparatus of making semiconductor devices.
Background technology
Along with the semiconductor devices integrated level is more next high, wafer size is increasing, and the unit device size is more and more littler, and each semiconductor manufacturing equipment is had higher requirement.Ion implantation apparatus is as one of key equipment of semiconductor ion doping processing line, and the unit component size is more and more littler, and that wafer is injected the stability and the purity requirement of doping process line is more and more stricter.
In order to obtain needed ion beam, used multiple stabilized current supply, like source filter magnet power supply, the mass analyzer power supply, the collimated beam lens current supply is wrapped and the big electric current of the output of these power supplys all is connected to corresponding magnetic field line.And the stability and the precision of the purity of the stability of injection line and line and magnetic field B are closely related.In current most implanter system, the control in magnetic field changes the pattern that the Hall systematic sampling magnetic field B of directly being made up of Hall plate is controlled the output current of power supply into by current sampling control electric power outputting current steadily type.But owing to two pairs of electrodes of Hall plate are not to contact the rectifying effect that forms fully with semiconductor chip, and the spot size of two Hall electrodes does not wait, the thermal capacity difference causes the parasitic dc electromotive force that the temperature difference produces.Its time to time change causes the output drift.
Summary of the invention
To above-mentioned situation, patent of the present invention has been introduced the magnetic field sensing system that a kind of hall device exchanges output.
This patent is realized through following technical scheme: the magnetic field sensing system that a kind of hall device exchanges output comprises sine wave generating circuit (1), comparer (2), isolating transformer (3), load current sample circuit (4), Hall plate (5), linearity circuit (6), key switch commutation circuit (7), isolating transformer (8), sampling amplifying circuit (9), absolute value amplifying circuit (10), output amplifier (11).Its binding situation is each other seen Fig. 1.
Two input utmost points of described Hall plate (5) adopt the permanent alternating current source of being made up of sine wave generating circuit (1), comparer (2), isolating transformer (3), load current sample circuit (4), Hall plate (5) and sampling amplifying circuit (9) closed loop, adjustable, and hall device is exported with the form of AC signal the response in magnetic field; Isolating transformer (3) and isolating transformer (8) adopt high permeability ferrite P type magnetic core, and with the shielding of metal work durm, effective isolation parasitic dc electromotive force.
Described key switch commutation circuit (7) adopts the commutation circuits that key switchs constitute that join more, is used for the sine wave signal a2 that sine wave signal a1 that switch load current sample (4) collects and Hall plate (5) collect through linear correcting circuit (6).
The present invention has following remarkable advantage:
1. two input electrodes of Hall plate (5) are injected permanent AC signal, and Hall plate (5) adopts isolating transformer (3) and isolating transformer (8) ability effective isolation parasitic dc electromotive force to the form output of response to exchange in magnetic field, prevents the output drift.
2. the sine wave signal a2 that adopts sine wave signal a1 that switch switching circuit (7) switch load current sample (4) collects and Hall plate (5) to collect through linear correcting circuit (6); The solution of convenient debugging and fault.
Description of drawings:
Fig. 1 is a kind of interchange Hall of this patent system principle diagram.
Embodiment:
Below in conjunction with accompanying drawing and specific embodiment the present invention is done further introduction, but not as the qualification to this patent.
One embodiment of the present invention are as shown in fig. 1.
The magnetic field sensing system that a kind of hall device exchanges output has been shown among Fig. 1, and it comprises:
Sine wave generating circuit (1), comparer (2), isolating transformer (3), load current sample circuit (4), Hall plate (5), linearity circuit (6), key switch commutation circuit (7), isolating transformer (8), sampling amplifying circuit (9), absolute value amplifying circuit (10), output amplifier (11).Described sine wave generating circuit (1) produces fixed frequency, the sine wave signal of adjustable amplitude value; Described comparer (2) adopts technical grade op07 integrated transporting discharging; Isolating transformer (3) and isolating transformer (8) are used for isolating and amplifying the sine wave signal that collects; It is the Hall element of HGT-3010 that described Hall plate (5) adopts model; Described key switch switches (8) and adopts the commutation circuits that key switchs constitute that join more, is used for the sine wave signal a2 that sine wave signal a1 that switch load current sample (4) collects and Hall plate (5) collect through linear correcting circuit (6); The square-wave signal that described output amplifier (11) produces detected sine wave signal and absolute value amplifying circuit carries out detection and amplifies and just can obtain a magnitude of voltage that becomes curved line relation with magnetic field.
