JP3282302B2 - Exciter or vibration remover - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibration test in which a measuring instrument or the like is affected by vibration. The present invention relates to a six-degree-of-freedom vibration device or vibration elimination device for removing various vibrations.

[0002]

2. Description of the Related Art In general, a vibration device applies a desired vibration to a measuring instrument or the like to examine the influence of the vibration on a measurement result, and when the object is not a true rigid body, the vibration of an object wall and a flexible portion inside the object is examined. Vibration elimination devices are used to perform tests such as destruction due to vibration, and vibration elimination devices are generated in these devices during experiments that need to be performed without vibration, such as experiments using optical elements and exposure processes of semiconductor manufacturing equipment. Used to eliminate vibration.

[0003] In a conventional vibrating device or vibration removing device having six degrees of freedom, a method of arranging an actuator is as follows.
(1) As shown in FIG.
, Two in the X-axis rotation axis Xθ direction, one in the Y-axis direction, Y
A configuration in which two actuators are arranged in the direction of the rotation axis Yθ of the shaft, four in the direction of the Z axis that is the direction of gravity, and two actuators in the direction of the rotation axis Zθ of the Z axis, or (2) driving as shown in FIG. One in the X-axis direction, two in the Xθ direction, one in the Y-axis direction,
A configuration is adopted in which two actuators are arranged in the Yθ direction, one in the Z axis direction, and two in the Zθ direction. Further, as shown in FIG. 9, one arrangement method of the vibration sensor is one in the X-axis direction, two in the Xθ direction, one in the Y-axis direction, two in the Yθ direction, one in the Z-axis direction, and one in the Zθ direction. In which two vibration sensors are arranged. Then, by combining the actuator arrangements (1) and (2) with the arrangement of the vibration sensor, the X, Y, and Z axis directions and Xθ, Y
It functions as a vibration device that detects vibrations in the θ and Zθ directions and gives desired vibrations, and as a vibration removing device that removes vibrations.

[0004]

However, in the method of arranging the actuator (1), the combined force of the generated force of the actuator can be applied to a position very close to the center of gravity of the surface plate. In addition, since the size of the actuator is generally large, there is a problem that an accurate action point of the actuator on the surface plate cannot be specified, and the center of gravity of the surface plate cannot be accurately driven.

[0005] The method of arranging the actuators in (2) can reduce the number of actuators. However, in addition to the same problems as in the method of arranging the actuators in (1), the number of actuators in the Z-axis direction can be reduced. As a result, the driving force cannot be given a sufficient margin with respect to the load, and as a result, it is difficult to accurately control the vibration or the vibration removal.
Further, when a vibration sensor is arranged as shown in FIG.
Because it is difficult to arrange the vibration sensor and the actuator in a straight line due to the volume occupied by the actuator, the vibration detection position and the drive position of the actuator differ, and accurate control of excitation or vibration elimination is easy. Was not. In this arrangement of vibration sensors, the minimum number of vibration sensors required for detection of six degrees of freedom is six, but nine sensors must be used, which makes cost reduction difficult. There was a problem of becoming.

The present invention has been made in order to solve these problems, and has one actuator and one vibration sensor in the X-axis direction, two in the Y-axis direction, and four in the vertical Z-axis direction. By providing a total of seven, a six-degree-of-freedom vibration device or vibration capable of accurately performing vibration or vibration elimination in the X, Y, and Z axis directions and the rotation axis Xθ, Yθ, and Zθ directions of the surface plate. It is an object to provide a removal device.

[0007]

The configuration of the present invention will be described with reference to FIG. In order to achieve the above object, a vibration device or a vibration removing device according to the present invention detects vibration of the surface plate by a vibration sensor installed on the surface plate 1, and drives an actuator using a signal of the vibration sensor. Orthogonal X, Y, and Z axis directions of the surface plate and respective rotation axes Xθ, Yθ, Z
It actively controls vibrations having six degrees of freedom in the θ direction, one in the X-axis direction (XA, XS), two in the Y-axis direction (YA1, YA2, YS1, YS2), and the Z-axis. Four in the direction (ZA1, ZA2, ZA3, ZA4, ZS1, Z
S2, ZS3, ZS4) The actuators and vibration sensors provided, and the four actuators (ZA) provided with the vibration in the Xθ direction and the vibration in the Yθ direction in the Z axis direction.
1, ZA2, ZA3, ZA4) and a vibration sensor (ZS1,
Vibration control means for controlling the vibration of the Zθ axis by using two actuators (YA1, YA2) and vibration sensors (YS1, YS2) arranged in the Y-axis direction using ZS2, ZS3, ZS4). 2 is provided.

