CN102412805A - Quarts crystal resonator, detector as well as detection method for benzene gas detection - Google Patents
Quarts crystal resonator, detector as well as detection method for benzene gas detection Download PDFInfo
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- CN102412805A CN102412805A CN2011102308140A CN201110230814A CN102412805A CN 102412805 A CN102412805 A CN 102412805A CN 2011102308140 A CN2011102308140 A CN 2011102308140A CN 201110230814 A CN201110230814 A CN 201110230814A CN 102412805 A CN102412805 A CN 102412805A
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Abstract
The invention discloses a quarts crystal resonator, a detector as well as a detection method for benzene gas detection. The quarts crystal resonator is provided with an opening, thus the metal electrode of resonance is exposed to air; a detection coating layer is covered on the metal electrode, and is normally composed of substances which can react with benzene; after the substances are contact with benzene gas, the substances react with benzene, and novel molecular structures or substances form, thus the weight of the original coating layer is changed; and the quarts crystal resonator is arranged in a collection chamber which is provided with at least one notch so as to be communicated with the external environment. The quarts crystal sheet, the detector and the detection method for benzene gas detection can effectively combine the special frequency-thickness property of a piezoelectric quarts crystal sheet, and have high detection flexibility for benzene gas and accurate results.
Description
Technical field
The present invention relates to benzene hydrocarbon gase checkout equipment and detection method, more more specifically, the present invention relates to a kind of quartz-crystal resonator, detector and detection method that benzene hydrocarbon gase detects that be used for.
Background technology
Benzene hydrocarbon gase has stronger toxicity, and long-term suction or short-term excess suck all can bring injury to the health of human body.If under the situation of benzene hydrocarbon gase low concentration, can in time detect the existence of the benzene hydrocarbon gase in work and the living environment, has great benefit for improving human work and living environment.
Patent application 200520121905.0 provides a kind of fast gas detector of measuring pollutant in the air.It is to be made up of photophore, filter, photoelectric detector and display detector.Wherein photophore is the core devices of this detector, it by the quartz ampoule with gas feed and outlet be closed in wherein local surfaces sintering the ceramic heat rod of porous catalyst form; The surface temperature of catalyst is regulated by temperature controller; Micropore is arranged behind the sintering of catalyst, and film forming thickness is between 1～1.5mm.This gas detecting instrument is realized the on-site measurement to pollutants such as formaldehyde, benzene series thing, ammonia, pure and mild ketone in the air.200920154249.2 of patent applications provide another kind of gas controlling device, particularly a kind ofly measure the benzene series thing gas detecting tube that benzene in air is a thing content.It is characterized in that: as container, the colour developing mixture is loaded in inside to detector tube by the transparent glass tube that has graduation mark, and two ends are stopped up with filter course, and seal with the rubber end socket.Described colour developing mixture is made up of benzene series thing, catalyst and carrier.This detector tube is cheap, is easy to carry, and is easy to use, and can be used for benzene in air is the monitoring of thing.
Yet two above-mentioned checkout equipments that relate to benzene hydrocarbon gase; All need catalyst to use; Cost of manufacture is high, and often needs certain density benzene hydrocarbon gase, just can reach the effect of detection; Detection sensitivity to benzene in air class gas is not high, is difficult to form benzene hydrocarbon gase detection method effectively.
Summary of the invention
Find that after deliberation piezoelectric quartz crystal is made up of the extremely many silicon dioxide (SiO2) of global storage capacity.It is low that so many raw material storage amount makes that artificial piezoelectric quartz crystal becomes the main material and the cost of piezoelectricity industry.And the piezoelectric quartz wafer is under the situation of thickness shear mode of resonance, because its special frequency and characteristics such as this characteristic of the linear inverse ratio of thickness and low cost become a splendid key component making a kind of benzene hydrocarbon gase detector.
Based on this, the present invention proposes a kind of quartz-crystal resonator, detector and detection method that benzene hydrocarbon gase detects that be used for.This quartz-crystal resonator, detector and detection method that is used for the benzene hydrocarbon gase detection can combine the particular frequencies-thickness property of piezoelectric quartz wafer effectively, and high for the detection sensitivity of benzene hydrocarbon gase, testing result is accurate.
