CN102403392A

CN102403392A - Vacuum process equipment, vacuum transmission process equipment and methods

Info

Publication number: CN102403392A
Application number: CN2010102747444A
Authority: CN
Inventors: 钱锋
Original assignee: SHANGHAI KAISHITONG SEMICONDUCTOR CO Ltd
Current assignee: Kingstone Semiconductor Co Ltd
Priority date: 2010-09-07
Filing date: 2010-09-07
Publication date: 2012-04-04
Anticipated expiration: 2030-09-07
Also published as: CN102403392B

Abstract

The invention discloses vacuum process equipment, which comprises at least one transmission platform, n processing devices and a control device. Each transmission platform is provided with n workpiece bearing areas which are identical in dimension, extend along the moving direction of the transmission platform and are used for bearing workpieces, each workpiece is provided with n areas to be processed, processing media of the processing devices are used for processing the areas to be processed of the workpieces in the workpiece bearing areas in one-to-one correspondence, and the control device is used for enabling the processing media action areas of the processing devices and the corresponding transmission platforms to move relatively and independently from one another in the perpendicular direction of the moving direction of the corresponding transmission platforms. The invention further discloses three vacuum process methods, three types of vacuum transmission process equipment and a method for the vacuum transmission process equipment. By the aid of the vacuum process equipment, the vacuum transmission process equipment and the methods, extremely high production efficiency can be realized.

Description

Mode vacuum process equipment, vacuum transmission process apparatus and method

Technical field

The present invention relates to the vacuum process technology, particularly relate to a kind of mode vacuum process equipment, vacuum transmission process apparatus and corresponding method.

Background technology

New forms of energy are one of five big technical fields of tool decision power in the 21st century development of world economy, solar energy be a kind of cleaning, efficiently, the new forms of energy of depletion never.In the new century, national governments are all with the important content of solar energy resources utilization as national sustainable development strategy, that photovoltaic generation has is safe and reliable, noiseless, pollution-free, restriction less, plurality of advantages such as low, the easy maintenance of failure rate.In recent years, the fast development of international photovoltaic generation industry, supply falls short of demand for solar wafer, so the electricity conversion of raising solar wafer and the production capacity of solar wafer have become an important problem.

As shown in Figure 1, solar cell need form at the back side of a wafer and respectively account for half the n+ utmost point and the p+ utmost point.Doping process according to routine; Need earlier on the half the zone of chip back surface, to plate mask, the method for injecting with thermal diffusion or ion then to second half not coating film area mix, remove the mask that plates afterwards; And once more at doped region plated film; The method of injecting with thermal diffusion or ion is then mixed to current not coating film area, removes all plated films at last, and this just accomplishes the making processing procedure of the n+ utmost point and the p+ utmost point.Such technology not only processing procedure is complicated, and doping efficiency is low, and required process time is longer, and because fabrication steps is more, rate of finished products is also lower.

In addition; Because many processing procedures of solar wafer all need be accomplished under vacuum condition; So how to reduce the time of solar wafer turnover vacuum, and effectively utilize the solar wafer processing procedure time in a vacuum most important as far as the production efficiency that improves the solar wafer manufacturing equipment.Existing many solar wafer manufacturing approaches all have higher production efficiency, the method mentioned of United States Patent (USP) 20080038908 for example, but be based on the design principle of this method; Its production efficiency still can receive some natural restrictions, such as, when the workpiece of different batches passes in and out vacuum environment; Or in vacuum environment when finished work switches to following batch of workpiece to be processed; The procedure for processing of workpiece is all had to interrupt, and in this section, entire equipment is in invalid running status fully break period; Promptly waste the processing resource, wasted process time again.This shows that disclosed this production equipment of this patent can not be realized best production efficiency naturally.And except this patent disclosed this Apparatus and method for, in existing various other vacuum process methods, do not see the pattern that can obtain best production efficiency yet.

Summary of the invention

The technical problem that the present invention will solve is in order to overcome solar wafer doping complicated steps in the prior art, defective that vacuum process method production efficiency is lower, a kind of mode vacuum process equipment, vacuum transmission process apparatus and corresponding method that step is succinct and production efficiency is high of mixing to be provided.

The present invention solves above-mentioned technical problem through following technical proposals: a kind of mode vacuum process equipment; It comprises a vacuum process chamber; Its characteristics are that this mode vacuum process equipment also comprises: it is measure-alike and along the Workpiece carrier zone that is used to carry workpiece that the moving direction of said transmission platform extends that at least one transmission platform that can in this vacuum process chamber, move, said transmission platform have n; N is the natural number more than or equal to 2, and each workpiece has n zone to be processed; N is located at the processing unit (plant) in this vacuum process chamber, and the machining medium of each processing unit (plant) is used for correspondingly each zone to be processed of workpiece is processed, and the machining medium of each processing unit (plant) can pass said transmission platform but can't pass workpiece; One control device is used to make the machining medium zone of action of each processing unit (plant) with said transmission platform separate relatively moving to take place on the direction vertical with the moving direction of said transmission platform; Moving and the machining medium zone of action of each processing unit (plant) and relatively moving of said transmission platform of said transmission platform makes the machining medium of each processing unit (plant) process the zone corresponding to be processed of each workpiece in each Workpiece carrier zone.

Preferably, those processing unit (plant) types are different, and perhaps, those processing unit (plant) types are identical but machining medium different.

Preferably, n=2, each workpiece have two zones to be processed, and are placed as edge, the line of demarcation direction vertical with the moving direction of said transmission platform in these two zones to be processed; In same Workpiece carrier zone, workpiece aligns each other, and along the moving direction of said transmission platform, the zone different to be processed of adjacent workpieces is adjacent; Along the direction vertical with the moving direction of said transmission platform, the zone different to be processed of the adjacent workpieces of different workpieces bearing area is adjacent; The size of the machining medium zone of action of two processing unit (plant)s is: on the moving direction of said transmission platform, cover the zone corresponding to be processed of a workpiece, on the direction vertical with the moving direction of said transmission platform, cover a Workpiece carrier zone; The machining medium of each processing unit (plant) replaces processing to the zone corresponding to be processed of each workpiece in two Workpiece carrier zones.

Preferably, n=2, each workpiece have two zones to be processed, and are placed as edge, the line of demarcation direction vertical with the moving direction of said transmission platform in these two zones to be processed; In same Workpiece carrier zone, workpiece aligns each other, and along the moving direction of said transmission platform, the zone identical to be processed of adjacent workpieces is adjacent; Along the direction vertical with the moving direction of said transmission platform, the zone different to be processed of the adjacent workpieces of different workpieces bearing area is adjacent; The size of the machining medium zone of action of two processing unit (plant)s is: on the moving direction of said transmission platform, cover the zone corresponding to be processed of two workpiece, on the direction vertical with the moving direction of said transmission platform, cover a Workpiece carrier zone; The machining medium of each processing unit (plant) replaces processing to the zone corresponding to be processed of each workpiece in two Workpiece carrier zones.

Another technical scheme of the present invention is: a kind of vacuum process method of utilizing above-mentioned mode vacuum process equipment to realize; Its characteristics are; Said transmission platform is carrying workpiece and in this vacuum process chamber, is moving; Simultaneously; This control device makes the machining medium zone of action of each processing unit (plant) with said transmission platform separate relatively moving take place on the direction vertical with the moving direction of said transmission platform, so that the machining medium of each processing unit (plant) replaces processing to the zone corresponding to be processed of each workpiece in each Workpiece carrier zone.

Another technical scheme of the present invention is: a kind of vacuum process method of utilizing above-mentioned mode vacuum process equipment to realize, its characteristics are that said transmission platform is carrying workpiece and in this vacuum process chamber, moving, and simultaneously, each processing unit (plant) is carried out following steps: S ₁, this processing unit (plant) utilize machining medium in the Workpiece carrier zone along the direction vertical with the moving direction of said transmission platform one row workpiece zone corresponding to be processed process; S ₂, this control device makes the machining medium zone of action of this processing unit (plant) relatively move on the direction vertical with the moving direction of said transmission platform with said transmission platform, so that this processing unit (plant) utilizes machining medium that the zone corresponding to be processed along row's workpiece of the direction vertical with the moving direction of said transmission platform in another Workpiece carrier zone is processed; S ₃, this control device makes the machining medium zone of action of this processing unit (plant) relatively move on the direction vertical with the moving direction of said transmission platform with said transmission platform, so that this processing unit (plant) utilizes machining medium to step S ₁In this Workpiece carrier zone in along the direction vertical with the moving direction of said transmission platform one row workpiece zone corresponding to be processed process; S ₄, repeating step S ₂-S ₃, until whole workpiece completion of processing; Wherein, step S ₁With step S ₂In the zone that processed on the moving direction of said transmission platform, be adjacent, step S ₂With step S ₃In the zone that processed also be adjacent on the moving direction of said transmission platform.

Preferably, to the half the processing unit (plant) of corresponding zone to be processed, at step S less than workpiece size ₂With step S ₃In; The machining medium zone of action of this processing unit (plant) and said transmission platform relatively move before or after and at this processing unit (plant) workpiece is carried out first being processed, this processing unit (plant) stops to generate machining medium or the Workpiece carrier zone is shifted out in the machining medium zone of action.

Another technical scheme of the present invention is: a kind of vacuum process method of utilizing above-mentioned mode vacuum process equipment to realize, its characteristics are that said transmission platform is carrying workpiece and in this vacuum process chamber, moving, and simultaneously, each processing unit (plant) is carried out following steps: S ₁, this processing unit (plant) utilize machining medium in the Workpiece carrier zone along the direction vertical with the moving direction of said transmission platform two row workpiece zone corresponding to be processed process, this two row workpiece adjacent on the moving direction of said transmission platform; S ₂, this control device makes the machining medium zone of action of this processing unit (plant) relatively move on the direction vertical with the moving direction of said transmission platform with said transmission platform; So that this processing unit (plant) utilizes machining medium to processing along the zone corresponding to be processed that two of the direction vertical with the moving direction of said transmission platform arranged workpiece in another Workpiece carrier zone, this two rows workpiece is adjacent on the moving direction of said transmission platform; S ₃, this control device makes the machining medium zone of action of this processing unit (plant) relatively move on the direction vertical with the moving direction of said transmission platform with said transmission platform, so that this processing unit (plant) utilizes machining medium to step S ₁In this Workpiece carrier zone in along the direction vertical with the moving direction of said transmission platform two row workpiece zone corresponding to be processed process, this two row workpiece adjacent on the moving direction of said transmission platform; S ₄, repeating step S ₂-S ₃, until whole workpiece completion of processing; Wherein, step S ₁With step S ₂In the zone that processed on the moving direction of said transmission platform, be adjacent, step S ₂With step S ₃In the zone that processed also be adjacent on the moving direction of said transmission platform.

Another technical scheme of the present invention is: a kind of vacuum transmission process apparatus; Its characteristics are; It comprises an above-mentioned mode vacuum process equipment; This vacuum transmission process apparatus also comprises: one be connected in this vacuum process chamber one side advance that part chamber and one is connected in this vacuum process chamber opposite side go out the part chamber, this advances part chamber and this and goes out the part chamber and all can between atmospheric condition and vacuum state, switch; The quantity of said transmission platform is one, and this transmission platform can enter part chamber, this vacuum process chamber, this direct route that goes out the part chamber along this and move back and forth; At least one first mechanical arm is used for loading workpiece from atmospheric environment to being positioned at this said transmission platform that enters the part chamber; At least one second mechanical arm is used for from being positioned at this said transmission platform that goes out the part chamber to the atmospheric environment discharging workpieces; This transmission platform is used for after loading workpiece entering the part chamber from this to be shifted to this and goes out the part chamber, makes each workpiece accept the processing of the machining medium of each processing unit (plant), after discharging workpieces, goes out the part chamber from this then and retracts this and enter the part chamber.

Preferably, n=2, each workpiece have two zones to be processed, and are placed as edge, the line of demarcation direction vertical with the moving direction of this transmission platform in these two zones to be processed; In same Workpiece carrier zone, workpiece aligns each other, and along the moving direction of this transmission platform, the zone different to be processed of adjacent workpieces is adjacent; Along the direction vertical with the moving direction of this transmission platform, the zone different to be processed of the adjacent workpieces of different workpieces bearing area is adjacent; The size of the machining medium zone of action of two processing unit (plant)s is: on the moving direction of this transmission platform, cover the zone corresponding to be processed of a workpiece, on the direction vertical with the moving direction of this transmission platform, cover a Workpiece carrier zone; The machining medium of each processing unit (plant) replaces processing to the zone corresponding to be processed of each workpiece in two Workpiece carrier zones.