[0008]

When vibration occurs in the surface plate 1, vibration in the Z-axis direction is detected by the signal sum zS1 + zS2 + zS3 + zS4 of the detection sensors ZS1, ZS2, ZS3 and ZS4.
The vibration in the θ direction is (zS1 + zS4) − (zS2 + zS
3) and the vibration in the Yθ direction is (zS1 +
zS2)-(zS3 + zS4). The vibration in the Y-axis direction is the sum of the signals yS1 + y of the vibration sensors YS1, YS2.
At S2, the vibration in the Zθ direction is detected at yS2-yS1. The vibration in the X-axis direction is detected by a detection signal xS of the vibration sensor XS. Then, the vibration control means 2
Using the detection signal in the direction of the degree of freedom, the actuator is designed so that the surface plate 1 has a desired vibration when it is used as a vibration device, and the vibration of the surface plate 1 becomes zero when it is used as a vibration removing device. ZA1, ZA2, ZA3, ZA4,
YA1, YA2, and XA are respectively driven.

[0009]

An embodiment of the present invention will be described below with reference to FIG.

Reference numeral 1 denotes a surface plate on which a measuring instrument or the like to be subjected to a vibration test is mounted when used as a vibrating device, and when it is used as a vibration removing device, it is necessary to carry out experiments without vibration. For example, a semiconductor manufacturing apparatus for performing an experiment using an optical element or performing an exposure process is mounted. A vibration sensor for detecting vibration of the surface plate 1 and an actuator for applying a predetermined urging force to the surface plate 1 are provided below the surface plate 1. The vibration sensor has four sensors ZS1 for detecting vibration in the Z-axis direction,
ZS2, ZS3, ZS4 and Y-axis direction vibration detection 2
There are a total of seven sensors YS1, YS2 and a sensor XS for detecting vibrations in the X-axis direction, and the actuators are four actuators ZA1, ZA2, ZA3, ZA4 and Y for urging the platen in the Z-axis direction. It is composed of seven actuators YA1 and YA2 that urge the platen in the axial direction, and seven actuators XA that urge the platen in the X-axis direction. As shown in FIG. 1, the actuators ZA1, ZA2, ZA3, and ZA4 are perpendicular to the surface plate 1, that is, in the Z-axis direction.
1, YA2 is in the short side direction of the surface plate 1, that is, in the Y-axis direction, and the actuator XA is in the long side direction of the surface plate 1, that is, X
The platen 1 is arranged to bias the platen 1 in the axial direction. These vibration sensors and actuators are disposed so as to be aligned in the axial direction.

FIG. 2 shows an embodiment of a vibration sensor and an actuator disposed below the surface plate 1, wherein S is a vibration sensor embedded in the surface plate 1, and A is embedded in the surface plate 1. An electromagnetic actuator configured by loosely fitting a coil A3 into a loose fitting hole A4 formed by a magnetic body A2 and a magnet A1. The actuator may be of a pneumatic or hydraulic type to control large weights, and a pneumatic actuator and an electromagnetic actuator may be combined to enable control of large weights and to control vibration over a wide range of frequencies. May be used. Fig. 3 shows an electromagnetic actuator and a pneumatic actuator (composed of an air spring and an air damper)
Is an example in the case of combining. 8
Reference numeral 0 denotes a base having a cylindrical shape, which has a hollow portion inside, and the hollow portion is separated from the first chamber 81 and the second chamber 81 by a separation wall 85 having a through hole 83 narrowed down. Room 82-2
It is divided into rooms. An air input / output portion 86 is formed on the cylindrical side surface of the first chamber 81, from which air flows into the first chamber 81.
Supplied to The upper part of the first chamber 81 is covered with an elastic body 84 whose end is fixed to the side wall of the first chamber 81,
Thus, the first chamber 81 forms an air spring 80a. The lower portion of the elastic body 84 is supported by the elastic support 88, so that the mounting portion of the drive shaft 92 is maintained in a planar shape. Further, the second chamber 82 is maintained at a predetermined pressure by the air press-fitted through the through hole 83 of the separation wall 85, thereby constituting an air damper 80b as a whole. Also 87
Reference numeral denotes a support for mounting the drive shaft 92 of the base 1 on the base 80.

