CN102365814B - Rotary type vibration wave driving apparatus - Google Patents
Rotary type vibration wave driving apparatus Download PDFInfo
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- CN102365814B CN102365814B CN201080014784.3A CN201080014784A CN102365814B CN 102365814 B CN102365814 B CN 102365814B CN 201080014784 A CN201080014784 A CN 201080014784A CN 102365814 B CN102365814 B CN 102365814B
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Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/16—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
- H02N2/163—Motors with ring stator
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/005—Mechanical details, e.g. housings
- H02N2/0065—Friction interface
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/103—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
Abstract
A rotary type vibration wave driving apparatus which is capable of reducing local wear of a contacting member and of reducing performance deterioration due to long term operation is provided. The apparatus includes a electro-mechanical energy conversion element, an vibration member fixed to the electro-mechanical energy conversion element and vibrated by a voltage being supplied to the electro-mechanical energy conversion element, and a moving member being brought into contact with the vibration member and frictionally driven by the vibration, and is configured such that the moving member includes a supporting portion extended from the main body portion of the moving member, and a contacting portion extended from the supporting portion and being brought into contact with the vibration member, and such that each of the supporting portion and the contacting portion is configured to be elastically deformable in the rotation axis direction of the moving member.
Description
Technical field
The present invention relates to a kind of rotary type vibration wave driving apparatus.
Background technology
Substantially, the oscillation drive being applied to vibration wave motor has the vibrating mass forming vibration wave wherein and the moving-member contacted with vibrating mass mineralization pressure, and by making vibrating mass and moving-member frictionally be driven by vibration wave and obtain actuating force.
So the contact portion be arranged between vibrating mass and moving-member is passed through in distortion thus is contacted with vibrating mass repeatedly while following the vibration of vibrating mass and be separated with vibrating mass and obtain actuating force.
The form of the prior art of the vibration wave motor of the type illustrates (see No. S61-224882nd, Japanese Patent Application) in figure 9 a.In figure 9 a, vibrating mass 122 is formed as annular, and multiple projection 122b is circumferentially formed in the upper part of vibrating mass 122 the whole of vibrating mass 122.
Moving-member 123 contacts with vibrating mass 122 mineralization pressure by means of compacting part (not shown).The annular body portion 123a that moving-member 123 is formed by elastomeric element, the flange portion 123b extended from main part 123a and contact portion 123c structure, described contact portion extends from the end sections of flange portion 123b and has the friction surface come in contact with vibrating mass 122.
Piezoelectric ceramic 121 adhesive is attached to the basal surface of vibrating mass 122, and generates row ripple when the dephased alternating voltage of tool puts on piezoelectric ceramic 121 from the drive circuit (not shown) for CD-ROM drive motor betwixt.When the direct of travel of row ripple is positive direction (arrow see in Fig. 9 A) in θ direction, become the negative direction in θ direction by the moving direction of the moving-member 123 of friction-driven.
Be configured to there is flange portion in this case at moving-member 123, when in the cylindrical coordinate system centered by the rotation of moving-member at the plan view formed by radial direction and vertical direction time the direction of track of vibration that generates in vibrating mass 122 substantially consistent with the direction of the displacement of the contact portion of moving-member 123.When the direction of oscillation trajectory is substantially consistent with the direction of displacement, slip in the radial direction on friction surface can be reduced to prevent the reduction of efficiency.
In addition, the moving-member of the vibration wave motor in the form of another prior art be configured in (see No. 2002-315364th, Japanese Patent Application) shown in Fig. 9 C.
In Fig. 9 C, formed with vibrating mass and to contact and multiple contact portion 133c with predetermined spring rate are located at moving-member 133 place with one heart.
Owing to being provided with multiple contact portion 133c, therefore contact area increases, and the surface pressing of contact portion reduces.Thus, the wearing and tearing of contact portion 133c are reduced to improve the durability of vibration wave motor.
But the contact portion of the vibration wave motor of the prior art form shown in Fig. 9 A as above is configured to have the cantilever segment being with predetermined contact width.