Preferably, n=2, each workpiece have two zones to be processed, and are placed as edge, the line of demarcation direction vertical with the moving direction of this transmission platform in these two zones to be processed; In same Workpiece carrier zone, workpiece aligns each other, and along the moving direction of this transmission platform, the zone identical to be processed of adjacent workpieces is adjacent; Along the direction vertical with the moving direction of this transmission platform, the zone different to be processed of the adjacent workpieces of different workpieces bearing area is adjacent; The size of the machining medium zone of action of two processing unit (plant)s is: on the moving direction of this transmission platform, cover the zone corresponding to be processed of two workpiece, on the direction vertical with the moving direction of this transmission platform, cover a Workpiece carrier zone; The machining medium of each processing unit (plant) replaces processing to the zone corresponding to be processed of each workpiece in two Workpiece carrier zones.

Another technical scheme of the present invention is: a kind of vacuum transmission manufacturing method thereof that utilizes above-mentioned vacuum transmission process apparatus to realize; Its characteristics are, repeat following steps until whole workpiece completion of processing: this advances, and the part chamber is inflated to atmospheric condition, this this transmission platform that enters the part chamber loads workpiece to this first mechanical arm, this advances the part chamber pumping to vacuum state to being arranged in from atmospheric environment; This transmission platform enters the part chamber from this to be shifted to this and goes out the part chamber, makes each workpiece accept the processing of the machining medium of each processing unit (plant); This go out the part chamber be inflated to atmospheric condition, this second mechanical arm from be arranged in this this transmission platform that goes out the part chamber to the atmospheric environment discharging workpieces, this goes out the part chamber pumping to vacuum state; This transmission platform goes out the part chamber from this and retracts this and enter the part chamber; Wherein, Entering the part chamber from this at this transmission platform shifts to this process that goes out the part chamber; This control device makes the machining medium zone of action of each processing unit (plant) with this transmission platform separate relatively moving take place on the direction vertical with the moving direction of this transmission platform, so that the machining medium of each processing unit (plant) replaces processing to the zone corresponding to be processed of each workpiece in each Workpiece carrier zone.

Another technical scheme of the present invention is: a kind of vacuum transmission manufacturing method thereof that utilizes above-mentioned vacuum transmission process apparatus to realize; Its characteristics are, repeat following steps until whole workpiece completion of processing: this advances, and the part chamber is inflated to atmospheric condition, this this transmission platform that enters the part chamber loads workpiece to this first mechanical arm, this advances the part chamber pumping to vacuum state to being arranged in from atmospheric environment; This transmission platform enters the part chamber from this to be shifted to this and goes out the part chamber, makes each workpiece accept the processing of the machining medium of each processing unit (plant); This go out the part chamber be inflated to atmospheric condition, this second mechanical arm from be arranged in this this transmission platform that goes out the part chamber to the atmospheric environment discharging workpieces, this goes out the part chamber pumping to vacuum state; This transmission platform goes out the part chamber from this and retracts this and enter the part chamber; Wherein, enter the part chamber from this at this transmission platform and shift to this process that goes out the part chamber, each processing unit (plant) is carried out following steps: S ₁, this processing unit (plant) utilize machining medium in the Workpiece carrier zone along the direction vertical with the moving direction of this transmission platform one row workpiece zone corresponding to be processed process; S ₂, this control device makes the machining medium zone of action of this processing unit (plant) relatively move on the direction vertical with the moving direction of this transmission platform with this transmission platform, so that this processing unit (plant) utilizes machining medium that the zone corresponding to be processed along row's workpiece of the direction vertical with the moving direction of this transmission platform in another Workpiece carrier zone is processed; S ₃, this control device makes the machining medium zone of action of this processing unit (plant) relatively move on the direction vertical with the moving direction of this transmission platform with this transmission platform, so that this processing unit (plant) utilizes machining medium to step S ₁In this Workpiece carrier zone in along the direction vertical with the moving direction of this transmission platform one row workpiece zone corresponding to be processed process; S ₄, repeating step S ₂-S ₃, until whole workpiece completion of processing; Wherein, step S ₁With step S ₂In the zone that processed on the moving direction of this transmission platform, be adjacent, step S ₂With step S ₃In the zone that processed also be adjacent on the moving direction of this transmission platform.

Another technical scheme of the present invention is: a kind of vacuum transmission manufacturing method thereof that utilizes above-mentioned vacuum transmission process apparatus to realize; Its characteristics are, repeat following steps until whole workpiece completion of processing: this advances, and the part chamber is inflated to atmospheric condition, this this transmission platform that enters the part chamber loads workpiece to this first mechanical arm, this advances the part chamber pumping to vacuum state to being arranged in from atmospheric environment; This transmission platform enters the part chamber from this to be shifted to this and goes out the part chamber, makes each workpiece accept the processing of the machining medium of each processing unit (plant); This go out the part chamber be inflated to atmospheric condition, this second mechanical arm from be arranged in this this transmission platform that goes out the part chamber to the atmospheric environment discharging workpieces, this goes out the part chamber pumping to vacuum state; This transmission platform goes out the part chamber from this and retracts this and enter the part chamber; Wherein, enter the part chamber from this at this transmission platform and shift to this process that goes out the part chamber, each processing unit (plant) is carried out following steps: S ₁, this processing unit (plant) utilize machining medium in the Workpiece carrier zone along the direction vertical with the moving direction of this transmission platform two row workpiece zone corresponding to be processed process, this two row workpiece adjacent on the moving direction of this transmission platform; S ₂, this control device makes the machining medium zone of action of this processing unit (plant) relatively move on the direction vertical with the moving direction of this transmission platform with this transmission platform; So that this processing unit (plant) utilizes machining medium to processing along the zone corresponding to be processed that two of the direction vertical with the moving direction of this transmission platform arranged workpiece in another Workpiece carrier zone, this two rows workpiece is adjacent on the moving direction of this transmission platform; S ₃, this control device makes the machining medium zone of action of this processing unit (plant) relatively move on the direction vertical with the moving direction of this transmission platform with this transmission platform, so that this processing unit (plant) utilizes machining medium to step S ₁In this Workpiece carrier zone in along the direction vertical with the moving direction of this transmission platform two row workpiece zone corresponding to be processed process, this two row workpiece adjacent on the moving direction of this transmission platform; S ₄, repeating step S ₂-S ₃, until whole workpiece completion of processing; Wherein, step S ₁With step S ₂In the zone that processed on the moving direction of this transmission platform, be adjacent, step S ₂With step S ₃In the zone that processed also be adjacent on the moving direction of this transmission platform.

Another technical scheme of the present invention is: a kind of vacuum transmission process apparatus; Its characteristics are; It comprises an above-mentioned mode vacuum process equipment; This vacuum transmission process apparatus also comprises: at least two be connected in this vacuum process chamber one side advance that part chamber and at least two are connected in this vacuum process chamber opposite side go out the part chamber, respectively enter the part chamber and respectively to go out the part chamber corresponding one by one, and all can between atmospheric condition and vacuum state, switch; The quantity of said transmission platform is at least two; Each transmission platform is corresponding one by one to entering the part chamber and going out the part chamber with each; Each transmission platform all can move back and forth along the direct route that enters part chamber, this vacuum process chamber, goes out the part chamber, and the plane of motion of each transmission platform has nothing in common with each other; At least one first mechanical arm is used for from atmospheric environment to being positioned at the into transmission platform loading workpiece in part chamber; At least one second mechanical arm is used for from the transmission platform that is positioned at the part chamber to the atmospheric environment discharging workpieces; Each transmission platform is used for after loading workpiece, shifting to out the part chamber from entering the part chamber through this vacuum process chamber continuously successively, makes each workpiece accept the processing of the machining medium of each processing unit (plant), after discharging workpieces, retracts into part chamber from going out the part chamber through this vacuum process chamber then.

Preferably, each highly difference that is provided with to entering the part chamber and going out the part chamber, the height of the plane of motion of each transmission platform is different.

Preferably, n=2, each workpiece have two zones to be processed, and are placed as edge, the line of demarcation direction vertical with the moving direction of each transmission platform in these two zones to be processed; In same Workpiece carrier zone, workpiece aligns each other, and along the moving direction of each transmission platform, the zone different to be processed of adjacent workpieces is adjacent; Along the direction vertical with the moving direction of each transmission platform, the zone different to be processed of the adjacent workpieces of different workpieces bearing area is adjacent; The size of the machining medium zone of action of two processing unit (plant)s is: on the moving direction of each transmission platform, cover the zone corresponding to be processed of a workpiece, on the direction vertical with the moving direction of each transmission platform, cover a Workpiece carrier zone; The machining medium of each processing unit (plant) replaces processing to the zone corresponding to be processed of each workpiece in two Workpiece carrier zones.

Preferably, n=2, each workpiece have two zones to be processed, and are placed as edge, the line of demarcation direction vertical with the moving direction of each transmission platform in these two zones to be processed; In same Workpiece carrier zone, workpiece aligns each other, and along the moving direction of each transmission platform, the zone identical to be processed of adjacent workpieces is adjacent; Along the direction vertical with the moving direction of each transmission platform, the zone different to be processed of the adjacent workpieces of different workpieces bearing area is adjacent; The size of the machining medium zone of action of two processing unit (plant)s is: on the moving direction of each transmission platform, cover the zone corresponding to be processed of two workpiece, on the direction vertical with the moving direction of each transmission platform, cover a Workpiece carrier zone; The machining medium of each processing unit (plant) replaces processing to the zone corresponding to be processed of each workpiece in two Workpiece carrier zones.

Another technical scheme of the present invention is: a kind of vacuum transmission manufacturing method thereof that utilizes above-mentioned vacuum transmission process apparatus to realize; Its characteristics are; Each transmission platform is shifted to out the part chamber from entering the part chamber through this vacuum process chamber successively continuously after loading workpiece, make each workpiece accept the processing of the machining medium of each processing unit (plant); Except being in from entering the part chamber through the transmission platform the process in part chamber is shifted to out in this vacuum process chamber, all the other each transmission platforms: or be in from going out the part chamber and retract the process in part chamber into through this vacuum process chamber; Or be arranged in into part chamber, and this enters the part chamber and is in and is inflated to atmospheric condition, this first mechanical arm and loads the wait state after workpiece, the process that is pumped to vacuum state or process finish from atmospheric environment to being arranged in this this transmission platform that enters the part chamber; Or be arranged in the part chamber, and this goes out the part chamber and is in and is inflated to atmospheric condition, this second mechanical arm from being arranged in the wait state of this this transmission platform that goes out the part chamber after atmospheric environment discharging workpieces, the process that is pumped to vacuum state or process finish; Wherein, Shift to out the process in part chamber from entering the part chamber at each transmission platform; This control device makes the machining medium zone of action of each processing unit (plant) with this transmission platform separate relatively moving take place on the direction vertical with the moving direction of this transmission platform, so that the machining medium of each processing unit (plant) replaces processing to the zone corresponding to be processed of each workpiece in each Workpiece carrier zone.

Another technical scheme of the present invention is: a kind of vacuum transmission manufacturing method thereof that utilizes above-mentioned vacuum transmission process apparatus to realize; Its characteristics are; Each transmission platform is shifted to out the part chamber from entering the part chamber through this vacuum process chamber successively continuously after loading workpiece, make each workpiece accept the processing of the machining medium of each processing unit (plant); Except being in from entering the part chamber through the transmission platform the process in part chamber is shifted to out in this vacuum process chamber, all the other each transmission platforms: or be in from going out the part chamber and retract the process in part chamber into through this vacuum process chamber; Or be arranged in into part chamber, and this enters the part chamber and is in and is inflated to atmospheric condition, this first mechanical arm and loads the wait state after workpiece, the process that is pumped to vacuum state or process finish from atmospheric environment to being arranged in this this transmission platform that enters the part chamber; Or be arranged in the part chamber, and this goes out the part chamber and is in and is inflated to atmospheric condition, this second mechanical arm from being arranged in the wait state of this this transmission platform that goes out the part chamber after atmospheric environment discharging workpieces, the process that is pumped to vacuum state or process finish; Wherein, shift to out the process in part chamber from entering the part chamber at each transmission platform, each processing unit (plant) is carried out following steps: S ₁, this processing unit (plant) utilize machining medium in the Workpiece carrier zone along the direction vertical with the moving direction of this transmission platform one row workpiece zone corresponding to be processed process; S ₂, this control device makes the machining medium zone of action of this processing unit (plant) relatively move on the direction vertical with the moving direction of this transmission platform with this transmission platform, so that this processing unit (plant) utilizes machining medium that the zone corresponding to be processed along row's workpiece of the direction vertical with the moving direction of this transmission platform in another Workpiece carrier zone is processed; S ₃, this control device makes the machining medium zone of action of this processing unit (plant) relatively move on the direction vertical with the moving direction of this transmission platform with this transmission platform, so that this processing unit (plant) utilizes machining medium to step S ₁In this Workpiece carrier zone in along the direction vertical with the moving direction of this transmission platform one row workpiece zone corresponding to be processed process; S ₄, repeating step S ₂-S ₃, until whole workpiece completion of processing; Wherein, step S ₁With step S ₂In the zone that processed on the moving direction of this transmission platform, be adjacent, step S ₂With step S ₃In the zone that processed also be adjacent on the moving direction of this transmission platform.