Numeral 90 denotes a surface plate 1 shown in FIG. 1 and a table 91 for mounting an object on the upper surface thereof, and a drive shaft for transmitting the urging force of the air spring 80a and the air damper 80b to the table 91 below. The end of the drive shaft 92 and the drive shaft 92 has a loose fitting hole 94 for loosely fitting the coil 93b. The platen 90 is mounted on the support portion 87 of the base 1 when the air spring 80a is not driven, and is supported via the elastic portion 84 by the urging force of the air spring 80a when driven.

Reference numeral 93 denotes a coil actuator,
And the coil 9 loosely fitted in the loose fitting hole 94 of the surface plate 1.
3b and a magnet 93a and a magnetic body 93c embedded in the side wall of the loose fitting hole 94 of the surface plate 1. The coil actuator 93 is driven by an electromagnetic force generated by a predetermined current supplied to the coil 93b.
Energize. The air spring 80a, the air damper 80b, and the coil actuator 93 correspond to the actuator shown in FIG.

In FIG. 1, reference numeral 2 denotes a vibration control means.
Receiving signals from a plurality of vibration sensors arranged below the
Calculates vibration with 6 degrees of freedom, and based on the calculation result, platen 1
Of 6 degrees of freedom are controlled. For example, when used as a vibrating device, the actuator is driven and controlled so that the vibrations of six degrees of freedom detected by the respective vibration sensors become predetermined desired vibrations, and used as a vibration removing device. In such a case, the actuator is driven and controlled in a direction opposite to the vibration with six degrees of freedom detected by the respective vibration sensors.

Here, the operation of the vibration control means 2 will be described with reference to the flowchart of FIG. First, in S1, the signals of the vibration sensors ZS1, ZS2, ZS3, ZS4, zS1, z
After taking in S2, zS3, and zS4, the process proceeds to S2 and Z
Performs axial vibration control. The vibration in the Z-axis direction is detected as a sum signal of the vibration sensors ZS1, ZS2, ZS3, ZS4, and specifically, the following drive signal Zs is supplied to each actuator. Zs = Dz (t) -K
(ZS1 + zS2 + zS3 + zS4) K is a proportionality constant, Dz (t) is a function for giving a target vibration in the Z-axis direction, and t represents time. When the present invention is used as a vibration removing device, Dz (t) = 0
Thus, the actuator is urged in the direction opposite to the vibration direction.

