CN102403411A - Metal back electrode of flexible film solar cell and preparation method thereof - Google Patents
Metal back electrode of flexible film solar cell and preparation method thereof Download PDFInfo
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- CN102403411A CN102403411A CN2011104009162A CN201110400916A CN102403411A CN 102403411 A CN102403411 A CN 102403411A CN 2011104009162 A CN2011104009162 A CN 2011104009162A CN 201110400916 A CN201110400916 A CN 201110400916A CN 102403411 A CN102403411 A CN 102403411A
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Abstract
The invention relates to a metal back electrode of flexible film solar cell and a preparation method thereof, which belong to the technical field of solar cell. The technical solution is that a metal back electrode with texture structure on the surface is directly prepared on a flexible substrate, and the method comprises the following technological steps of: (1) forming a concave-convex texture structure on the flexible substrate; and (2) depositing a metal film on a substrate with the concave-convex surface structure as the metal back electrode of the flexible cell. The method for preparing the flexible film solar cell by using the texture metal back electrode has the following advantages that: 1) the surface structure of the back electrode can be adjusted by changing microparticle size and interval, which is convenient, flexible and favorable for realizing optimization of technological parameters; 2) the metal back electrode has high reflection rate, and can improve utilization rate of sunlight and improve efficiency of the solar cell; and 3) the sunlight has high optical distance in the cell, so thickness of absorption layer of film battery can be reduced, production time can be shortened, production cost can be reduced and production efficiency is improved.
Description
Technical field
The present invention relates to a kind of flexible thin-film solar cell metal back electrode and preparation method thereof, belong to technical field of solar batteries.
Background technology
Thin film solar cell is compared to first generation crystal-silicon solar cell, and it is low to have a production cost, saves advantages such as raw material.Follow the continuous lifting of battery efficiency in recent years, thin film solar cell shows huge development potentiality, is solar cell hot research fields in recent years.Thin film solar cell can be divided into hard substrate solar cell (for example being substrate with glass) and flexible solar cell (being substrate with polyimides or stainless steel for example) two big classes according to the substrate performance difference.For glass substrate, that flexible substrate has is in light weight, collapsible, be difficult for advantages such as fragmentation, and the flexible solar cell of preparation has high power-weight ratio, is specially adapted to special purposes such as dirigible, stratosphere balloon detector.But be applicable to that industrial flexible substrate light transmission is relatively poor, the macromolecule flexible substrate takes place to wear out under sunlight irradiation easily simultaneously, is not suitable for being used in the side to light of solar cell.Therefore, the commercial production of flexible solar cell mostly with fexible film as substrate, prepare back electrode, photoelectric conversion layer and preceding electrode above that successively.The common structural representation of flexible thin-film solar cell is as shown in Figure 1, and primary structure is followed successively by: 1. flexible substrate, 2. back electrode, 3. photoelectric conversion layer, 4. before transparency electrode, 5. encapsulating material.Flexible solar cell at first prepares back electrode, and back electrode is not only wanted the electric current of ability transfer sun battery generation and the sunlight that reflection is not absorbed by photoelectric conversion layer, and need reverberation be carried out scattering, increases its light path.
Research confirms that for the battery of P-I-N structure, if form suede structure at the side to light of battery, effectively scatter incident light increases the light path of incident light and then increases the photoelectric absorption layer for absorption of incident light efficient, and this is commonly called sunken luminous effect.For the battery (the common structure of aforementioned flexible thin-film battery is this structure) of N-I-P structure, sunken luminous effect often realizes through the back electrode that preparation has a suede structure.The realization that falls into luminous effect can effectively promote the photoelectric conversion efficiency of thin film solar cell, reduces the thickness of solar cell photoelectric absorption layer, practices thrift the production cost of solar cell.