The contact portion 123c of moving-member 123 is formed with vibrating mass 122 and contacts, as shown in fig. 9b.
In this case, only neighbouring the formation with vibrating mass 122 under strong pressure of the external diameter side edge portions of the friction surface of contact portion 123c contacts, and therefore whole friction surface does not form homogeneous contact with vibrating mass 122.
So, even if in order to the object of the durability improving vibration wave motor increases the contact area of contact portion 123c to reduce to put on the surface pressing of friction surface by expanding contact portion 123c simply, contact area also can not increase and surface pressing also can not reduce, and reason is that friction surface is only formed with vibrating mass 122 and contacts near the external diameter side edge portions of friction surface.
In addition, when the width of contact portion 123c increases, even if the wearing and tearing aggravation near the external diameter side edge portions of contact portion 123c and the whole friction surface of contact portion 123c and vibrating mass 122 are formed and contact, the part that the direction of the oscillation trajectory of the wherein vibrating mass 122 of friction surface is not consistent with the direction of the displacement of contact portion 123c also increases.
This causes the reduction of efficiency and the generation of squeal, and also causes wearing and tearing.Therefore, must reduce the pressure putting on vibrating mass on the whole, even if make also to make friction stablize at the outside diameter edge portion of contact portion 123c, at this outside diameter edge portion, marginal portion is formed with vibrating mass and contacts under strong pressure.
Output torque can be regarded as substantially proportional with institute applied pressure.Therefore, when the pressurizing force is less, the output torque of vibration wave motor is also limited.
On the other hand, in the contact portion 133c of the vibration wave motor of the prior art form shown in Fig. 9 C as above, be provided with multiple contact portion, and therefore can increase contact area to improve the durability of vibration wave motor.
In addition, the direction of the displacement of each contact portion can be made consistent with the direction of the oscillation trajectory of vibrating mass, make to reduce the slip in the radial direction on friction surface.
But each in contact portion 133c has the cantilever segment of the vibration wave motor being similar to the prior art form shown in Fig. 9 A as above.Therefore, according to the contact condition between vibrating mass as shown in fig. 9b and contact portion 133c, may concentrated wear be caused, thus reduce the performance of vibration wave motor.
As mentioned above, in the structure of the contact portion of the vibration wave motor of routine, the problem that the durability that there is vibration wave motor reduces due to the concentrated wear of contact portion.
Summary of the invention
Consider the problems referred to above, the object of this invention is to provide a kind of can reduce contact component concentrated wear and the rotary type vibration wave driving apparatus that can reduce because performance that long period of operation causes reduces.
The present invention will provide a kind of rotary type vibration wave driving apparatus, and it is by structure as described below.
According to the present invention, can realize a kind of can reduce contact component concentrated wear and the rotary type vibration wave driving apparatus that can reduce because performance that long period of operation causes reduces.
Other feature reference accompanying drawing of the present invention will become apparent from the following detailed description of exemplary embodiment.
Accompanying drawing explanation
Fig. 1 is the sectional view of the structure for describing the oscillation drive according to the first embodiment of the present invention.
Fig. 2 is the enlarged partial sectional figure according to the moving-member shown in Fig. 1 of the first embodiment of the present invention.
Fig. 3 is the view that a kind of state is shown, to be formed each other in this condition contact according to the vibrating mass shown in Fig. 1 of the first embodiment of the present invention with moving-member.
Fig. 4 A and Fig. 4 B illustrates the view being respectively used to the comparative example describing such situation, wherein in the support section of moving-member and contact portion only one can strain.
Fig. 5 A is the enlarged partial sectional figure of the moving-member of the first modification of oscillation drive according to the first embodiment.
Fig. 5 B is the enlarged partial sectional figure of the moving-member of the second modification of oscillation drive according to the first embodiment.
Fig. 5 C is the enlarged partial sectional figure of the moving-member of the 3rd modification of oscillation drive according to the first embodiment.
Fig. 5 D is the enlarged partial sectional figure of the moving-member of the 4th modification of oscillation drive according to the first embodiment.
