CN102374258B - Vibration isolation device - Google Patents
Vibration isolation device Download PDFInfo
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- CN102374258B CN102374258B CN201110186660.XA CN201110186660A CN102374258B CN 102374258 B CN102374258 B CN 102374258B CN 201110186660 A CN201110186660 A CN 201110186660A CN 102374258 B CN102374258 B CN 102374258B
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- vertical
- control force
- isolation mounting
- actuator
- vibration transducer
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/023—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F9/00—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium
- F16F9/02—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium using gas only or vacuum
- F16F9/04—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium using gas only or vacuum in a chamber with a flexible wall
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F9/00—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium
- F16F9/32—Details
- F16F9/50—Special means providing automatic damping adjustment, i.e. self-adjustment of damping by particular sliding movements of a valve element, other than flexions or displacement of valve discs; Special means providing self-adjustment of spring characteristics
- F16F9/504—Inertia, i.e. acceleration,-sensitive means
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F9/00—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium
- F16F9/32—Details
- F16F9/50—Special means providing automatic damping adjustment, i.e. self-adjustment of damping by particular sliding movements of a valve element, other than flexions or displacement of valve discs; Special means providing self-adjustment of spring characteristics
- F16F9/512—Means responsive to load action, i.e. static load on the damper or dynamic fluid pressure changes in the damper, e.g. due to changes in velocity
Abstract
The invention discloses a vibration isolation device(1), comprising a top plate(11) of a supporting platform, a substrate(21) placed on a floor and a spring unit(3) arranged between the top plate(11) and the substrate(21) and carrying out vibration isolation supporting on a platform on which precise devices are placed via spiral spring(13) on the floor. The vibration isolation device(1) is configurated to arrange a plumb unit(5) and /or a horizontal unit(7) on the top plate(11) disassembly in a manner of being able to be accommodated in a space between the top plate(11) and the substrate(21), the plumb unit(5) is formed by modularizing a plumb acceleration sensor(15) and a plumb VCM together, and the horizontal unit(7) is formed by modularizing a horizontal acceleration sensor and a horizontal VCM together, so that the vibration isolation device capable of satisfying the performances required by users, and having a smaller size and a low cost can be provided.
Description
Technical field
The present invention relates to a kind of isolation mounting, this isolation mounting supports with spring members, to allow the precision equipments such as electron microscope and microvibration isolation from floor etc.
Background technique
Up to now, known in this isolation mounting have so-called passive (passive) type vibration isolation table, soft spring members support platform such as such as pneumatic spring or helical spring etc. for this vibration isolation table, equipment is placed on the upper surface of this platform.
Also have, initiatively (active) type isolation mounting is also known, this isolation mounting with sensor for example, to via pneumatic spring for example (, No. 3372975 communique of Japan Patent) or helical spring is (for example, Japanese Laid-Open Patent Publication JP 2007-78122 communique) vibration or the position of vibration isolation object supported detect, the signal generating according to this detection is fed back, drive actuator, applies to this vibration isolation object the control force that produces the vibration that weakens this vibration thus.
Summary of the invention
-invention to solve technical problem-
In above-mentioned existing active isolation mounting (following, also referred to as active vibration isolation arrangement), there is following problems.That is to say, existing active vibration isolation arrangement generally in the cover cap of this active vibration isolation arrangement except comprising spring members also for vertical and this two direction of level comprise respectively sensor and actuator, although thereby can in vertical and substantially horizontal, realize high anti-vibration performance, cost is very expensive.
But, in user, there is the people who wishes only to obtain in the direction in vertical and substantially horizontal very high anti-vibration performance.For the following way of only having of this user's selection, that is: buy anti-vibration performance and the passive-type isolation mounting of less expensive poorer than active vibration isolation arrangement, or buy that to have the unwanted function of this user (concerning hope only obtains the user of very high anti-vibration performance in vertical, be the vibration isolation function in substantially horizontal; Concerning hope only obtains the user of very high anti-vibration performance in the horizontal direction, be the vibration isolation function in vertical), price expensive active vibration isolation arrangement again.This is a problem.
Also have, in a lot of active vibration isolation arrangement, except spring members, various sensor and actuator, electric motor is also installed in cover cap or is used for controlling the controller of these devices, it is the automatic height adjustment of certain height that this electric motor is used for keeping podium level.Therefore,, in active vibration isolation arrangement, even long 230mm is above, the size of wide 230mm above, more than high 180mm in small-sized also generally having, thereby can not meet the requirement of wishing to use the user of active isolation mounting in narrow space.This is also a problem.
For addressing the above problem, that can expect has a following measure, that is: special order to make only there is the desirable function of user and the less active vibration isolation arrangement of size.But, there is following point, that is: the manufacture cost of the product of specially ordering is higher; If have the necessity that applies other function, just have to buy another active vibration isolation arrangement later; In this case, manufacture small-sized cover cap in dismounting, and apply after described other function, cover cap need to be replaced by larger cover cap etc., thereby operation is very miscellaneous.
The present invention is just in view of the premises completes.Its object is: the desired performance of a kind of user of possessing, the less and cheap isolation mounting of size are provided.
-in order to the technological scheme of technical solution problem-
For reaching described object, the present invention take with helical spring via upper plate and lower plate with respect to the passive-type isolation mounting of base portion supports platform as basic device, be that control force bringing device is configured to vibration transducer and the actuator less structure of size that modularization forms together by the function expanding device of the function that is used for expanding this passive-type isolation mounting, and this control force bringing device is configured to and can upper plate be loaded and unloaded, can meet user's various requirements.
Particularly, the invention of first aspect is take following isolation mounting as object, that is: this isolation mounting comprises upper plate, lower plate and passive-type isolation mounting, this upper plate support platform, this lower plate is placed on base portion, this passive-type isolation mounting is being arranged between this upper plate and this lower plate on this two plate, and this passive-type isolation mounting carries out vibration isolation support with respect to this base portion to the equipment being placed on this platform with helical spring.
Described isolation mounting is characterised in that this isolation mounting is configured to: can to this upper plate, the first control force bringing device and/or the second control force bringing device be releasably installed in the mode being accommodated in the space between described upper plate and described lower plate, this the first control force bringing device is the first vibration transducer modularization and forming together with the first actuator, this first vibration transducer is used for detecting the vibration of described equipment in vertical, this first actuator is used for, along vertical, described equipment is applied to control force, this the second control force bringing device is the second vibration transducer modularization and forming together with the second actuator, this second vibration transducer is used for detecting the vibration in the horizontal direction of described equipment, this second actuator is used for along continuous straight runs described equipment is applied to control force.
According to the invention of first aspect, first, take adopt cost than the low helical spring passive-type isolation mounting of pneumatic spring as basic device.Therefore, can provide the cheap passive-type isolation mounting mainly being formed by upper plate, lower plate and passive-type isolation mounting to the user who does not need expensive active vibration isolation arrangement.