From disclosed patent situation, Chinese patent CN200610016182 discloses a kind of structure and preparation method of flexible CIGS solar cell, and discloses the influence of improvement metal electrode preparation technology to the solar cell overall performance; Chinese patent CN200620039938 discloses a kind of structure of flexible amorphous silicon thin-film solar cell; Chinese patent CN200810236695 discloses a kind of preparation method of flexible amorphous silicon thin-film solar cell; CN201010549329 discloses a kind of flexible CIGS solar cell and preparation method thereof; Chinese patent CN201010202098 discloses the preparation method of a kind of flexible substrate suede ZnO and the application in the solar cell.The content of publication focuses mostly in flexible solar cell structure and preparation scheme, and is not open about the patent that falls into luminous effect, and do not realize that through improving the back electrode preparation method back side falls into the report of luminous effect in the disclosed research work.
Summary of the invention
The purpose of this invention is to provide a kind of flexible thin-film solar cell metal back electrode and preparation method thereof; In output electric property ability that reaches the solar film battery light-transmitting component that is not less than prior art for preparing and light transmission; Have that cost is low, efficient is high, simple to operate; Characteristics such as weak point consuming time solve the problems referred to above that background technology exists.
Technical scheme of the present invention is: a kind of preparation method of flexible thin-film solar cell metal back electrode; Directly the surperficial metal back electrode with suede structure of preparation on flexible substrate comprises following processing step: ⑴ and on flexible substrate, forms ups and downs suede structure; ⑵ on the substrate that has the convex-concave surface structure depositing metal films, as the metal back electrode of flexible battery.
Said ups and downs suede structure, the flexible substrate surface-coated one deck microparticle after the cleaning, microparticle diameter are between 10nm ~ 1 μ m, and the spacing of microparticle is 0 ~ 10 μ m; The size through regulating microparticle and the spacing of microparticle change the surperficial suede degree of final preparation metal back electrode.
The method that obtains suede structure comprises spin coating, membrane, is adsorbed on the physical method that film surface obtains the microparticle film, and the material that is used for forming concaveconvex structure can be the microparticle of virtually any size, for example TiO
2, SiO
2, polymer microsphere.
The method that obtains suede structure is included in preparation suede structure or nano array structure chemical method on the film, and what form suede structure can be the microstructure of virtually any size, for example nano-wire array, pyramid structure array and nano-micrometre pit structure.
Said metal film layer is prepared on the flexible substrate through sputter, method of evaporating, and metallic diaphragm comprises aluminium, silver, molybdenum film.
The method that obtains suede structure can also be: a) sputter growth ZnO, carry out etching through wet chemistry method, b) low-pressure chemical vapor deposition boron doping zinc-oxide (ZnO:B), c) Hydrothermal Preparation nano-wire array.
A kind of flexible thin-film solar cell metal back electrode; Adopt method for preparing, the metal back electrode surface has suede structure, has high suede degree value; Incident light had high reflectance; Said suede degree value is the ratio of diffuse reflectance and total reflectivity, and suede degree value is greater than 85%, to the reflection of incident light rate greater than 60%.
Good effect of the present invention: the matte metal back electrode that the present invention obtains has adjustable suede degree value (suede degree value defined is the ratio of diffuse reflectance and total reflectivity) and high reflectivity, is suitable for flexible thin-film solar cell.Use matte metal back electrode of the present invention to prepare flexible thin-film solar cell and have following advantage: 1) surface texture of back electrode can be regulated through the method that changes microparticle size and spacing, and is convenient, flexible, helps realizing process parameter optimizing; 2) metal back electrode has high reflectance, can improve the sunlight utilance, promotes battery efficiency; 3) sunlight has high light path in battery, therefore can reduce the hull cell absorber thickness, shortens productive temp, reduces production costs, and enhances productivity.
Description of drawings
Fig. 1 is background technology flexible thin-film solar cell structural representation (is example with the thin-film silicon cell)
Fig. 2 is a process flow diagram of the present invention
Among the figure: flexible substrate 1., back electrode 2., photoelectric conversion layer 3., preceding transparency electrode 4., encapsulating material is 5..
Embodiment
Below in conjunction with accompanying drawing, the present invention is further specified through embodiment.
Embodiment 1
At first use polyimide film after the ultrasonic cleaning as flexible substrate, use the method for spin coating on polyimide film, to apply one deck TiO
2Particle, TiO
2The diameter of particle is between 10nm ~ 1 μ m.Use the method for magnetron sputtering then, be coated with direct growth aluminium film on the polyimide film of microparticle.
