CN102412805B - A kind of quartz-crystal resonator, detector and detection method detected for benzene hydrocarbon gase - Google Patents
A kind of quartz-crystal resonator, detector and detection method detected for benzene hydrocarbon gase Download PDFInfo
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- CN102412805B CN102412805B CN201110230814.0A CN201110230814A CN102412805B CN 102412805 B CN102412805 B CN 102412805B CN 201110230814 A CN201110230814 A CN 201110230814A CN 102412805 B CN102412805 B CN 102412805B
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Abstract
The present invention is a kind of quartz-crystal resonator, detector and detection method detected for benzene hydrocarbon gase.The quartz-crystal resonator has a perforate, the metal electrode of resonance is set to expose in atmosphere, and inspection coating is coated with above the metal electrode, inspection coating is generally made up of the material that can be chemically reacted with benzene, after this layer of material and benzene hydrocarbon gase are contacted, this layer of material can produce chemical reaction with benzene, form new molecular structure or material, so as to change the weight of original coating, the quartz-crystal resonator is arranged in collection room, collection room at least has a breach, connected with external environment condition, this is used for the quartz wafer of benzene hydrocarbon gase detection, detector and detection method can be effectively combined the particular frequencies thickness property of piezoelectric quartz crystal plate, detection sensitivity for benzene hydrocarbon gase is high, testing result is accurate.
Description
Technical field
The present invention relates to benzene hydrocarbon gase testing equipment and detection method, more specifically, benzene to be used for the present invention relates to one kind
Quartz-crystal resonator, detector and detection method that class gas is detected.
Background technology
Benzene hydrocarbon gase has stronger toxicity, and long-term suction or short-term excess suction can all hinder to the health care belt of human body
Evil.If benzene hydrocarbon gase in work and living environment being detected in time in the case of the benzene hydrocarbon gase low concentration is deposited
There is great benefit for the work and living environment of the improvement mankind.
Patent application 200520121905.0 provides a kind of fast gas detector for determining pollutants in air.It is
It is made up of detector photophore, optical filter, photoelectric detector and display.Wherein photophore is the core device of the detector
Part, it is by the quartz ampoule with gas feed and outlet and is closed in the pottery that local surfaces therein have sintered porous catalyst
Porcelain heating rod is constituted；The surface temperature of catalyst is adjusted by temperature controller；There is micropore after sintering of catalyst, film forming thickness is 1
Between~1.5mm.The gas detecting instrument realizes the on-site measurement to pollutants such as formaldehyde in air, benzene homologues, ammonia, alcohol and ketone.
Patent application 200920154249.2 then provides another gas controlling device, and particularly a kind of benzene in air system thing that determines contains
The benzene series gas detecting pipe of amount.It is characterized in that：Detection pipe by the transparent glass tube with graduation mark as container, fill out by inside
Dress colour developing mixture, two ends are blocked with filter layer, the sealing of blend rubber end socket.Described colour developing mixture is by benzene homologues, urges
Agent and carrier are constituted.This detection pipe is cheap, is easy to carry, easy to use, can be used for the monitoring of benzene in air system thing.
But above-mentioned two are related to the testing equipment of benzene hydrocarbon gase, being required to catalyst could use, and cost of manufacture is high
It is high, and certain density benzene hydrocarbon gase is generally required, the effect of detection is can be only achieved, the detection to benzene in air class gas is sensitive
Degree is not high, it is difficult to form effectively benzene hydrocarbon gase detection method.
The content of the invention
It has been investigated that, piezoelectric quartz crystal is by the extremely many silica of global storage capacity（SiO2）Composition.It is so many
Raw material storage capacity cause grease piezoelectric's quartz crystal turn into piezoelectricity industry main material and low cost.And piezoelectric quartz is brilliant
Piece in the case of thickness shear mode of resonance, due to its special frequency and this characteristic of the linear inverse ratio of thickness and it is low into
This features such as, as an a kind of splendid key component of benzene hydrocarbon gase detector of manufacture.
Based on this, the present invention proposes a kind of quartz-crystal resonator, detector and detection detected for benzene hydrocarbon gase
Method.Quartz-crystal resonator, detector and the detection method that this is used for benzene hydrocarbon gase detection can be effectively combined piezoelectricity stone
Particular frequencies-the thickness property of English chip, the detection sensitivity for benzene hydrocarbon gase is high, and testing result is accurate.
