CN102403194A - Mesh processing device - Google Patents

Mesh processing device Download PDF

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Publication number
CN102403194A
CN102403194A CN201110248434XA CN201110248434A CN102403194A CN 102403194 A CN102403194 A CN 102403194A CN 201110248434X A CN201110248434X A CN 201110248434XA CN 201110248434 A CN201110248434 A CN 201110248434A CN 102403194 A CN102403194 A CN 102403194A
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CN
China
Prior art keywords
net
door
compression unit
room
vacuum
Prior art date
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Pending
Application number
CN201110248434XA
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Chinese (zh)
Inventor
李镇焕
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AP Cells Inc
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AP Cells Inc
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Publication date
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Publication of CN102403194A publication Critical patent/CN102403194A/en
Pending legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H37/00—Article or web delivery apparatus incorporating devices for performing specified auxiliary operations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2301/00—Handling processes for sheets or webs
    • B65H2301/50—Auxiliary process performed during handling process
    • B65H2301/51—Modifying a characteristic of handled material
    • B65H2301/516—Securing handled material to another material
    • B65H2301/5161—Binding processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2701/00—Handled material; Storage means
    • B65H2701/10—Handled articles or webs
    • B65H2701/17—Nature of material
    • B65H2701/175—Plastic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2801/00—Application field
    • B65H2801/61—Display device manufacture, e.g. liquid crystal displays

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  • Physical Vapour Deposition (AREA)

Abstract

The invention relates to a mesh processing device, comprising a first chamber composed of a tilted door arranged along the mesh conveying direction, a mesh inlet formed in the door, and a mesh outlet formed in the door, a compression unit compressing the mesh toward the door to seal the mesh inlet, and an O-shaped loop which is flexibly deformed to seal the mesh inlet between the compression unit and the door. The mesh processing device of the utility model can keep the mesh in a vacuum or isolated state through a simple method while carrying out various types of processing over the mesh.