Then, in the situation that user wishes, in vertical or substantially horizontal, this passive-type isolation mounting is applied to control force, by being that the first or second control force bringing device is arranged on the upper plate that passive-type isolation mounting is installed by function expanding device, can carry out the feedback control in vertical or substantially horizontal.Thus, can be with the price corresponding with needed performance to only needing to carry out the user of the feedback control in either direction in vertical and substantially horizontal or having had the user who carries out the necessity of this feedback control that active isolation mounting is provided.
Further, in the situation that user wishes this passive-type isolation mounting to be applied to control force in vertical and substantially horizontal, by first and second control force bringing device is all arranged on upper plate, can carry out the feedback control in vertical and substantially horizontal.
Because the vibration transducer of the first control force bringing device modularization together with actuator, the vibration transducer of the second control force bringing device modularization together with actuator, so this first and second control force bringing device itself just has the less structure of size in the space being accommodated between upper plate and lower plate.Therefore,, even if described first and second control force bringing device is installed, also can make whole isolation mounting be configured to the structure that size is very little.
As mentioned above, can provide possess the desired performance of user, the less and cheap isolation mounting of size.
The invention of second aspect, in the invention of described first aspect, be characterised in that: described the first control force bringing device has cover cap, this cover cap is used for receiving described the first vibration transducer with the axle of this first vibration transducer towards the state of vertical, and described the first actuator is accommodated in to the downside of this first vibration transducer; Described the first actuator has fixed block and movable piece, this fixed block is fixed on described upper plate via described cover cap, this movable piece, by moving back and forth and contact described lower plate along vertical with respect to this fixed block, applies control force along vertical to described equipment; Described fixed block and described movable piece are bound up by rubber elastomer.
According to the invention of second aspect, the gears integrated actuator forming because use fixed block and movable piece to be connect by rubber elastomer is as the first actuator, so can suppress to pass to fixed block one side from the vibration of base portion via movable piece by this rubber elastomer.And, the type (fixed block is arranged on upper plate and movable piece is arranged on the type in lower plate) not forming as one from fixed block and movable piece is different, only, by the cover cap that is accommodated with fixed block is arranged on upper plate, can appends the first control force bringing device is set.Therefore, installation exercise is fairly simple.
The invention of the third aspect, be described first or the invention of second aspect in, be characterised in that: described the second control force bringing device has cover cap, this cover cap is used for receiving described the second vibration transducer with the axle of this second vibration transducer towards the state of substantially horizontal, and described the second actuator is accommodated in to the downside of this second vibration transducer; Described the second actuator has fixed block and movable piece, this fixed block is fixed on described upper plate via described cover cap, this movable piece by the parallel to an axis with respect to this fixed block and this second vibration transducer move back and forth and contact described passive-type isolation mounting, carry out along continuous straight runs described equipment applied to control force; Described fixed block and described movable piece are bound up by rubber elastomer.
According to the invention of the third aspect, the same with the invention of second aspect, can suppress pass to fixed block one side from the vibration of base portion (being arranged on the passive-type isolation mounting in lower plate) by rubber elastomer, and it be fairly simple to append installation exercise when the second control force bringing device is set.
At this, for carrying out correct vibration isolation control, vibration transducer and actuator are configured to conventionally: the advance and retreat axle of the axle of vibration transducer and actuator is located along the same line.But, in the invention of the third aspect, the second vibration transducer and the second actuator are piled up up and down, in other words, be configured to the axle of the second vibration transducer and the advance and retreat axle of the second actuator is parallel, to guarantee that the second control force bringing device is accommodated in to (in order to avoid the second control force bringing device is expanded too extensively in the horizontal direction) in the space between upper plate and lower plate.
As mentioned above, in the present invention, by isolation mounting compactness itself, even therefore configuration the second vibration transducer and the second actuator, because the interval of the advance and retreat axle of the axle of the second vibration transducer and the second actuator on above-below direction is narrower, so also can carry out the vibration isolation control that precision is higher.
Therefore, can realize the second control force bringing device compactness, also can carry out in the horizontal direction correct vibration isolation control.
The invention of fourth aspect, be in the invention of the either side in described first～third aspect, described isolation mounting is configured to: the control gear that is used for controlling described control force bringing device can be arranged in this lower plate or from this lower plate and take off to be accommodated in mode in the space between described upper plate and described lower plate.
According to the invention of fourth aspect, to the isolation mounting take passive-type isolation mounting as basic device except can applying first and second control force bringing device, can also apply the control gear for controlling these control force bringing devices, and this control gear is configured in the space being accommodated between upper plate and lower plate.Therefore, the isolation mounting with the function being roughly equal to existing isolation mounting can be configured to the structure that size is very little.
The invention of the 5th aspect, be in the invention of described fourth aspect, in described passive-type isolation mounting, described the first control force bringing device, described the second control force bringing device and the space of described control gear between described upper plate and described lower plate, be configured to be seen as two row two row on plan view.
According to the invention of the 5th aspect, by four devices are configured to be seen as two row two row on plan view, can be without the space utilizing lavishly between upper plate and lower plate, by isolation mounting compactness.
-invention effect-
According to isolation mounting involved in the present invention, because take adopt cost than the low helical spring passive-type isolation mounting of pneumatic spring as basic device, so can provide the cheap passive-type isolation mounting that comprises upper plate, lower plate and passive-type isolation mounting to the user who does not need active vibration isolation arrangement; In the situation that user wishes, in vertical and/or substantially horizontal, passive-type isolation mounting is applied to control force, by be that the first and/or second control force bringing device is arranged on upper plate by function expanding device later, can provide the active isolation mounting that can carry out the feedback control in vertical and/or substantially horizontal.
Because the vibration transducer of the first control force bringing device modularization together with actuator, the vibration transducer of the second control force bringing device modularization together with actuator, so described first and second control force bringing device itself just has the less structure of size in the space being accommodated between upper plate and lower plate.Therefore, the whole isolation mounting that comprises described first and second control force bringing device can be configured to very little structure.
Accompanying drawing explanation
Fig. 1 is the stereogram that the related isolation mounting of present embodiment is shown.
Fig. 2 is side view, for explanation schematically illustrates the state that with respect to floor, equipment is carried out vibration isolation support with isolation mounting.
Fig. 3 is the stereogram that the situation of independent use spring unit is shown.
Fig. 4 is the stereogram that the situation that is used in combination spring unit, vertical unit and control unit is shown.
Fig. 5 is the stereogram that the situation that is used in combination spring unit, horizontal cell and control unit is shown.
Fig. 6 is the plan view of perspective isolation mounting.
Fig. 7 is the side view of seeing along arrow A in Fig. 6.
Fig. 8 is the side view of seeing along arrow B in Fig. 6.
Fig. 9 is the stereogram that spring unit is shown.
Figure 10 is the longitudinal sectional view of spring unit.
Figure 11 (a) is the side view that vertical unit is shown.
Figure 11 (b) is the side view that vertical unit is shown.
Figure 12 is the longitudinal sectional view that the structure of vertical voice coil motor is schematically shown.
Figure 13 (a) is the side view that horizontal cell is shown.
