CN102435358A - Thick film pressure sensor and manufacture method thereof - Google Patents
Thick film pressure sensor and manufacture method thereof Download PDFInfo
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- CN102435358A CN102435358A CN201110453946XA CN201110453946A CN102435358A CN 102435358 A CN102435358 A CN 102435358A CN 201110453946X A CN201110453946X A CN 201110453946XA CN 201110453946 A CN201110453946 A CN 201110453946A CN 102435358 A CN102435358 A CN 102435358A
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Abstract
The invention provides a thick film pressure sensor and a manufacture method thereof. The sensor comprises a ceramic base, a conductive band, four thick-film strain resistors, two compensation resistors and a glass protection film, wherein the thick-film strain resistors are printed on the elastic diaphragm of the ceramic base in a thick-film printing mode, and the compensation resistors are printed on the ceramic base in a thick-film printing mode. The manufacture method comprises the following steps: selecting the ceramic base, and printing the conductive band; in the thick-film printing mode, printing the thick-film strain resistors on the elastic diaphragm of the ceramic base and printing the compensation resistors on the ceramic base; printing a glass protection film on the ceramic base to obtain a sensor; carrying out load tests on the sensor at different temperatures; and regulating the resistance of the compensation resistors by a laser resistance regulation machine until the resistance value design requirement of the compensation resistors is reached. The thick film pressure sensor has the advantages of small zero and sensitivity drift, stable and reliable performance, strong environment adaptation ability and scientific technical design and is easy to realize.
Description
Technical field
The present invention relates to a kind of pressure transducer, specifically, related to a kind of thick film pressure transducer and preparation method thereof.
Background technology
Thick film pressure transducer is to be elastic body with the high-performance alumina ceramics; With the thick-film resistor with piezoresistive effect is strain resistor; The device that adopts the thick film screen printing technology print on ceramic elastic body, to process, at present, the base of ceramic that how integrated the elastic body of use is; Thick film pressure transducer is high temperature resistant, corrosion-resistant, can directly contact corrosion property material and need not to isolate, become one of major product in the pressure transducer.
Present thick film pressure transducer is made and is generally adopted the thick film screen printing technology, and promptly printing conductive band, thick-film strain resistor on the flexible sheet of base of ceramic are made thick-film strain resistor through high-sintering process, and forms full-bridge, to form sensor main body; Overload-resistant and compensation then realizes adjusting through the surface mount Chip-R at base of ceramic, to reach purposes such as zero compensation, sensitivity compensation; But,, have certain deviation with actual demand because Chip-R selects to rely on Theoretical Calculation to get; Compensation generally can not reach ideal effect; When environmental influence, like influence of temperature variation, fluctuation appears in sensor performance easily; Use thereby influence product, the restriction sensor is in the popularization in middle-and high-end applications field.
In order to solve the problem of above existence, people are seeking a kind of desirable technical solution always.
Summary of the invention
The objective of the invention is deficiency to prior art; Thereby the thick film pressure transducer that a kind of zero point and sensitivity drift are little, stable and reliable for performance, accommodative ability of environment is strong is provided, the method for making of the thick film pressure transducer that a kind of technological design science also is provided, is easy to realize.
To achieve these goals; The technical scheme that the present invention adopted is: a kind of thick film pressure transducer; It comprises base of ceramic, conductive strips, four thick-film strain resistors, two compensating resistances and glass protection film; Said thick-film strain resistor adopts the thick film screen printing mode to be printed on the flexible sheet of said base of ceramic, and said compensating resistance adopts the thick film screen printing mode to be printed on the said base of ceramic.
Based on above-mentioned, said compensating resistance is near the flexible sheet edge printing of said base of ceramic.
A kind of method for making of thick film pressure transducer, it may further comprise the steps:
Step 4, employing glass protection slurry printed glass diaphragm on said base of ceramic, oven dry back sinter molding makes sensor;
Step 5, said sensor placed the constant temperature humidity chamber of proving installation; And said sensor is connected with the laser resistance adjuster of proving installation, then, regulate said constant temperature humidity chamber; Under different temperatures, carry out load test; And said compensating resistance is carried out resistance adjustment through said laser resistance adjuster, until the resistance designing requirement that reaches said compensating resistance, then accomplish the making of thick film pressure transducer.