Another technical scheme of the present invention is: a kind of vacuum transmission manufacturing method thereof that utilizes above-mentioned vacuum transmission process apparatus to realize; Its characteristics are; Each transmission platform is shifted to out the part chamber from entering the part chamber through this vacuum process chamber successively continuously after loading workpiece, make each workpiece accept the processing of the machining medium of each processing unit (plant); Except being in from entering the part chamber through the transmission platform the process in part chamber is shifted to out in this vacuum process chamber, all the other each transmission platforms: or be in from going out the part chamber and retract the process in part chamber into through this vacuum process chamber; Or be arranged in into part chamber, and this enters the part chamber and is in and is inflated to atmospheric condition, this first mechanical arm and loads the wait state after workpiece, the process that is pumped to vacuum state or process finish from atmospheric environment to being arranged in this this transmission platform that enters the part chamber; Or be arranged in the part chamber, and this goes out the part chamber and is in and is inflated to atmospheric condition, this second mechanical arm from being arranged in the wait state of this this transmission platform that goes out the part chamber after atmospheric environment discharging workpieces, the process that is pumped to vacuum state or process finish; Wherein, shift to out the process in part chamber from entering the part chamber at each transmission platform, each processing unit (plant) is carried out following steps: S ₁, this processing unit (plant) utilize machining medium in the Workpiece carrier zone along the direction vertical with the moving direction of this transmission platform two row workpiece zone corresponding to be processed process, this two row workpiece adjacent on the moving direction of this transmission platform; S ₂, this control device makes the machining medium zone of action of this processing unit (plant) relatively move on the direction vertical with the moving direction of this transmission platform with this transmission platform; So that this processing unit (plant) utilizes machining medium to processing along the zone corresponding to be processed that two of the direction vertical with the moving direction of this transmission platform arranged workpiece in another Workpiece carrier zone, this two rows workpiece is adjacent on the moving direction of this transmission platform; S ₃, this control device makes the machining medium zone of action of this processing unit (plant) relatively move on the direction vertical with the moving direction of this transmission platform with this transmission platform, so that this processing unit (plant) utilizes machining medium to step S ₁In this Workpiece carrier zone in along the direction vertical with the moving direction of this transmission platform two row workpiece zone corresponding to be processed process, this two row workpiece adjacent on the moving direction of this transmission platform; S ₄, repeating step S ₂-S ₃, until whole workpiece completion of processing; Wherein, step S ₁With step S ₂In the zone that processed on the moving direction of this transmission platform, be adjacent, step S ₂With step S ₃In the zone that processed also be adjacent on the moving direction of this transmission platform.

Another technical scheme of the present invention is: a kind of vacuum transmission process apparatus; Its characteristics are; It comprises an above-mentioned mode vacuum process equipment; This vacuum transmission process apparatus also comprises: at least two be connected in this vacuum process chamber one side advance that part chamber and at least two are connected in this vacuum process chamber opposite side go out the part chamber, respectively enter the part chamber and respectively to go out the part chamber corresponding one by one, and all can between atmospheric condition and vacuum state, switch; The quantity of said transmission platform is at least two; Each transmission platform is corresponding one by one to entering the part chamber and going out the part chamber with each; Each transmission platform all can along enter part chamber, this vacuum process chamber, go out part chamber, atmospheric environment, the circuit folk prescription that enters the part chamber is to moving, the plane of motion of each transmission platform has nothing in common with each other; At least one mechanical arm, be used for from atmospheric environment to the transmission platform that is arranged in part chamber into load workpiece and from the transmission platform that is positioned at the part chamber to the atmospheric environment discharging workpieces; Each transmission platform is used for after loading workpiece, shifting to out the part chamber from entering the part chamber through this vacuum process chamber continuously successively, makes each workpiece accept the processing of the machining medium of each processing unit (plant), after discharging workpieces, retracts into part chamber from going out the part chamber through atmospheric environment then.

Another technical scheme of the present invention is: a kind of vacuum transmission manufacturing method thereof that utilizes above-mentioned vacuum transmission process apparatus to realize; Its characteristics are; Each transmission platform is shifted to out the part chamber from entering the part chamber through this vacuum process chamber successively continuously after loading workpiece, make each workpiece accept the processing of the machining medium of each processing unit (plant); Except being in from entering the part chamber through the transmission platform the process in part chamber is shifted to out in this vacuum process chamber, all the other each transmission platforms: or be in from going out the part chamber and retract the process in part chamber into through atmospheric environment; Or be arranged in into part chamber, and this enters the part chamber and is in and is inflated to atmospheric condition, this mechanical arm and loads the wait state after workpiece, the process that is pumped to vacuum state or process finish from atmospheric environment to being arranged in this this transmission platform that enters the part chamber; Or be arranged in the part chamber, and this goes out the part chamber and is in and is inflated to atmospheric condition, this mechanical arm from being arranged in the wait state of this this transmission platform that goes out the part chamber after atmospheric environment discharging workpieces, the process that is pumped to vacuum state or process finish; Wherein, Shift to out the process in part chamber from entering the part chamber at each transmission platform; This control device makes the machining medium zone of action of each processing unit (plant) with this transmission platform separate relatively moving take place on the direction vertical with the moving direction of this transmission platform, so that the machining medium of each processing unit (plant) replaces processing to the zone corresponding to be processed of each workpiece in each Workpiece carrier zone.

Another technical scheme of the present invention is: a kind of vacuum transmission manufacturing method thereof that utilizes above-mentioned vacuum transmission process apparatus to realize; Its characteristics are; Each transmission platform is shifted to out the part chamber from entering the part chamber through this vacuum process chamber successively continuously after loading workpiece, make each workpiece accept the processing of the machining medium of each processing unit (plant); Except being in from entering the part chamber through the transmission platform the process in part chamber is shifted to out in this vacuum process chamber, all the other each transmission platforms: or be in from going out the part chamber and retract the process in part chamber into through atmospheric environment; Or be arranged in into part chamber, and this enters the part chamber and is in and is inflated to atmospheric condition, this mechanical arm and loads the wait state after workpiece, the process that is pumped to vacuum state or process finish from atmospheric environment to being arranged in this this transmission platform that enters the part chamber; Or be arranged in the part chamber, and this goes out the part chamber and is in and is inflated to atmospheric condition, this mechanical arm from being arranged in the wait state of this this transmission platform that goes out the part chamber after atmospheric environment discharging workpieces, the process that is pumped to vacuum state or process finish; Wherein, shift to out the process in part chamber from entering the part chamber at each transmission platform, each processing unit (plant) is carried out following steps: S ₁, this processing unit (plant) utilize machining medium in the Workpiece carrier zone along the direction vertical with the moving direction of this transmission platform one row workpiece zone corresponding to be processed process; S ₂, this control device makes the machining medium zone of action of this processing unit (plant) relatively move on the direction vertical with the moving direction of this transmission platform with this transmission platform, so that this processing unit (plant) utilizes machining medium that the zone corresponding to be processed along row's workpiece of the direction vertical with the moving direction of this transmission platform in another Workpiece carrier zone is processed; S ₃, this control device makes the machining medium zone of action of this processing unit (plant) relatively move on the direction vertical with the moving direction of this transmission platform with this transmission platform, so that this processing unit (plant) utilizes machining medium to step S ₁In this Workpiece carrier zone in along the direction vertical with the moving direction of this transmission platform one row workpiece zone corresponding to be processed process; S ₄, repeating step S ₂-S ₃, until whole workpiece completion of processing; Wherein, step S ₁With step S ₂In the zone that processed on the moving direction of this transmission platform, be adjacent, step S ₂With step S ₃In the zone that processed also be adjacent on the moving direction of this transmission platform.

Another technical scheme of the present invention is: a kind of vacuum transmission manufacturing method thereof that utilizes above-mentioned vacuum transmission process apparatus to realize; Its characteristics are; Each transmission platform is shifted to out the part chamber from entering the part chamber through this vacuum process chamber successively continuously after loading workpiece, make each workpiece accept the processing of the machining medium of each processing unit (plant); Except being in from entering the part chamber through the transmission platform the process in part chamber is shifted to out in this vacuum process chamber, all the other each transmission platforms: or be in from going out the part chamber and retract the process in part chamber into through atmospheric environment; Or be arranged in into part chamber, and this enters the part chamber and is in and is inflated to atmospheric condition, this mechanical arm and loads the wait state after workpiece, the process that is pumped to vacuum state or process finish from atmospheric environment to being arranged in this this transmission platform that enters the part chamber; Or be arranged in the part chamber, and this goes out the part chamber and is in and is inflated to atmospheric condition, this mechanical arm from being arranged in the wait state of this this transmission platform that goes out the part chamber after atmospheric environment discharging workpieces, the process that is pumped to vacuum state or process finish; Wherein, shift to out the process in part chamber from entering the part chamber at each transmission platform, each processing unit (plant) is carried out following steps: S ₁, this processing unit (plant) utilize machining medium in the Workpiece carrier zone along the direction vertical with the moving direction of this transmission platform two row workpiece zone corresponding to be processed process, this two row workpiece adjacent on the moving direction of this transmission platform; S ₂, this control device makes the machining medium zone of action of this processing unit (plant) relatively move on the direction vertical with the moving direction of this transmission platform with this transmission platform; So that this processing unit (plant) utilizes machining medium to processing along the zone corresponding to be processed that two of the direction vertical with the moving direction of this transmission platform arranged workpiece in another Workpiece carrier zone, this two rows workpiece is adjacent on the moving direction of this transmission platform; S ₃, this control device makes the machining medium zone of action of this processing unit (plant) relatively move on the direction vertical with the moving direction of this transmission platform with this transmission platform, so that this processing unit (plant) utilizes machining medium to step S ₁In this Workpiece carrier zone in along the direction vertical with the moving direction of this transmission platform two row workpiece zone corresponding to be processed process, this two row workpiece adjacent on the moving direction of this transmission platform; S ₄, repeating step S ₂-S ₃, until whole workpiece completion of processing; Wherein, step S ₁With step S ₂In the zone that processed on the moving direction of this transmission platform, be adjacent, step S ₂With step S ₃In the zone that processed also be adjacent on the moving direction of this transmission platform.

Positive progressive effect of the present invention is: this mode vacuum process equipment of the present invention not only can be processed wafer to continuous effective; And can be at wafer successively through behind the machining medium zone of action of two processing unit (plant)s; Just accomplish the n+ utmost point of chip back surface and the making processing procedure of the p+ utmost point once, therefore have high doping efficiency; When being directed against the workpiece of other kind, can in single equipment, realizing procedure for processing too, thereby realize high working (machining) efficiency a plurality of zones to be processed on the workpiece.In addition; This vacuum transmission process apparatus of the present invention not only can be processed each workpiece on the same transmission platform continuously; For the transmission platform of successive relay trip, when last workpiece on the last transmission platform was about to shift out the machining medium zone of action of each processing unit (plant), the unit one on one transmission platform of back also was about to the machining medium zone of action of the same processing unit (plant) of shift-in simultaneously; Therefore when transmission platform switches; Each workpiece on the transmission platform of successive relay trip can receive to continuous effective the processing of each machining medium equally, thus the continuous effective that guarantees the whole machining process process carry out, realize high production efficiency.

Description of drawings

Fig. 1 is the structural representation of a solar wafer.

Fig. 2 is the sketch map of first embodiment of this vacuum process method of the present invention.

Fig. 3 is the sketch map of second embodiment of this vacuum process method of the present invention.

Fig. 4 is the sketch map of the 3rd embodiment of this vacuum process method of the present invention.

Fig. 5 is the sketch map of the 4th embodiment of this vacuum process method of the present invention.

Fig. 6 is the end view of first embodiment of this vacuum transmission process apparatus of the present invention.

Fig. 7 is the end view of second embodiment of this vacuum transmission process apparatus of the present invention.

Fig. 8 is the principle schematic of the 3rd embodiment of this vacuum transmission process apparatus of the present invention.

Embodiment

Provide preferred embodiment of the present invention below in conjunction with accompanying drawing, to specify technical scheme of the present invention.

With reference to figure 2-8, mode vacuum process equipment of the present invention comprises a vacuum process chamber 1, at least one transmission platform 2, at least two processing unit (plant)s and control device.