Figure 13 (b) is the side view that horizontal cell is shown.
Figure 14 is for isolation mounting being described and being used for detecting the wiring skeleton diagram of the annexation between acceleration transducer and the power supply of floor vibration.
Figure 15 is that the isolation mounting while schematically support platform being shown configures routine plan view.
Figure 16 is that the isolation mounting while schematically support platform being shown configures routine plan view.
Description of reference numerals
1 isolation mounting
3 spring units (passive-type isolation mounting)
5 vertical unit (the first control force bringing device)
7 horizontal cells (the second control force bringing device)
9 control units (control gear)
11 top boards (upper plate)
13 helical springs
15 vertical acceleration transducers (the first vibration transducer)
17 horizontal acceleration sensors (the second vibration transducer)
21 substrates (lower plate)
25 vertical voice coil motors (the first actuator)
27 horizontal voice coil motors (the second actuator)
31 precision equipments (equipment)
35 first cover caps (cover cap)
37 second cover caps (cover cap)
41 platforms
51 floors (base portion)
60 magnet cases (yoke) (fixed block)
62 pole pieces (pole piece) (fixed block)
64 magnetites (fixed block)
68 coils (movable piece)
78 coil carriers (movable piece)
80 diaphragms (rubber elastomer)
Embodiment
Below, with reference to accompanying drawing to embodiments of the present invention detailed explanation in addition.Should illustrate, below be example in essence to description preferred embodiment, and intention is not limited the present invention, application of the present invention or its purposes.Should illustrate, in following figure, omit the diagram that makes the wiring that control unit 9 is electrically connected with vertical and horizontal cell 5,7, to allow accompanying drawing easily understand.
Fig. 1 is the stereogram that the related isolation mounting of present embodiment is shown.As shown in Figure 2, this isolation mounting 1 is used for installing the such precision equipments 31 easy to be affected by vibration of precision type instrument such as the manufacturing installation, atom force microscope (AFM:atomic force microscope), laser microscope of such as semiconductor applications, and this precision equipment 31 is set to as far as possible and the state of the vibration isolation from floor (base portion) 51.In other words, illustrated isolation mounting 1 carries out vibration isolation support with respect to floor 51 to the platform 41 that is placed precision equipment 31.In this isolation mounting 1, be vibration isolation object with platform 41 and the precision equipment 31 (also comprising strictly, the top board 11 of the following stated etc.) that is arranged on this platform 41.
This isolation mounting 1 comprises top board (upper plate) 11, substrate (lower plate) 21 and spring unit (passive-type isolation mounting) 3, these top board 11 support platforms 41, this substrate 21 is placed on floor 51, this spring unit 3 is being arranged between this top board 11 and this substrate 21 on these two plates 11,21, with respect to floor 51, the platform 41 for placing precision equipment 31 is carried out to vibration isolation support with helical spring 13, this isolation mounting 1 is take this spring unit 3 as basic device.
That is to say, as shown in Figure 3, in this isolation mounting 1, also can carry out vibration isolation support with respect to floor 51 to vibration isolation object as the passive-type isolation mounting mainly being formed by top board 11, substrate 21 and spring unit 3 even if take off vertical described later and horizontal cell 5,7 etc.
This isolation mounting 1 is configured to: can to this top board 11, vertical unit (the first control force bringing device) 5 be releasably installed in the mode being accommodated in the space between top board 11 and substrate 21, this vertical unit 5 is vertical acceleration transducer (the first vibration transducer) 15 modularizations (becoming one in function) and forming together with vertical voice coil motor (the first actuator) 25, this vertical acceleration transducer 15 is used for detecting the vibration of precision equipment 31 in vertical, this vertical voice coil motor 25 is used for, along vertical, precision equipment 31 is applied to control force.As mentioned above, because vertical unit 5 is that vertical acceleration transducer 15 and vertical voice coil motor (following, to be called vertical VCM) 25 together modularization formed, so vertical unit 5 itself just has the structure that size is less.Further, this isolation mounting 1 is configured to: can the control unit (control gear) 9 that be used for controlling vertical unit 5 be releasably installed to this substrate 21 in the mode being accommodated in the space between top board 11 and substrate 21.
As shown in Figure 4, in the time that hope obtains larger vibration isolating effect in vertical, if using vertical unit 5 and control unit 9 be arranged on isolation mounting 1 as the function expanding device of the Function Extension that is used for making this isolation mounting 1.Installing under the state of this vertical unit 5, can with vertical acceleration transducer 15, to the precision equipment 31 being supported by helical spring 13, the vibrational state in vertical detects, again testing result fed back and driven vertical VCM25, reducing the vibration of precision equipment 31 in vertical.
Also have, this isolation mounting 1 is configured to: can to this top board 11, horizontal cell (the second control force bringing device) 7 be releasably installed in the mode being accommodated in the space between top board 11 and substrate 21, this horizontal cell 7 is horizontal acceleration sensor (the second vibration transducer) 17 modularizations and forming together with horizontal voice coil motor (the second actuator) 27, this horizontal acceleration sensor 17 is used for detecting precision equipment 31 vibration in the horizontal direction, and this horizontal voice coil motor 27 is used for along continuous straight runs precision equipment 31 is applied to control force.As mentioned above, because horizontal cell 7 is that horizontal acceleration sensor 17 and horizontal voice coil motor (following, to be called horizontal VCM) 27 together modularization formed, so horizontal cell 7 itself just has the structure that size is less.
As shown in Figure 5, in the time that hope obtains larger vibration isolating effect in the horizontal direction, as long as horizontal cell 7 and control unit 9 are arranged on this isolation mounting 1 as function expanding device.Installing under the state of this horizontal cell 7, can detect precision equipment 31 vibrational state in the horizontal direction with horizontal acceleration transducer 17, feed back and the horizontal VCM27 of driving with Detection of content again, reduce precision equipment 31 vibration in the horizontal direction.
Say again, as shown in Figure 1, in the time that hope all obtains larger vibration isolating effect in vertical and substantially horizontal, if using vertical and horizontal cell 5,7 and the control unit 9 that is used for controlling these unit 5,7 be arranged on this isolation mounting 1 as function expanding device.
-configuration of unit-
Then, configuration and the mounting structure of spring unit 3, vertical unit 5, horizontal cell 7 and control unit 9 are illustrated.Should illustrate, in the following description explanation be with basic device be spring unit 3 to be used in combination function expanding device be vertical and horizontal cell 5,7 and be used for the situation of the control unit 9 of controlling these unit 5,7, but use separately the situation of spring unit 3 and to be used in combination configuration and mounting structure in the situation of vertical unit 5 or horizontal cell 7 also roughly the same with spring unit 3.
As shown in Figure 6, in this isolation mounting 1, in spring unit 3, vertical unit 5, horizontal cell 7 and control unit 9 space between top board 11 and substrate 21, be configured to be seen as two row two row on plan view.Say in more detail, spring unit 3 is configured in the upper right in Fig. 6; Vertical unit 5 is adjacent to be configured in the lower right in Fig. 6 with this spring unit 3; Horizontal cell 7 is adjacent to be configured in the upper left side in Fig. 6 with this spring unit 3; Control unit 9 is configured in the left bottom in Fig. 6, is positioned at the position at the diagonal angle of this spring unit 3.