Fig. 6 A is the enlarged partial sectional figure of the moving-member of oscillation drive according to a second embodiment of the present invention.
Fig. 6 B is the enlarged partial sectional figure of the moving-member of the first modification of oscillation drive according to the second embodiment.
Fig. 7 A is the enlarged partial sectional figure of the moving-member of oscillation drive according to the third embodiment of the invention.
Fig. 7 B is the enlarged partial sectional figure of the moving-member of oscillation drive according to a fourth embodiment of the invention.
Fig. 7 C is the enlarged partial sectional figure of the moving-member of the first modification according to the 4th embodiment.
Fig. 8 A is the enlarged partial sectional figure of the moving-member of oscillation drive according to a fifth embodiment of the invention.
Fig. 8 B is the enlarged partial sectional figure of the moving-member of the first modification according to the 5th embodiment.
Fig. 9 A is the perspective view of the oscillation drive of prior art form.
Fig. 9 B is the view that a kind of state is shown, the vibrating mass of the oscillation drive of prior art form is formed each other with moving-member and contacts in this condition.
Fig. 9 C is the enlarged partial sectional figure of the moving-member of the oscillation drive of another prior art.
Embodiment
Below, will describe according to embodiments of the invention.
(the first embodiment)
Be formed as annular according to the rotary type vibration wave driving apparatus of the present embodiment shown in Fig. 1, and comprise piezoelectric element 1, vibrating mass 2 and moving-member 3.
Piezoelectric element 1 is energy converting between mechanical element electricity being converted to mechanical quantity, and is connected to vibrating mass 2.
Vibrating mass 2 is metal elastic part, and is constructed by substrate 2a, projection 2b and flange portion 2c, and described flange portion is from substrate 2a extension and for fixing vibrating mass 2.
Projection 2b arranges along the outside diameter of substrate 2a with one heart around the central axis of vibrating mass 2.The surface on moving-member 3 side of projection 2b forms with moving-member 3 surface contacted.
The circular main body portion 3a that moving-member 3 is formed by elastomeric element, support section 3b and have friction surface contact portion 3c structure, described friction surface is formed with the projection 2b of vibrating mass 2 and contacts.
Moving-member 3 contacts with vibrating mass 2 mineralization pressure under being formed at the thrust effect applied by compressing unit (not shown), and by frictionally being driven with the friction of vibrating mass 2.
In oscillation drive, be delivered to the device of oscillation drive outside from the actuating force of moving-member 3 via output shaft or analog, thus drive this external device (ED).
In Fig. 2 of enlarged partial sectional that Fig. 1 is shown, support section 3b is constructed by the first support section 3d and the second support section 3e.
The contact surface of the first support section 3d and vibrating mass 2 extends from main part 3a abreast.Second support section 3e extends vertically from the end sections of the first support section 3d.The contact surface of contact portion 3c and vibrating mass 2 extends from the end sections of the second support section 3e abreast.
Each of support section 3b and contact portion 3c is formed as having spring property on thickness, and has cantilever segment structure.
Thus, each elastically deformable on the rotation direction of moving-member 3 of support section 3b and contact portion 3c is made.In addition, each elastically deformable in the radial direction at moving-member 3 of support section 3b and contact portion 3c is also made.Support section 3b extends to internal side diameter from main part 3a, and contact portion 3c extends to outside diameter from the end sections of support section 3b.
In addition, support section 3b and contact portion 3c is formed as having homogeneous thickness in circumferential direction, makes the friction surface of contact portion 3c be homogeneous in circumferential direction in rotation direction and displacement in the radial direction.In the present invention, radial direction represents the direction perpendicular to rotation direction.
Illustrating that vibrating mass and moving-member are formed in the Fig. 3 of the state contacted each other, driving voltage is applied in the piezoelectric element 1 (not shown in Figure 3) joining vibrating mass 2 to, makes to generate row ripple by routine techniques in the vibrating mass constructed by vibrating mass 2 and piezoelectric element 1.The amplitude of the vibration generated in vibrating mass 2 is set at outside diameter than larger at internal side diameter.
