CN102394220A - Method for improving carrier mobility of MOS (Metal Oxide Semiconductor) device and MOS device manufacturing method - Google Patents
Method for improving carrier mobility of MOS (Metal Oxide Semiconductor) device and MOS device manufacturing method Download PDFInfo
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- CN102394220A CN102394220A CN2011103661799A CN201110366179A CN102394220A CN 102394220 A CN102394220 A CN 102394220A CN 2011103661799 A CN2011103661799 A CN 2011103661799A CN 201110366179 A CN201110366179 A CN 201110366179A CN 102394220 A CN102394220 A CN 102394220A
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Abstract
The invention provides a method for improving carrier mobility of an MOS (Metal Oxide Semiconductor) device and an MOS device manufacturing method. The method comprises the following steps: forming a grid oxide layer on a device area on a lining; conducting coupling-separation plasma nitridation on a device structure, wherein nitrogen distributed in grate oxide is far away from an SiO2-Si lining interface through adjusting time and/or power of coupling-separation plasma nitridation process; annealing after nitridation after the nitridation step is carried out, wherein the nitrogen distributed in grate oxide is far away from the SiO2-Si lining interface through controlling time and/or temperature of the annealing after nitridation; forming a polycrystalline silicon layer on the surface of a wafer; and injecting nitrogen elements after arranging a mask which is utilized for covering an area for manufacturing a PMOS (P-channel Metal Oxide Semiconductor), wherein the area for manufacturing a NMOS (N-channel metal oxide semiconductor) is exposed.
Description
Technical field
The present invention relates to field of semiconductor manufacture, more particularly, the present invention relates to a kind of method of the MOS of improvement device carrier mobility and adopted this to improve the MOS device making method of the method for MOS device carrier mobility.
Background technology
The semiconductor manufacturing is devoted to improve MOSFET (metal-oxide layer-semiconductor-field-effect transistor, Metal-Oxide-Semiconductor Field-Effect Transistor below is called the MOS device) carrier mobility always.
Current; Industry is for improving CMOS (Complementary Metal Oxide Semiconductor; Complementary metal oxide semiconductors (CMOS)) transistor mobility of charge carrier rate; Usually be employed in and introduce stress engineering in the processing procedure or adopt different semi-conducting material raceway grooves, but these methods have improved process complexity greatly.
So hope can provide a kind of and can improve MOS device carrier mobility and can not improve the method for process complexity greatly.
Summary of the invention
Technical problem to be solved by this invention is to have above-mentioned defective in the prior art, provides a kind of and can not improve the method for improving MOS device carrier mobility of process complexity greatly and adopt this to improve the MOS device making method of the method for MOS device carrier mobility.
According to a first aspect of the invention; A kind of method of the MOS of improvement device carrier mobility is provided; It comprises: grid oxic horizon forms step; Be used on the device area of substrate, forming grid oxic horizon, said device area comprises the zone that will process the PMOS device and the zone that will process nmos device; Nitriding step is used for device architecture is carried out branch coupling formula pecvd nitride; Wherein, through regulating time and/or the power that divides coupling formula plasma nitridation process, make the distribution of nitrogen in grid oxygen away from the SiO2-Si substrate interface; The post-nitridation anneal step is used for after said nitriding step, carrying out post-nitridation anneal; Wherein, make the distribution of nitrogen in grid oxygen away from the SiO2-Si substrate interface through the time and/or the temperature of control post-nitridation anneal; Polysilicon layer forms step, is used for forming polysilicon layer in wafer surface; And nitrogen element implantation step, be used to utilize masked will process the zone of PMOS device, and expose the zone that will process nmos device, and after having arranged said mask, carry out the nitrogen element and inject.
Preferably, said nitrogen element implantation step is carried out in the ion implantation process of the nmos device of MOS device.
Preferably, form in the step, according to the electrical thickness targets of last required grid oxygen, through regulating silicon-base oxide oxidization time controlled oxidation layer thickness at said grid oxic horizon.
Preferably; In said post-nitridation anneal step; Require to control the time and the temperature of post-nitridation anneal according to the nitrogen element contoured profile of final PMOS device desired, make the nitrogen element contoured profile requirement of under the situation of the distribution of nitrogen in grid oxygen, satisfying final PMOS device desired away from the SiO2-Si substrate interface.
Preferably, in nitrogen element implantation step, decide the implantation dosage of nitrogen element according to the thickness of polysilicon layer.
