CN102431099A - Cutting device - Google Patents

Cutting device Download PDF

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Publication number
CN102431099A
CN102431099A CN2011102574312A CN201110257431A CN102431099A CN 102431099 A CN102431099 A CN 102431099A CN 2011102574312 A CN2011102574312 A CN 2011102574312A CN 201110257431 A CN201110257431 A CN 201110257431A CN 102431099 A CN102431099 A CN 102431099A
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CN
China
Prior art keywords
cover
water tank
cutting
downstream
peristome
Prior art date
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Pending
Application number
CN2011102574312A
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Chinese (zh)
Inventor
石山慎一
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Disco Corp
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Disco Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Disco Corp filed Critical Disco Corp
Publication of CN102431099A publication Critical patent/CN102431099A/en
Pending legal-status Critical Current

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Abstract

The present invention provides a cutting device, which comprises a compact and inexpensive brush unit capable of sweeping the leftover back into the lower side of a plate-shaped cover. The cutting device comprises a workbench maintaining mechanism; a cutting member; a cutting liquid feeding member; and a machining feeding member. The cutting device comprises a water tank with an opening part and an upright part; a chip recovery box arranged adjacent to the downstream side of the water tank; a corrugated cover covering the opening part on the upstream side of the water tank and the upper part of the machining feeding member; a plate-shaped cover covering the opening part on the downstream side of the water tank. One end of the plate-shaped cover is fixed to the workbench maintaining mechanism and the other end of the plate-shaped cover is a free end with an end wall; and a brush unit arranged on the end wall of the plate-shaped cover. The brush unit comprises a first member fixed to the end wall; and a second member arranged on the first member through a hinge.