Transmission platform 2 can carry workpiece and in this vacuum process chamber 1, move, and in moving process, passes through the machining medium zone of action of each processing unit (plant), thereby realizes the processing to workpiece.The workpiece here can be all kinds, for example solar wafer.Each workpiece has n zone to be processed; N is the natural number more than or equal to 2; Correspondingly, transmission platform 2 has n measure-alike Workpiece carrier zone (the for example zone of the Workpiece carrier among Fig. 2-5 A-C), and all extend along the moving direction of transmission platform 2 in those Workpiece carrier zones.

Each processing unit (plant) all is located in this vacuum process chamber 1; Each processing unit (plant) is corresponding one by one with each zone to be processed of workpiece; Be that each processing unit (plant) is exclusively used in and utilizes its machining medium that processing is implemented in the zone a certain corresponding to be processed of workpiece, so the quantity of processing unit (plant) also be that n is individual.The processing unit (plant) here can be for for example: utilize ion beam or plasma process workpiece device, workpiece is heat-treated or the device of annealing in process or the like; And those processing unit (plant)s were both can type different; More for example utilize the ion beam processing workpiece, and other carry out annealing in process to workpiece, perhaps those processing unit (plant)s also can be same type; For example all utilize the ion beam processing workpiece, but the ion beam character of each processing unit (plant) has nothing in common with each other.

In the present invention, transmission platform 2 is a hollow structure, and when not carrying workpiece on it, the machining medium of each processing unit (plant) all can pass this transmission platform, and when carrying workpiece on it, and then each machining medium will be stopped and workpiece is implemented processing by workpiece.

This control device is used to make the machining medium zone of action of each processing unit (plant) with transmission platform 2 separate relatively moving to take place on the direction vertical with the moving direction of transmission platform 2; Those relatively move and can realize through the whole bag of tricks, for example make transmission platform 2 that machinery takes place and move and/or utilize galvanomagnetic effect to regulate machining medium transmission direction of each processing unit (plant) or the like respectively.

Because transmission platform 2 is moving on the one hand; On the other hand; Controlled relatively moving takes place with transmission platform 2 again in the machining medium zone of action of each processing unit (plant) on the direction vertical with the moving direction of transmission platform 2; Therefore when workpiece rule arrangement on transmission platform 2; And when above-mentioned two kinds of mobile speed match each other, just can realize: observe along the moving direction of transmission platform 2, each processing unit (plant) all continuously or discontinuous zone corresponding to be processed to each workpiece process; And observe along the direction vertical with the moving direction of transmission platform 2, the zone that receives the processing of each processing unit (plant) then alternately is distributed in each Workpiece carrier zone.Below will be elaborated to this through four embodiment.

The embodiment 1 of mode vacuum process equipment

As shown in Figure 2, present embodiment is an example with the n+ utmost point of making the solar wafer back side through ion implantation doping and the situation of the p+ utmost point, and mode vacuum process equipment of the present invention and method are described.

In this embodiment, obvious n=2, that is: each chip back surface has two zones to be processed that respectively account for half, is respectively applied for and forms the n+ utmost point and the p+ utmost point, in Fig. 2, then fills with grid filling and oblique line respectively and distinguishes; Be provided with two processing unit (plant) 3a and 3b; This moment, these two processing unit (plant)s were ion implantation apparatus; But processing unit (plant) 3a is used for injecting n+ polarity ion to half zone of chip back surface; For example P+ or As+ ion, processing unit (plant) 3b then are used for injecting p+ polarity ion, for example B+ ion to half zone of chip back surface; Correspondingly; Transmission platform 2 is divided into two measure-alike Workpiece carrier zone A, B; This two Workpiece carriers zone is all along the moving direction of transmission platform 2 (be among Fig. 2 laterally) extension; In each Workpiece carrier zone, fitly arrange at least one row's wafer along the moving direction of transmission platform 2, transversely fitly arranging two row's wafers in each the Workpiece carrier zone among Fig. 2.

In this embodiment; Wafer on the transmission platform 2 need be arranged according to certain rules: 1) placement direction of each wafer is: make the symmetry axis of the n+ utmost point and the p+ utmost point along the direction vertical with the moving direction of transmission platform 2, promptly this symmetry axis in Fig. 2 vertically; 2) in same Workpiece carrier zone; All wafers align mutually; And when the moving direction of transmission platform 2 was observed, the zone different to be processed of every pair of adjacent chip was adjacent, the zone that promptly is used to form the n+ utmost point be used to form the regional adjacent of the p+ utmost point; That is to say, the n+ utmost point of the whole wafers in each Workpiece carrier zone and the p+ utmost point towards all being identical; 3) when the direction vertical with the moving direction of transmission platform 2 observed; The zone different to be processed of every pair of adjacent chip of adhering to Workpiece carrier zone A and Workpiece carrier area B separately is adjacent; That is to say, the n+ utmost point of the wafer in the different workpieces bearing area and the p+ utmost point towards just the opposite.

The operational factor of adjustment processing unit (plant) 3a and 3b is the size of its ion beam zone of action: on the moving direction of transmission platform 2, cover a territory, n+ polar region or territory, a p+ polar region just; On the direction vertical, be enough to cover whole work-piece bearing area A or B with the moving direction of transmission platform 2.Thus, processing unit (plant) 3a and 3b can process the zone corresponding to be processed of whole row's wafer of vertically arranging in Fig. 2 in the Workpiece carrier zone at every turn.

When this mode vacuum process equipment actual motion; Transmission platform 2 is carrying wafer laterally moving with a constant speed in Fig. 2; Meanwhile; Processing unit (plant) 3a and 3b then carry out following action (be that example describes with the action of processing unit (plant) 3a only, processing unit (plant) 3b changes into the oblique line fill area from the grid fill area except the processing object zone, and its manner of execution and processing unit (plant) 3a are identical) here:

S ₁, first row's wafer of in the Workpiece carrier area B, vertically arranging in Fig. 2 of processing unit (plant) 3a the region D that is used to form the n+ utmost point 1 inject n+ polarity ion;

S ₂, this control device makes the n+ polarity ionization zone of processing unit (plant) 3a with transmission platform 2 very fast relatively moving take place on the direction vertical with the moving direction of transmission platform 2; So that zone of action moment of n+ polarity ion switches to aiming area D2 from aiming area D1; Region D 2 is the zone that is used to form the n+ utmost point of first row's wafer of vertically arranging in Fig. 2 among the A of Workpiece carrier zone, and the ion accomplished region D 2 of processing unit (plant) 3a injects immediately;

S ₃, this control device makes the n+ polarity ionization zone of processing unit (plant) 3a with transmission platform 2 very fast relatively moving take place once more on the direction vertical with the moving direction of transmission platform 2; So that zone of action moment of n+ polarity ion switches to aiming area D3 from aiming area D2; Region D 3 is the zone that is used to form the n+ utmost point of second row's wafer of vertically arranging in Fig. 2 in the Workpiece carrier area B, and the ion accomplished region D 3 of processing unit (plant) 3a injects immediately;

S ₄, according to step S ₂-S ₃Mode, the workpiece among Fig. 2 is processed from right to left successively the whole workpiece completion of processing on this transmission platform, or the whole workpiece completion of processing on follow-up a plurality of transmission platforms.

Wherein, When the moving direction of transmission platform 2 was observed, each zone (for example region D 1, D2, D3) that receives the processing of processing unit (plant) 3a all was adjacent successively, this shows; Processing unit (plant) 3a is carrying out effectively processing continuously all the time to wafer, so working (machining) efficiency is high.

Suppose that transmission platform 2 passes through the zone of action of processing unit (plant) 3a earlier; Then just pass through the zone of action of processing unit (plant) 3b; Then wafer is after passing through processing unit (plant) 3a, and the n+ utmost point at its back side has just been made completion, and when wafer then passes through processing unit (plant) 3b again; Processing unit (plant) 3b also will process according to the zone that be used to form the p+ utmost point of above-mentioned manner of execution to chip back surface, thereby the p+ utmost point at its back side is also completed.Thus; This mode vacuum process equipment has just realized in a single equipment once two kinds of electrodes of chip back surface are completed; This is compared to existing complicated manufacture craft; The raising of its efficient is undoubtedly highly significant, and the rate of finished products of the solar wafer that makes also can improve thereupon.

Inject intensity and transmission platform 2 is carried out suitable setting along the speed that Fig. 2 laterally moves through ion beam, just be enough to guarantee under the situation that exists certain relative motion between the ion beam zone of action and the wafer, to produce the second best in quality n+ utmost point and the p+ utmost point at chip back surface to processing unit (plant) 3a and 3b; And through the operational factor of this control device being carried out suitable setting; Just can make between the ion beam zone of action and the transmission platform 2 each the generation along the speed that relatively moves longitudinally among Fig. 2 far above transmission platform 2 along the speed that laterally moves among Fig. 2; Thereby guarantee that ion beam after injection is accomplished in the zone to be processed of last row's wafer, just can switch to the run location that the zone to be processed of back one row's wafer is injected moment; To the suitable setting that above-mentioned ion beam injects intensity, various translational speeds, all more or less freely to those skilled in the art, do not give unnecessary details so do not do at this.

In addition, for solar wafer, because before the n+ utmost point and the p+ utmost point of making the back side, its structure is symmetrical fully, so does not have definite zone to be processed that is used to form the n+ utmost point and the zone to be processed that is used to form the p+ utmost point on its back side.For this reason; The actual course of processing as far as solar wafer is simpler and easy compared to above-mentioned universality scheme; As long as set the operational factor of transmission platform, processing unit (plant) and control device; And the wafer ground proper alignment of aliging each other get final product on transmission platform, and need not the strict placement direction of distinguishing them, accomplish process after the n+ utmost point and the position of the p+ utmost point of each chip back surface just can form distribution shown in Figure 2 naturally.But for other common workpiece; Before successively passing through the machining medium zone of action of each processing unit (plant); Just had each definite zone to be processed on each workpiece; The arrangement mode of wafer this moment on transmission platform then must carry out according to above-mentioned placement direction; Though therefore this embodiment is to be example with the solar wafer, but still the arrangement mode of workpiece on transmission platform 2 carried out detailed explanation, so that in the reference that provides enough detailed man-hour that adds that the mode vacuum process equipment in the present embodiment is used for other workpiece.

The embodiment 2 of mode vacuum process equipment

As shown in Figure 3, the mode vacuum process equipment of present embodiment only is with difference between the embodiment of mode vacuum process equipment 1: 1) arrangement mode of wafer on transmission platform 2 is different; 2) size of the machining medium zone of action of processing unit (plant) is different.

In the present embodiment, 1) in same Workpiece carrier zone, wafer aligns each other; And the moving direction along transmission platform 2 is observed; The zone identical to be processed of every pair of adjacent chip is adjacent, promptly is used to form the zone of the n+ utmost point and is used to form the regional adjacent of the p+ utmost point, that is to say; When the moving direction of transmission platform 2 is observed, the n+ utmost point of every pair of adjacent chip in each Workpiece carrier zone and the p+ utmost point towards all being opposite; 2) when the direction vertical with the moving direction of transmission platform 2 observed, the zone different to be processed of every pair of adjacent chip of adhering to Workpiece carrier zone A and Workpiece carrier area B separately is adjacent.

In the present embodiment, the size of the ion beam zone of action of processing unit (plant) 3a and 3b is: on the moving direction of transmission platform 2, cover two zone or two zones that are used to form the n+ utmost point that are used to form the p+ utmost point; On the direction vertical, cover Workpiece carrier zone A or B with the moving direction of transmission platform 2.

When this mode vacuum process equipment actual motion; Transmission platform 2 is carrying wafer laterally moving with a constant speed in Fig. 3; Meanwhile; Processing unit (plant) 3a and 3b then carry out following action (only the action with processing unit (plant) 3a is that example describes, and processing unit (plant) 3b changes into the oblique line fill area from the grid fill area except the processing object zone, and its manner of execution and processing unit (plant) 3a are identical):

S ₁, first and second row's wafer of in the Workpiece carrier area B, vertically arranging in Fig. 3 of processing unit (plant) 3a area E that is used to form the n+ utmost point 1 inject n+ polarity ion;

S ₂, this control device makes the n+ polarity ionization zone of processing unit (plant) 3a with transmission platform 2 very fast relatively moving take place on the direction vertical with the moving direction of transmission platform 2; So that zone of action moment of n+ polarity ion switches to aiming area E2 from aiming area E1; Area E 2 is the zone that is used to form the n+ utmost point of second and third row's wafer of vertically arranging in Fig. 3 among the A of Workpiece carrier zone, and the ion accomplished area E 2 of processing unit (plant) 3a injects immediately;

S ₃, this control device makes the n+ polarity ionization zone of processing unit (plant) 3a with transmission platform 2 very fast relatively moving take place once more on the direction vertical with the moving direction of transmission platform 2; So that zone of action moment of n+ polarity ion switches to aiming area E3 from aiming area E2; Area E 3 is the zone that is used to form the n+ utmost point of third and fourth row's wafer of vertically arranging in Fig. 3 in the Workpiece carrier area B, and the ion accomplished area E 3 of processing unit (plant) 3a injects immediately;

S ₄, according to step S ₂-S ₃Mode, the workpiece among Fig. 3 is processed from right to left successively the whole workpiece completion of processing on this transmission platform, or the whole workpiece completion of processing on follow-up a plurality of transmission platforms.