As mentioned above, by four unit 3,5,7,9 are configured to be seen as two row two row on plan view, can, without the space utilizing lavishly between top board 11 and substrate 21, isolation mounting 1 be configured to the structure less in plan view size.This structure and modularization together with vertical acceleration transducer 15 and vertical VCM25 and measure that horizontal acceleration sensor 17 and horizontal VCM27 together modularization are configured to the structure that size is less by vertical and horizontal cell 5,7 etc. are worked good, even although consequently in existing active isolation mounting less also generally having long 230mm is above, wide 230mm is above, more than high 180mm size, the related isolation mounting 1 of present embodiment can be configured to length and all be suppressed at the less structure of size below 100mm.
Further, as shown in FIG. 6 and 7, vertical unit 5 is arranged on top board 11 from downside by two bolt 36a, 36a in two bolt hole 35d, 35d inserting and be screwed in from below lip part 35c, the 35c of the first cover cap 35 that is formed at this vertical unit 5; Vertical unit 5 by along continuous straight runs connect this first cover cap 35 (insertion is formed in through hole 35e, the 35e on the first cover cap 35) two stay bolt 36b, 36b ... (not shown in Fig. 6) is also arranged on the cover cap 53 of spring unit 3.Because vertical unit 5 can be fastened on top board 11 from downside with bolt as mentioned above, so when wishing that passive-type isolation mounting is appended when this vertical unit 5 is set, can be later this vertical unit 5 be arranged on top board 11 constant in the case of being placed with the state of platform 41 grades.Should illustrate, vertical unit 5 is not fixed on substrate 21.
On the other hand, as shown in Fig. 6 and Fig. 8, horizontal cell 7 is arranged on top board 11 from downside by the bolt 38a that inserts and be screwed in from below the bolt hole 37c of lip part of the second cover cap 37 that is formed at this horizontal cell 7; Horizontal cell 7 by along continuous straight runs connect this second cover cap 37 four stay bolt 38b, 38b ... also be arranged on the cover cap 53 of spring unit 3.Because horizontal cell 7 can be fastened on top board 11 from downside with bolt as mentioned above, thus the same with vertical unit 5, can be later this horizontal cell 7 be arranged on top board 11 constant in the case of being placed with the state of platform 41 grades.Should illustrate, the same with vertical unit 5, horizontal cell 7 is not fixed on substrate 21.
As shown in Figure 6, control unit 9 by insert and be screwed in from top four bolt hole 9a, 9a being formed at base plate ... in four bolts be arranged on substrate 21 from upside; Control unit 9 is not fixed on top board 11.
Should illustrate, although in the example shown in Fig. 6, by vertical and horizontal cell 5,7 is configured to this vertical and horizontal cell 5,7 is adjacent with spring unit 3, but the unit (vertical unit 5, control unit 9 etc.) beyond the horizontal cell 7 of the contact wall 23c of portion of contact component as described below 70 contact spring unit 3 might not need to be configured to adjacent with spring unit 3.
Then, respectively the structure of spring unit 3, vertical unit 5, horizontal cell 7 and control unit 9 is illustrated.
-spring unit-
As shown in FIG. 9 and 10, spring unit 3 comprises matrix 23, height adjusting block 33, helical spring 13, centrepin 43 and cover cap 53, this matrix 23 is arranged on substrate 21, this height adjusting block 33 is along with the rotation of carrying out take above-below direction axle as axle moves up and down with respect to matrix 23, this helical spring 13 is placed in this height adjusting block 33 via ball bearing unit 63, the upper end of this helical spring 13 always contacts top board 11, the underpart of this centrepin 43 is fixed on matrix 23, subtract and rush rubber (surgeless rubber) 73 and be arranged on the upper end of this centrepin 43, this cover cap 53 is used for protecting helical spring 13.
Be formed with thread pockets 23e at the central position of this matrix 23, this thread pockets 23e is clipped between two through hole 23d, 23d, this thread pockets 23e has diameter than large circular sections of the diameter of these through holes 23d, 23d, is formed with the internal thread of worm screw on the perisporium of this thread pockets 23e.Be formed with the patchhole 23f that connects along the vertical direction matrix 23 in the central authorities of this thread pockets 23e.The screw division 33a of height adjusting block 33 inserts and is screwed in this thread pockets 23e, and centrepin 43 inserts in this patchhole 23f.
Also have, in this matrix 23, another different from a pair of across corner that is formed with notch is provided with to the bight in across corner the contact wall 23c of portion that the contact component 70 of the horizontal VCM27 of horizontal cell 7 contacts, and as shown in Figure 6, another bight (being positioned at a bight of substrate 21) in described another across corner is cut off with approximate circle arcuation on plan view, is used for substrate 21 to be fixed on bolt in 51 grades of floor etc. to can be easy to install.
Described height adjusting block 33 is formed as combining up and down the shape of cover portions 33b and screw division 33a, this cover portions 33b is bottom tube-like, the underpart of described helical spring 13 is accommodated in the inner side of this cover portions 33b, this screw division 33a is cylindric, is formed with the outside thread of worm screw on this screw division 33a.Described screw division 33a inserts and is screwed in the thread pockets 23e of matrix 23, described height adjusting block 33 is rotated and be arranged on freely on this matrix 23.
In the bottom of this cover portions 33b, in a circumferential direction across being uniformly-spaced formed with four patchhole 33c, 33c, 33c, 33c.Working tool is inserted in this patchhole 33c, make height adjusting block 33 take the axle that extends along the vertical direction as axle rotates, this height adjusting block 33 is moved up and down with respect to matrix 23.According to being accommodated in this height adjusting block 33 and the resiliently deformable of the helical spring 13 of upper end in contact top board 11 is rotated height adjusting block 33, this height adjusting block 33 is moved with respect to matrix 23 along the vertical direction, the lower end position of helical spring 13 is adjusted thus, and keeping the height of top board 11 is roughly certain height.As mentioned above, be not to adopt the automatic height adjustment that uses electric motor etc., but adopt manually operated type height regulating mechanism, this is also for the compactness of the related isolation mounting 1 of present embodiment is made contributions.
Should illustrate, because Height Adjustment is to be positioned over the state on platform 41 at precision equipment 31, be that helical spring 13 is subject to carrying out under the state of load, so the friction between the lower end of helical spring 13 and the bottom of cover portions 33b is stronger, if be difficult to allow height adjusting block 33 be rotated just armrest is moving.Therefore, between the lower end of helical spring 13 and the bottom of cover portions 33b, dispose ball bearing unit 63, guarantee that to reduce described friction height adjusting block 33 successfully rotates, this ball bearing unit 63 be with become up and down a pair of circular resin cover 63b, 63b clamp multiple steel ball 63a, 63a ... and form.Further, be formed with at the central position of height adjusting block 33 (more correctly saying the bottom of cover portions 33b and screw division 33a) the patchhole 33d that connects along the vertical direction this height adjusting block 33, centrepin 43 inserts in this patchhole 33d.