Preferably, in said nitrogen element implantation step, nitrogen element implantation dosage is between 1e14 to 2e15 atom/cm2.
Preferably, said MOS device is a cmos device.
According to a first aspect of the invention; Prepare in the process at grid oxygen, according to the electrical thickness targets of last required grid oxygen, through optimizing silicon-base oxide oxidization time controlled oxidation layer thickness; Regulate DPN (decoupled plasma nitridation; Divide coupling formula pecvd nitride) time or power, and accurate optimization PNA (Post Nitridation Anneal, the post-nitridation anneal) time; Make the distribution of nitrogen in grid oxygen away from the SiO2-Si substrate interface.Then, in the ion implantation process of nmos device, make the SiO2-Si substrate interface of NMOS have a spot of nitrogen element.Improved the carrier mobility of NMOS and PMOS thus.That is,, can optimize the position distribution of nitrogen element in grid oxygen, improve the carrier mobility of MOS device (especially cmos device) through improving according to the present invention.
According to a second aspect of the invention, a kind of MOS device making method that has adopted according to the method for the described MOS of the improvement device of first aspect present invention carrier mobility is provided.
Owing to adopted method according to the described MOS of the improvement device of first aspect present invention carrier mobility; Therefore; It will be appreciated by persons skilled in the art that according to the MOS device making method of second aspect present invention and can realize the useful technique effect that the method for improving MOS device carrier mobility according to a first aspect of the invention can realize equally.
Description of drawings
In conjunction with accompanying drawing, and, will more easily more complete understanding be arranged and more easily understand its attendant advantages and characteristic the present invention through with reference to following detailed, wherein:
Fig. 1 schematically shows the flow chart according to the method for improving MOS device carrier mobility of the embodiment of the invention.
The grid oxic horizon that Fig. 2 schematically shows according to the method for improving MOS device carrier mobility of the embodiment of the invention forms step device architecture figure afterwards.
Fig. 3 schematically shows according to the device architecture figure after the nitriding step of the method for improving MOS device carrier mobility of the embodiment of the invention.
The polysilicon layer that Fig. 4 schematically shows according to the method for improving MOS device carrier mobility of the embodiment of the invention forms step device architecture figure afterwards.
Fig. 5 schematically shows the device architecture figure according to the nitrogen element implantation step of the method for improving MOS device carrier mobility of the embodiment of the invention.
Fig. 6 schematically shows the nitrogen distribution diagram of element according to the PMOS device area of the nitrogen element implantation step of the method for improving MOS device carrier mobility of the embodiment of the invention.
Fig. 7 schematically shows the nitrogen distribution diagram of element according to the nmos device zone of the nitrogen element implantation step of the method for improving MOS device carrier mobility of the embodiment of the invention.
Need to prove that accompanying drawing is used to explain the present invention, and unrestricted the present invention.Notice that the accompanying drawing of expression structure possibly not be to draw in proportion.And in the accompanying drawing, identical or similar elements indicates identical or similar label.
Embodiment
In order to make content of the present invention clear more and understandable, content of the present invention is described in detail below in conjunction with specific embodiment and accompanying drawing.
Fig. 1 schematically shows the flow chart according to the method for improving MOS device carrier mobility of the embodiment of the invention.
As shown in Figure 1, comprise according to the method for improving MOS device carrier mobility of the embodiment of the invention: grid oxic horizon forms step S1, nitriding step S2, post-nitridation anneal step S3, polysilicon layer and forms step S4 and nitrogen element implantation step S5.
To combine Fig. 1 below and describe each step in detail referring to figs. 2 to Fig. 7.
Form among the step S1 at grid oxic horizon, go up at the device area (2,3) of substrate 1 and form grid oxic horizon 4.Device area comprises the zone 2 that will process the PMOS device and the zone 3 that will process nmos device.For example, this grid oxic horizon 4 is a silicon dioxide.Fig. 2 schematically shows grid oxic horizon and forms step S1 device architecture figure afterwards.
Preferably, form in the step S1 process, according to the electrical thickness targets of last required grid oxygen, through optimizing silicon-base oxide oxidization time controlled oxidation layer thickness at grid oxic horizon.