It is another object of the present invention to provide a kind of quartz-crystal resonator, detector for benzene hydrocarbon gase detection
And detection method, this is used for the quartz-crystal resonator of benzene hydrocarbon gase detection, detector and detection method can in high volume manufacture
Go out the benzene hydrocarbon gase detector of low cost, it is easy to realize.
To realize above-mentioned mesh ground, what the present invention was realized in:
A kind of quartz-crystal resonator for benzene hydrocarbon gase detection, it is characterised in that the quartz-crystal resonator has one
Perforate, enables the metal electrode of resonance to expose in atmosphere, and inspection coating is coated with above the metal electrode（Generally should
Class material will first grind meticulously, fully be dried after applying up）, thing of the inspection coating generally by that can be chemically reacted with benzene
Texture is into after this layer of material and benzene hydrocarbon gase are contacted, this layer of material can produce chemical reaction with benzene, form new molecular structure
Or material, so as to change the weight of original coating（Some materials can make coating lighten, and some materials can make coating become weight, such as
γ-Fe2O3 can become weight, and when tested gas has been adsorbed, γ-Fe2O3 are turned into Fe3O4）, so as to change piezoelectric quartz crystal plate
The effective thickness of resonance under thickness shear mode of resonance（In the case where lightening, effective thickness is thinning；Becoming the situation of weight
Under, effective thickness is thickening）, and then the resonant frequency of chip is changed, alarm is realized in the case of frequency shift.AT hobs electricity
The quartz wafer frequency of resonance and effective thickness of chip under thickness shear mode of resonance are inversely proportional, and have below equation：
F=1.67/t（Formula one）
T representative thicknesses, unit mm, F represent resonant frequency, unit MHz, this resonant frequency generally 1MHz ~ 200MHz it
Between.
Such that it is able to the detection knot for being obtained that whether there is in air benzene hydrocarbon gase according to the change of the effective thickness of quartz wafer
Really.
Quartz-crystal resonator cuts piezoelectric quartz crystal plate using AT.In the present invention, AT cuts the initial of piezoelectric quartz crystal plate
Generally can be 10Mhz depending on frequency can be according to design requirement.The AT can be cut piezoelectric quartz wafer fabrication into general quartz
Crystal resonator, the difference is that one perforate of tool is covered in the outer of the resonator, so that the gas for gathering interior can be with the resonance
AT in device cuts piezoelectric quartz crystal plate contact.Applied on piezoelectric quartz wafer metal electrode sensitive to benzene hydrocarbon gase is cut in AT
Inspection coating, the inspection coating can be γ-Fe2O3, or other coatings sensitive to benzene hydrocarbon gase.The shape of coating
Depending on shape, size, thickness and position can be according to design requirements.
A kind of detector for benzene hydrocarbon gase detection, the detector mainly includes collection room, quartz-crystal resonator, frequency
Rate-signal adapter, the quartz-crystal resonator outer surface has an opening, makes the metal electricity inside quartz-crystal resonator
Pole in air, and can have a detection coating, the inspection coating on the metal electrode of quartz-crystal resonator
It is the coating to that can be chemically reacted with benzene hydrocarbon gase；Quartz-crystal resonator is arranged in collection room, and quartz crystal is humorous
Shake the frequency output terminal and frequency of device-signal adapter connection, frequency-signal adapter externally exports testing result；It is described
Collection room at least have a breach, with can admit air into collection room in.
The detector, its frequency-signal adapter is also connected with alarm, is alarmed after detecting benzene hydrocarbon gase.
Collection room in the present invention is five face closures and there are the cavity of perforate or breach, the so mesh of design in face
Be in order to reduce the indoor air flow of collection but can be in the state of comparative static through thering is perforate or breach to gather
Gas in surrounding environment；Meanwhile, the collection room is not it is also ensured that quartz-crystal resonator is done operationally by the external world
Disturb.
Further, dust filter is provided with above perforate or breach, to reduce the influence of dust.Manufacture gas
The material of body collection room can be metal, or nonmetallic.The shape of gas collecting room can be cuboid, square,
The cavity of cylinder or any other shape, depending on its shape and size can be by design requirement.Collection room by the face of perforate and
Environment is contacted.The quartz-crystal resonator of enclosing cover perforate is usually located at the bottom of gas collecting room, it is also possible to appropriate positioned at other
Position.