In step S3, vibration control of the surface plate 1 in the Xθ direction is performed. The vibration in the Xθ direction is obtained by subtracting the sum signal of Z2 and Z3 from the sum signal of Z1 and Z4, (zS1 + zS4) − (z
S2 + zS3). That is, FIG. 5 is a schematic view of the surface plate 1 observed from the X-axis direction, and zS1 + zS4
Is approximately twice the vibration component dR of the right end point R, and zS2 + z
Since S3 represents a value obtained by substantially doubling the vibration component dL of the left end point L, the value of (zS1 + zS4)-(zS2 + zS3) represents a value substantially proportional to the vibration component in the Xθ direction.
Therefore, the vibration control in the Xθ direction is performed by the actuator ZA.
1, ZA2, ZA3, and ZA4, the following drive signals Xθs1 are used as ZA1 and ZA4, and Xθs2 is used as ZA2,
Supply to ZA3. Xθs1 = Dxθ (t) −K1 ｛(zS1 + zS4) −
(ZS2 + zS3)｝ Xθs2 = −Dxθ (t) + K1 ｛(zS1 + zS4)
− (ZS2 + zS3)｝ K1 is a proportionality constant, and Dxθ (t) is a function that gives a target vibration in the Xθ direction. When the present invention is used as a vibration removing device, Dxθ (t) = 0
Thus, the actuator is urged in the direction opposite to the vibration direction of Xθ. In S4, vibration control of the surface plate 1 in the Yθ direction is performed. According to the same principle as that of S3, the vibration in the Yθ direction is represented by z
A signal obtained by subtracting the sum signal of zS3 and zS4 from the sum signal of S1 and zS2 can be detected as (zS1 + zS2)-(zS3 + zS4). Therefore, in the vibration control in the Yθ direction, the following drive signal Yθs1 is transmitted to ZA1 and ZA2 using the actuators ZA1, ZA2, ZA3 and ZA4.
2 is supplied to ZA3 and ZA4. Yθs1 = Dyθ (t) −K2 ｛(zS1 + zS2) −
(ZS3 + zS4)｝ Yθs2 = −Dyθ (t) + K2 ｛(zS1 + zS2)
− (ZS3 + zS4)｝ K2 is a proportionality constant, and Dyθ (t) is a function that gives a target vibration in the Yθ direction. When the present invention is used as a vibration removing device, Dyθ (t) = 0
Thus, the actuator is urged in the direction opposite to the vibration direction of Yθ. Next, in S5, the vibration sensors YS1, Y
After capturing the signal of S2, the process proceeds to S6, where the vibration control in the Y-axis direction is performed. The vibrations in the Y-axis direction are the vibration sensors YS1, Y
S2 is detected as a sum signal ys1 + ys2, and specifically, the following drive signal Ys is supplied to each actuator. Ys = Dy (t) -K3 (yS1 + yS2) K3 is a proportionality constant, Dy (t) is a function for giving a target vibration in the Y-axis direction, and t represents time. When the present invention is used as a vibration removing device, Dy (t) =
It becomes 0, and the actuator is urged in the direction opposite to the vibration direction. In S7, vibration control of the surface plate in the Zθ direction is performed. The vibration in the Zθ direction can be detected by a difference signal between YS2 and YS1, that is, yS2-yS1. That is, FIG.
Is a schematic diagram of the surface plate 1 observed from the Z-axis direction, and yS2
Represents the vibration component dR of the right end point R, and YS1 represents the vibration component dL of the left end point L. Therefore, the value of yS2−yS1 represents a value substantially proportional to the vibration component in the Zθ direction. Therefore, the vibration control in the Zθ direction is performed by the actuators YA1, Y
The following drive signals Zθs1 and Zθs2 are supplied to YA1 and YA2 using A2. Zθs1 = Dzθ (t) −K4 (yS2−yS1) Zθs2 = −Dzθ (t) + K4 (yS2−yS1) K4 is a proportional constant, and Dzθ (t) is a function that gives a target vibration in the Zθ direction. is there. When the present invention is used as a vibration removing device, Dzθ (t) = 0, and the actuator is urged in a direction opposite to the vibration direction of Zθ. Next, after the signal of the vibration sensor XS is fetched in S8, the process proceeds to S9 to perform the vibration control in the X-axis direction. X
The axial vibration drives the actuator XA in a direction to control the XS signal. Specifically, the following drive signal Xs is supplied to each actuator. Xs = Dx (t) -K5 * xSK5 is a proportionality constant, where Dx (t) is a function that gives a target vibration in the X-axis direction, and t indicates time. When the present invention is used as a vibration removing device, Dx (t) =
It becomes 0, and the actuator is urged in the direction opposite to the vibration direction. In the above embodiments, 6
Although the vibration control of the degree of freedom is performed separately, the control in the Z-axis direction, the Xθ direction, and the Yθ direction using the vibration sensors ZS1, ZS2, ZS3, and ZS4 for detecting the vibration in the Z-axis direction can be performed simultaneously. . In this case, the following drive signals are output to the actuators ZA1, ZA2, ZA3, ZA4 instead of the control of S2, S3, S4 in the flowchart shown in FIG. zs1 = Zs + Xθs1 + Yθs1 zs2 = Zs + Xθs2 + Yθs1 zs3 = Zs + Xθs2 + Yθs2 zs4 = Zs + Xθs1 + Yθs2 Similarly, the Y-axis direction using the sensors YS1 and YS2 that detect the Y-axis direction can be controlled at the same time. In this case, S in the flowchart shown in FIG.
6. Instead of the control of S7, the actuators YA1, YA
The following drive signals are output to the second. ys1 = Ys + Zθs1 ys2 = Ys + Zθs2 As shown in the above embodiments, according to the present invention, one actuator in the X-axis direction, two in the Y-axis direction, and four in the Z-axis direction, a total of seven actuators and vibration sensors. , X, Y, and Z-axis directions, and vibration control in the rotation axes Xθ, Yθ, and Zθ directions or vibration removal control can be accurately performed.
Since the number of actuators in the axial direction is large, there is a margin in driving force even for a large load, so that stable control can be performed.