In this embodiment, two of Hall plate (5) the input utmost points adopt the permanent alternating current source of being made up of sine wave generating circuit (1), comparer (2), isolating transformer (3), load current sample circuit (4), Hall plate (5) and sampling amplifying circuit (9) closed loop, adjustable.The sine wave signal that described sine wave generating circuit (1) produces fixed frequency and adjustable amplitude value as reference signal and load current sampling (4) to the signal of sine wave signal a1 after sampling amplifying circuit (9) is handled compare the permanent alternating current source circuit of a closed-loop control of formation, hall device is exported with the form of AC signal the response in magnetic field.
In this embodiment, it is 2KPQ20/20 high permeability ferrite P type magnetic core that isolating transformer (3) and isolating transformer (8) adopt model, and line is 0.2mm directly, and shields with the metal work durm.When the two pairs of electrodes of Hall plate (5) and semiconductor chip are not to contact fully and the rectifying effect that forms; And the spot size of two Hall electrodes does not wait, the thermal capacity difference causes the parasitic dc electromotive force that the temperature difference produces, and isolating transformer (3) and isolating transformer (8) all will be effectively with its isolation.
In this embodiment, key switch commutation circuit (7) is used for the sine wave signal a2 that sine wave signal a1 that switch load current sample (4) collects or Hall plate (5) collect through linear correcting circuit (5).If when switching to the sine wave signal a1 that load current sampling (4) collects; Resulting magnitude of voltage promptly can be used as the reference signal of native system after isolating transformer (8), sampling amplifying circuit (9), absolute value amplifying circuit (10) and output amplifier (11) are handled; Process in debugging; Do not need externally-applied magnetic field B, just can each parameter in the native system (like enlargement factor of the frequency of permanent alternating current source and amplitude, output amplifier etc.) be debugged successfully; When parameter testing when success, just can be used for detecting magnetic field B as long as switch to sine wave signal that linearity circuit (5) collects.This key switch commutation circuit (7) is equally also very practical when fixing a breakdown, and only needs change-over switch, just can judge whether magnetic direction is correct.
The specific embodiment of this real patent elaborates the content of this patent.As far as persons skilled in the art, any conspicuous change of under the prerequisite that does not deviate from this patent spirit, it being done all constitutes the infringement to this patent, with corresponding legal responsibilities.
Claims (1)
1. a hall device exchanges the magnetic field sensing system of exporting; Be made up of sine wave generating circuit (1), comparer (2), isolating transformer (3), load current sample circuit (4), Hall plate (5), linearity circuit (6), key switch commutation circuit (7), isolating transformer (8), sampling amplifying circuit (9), absolute value amplifying circuit (10), output amplifier (11), its binding situation is each other seen Fig. 1.
It is characterized in that:
1. two input utmost points of described Hall plate (5) adopt the permanent alternating current source of being made up of sine wave generating circuit (1), comparer (2), isolating transformer (3), load current sample circuit (4), Hall plate (5) and sampling amplifying circuit (9) closed loop, adjustable, and hall device is exported with the form of AC signal the response in magnetic field; Isolating transformer (3) and isolating transformer (8) adopt high permeability ferrite P type magnetic core, and with the shielding of metal work durm, effective isolation parasitic dc electromotive force.