Description

The web treatments device
Technical field
The present invention relates to a kind of net (web) processing unit, relate in particular to and a kind of the chamber is remained on sealing state so that carry out the web treatments device of various processing.
Background technology
Net refers to substrate, and this substrate is movably and by flexible materials such as spinning cloth, nonwoven fabrics, composite type knitted textile, yarn, plastic film, metal forming, wire coil to form.
Net move or the process that stops in, can carry out various processing to net.Such as, these processing comprise: in the processing of vacuum deposit metal or oxide,, assemble two nets in the special processing that applies special material or under specific atmosphere, net is carried out on the net, or the like.Therefore, need under the state that net is isolated from the outside, handle, so that under vacuum or specific atmosphere, handle net.
Flexible display is to use the flat panel display equipment that forms such as flexible substrate such as plastic base, and can be crooked in the display characteristic that keeps high-quality, folding or be deformed into the roller shape.Therefore, present, flexible display is just attracting global concern as next-generation technology.Flexible display equipment is processed by thin flexible base plate, this flexible display equipment under the situation of the characteristic that can not lose existing display device, several centimetres of the such volumes of flexible or sensitive paper.Be different from the hard display that existing glass substrate is processed, but flexible display is light, thin, high strength shock resistance and free bend.In order the mode of sheet (roll-to-sheet) to be made this flexible display (net) with volume to volume (roll-to-roll) or volume; Will flexible base plate move or the process that stops under vacuum, carry out various processing; Such as thin-film transistor (Thin Film Transistor, TFT) ARRAY PROCESSING, sealing distribution, assembling etc.
But, for making flexible display, there is not water-tight equipment when the state that keeps net to be in vacuum or isolation is down, to carry out various processing through simple method about net, for example vacuum moulding machine, seal distribution, assembling etc.
Summary of the invention
In order to improve prior art and to satisfy above one or more demands of summarizing; One aspect of the present invention is to provide a kind of web treatments device; When this web treatments device can keep net to be under vacuum or the isolation, carry out multiple processing such as thin film deposition, distribution, assembling.
According to an aspect of the present invention, the web treatments device comprises: first Room, this first Room are included in the door of the inclination of disposing on the throughput direction of net and net import that in this, forms and net outlet; Compression unit, this compression unit compresses net with the import of sealing net towards the direction of door; And O type circle, this O type circle flexibly is out of shape with the net import between seal compression unit and the door.
In one embodiment, said net can be the flexible base plate that is used for display device.
In one embodiment, by the part of said compression unit and said the said net of compressing, can be the edge between the display floater that forms on the net.
In one embodiment, said net can be by comprising among PET, PEN, PES, PAR, PC, COC, PS and the PI at least one plastic material or comprising that stainless metal material processes.
In one embodiment, said first Room part that can be the vacuum assembly unit.
In one embodiment, said compression unit can be by actuator.
In one embodiment, said compression unit can have fillet, when compressing net, damages net to prevent compression unit.
In one embodiment, said door can have fillet, when compressing net, damages net to prevent compression unit.
In one embodiment, said first Room can be a vacuum chamber.
In one embodiment, said device also can comprise the net angle regulating unit, and this net angle regulating unit is used to regulate the gradient of net, is beneficial to compression unit compression net.
In one embodiment, said net angle regulating unit can comprise roller.
In one embodiment, said O type circle can be inserted in the O type circle groove of O type circle groove or said door of said compression unit.
In one embodiment, said device also can comprise the process chamber that is connected with said first Room.
In one embodiment, said process chamber can remain on than in the higher vacuum of the vacuum degree of said first Room.
In one embodiment, said first Room can be divided into two or more chambers, to keep the vacuum degree of said process chamber.
In one embodiment, said device also can comprise vertically moving buffering roller, with through changing the length adjustment of carrying out the net under the stand-by state at the mobile alignment of the said first indoor net.
In one embodiment, said vacuum chamber can be the part of the vacuum assembly unit of two nets of assembling.
Description of drawings
The following description of the embodiment that provides in conjunction with the drawings will make above-mentioned and other aspects of the present invention, feature and advantage clear more understandable, wherein,
Fig. 1 is the end view of web treatments device according to an embodiment of the invention;
Fig. 2 is the fragmentary, perspective view according to the part (door) of the web treatments device of the embodiment of the invention;
Fig. 3 is the cross-sectional view of the multiple installation instance of O type circle;
Fig. 4 is the cross-sectional view of the installation method instance of O type circle;