In the above embodiment, the proportional control is performed with respect to the control method. However, the present invention is not limited to this. For example, an optimal regulator may be used,
A D control method may be used, and any control method that can sufficiently control vibration may be used.

The vibration sensor shown in the embodiment of the present invention may be, for example, an acceleration sensor or a speed sensor.
The signal may be differentiated or integrated for use.

[0019]

According to the present invention, one Y-axis in the horizontal X-axis direction
Two actuators in the axial direction and four in the vertical Z-axis direction, a total of seven actuators and vibration sensors, provide vibration control in the X, Y, and Z-axis directions and vibration control in the rotation axes Xθ, Yθ, and Zθ directions, or vibration elimination. Since the control can be performed accurately and the number of actuators in the Z-axis direction, which is the direction of gravity, is large, there is a margin in the driving force even for a large load, so that stable control can be performed.

The vibration of the surface plate has six degrees of freedom in the X, Y, and Z axis directions and in the Xθ, Yθ, and Zθ directions, and the minimum number of vibration sensors is six. Since vibration control with six degrees of freedom can be performed by seven sensors close to each other, it is possible to provide a low-cost vibrating device or vibration removing device with a simple structure.

Further, as described above, since the number of actuators is small, a space is allowed, and it is easy to arrange the actuator and the vibration sensor on a straight line. As a result, the direction in which the vibration is detected coincides with the driving direction of the actuator, and accurate and rapid vibration control can be performed.

[Brief description of the drawings]

FIG. 1 is a diagram showing an example in which seven actuators and sensors according to one embodiment of the present invention are arranged.

FIG. 2 is a view showing one embodiment of a vibration sensor and an actuator disposed below a surface plate.

FIG. 3 shows an embodiment in which an electromagnetic actuator and a pneumatic actuator (composed of an air spring and an air damper) are combined.

FIG. 4 is a flowchart showing the operation of the vibration control means of the present invention.

FIG. 5 shows a vibration component in the Xθ direction by observing the surface plate from the X-axis direction.

FIG. 6 shows a vibration component in the Yθ direction by observing the surface plate from the Z-axis direction.

FIG. 7 is a view showing a conventional vibration device or vibration removing device using twelve actuators.

FIG. 8 is a diagram showing a conventional vibrating device or vibration removing device using nine actuators.

FIG. 9 is a diagram showing an example of a conventional vibration device or vibration removing device using nine vibration sensors.

[Explanation of symbols]

1 ····· Stable 2 ····· Vibration control means XS, YS1, YS2, ZS1, ZS2, ZS3, ZS
4. Vibration sensor XA, YA1, YA2, ZA1, ZA2, ZA3, ZA
4. Actuator

Continuation of the front page (51) Int.Cl. ⁷ Identification symbol FI G12B 9/08 G01M 7/00 BC (72) Inventor Kiyoto Kobayashi 1 Nishinokyokuwabaracho, Nakagyo-ku, Kyoto Shimazu Works Sanjo Plant (56 References JP-A-4-317745 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) G01M 7/02 B06B 1/02 F16F 15/02 G01H 17/00 G05D 19/02 G12B 9/08

Claims (1)

(57) [Claims] 1. A vibration sensor detects vibration of a surface plate,
By driving the actuator using the signals, vibrations of 6 degrees of freedom in the horizontal orthogonal X and Y axis directions of the surface plate, the vertical Z axis direction and the respective rotation axes Xθ, Yθ and Zθ directions are actively added or In a vibration removing device or a vibration removing device, one actuator is provided in the X-axis direction, two is provided in the Y-axis direction, and four are provided in the Z-axis direction, and the vibration in the Xθ direction and the Yθ direction Vibration is added or removed using four actuators and vibration sensors arranged in the Z-axis direction, and the vibration in the Zθ direction is added or removed using two actuators and vibration sensors arranged in the Y-axis direction. A vibration control means, and a vibration removing device or a vibration removing device.