Description

Topping machanism
Technical field
The present invention relates to cut the topping machanism of machined object while supplying with cutting fluid.
Background technology
Integrated circuit), LSI (Large Scale Integration: component such as large scale integrated circuit) for example in the manufacturing process of semiconductor packages, at first on the surface of semiconductor wafer, form a plurality of IC (Integrated Circuit:.Then; The semiconductor wafer that is formed with component is cut and be divided into semiconductor chip one by one; The semiconductor chip that is partitioned into is assemblied in substrate; And then behind joint,, form and be known as CSP (Chip Size Package: chip size packages) substrate or QFN (Quad Flat Non-leaded Package: the square flat non-pin encapsulation) base plate for packaging of substrate with resin-sealed.Then, utilize the for example disclosed topping machanism cutting of TOHKEMY 2006-315140 communique base plate for packaging, produce semiconductor packages one by one.
Topping machanism possesses: keep table mechanism, it comprises the maintenance workbench that machined objects such as base plate for packaging are kept; Cutting member, it constitutes cutting tool is installed on main shaft, and this cutting tool is to being cut by the machined object that keeps workbench to keep; And processing feeding member, it makes and keeps table mechanism to move in the direction with the axis direction quadrature of main shaft.
And, get into processing feeding member in order to prevent cutting fluid, smear metal, set in the processing direction of feed both sides that keep table mechanism by the cloth that can stretch or with the corrugated cover that the similar sheet material of cloth constitutes and processed the feeding member to cover.
On the other hand, if cut base plate for packaging, then form a plurality of semiconductor packages, and the zone that does not set semiconductor chip that is present in the outer peripheral edges of base plate for packaging produces as smear metal with topping machanism.The smear metal that produces also is known as leftover pieces, exists these leftover pieces to cause the damaged problem of corrugated cover on the corrugated cover because of cutting fluid is splashed to.
In order to address this problem; The applicant is in TOHKEMY 2009-90401 communique; Following topping machanism has been proposed: will have the corrugated cover of the side that cutting fluid splashes (downstream on the processing direction of feed) to change to the tabular cover that forms by metal, and prevent the breakage of the corrugated cover that leftover pieces cause thus.
In the disclosed topping machanism of TOHKEMY 2009-90401 communique, be equipped with brush device at the free end of tabular cover, prevent that through this brush device leftover pieces from getting into the below of tabular cover.
Brush device possesses the shift mechanisms such as solenoid that utilized with the shift action interlock that keeps workbench; So that at tabular cover with keeping table mechanism on the processing direction of feed downstream during side shifting; Brush device and the sliding-contact of water tank bottom surface; And when side shifting upstream, brush device is in the retreating position that leaves from the water tank bottom surface.
Patent documentation 1: TOHKEMY 2006-315140 communique
Patent documentation 2: TOHKEMY 2009-90401 communique
But in having utilized the shift mechanism that makes solenoid that brush device moves etc., structure becomes complicated and also expends manufacturing expense.Simplify the structure in order to make; Only brush device is fixedly set in the free end of tabular cover if do not possess shift mechanism; Then tabular sometimes covering on keeping table mechanism upstream can leftover pieces be involved in during side shifting swept leftover pieces the below of getting back to tabular cover.
Sweep get back to tabular cover below leftover pieces accumulate after, have following problem: not only make the brush device of the free end that is fixedly set in tabular cover damaged, also hindered moving of tabular cover, or made tabular cover self breakage.
Summary of the invention
The present invention accomplishes in view of this point, and its purpose is, the topping machanism of the brush unit that possesses compactness and cheapness is provided, and can reduce the situation of leftover pieces being swept the below of getting back to tabular cover.
According to the present invention, a kind of topping machanism is provided, it possesses: keep table mechanism, it comprises the maintenance workbench that keeps machined object; Cutting member, it constitutes at main shaft cutting tool is installed, and this cutting tool cuts the machined object that is kept by said maintenance workbench; The cutting fluid supply member, it supplies with cutting fluid to said cutting tool; And processing feeding member; It makes said maintenance table mechanism move in the processing direction of feed with the axis direction quadrature of said main shaft; In this topping machanism, make the cutting fluid of supplying with to said cutting tool follow the rotation of this cutting tool and the side of splashing is the downstream of processing direction of feed, the opposition side that makes this downstream is a upstream side; Said topping machanism is characterised in that
Said topping machanism possesses:
Water tank, said water tank have peristome and center on the rising portions of this peristome, and said peristome covers said processing feeding member, and said maintenance table mechanism is being inserted in the mode that said processing direction of feed moves in this peristome;
The smear metal collection box, said smear metal collection box is adjacent to be equipped on the downstream of said water tank;
Corrugated cover, said corrugated cover cover and are positioned at the said peristome of upstream side with respect to said maintenance table mechanism, and cover the top of said processing feeding member;