After frequency-signal adapter receives frequency, meeting and start gather gas before original frequency be compared,
Calculate difference.In order to ensure the accuracy of detection, the difference of received frequency and original frequency after starting to gather gas
After certain threshold values, frequency-signal adapter can send a drive signal to value, drive alarm equipment alarm.Described threshold values
Error range typically according to quartz-crystal resonator is set, depending on design requirement.Frequency-the signal turns
The frequency output terminal connection of the quartz-crystal resonator of the enclosing cover perforate that the input and quartz wafer of parallel operation make, and it is exported
The input of end and alarm is connected.
Alarm sends alarm after the drive signal that frequency-signal adapter sends is received.Alarm can be sound
Sound alarm, or flash alarm, or other alarms.
It is specifically, of the invention that to predominantly detect flow as follows：
A. gas sample：Gas collecting room is placed in detected environment；
If containing benzene hydrocarbon gase in detected environment, this kind of gas will enter the gas collecting with the air in environment
Room.
B. benzene hydrocarbon gase is detected：Detection coating and benzene hydrocarbon gase chemically react；
In the quartz-crystal resonator of the enclosing cover perforate when the molecule of the indoor benzene hydrocarbon gase of collection and positioned at collection room bottom
Detection coating layer touch after, benzene hydrocarbon gase molecule can and the sensitive detection coating of benzene hydrocarbon gase（Such as：γ-Fe2O3）Generation chemistry
Reaction, forms new molecular structure, so as to change the weight of original coating（As γ-Fe2O3 can become weight）, so as to change AT
Cut the effective thickness of piezoelectric quartz crystal plate resonance under thickness shear mode of resonance（In the case where lightening, effective thickness is thinning；
In the case where weight is become, effective thickness is thickening）, and then the resonant frequency of chip is changed, identify the presence of benzene hydrocarbon gase.
C. frequency-signal conversion：Frequency-signal adapter receives the output frequency of quartz-crystal resonator, and calculates difference
Value；
After frequency-signal adapter receives the output frequency for coming from above-mentioned quartz-crystal resonator, meeting and start
The original frequency of quartz-crystal resonator is compared before collection gas, calculates difference.
D. alarm：After the difference exceeds certain threshold values, frequency-signal adapter can export a drive signal, alarm
Device sends alarm after the drive signal for coming from frequency-signal adapter output is received.
In terms of comprehensive, the present invention cuts the frequency and crystalline substance of piezoelectric quartz crystal plate resonance under thickness shear mode of resonance by AT
The effective thickness of piece is inversely proportional this special characteristics, and the benzene of the coating sensitive to benzene hydrocarbon gase chemically reacts this special spy
Property, realize the detection to the benzene hydrocarbon gase being harmful to.
And the present invention has, and realization is simple, be easy to batch production and low cost.
Brief description of the drawings
Fig. 1 is the detecting system schematic diagram that the present invention is implemented.
Fig. 2 is the structural scheme of mechanism of the collection room that the present invention is implemented.
Fig. 3 is the structural representation of the quartz-crystal resonator that the present invention is implemented.
Fig. 4 is the overhaul flow chart that the present invention is implemented.
Specific embodiment
It is shown below in conjunction with the accompanying drawings, implementation of the invention is further illustrated.
Shown in Fig. 1, realize that detector of the invention includes gas collecting room 10, special cuts piezoelectric quartz crystal plate system with AT
The quartz-crystal resonator 20 of the enclosing cover perforate of work, frequency-signal adapter 30 and alarm 40.
One face of gas collecting room 10 has a bar shaped perforate 11, realizes its input and the connection of external environment condition,
The inside of gas collecting room 10 is provided with the Quartz crystal resonant of the special enclosing cover perforate that piezoelectric quartz wafer fabrication is cut with AT
Device 20, quartz-crystal resonator 20 is usually mounted to the bottom 12 of gas collecting room 10（With reference to shown in Fig. 2）.The stone of enclosing cover perforate
The input connection of the frequency output terminal and frequency-signal adapter 30 of English crystal resonator 20.Frequency-signal adapter 30
The input of output end and alarm 40.By the corresponding connection of the input and output end of above all parts, this is realized
The connection functionally of individual detector.