The direction shown in arrow in figure 3 vibrates for the upper surface of the projection 2b of vibrating mass 2, thus drives moving-member 3 via contact portion 3c.
Make the support section 3b of moving-member 3 and each elastically deformable of contact portion 3c, and the displacement of contact portion 3c is set at outside diameter than larger at internal side diameter.Thus, the contact surface of vibrating mass 2 and the friction surface of contact portion 3c are formed each other repeatedly and contact, and the inclination of contact surface of vibrating mass 2 simultaneously and the inclination of the friction surface of contact portion 3c remain parallel to each other.
Therefore, the whole friction surface of contact portion 3c can be formed with vibrating mass 2 and contact.
Thus, the pressure of contact surface on the friction surface of contact portion 3c can be made homogeneous, make the concentrated wear that can reduce to become problem in conventional structure.
In addition, when in conventional structure, the contact portion of moving-member is extended, the part (direction of the oscillation trajectory of vibrating mass is not consistent with the direction of the displacement of contact portion in the part .) of friction surface increases, slip is in radial directions increased, and this causes performance to reduce.
On the other hand, in the present embodiment, as shown in Figure 3, the direction of the displacement of the friction surface of the contact portion 3c of moving-member 3 is substantially consistent with the direction of the oscillation trajectory of vibrating mass 2 on the whole region of friction surface.
Therefore, when by expanding contact portion 3c increase contact area, the durability of oscillation drive can be improved, avoid the reduction (reduction of such as efficiency and the generation of squeal) of performance simultaneously.
, describe the effect of the present embodiment here, each of the wherein support section 3b of moving-member 3 and contact portion 3c is formed as elastically deformable.
As the example will compared with the present embodiment, be illustrated in figures 4A and 4 B such situation respectively, the only elastically deformable wherein in the support section of moving-member and contact portion.
As shown in Figure 4 A, in support section 3b strain and contact portion 3c not strain, the inclination of the contact surface of vibrating mass 2 is not consistent with the inclination of the friction surface of contact portion 3c, and this is similar to the situation of conventional structure.So only the external diameter side edge portions near zone of the friction surface of contact portion 3c is formed with vibrating mass 2 and contacts under forceful action, and the whole friction surface of contact portion 3c does not form homogeneous contact with vibrating mass 2.
This causes being formed with vibrating mass the concentrated wear near the external diameter side edge portions that contacts under forceful action.Thus, the performance of oscillation drive may be lowered.
On the contrary, as shown in Figure 4 B, in contact portion 3c strain and support section 3b not strain, the inclination of the contact surface of vibrating mass 2 becomes with the inclination of the friction surface of contact portion 3c substantially parallel, the whole friction surface of contact portion 3c can be formed with vibrating mass 2 and contact.
But the direction of the displacement of the friction surface of contact portion 3c is not consistent with the direction of the oscillation trajectory of vibrating mass 2, makes to produce slip in radial directions.
This causes the reduction of performance, the reduction of the generation of such as squeal, the reduction of moment of torsion and efficiency.
In the present embodiment, because each of support section 3b and contact portion 3c can strain, therefore the friction surface of contact portion 3c is out of shape the distortion of the support section 3b making to be illustrated in figures 4A and 4 B respectively and the distortion combination with one another of contact portion 3c by this way.
That is, the inclination (described inclination is formed by the distortion of support section 3b) of the friction surface of contact portion 3c can be changed by the distortion of contact portion 3c, thus becomes with the inclination of the contact surface of vibrating mass 2 substantially parallel.
In addition, can on the whole region of the friction surface of the contact portion 3c of moving-member 3, make the direction of the oscillation trajectory of vibrating mass 2 substantially consistent with the direction of the displacement of this friction surface.
Thus, the whole friction surface of contact portion 3c can be formed with vibrating mass 2 and contact.Therefore, the concentrated wear of contact portion 3c can be reduced, and the performance caused due to long period of operation reduces and can be reduced.