Based on above-mentioned, the material of said base of ceramic is selected the alundum (Al more than 96% for use.
Based on above-mentioned, said electrocondution slurry is selected silver-colored palladium slurry for use.
Based on above-mentioned, the ruthenium that said strain resistor slurry and said compensating resistance slurry all select for use temperature coefficient to be not more than 50ppm/ ℃ is a thick-film resistor paste, and side's resistance of said strain resistor slurry and said compensating resistance slurry is different.
Based on above-mentioned, said strain resistor slurry is consistent with the temperature coefficient of said compensating resistance slurry.
The relative prior art of the present invention has outstanding substantive distinguishing features and marked improvement; Specifically; This thick film pressure transducer adopts incorporate design, will adopt the compensating resistance of thick film screen printing technology print to replace existing Chip-R earlier, then thick film pressure transducer is carried out functional test; And under the functional test state, utilize the resistance of the method adjustment compensating resistance of laser resistor trimming, so that the resistance of compensating resistance reaches best user mode; Thick film pressure transducer zero point and the sensitivity drift of adopting this method for making to make are little, stable and reliable for performance, suit under different condition, to use, and have highly application value.
Description of drawings
Fig. 1 is a structural representation of the present invention.
Embodiment
Through embodiment, technical scheme of the present invention is done further detailed description below.
As shown in Figure 1; A kind of thick film pressure transducer; It comprises base of ceramic 1, conductive strips 2, four thick-film strain resistors, two compensating resistances and glass protection film; Said thick-film strain resistor adopts the thick film screen printing mode to be printed on the flexible sheet 3 of said base of ceramic 1, and said compensating resistance adopts the thick film screen printing mode to be printed on the said base of ceramic 1, and two said compensating resistances are near the flexible sheet 3 edge printings of said base of ceramic 1; Be that said compensating resistance is printed on the zone beyond the said flexible sheet 3, do not injure said flexible sheet 3 during with assurance laser resistor trimming.
A kind of method for making of thick film pressure transducer, it may further comprise the steps:
Step 4, employing glass protection slurry printed glass diaphragm on said base of ceramic, oven dry back sinter molding makes said thick-film strain resistor and said compensating resistance on the said base of ceramic be able to protection, makes sensor with this.
Step 5, said sensor placed the constant temperature humidity chamber of proving installation; And said sensor is connected with the laser resistance adjuster of proving installation, then, regulate said constant temperature humidity chamber; Under different temperatures, carry out load test; And said compensating resistance is carried out resistance adjustment through said laser resistance adjuster, until the resistance designing requirement that reaches said compensating resistance, then accomplish the making of thick film pressure transducer.
Should be noted that at last: above embodiment is only in order to technical scheme of the present invention to be described but not to its restriction; Although with reference to preferred embodiment the present invention has been carried out detailed explanation, the those of ordinary skill in affiliated field is to be understood that: still can specific embodiments of the invention make amendment or the part technical characterictic is equal to replacement; And not breaking away from the spirit of technical scheme of the present invention, it all should be encompassed in the middle of the technical scheme scope that the present invention asks for protection.
Claims (7)
1. thick film pressure transducer; Comprise base of ceramic, conductive strips, four thick-film strain resistors, two compensating resistances and glass protection film; It is characterized in that: said thick-film strain resistor adopts the thick film screen printing mode to be printed on the flexible sheet of said base of ceramic, and said compensating resistance adopts the thick film screen printing mode to be printed on the said base of ceramic.
2. thick film pressure transducer according to claim 1 is characterized in that: said compensating resistance is near the flexible sheet edge printing of said base of ceramic.