Tabular cover; Said tabular cover covers the said peristome that is positioned at the downstream with respect to said maintenance table mechanism; And an end of the said processing feeding of the covering of said tabular cover member is fixed in said maintenance table mechanism, and the other end of said tabular cover is the free end with end wall; And
Brush unit, said brush unit are equipped on the said end wall of said tabular cover, be used for the foreign matter of the bottom of said water tank is scanned out said smear metal collection box,
Said brush unit comprises: first parts that are fixed in said end wall; Be installed on second parts of said first parts via hinge; And the brush that is disposed at the end of said second parts, thereby said end wall becomes the rotation that retainer stops the side upstream of said brush, and said brush is side rotation downstream only.
In the topping machanism of the present invention, in the brush unit, first parts are fixed in the free-ended end wall of tabular cover, and second parts link via hinge and first parts, are equipped with brush at the terminal part of second parts.Therefore; At tabular cover with keeping table mechanism downstream during side shifting; Brush is through the tilt upstream with the frictional resistance of water tank bottom surface; But the end wall of tabular cover plays a role as retainer, and brush can not rotate to the upstream side of end wall, therefore can efficiently the leftover pieces of water tank bottom surface be swept in the smear metal collection box.
With keeping table mechanism upstream during side shifting, brush is through the tilt downstream with the frictional resistance of water tank bottom surface at tabular cover.Brush is adapted to side rotation downstream via hinge, therefore only relies on self gravitation to contact with the water tank bottom surface, therefore can reduce the situation that leftover pieces are swept back.Even leftover pieces lodge in the below of tabular cover just in case sweep back leftover pieces,, also can prevent the situation that causes brush unit damaged because the hinge of brush unit is opened.
Description of drawings
Fig. 1 is the stereoscopic figure of the topping machanism of embodiment of the present invention.
Fig. 2 is the stereogram that expression keeps the structure of workbench peripheral part.
Fig. 3 is the exploded perspective view of water tank and tabular cover part.
Fig. 4 is the partial cut away side views of expression processing feeding member and relational structure.
Fig. 5 is the profile of tabular cover.
Fig. 6 is the part section end view drawing of relation of brush unit and the nozzle of the tabular cover of expression.
Fig. 7 keeps the table mechanism action specification figure of the brush unit during side shifting downstream.
Fig. 8 keeps the table mechanism action specification figure of the brush unit during side shifting upstream.
Fig. 9 sweeps back leftover pieces and the action specification figure of the brush unit of leftover pieces when lodging in the below of tabular cover.
Label declaration
2: topping machanism; 6: keep workbench; 7: keep table mechanism; 8a, 8b: cutting unit; 12: corrugated cover; 14: tabular cover; 18: cutting tool; 28: processing feeding member; 42: water tank; 44: peristome; 48: framework; 48a: rising portions; 58: brush unit; 68: the first parts; 70: hinge; 72: the second parts; 76: brush; 78: leftover pieces.
The specific embodiment
Below the embodiment that present invention will be described in detail with reference to the accompanying.With reference to Fig. 1, show the stereoscopic figure of the topping machanism 2 of embodiment of the present invention.Topping machanism 2 is the topping machanisms with two cutting ways of two cutting units (cutting member) 8A, 8B, is particularly suited for the cutting of base plate for packaging 4.
That is, in this topping machanism 2, keeping attracting to remain potted substrate 4 on the workbench 6, can cut 2 of base plate for packaging 4 simultaneously through the 1st cutting unit 8A and the 2nd cutting unit 8B and cut apart preset lines.
Label 10 is the shooting members that possess the CCD camera etc. in the zone that shooting should cut, and based on by taking the image that member 10 photographs, detecting through methods such as pattern match should be through the zone of the 1st cutting unit 8A and/or the 2nd cutting unit 8B cutting.At the upstream side of the X-direction (processing direction of feed) that keeps workbench 6, be equipped with the corrugated cover 12 of the processing feeding member of stating after being used to protect, be equipped with tabular cover 14 in the downstream.
As shown in Figure 4, the 1st cutting unit 8A comprises the cutting tool 18 that can be installed on the terminal part of main shaft 16 with loading and unloading, and roughly the first half of cutting tool 18 is covered by cutter hood 20.Cutter hood 20 possesses cutting fluid supply member 24, and this cutting fluid supply member 24 has a pair of nozzle of cutting fluid 22 of table side and dorsal part, and this nozzle of cutting fluid 22 is supplied with cutting fluid near the processing stand of cutting tool 18.
The 2nd cutting unit 8B also likewise constitutes with the 1st cutting unit 8A, and the 1st cutting unit 8A and the 2nd cutting unit 8B can both move in Y direction (index feed direction) and Z-direction (incision direction of feed) independently.
As shown in Figure 4, along X-direction the processing feeding member 28 that keeps workbench 6 to process feeding is comprised: can be supported on the ball-screw 32 on the matrix 26 rotatably through pair of engage members 30a, 30b; Thereby link the motor 34 that drives ball-screw 32 rotations with an end of ball-screw 32; Be built-in with the nut that screws togather with ball-screw 32 and support the sliding part 36 that keeps workbench 6; And the guide rail 37 that moves of the X-direction of guided slidable part 36.