Another object of the present invention is to provide a kind of quartz-crystal resonator, detector and detection method that benzene hydrocarbon gase detects that be used for; This quartz-crystal resonator, detector and detection method that is used for the benzene hydrocarbon gase detection can produce the low benzene hydrocarbon gase detector of cost in enormous quantities, realizes easily.
For realizing above-mentioned order ground, the present invention is achieved in that
A kind of quartz-crystal resonator that is used for the benzene hydrocarbon gase detection is characterized in that this quartz-crystal resonator has a perforate, makes the metal electrode of resonance be able to be exposed in the air; And be coated with check coating (usually said material will grind meticulously earlier, will fully dry after being coated with up) above the said metal electrode, the check coating is usually by constituting with the material that benzene carries out chemical reaction; When this layer material with after benzene hydrocarbon gase contacts; This layer material can with benzene generation chemical reaction, form new molecular structure or material, (some material can make coating lighten thereby changed the weight of original coating; Some material can make coating become heavy; Can become heavy like γ-Fe2O3, when having adsorbed tested gas, γ-Fe2O3 become be Fe3O4); Thereby changed the piezoelectric quartz wafer the effective thickness of resonance under the thickness shear mode of resonance (under the situation about lightening, the effective thickness attenuation; Becoming under the heavy situation effective thickness thickening), and then changed the resonance frequency of wafer, under the situation of frequency shift, realize reporting to the police.AT hobs the frequency of calcium carbide English wafer resonance under the thickness shear mode of resonance and the effective thickness of wafer is inversely proportional to, and following formula is arranged:
F=1.67/t (formula one)
The t representative thickness, the mm of unit, F represents resonance frequency, the MHz of unit, this resonance frequency is usually between 1MHz ~ 200MHz.
Thereby can change the testing result that obtains whether having in the air benzene hydrocarbon gase according to the effective thickness of quartz wafer.
Quartz-crystal resonator adopts AT to hob calcium carbide English wafer.In the present invention, AT hobs the original frequency of calcium carbide English wafer can be decided according to designing requirement, can be 10Mhz usually.Can this AT be hobbed calcium carbide English wafer fabrication and become general quartz-crystal resonator, different is to cover tool one perforate at the outer of this resonator, can hob calcium carbide English wafer with the AT in this resonator and contacts so that gather indoor gas.Hob the check coating responsive to benzene hydrocarbon gase that is coated with on the calcium carbide English wafer metal electrode at AT, this check coating can be γ-Fe2O3, also can be other coating responsive to benzene hydrocarbon gase.The shape of coating, size, thickness and position can be decided according to designing requirement.
A kind of detector that is used for the benzene hydrocarbon gase detection; This detector mainly comprises gathers chamber, quartz-crystal resonator, frequency-signal converter; Said quartz-crystal resonator outer surface has an opening; The inner metal electrode of quartz-crystal resonator can be exposed in the air, and on the metal electrode of quartz-crystal resonator, have one and detect coating, said check coating be to can with the coating of benzene hydrocarbon gase generation chemical reaction; Quartz-crystal resonator is arranged to be gathered in the chamber, and the frequency output terminal of quartz-crystal resonator is connected with frequency-signal converter, and frequency-signal converter is externally exported testing result; Said collection chamber has a breach at least, gathers the chamber so that air is entered into.
Said detector, its frequency-signal converter also connects alarm, reports to the police after detecting benzene hydrocarbon gase.
Collection chamber among the present invention is one five face closure and face has the cavity of perforate or breach, and the purpose of design is to gather indoor air flow but can be at relatively more static state down through having perforate or breach to collect the gas in the surrounding environment in order to reduce like this; Simultaneously, this collection chamber can guarantee that also quartz-crystal resonator does not receive extraneous interference when work.
Further, be provided with the dust filter in perforate or above the breach, so that reduce the influence of dust.The material of making the gas collecting chamber can be a metal, also can be nonmetal.The shape of gas collecting chamber can be the cavity of cuboid, square, cylinder or any other shape, and its shape and size can be decided by designing requirement.The collection chamber contacts with environment through the face of perforate.The quartz-crystal resonator of enclosing cover perforate is usually located at the bottom of gas collecting chamber, also can be positioned at other suitable position.