Fig. 5 is the cross-sectional view according to the opening of the net import of the device of the embodiment of the invention;
Fig. 6 is the zoomed-in view of A part among Fig. 5;
Fig. 7 is for making the conceptual view of the system of soft LCD to the mode of sheet with volume to volume or volume;
Fig. 8 is the cutaway view of web treatments device according to another embodiment of the present invention;
Fig. 9 is the cutaway view of first Room according to an embodiment of the invention;
Figure 10 is the conceptual view of pooling feature according to an embodiment of the invention; And,
Figure 11 is the conceptual view that carries out the various configurations of pooling feature.
Embodiment
To combine accompanying drawing that embodiments of the invention are elaborated at present.
Fig. 1 is the end view of web treatments device according to an embodiment of the invention, and Fig. 2 is the fragmentary, perspective view according to the part (door) of the web treatments device of the embodiment of the invention.
See figures.1.and.2, comprise first Room 100, net import 102, net outlet 104, door 106, compression unit 108 and O type circle 110 according to the web treatments device of an embodiment.Device according to the present invention can be applicable to multiple film shaped process based on net, flexible display manufacturing (like the vacuum assembling) process of soft LCD or soft organic electroluminescent LED display, or the like.In addition, in semiconductor technology, chemical etching, ultrapure cleaning and drying are carried out in the wet processing operating desk, and wherein, the assembly that is used for each technology all forms in single space segment.Contain heat chemistry solution at the container that is used for wet etching, thereby from this chemical solution, produce chemical fumes.So, if carry out exhaust not yet in effectly, chemical fumes can flow in the adjacent assembly.Here, said device also can be used for being isolated in the chemical fumes that produces in the processes such as semiconductor wet technology.In addition, web treatments device according to the present invention can be used for all processing that must under the state that is isolated from the outside, carry out.
Net W can be processed by any material.Such as, said net can be formed by the dynamic material of any conduction, such as; Comprise PETG (Polyethylene Terephthalate, PET), PEN (Polyethylene Naphthalate, PEN), polyether sulfone (Polyether Sulfone; PES), polyacrylate (Polyacrylate, PAR), Merlon (Polycarbonate, PC), cyclic olefine copolymer (Cycloolefin Copolymer; COC), polystyrene (Polystyrene; PS) and polyimides (Polyimide, PI) at least one plastic material, spin cloth or nonwoven fabrics, composite type knitted textile and yarn; And comprise stainless metal material, or the like.
Door 106 tilts with predetermined angle θ at the throughput direction of net.This configuration improves the leakage efficiency of first Room 100 through the compression efficiency that improves compression unit 108 described below.Door 106 can be a part or the formation separately of the wall of first Room 100.
When compression unit 108 during towards the direction of door 106 compression net W, as long as any assembly that can be compressed with hermatic door 106 can be used as O type circle 110.O type circle can be to comprise rectangle and circular polygon.Because O type circle 110 contacts with net W, so any material that has good sealing property and can not damage net can be used as O type circle.Such as; O type circle can be by elastomeric material; Such as acrylonitrile-butadiene rubber (Nitrile Butadiene Rubber, NBR), EPDM (Ethylene-Propylene-Diene Monomer, EPDM) process by rubber, silicone rubber, natural rubber, fluorubber, FFKM etc.Here, TiO 2, BaSO 4, SiO 2Can add in the elastomeric material characteristic to Deng additive with Reinforced Rubber Material.
Compression unit 108 can be a plate shape, and compresses net W by actuator 112 drivings.Actuator 112 can be electric actuator or pneumatic actuator, and is not limited to this.Compression unit 108 can be processed by the material that comprises in metal, rubber, pottery and the plastics at least one, and is not limited to this.Compression unit 108 is as the door of net import 102, and can with state that first Room 100 is connected or separates under by said actuator.Compression unit 108 can be to be connected (installation) perhaps can be used as first Room 100 in the part of the parts of first Room 100 separate part (equipment) with actuator 112.
First Room 100 can be vacuum chamber or be used at special atmosphere, such as other chambers of handling under nitrogen, argon gas, the carbon dioxide.When first Room was vacuum chamber, this chamber was through vacuum pump 124 exhausts.When first Room was the chamber of under special atmosphere, handling, various pressure pan (not shown) were connected with first Room 100 through pipeline.In addition, in first Room 100 or be connected with first Room 100 another indoorly carry out special processing, such as thin film deposition, assembling, distribution etc.Under latter event, first Room 100 can be used as load lock.
Near the compression unit 118 that net outlet 104, is provided with, door 116 and actuator 122 are the same basically with the compression unit, door and the actuator that near net import 102, are provided with, repeat no more here.Therefore, embodiments of the invention will only describe about net import 102.
Fig. 3 is the cross-sectional view of the multiple installation instance of O type circle.