It should be noted that in the present embodiment, the support section 3b constructed by the first support section 3d and the second support section 3e is constructed such that the contact surface of the first support section 3d and vibrating mass 2 extends from main part 3a abreast, and the second support section 3e is extended vertically from the first support section 3d.
But, the invention is not restricted to these structures.
Such as, as shown in Figure 5 A, the first support section 13d can extend from main part 13a obliquely towards internal side diameter.
In addition, as shown in Figure 5 B, the second support section 23e can extend from the first support section 23d obliquely towards internal side diameter.In addition, on the contrary, as shown in Figure 5 C, the second support section 33e can extend from the first support section 33d obliquely towards outside diameter.
In addition, as shown in fig. 5d, support section 43b can be constructed by this way by a support section and support section 43b is extended towards internal side diameter obliquely from main part, and contact portion 43c is extended from support section 43b.
When support section tilts as shown in Fig. 5 A, Fig. 5 B, Fig. 5 C and Fig. 5 D, the weight of support section can reduce.Thus, the support section of moving-member and the natural frequency of contact portion raise, and the servo-actuated performance of the vibration about vibrating mass can be enhanced.
It should be noted that in Fig. 5 A, Fig. 5 B, Fig. 5 C and Fig. 5 D, Reference numeral 13a, 13b, 13c, 13d and 13e, Reference numeral 23a, 23b, 23c, 23d and 23e, Reference numeral 33a, 33b, 33c, 33d and 33e, and Reference numeral 43a to 43c, corresponding to the Reference numeral 3a to 3e in Fig. 2.
(the second embodiment)
Be that support section, contact portion and main part are constructed as shown in FIG with the difference of above-mentioned first embodiment according to a second embodiment of the present invention.
Other elements (piezoelectric element 1 and vibrating mass 2) of the present embodiment are identical with those elements corresponding to above-mentioned first embodiment, and therefore their description is omitted.
It should be noted that according to the structure shown in Fig. 6 A of the present embodiment corresponding to the structure shown in Fig. 2 and Fig. 5 A, Fig. 5 B, Fig. 5 C and Fig. 5 D.
In fig. 6, support section 53b and contact portion 53c is formed by metallic plate pressure processing.
Support section 53b and contact portion 53c is manufactured by corrosion resistant plate, and is subject to Quench and temper process to improve durability.
Main part 53a is formed as annular, and main part 53a and support section 53b is engaged with each other, such as, combined by adhesive, solder bonding metal (such as solder), and by the welding such as laser, resistance heating.
Support section 53b and contact portion 53c is formed as having spring property on thickness, makes each elastically deformable on the rotation direction of moving-member 53 of support section 53b and contact portion 53c.In addition, also make support section 53b and contact portion 53c at the elastically deformable in the radial direction of moving-member 53.Support section 53b and contact portion 53c are formed as making the displacement of the contact portion 53c produced when contact portion 53c is formed contact with vibrating mass 2 at outside diameter than larger at internal side diameter.
Thus, the contact surface of vibrating mass 2 and the friction surface of contact portion 53c are formed each other repeatedly and contact, and the inclination of contact surface of vibrating mass 2 simultaneously and the inclination of the friction surface of contact portion 53c remain parallel to each other.Therefore, the whole friction surface of contact portion 53c can be formed with vibrating mass 2 and contact.
Thus, the pressure of contact surface on the friction surface of contact portion 53c can be made homogeneous, make it possible to reduce concentrated wear.
In addition, on the whole region of the friction surface of contact portion 53c, the direction of the displacement of this friction surface is substantially consistent with the direction of the oscillation trajectory of vibrating mass 2.
Thus, when contact portion 53c extended to increase contact area time, the durability of oscillation drive can be improved, avoid the reduction of performance simultaneously, the reduction of such as efficiency and the generation of squeal.
In addition, support section 53b and contact portion 53c can be formed by pressure processing, and main part 53a also can pass through the formation such as pressure processing, sintering, die casting.Therefore, cost and manufacturing time can significantly be reduced with formed the situation of these parts by conventional cut compared with.