Wherein, When the moving direction of transmission platform 2 was observed, each zone (for example area E 1, E2, E3) that receives the processing of processing unit (plant) 3a all was adjacent successively, this shows; Processing unit (plant) 3a is carrying out effectively processing continuously all the time to wafer, so working (machining) efficiency is high.

With the embodiment 1 of mode vacuum process equipment similarly; Present embodiment is when being used for solar wafer; Same only the need gets final product whole wafers mutual alignment ground proper alignment on transmission platform; And need not to consider the placement direction of each workpiece, but being used for other common workpiece for the ease of this mode vacuum process equipment with present embodiment, present embodiment has still carried out detailed explanation to the arrangement mode of workpiece on transmission platform.

Present embodiment is compared to the embodiment 1 of mode vacuum process equipment, and owing to each processing unit (plant) can be processed the zone corresponding to be processed of two row's workpiece at every turn, so working (machining) efficiency will improve further.

The embodiment 3 of mode vacuum process equipment

More than two embodiment are directed against all is half the situation that the area that has two measure-alike zones to be processed and these two zones to be processed on the workpiece respectively accounts for workpiece size; To be example with Fig. 4 below, and have one area all to be elaborated in two zones to be processed and this two zones to be processed less than the half the situation of workpiece size less than the half the or area in these two zones to be processed of workpiece size to having on the workpiece.

As shown in Figure 4, this moment and the area in the corresponding zone to be processed of processing unit (plant) 3a (grid fill area) are half the less than workpiece size, with the area in the corresponding zone to be processed of processing unit (plant) 3b (oblique line fill area) then still be half of workpiece size; On the transmission platform 2 all the arrangement mode of workpiece then with the embodiment 2 of mode vacuum process equipment in the workpiece arrangement mode identical.

In the present embodiment, the machining medium zone of action of processing unit (plant) 3a is of a size of: on the moving direction of transmission platform 2, cover two grid fill areas; On the direction vertical, cover Workpiece carrier zone A or B with the moving direction of transmission platform 2; The machining medium zone of action of processing unit (plant) 3b is of a size of: on the moving direction of transmission platform 2, cover two oblique line fill areas; On the direction vertical, cover Workpiece carrier zone A or B with the moving direction of transmission platform 2.

When this mode vacuum process equipment actual motion; Transmission platform 2 is carrying workpiece laterally moving with a constant speed in Fig. 4; Meanwhile; Processing unit (plant) 3a then carries out following action (manner of execution of processing unit (plant) 3b is identical among the manner of execution of processing unit (plant) 3b and the embodiment of mode vacuum process equipment 2, does not give unnecessary details so do not do at this):

S ₁, processing unit (plant) 3a processes regional F1 corresponding to be processed of first and second row's workpiece of vertically arranging in Fig. 4 in the Workpiece carrier area B;

S ₂, this control device makes the machining medium zone of action of processing unit (plant) 3a with transmission platform 2 very fast relatively moving take place on the direction vertical with the moving direction of transmission platform 2; So that machining medium zone of action moment of processing unit (plant) 3a switches to aiming Workpiece carrier zone A from aiming Workpiece carrier area B; And process not producing mistake by the zone that processing unit (plant) 3a processes on the workpiece for fear of processing unit (plant) 3a; The machining medium zone of action of processing unit (plant) 3a and transmission platform 2 take place that this relatively moves before or after; Processing unit (plant) 3a can temporarily stop to generate machining medium or temporarily Workpiece carrier zone A and B shifted out in its machining medium zone of action; After this along with transmission platform 2 horizontal moving gradually in Fig. 4; When the machining medium zone of action of processing unit (plant) 3a can aiming area F2; Processing unit (plant) 3a just begins effective operation once more, accomplishes the processing to regional F2 immediately, and wherein regional F2 is the zone corresponding to be processed of second and third row's workpiece of vertically arranging in Fig. 4 among the A of Workpiece carrier zone;

S ₃, this control device makes the machining medium zone of action of processing unit (plant) 3a with transmission platform 2 very fast relatively moving take place on the direction vertical with the moving direction of transmission platform 2; So that machining medium zone of action moment of processing unit (plant) 3a switches to aiming Workpiece carrier area B from aiming Workpiece carrier zone A; And process not producing mistake by the zone that processing unit (plant) 3a processes on the workpiece for fear of processing unit (plant) 3a; The machining medium zone of action of processing unit (plant) 3a and transmission platform 2 take place that this relatively moves before or after; Processing unit (plant) 3a can temporarily stop to generate machining medium or temporarily Workpiece carrier zone A and B shifted out in its machining medium zone of action; After this along with transmission platform 2 horizontal moving gradually in Fig. 4; When the machining medium zone of action of processing unit (plant) 3a can aiming area F3; Processing unit (plant) 3a just begins effective operation once more, accomplishes the processing to regional F3 immediately, and wherein regional F3 is the zone corresponding to be processed of third and fourth row's workpiece of vertically arranging in Fig. 4 in the Workpiece carrier area B;

S ₄, according to step S ₂-S ₃Mode, the workpiece among Fig. 4 is processed from right to left successively the whole workpiece completion of processing on this transmission platform, or the whole workpiece completion of processing on follow-up a plurality of transmission platforms.

Wherein, When the moving direction of transmission platform 2 is observed; Each zone (for example regional F1, F2, F3) that receives the processing of processing unit (plant) 3a all is adjacently successively (promptly the zone that need not to carry out any processing can be arranged at interval therebetween; But be not mingled with and the corresponding zone to be processed of other processing unit (plant)), this shows that processing unit (plant) 3a intermittently stops to generate machining medium or Workpiece carrier zone A is shifted out and the B in its machining medium zone of action except needs; In remaining period, then all can effectively process, so working (machining) efficiency is higher to workpiece.

Below only to specifying with the area in the corresponding zone to be processed of processing unit (plant) 3a half the situation less than workpiece size; And when with the area in processing unit (plant) 3a and the corresponding zone to be processed of 3b all less than a half of workpiece size; Then their manner of execution is will be all identical with the manner of execution of processing unit (plant) 3a among the embodiment shown in Figure 4; Promptly when the zone passage non-corresponding to be processed of the workpiece that carries on the transmission platform 2; Suspend to generate machining medium or temporarily its machining medium is shifted out the Workpiece carrier zone, and when the zone passage corresponding to be processed of the workpiece of carrying on the transmission platform 2, then workpiece is effectively processed.

The embodiment 4 of mode vacuum process equipment

As shown in Figure 5, when having three measure-alike zones to be processed on the workpiece, still can adopt with three the similar modes of embodiment in front and in a single equipment, accomplish procedure for processing once whole work-piece.

In Fig. 5; Fill three zones to be processed on each workpiece of expression with grid filling, oblique line filling and round dot respectively; And on transmission platform 2, divide three Workpiece carrier zone A, B and C, and only need whole workpiece are arranged according to mode shown in Figure 5, just can guarantee equally: for each processing unit (plant); Moving direction along transmission platform 2 is observed; Each zone that receives the processing of this processing unit (plant) is adjacent successively, so each processing unit (plant) all can realize effectively continuously operation, thereby realizes high production efficiency.

Above embodiment is only to the situation that has two zones to be processed on the workpiece; The three kinds of feasible processing schemes of at large having given an example; And, a kind of feasible processing scheme generally has been described, but those skilled in the art are to be understood that to the situation that has three measure-alike zones to be processed on the workpiece; For above situation; Feasible processing scheme is not limited in mentioned above, for example to the situation that has two measure-alike zones to be processed on the workpiece, when the placement location of the whole workpiece among Workpiece carrier zone A and the B respectively with the embodiment 1 of mode vacuum process equipment in identical; But during the workpiece size that the placement location integral body of the whole workpiece among the A of Workpiece carrier zone and the placement location of the whole workpiece in the Workpiece carrier area B stagger half the, can guarantee the continuous effective operation of each processing unit (plant) equally.

In addition; When the quantity in the zone to be processed on the workpiece during more than or equal to three and each zone to be processed measure-alike or inequality; Those skilled in the art still should design feasible processing scheme according to thinking of the present invention with comparalive ease, do not give unnecessary details so do not do at this.

The embodiment 1 of vacuum transmission process apparatus

As shown in Figure 6, just used this mode vacuum process equipment that the present invention proposes in the vacuum of the present embodiment transmission process apparatus, and identical described in the operational mode of this mode vacuum process equipment and the preceding text.

Except this mode vacuum process equipment, this vacuum transmission process apparatus also comprises: one be connected in these vacuum process chamber 1 one sides advance that part chamber 4 and one is connected in this vacuum process chamber 1 opposite side go out part chamber 5.This advance part chamber 4 with this go out part chamber 5 can select for use volume compared to this vacuum process chamber 1 less vacuum box; They all have a sealed valve in a side that links to each other with this vacuum process chamber 1; And all have another sealed valve at opposite side away from this vacuum process chamber 1; This advances part chamber and this and goes out the part chamber and all can between atmospheric condition and vacuum state, switch apace; Thereby make workpiece between this vacuum process chamber 1 and atmospheric environment, to transmit fast, and the vacuum state in this vacuum process chamber 1 is not exerted an influence through their.

The quantity of above-mentioned transmission platform 2 is one in this vacuum transmission process apparatus, and this transmission platform 2 can enter part chamber 4, this vacuum process chamber 1, this direct route that goes out part chamber 5 along this and move back and forth.In different fabrication steps; This transmission platform 2 possibly be arranged in this and enter part chamber 4 maybe this goes out part chamber 5; Also possibly be in and enter part chamber 4 from this and shift to this process that goes out part chamber 5, also possibly be in to go out part chamber 5 from this and retract this process of entering part chamber 4 through this vacuum process chamber 1 through this vacuum process chamber 1.

This vacuum transmission process apparatus also comprises: at least one first mechanical arm 6 is used for loading workpiece from a workpiece to be processed laydown area of atmospheric environment to being arranged in this this transmission platform 2 that enters part chamber 4; And at least one second mechanical arm 7 is used for from being arranged in the finished work laydown area discharging workpieces of this this transmission platform 2 that goes out part chamber 5 to atmospheric environment.

In the actual motion of this vacuum transmission process apparatus, repeat following steps until whole workpiece completion of processing: this advances, and the part chamber is inflated to atmospheric condition, this this transmission platform that enters the part chamber loads workpiece to this first mechanical arm, this advances the part chamber pumping to vacuum state to being arranged in from atmospheric environment; This transmission platform enters the part chamber from this and shifts out; In this vacuum process chamber, make each workpiece accept the processing successively of the machining medium of each processing unit (plant) (realization of this procedure for processing referring to herein about the related content of mode vacuum process equipment and method), get into this then and go out the part chamber; This go out the part chamber be inflated to atmospheric condition, this second mechanical arm from be arranged in this this transmission platform that goes out the part chamber to the atmospheric environment discharging workpieces, this goes out the part chamber pumping to vacuum state; This transmission platform goes out the part chamber from this and retracts this through this vacuum process chamber and enter the part chamber.

Through this mode vacuum process equipment of the present invention being applied in this vacuum transmission process apparatus; Because this mode vacuum process equipment can be processed each workpiece to continuous effective; Thereby in a single equipment, accomplish the workpiece processing procedure once, so this vacuum transmission process apparatus also will have high production efficiency thereupon.

The embodiment 2 of vacuum transmission process apparatus

As shown in Figure 7, just used this mode vacuum process equipment that the present invention proposes in the vacuum of the present embodiment transmission process apparatus, and identical described in the operational mode of this mode vacuum process equipment and the preceding text.

Except this mode vacuum process equipment; This vacuum transmission process apparatus also comprises: at least two be connected in these vacuum process chamber 1 one sides enter the part chamber; And at least two be connected in this vacuum process chamber 1 opposite side go out the part chamber; The part chamber is respectively entered by advancing part chamber 4a-4d and going out part chamber 5a-5d among Fig. 7 for example and respectively to go out the part chamber corresponding one by one.Those advance among the embodiment 1 of part chamber and the structure that goes out the part chamber and vacuum transmission process apparatus enter the part chamber and go out the part chamber identical.