After frequency-signal converter received frequency, the original frequency that meeting and beginning is gathered before the gas compared, and calculates difference.For the accuracy that guarantees to detect, after the difference of received frequency and original frequency exceeded certain threshold values after beginning to gather gas, frequency-signal converter can send a drive signal, drives alarm equipment alarm.Described threshold values is normally set according to the error range of quartz-crystal resonator, also can decide according to designing requirement.The input of this frequency-signal converter is connected with the frequency output terminal of the quartz-crystal resonator of the enclosing cover perforate of quartz wafer making, and the input of its output and alarm is connected.
Alarm sends warning after receiving the drive signal that frequency-signal converter sends.Alarm can be a voice guard, also can be flash alarm, also can be other alarm.
Specifically, main testing process of the present invention is following:
A. gas sample: the gas collecting chamber is placed in the environment to be detected;
If contain benzene hydrocarbon gase in the environment to be detected, this type gas will get into this gas collecting chamber with the air in the environment.
B. detect benzene hydrocarbon gase: detect coating and benzene hydrocarbon gase generation chemical reaction;
After the detection coating of the molecule of gathering indoor benzene hydrocarbon gase and the quartz-crystal resonator that is positioned at the enclosing cover perforate of gathering the bottom, chamber contacts; The benzene hydrocarbon gase molecule can be responsive with benzene hydrocarbon gase detection coating (as: the generation chemical reaction of γ-Fe2O3); Form new molecular structure; Thereby changed the weight (can become heavy) of original coating like γ-Fe2O3; Thereby changed AT hob calcium carbide English wafer the effective thickness of resonance under the thickness shear mode of resonance (under the situation about lightening, the effective thickness attenuation; Becoming under the heavy situation effective thickness thickening), and then changed the resonance frequency of wafer, identify the existence of benzene hydrocarbon gase.
C. frequency-conversion of signals: frequency-signal converter receives the output frequency of quartz-crystal resonator, and calculated difference;
After receiving the output frequency that comes from above-mentioned quartz-crystal resonator when frequency-signal converter, meeting and beginning gathers that the original frequency of quartz-crystal resonator compares before the gas, calculates difference.
D. report to the police: after this difference exceeded certain threshold values, frequency-signal converter can be exported a drive signal, and alarm sends warning after receiving the drive signal that comes from frequency-signal converter output.
Comprehensive; The effective thickness that the present invention hobs frequency and the wafer of calcium carbide English wafer resonance under the thickness shear mode of resonance through AT this special characteristics that is inversely proportional to; And, realized detection to harmful benzene hydrocarbon gase to this special characteristics of benzene chemical reaction of the responsive coating of benzene hydrocarbon gase.
And the present invention have realize simple, be easy to produce in batches and cost low.
Description of drawings
The detection system sketch map that Fig. 1 implements for the present invention.
Fig. 2 is the structural scheme of mechanism of the collection chamber of the present invention's enforcement.
Fig. 3 is the structural representation of the quartz-crystal resonator of the present invention's enforcement.
The testing process figure that Fig. 4 implements for the present invention.
Embodiment
Shown in accompanying drawing, further explanation is done in enforcement of the present invention.
Shown in Figure 1, realize that detector of the present invention comprises gas collecting chamber 10, special quartz-crystal resonator 20, frequency-signal converter 30 and the alarm 40 that hobs the enclosing cover perforate of calcium carbide English wafer fabrication with AT.
A mask of gas collecting chamber 10 has a bar shaped perforate 11; Realized being connected of its input and external environment condition; The inside of gas collecting chamber 10 is equipped with and special hobs the quartz-crystal resonator 20 of the enclosing cover perforate of calcium carbide English wafer fabrication with AT, and quartz-crystal resonator 20 is installed on the bottom 12 (combining shown in Figure 2) of gas collecting chamber 10 usually.The frequency output terminal of the quartz-crystal resonator 20 of enclosing cover perforate is connected with the input of frequency-signal converter 30.The input of the output of frequency-signal converter 30 and alarm 40.Input and the corresponding of output through above each parts are connected, and have realized the connection of this detector on function.