Described centrepin 43 inserts the patchhole 33d of circular ball bearing unit 63, height adjusting block 33 and the patchhole 23f of matrix 23 successively from top, is fixed on matrix 23, as shown in Figure 9 by the nut that is screwed in this underpart.Further, be formed with bolt head 43a in the upper end portion of centrepin 43, described in subtract and rush rubber 73 and be arranged on this bolt head 43a.
This subtracts and rushes rubber 73 and be made up of the rubber that is approximate circle tubular, embed in the annulus of helical spring 13, by being pressed and the annulus inner peripheral surface of contact spring along the vertical direction, make thus the vibration attenuation of helical spring 13, or suppress to impact (surging) (phenomenon that amplitude increases in the time that the external force frequency that passes to helical spring 13 approaches the natural frequency of spring itself).As mentioned above, this subtracts and rushes rubber 73 to be arranged on the bolt head 43a of the centrepin 43 being fixed on matrix 23 upper, thereby this subtracts, and to rush the height of rubber 73 always constant.In other words, even if allow height adjusting block 33 rotate take the axle that extends along the vertical direction as axle, this height adjusting block 33 moves thus along the vertical direction, the extending amount of helical spring 13 changes, subtract position and the shape (with the contact condition of spring annulus inner peripheral surface) of rushing rubber 73 and also can not change, thereby can maintain by subtracting and rush rubber 73 and produce certain attenuation.
Should illustrate, if allow height adjusting block 33 continue to rise, eventually can likely cause height adjusting block 33 to depart from from matrix 23, height adjusting block 33 separates with matrix 23.But the related isolation mounting 1 of present embodiment is configured to: when height adjusting block 33 rises and will exceed established amount time, the bolt head 43a that ball bearing unit 63 can contact center pins 43.Therefore,, in this isolation mounting 1, height adjusting block 33 can not depart from from matrix 23.That is to say, centrepin 43 not only plays to support and subtracts the effect of rushing rubber 73, and plays the effect that height adjusting block 33 departs from from matrix 23 that suppresses.
Described cover cap 53 is used for protecting helical spring 13, and this cover cap 53 is formed as being square at plan view, and there is the rounded space of section in the inside of this cover cap 53 have a top prism tubular, this cover cap 53 is arranged on top board 11 as mentioned above.Should illustrate, as shown in Figure 9, the bight that is positioned at an angle of top board 11 in cover cap 53 is approximate circle arcuation at plan view and is cut off, can easily install for top board 11 being fixed on to bolt on platform 41 etc.
Central authorities at the top board of this cover cap 53 are formed with the through hole 53b that connects along the vertical direction this cover cap 53, contact the lower surface of top board 11 under the state of the upper end portion of helical spring 13 in it inserts this through hole 53b.Further, the internal diameter of cover cap 53 is larger than the external diameter of height adjusting block 33, is configured to: do not hinder the height adjusting block 33 that a part is accommodated in this cover cap 53 and move up at upper and lower.In other words, this cover cap 53 under it and helical spring 13 and the discontiguous state of height adjusting block 33, be arranged on the top board 11 that supported by helical spring 13 lower surface on.
-vertical unit-
As shown in Figure 11 (a), on the first cover cap 35, be formed with opening upside recess 35a upward and the downside and the opening downside recess 35b downward that are positioned at this upside recess 35a.As shown in Figure 11 (b), vertical acceleration transducer 15 is accommodated under the state of vertical at axle in upside recess 35a, vertical VCM25 is accommodated in downside recess 35b, and the axle of vertical acceleration transducer 15 and the advance and retreat axle (reciprocating shaft of movable piece) of this vertical VCM25 are located along the same line.Thus, vertical acceleration transducer 15 and vertical VCM25 become one via the first cover cap 35.As mentioned above, because vertical acceleration transducer 15 and vertical VCM25 are configured to the axle of vertical acceleration transducer 15 and the advance and retreat axle of vertical VCM25 is located along the same line, so this vertical unit 5 can carry out correct vibration isolation control.
Exported the signal of the relative acceleration (vibrational state of top board 11) that represents top board 11 by this vertical acceleration transducer 15, receive the control unit 9 of this signal to vertical VCM25 output control signal, consequently contact component 70 contact substrate 21 as shown in Figure 7, thus vibration isolation object is applied to the control force that weakens this vibration of vibration isolation object in vertical.
Then, with reference to Figure 12 to the detailed explanation in addition of the structure of vertical VCM25.Vertical VCM25 is divided into fixed block and movable piece, and this fixed block is fixed on top board 11 via the first cover cap 35, and this movable piece is assembled into contactless state on the other hand, is driven and is moved along vertical by electromagnetic force.Fixed block is made up of iron magnet case 60, discoid magnetite 64 and pole piece 62, this iron magnet case 60 doubles as cover cap, be formed as tip circle tubular, opening downward, this discoid magnetite 64 and this pole piece 62 are accommodated in the 60a of barrel portion of this magnet case 60 with concentric shape, and are fixed on the 60b of top by bolt 84.
At the top of this magnet case 60 60b, be formed with four screws across interval in a circumferential direction, this magnet case 60 by axle head be screwed in respectively bolt in a screw in these four screws 74,74 ... be bound up on described support 45.This support 45 is joined together with the jut 15a being saliently arranged on the cylinder shell outer circumferential face of vertical acceleration transducer 15, and vertical acceleration transducer 15 is fixed on magnet case 60.
On the other hand, movable piece is made up of coil carrier 78, coil 68 and contact component 70, this coil carrier 78 is made up of resinous wood, be and have round-ended cylinder shape, this coil 68 be by wire intertwist on the 78a of cylindrical wall portion of this coil carrier 78 and form, this contact component 70 is arranged on the bottom wall portion 78b of coil carrier 78.Coil carrier 78 opening upward, the axle center that is configured to this coil carrier 78 is consistent with the axle center of magnet case 60.The 78a of cylindrical wall portion of this coil carrier 78 surrounds magnetite 64 and pole piece 62 with contactless state, and this coil carrier 78 is surrounded with contactless state by the 60a of cylindrical wall portion of magnet case 60.
The outer peripheral portion contact that embeds the O shape circle 76 of pole piece 62 in peripheral groove is configured to the inner peripheral surface of the 78a of cylindrical wall portion of the consistent coil carrier in axle center 78 as mentioned above, keep thus the value that is spaced apart regulation between the outer circumferential face of this pole piece 62 and magnetite 64 and the inner peripheral surface of the 78a of cylindrical wall portion of coil carrier 78, the interval between the outer circumferential face of the 78a of cylindrical wall portion of this coil carrier 78 and the inner peripheral surface of the 60a of cylindrical wall portion of magnet case 60 also remains the value of regulation.