The quantity of above-mentioned transmission platform is at least two in this vacuum transmission process apparatus, for example the transmission platform 2a-2d among Fig. 7.Each transmission platform is corresponding one by one to entering the part chamber and going out the part chamber with each, and can along correspondingly enter part chamber, this vacuum process chamber 1, the corresponding direct route that goes out the part chamber moves back and forth.In different fabrication steps; One transmission platform possibly be arranged in and enter the part chamber accordingly or go out the part chamber accordingly; Also possibly be in and enter the part chamber from this and shift to this process that goes out the part chamber, also possibly be in to go out the part chamber from this and retract this process of entering the part chamber through this vacuum process chamber through this vacuum process chamber.

This vacuum transmission process apparatus also comprises: at least one first mechanical arm 6 that is positioned at the atmospheric side that respectively enters the part chamber, and the transmission platform in part chamber loads workpiece to be processed to being arranged in into to be used for workpiece to be processed laydown area from atmospheric environment; And at least one second mechanical arm 7 that is positioned at the atmospheric side that respectively goes out the part chamber, be used for unloading finished work to the finished work laydown area of atmospheric environment from the transmission platform that is arranged in the part chamber.

In this embodiment, especially, the plane of motion of each transmission platform has nothing in common with each other.Just the end view that transmits a kind of optional structure of process apparatus for this vacuum shown in Figure 7; Wherein adopted four pairs to enter the part chamber and go out the part chamber and four corresponding transmission platforms; Each is to entering the part chamber and going out that the part chamber is folded each other establishes; Highly difference promptly only is set, thereby the plane of motion of each transmission platform is also only highly different.

In the vacuum of present embodiment transmission manufacturing method thereof, especially, accomplished each transmission platform that workpiece loads and shifted to the action that goes out the part chamber accordingly and carry out continuously successively from entering the part chamber accordingly.So-calledly mean continuously successively: when one has been accomplished transmission platform (the for example transmission platform 2b among Fig. 7) that workpiece loads and begins carrying workpiece and shift to out the part chamber from entering the part chamber; Each workpiece on it will receive the processing successively (realization of this procedure for processing referring among this paper about the related content of mode vacuum process equipment and method) of the machining medium of each processing unit (plant); More a little later; Another transmission platform (the for example transmission platform 2c among Fig. 7) of having accomplished the workpiece loading equally also will carry workpiece and begin to shift to out the part chamber from entering the part chamber; But the plane of motion of this back transmission platform is different with the plane of motion of this previous transmission platform; And the mobile progress of this back transmission platform follows closely after the mobile progress of this previous transmission platform; Thereby when last workpiece on this previous transmission platform is about to shift out the machining medium zone of action of each processing unit (plant); The machining medium zone of action that unit one on this back transmission platform just is about to the same processing unit (plant) of shift-in begins to accept processing, so when transmission platform switches, still can guarantee effective procedure for processing of workpiece is carried out continuously.And successively shift to out the process in part chamber from entering the part chamber at the back transmission platform of this previous transmission platform and this, the state of remaining each transmission platform is: 1) be in from going out the part chamber and retract the process in part chamber into through this vacuum process chamber; Perhaps 2) be arranged in and enter part chamber (the for example transmission platform 2d of Fig. 7) accordingly, and this advance the part chamber be in be inflated to atmospheric condition, this first mechanical arm 6 loads the wait state after workpiece, the process that is pumped to vacuum state or process finish from atmospheric environment to being arranged in this this transmission platform that enters the part chamber; Perhaps 3) be arranged in and go out part chamber (the for example transmission platform 2a of Fig. 7) accordingly, and this goes out the part chamber and is in and is inflated to atmospheric condition, this second mechanical arm 7 from being arranged in the wait state of this this transmission platform that goes out the part chamber after atmospheric environment discharging workpieces, the process that is pumped to vacuum state or process finish.

In the vacuum transmission process apparatus of present embodiment; At first have benefited from each transmission platform and carrying the machining medium zone of action of workpiece successively continuously through each processing unit (plant); Each workpiece on the feasible not only same transmission platform can obtain the processing of continuous effective; Even and when transmission platform switched, each workpiece on former and later two transmission platforms of successive relay trip also can obtain the processing of continuous effective, thereby make this vacuum transmission process apparatus have high production efficiency; In addition; Because this mode vacuum process equipment that has also adopted the present invention to propose in this vacuum transmission process apparatus; Therefore in this vacuum process chamber 1, each processing unit (plant) all can be processed workpiece to continuous effective, and each workpiece is after passing through the machining medium zone of action of each processing unit (plant) successively; Just can accomplish the complete processing procedure to all zones to be processed on it once, this will make the production efficiency of this vacuum transmission process apparatus obtain further to improve.

The embodiment 3 of vacuum transmission process apparatus

As shown in Figure 8; Difference between the embodiment 2 of the vacuum transmission process apparatus of present embodiment and vacuum transmission process apparatus only is: in embodiment 2; Advance part chamber-vacuum process chamber 1-and go out part chamber formation direct route, transmission platform moves back and forth along this direct route; And in this embodiment, as shown in Figure 8, advance the part chamber-＞vacuum process chamber 1-＞go out part chamber-＞atmospheric environment-＞enter the part chamber to form circuit, transmission platform in Fig. 8 the direction shown in the arrow along this circuit folk prescription to moving; In addition; Because this moment loads to the workpiece that respectively enters the part chamber and go out the part chamber and workpiece unloading action all can be carried out in the same zone in atmospheric environment; Therefore correspondingly; Need not to be provided with again two mechanical arms in the present embodiment; Get final product but at least one mechanical arm 8 only need be set, this mechanical arm 8 both had been responsible for workpiece to be processed laydown area from atmospheric environment, and the transmission platform in part chamber loads workpiece to being arranged in into, also is responsible for from the transmission platform that is arranged in the part chamber finished work laydown area discharging workpieces to atmospheric environment.So, compared to embodiment 2, this vacuum transmission process apparatus structure in the present embodiment is compact more, and the running step is also compact more, therefore can save space and cost further, improves working (machining) efficiency.

When actual motion; Difference between the embodiment 2 of vacuum in present embodiment transmission manufacturing method thereof and vacuum transmission process apparatus only is: the mobile route of each transmission platform is by becoming folk prescription along circuit along moving back and forth of direct route to mobile; Each transmission platform is when going out the part chamber and retract into the part chamber especially; To no longer pass through this vacuum process chamber 1, but change into through atmospheric environment; The action of whole workpiece loading and unloadings will be carried out by mechanical arm 8 fully.

In sum, this mode vacuum process equipment of the present invention not only can be processed wafer to continuous effective, and can accomplish the n+ utmost point of chip back surface and the making processing procedure of the p+ utmost point once, therefore has high doping efficiency; When being directed against the workpiece of other kind, can in single equipment, realizing procedure for processing too, thereby realize high working (machining) efficiency a plurality of zones to be processed on the workpiece.In addition; This vacuum transmission process apparatus of the present invention not only can be processed each workpiece on the same transmission platform continuously; When transmission platform switches; Each workpiece on the transmission platform of successive relay trip can receive to continuous effective the processing of each machining medium equally, thus the continuous effective that guarantees the whole machining process process carry out, realize high production efficiency.

Though more than described embodiment of the present invention, it will be understood by those of skill in the art that these only illustrate, protection scope of the present invention is limited appended claims.Those skilled in the art can make numerous variations or modification to these execution modes under the prerequisite that does not deviate from principle of the present invention and essence, but these changes and modification all fall into protection scope of the present invention.

Claims

1. mode vacuum process equipment, it comprises a vacuum process chamber, it is characterized in that, this mode vacuum process equipment also comprises:

At least one transmission platform that can in this vacuum process chamber, move; It is measure-alike and along the Workpiece carrier zone that is used to carry workpiece that the moving direction of said transmission platform extends that said transmission platform has n; N is the natural number more than or equal to 2, and each workpiece has n zone to be processed;

N is located at the processing unit (plant) in this vacuum process chamber, and the machining medium of each processing unit (plant) is used for correspondingly each zone to be processed of workpiece is processed, and the machining medium of each processing unit (plant) can pass said transmission platform but can't pass workpiece;

One control device is used to make the machining medium zone of action of each processing unit (plant) with said transmission platform separate relatively moving to take place on the direction vertical with the moving direction of said transmission platform;

Moving and the machining medium zone of action of each processing unit (plant) and relatively moving of said transmission platform of said transmission platform makes the machining medium of each processing unit (plant) process the zone corresponding to be processed of each workpiece in each Workpiece carrier zone.

2. mode vacuum process equipment as claimed in claim 1 is characterized in that, those processing unit (plant) types are different, and perhaps, those processing unit (plant) types are identical but machining medium different.

3. according to claim 1 or claim 2 mode vacuum process equipment is characterized in that n=2, each workpiece have two zones to be processed, and is placed as edge, the line of demarcation direction vertical with the moving direction of said transmission platform in these two zones to be processed; In same Workpiece carrier zone, workpiece aligns each other, and along the moving direction of said transmission platform, the zone different to be processed of adjacent workpieces is adjacent; Along the direction vertical with the moving direction of said transmission platform, the zone different to be processed of the adjacent workpieces of different workpieces bearing area is adjacent; The size of the machining medium zone of action of two processing unit (plant)s is: on the moving direction of said transmission platform, cover the zone corresponding to be processed of a workpiece, on the direction vertical with the moving direction of said transmission platform, cover a Workpiece carrier zone; The machining medium of each processing unit (plant) replaces processing to the zone corresponding to be processed of each workpiece in two Workpiece carrier zones.

4. according to claim 1 or claim 2 mode vacuum process equipment is characterized in that n=2, each workpiece have two zones to be processed, and is placed as edge, the line of demarcation direction vertical with the moving direction of said transmission platform in these two zones to be processed; In same Workpiece carrier zone, workpiece aligns each other, and along the moving direction of said transmission platform, the zone identical to be processed of adjacent workpieces is adjacent; Along the direction vertical with the moving direction of said transmission platform, the zone different to be processed of the adjacent workpieces of different workpieces bearing area is adjacent; The size of the machining medium zone of action of two processing unit (plant)s is: on the moving direction of said transmission platform, cover the zone corresponding to be processed of two workpiece, on the direction vertical with the moving direction of said transmission platform, cover a Workpiece carrier zone; The machining medium of each processing unit (plant) replaces processing to the zone corresponding to be processed of each workpiece in two Workpiece carrier zones.

5. vacuum process method that the mode vacuum process equipment of utilizing claim 1 realizes; It is characterized in that; Said transmission platform is carrying workpiece and in this vacuum process chamber, is moving; Simultaneously; This control device makes the machining medium zone of action of each processing unit (plant) with said transmission platform separate relatively moving take place on the direction vertical with the moving direction of said transmission platform, so that the machining medium of each processing unit (plant) replaces processing to the zone corresponding to be processed of each workpiece in each Workpiece carrier zone.

6. a vacuum process method of utilizing the mode vacuum process equipment realization of claim 3 is characterized in that said transmission platform is carrying workpiece and in this vacuum process chamber, moving, and simultaneously, each processing unit (plant) is carried out following steps:

S ₁, this processing unit (plant) utilize machining medium in the Workpiece carrier zone along the direction vertical with the moving direction of said transmission platform one row workpiece zone corresponding to be processed process;

S ₂, this control device makes the machining medium zone of action of this processing unit (plant) relatively move on the direction vertical with the moving direction of said transmission platform with said transmission platform, so that this processing unit (plant) utilizes machining medium that the zone corresponding to be processed along row's workpiece of the direction vertical with the moving direction of said transmission platform in another Workpiece carrier zone is processed;

S ₃, this control device makes the machining medium zone of action of this processing unit (plant) relatively move on the direction vertical with the moving direction of said transmission platform with said transmission platform, so that this processing unit (plant) utilizes machining medium to step S ₁In this Workpiece carrier zone in along the direction vertical with the moving direction of said transmission platform one row workpiece zone corresponding to be processed process;

S ₄, repeating step S ₂-S ₃, until whole workpiece completion of processing;

Wherein, step S ₁With step S ₂In the zone that processed on the moving direction of said transmission platform, be adjacent, step S ₂With step S ₃In the zone that processed also be adjacent on the moving direction of said transmission platform.

7. vacuum process method as claimed in claim 6 is characterized in that, to the half the processing unit (plant) of corresponding zone to be processed less than workpiece size, at step S ₂With step S ₃In; The machining medium zone of action of this processing unit (plant) and said transmission platform relatively move before or after and at this processing unit (plant) workpiece is carried out first being processed, this processing unit (plant) stops to generate machining medium or the Workpiece carrier zone is shifted out in the machining medium zone of action.