(here, in order to point out the position of perforate, Reference numeral is revised, AT hobs calcium carbide English wafer because be known structure, no longer with the Reference numeral indication, is marked as 22 with the closely-related metal electrode of dope layer in conjunction with shown in Figure 3.A bigger part that is positioned at quartz-crystal resonator inside of metal electrode 22; 21 refer to perforate; The 23rd, dope layer), outer the covering of quartz-crystal resonator 20 has a perforate 21, makes AT hob calcium carbide English wafer and is exposed in the air; AT is coated with metal electrode 22 above hobbing calcium carbide English wafer, also specifically responsive to benzene hydrocarbon gase coating 23 on the metal electrode 22.
Shown in Figure 4, when gas collecting chamber 10 is placed in the environment to be detected, if contain benzene hydrocarbon gase in the environment to be detected, this type gas will get into this gas collecting chamber 10 through perforate 11 with the air in the environment.
Indoor 10 benzene hydrocarbon gases of gas collecting can enter into the quartz-crystal resonator 20 that is positioned at 10 bottoms 12, gas collecting chamber through perforate 21; Like this benzene hydrocarbon gase molecule can with AT hob the coating 23 that is coated with on the metal electrode 22 on the calcium carbide English wafer to benzene hydrocarbon gase sensitivity (can with the coating of benzene hydrocarbon gase generation chemical reaction; Chemical reaction takes place like: γ-Fe2O3); Form new molecular structure; Thereby changed the weight (can become heavy) of original coating, hobbed calcium carbide English wafer (under the situation that coating lightens, AT hobs the effective thickness attenuation of calcium carbide English wafer at the effective thickness of resonance under the thickness shear mode of resonance thereby changed AT like γ-Fe2O3; Under coating becomes heavy situation, AT hobs the effective thickness thickening of calcium carbide English wafer), and then changed the resonance frequency that AT hobs calcium carbide English wafer, identify the existence of benzene hydrocarbon gase.
Receive the output frequency of the quartz-crystal resonator 20 that comes from the enclosing cover perforate when frequency-signal converter 30 after, meeting and beginning gathers that the original frequency of quartz-crystal resonator 20 compares before the gas, calculates difference automatically.After this difference exceeded certain valve value, frequency-signal converter 30 can be exported a drive signal, drove alarm 40 and reported to the police.
By this method; Can make full use of effective thickness that AT hobs frequency and the wafer of calcium carbide English wafer resonance under the thickness shear mode of resonance this special characteristics that is inversely proportional to; And the coating responsive (as: this special characteristics of benzene chemical reaction of γ-Fe2O3) to benzene hydrocarbon gase; And can carry out this ability of high-acruracy survey to frequency, realized detection to harmful benzene hydrocarbon gase.The minor variations that AT hobs calcium carbide English wafer thickness can cause the great variety of resonance frequency; In the transfer process of these two physical characteristics of thickness-frequency of wafer; After the accurate measurement of having implemented frequency; Also can improve detection sensitivity effectively, guarantee the safety of people's living environment benzene class pernicious gas.
The above only is the specific descriptions that the present invention is implemented, all modes of not representing the present invention and being implemented.Equivalent variations and the modification on the basis of the object of the invention and technical scheme, done are all in the protection range of invention.
Claims (8)
1. one kind is used for the quartz-crystal resonator that benzene hydrocarbon gase detects, and it is characterized in that this quartz-crystal resonator has a perforate, makes the metal electrode of resonance be able to be exposed in the air, and is coated with the check coating above the said metal electrode.
2. as claimed in claim 1ly be used for the quartz-crystal resonator that benzene hydrocarbon gase detects, it is characterized in that quartz-crystal resonator adopts AT to hob calcium carbide English wafer, quartz-crystal resonator outer covers tool one perforate.