With reference to Fig. 3, O type circle 110 can only be assemblied on the door 106 [seeing Fig. 3 (A)], or only is assemblied on the compression unit 108 and [sees Fig. 3 (B)], or on door 106 and compression unit 108, all assembles [seeing Fig. 3 (C)].When on door 106 and compression unit 108, all assembling O type circle 110, must assemble O type circle 110a and 110b in order to avoid overlapped.For this configuration; In Fig. 3 (C), the O type circle 110a that is assemblied on the door 106 has bigger size than the O type circle 110b that is assemblied on the compression unit 108, promptly; (installation interval of O type circle 110a is bigger than O type circle 110b's) (D1＜D2); Like this, when being compressed unit 108 compressions, the O type circle 110b that is assemblied on the compression unit 108 can be positioned at the O type circle 110a that is assemblied on the door 106.It should be understood that the O type circle 110b that is assemblied on the compression unit 108 is bigger than the O type circle 110a on door 106.
Fig. 4 is the cross-sectional view of the installation method of O type circle.
As shown in Figure 4, O type circle 110 can be inserted in the O type circle groove 106a that on door 106, forms.When O type circle 110 was assembled to compression unit 108, compression unit 108 also can have O type circle groove, and this O type circle groove is basic identical with configuration with the function of the O type circle groove 106a that on door 106, forms.Therefore, embodiments of the invention will combine the O type circle groove 106a of door 106 to describe.
O type circle 110 can have the cross section of circular cross section [seeing Fig. 4 (A)], oval-shaped cross section [seeing Fig. 4 (B)] and other shapes, and is not limited thereto.O type circle groove 106a can have multiple cross section, such as, quadrangular cross section, rectangular cross section, parallelepiped cross section, triangular cross section, circular cross section, oval cross section etc.In addition, in order to improve the sealing characteristics of O type circle 110, can be the shape (D) of dome or the shape (C) that comprises a plurality of protrusions and groove from the part 110a of the outstanding O type circle 110 of O type circle groove 106a.
Fig. 5 is the cross-sectional view according to the opening of the net import of the device of the embodiment of the invention, and Fig. 6 is the zoomed-in view of A part among Fig. 5.Fig. 5 shows, and when net W got into net import 102, the gradient (entering angle) of regulating net W was effectively to compress through 108 couples of net W of compression unit.Here, the gradient of net W can be regulated by a plurality of net angle regulating unit.In this embodiment, the gradient of net is regulated by second roller 132.Yet, need to prove that the adjusting of the gradient of net is not limited to specific method.Such as, replacing second roller 132, another assembly can be assemblied on the door 106 and compress net.
With reference to Fig. 5 and Fig. 6,, door [sees Fig. 5 (A)] when opening, support or the net W that carries has uniform height by first roller 130, second roller 132 and the 3rd roller 134.In order to close net import 102 [seeing Fig. 5 (B)], compression unit 108 moves by the direction of actuator 112 towards net import 102.Here, second roller 132 can be when compression unit 108 moves or compresses net W before, is beneficial to the compression of compression unit 108.
Door 106 can have smooth fillet 106b, so that be compressed when sealing in net, compressed net can get into net import 102 and can not be damaged.Compression unit 108 also can have smooth fillet 108b, so that by compression unit 108 compressions the time, net W can be through the edge of compression unit 108 and can not be damaged.
Fig. 7 is for making the conceptual view of the system of soft LCD to the mode of sheet with volume to volume or volume.
With reference to Fig. 7, first unwinder 152 is supplied with the first net W1 (first flexible base plate) that is wound in roll shape continuously.The first net W1 can be processed by the plastic material that comprises in PETG (PET), PEN (PEN), polyether sulfone (PES), polyacrylate (PAR), Merlon (PC), cyclic olefine copolymer (COC), polystyrene (PS) and the polyimides (PI) at least one.In order to carry effectively and subsequent treatment, must the tension force of the first net W1 be maintained in the constant scope.At least one force cell 154 can be set, to measure and to regulate the tension force of the first net W1 on the throughput direction of the first net W1.Because the first net W1 can be deformed into crooked shape in the process that moves (conveying), thus at least one net guider 156 can be set on the throughput direction of the first net W1, to be adjusted in fixing position to the first net W1.
At first, on the first net W1, form colour filter 158.But when the first net W1 had been pre-formed colour filter 158, the processing that forms colour filter 158 can be omitted.In addition, can on the first net W1, further form public electrode (not shown) and black matrix.Then, form the unit (not shown) through first alignment film and on the surface of the first net W1, form first alignment film 160.Colour filter 158, first alignment film 160 etc. can form on the upper surface of the first net W1 or lower surface.
Second unwinder 202 is supplied with the second net W2 (second flexible base plate) that is wound in roll shape continuously.As stated, at least one force cell that is used to regulate the second net W2 tension force 204 is set and is used to locate the net guider 206 of the second net W2 on the throughput direction of the second net W2 with at least one.The second net W2 can be by processing with the identical or different material of the material of the first net W1.