The maintenance workbench 6 that attraction remains potted substrate 4 is equipped on the supporting base 38; Supporting base 38 is adapted to through processing feeding member 28 and can moves in X-direction, between supporting base 38 and sliding part 36, is provided with and makes the θ rotating member 40 that keeps workbench 6 in horizontal plane, to rotate.Through θ rotating member 40, can in the XY plane, adjust rotatably by the base plate for packaging 4 that keeps workbench 6 to be kept towards.
The topping machanism 2 of this embodiment possesses to cover the water tank 42 that processing feeding member 28 whole modes set.Water tank 42 shows peristome 44; Peristome 44 forms: by the maintenance table mechanism 7 that keeps workbench 6, supporting base 38 and θ rotating member 40 to constitute based on the driving of processing feeding member 28 and mobile scope, peristome 44 can not hinder said moving.
Water tank 42 utilize topping machanism 2 housing a part and constitute, as shown in Figure 3, along the both sides of X-direction, be formed with the drainage channel 46 that is used to discharge cutting fluid etc. as the processing direction of feed.
In order to make cutting fluid etc. be not easy to get in the peristome 44, center on by the framework with rising portions 48a 48 around the peristome 44, this rising portions 48a form with erecting in case can the high position of ratio drainage channel 46.Be provided with the pair of guide rails 50 of extending on the roughly total length at water tank 42 in the both sides of framework 48.
Be when processing the downstream of direction of feed with respect to keeping workbench 6 to establish through the direction that makes cutting tool 18 cutting fluid splashed to the rotation of R direction; Downstream at water tank 42 is equipped with smear metal collection box 52, the smear metal that smear metal collection box 52 produces when being used to be housed in processing base plate for packaging 4.The downstream of drainage channel 46 also is adapted to smear metal collection box 52 wrinkle and is communicated with.
On water tank 42, the cap assembly as the top that covers the processing feeding member 28 that exposes from peristome 44 is equipped with corrugated cover 12 and tabular cover 14.Tabular cover 14 is formed by metal material, and tabular cover 14 constitutes the top of the processing feeding member 28 that covers the downstream, and the top of the processing feeding member 28 in this downstream is with respect to keeping workbench 6 to be positioned at the direction that cutting fluid is splashed because of the rotation of cutting tool 18.
Linking via bucker 54 and supporting base 38 with the mode that moves integratedly with supporting base 38 by the end that keeps workbench 6 sides of tabular cover 14, tabular cover 14 downstreams form the free end with end wall 14b.
Shown in solid line among Fig. 4, tabular cover 14 has such length: when keeping table mechanism 7 in peristome 44, to be positioned at the position of upstream side, and the downstream of tabular cover 14 complete occlusion of openings portions 44.Shown in imaginary line among Fig. 4, this tabular cover 14 is set for: when keeping table mechanism 7 to move to downstream, tabular cover 14 covers the upper surface of smear metal collection box 52.
Tabular cover 14 forms the roof type shape that has inclined plane 14a in both sides, and this inclined plane 14a tilts with the mode that reduces from drainage channel 46 sides of center towards both sides as the X-direction of processing direction of feed.And, thereby the two sides 14a of tabular cover 14 is configured to hang down into the mode along the outer wall of framework 48 and covers peristome 44 on the drainage channel 46.
As shown in Figure 3, be provided with and guide rail 50 opposed pair of tracks 56 in the inboard of tabular cover 14, be pasted with the not shown slide unit that forms by resin etc. at a plurality of positions of the lower surface of track 56, to improve the sliding of track 56 with respect to guide rail 50.
On the other hand; Corrugated cover 12 covers with respect to keep workbench 6 and is positioned at the top of the processing feeding member 28 of upstream side; Corrugated cover 12 constitutes and can stretch freely with known mode through materials such as cloth; Corrugated cover 12 link the fixed part binding of the end of corrugated cover 12 upstream sides and the inwall of water tank 42 etc. by the end that keeps workbench 6 sides via bucker 54 and supporting base 38 with the mode that moves integratedly with supporting base 38.
Thereby corrugated cover 12 also is adapted to hang down into the mode along the outer wall of framework 48 and covers peristome 44 on the drainage channel 46.Corrugated cover 12 also is adapted to and can on X-direction, moves along guide rail 50.Thus, constitute: keeping workbench 6 side corrugated cover 12 elongations when moving of advancing downstream, and keep workbench 6 upstream side reply when moving, corrugated cover 12 shortens.
As shown in Figure 2, between bucker 54 and maintenance workbench 6, be provided with leftover pieces dash receiver 60.This leftover pieces dash receiver 60 at one end forms the dust pan shape with the opening 60a that dwindles with taper, and this leftover pieces dash receiver 60 is adapted to opening 60a side and overlaps on the tabular cover 14 in downstream with preliminary dimension.
Fig. 7 can be clearly shown that: the end wall 14b at tabular cover 14 is equipped with brush unit 58.Brush unit 58 comprises: be fixed on first parts 68 on the end wall 14b of tabular cover 14 across distance piece 64 and by screw 66; Second parts 72 that can be rotationally link with first parts 68 via hinge 70; Be fixed in the 3rd parts 74 of second parts 72; Be installed in the brush 76 of the end of the 3rd parts 74.Also can omit the 3rd parts 74 and brush 76 is installed at the end of second parts that form more longways.