Also have, the bottom wall portion 78b of coil carrier 78 is formed as thicker discoid of sheet metal thickness, in the lower surface of this bottom wall portion 78b near being bound up by silicone rubber masking sheet (rubber elastomer) 80 between the position of periphery and the lower end surface of the 60a of cylindrical wall portion of magnet case 60.The whole week of this diaphragm 80 is significantly bending between the bottom wall portion 78b of coil carrier 78 and the 60a of cylindrical wall portion of magnet case 60, allow that thus coil carrier 78 relatively moves along vertical, and, the mutual antiphase ground, position, both sides of clamping this coil carrier 78 is bending, allows that thus this coil carrier 78 shakes.
And, the upper surface of the bottom wall portion 78b of the lower end contact coil carrier 78 of helical spring 66, the top of this helical spring 66 embeds in the recess 62a of pole piece 62.This helical spring 66 is carried out precompression in advance, even so that under the state that does not apply external force also by coil carrier 78 depress.Thus, this helical spring 66 not only can produce control force to the direction that top board 11 jack-up are come, and also can produce control force to the direction that this top board 11 is left behind.Pre compressed magnitude is according to the interval determination between the upper surface of the bottom wall portion 78b of the lower surface of pole piece 62 and coil carrier 78.In the present embodiment, because being roughly certain value for keeping the height of top board 11 by height adjusting block 33, so pre compressed magnitude also remains roughly certain value.
That is to say, coil carrier 78 for movable piece in vertical VCM25 is supported with contactless state by the magnet case 60 for fixed block etc. via O shape circle 76 and diaphragm 80, this coil carrier 78 moves back and forth along vertical due to electromagnetic force, between substrate 21 and top board 11, apply along the vertical direction control force, and be supported for and can shake by along continuous straight runs.
Further, in the bottom wall portion 78b of the coil carrier 78 moving back and forth along vertical near interior Monday side position be formed with the 78c of round base portion heaving downwards.The rounded recess 78d of section is positioned at the substantial middle position of the lower surface of this base part 78c, and the contact component 70 that is used for contact substrate 21 and transmits control force can be extracted and can embed and insert in this recess 78d.This contact component 70 is that the resinous woods such as such as MC Nylon (MC nylon) (TM trade mark) are formed as cylindric and this columned top (lower end in accompanying drawing) part is formed as to spherical shape protuberance, and forms jut in cardinal extremity (upper end in accompanying drawing) part and form.The internal diameter of the external diameter of this jut and recess 78d is roughly equal.Pressing plate 82 overlaps on the lower surface of base part 78c, has the roughly equal circular hole of external diameter of the part except jut in external diameter and contact component 70 in this pressing plate 82, and jut is pushed down by the peripheral portion of this circular hole, prevents that thus contact component 70 from deviating from.
Should illustrate, the spring constant that is configured in the helical spring 72 in recess 78d is than by many spring constant height of the helical spring 66 of coil carrier 78 depress, thereby this helical spring 72 shrinks conventionally hardly.This helical spring 72 is used for just shrinking in the time that excessive external force makes pole piece 62 contact with coil carrier 78, stops this pole piece 62 and this coil carrier 78 impaired.
As mentioned above, because the one-piece type vertical VCM25 that uses fixed block and movable piece to be bound up by silicone rubber masking sheet 80 makes actuator, so can suppress to pass to fixed block from the vibration on floor 51 via movable piece by diaphragm 80.And, the type (fixed block is arranged on top board 11 and movable piece is arranged on the type on substrate 21) not becoming one from fixed block and movable piece is different, as long as the first cover cap 35 that is accommodated with fixed block is arranged on top board 11 and just can appends vertical unit 5 is set, therefore, installation exercise is very simple.
-horizontal cell-
As shown in Figure 13 (a), in the second cover cap 37, be formed with opening towards the upside recess 37a of substantially horizontal be positioned at the downside of this upside recess 37a and the opening downside recess 37b towards the direction identical with this upside recess 37a.As shown in Figure 13 (b), horizontal acceleration sensor 17 is accommodated under the state of substantially horizontal at axle in upside recess 37a, the support 47 engaging with the jut 17a being saliently arranged on the cylinder shell outer circumferential face of this horizontal acceleration sensor 17 by bolton on the second cover cap 37.On the other hand, horizontal VCM27 is accommodated in downside recess 37b, and the axle of horizontal acceleration sensor 17 and the advance and retreat axle of horizontal VCM27 are parallel to each other, this horizontal VCM27 by bolton on the second cover cap 37.Thus, horizontal acceleration sensor 17 and horizontal VCM27 become one via the second cover cap 37.
Exported the signal of the relative acceleration (vibrational state of top board 11) that represents top board 11 by this horizontal acceleration sensor 17, receive the control unit 9 of this signal to horizontal VCM27 output control signal, consequently the contact wall 23c of portion of the matrix 23 of contact component 70 contact spring unit 3, applies to vibration isolation object the control force that weakens this vibration isolation object vibration in the horizontal direction thus.
Should illustrate, except following 2, the structure of the structure of horizontal VCM27 and vertical VCM25 is roughly the same, and these different 2 are: be used for that the magnet case of horizontal VCM27 60 is fixed on to the support 47 that jut 17a that the bolt on the second cover cap 37 do not establish with the housing outer circumferential face upper process of the cylinder shell at horizontal acceleration sensor 17 engages and be bound up; What contact component 70 contacted is not substrate 21, but the contact wall 23c of portion of the matrix 23 of spring unit 3.Therefore, omit the explanation of the structure of horizontal VCM27.And, use the symbol identical with all parts that forms vertical VCM25 to represent all parts of the horizontal VCM27 of formation.
At this, for carrying out correct vibration isolation control, vibration transducer and actuator are configured to conventionally: the advance and retreat axle of the axle of vibration transducer and actuator is located along the same line.But, in the present embodiment, be configured to horizontal acceleration sensor 17 and horizontal VCM27 and be piled up up and down (the advance and retreat axle of the axle of horizontal acceleration sensor 17 and horizontal VCM27 is parallel), to guarantee that horizontal cell 7 is accommodated in to (in order to avoid horizontal cell 7 is expanded too extensively in the horizontal direction) in the space between top board 11 and substrate 21.As mentioned above, in the present invention, by isolation mounting 1 compactness itself, even configuration level acceleration transducer 17 and horizontal VCM27 as mentioned above, because the interval of the advance and retreat axle of the axle of horizontal acceleration sensor 17 and horizontal VCM27 on above-below direction is narrower, so also can carry out the vibration isolation control that precision is higher.