With reference to shown in Fig. 3（Herein, in order to point out the position of perforate, reference is modified, AT hobs calcium carbide
English chip is no longer indicated because being known structure with reference, and the metal electrode closely related with dope layer is marked as
22.Than larger part, 21 refer to perforate to inside quartz-crystal resonator of metal electrode 22, and 23 is to apply
The bed of material）, the outer of quartz-crystal resonator 20 covered with a perforate 21, AT is cut piezoelectric quartz crystal plate in air, AT
Cut and be coated with above piezoelectric quartz crystal plate metal electrode 22, coating 23 also specifically sensitive to benzene hydrocarbon gase on metal electrode 22.
Shown in Fig. 4, in gas collecting room 10 is placed on detected environment, if containing benzene class gas in detected environment
Body, this kind of gas will enter the gas collecting room 10 with the air in environment by perforate 11.
10 benzene hydrocarbon gases can enter into the quartz positioned at the bottom 12 of gas collecting room 10 by perforate 21 in gas collecting room
In crystal resonator 20, such benzene hydrocarbon gase molecule can and AT cut on piezoelectric quartz crystal plate metal electrode 22 on apply to benzene class
The coating 23 of gas sensitization（The coating that can be chemically reacted with benzene hydrocarbon gase, such as：γ-Fe2O3）Chemically react, shape
The molecular structure of Cheng Xin, so as to change the weight of original coating（As γ-Fe2O3 can become weight）, electricity is hobbed so as to change AT
The effective thickness of quartz wafer resonance under thickness shear mode of resonance（In the case where coating lightens, it is brilliant that AT cuts piezoelectric quartz
The effective thickness of piece is thinning；In the case where coating becomes weight, the effective thickness that AT cuts piezoelectric quartz crystal plate is thickening）, and then change
AT cuts the resonant frequency of piezoelectric quartz crystal plate, identifies the presence of benzene hydrocarbon gase.
When frequency-signal adapter 30 receives the output frequency of the quartz-crystal resonator 20 for coming from enclosing cover perforate
Afterwards, the meeting and original frequency of quartz-crystal resonator 20 is compared before starting to gather gas, calculates difference automatically.When this
After certain valve value, frequency-signal adapter 30 can export a drive signal to difference, drive alarm 40 to alarm.
Alarm 40 sends alarm after the drive signal for coming from the output of frequency-signal adapter 30 is received.
By this method, AT can be made full use of to cut the frequency of piezoelectric quartz crystal plate resonance under thickness shear mode of resonance
The effective thickness of rate and chip is inversely proportional this special characteristics, and the coating sensitive to benzene hydrocarbon gase（Such as：γ-Fe2O3）'s
Benzene is chemically reacted this special characteristics, and high-acruracy survey this ability can be carried out to frequency, realizes the benzene class to being harmful to
The detection of gas.The minor variations that AT cuts piezoelectric quartz wafer thickness can cause the great variety of resonant frequency, in chip
In the transfer process of thickness-frequency the two physical characteristics, after the accurate measurement to frequency is implemented, it is also possible to effectively carry
Detection sensitivity to benzene class pernicious gas high, it is ensured that the safety of people's living environment.
The above, the specific descriptions only implemented to the present invention do not represent all modes that the present invention is implemented.
The equivalent variations done on the basis of the object of the invention and technical scheme and modification, in the protection domain of invention.
Claims (6)
1. it is a kind of for benzene hydrocarbon gase detection quartz-crystal resonator, it is characterised in that the quartz-crystal resonator is cut using AT
Piezoelectric quartz crystal plate is made, and outer in the quartz-crystal resonator is covered with a perforate, enables the metal electrode of resonance sudden and violent
Reveal in atmosphere, and inspection coating is coated with above the metal electrode；
AT cuts piezoelectric quartz crystal plate in the case of thickness shear mode of resonance, when benzene hydrocarbon gase and inspection coating layer touch
Learn and can change original inspection coating weight after reacting, so that changing AT cuts piezoelectric quartz crystal plate in thickness shear mode of resonance
The effective thickness of lower resonance, and then the resonant frequency that AT cuts piezoelectric quartz crystal plate is changed.