2. described key switch commutation circuit (7) adopts the commutation circuits that key switchs constitute that join more, is used for the sine wave signal a2 that sine wave signal a1 that switch load current sample (4) collects and Hall plate (5) collect through linear correcting circuit (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010513644.2A CN102445670B (en) | 2010-10-13 | 2010-10-13 | Alternating current Hall system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010513644.2A CN102445670B (en) | 2010-10-13 | 2010-10-13 | Alternating current Hall system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102445670A true CN102445670A (en) | 2012-05-09 |
| CN102445670B CN102445670B (en) | 2015-04-15 |
Family
ID=46008357
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201010513644.2A Active CN102445670B (en) | 2010-10-13 | 2010-10-13 | Alternating current Hall system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102445670B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103794199A (en) * | 2014-02-07 | 2014-05-14 | 大连佳音科技有限公司 | Piano keyboard motion detection device |
| CN105044423A (en) * | 2014-05-01 | 2015-11-11 | 日立金属株式会社 | Magnetic sensor |
| CN108427083A (en) * | 2017-02-15 | 2018-08-21 | 艾普凌科有限公司 | Magnetic sensor circuit |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006010370A (en) * | 2004-06-23 | 2006-01-12 | Renesas Technology Corp | Interface circuit of hall element, and system using it |
| CN200959327Y (en) * | 2006-04-07 | 2007-10-10 | 北京中科信电子装备有限公司 | Magnetic analytic system of ion filler |
| CN101308166A (en) * | 2007-05-18 | 2008-11-19 | 宝山钢铁股份有限公司 | Signal generation circuit for testing hall device electrical behavior |
-
2010
- 2010-10-13 CN CN201010513644.2A patent/CN102445670B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006010370A (en) * | 2004-06-23 | 2006-01-12 | Renesas Technology Corp | Interface circuit of hall element, and system using it |
| CN200959327Y (en) * | 2006-04-07 | 2007-10-10 | 北京中科信电子装备有限公司 | Magnetic analytic system of ion filler |
| CN101308166A (en) * | 2007-05-18 | 2008-11-19 | 宝山钢铁股份有限公司 | Signal generation circuit for testing hall device electrical behavior |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103794199A (en) * | 2014-02-07 | 2014-05-14 | 大连佳音科技有限公司 | Piano keyboard motion detection device |
| CN105044423A (en) * | 2014-05-01 | 2015-11-11 | 日立金属株式会社 | Magnetic sensor |
| CN105044423B (en) * | 2014-05-01 | 2019-02-19 | 日立金属株式会社 | Magnetic Sensor |
| CN108427083A (en) * | 2017-02-15 | 2018-08-21 | 艾普凌科有限公司 | Magnetic sensor circuit |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102445670B (en) | 2015-04-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP3121921B1 (en) | Residual current protection device | |
| CN100468066C (en) | Device for the reading of direct and/or alternating currents | |
| CN102338822B (en) | Current measuring device and current measuring method thereof | |
| CN102411130B (en) | Device and method for measuring magnetic declination of permanent magnet | |
| CA3153758A1 (en) | Circuit for alternating current and direct current leakage detection | |
| CN102445670A (en) | Alternating current Hall system | |
| US20200033391A1 (en) | Sensitive DC Current Imbalance Detector And Calibration Method | |
| CN110265964A (en) | Integrated SiC MOSFET module overcurrent and short-circuit protection circuit based on tunnel magneto resistance | |
| WO2018035932A1 (en) | Storage battery inspection apparatus | |
| Kulkarni et al. | An edge-intelligent, clip-on Rogowski current sensor with wide dynamic range | |
| CN102445671B (en) | A kind of Hall device error compensation circuit | |
| Niklaus et al. | High-bandwidth isolated voltage measurements with very high common mode rejection ratio for wbg power converters | |
| Schrittwieser et al. | Novel principle for flux sensing in the application of a DC+ AC current sensor | |
| CN103792445A (en) | Fully intelligent electric power overcurrent protection tester | |
| CN204925217U (en) | Constant current source output current detection device | |
| KR200456352Y1 (en) | Circuit for detecting current of ionless current sensor and system using therewith | |
| CN105588970B (en) | Fault current detection device | |
| CN102157965B (en) | Charging control device and voltage detecting method for eliminating switch internal resistance by voltage clamping | |
| CN102121974A (en) | Physical quantity sensor | |
| CN103066843A (en) | Detection circuit and obtaining method of power source and voltage of switch | |
| EP2686690A1 (en) | Method and device for linearizing a transformer | |
| CN108196159A (en) | A kind of DC leakage flow detection device | |
| US10884076B2 (en) | MI magnetic field sensor | |
| CN205749797U (en) | Audion reverse characteristic tester | |
| CN101782605B (en) | Digital diaphragm-vibrating type current sensor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20220510 Address after: 101111 1st floor, building 1, 6 Xingguang 2nd Street, Tongzhou District, Beijing Patentee after: Beijing Scintillation Section Zhongkexin Electronic Equipment Co.,Ltd. Address before: 101111 No. 6, Xingguang Second Street, Tongzhou Park optical electromechanical integration industrial base, Zhongguancun Science Park, Beijing Patentee before: BEIJING ZHONGKEXIN ELECTRONICS EQUIPMENT Co.,Ltd. |