8. a vacuum process method of utilizing the mode vacuum process equipment realization of claim 4 is characterized in that said transmission platform is carrying workpiece and in this vacuum process chamber, moving, and simultaneously, each processing unit (plant) is carried out following steps:

S ₁, this processing unit (plant) utilize machining medium in the Workpiece carrier zone along the direction vertical with the moving direction of said transmission platform two row workpiece zone corresponding to be processed process, this two row workpiece adjacent on the moving direction of said transmission platform;

S ₂, this control device makes the machining medium zone of action of this processing unit (plant) relatively move on the direction vertical with the moving direction of said transmission platform with said transmission platform; So that this processing unit (plant) utilizes machining medium to processing along the zone corresponding to be processed that two of the direction vertical with the moving direction of said transmission platform arranged workpiece in another Workpiece carrier zone, this two rows workpiece is adjacent on the moving direction of said transmission platform;

S ₃, this control device makes the machining medium zone of action of this processing unit (plant) relatively move on the direction vertical with the moving direction of said transmission platform with said transmission platform, so that this processing unit (plant) utilizes machining medium to step S ₁In this Workpiece carrier zone in along the direction vertical with the moving direction of said transmission platform two row workpiece zone corresponding to be processed process, this two row workpiece adjacent on the moving direction of said transmission platform;

9. vacuum process method as claimed in claim 8 is characterized in that, to the half the processing unit (plant) of corresponding zone to be processed less than workpiece size, at step S ₂With step S ₃In; The machining medium zone of action of this processing unit (plant) and said transmission platform relatively move before or after and at this processing unit (plant) workpiece is carried out first being processed, this processing unit (plant) stops to generate machining medium or the Workpiece carrier zone is shifted out in the machining medium zone of action.

10. a vacuum transmission process apparatus is characterized in that it comprises the described mode vacuum process equipment of a claim 1, and this vacuum transmission process apparatus also comprises:

One be connected in this vacuum process chamber one side advance that part chamber and one is connected in this vacuum process chamber opposite side go out the part chamber, this advances part chamber and this and goes out the part chamber and all can between atmospheric condition and vacuum state, switch;

The quantity of said transmission platform is one, and this transmission platform can enter part chamber, this vacuum process chamber, this direct route that goes out the part chamber along this and move back and forth;

At least one first mechanical arm is used for loading workpiece from atmospheric environment to being positioned at this said transmission platform that enters the part chamber;

At least one second mechanical arm is used for from being positioned at this said transmission platform that goes out the part chamber to the atmospheric environment discharging workpieces;

This transmission platform is used for after loading workpiece entering the part chamber from this to be shifted to this and goes out the part chamber, makes each workpiece accept the processing of the machining medium of each processing unit (plant), after discharging workpieces, goes out the part chamber from this then and retracts this and enter the part chamber.

11. vacuum transmission process apparatus as claimed in claim 10 is characterized in that those processing unit (plant) types are different, perhaps, those processing unit (plant) types are identical but machining medium different.

12., it is characterized in that n=2, each workpiece have two zones to be processed, and be placed as edge, the line of demarcation direction vertical in these two zones to be processed with the moving direction of this transmission platform like claim 10 or 11 described vacuum transmission process apparatus; In same Workpiece carrier zone, workpiece aligns each other, and along the moving direction of this transmission platform, the zone different to be processed of adjacent workpieces is adjacent; Along the direction vertical with the moving direction of this transmission platform, the zone different to be processed of the adjacent workpieces of different workpieces bearing area is adjacent; The size of the machining medium zone of action of two processing unit (plant)s is: on the moving direction of this transmission platform, cover the zone corresponding to be processed of a workpiece, on the direction vertical with the moving direction of this transmission platform, cover a Workpiece carrier zone; The machining medium of each processing unit (plant) replaces processing to the zone corresponding to be processed of each workpiece in two Workpiece carrier zones.

13., it is characterized in that n=2, each workpiece have two zones to be processed, and be placed as edge, the line of demarcation direction vertical in these two zones to be processed with the moving direction of this transmission platform like claim 10 or 11 described vacuum transmission process apparatus; In same Workpiece carrier zone, workpiece aligns each other, and along the moving direction of this transmission platform, the zone identical to be processed of adjacent workpieces is adjacent; Along the direction vertical with the moving direction of this transmission platform, the zone different to be processed of the adjacent workpieces of different workpieces bearing area is adjacent; The size of the machining medium zone of action of two processing unit (plant)s is: on the moving direction of this transmission platform, cover the zone corresponding to be processed of two workpiece, on the direction vertical with the moving direction of this transmission platform, cover a Workpiece carrier zone; The machining medium of each processing unit (plant) replaces processing to the zone corresponding to be processed of each workpiece in two Workpiece carrier zones.

14. vacuum transmission manufacturing method thereof that utilizes the described vacuum transmission of claim 10 process apparatus to realize; It is characterized in that repeat following steps until whole workpiece completion of processing: this advances, and the part chamber is inflated to atmospheric condition, this this transmission platform that enters the part chamber loads workpiece to this first mechanical arm, this advances the part chamber pumping to vacuum state to being arranged in from atmospheric environment; This transmission platform enters the part chamber from this to be shifted to this and goes out the part chamber, makes each workpiece accept the processing of the machining medium of each processing unit (plant); This go out the part chamber be inflated to atmospheric condition, this second mechanical arm from be arranged in this this transmission platform that goes out the part chamber to the atmospheric environment discharging workpieces, this goes out the part chamber pumping to vacuum state; This transmission platform goes out the part chamber from this and retracts this and enter the part chamber;

Wherein, Entering the part chamber from this at this transmission platform shifts to this process that goes out the part chamber; This control device makes the machining medium zone of action of each processing unit (plant) with this transmission platform separate relatively moving take place on the direction vertical with the moving direction of this transmission platform, so that the machining medium of each processing unit (plant) replaces processing to the zone corresponding to be processed of each workpiece in each Workpiece carrier zone.

15. vacuum transmission manufacturing method thereof that utilizes the described vacuum transmission of claim 12 process apparatus to realize; It is characterized in that repeat following steps until whole workpiece completion of processing: this advances, and the part chamber is inflated to atmospheric condition, this this transmission platform that enters the part chamber loads workpiece to this first mechanical arm, this advances the part chamber pumping to vacuum state to being arranged in from atmospheric environment; This transmission platform enters the part chamber from this to be shifted to this and goes out the part chamber, makes each workpiece accept the processing of the machining medium of each processing unit (plant); This go out the part chamber be inflated to atmospheric condition, this second mechanical arm from be arranged in this this transmission platform that goes out the part chamber to the atmospheric environment discharging workpieces, this goes out the part chamber pumping to vacuum state; This transmission platform goes out the part chamber from this and retracts this and enter the part chamber;

Wherein, enter the part chamber from this at this transmission platform and shift to this process that goes out the part chamber, each processing unit (plant) is carried out following steps:

S ₁, this processing unit (plant) utilize machining medium in the Workpiece carrier zone along the direction vertical with the moving direction of this transmission platform one row workpiece zone corresponding to be processed process;

S ₂, this control device makes the machining medium zone of action of this processing unit (plant) relatively move on the direction vertical with the moving direction of this transmission platform with this transmission platform, so that this processing unit (plant) utilizes machining medium that the zone corresponding to be processed along row's workpiece of the direction vertical with the moving direction of this transmission platform in another Workpiece carrier zone is processed;

S ₃, this control device makes the machining medium zone of action of this processing unit (plant) relatively move on the direction vertical with the moving direction of this transmission platform with this transmission platform, so that this processing unit (plant) utilizes machining medium to step S ₁In this Workpiece carrier zone in along the direction vertical with the moving direction of this transmission platform one row workpiece zone corresponding to be processed process;

Wherein, step S ₁With step S ₂In the zone that processed on the moving direction of this transmission platform, be adjacent, step S ₂With step S ₃In the zone that processed also be adjacent on the moving direction of this transmission platform.

16. vacuum transmission manufacturing method thereof as claimed in claim 15 is characterized in that, to the half the processing unit (plant) of corresponding zone to be processed less than workpiece size, at step S ₂With step S ₃In; The machining medium zone of action of this processing unit (plant) and said transmission platform relatively move before or after and at this processing unit (plant) workpiece is carried out first being processed, this processing unit (plant) stops to generate machining medium or the Workpiece carrier zone is shifted out in the machining medium zone of action.

17. vacuum transmission manufacturing method thereof that utilizes the described vacuum transmission of claim 13 process apparatus to realize; It is characterized in that repeat following steps until whole workpiece completion of processing: this advances, and the part chamber is inflated to atmospheric condition, this this transmission platform that enters the part chamber loads workpiece to this first mechanical arm, this advances the part chamber pumping to vacuum state to being arranged in from atmospheric environment; This transmission platform enters the part chamber from this to be shifted to this and goes out the part chamber, makes each workpiece accept the processing of the machining medium of each processing unit (plant); This go out the part chamber be inflated to atmospheric condition, this second mechanical arm from be arranged in this this transmission platform that goes out the part chamber to the atmospheric environment discharging workpieces, this goes out the part chamber pumping to vacuum state; This transmission platform goes out the part chamber from this and retracts this and enter the part chamber;

S ₁, this processing unit (plant) utilize machining medium in the Workpiece carrier zone along the direction vertical with the moving direction of this transmission platform two row workpiece zone corresponding to be processed process, this two row workpiece adjacent on the moving direction of this transmission platform;

S ₂, this control device makes the machining medium zone of action of this processing unit (plant) relatively move on the direction vertical with the moving direction of this transmission platform with this transmission platform; So that this processing unit (plant) utilizes machining medium to processing along the zone corresponding to be processed that two of the direction vertical with the moving direction of this transmission platform arranged workpiece in another Workpiece carrier zone, this two rows workpiece is adjacent on the moving direction of this transmission platform;

S ₃, this control device makes the machining medium zone of action of this processing unit (plant) relatively move on the direction vertical with the moving direction of this transmission platform with this transmission platform, so that this processing unit (plant) utilizes machining medium to step S ₁In this Workpiece carrier zone in along the direction vertical with the moving direction of this transmission platform two row workpiece zone corresponding to be processed process, this two row workpiece adjacent on the moving direction of this transmission platform;

18. vacuum transmission manufacturing method thereof as claimed in claim 17 is characterized in that, to the half the processing unit (plant) of corresponding zone to be processed less than workpiece size, at step S ₂With step S ₃In; The machining medium zone of action of this processing unit (plant) and said transmission platform relatively move before or after and at this processing unit (plant) workpiece is carried out first being processed, this processing unit (plant) stops to generate machining medium or the Workpiece carrier zone is shifted out in the machining medium zone of action.

19. a vacuum transmission process apparatus is characterized in that it comprises the described mode vacuum process equipment of a claim 1, this vacuum transmission process apparatus also comprises:

At least two be connected in this vacuum process chamber one side advance that part chamber and at least two are connected in this vacuum process chamber opposite side go out the part chamber, respectively enter the part chamber and respectively to go out the part chamber corresponding one by one, and all can between atmospheric condition and vacuum state, switch;

The quantity of said transmission platform is at least two; Each transmission platform is corresponding one by one to entering the part chamber and going out the part chamber with each; Each transmission platform all can move back and forth along the direct route that enters part chamber, this vacuum process chamber, goes out the part chamber, and the plane of motion of each transmission platform has nothing in common with each other;

At least one first mechanical arm is used for from atmospheric environment to being positioned at the into transmission platform loading workpiece in part chamber;

At least one second mechanical arm is used for from the transmission platform that is positioned at the part chamber to the atmospheric environment discharging workpieces;

Each transmission platform is used for after loading workpiece, shifting to out the part chamber from entering the part chamber through this vacuum process chamber continuously successively, makes each workpiece accept the processing of the machining medium of each processing unit (plant), after discharging workpieces, retracts into part chamber from going out the part chamber through this vacuum process chamber then.

20. vacuum transmission process apparatus as claimed in claim 19 is characterized in that, each highly difference that is provided with to entering the part chamber and going out the part chamber, and the height of the plane of motion of each transmission platform is different.

21. vacuum transmission process apparatus as claimed in claim 20 is characterized in that those processing unit (plant) types are different, perhaps, those processing unit (plant) types are identical but machining medium different.

22. like any described vacuum transmission process apparatus among the claim 19-21; It is characterized in that; N=2, each workpiece have two zones to be processed, and are placed as edge, the line of demarcation direction vertical with the moving direction of each transmission platform in these two zones to be processed; In same Workpiece carrier zone, workpiece aligns each other, and along the moving direction of each transmission platform, the zone different to be processed of adjacent workpieces is adjacent; Along the direction vertical with the moving direction of each transmission platform, the zone different to be processed of the adjacent workpieces of different workpieces bearing area is adjacent; The size of the machining medium zone of action of two processing unit (plant)s is: on the moving direction of each transmission platform, cover the zone corresponding to be processed of a workpiece, on the direction vertical with the moving direction of each transmission platform, cover a Workpiece carrier zone; The machining medium of each processing unit (plant) replaces processing to the zone corresponding to be processed of each workpiece in two Workpiece carrier zones.