2. it is a kind of for benzene hydrocarbon gase detection detector, it is characterised in that the detector mainly include collection room, cut using AT
Quartz-crystal resonator, frequency-signal adapter and alarm that piezoelectric quartz crystal plate is made, the quartz-crystal resonator
Cover with an opening outward, the metal motor of quartz-crystal resonator is exposed in atmosphere, and in Quartz crystal resonant
There is an inspection coating, the inspection coating is the painting to that can be chemically reacted with benzene hydrocarbon gase on the metal electrode of device
Layer；Quartz-crystal resonator is arranged in collection room；The collection room at least have a breach, when gas collecting room be placed on by
In the environment of detection, the air in the environment of detection is entered in the gas collecting room by breach, and is connect with coating by opening
Reaction is touched, the resonant frequency of quartz-crystal resonator is changed, the input and quartz crystal of frequency-signal adapter are humorous
Shake the frequency output terminal connection of device, after frequency-signal adapter receives the output frequency of quartz-crystal resonator, meeting and beginning
The original frequency of quartz-crystal resonator is compared before collection, and difference is calculated automatically, after the difference exceeds threshold value, frequency
Rate-signal adapter can export a drive signal, the input connection of the output end and alarm of frequency-signal adapter.
3. it is as claimed in claim 2 to be used for the detector that benzene hydrocarbon gase is detected, it is characterised in that collection room is a five faces envelope
Close and there is the cavity of the breach in face.
4. it is as claimed in claim 2 to be used for the detector that benzene hydrocarbon gase is detected, it is characterised in that to be set above the breach
It is equipped with dust filter.
5. the as claimed in claim 2 detector for being used for benzene hydrocarbon gase detection, it is characterised in that the shape of gas collecting room is
Cuboid, square, the cylinder cavity of any one；Quartz-crystal resonator is located at the bottom of gas collecting room.
6. a kind of detection method of the as claimed in claim 2 detector for being used for benzene hydrocarbon gase detection, it is characterised in that the party
Method comprises the following steps：
A. gas sample：Gas collecting room is placed in detected environment；
B. benzene hydrocarbon gase is detected：The breach that gas enters on collection room, and by the perforate that is covered outside quartz-crystal resonator with
Coating layer touch so that the benzene hydrocarbon gase contained in inspection coating and gas chemically reacts, and causes quartz-crystal resonator
Resonant frequency changes and transmits to frequency-signal adapter；
C. frequency-signal conversion：After frequency-signal adapter receives the output frequency of quartz-crystal resonator, meeting and start to adopt
The original frequency of quartz-crystal resonator is compared before collection gas, and difference is calculated automatically, when the difference exceeds certain threshold
After value, frequency-signal adapter can export a drive signal and transmit to alarm；
D. alarm：Alarm sends alarm after the drive signal for coming from frequency-signal adapter output is received, so as to
Notify tester.
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| CN201110230814.0A CN102412805B (en) | 2011-08-12 | 2011-08-12 | A kind of quartz-crystal resonator, detector and detection method detected for benzene hydrocarbon gase |
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| CN102412805B true CN102412805B (en) | 2017-06-16 |
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| CN105897217B (en) * | 2015-08-18 | 2019-04-02 | 应达利电子股份有限公司 | A kind of quartz-crystal resonator, intelligent pressure sensor and its sensing measuring method |
| CN114204914B (en) * | 2022-02-21 | 2022-06-14 | 中国电子科技集团公司信息科学研究院 | Surface acoustic wave transverse coupling resonator for gas detection |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101504360A (en) * | 2009-03-03 | 2009-08-12 | 中国科学院光电技术研究所 | Organic gas sensing method |
| CN102135514A (en) * | 2011-03-30 | 2011-07-27 | 中国矿业大学 | Gas sensor for cantilever beam type piezoelectric actuation and piezoelectric detection |
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| JP5158706B2 (en) * | 2008-06-30 | 2013-03-06 | 日本電波工業株式会社 | Quartz crystal manufacturing method, crystal oscillator and electronic component |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101504360A (en) * | 2009-03-03 | 2009-08-12 | 中国科学院光电技术研究所 | Organic gas sensing method |
| CN102135514A (en) * | 2011-03-30 | 2011-07-27 | 中国矿业大学 | Gas sensor for cantilever beam type piezoelectric actuation and piezoelectric detection |
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