3. the method for making of the described thick film pressure transducer of claim 1 is characterized in that, it may further comprise the steps: step 1, choose incorporate thick film pressure transducer and use base of ceramic; Step 2, employing thick film screen printing mode adopt electrocondution slurry printing conductive band on said base of ceramic, after being completed for printing, dry earlier, sinter molding again; Step 3, employing thick film screen printing mode; Adopt the strain resistor slurry on the flexible sheet of said base of ceramic, to print four thick-film strain resistors, adopt the compensating resistance slurry on said base of ceramic, to print two compensating resistances, after being completed for printing; Dry earlier, again sinter molding; Step 4, employing glass protection slurry printed glass diaphragm on said base of ceramic, oven dry back sinter molding makes sensor; Step 5, said sensor placed the constant temperature humidity chamber of proving installation; And said sensor is connected with the laser resistance adjuster of proving installation, then, regulate said constant temperature humidity chamber; Under different temperatures, carry out load test; And said compensating resistance is carried out resistance adjustment through said laser resistance adjuster, until the resistance designing requirement that reaches said compensating resistance, then accomplish the making of thick film pressure transducer.
4. the method for making of thick film pressure transducer according to claim 3, it is characterized in that: the material of said base of ceramic is selected the alundum (Al more than 96% for use.
5. the method for making of thick film pressure transducer according to claim 3, it is characterized in that: said electrocondution slurry is selected silver-colored palladium slurry for use.
6. the method for making of thick film pressure transducer according to claim 3; It is characterized in that: the ruthenium that said strain resistor slurry and said compensating resistance slurry all select for use temperature coefficient to be not more than 50ppm/ ℃ is a thick-film resistor paste, and side's resistance of said strain resistor slurry and said compensating resistance slurry is different.
7. the method for making of thick film pressure transducer according to claim 6, it is characterized in that: said strain resistor slurry is consistent with the temperature coefficient of said compensating resistance slurry.
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| CN201110453946XA CN102435358A (en) | 2011-12-30 | 2011-12-30 | Thick film pressure sensor and manufacture method thereof |
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| CN201110453946XA CN102435358A (en) | 2011-12-30 | 2011-12-30 | Thick film pressure sensor and manufacture method thereof |
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| CN102435358A true CN102435358A (en) | 2012-05-02 |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103047927A (en) * | 2012-12-18 | 2013-04-17 | 无锡莱顿电子有限公司 | Piezoresistive strain gauge with ceramic substrate |
| CN103698060A (en) * | 2013-12-25 | 2014-04-02 | 中北大学 | Wireless passive high-temperature pressure sensor with temperature compensation and temperature compensation algorithm thereof |
| CN105092138A (en) * | 2014-05-12 | 2015-11-25 | 刘胜 | Thick film pressure sensor and manufacturing method thereof |
| CN105806521A (en) * | 2016-05-25 | 2016-07-27 | 深圳市欧利德仪器仪表有限公司 | Ceramic pressure sensor |
| CN107870054A (en) * | 2016-09-22 | 2018-04-03 | 罗伯特·博世有限公司 | Sense the pressure sensor and its manufacture method of fluid medium pressure |
| CN108444621A (en) * | 2018-05-28 | 2018-08-24 | 深圳研勤达科技有限公司 | A kind of ceramic resistance type pressure sensor |
| CN110057486A (en) * | 2019-04-15 | 2019-07-26 | 绍兴文理学院元培学院 | A kind of ceramic thick film pressure sensor preparation process |