In nitriding step S2, device architecture is carried out branch coupling formula plasma nitridation process; Wherein, through regulate dividing the time and/or the power of coupling formula plasma nitridation process, make the distribution of nitrogen in grid oxygen away from SiO2-Si substrate interface (can with reference to figure 6).Fig. 3 schematically shows the device architecture figure after the nitriding step S2.Wherein for example the layer of device area top has become nitrogen oxide 5 by oxide skin(coating) 4.
In post-nitridation anneal step S3, after nitriding step S2, carry out post-nitridation anneal.This step can be used for injury repair and the control of nitrogen element profile.And preferably, in post-nitridation anneal step S3, but the time of accurate optimization post-nitridation anneal and temperature make the distribution of nitrogen in grid oxygen away from the SiO2-Si substrate interface.And further preferably; Can require to control the time and/or the temperature of post-nitridation anneal according to the nitrogen element contoured profile of final PMOS device desired, make the nitrogen element contoured profile requirement of under the situation of the distribution of nitrogen in grid oxygen, satisfying final PMOS device desired away from the SiO2-Si substrate interface.
Form among the step S4 at polysilicon layer, form polysilicon layer 6 in wafer surface.This polysilicon layer 6 can be used to form the grid of PMOS device and the grid of nmos device in subsequent step.Fig. 4 schematically shows polysilicon layer and forms step S4 device architecture figure afterwards.
In nitrogen element implantation step S5, be used for utilizing mask 8 to cover the zone that to process the PMOS device, and expose the zone that to process nmos device, and after having arranged mask 8, carry out the nitrogen element and inject at the ion implantation process of nmos device.Fig. 5 schematically shows the device architecture figure of nitrogen element implantation step S5, and wherein mask 8 has covered the zone that will process the PMOS device, and exposes the zone that will process nmos device.
Thus, in the ion implantation process of nmos device, can make the SiO2-Si substrate interface of nmos device have a spot of nitrogen element, improve the carrier mobility of nmos device and PMOS device.
Fig. 6 schematically shows the nitrogen distribution diagram of element of the PMOS device area of nitrogen element implantation step S5; As shown in Figure 6; Because in nitrogen element implantation step S5 step; The PMOS device area is covered by mask 8, thereby still keeps the SiO2-Si substrate interface not have the nitrogen element in the grid G of PMOS device to the distribution of the nitrogen element between the substrate sub.
Fig. 7 schematically shows the nitrogen distribution diagram of element in the nmos device zone of nitrogen element implantation step S5.Because in nitrogen element implantation step S5 step, the nmos device zone is covered by mask 8, thereby distribute owing to further nitrogen injection makes the SiO2-Si substrate interface that a spot of nitrogen element arranged to the nitrogen element between the substrate sub in the grid G of nmos device.
And, preferably, in nitrogen element implantation step S5, decide the implantation dosage of nitrogen element according to the thickness of polysilicon layer 6.For example, in a concrete preferred exemplary, nitrogen element implantation dosage is between 1e
14To 2e
15Atom/cm
2Between.
Manufacturing process for nmos device and PMOS device can continue to carry out subsequent process steps, and follow-up processing step can adopt any known suitable technology of the present invention.
Thus, as stated, prepare in the process,,, regulate DPN time or power through optimizing silicon-base oxide oxidization time controlled oxidation layer thickness according to the electrical thickness targets of last required grid oxygen at grid oxygen, and the accurate optimization PNA time; Make the distribution of nitrogen in grid oxygen away from the SiO2-Si substrate interface.Then, in the ion implantation process of nmos device, make the SiO2-Si substrate interface of NMOS have a spot of nitrogen element.Improved the carrier mobility of NMOS and PMOS thus.That is,, can optimize the position distribution of nitrogen element in grid oxygen, improve the CMOS carrier mobility through improving according to the present invention.
Said method can be used for carrying out MOS device, for example cmos device.
It is understandable that though the present invention with the preferred embodiment disclosure as above, yet the foregoing description is not in order to limit the present invention.For any those of ordinary skill in the art; Do not breaking away under the technical scheme scope situation of the present invention; All the technology contents of above-mentioned announcement capable of using is made many possible changes and modification to technical scheme of the present invention, or is revised as the equivalent embodiment of equivalent variations.Therefore, every content that does not break away from technical scheme of the present invention, all still belongs in the scope of technical scheme protection of the present invention any simple modification, equivalent variations and modification that above embodiment did according to technical spirit of the present invention.