-control unit-
As shown in figure 14, each basal disc 19,29 via wiring 81 be electrically connected from the independent power supply 61 of isolation mounting 1, this power supply 61 is powered to each basal disc 19,29.Further, the first basal disc 19 is electrically connected with vertical acceleration transducer 15 and vertical VCM25 via not shown wiring; The second basal disc 29 is electrically connected with horizontal acceleration sensor 17 and horizontal VCM27 via other not shown wiring.The first basal disc 19 will feed to vertical acceleration transducer 15 and vertical VCM25 from the electric power of power supply 61.On the other hand, input the electrical signal relevant with the acceleration of vibration isolation object in vertical (particularly, current value) by vertical acceleration transducer 15 to this first basal disc 19.Equally, the second basal disc 29 will feed to horizontal acceleration sensor 17 and horizontal VCM27 from the electric power of power supply 61.On the other hand, input the electrical signal relevant with vibration isolation object acceleration in the horizontal direction (particularly, current value) by horizontal acceleration sensor 17 to this second basal disc 29.
For example, in the time of the active vibration isolation control that acceleration is fed back, these basal discs 19, 29 to each voice coil motor 25, the following feedback control amount of 27 output, that is: will be from each acceleration transducer 15, the acceleration X of the 17 vibration isolation objects that obtain " and feedback control gain Gm multiply each other and the feedback control amount GmX that obtains ", by to acceleration X " the feedback control amount GcX ' that carries out an integration and obtain and the speed X ' that obtains and feedback control gain Gc multiply each other, and by acceleration X " the feedback control amount GkX that carries out twice integration and obtain and the displacement X that obtains and feedback control gain Gk multiply each other.
Also have, as shown in figure 14, in the time that hope further improves anti-vibration performance, also can carry out following feedforward control, that is: append the 3rd independent from isolation mounting 1, to detect the vibrational state on floor 51 acceleration transducer (feed forward element) 71 is set, via wiring 91, the 3rd acceleration transducer 71 is electrically connected with each basal disc 19,29, the signal sending according to the 3rd acceleration transducer 71 is inferred the vibration that conveys to vibration isolation object, applies the control vibration of offsetting this reception and registration vibration with vertical and horizontal VCM25,27.
-usage mode-
In the time supporting precision equipment 31 with the isolation mounting 1 forming as mentioned above, example as shown in figure 15, prepare four isolation mountings 1 of installing spring unit 3, vertical unit 5, horizontal cell 7 and control unit 9, take 1 as four some support platform 41 of these four isolation mountings.Can apply the control force that reduces the vibration in vertical with four vertical VCM25, in such event; Can apply the control force that reduces the vibration of precision equipment 31 on directions X with two (upper left side in accompanying drawing and lower right) horizontal VCM27,27; Can apply the control force that reduces precision equipment 31 vibration in the Y direction with two (left bottom in accompanying drawing and upper right) horizontal VCM27,27.
Also have, in the time that the necessity that reduces the vibration in substantially horizontal is lower, example can be prepared four isolation mountings 1 that only install spring unit 3 as shown in figure 16, do foot with these isolation mountings 1, with four-point supporting platform 41, and the isolation mounting 1 that installs spring unit 3, vertical unit 5 and control unit 9 is configured in to central position, apply the control force that reduces the vibration in vertical with a vertical VCM25.
-effect-
In the present embodiment, to adopt the spring unit 3 of the helical spring 13 that cost is cheaper than pneumatic spring as basic device.Therefore, can provide the cheap passive-type isolation mounting that comprises top board 11, substrate 21 and spring unit 3 to the user who does not need expensive active vibration isolation arrangement.
Also have, in the situation that user wishes, in vertical or substantially horizontal, this spring unit 3 is applied to control force, by being that vertical unit 5 or horizontal cell 7 are arranged on the top board 11 that spring unit 3 is installed by function expanding device, can carry out the feedback control in vertical or substantially horizontal.Thus, can be to only needing to carry out the user of the feedback control in either direction in vertical and substantially horizontal or having had the user of the necessity of carrying out this feedback control to provide active isolation mounting with the price corresponding with needed performance.
Say again, in the situation that user wishes this spring unit 3 to be applied to control force in vertical and substantially horizontal, by vertical and horizontal cell 5,7 are all arranged on top board 11, can carry out the feedback control in vertical and substantially horizontal.
Because the vertical acceleration transducer 15 of vertical unit 5 modularization together with vertical VCM25, the horizontal acceleration sensor 17 of horizontal cell 7 modularization together with horizontal VCM27, so these unit 5,7 have the structure that size is less, can be accommodated in the space between top board 11 and substrate 21.Therefore,, even if described vertical and horizontal cell 5,7 are installed, also whole isolation mounting 1 can be configured to the structure that size is very little.
In sum, can provide possess the desired performance of user, the less and cheap isolation mounting 1 of size.
(other mode of execution)
The present invention is not limited to mode of execution, only otherwise depart from its spirit or major character, just can implement the present invention in other various modes.
In said embodiment, carry out fastening with bolt to top board 11, substrate 21, spring unit 3, vertical unit 5, horizontal cell 7 and control unit 9.But, can adopt so-called one by formula embedded type connecting structure.
Further, what illustrate in said embodiment is, with four above isolation mountings 1, precision equipment 31 is carried out to the example of vibration isolation support, but is not limited to this.As long as supporting structure can not become unsettled structure, as long as the quantity of isolation mounting 1, more than three, just can be carried out vibration isolation support to precision equipment 31.
Say again, in said embodiment, with connecting up, vertical unit 5 and horizontal cell 7 are coupled together with control unit 9, but be not limited to this.Can be configured to wireless topology.
Further, in said embodiment, spring unit 3, vertical unit 5, horizontal cell 7 and control unit 9 these four cell locations are become on plan view, to be seen as two row two row, but be not limited to this.Also can be used in combination other unit; Can also be configured to be seen as for example two row three row on plan view according to combined element number.
Say, what adopt in said embodiment is manually operated type height regulating mechanism again, but only otherwise hinder compactness and cost degradation, is just not limited to this.For example, also can adopt the automatic height regulating mechanism that uses small-sized electric motor etc.
As mentioned above, described mode of execution is all only example going up in all senses, must not make according to above-mentioned mode of execution the explanation of restriction to the present invention.And the distortion and changing that belongs to the equivalency range of the scope described in claims is all in scope of the present invention.
-industrial applicability-
In sum, the present invention carries out isolation mounting of vibration isolation support etc. of great use with respect to base portion to being placed the platform of equipment to being used for.
Claims (5)
1. an isolation mounting, this isolation mounting comprises upper plate, lower plate and passive-type isolation mounting, this upper plate support platform, this lower plate is placed on base portion, this passive-type isolation mounting is being arranged between this upper plate and this lower plate on this two plate, this passive-type isolation mounting carries out vibration isolation support with respect to this base portion to the equipment being placed on this platform with helical spring, it is characterized in that:
Described isolation mounting is configured to: can to this upper plate, the first control force bringing device and/or the second control force bringing device be releasably installed in the mode being accommodated in the space between described upper plate and described lower plate, this the first control force bringing device comprises the first vibration transducer, the first actuator and for receiving the first cover cap of this first vibration transducer and this first actuator, this first vibration transducer is used for detecting the vibration of described equipment in vertical, this first actuator is used for, along vertical, described equipment is applied to control force, this the second control force bringing device comprises the second vibration transducer, the second actuator and for receiving the second cover cap of this second vibration transducer and this second actuator, this second vibration transducer is used for detecting the vibration in the horizontal direction of described equipment, this second actuator is used for along continuous straight runs described equipment is applied to control force,
The vibrational state of the described equipment detecting according to described the first vibration transducer and/or the second vibration transducer obtains feedback control amount and exports to described the first actuator and/or the second actuator, and the control gear of controlling described the first control force bringing device and/or the second control force bringing device is configured to be accommodated in mode in the space between described upper plate and described lower plate and is arranged in this lower plate or from this lower plate and takes off.