3. one kind is used for the detector that benzene hydrocarbon gase detects; It is characterized in that this detector mainly comprises collection chamber, quartz-crystal resonator, frequency-signal converter and alarm; Said quartz-crystal resonator outer surface has an opening; And on the metal electrode of quartz-crystal resonator, have one and detect coating, said check coating be to can with the coating of benzene hydrocarbon gase generation chemical reaction; Quartz-crystal resonator is arranged to be gathered in the chamber; The input of frequency-signal converter is connected with the frequency output terminal of quartz-crystal resonator, and the input of its output and alarm is connected; Said collection chamber has a breach at least.
4. as claimed in claim 3ly be used for the detector that benzene hydrocarbon gase detects, it is characterized in that the chamber of collection is one five face closure and face has the cavity of perforate or breach.
5. as claimed in claim 4ly be used for the detector that benzene hydrocarbon gase detects, it is characterized in that being provided with the dust filter in perforate or above the breach.
6. as claimed in claim 3ly be used for the detector that benzene hydrocarbon gase detects, the shape that it is characterized in that the gas collecting chamber is any one a cavity of cuboid, square, cylinder; Quartz-crystal resonator is positioned at the bottom of gas collecting chamber.
7. one kind is used for the detection method that benzene hydrocarbon gase detects, and it is characterized in that this method comprises the steps:
A. gas sample: the gas collecting chamber is placed in the environment to be detected;
B. detect benzene hydrocarbon gase: detect coating and benzene hydrocarbon gase generation chemical reaction;
C. frequency-conversion of signals: frequency-signal converter receives the output frequency of quartz-crystal resonator, and calculated difference;
D. report to the police: alarm sends warning after receiving the drive signal that comes from frequency-signal converter output.
8. the detection method that is used for the benzene hydrocarbon gase detection as claimed in claim 7 is characterized in that among the step C, and after this difference exceeded certain threshold values, frequency-signal converter can be exported a drive signal and give alarm.
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| CN201110230814.0A CN102412805B (en) | 2011-08-12 | 2011-08-12 | A kind of quartz-crystal resonator, detector and detection method detected for benzene hydrocarbon gase |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105897217A (en) * | 2015-08-18 | 2016-08-24 | 应达利电子股份有限公司 | Quartz crystal resonator, intelligent pressure transducer and sensing and measuring method therefor |
| CN114204914A (en) * | 2022-02-21 | 2022-03-18 | 中国电子科技集团公司信息科学研究院 | Surface acoustic wave transverse coupling resonator for gas detection |
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| CN101504360A (en) * | 2009-03-03 | 2009-08-12 | 中国科学院光电技术研究所 | Organic gas sensing method |
| JP2010011352A (en) * | 2008-06-30 | 2010-01-14 | Nippon Dempa Kogyo Co Ltd | Crystal resonator manufacturing method, crystal resonator, and electronic component |
| CN102135514A (en) * | 2011-03-30 | 2011-07-27 | 中国矿业大学 | Gas sensor for cantilever beam type piezoelectric actuation and piezoelectric detection |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2010011352A (en) * | 2008-06-30 | 2010-01-14 | Nippon Dempa Kogyo Co Ltd | Crystal resonator manufacturing method, crystal resonator, and electronic component |
| CN101504360A (en) * | 2009-03-03 | 2009-08-12 | 中国科学院光电技术研究所 | Organic gas sensing method |
| CN102135514A (en) * | 2011-03-30 | 2011-07-27 | 中国矿业大学 | Gas sensor for cantilever beam type piezoelectric actuation and piezoelectric detection |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105897217A (en) * | 2015-08-18 | 2016-08-24 | 应达利电子股份有限公司 | Quartz crystal resonator, intelligent pressure transducer and sensing and measuring method therefor |
| CN105897217B (en) * | 2015-08-18 | 2019-04-02 | 应达利电子股份有限公司 | A kind of quartz-crystal resonator, intelligent pressure sensor and its sensing measuring method |
| CN114204914A (en) * | 2022-02-21 | 2022-03-18 | 中国电子科技集团公司信息科学研究院 | Surface acoustic wave transverse coupling resonator for gas detection |
| CN114204914B (en) * | 2022-02-21 | 2022-06-14 | 中国电子科技集团公司信息科学研究院 | Surface acoustic wave transverse coupling resonator for gas detection |
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