23. like any described vacuum transmission process apparatus among the claim 19-21; It is characterized in that; N=2, each workpiece have two zones to be processed, and are placed as edge, the line of demarcation direction vertical with the moving direction of each transmission platform in these two zones to be processed; In same Workpiece carrier zone, workpiece aligns each other, and along the moving direction of each transmission platform, the zone identical to be processed of adjacent workpieces is adjacent; Along the direction vertical with the moving direction of each transmission platform, the zone different to be processed of the adjacent workpieces of different workpieces bearing area is adjacent; The size of the machining medium zone of action of two processing unit (plant)s is: on the moving direction of each transmission platform, cover the zone corresponding to be processed of two workpiece, on the direction vertical with the moving direction of each transmission platform, cover a Workpiece carrier zone; The machining medium of each processing unit (plant) replaces processing to the zone corresponding to be processed of each workpiece in two Workpiece carrier zones.

24. vacuum transmission manufacturing method thereof that utilizes the described vacuum transmission of claim 19 process apparatus to realize; It is characterized in that; Each transmission platform is shifted to out the part chamber from entering the part chamber through this vacuum process chamber successively continuously after loading workpiece, make each workpiece accept the processing of the machining medium of each processing unit (plant); Except being in from entering the part chamber through the transmission platform the process in part chamber is shifted to out in this vacuum process chamber, all the other each transmission platforms: or be in from going out the part chamber and retract the process in part chamber into through this vacuum process chamber; Or be arranged in into part chamber, and this enters the part chamber and is in and is inflated to atmospheric condition, this first mechanical arm and loads the wait state after workpiece, the process that is pumped to vacuum state or process finish from atmospheric environment to being arranged in this this transmission platform that enters the part chamber; Or be arranged in the part chamber, and this goes out the part chamber and is in and is inflated to atmospheric condition, this second mechanical arm from being arranged in the wait state of this this transmission platform that goes out the part chamber after atmospheric environment discharging workpieces, the process that is pumped to vacuum state or process finish;

Wherein, Shift to out the process in part chamber from entering the part chamber at each transmission platform; This control device makes the machining medium zone of action of each processing unit (plant) with this transmission platform separate relatively moving take place on the direction vertical with the moving direction of this transmission platform, so that the machining medium of each processing unit (plant) replaces processing to the zone corresponding to be processed of each workpiece in each Workpiece carrier zone.

25. vacuum transmission manufacturing method thereof that utilizes the described vacuum transmission of claim 22 process apparatus to realize; It is characterized in that; Each transmission platform is shifted to out the part chamber from entering the part chamber through this vacuum process chamber successively continuously after loading workpiece, make each workpiece accept the processing of the machining medium of each processing unit (plant); Except being in from entering the part chamber through the transmission platform the process in part chamber is shifted to out in this vacuum process chamber, all the other each transmission platforms: or be in from going out the part chamber and retract the process in part chamber into through this vacuum process chamber; Or be arranged in into part chamber, and this enters the part chamber and is in and is inflated to atmospheric condition, this first mechanical arm and loads the wait state after workpiece, the process that is pumped to vacuum state or process finish from atmospheric environment to being arranged in this this transmission platform that enters the part chamber; Or be arranged in the part chamber, and this goes out the part chamber and is in and is inflated to atmospheric condition, this second mechanical arm from being arranged in the wait state of this this transmission platform that goes out the part chamber after atmospheric environment discharging workpieces, the process that is pumped to vacuum state or process finish;

Wherein, shift to out the process in part chamber from entering the part chamber at each transmission platform, each processing unit (plant) is carried out following steps:

26. vacuum transmission manufacturing method thereof as claimed in claim 25 is characterized in that, to the half the processing unit (plant) of corresponding zone to be processed less than workpiece size, at step S ₂With step S ₃In; The machining medium zone of action of this processing unit (plant) and said transmission platform relatively move before or after and at this processing unit (plant) workpiece is carried out first being processed, this processing unit (plant) stops to generate machining medium or the Workpiece carrier zone is shifted out in the machining medium zone of action.

27. vacuum transmission manufacturing method thereof that utilizes the described vacuum transmission of claim 23 process apparatus to realize; It is characterized in that; Each transmission platform is shifted to out the part chamber from entering the part chamber through this vacuum process chamber successively continuously after loading workpiece, make each workpiece accept the processing of the machining medium of each processing unit (plant); Except being in from entering the part chamber through the transmission platform the process in part chamber is shifted to out in this vacuum process chamber, all the other each transmission platforms: or be in from going out the part chamber and retract the process in part chamber into through this vacuum process chamber; Or be arranged in into part chamber, and this enters the part chamber and is in and is inflated to atmospheric condition, this first mechanical arm and loads the wait state after workpiece, the process that is pumped to vacuum state or process finish from atmospheric environment to being arranged in this this transmission platform that enters the part chamber; Or be arranged in the part chamber, and this goes out the part chamber and is in and is inflated to atmospheric condition, this second mechanical arm from being arranged in the wait state of this this transmission platform that goes out the part chamber after atmospheric environment discharging workpieces, the process that is pumped to vacuum state or process finish;

28. vacuum transmission manufacturing method thereof as claimed in claim 27 is characterized in that, to the half the processing unit (plant) of corresponding zone to be processed less than workpiece size, at step S ₂With step S ₃In; The machining medium zone of action of this processing unit (plant) and said transmission platform relatively move before or after and at this processing unit (plant) workpiece is carried out first being processed, this processing unit (plant) stops to generate machining medium or the Workpiece carrier zone is shifted out in the machining medium zone of action.

29. a vacuum transmission process apparatus is characterized in that it comprises the described mode vacuum process equipment of a claim 1, this vacuum transmission process apparatus also comprises:

The quantity of said transmission platform is at least two; Each transmission platform is corresponding one by one to entering the part chamber and going out the part chamber with each; Each transmission platform all can along enter part chamber, this vacuum process chamber, go out part chamber, atmospheric environment, the circuit folk prescription that enters the part chamber is to moving, the plane of motion of each transmission platform has nothing in common with each other;

At least one mechanical arm, be used for from atmospheric environment to the transmission platform that is arranged in part chamber into load workpiece and from the transmission platform that is positioned at the part chamber to the atmospheric environment discharging workpieces;

Each transmission platform is used for after loading workpiece, shifting to out the part chamber from entering the part chamber through this vacuum process chamber continuously successively, makes each workpiece accept the processing of the machining medium of each processing unit (plant), after discharging workpieces, retracts into part chamber from going out the part chamber through atmospheric environment then.

30. vacuum transmission process apparatus as claimed in claim 29 is characterized in that, each highly difference that is provided with to entering the part chamber and going out the part chamber, and the height of the plane of motion of each transmission platform is different.

31. vacuum transmission process apparatus as claimed in claim 30 is characterized in that those processing unit (plant) types are different, perhaps, those processing unit (plant) types are identical but machining medium different.

32. like any described vacuum transmission process apparatus among the claim 29-31; It is characterized in that; N=2, each workpiece have two zones to be processed, and are placed as edge, the line of demarcation direction vertical with the moving direction of each transmission platform in these two zones to be processed; In same Workpiece carrier zone, workpiece aligns each other, and along the moving direction of each transmission platform, the zone different to be processed of adjacent workpieces is adjacent; Along the direction vertical with the moving direction of each transmission platform, the zone different to be processed of the adjacent workpieces of different workpieces bearing area is adjacent; The size of the machining medium zone of action of two processing unit (plant)s is: on the moving direction of each transmission platform, cover the zone corresponding to be processed of a workpiece, on the direction vertical with the moving direction of each transmission platform, cover a Workpiece carrier zone; The machining medium of each processing unit (plant) replaces processing to the zone corresponding to be processed of each workpiece in two Workpiece carrier zones.

33. like any described vacuum transmission process apparatus among the claim 29-31; It is characterized in that; N=2, each workpiece have two zones to be processed, and are placed as edge, the line of demarcation direction vertical with the moving direction of each transmission platform in these two zones to be processed; In same Workpiece carrier zone, workpiece aligns each other, and along the moving direction of each transmission platform, the zone identical to be processed of adjacent workpieces is adjacent; Along the direction vertical with the moving direction of each transmission platform, the zone different to be processed of the adjacent workpieces of different workpieces bearing area is adjacent; The size of the machining medium zone of action of two processing unit (plant)s is: on the moving direction of each transmission platform, cover the zone corresponding to be processed of two workpiece, on the direction vertical with the moving direction of each transmission platform, cover a Workpiece carrier zone; The machining medium of each processing unit (plant) replaces processing to the zone corresponding to be processed of each workpiece in two Workpiece carrier zones.

34. vacuum transmission manufacturing method thereof that utilizes the described vacuum transmission of claim 29 process apparatus to realize; It is characterized in that; Each transmission platform is shifted to out the part chamber from entering the part chamber through this vacuum process chamber successively continuously after loading workpiece, make each workpiece accept the processing of the machining medium of each processing unit (plant); Except being in from entering the part chamber through the transmission platform the process in part chamber is shifted to out in this vacuum process chamber, all the other each transmission platforms: or be in from going out the part chamber and retract the process in part chamber into through atmospheric environment; Or be arranged in into part chamber, and this enters the part chamber and is in and is inflated to atmospheric condition, this mechanical arm and loads the wait state after workpiece, the process that is pumped to vacuum state or process finish from atmospheric environment to being arranged in this this transmission platform that enters the part chamber; Or be arranged in the part chamber, and this goes out the part chamber and is in and is inflated to atmospheric condition, this mechanical arm from being arranged in the wait state of this this transmission platform that goes out the part chamber after atmospheric environment discharging workpieces, the process that is pumped to vacuum state or process finish;

35. vacuum transmission manufacturing method thereof that utilizes the described vacuum transmission of claim 32 process apparatus to realize; It is characterized in that; Each transmission platform is shifted to out the part chamber from entering the part chamber through this vacuum process chamber successively continuously after loading workpiece, make each workpiece accept the processing of the machining medium of each processing unit (plant); Except being in from entering the part chamber through the transmission platform the process in part chamber is shifted to out in this vacuum process chamber, all the other each transmission platforms: or be in from going out the part chamber and retract the process in part chamber into through atmospheric environment; Or be arranged in into part chamber, and this enters the part chamber and is in and is inflated to atmospheric condition, this mechanical arm and loads the wait state after workpiece, the process that is pumped to vacuum state or process finish from atmospheric environment to being arranged in this this transmission platform that enters the part chamber; Or be arranged in the part chamber, and this goes out the part chamber and is in and is inflated to atmospheric condition, this mechanical arm from being arranged in the wait state of this this transmission platform that goes out the part chamber after atmospheric environment discharging workpieces, the process that is pumped to vacuum state or process finish;

36. vacuum transmission manufacturing method thereof as claimed in claim 35 is characterized in that, to the half the processing unit (plant) of corresponding zone to be processed less than workpiece size, at step S ₂With step S ₃In; The machining medium zone of action of this processing unit (plant) and said transmission platform relatively move before or after and at this processing unit (plant) workpiece is carried out first being processed, this processing unit (plant) stops to generate machining medium or the Workpiece carrier zone is shifted out in the machining medium zone of action.

37. vacuum transmission manufacturing method thereof that utilizes the described vacuum transmission of claim 33 process apparatus to realize; It is characterized in that; Each transmission platform is shifted to out the part chamber from entering the part chamber through this vacuum process chamber successively continuously after loading workpiece, make each workpiece accept the processing of the machining medium of each processing unit (plant); Except being in from entering the part chamber through the transmission platform the process in part chamber is shifted to out in this vacuum process chamber, all the other each transmission platforms: or be in from going out the part chamber and retract the process in part chamber into through atmospheric environment; Or be arranged in into part chamber, and this enters the part chamber and is in and is inflated to atmospheric condition, this mechanical arm and loads the wait state after workpiece, the process that is pumped to vacuum state or process finish from atmospheric environment to being arranged in this this transmission platform that enters the part chamber; Or be arranged in the part chamber, and this goes out the part chamber and is in and is inflated to atmospheric condition, this mechanical arm from being arranged in the wait state of this this transmission platform that goes out the part chamber after atmospheric environment discharging workpieces, the process that is pumped to vacuum state or process finish;

38. vacuum transmission manufacturing method thereof as claimed in claim 37 is characterized in that, to the half the processing unit (plant) of corresponding zone to be processed less than workpiece size, at step S ₂With step S ₃In; The machining medium zone of action of this processing unit (plant) and said transmission platform relatively move before or after and at this processing unit (plant) workpiece is carried out first being processed, this processing unit (plant) stops to generate machining medium or the Workpiece carrier zone is shifted out in the machining medium zone of action.