At first, thin-film transistor (TFT) array 208 forms on the upper surface of the second net W2 through the exemplary process that forms tft array.Yet when the second net W2 had been pre-formed tft array, the processing that forms tft array can be omitted.In addition, because passive matrix liquid crystal display has substituted AMLCD, therefore can form transparency electrode figure substitutes tft array.Next, form the unit (not shown) through second alignment film and form second alignment film 210.The type of second alignment film 210 is identical with the formation method with the type of first alignment film 160 with the formation method.Then, on the upper surface of second flexible base plate, can seal allocation process, short material allocation process and liquid crystal allocation process respectively through sealing distributor (not shown), short material distributor (not shown) and liquid crystal dispensing apparatus (not shown) with second alignment film 210.Here, can omit short material allocation process.In addition, the order of sealing allocation process, short material allocation process and liquid crystal allocation process can change.In addition,, this embodiment before fit on, infrabasal plate, carries out the liquid crystal allocation process although having explained,, can be in the processing that after the vacuum assembling, can inject liquid crystal under the situation that does not have the liquid crystal allocation process.
The sealing allocation process is the processing procedure that forms sealant, and short material allocation process forms short material 214, and the liquid crystal allocation process splashes into processing procedure (ODF) method through liquid crystal liquid crystal is provided.Gap body (spacer) forms the unit (not shown) and is used to form interval body 216.Then; The upper substrate and the infrabasal plate that on the first net W1 and the second net W2, form are respectively calibrated and are assembled through assembly unit 300; Then be cured sealant processing, become the processing of single liquid crystal cell and the processing that connects the polarizer plate to the substrate cut after the assembling.In addition, system can be equipped with a plurality of roller R100, R102, R104, R106, R108 on the throughput direction of the first net W1 and the second net W2; R110, R112, R200, R202, R204; R206, R208, R210, R212, and some roller can be by motor-driven drive roller.
Here, be difficult under vacuum, seal distribution, the distribution of weak point material and liquid crystal and distribute, and be very difficult in vacuum chamber, carry out whole volume to volume processing.Therefore, assembling is handled and can under vacuum, be carried out separately.So far, assembly unit 300 is equipped with vacuum chamber and need be isolated from the outside (sealing).In addition, under vacuum, carry out being used for the various hardwares that tft array handles or the deposition of insulating material also highly beneficially.
Fig. 8 is the cutaway view of web treatments device according to another embodiment of the present invention, and Fig. 9 is the cutaway view of first Room according to an embodiment of the invention.Device shown in Figure 8 can be applicable to the various film shaped processing based on the soft LCD of net and soft organic electroluminescent LED display etc., and can form whole vacuum assembly unit or partial vacuum assembly unit.In addition, the device according to this embodiment can be applicable to carry out any processing about the net under the state that is isolated from the outside.Comprise first Room 500, process chamber 600, second Room 700 according to the web treatments device of this embodiment, and the vacuum pump 504,604,704 that is connected with corresponding chamber.Except vacuum pump 504,604,704, also can be connected pressure pan with the chamber to form various atmosphere as required.
First Room 500 is equipped with door 506, this can be formed on first Room 500 wall a part or form separate structures.Door 506 throughput directions at net W tilt.Door 506 is equipped with net import 502, and this import also can be used as the net outlet 550 of first Room, and is as shown in Figure 8.Replacedly, can on process chamber 600, assemble independent net outlet.Identical in door 506 the configuration of the opening/closing of net and O type circle and first Room 500 and the foregoing description repeated no more here.
For example, when making soft LCD, net W is included in its lip-deep processing region 2002 (see figure 10)s, is used to carry out various processing, like thin film deposition, etching, sealing distribution etc.In addition, net W comprises faceplate part X (see figure 10), and this faceplate part becomes LCD upper substrate or infrabasal plate, and the boundary member Y (see figure 10) between the panel.Boundary member Y (see figure 10) is neither carried out any processing and also can't help any pattern and constitute.The boundary member Y (see figure 10) that becomes between the panel by the door 506 at the part of the net W of compression unit 508 compression and net import 502 places.Assemble this structure and can prevent that compression through compression unit 508 and door 506 is to the damage of the pattern, film or the sealant that form on the net.Obviously, this description processing that also is applied to other processing and makes soft LCD.
After in process chamber 600, accomplishing predetermined processing, the net outlet of net W through process chamber (or enter the mouth 650 through the net of second Room) moves to second Room.Here, door, net outlet, compression unit and the brake near the net import of the door 708 of assembling, net outlet 702, compression unit 708 and actuator 712 and foregoing description are basic identical on second Room 700, therefore repeat no more here.