2. isolation mounting according to claim 1, is characterized in that:
Described first cover cap of described the first control force bringing device is used for receiving described the first vibration transducer with the axle of this first vibration transducer towards the state of vertical, and described the first actuator is accommodated in to the downside of this first vibration transducer;
Described the first actuator has fixed block and movable piece, this fixed block is fixed on described upper plate via described the first cover cap, this movable piece, by moving back and forth and contact described lower plate along vertical with respect to this fixed block, applies control force along vertical to described equipment;
Described fixed block and described movable piece are bound up by rubber elastomer.
3. isolation mounting according to claim 1, is characterized in that:
Described second cover cap of described the second control force bringing device is used for receiving described the second vibration transducer with the axle of this second vibration transducer towards the state of substantially horizontal, and described the second actuator is accommodated in to the downside of this second vibration transducer;
Described the second actuator has fixed block and movable piece, this fixed block is fixed on described upper plate via described the second cover cap, this movable piece by the parallel to an axis with respect to this fixed block and this second vibration transducer move back and forth and contact described passive-type isolation mounting, carry out along continuous straight runs described equipment applied to control force;
Described fixed block and described movable piece are bound up by rubber elastomer.
4. isolation mounting according to claim 2, is characterized in that:
Described second cover cap of described the second control force bringing device is used for receiving described the second vibration transducer with the axle of this second vibration transducer towards the state of substantially horizontal, and described the second actuator is accommodated in to the downside of this second vibration transducer;
Described the second actuator has fixed block and movable piece, this fixed block is fixed on described upper plate via described the second cover cap, this movable piece by the parallel to an axis with respect to this fixed block and this second vibration transducer move back and forth and contact described passive-type isolation mounting, carry out along continuous straight runs described equipment applied to control force;
Described fixed block and described movable piece are bound up by rubber elastomer.
5. according to the isolation mounting described in any one in claim 1 to 4, it is characterized in that:
In described passive-type isolation mounting, described the first control force bringing device, described the second control force bringing device and the space of described control gear between described upper plate and described lower plate, be configured to be seen as two row two row on plan view.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010174998A JP5504092B2 (en) | 2010-08-04 | 2010-08-04 | Vibration isolator |
| JP2010-174998 | 2010-08-04 |
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| Publication Number | Publication Date |
|---|---|
| CN102374258A CN102374258A (en) | 2012-03-14 |
| CN102374258B true CN102374258B (en) | 2014-05-21 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110186660.XA Active CN102374258B (en) | 2010-08-04 | 2011-07-05 | Vibration isolation device |
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| Country | Link |
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| JP (1) | JP5504092B2 (en) |
| KR (1) | KR101290919B1 (en) |
| CN (1) | CN102374258B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102776898B (en) * | 2012-08-03 | 2014-07-16 | 中国联合工程公司 | Vibration-proof structure of independent foundation and construction method thereof |
| CN103226361A (en) * | 2013-04-28 | 2013-07-31 | 上海宏力半导体制造有限公司 | Method and structure of controlling Z direction of optical platform with active vibration isolation system |
| KR101604269B1 (en) * | 2014-09-23 | 2016-03-18 | (주)대일시스템 | Active vibration control apparatus |
| CN104500647B (en) * | 2015-01-04 | 2016-12-07 | 哈尔滨工程大学 | Double-deck main passive dynamo-electric integrated form isolation mounting |
| US10955530B2 (en) * | 2016-12-23 | 2021-03-23 | Cepton Technologies, Inc. | Systems for vibration cancellation in a lidar system |
| KR101977309B1 (en) * | 2017-11-17 | 2019-05-10 | (주)대일시스템 | Active vibration control apparatus |
| CN113883353B (en) * | 2021-09-18 | 2023-11-03 | 苏州东菱智能减振降噪技术有限公司 | Six-degree-of-freedom pipeline vibration damper and vibration damping method |
| EP4345358A1 (en) * | 2022-09-30 | 2024-04-03 | Etel S.A. | Active anti-vibration system for a precision motion system |
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| JPH0180132U (en) * | 1987-11-17 | 1989-05-30 | ||
| JP3282302B2 (en) * | 1992-09-30 | 2002-05-13 | 株式会社島津製作所 | Exciter or vibration remover |
| JP3372975B2 (en) * | 1992-11-30 | 2003-02-04 | 倉敷化工株式会社 | Active vibration isolation method and vibration isolation device |
| JPH0712173A (en) * | 1993-06-23 | 1995-01-17 | Showa Electric Wire & Cable Co Ltd | Active vibration insulating device |
| JP3450633B2 (en) * | 1997-02-19 | 2003-09-29 | キヤノン株式会社 | Anti-vibration device |
| JP4363026B2 (en) | 2002-10-23 | 2009-11-11 | オイレス工業株式会社 | Active dynamic vibration absorber |
| DE102004044616B4 (en) * | 2004-09-13 | 2009-08-13 | Halcyonics Gmbh | Sensor / actuator module and vibration isolation device |
| JP2007078122A (en) * | 2005-09-15 | 2007-03-29 | Kurashiki Kako Co Ltd | Vibration damper |
| DE202005019904U1 (en) * | 2005-12-19 | 2006-03-09 | Halcyonics Gmbh | Sensor/actuator module especially for use in vibration insulation device has audio neodymium loud speaker provided as electromagnetic converter for actuator and constructed as double lift magnet |
| KR100870108B1 (en) * | 2007-05-01 | 2008-11-25 | 한국과학기술원 | Active passive vibration isolator using voice coil motor |
| JP5139960B2 (en) * | 2008-11-27 | 2013-02-06 | 倉敷化工株式会社 | Active vibration isolator and actuator used therefor |
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2010
- 2010-08-04 JP JP2010174998A patent/JP5504092B2/en active Active
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2011
- 2011-07-05 CN CN201110186660.XA patent/CN102374258B/en active Active
- 2011-07-25 KR KR1020110073684A patent/KR101290919B1/en active IP Right Grant
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| 磁悬浮控制的主动式隔振平台研究;龙志强等;《宇航学报》;20030930;第24卷(第5期);第510-514页 * |
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Also Published As
| Publication number | Publication date |
|---|---|
| JP5504092B2 (en) | 2014-05-28 |
| JP2012036924A (en) | 2012-02-23 |
| CN102374258A (en) | 2012-03-14 |
| KR101290919B1 (en) | 2013-07-29 |
| KR20120022572A (en) | 2012-03-12 |
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