With reference to Fig. 5, show the drawing in side sectional elevation of water tank 42 and tabular cover 14.Fig. 6 be expression water tank 42 and tabular cover 14 the cross section, with the part section end view drawing of the relation of the jetting nozzle 62 of smear metals such as brush unit 58 and flushing leftover pieces.Jetting nozzle 62 is located at the upstream side of drainage channel 46, and is as shown in Figure 3, ejection leftover pieces ejection water 63.
Below, the effect during to the cut of the topping machanism 2 of formation like this simply describes.When the cut of base plate for packaging 4; With respect to remaining in the base plate for packaging 4 that keeps on the workbench 6; Make the preset lines of cutting apart of expection that the cutting tool 18 that rotates at a high speed to the R direction is positioned to cut; Through processing feeding member 28 maintenance workbench 6 is advanced to the downstream of X-direction mobile, implements cut thus.
When this cuts, with respect to cutting tool 18 and base plate for packaging 4, from the nozzle of cutting fluid 22 supply cutting fluids of cutting fluid supply member 24 on one side implement cutting on one side.Advance when moving at this; Tabular cover 14 is not flexible; Tabular cover 14 moves on X-direction towards smear metal collection box 52 with keeping workbench 6 under the situation that track 56 is guided by guide rail 50 integratedly; Corrugated cover 12 extends on one side and is guided by guide rail 50, with keep workbench 6 integratedly along X-direction move on one side, corrugated cover 12 maintains blocked state with respect to processing feeding member 28 with peristome 44.
When the cutting of cutting apart preset lines finishes, cutting tool 18 is kept out of the way along Z-direction, made through processing feeding member 28 to keep workbench 6 to reply mobile in X-direction.When this answer is moved; Tabular cover 14 is not telescopically replied mobile on X-direction with keeping workbench 6 integratedly; Corrugated cover 12 is guiding with to keep workbench 6 to reply along X-direction integratedly mobile while shrinking by guide rail 50, and corrugated cover 12 maintains blocked state with respect to processing feeding member 28 with peristome 44.
Then, base plate for packaging 4 is carried out index feed in Y direction, the amount of feeding is a spacing cutting apart preset lines, and carries out above-mentioned stock removal action repeatedly, cuts whole preset lines of cutting apart of base plate for packaging 4 thus.
Here, when the cut that keeps workbench 6 to advance mobile, cutting fluid is mainly splashed to tabular cover 14 sides that are positioned at the downstream along with cutting tool 18 is taken up to the rotation of R direction.Therefore, the bigger smear metals such as leftover pieces that when cut, produce that do not form leftover pieces such as the ear part of chip are also splashed towards tabular cover 14 sides that are positioned at the downstream.
Tabular cover that this bigger smear metal is splashed to 14 is metal system, and has enough big intensity, even so the bigger smear metal not easy damaged of splashing also arranged.Tabular cover 14 moves back and forth with keeping workbench 6 integratedly, always covers the peristome 44 in the downstream that keeps workbench 6, therefore can bring into play the water-proof function to processing feeding member 28 reliably.
Keep the peristome 44 of the upstream side of workbench 6 always to cover, therefore can bring into play water-proof function reliably to processing feeding member 28 by corrugated cover 12.Corrugated cover 12 is positioned at almost not the upstream side that smear metal that the rotation because of cutting tool 18 causes is splashed, so corrugated cover 12 does not bear splashing of bigger smear metal.
When the cut of base plate for packaging 4,14a slides and drops in the drainage channel 46 of water tank 42 on the inclined plane to be splashed to bigger smear metal such as leftover pieces on the tabular cover 14.Flow through this drainage channel 46 from the ejection water 63 of the leftover pieces flushing usefulness of jetting nozzle 62 ejection, therefore the processing bits are by these ejection water 63 flushings, thereby and scan out the downstream by brush unit 58 and be recovered in the smear metal collection box 52.
With reference to Fig. 7~Fig. 9, the effect of brush unit 58 is described.Fig. 7 representes to keep the state of the brush unit 58 of workbench 6 when cut that arrow X1 direction moves, and therefore the brush 76 of brush unit 58 and the end wall 14b butt of tabular cover 14 have stoped the anticlockwise rotation around hinge 70 of brush 76.That is, brush 76 is prevented from rotating to the upstream side of end wall 14b, only can rotate to the downstream of end wall 14b.
Therefore; At tabular cover 14 with keeping table mechanism 7 downstream during side shifting; Brush 76 because of with the frictional resistance of the bottom surface 42a of water tank 42 tilt upstream; But the rotation of side is upstream stoped by end wall 14b, therefore can the leftover pieces 78 on the bottom surface 42a of water tank 42 be scanned out smear metal collection box 52 efficiently.
With reference to Fig. 8, show tabular cover 14 with keeping table mechanism 7 operating state of the brush unit 58 during side shifting upstream.Like this cutting finish and tabular cover 14 upstream side reply when moving, the brush 76 of brush unit 58 because of with the frictional resistance of the bottom surface 42a of water tank 42 tilt downstream.
Therefore brush 76 can be installed in the downstream rotationally, because of leaning on self gravitation to contact with the bottom surface 42b of water tank 42, so can suppress leftover pieces 78 are swept and get back in the tabular cover 14.
In addition, as shown in Figure 9, even leftover pieces 78 accumulate in the below of tabular cover 14 just in case sweep back leftover pieces 78,, therefore prevented to cause the situation of brush unit 58 breakages because the hinge 78 of brush unit 58 is opened.