| CN115855327A (en) * | 2023-02-22 | 2023-03-28 | 成都凯天电子股份有限公司 | Adjustable resistance ceramic substrate applied to silicon piezoresistive pressure sensor and manufacturing method thereof |
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| CN101639394A (en) * | 2008-08-01 | 2010-02-03 | 上海朝辉压力仪器有限公司 | Position structure of compensation resistors and inductive resistors in thick film pressure sensor |
| KR100941996B1 (en) * | 2009-10-09 | 2010-02-11 | 지에프텍 주식회사 | Semiconductor pressure sensor |
| CN101865749A (en) * | 2010-06-28 | 2010-10-20 | 山东佰测仪表有限公司 | Ring-opening silicon substrate pressure sensor thick film circuit |
| CN202403843U (en) * | 2011-12-30 | 2012-08-29 | 郑州炜盛电子科技有限公司 | Thick film pressure sensor |
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2011
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US4932265A (en) * | 1987-12-11 | 1990-06-12 | The Babcock & Wilcox Company | Pressure transducer using thick film resistor |
| US5142915A (en) * | 1990-07-06 | 1992-09-01 | Siemens Automotive L.P. | Method for fabrication of force sensing elements by laminating dielectric tape |
| CN2231415Y (en) * | 1995-02-24 | 1996-07-17 | 黄国伟 | Ceramic thick film strain pressure sensor |
| CN1142049A (en) * | 1995-07-28 | 1997-02-05 | 山东三鑫科技(集团)股份有限公司 | Ceramic capacitor-type pressure transmitter and production technology thereof |
| CN2309567Y (en) * | 1997-07-15 | 1999-03-03 | 襄樊市信城电器有限责任公司 | Ceramic thick-film strain pressure transducer |
| CN1215157A (en) * | 1998-10-31 | 1999-04-28 | 中国科学院合肥智能机械研究所 | Thick film micropressure sensor and making method thereof |
| CN2720414Y (en) * | 2004-04-14 | 2005-08-24 | 合肥旭宁科技有限公司 | Thick-film multi-dimension force-feeling array sensor |
| CN101639394A (en) * | 2008-08-01 | 2010-02-03 | 上海朝辉压力仪器有限公司 | Position structure of compensation resistors and inductive resistors in thick film pressure sensor |
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| CN101865749A (en) * | 2010-06-28 | 2010-10-20 | 山东佰测仪表有限公司 | Ring-opening silicon substrate pressure sensor thick film circuit |
| CN202403843U (en) * | 2011-12-30 | 2012-08-29 | 郑州炜盛电子科技有限公司 | Thick film pressure sensor |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103047927A (en) * | 2012-12-18 | 2013-04-17 | 无锡莱顿电子有限公司 | Piezoresistive strain gauge with ceramic substrate |
| CN103047927B (en) * | 2012-12-18 | 2016-03-02 | 无锡莱顿电子有限公司 | Ceramic bases pressure resistance type foil gauge |
| CN103698060A (en) * | 2013-12-25 | 2014-04-02 | 中北大学 | Wireless passive high-temperature pressure sensor with temperature compensation and temperature compensation algorithm thereof |
| CN103698060B (en) * | 2013-12-25 | 2015-08-12 | 中北大学 | Wireless and passive high-temp pressure sensor with temperature compensation and temperature compensation algorithm thereof |
| CN105092138A (en) * | 2014-05-12 | 2015-11-25 | 刘胜 | Thick film pressure sensor and manufacturing method thereof |
| CN105806521A (en) * | 2016-05-25 | 2016-07-27 | 深圳市欧利德仪器仪表有限公司 | Ceramic pressure sensor |
| CN107870054A (en) * | 2016-09-22 | 2018-04-03 | 罗伯特·博世有限公司 | Sense the pressure sensor and its manufacture method of fluid medium pressure |
| CN108444621A (en) * | 2018-05-28 | 2018-08-24 | 深圳研勤达科技有限公司 | A kind of ceramic resistance type pressure sensor |
| CN110057486A (en) * | 2019-04-15 | 2019-07-26 | 绍兴文理学院元培学院 | A kind of ceramic thick film pressure sensor preparation process |
| CN110057486B (en) * | 2019-04-15 | 2020-12-18 | 绍兴文理学院元培学院 | Preparation process of ceramic thick film pressure sensor |
| CN115855327A (en) * | 2023-02-22 | 2023-03-28 | 成都凯天电子股份有限公司 | Adjustable resistance ceramic substrate applied to silicon piezoresistive pressure sensor and manufacturing method thereof |
| CN115855327B (en) * | 2023-02-22 | 2023-06-09 | 成都凯天电子股份有限公司 | Adjustable resistance ceramic substrate applied to silicon piezoresistive pressure sensor and manufacturing method thereof |
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Application publication date: 20120502 |