Aforesaid depositing operation is chosen gas pressure intensity 3-30mTorr, and radio-frequency power 100-250W feeds argon flow amount 2-20sccm, and depositing temperature is a room temperature, can be through regulating the thickness that sedimentation time changes the aluminium film.
Can obtain having the metallic film of suede structure behind the magnetron sputtering aluminium film, can be used as back electrode and prepare the thin film silicon flexible battery.
Embodiment 2
Like embodiment 1 said aluminium method for manufacturing thin film, use evaporation to prepare the aluminium film, the aluminium film that obtains also has suede structure.
Embodiment 3
At first use sputtering method on polyimide substrate, to prepare ZnO film.Depositing operation is: gas pressure intensity 3-30mTorr, and radio-frequency power 100-250W feeds argon flow amount 2-20sccm, and depositing temperature is a room temperature-200 ℃.Use wet chemistry method that ZnO film is carried out etching then, obtain suede structure.Used etching liquid concentration is 0.1-5wt%, can be acidity or alkaline solution.Like embodiment 1,2 said aluminium method for manufacturing thin film, obtain matte aluminium thin film back electrode at last.
At first use the method for chemical self assembly, at polyimide surface one deck SiO that evenly grows
2Nanosphere.Like embodiment 1,2 said aluminium method for manufacturing thin film, obtain matte aluminium thin film back electrode then.
At first use hydro thermal method to prepare the ZnO nano array structure at film surface, technology is: heat 0.2-2mol/L zinc acetate and 0.2-2mol/L hexamethylenetetramine (HMT) mixed solution, 2-10 hour heating time down at heating-up temperature 70-100 ℃.Like embodiment 1,2 said aluminium method for manufacturing thin film, obtain matte aluminium thin film back electrode then.
Embodiment 6
Changing the aluminium film is silver-colored film, can be used as thin film silicon flexible battery back electrode equally.
Embodiment 7
Changing the aluminium film is molybdenum film, can be used as CIGS flexible battery back electrode.
Claims (6)
1. the preparation method of a flexible thin-film solar cell metal back electrode is characterized in that the directly surperficial metal back electrode with suede structure of preparation on flexible substrate, comprises following processing step: ⑴ and on flexible substrate, forms ups and downs suede structure; ⑵ on the substrate that has the convex-concave surface structure depositing metal films, as the metal back electrode of flexible battery.
2. according to the preparation method of the said a kind of flexible thin-film solar cell metal back electrode of claim 1; It is characterized in that: said ups and downs suede structure; Flexible substrate surface-coated one deck microparticle after the cleaning; The microparticle diameter is between 10nm ~ 1 μ m, and the spacing of microparticle is 0 ~ 10 μ m; The size through regulating microparticle and the spacing of microparticle change the surperficial suede degree of final preparation metal back electrode.
3. according to the preparation method of claim 1 or 2 said a kind of flexible thin-film solar cell metal back electrodes, it is characterized in that: the method that obtains suede structure comprises spin coating, membrane, is adsorbed on the physical method that film surface obtains the microparticle film.
4. according to the preparation method of claim 1 or 2 said a kind of flexible thin-film solar cell metal back electrodes, it is characterized in that: the method that obtains suede structure is included in preparation suede structure or nano array structure chemical method on the film.
5. according to the preparation method of claim 1 or 2 said a kind of flexible thin-film solar cell metal back electrodes; It is characterized in that: said metal film layer is prepared on the flexible substrate through sputter, method of evaporating, and metallic diaphragm comprises aluminium, silver, molybdenum film.