Claims (8)
1. method of improving MOS device carrier mobility is characterized in that comprising:
Grid oxic horizon forms step, is used on the device area of substrate, forming grid oxic horizon, and said device area comprises the zone that will process the PMOS device and the zone that will process nmos device;
Nitriding step is used for device architecture is carried out branch coupling formula pecvd nitride; Wherein, through regulating time and/or the power that divides coupling formula plasma nitridation process, make the distribution of nitrogen in grid oxygen away from the SiO2-Si substrate interface;
The post-nitridation anneal step is used for after said nitriding step, carrying out post-nitridation anneal; Wherein, make the distribution of nitrogen in grid oxygen away from the SiO2-Si substrate interface through the time and/or the temperature of control post-nitridation anneal;
Polysilicon layer forms step, is used for forming polysilicon layer in wafer surface; And
Nitrogen element implantation step is used to utilize masked will process the zone of PMOS device, and exposes the zone that will process nmos device, and after having arranged said mask, carries out the nitrogen element and inject.
2. the method for improving MOS device carrier mobility according to claim 1 is characterized in that, said nitrogen element implantation step is carried out in the ion implantation process of nmos device.
3. the method for improving MOS device carrier mobility according to claim 1 and 2; It is characterized in that; Form in the step at said grid oxic horizon, according to the electrical thickness targets of last required grid oxygen, through regulating silicon-base oxide oxidization time controlled oxidation layer thickness.
4. the method for improving MOS device carrier mobility according to claim 1 and 2; It is characterized in that; In said post-nitridation anneal step; Require to control the time and the temperature of post-nitridation anneal according to the nitrogen element contoured profile of final PMOS device desired, make the nitrogen element contoured profile requirement of under the situation of the distribution of nitrogen in grid oxygen, satisfying final PMOS device desired away from the SiO2-Si substrate interface.
5. the method for improving MOS device carrier mobility according to claim 1 and 2 is characterized in that, in said nitrogen element implantation step, nitrogen element implantation dosage is between 1e
14To 2e
15Atom/cm
2Between.
6. the method for improving MOS device carrier mobility according to claim 1 and 2 is characterized in that, in nitrogen element implantation step, decides the implantation dosage of nitrogen element according to the thickness of polysilicon layer.
7. the method for improving MOS device carrier mobility according to claim 1 and 2 is characterized in that, said MOS device is a cmos device.
8. MOS device making method is characterized in that material and method according to the described MOS of the improvement device of one of claim 1 to 7 carrier mobility.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104103588A (en) * | 2013-04-10 | 2014-10-15 | 上海华虹宏力半导体制造有限公司 | Method for manufacturing COMS device |
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| CN101188212A (en) * | 2006-11-15 | 2008-05-28 | 株式会社瑞萨科技 | Method of manufacturing semiconductor device |
| US20080230843A1 (en) * | 2007-03-22 | 2008-09-25 | Semiconductor Manufacturing International (Shanghai) Corporation | Isolation Structure for MOS Transistor and Method for Forming the Same |
| CN101740365A (en) * | 2008-11-17 | 2010-06-16 | 中芯国际集成电路制造(上海)有限公司 | Method for manufacturing semiconductor devices |
| CN102364664A (en) * | 2011-11-10 | 2012-02-29 | 上海华力微电子有限公司 | Method for improving metal-oxide-semiconductor field-effect transistor (MOSFET/ MOS device) carrier mobility and MOS device manufacturing method |
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Patent Citations (5)
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| CN1645593A (en) * | 2004-01-22 | 2005-07-27 | 国际商业机器公司 | Selective nitridation of gate oxides |
| CN101188212A (en) * | 2006-11-15 | 2008-05-28 | 株式会社瑞萨科技 | Method of manufacturing semiconductor device |
| US20080230843A1 (en) * | 2007-03-22 | 2008-09-25 | Semiconductor Manufacturing International (Shanghai) Corporation | Isolation Structure for MOS Transistor and Method for Forming the Same |
| CN101740365A (en) * | 2008-11-17 | 2010-06-16 | 中芯国际集成电路制造(上海)有限公司 | Method for manufacturing semiconductor devices |
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| CN104103588A (en) * | 2013-04-10 | 2014-10-15 | 上海华虹宏力半导体制造有限公司 | Method for manufacturing COMS device |
| CN104103588B (en) * | 2013-04-10 | 2017-02-15 | 上海华虹宏力半导体制造有限公司 | Method for manufacturing COMS device |
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Application publication date: 20120328 |