The vacuum pump 504,604,704 that is connected with separately chamber can vacuum degree as required be selected.For example, rotary pump like dried rotatable sliding-vane pump or the oiling rotary vane pump etc. of going back to, is used to obtain lower vacuum degree.Multi-stage rotary formula sliding-vane pump, multistage steam injector, piston pump, diffusion pump or other analogs can be used for obtaining moderate vacuum degree.Diffusion pump, turbomolecular pump, absorption pump, sub-cooled pump or other analogs can be used for obtaining higher vacuum degree.Turbomolecular pump, sub-cooled pump, absorption pump or other analogs can be used for obtaining the vacuum degree of superelevation.
Usually, because first Room 500 and second Room 700 need make process chamber remain in the higher vacuum degree, so require the vacuum degree of first Room 500 and second Room 700 to be lower than the vacuum degree of process chamber 600.Therefore, as shown in Figure 9, when net during near vacuum chamber 600, first Room 500 or second Room 700 can be divided into two or more chambers and configurable one-tenth has cumulative vacuum degree.Fig. 9 shows an instance of first Room 500, and this first Room 500 is divided into two the chamber 500a and the 500b that are connected with 540b with vacuum pump 504a respectively.
On the other hand, first Room 500 and second Room 700 can be load lock.That is to say, when net is carried out certain processing in process chamber 600,, then be difficult to keep the vacuum degree of process chamber 600 at every turn if the net of the net import 502 of door 506 and second Room outlet 702 all is opened.Therefore, first Room 500 or second Room 700 can have pooling feature to take in the net of predetermined length wherein.
Figure 10 is the conceptual view of pooling feature according to an embodiment of the invention.Provide the equipment of this function can be arranged on first Room or second indoor.
Buffering roller R3 and R4 are configured to through connected motor (not shown) vertical moving.That is to say that when buffering roller R3 and R4 moved down, the length of net W that be accommodated in first Room 500 was with the displacement increase of buffering roller.In order to make net W after process chamber 600 carries out predetermined process, carry out subsequent treatment, buffering roller R3 and R4 move up and carry out subsequent treatment so that net W gets into process chamber 600.For this reason, first Room 500, process chamber 600 or second Room 700 can be equipped with the drive roller that at least one can move net W.
On the other hand, each comprises the roller R1 that cushions roller, R2, and R3, R4, R5, R6 can have the dumbbell shape of forming by than the core and the larger-diameter marginal portion of minor diameter, with various material layers or the pattern on the processing region 2002 of protection net W.That is, at the core A that has processing region 2002 of net W, roller R1 etc. can only contact with the edge B of second flexible base plate 200, and do not contact with whole net W.More preferably, roller contacts with the part of net W, and this part is positioned at outside the collimating marks 2004 of net W.The edge B of net W can be formed with through hole 2006, behind cutting net W, to keep the tension force of net W and to locate net W.
On the other hand, the plane of net W, that is, there is not the problem of contact aspect between plane and the roller in the lower surface that does not have processing region 2002 of net W among Figure 10.Therefore, except the roller of dumbbell shape, can preferably adopt isometrical cylindrical shape roller to support or carry net W.That is to say that roller R3, R4 and R6 can be the dumbbell type rollers, roller R1, R2, R5 and R7 can be the cylindrical shape rollers.
Figure 11 is the conceptual view that carries out the various configurations of pooling feature.It is configurable in first Room or second indoor to carry out the equipment of pooling feature.
With reference to Figure 11 (A), but two bufferings roller R12 and R14 vertical moving are with the length of adjusting net W.Remaining two roller R10 and R16 then are used for supporting and conveying net W.Although the buffering roller also supports and carry net W, these rollers have the standalone feature of regulating net W length, therefore, for convenience's sake, are called " buffering roller ".With reference to Figure 11 (B), four buffering roller R22, R24, R26 and R28 can provide pooling feature.Remaining two roller R20 and R29 are used for supporting and conveying net W.Replacedly, shown in Figure 11 (C), single buffering roller R32 can be used for providing pooling feature.Remaining two roller R30 and R34 are used for supporting and conveying net W.Here, comprise that will be configured to towards the buffering roller of the processing region of net W and all rollers of common roller can be the dumbbell shape roller.
Like this, according to embodiments of the invention, the advantage of web treatments device is and can when simple method is under the state that net is remained on vacuum or isolation, carries out the various processing about net.In addition, the web treatments device through load lock, buffering roller etc. can make keep vacuum in the process chamber or specific atmosphere easier.
Although the present invention is described with regard to some embodiment; But, those skilled in the art will appreciate that these embodiment provide through the mode of explaining; Under the situation that does not break away from the spirit and scope of the present invention, can carry out various modifications, variation and change.Protection scope of the present invention should only receive the qualification of Rights attached thereto requirement and equivalent thereof.