Claims (1)

1. topping machanism, it possesses: keep table mechanism, it comprises the maintenance workbench that keeps machined object; Cutting member, it constitutes at main shaft cutting tool is installed, and this cutting tool cuts the machined object that is kept by said maintenance workbench; The cutting fluid supply member, it supplies with cutting fluid to said cutting tool; And processing feeding member; It makes said maintenance table mechanism move in the processing direction of feed with the axis direction quadrature of said main shaft; In this topping machanism, make the cutting fluid of supplying with to said cutting tool follow the rotation of this cutting tool and the side of splashing is the downstream of processing direction of feed, the opposition side that makes this downstream is a upstream side; Said topping machanism is characterised in that
Said topping machanism possesses:
Water tank, said water tank have peristome and center on the rising portions of this peristome, and said peristome covers said processing feeding member, and said maintenance table mechanism is being inserted in the mode that said processing direction of feed moves in this peristome;
The smear metal collection box, said smear metal collection box is adjacent to be equipped on the downstream of said water tank;
Corrugated cover, said corrugated cover cover and are positioned at the said peristome of upstream side with respect to said maintenance table mechanism, and cover the top of said processing feeding member;
Tabular cover; Said tabular cover covers the said peristome that is positioned at the downstream with respect to said maintenance table mechanism; And an end of the said processing feeding of the covering of said tabular cover member is fixed in said maintenance table mechanism, and the other end of said tabular cover is the free end with end wall; And
Brush unit, said brush unit are equipped on the said end wall of said tabular cover, be used for the foreign matter of the bottom of said water tank is scanned out said smear metal collection box,
Said brush unit comprises: first parts that are fixed in said end wall; Be installed on second parts of said first parts via hinge; And the brush that is disposed at the end of said second parts, thereby said end wall becomes the rotation that retainer stops the side upstream of said brush, and said brush is side rotation downstream only.
CN2011102574312A 2010-09-02 2011-09-01 Cutting device Pending CN102431099A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010-196582 2010-09-02
JP2010196582A JP2012051081A (en) 2010-09-02 2010-09-02 Cutting device