6. flexible thin-film solar cell metal back electrode; It is characterized in that: adopt the method preparation that claim 1 limited, the metal back electrode surface has suede structure, has high suede degree value; Incident light had high reflectance; Said suede degree value is the ratio of diffuse reflectance and total reflectivity, and suede degree value is greater than 85%, to the reflection of incident light rate greater than 60%.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103151399A (en) * | 2013-03-04 | 2013-06-12 | 上海中科高等研究院 | Flexible thin film solar cell with periodic trapping structure and preparation method for flexible thin film solar cell |
| CN103779440A (en) * | 2012-10-18 | 2014-05-07 | 台积太阳能股份有限公司 | Method of in-situ fabricating of intrinsic zinc oxide layer and photovoltaic device thereof |
| CN103956395A (en) * | 2014-05-09 | 2014-07-30 | 中国科学院宁波材料技术与工程研究所 | Array structure fabric surface and preparing method and application thereof |
| CN107946467A (en) * | 2017-12-13 | 2018-04-20 | 浙江海洋大学 | A kind of polymer solar battery based on multiple light trapping structure and preparation method thereof |
| CN111540796A (en) * | 2020-05-15 | 2020-08-14 | 东莞市中天自动化科技有限公司 | High-adhesion solar cell back electrode and absorption layer structure and manufacturing process |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101246917A (en) * | 2007-02-14 | 2008-08-20 | 北京行者多媒体科技有限公司 | Method for intensifying light absorption of thin-film solar cell |
| CN101246919A (en) * | 2007-02-14 | 2008-08-20 | 北京行者多媒体科技有限公司 | Method for acquiring rough surface of silicon hydride thin film |
| CN101459201A (en) * | 2007-12-10 | 2009-06-17 | 台达电子工业股份有限公司 | Solar battery and method for manufacturing the same |
| CN101997057A (en) * | 2009-08-18 | 2011-03-30 | 北儒精密股份有限公司 | Method and equipment for manufacturing solar cell |
| CN102044577A (en) * | 2010-11-18 | 2011-05-04 | 深圳丹邦投资集团有限公司 | Flexible thin film solar cell and production method thereof |
| CN102231398A (en) * | 2011-06-29 | 2011-11-02 | 中国科学院深圳先进技术研究院 | Copper-indium-gallium-selenium thin film battery with suede and preparation method |
-
2011
- 2011-12-07 CN CN2011104009162A patent/CN102403411A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101246917A (en) * | 2007-02-14 | 2008-08-20 | 北京行者多媒体科技有限公司 | Method for intensifying light absorption of thin-film solar cell |
| CN101246919A (en) * | 2007-02-14 | 2008-08-20 | 北京行者多媒体科技有限公司 | Method for acquiring rough surface of silicon hydride thin film |
| CN101459201A (en) * | 2007-12-10 | 2009-06-17 | 台达电子工业股份有限公司 | Solar battery and method for manufacturing the same |
| CN101997057A (en) * | 2009-08-18 | 2011-03-30 | 北儒精密股份有限公司 | Method and equipment for manufacturing solar cell |
| CN102044577A (en) * | 2010-11-18 | 2011-05-04 | 深圳丹邦投资集团有限公司 | Flexible thin film solar cell and production method thereof |
| CN102231398A (en) * | 2011-06-29 | 2011-11-02 | 中国科学院深圳先进技术研究院 | Copper-indium-gallium-selenium thin film battery with suede and preparation method |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103779440A (en) * | 2012-10-18 | 2014-05-07 | 台积太阳能股份有限公司 | Method of in-situ fabricating of intrinsic zinc oxide layer and photovoltaic device thereof |
| CN103779440B (en) * | 2012-10-18 | 2017-03-01 | 台湾积体电路制造股份有限公司 | Manufacture the photovoltaic device that the method for native oxide zinc layers and the method manufacture in situ |
| CN103151399A (en) * | 2013-03-04 | 2013-06-12 | 上海中科高等研究院 | Flexible thin film solar cell with periodic trapping structure and preparation method for flexible thin film solar cell |
| CN103956395A (en) * | 2014-05-09 | 2014-07-30 | 中国科学院宁波材料技术与工程研究所 | Array structure fabric surface and preparing method and application thereof |
| CN107946467A (en) * | 2017-12-13 | 2018-04-20 | 浙江海洋大学 | A kind of polymer solar battery based on multiple light trapping structure and preparation method thereof |
| CN107946467B (en) * | 2017-12-13 | 2020-08-07 | 浙江海洋大学 | Polymer solar cell based on multiple light trapping structures and preparation method thereof |
| CN111540796A (en) * | 2020-05-15 | 2020-08-14 | 东莞市中天自动化科技有限公司 | High-adhesion solar cell back electrode and absorption layer structure and manufacturing process |
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