Claims (17)

1. web treatments device comprises:
First Room is included in the door of the inclination of assembling on the net throughput direction and the net import that in this, forms and net outlet;
Compression unit compresses net with the import of sealing net towards the direction of door; And
O type circle flexibly is out of shape with the net import between seal compression unit and the door.
2. device according to claim 1 is characterized in that, said net is the flexible base plate that is used for display device.
3. device according to claim 2 is characterized in that, is the edge between the display floater that forms on the net by the part of the said net of said compression unit and said door compression.
4. device according to claim 1 is characterized in that, said net is by comprising among PET, PEN, PES, PAR, PC, COC, PS and the PI at least one plastic material or comprising that stainless metal material processes.
5. device according to claim 1 is characterized in that, said first Room is the part of vacuum assembly unit.
6. device according to claim 1 is characterized in that said compression unit is by actuator.
7. device according to claim 1 is characterized in that said compression unit has fillet, when compressing said net, damages net to prevent compression unit.
8. device according to claim 1 is characterized in that, said door has fillet, when compressing said net, damages net to prevent said compression unit.
9. device according to claim 1 is characterized in that, said first Room is a vacuum chamber.
10. device according to claim 1 is characterized in that, also comprises the net angle regulating unit, and this net angle regulating unit is used to regulate the gradient of said net, is beneficial to said compression unit and compresses said net.
11. device according to claim 9 is characterized in that, said net angle regulating unit comprises roller.
12. device according to claim 1 is characterized in that, said O type circle is inserted in the O type circle groove of O type circle groove or said door of said compression unit.
13. device according to claim 1 is characterized in that, also comprises: the process chamber that is connected with said first Room.
14. device according to claim 13 is characterized in that, said process chamber remains on than in the higher vacuum of the vacuum degree of said first Room.
15. device according to claim 13 is characterized in that, said first Room is divided into two or more chambers, to keep the vacuum degree of said process chamber.
16. device according to claim 13 is characterized in that, also comprises: vertically moving buffering roller, with through changing the length adjustment of carrying out the net under the stand-by state at the mobile alignment of the said first indoor net.
17. device according to claim 13 is characterized in that, said vacuum chamber is the part of the vacuum assembly unit of two nets of assembling.
CN201110248434XA 2010-09-15 2011-08-26 Mesh processing device Pending CN102403194A (en)

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KR1020100090280A KR101201361B1 (en) 2010-09-15 2010-09-15 Apparatus for treating web
KR10-2010-0090280 2010-09-15

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CN102403194A true CN102403194A (en) 2012-04-04

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CN201110248434XA Pending CN102403194A (en) 2010-09-15 2011-08-26 Mesh processing device

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KR101426065B1 (en) 2013-05-20 2014-08-01 민치훈 Roll to roll vacuum buffer and roll to roll print system having roll to roll vacuum buffer
KR101561991B1 (en) 2013-12-27 2015-10-20 엘아이지인베니아 주식회사 Gate valve and apparatus for processing flexible substrate including thereof

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