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CN102431099A true CN102431099A (en) 2012-05-02

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Cited By (3)

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Publication number Priority date Publication date Assignee Title
CN107350889A (en) * 2017-08-31 2017-11-17 重庆迪洋科技开发有限公司 A kind of crankcase cover of motorcycle side drilling system
CN109560015A (en) * 2017-09-27 2019-04-02 东和株式会社 Processing unit (plant)
CN114734544A (en) * 2022-06-13 2022-07-12 苏州和研精密科技有限公司 Cutting machine cutting chamber sediment water separation collecting system and scribing machine

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JP2014143294A (en) * 2013-01-24 2014-08-07 Disco Abrasive Syst Ltd Cutting device
JP6118653B2 (en) * 2013-06-19 2017-04-19 株式会社ディスコ Cutting equipment
KR20220132574A (en) * 2020-01-28 2022-09-30 도쿄엘렉트론가부시키가이샤 Recovery mechanism, substrate processing apparatus and recovery method
JP2024030826A (en) * 2022-08-25 2024-03-07 Towa株式会社 cutting device

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CN101590669A (en) * 2008-05-30 2009-12-02 株式会社迪思科 Topping machanism
CN201552673U (en) * 2009-05-14 2010-08-18 泉峰(中国)贸易有限公司 Tile cutter

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JPH01176512A (en) * 1988-01-06 1989-07-12 Tokyo Seimitsu Co Ltd Cutting device for column-shaped material
JPH05337782A (en) * 1992-06-02 1993-12-21 Synx Kk Splash processing device of edge preparation machine
US5628673A (en) * 1993-11-26 1997-05-13 Seiko Seiki Kabushiki Kaisha Dicing machine with non-contact setup function
JP2004186361A (en) * 2002-12-03 2004-07-02 Disco Abrasive Syst Ltd Bellows mechanism and cutter having bellows mechanism
CN101402226A (en) * 2007-10-05 2009-04-08 株式会社迪思科 Cutting device
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Publication number Priority date Publication date Assignee Title
CN107350889A (en) * 2017-08-31 2017-11-17 重庆迪洋科技开发有限公司 A kind of crankcase cover of motorcycle side drilling system
CN107350889B (en) * 2017-08-31 2023-07-25 重庆迪洋科技开发有限公司 Motorcycle crankcase cover side punching system
CN109560015A (en) * 2017-09-27 2019-04-02 东和株式会社 Processing unit (plant)
CN109560015B (en) * 2017-09-27 2023-06-02 东和株式会社 Processing device
CN114734544A (en) * 2022-06-13 2022-07-12 苏州和研精密科技有限公司 Cutting machine cutting chamber sediment water separation collecting system and scribing machine
CN114734544B (en) * 2022-06-13 2023-01-20 苏州和研精密科技有限公司 Cutting machine cutting chamber sediment water separation collecting system and scribing machine

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Application publication date: 20120502