In addition, because the precision of the raw-material plate thickness for metallic plate pressure processing is very high, therefore can reduce the flexible change of support section 53b and contact portion 53c, thus allow the stable contact between contact portion 53c and vibrating mass 2.
The structure of first modification of the present embodiment shown in Fig. 6 B corresponds to the structure shown in Fig. 2, Fig. 5 A, Fig. 5 B, Fig. 5 C, Fig. 5 D and Fig. 6 A.
As depicted in figure 6b, attachment portion 63f extends vertically from the outside diameter end sections of support section 63b, and support section 63b and attachment portion 63f joins main part 63a to respectively.When attachment portion 63f is formed as extending from the end sections of support section 63b, when these parts described are subject to Quench and temper process, the distortion of the support section 63b, contact portion 63c and the attachment portion 63f that are integrally formed can be suppressed.
Thus, can reduce for the time of the polishing of the friction surface of high flatness precision finished contact part 63c.
It should be noted that in the present embodiment, Quench and temper process is performed as the surface treatment for improving resistance to wear, but the present invention is not limited thereto.The friction surface of contact portion can be hardened by nitrogen treatment, metal spraying etc.
(the 3rd embodiment)
According to the third embodiment of the invention be that support section, contact portion and main part construct as shown in Figure 7A with the difference of above-mentioned first embodiment.
Other elements (piezoelectric element 1 and vibrating mass 2) of the present embodiment are identical with those elements corresponding to above-mentioned first embodiment, and therefore their description is omitted.
It should be noted that the structure of the present embodiment shown in Fig. 7 A corresponds to the structure shown in Fig. 2, Fig. 5 A, Fig. 5 B, Fig. 5 C, Fig. 5 D, Fig. 6 A and Fig. 6 B.
In fig. 7, contact portion 73c extends to external diameter section side from the second support section 73e, and makes the internal side diameter end sections of contact portion 73c be projected into internal side diameter from the second support section 73e.
Contact portion 73c is significantly less than contact portion 73c from the second support section 73e to the development length of outside diameter to the outstanding length of internal side diameter.
So the whole friction surface of contact portion 73c can be formed with vibrating mass 2 and contact, and this is similar to the first and second embodiments.
In addition, on the whole region of the friction surface of contact portion 73c, the direction of the displacement of this friction surface is substantially consistent with the direction of the oscillation trajectory of vibrating mass 2.
Then, will describe the effect of the present embodiment, wherein the second support section 73e is formed on outside diameter relative to the end sections of contact portion 73c.
When contact portion 73c is extended so that when improving the durability of oscillation drive, direction and this expansion of the displacement of the friction surface of contact portion 73c are conditioned relatively, and therefore the radial direction width of the second support section 73e also needs to increase.
But when the width of the second support section 73e increases, its weight also increases, and makes the natural frequency of support section 73b and contact portion 73c to reduce, thus causes the reduction of the servo-actuated performance of the vibration about vibrating mass 2.
Due to this reason, in the present embodiment, the internal side diameter thickness of the second support section 73e reduces, and the outside diameter position of coupling part between the second support section 73e and contact portion 73c is kept.
Thus, the weight of support section can reduce to raise natural frequency, thus can improve the servo-actuated performance of the vibration about vibrating mass 2.
(the 4th embodiment)
Be that support section, contact portion and main part construct as shown in fig.7b with the difference of above-mentioned first embodiment according to a fourth embodiment of the invention.
Other elements (piezoelectric element 1 and vibrating mass 2) of the present embodiment are identical with those elements corresponding to above-mentioned first embodiment, and therefore omit their description.
It should be noted that the structure of the present embodiment shown in Fig. 7 B corresponds to the structure shown in Fig. 2, Fig. 5 A, Fig. 5 B, Fig. 5 C, Fig. 5 D, Fig. 6 A, Fig. 6 B and Fig. 7 A.
In figure 7b, support section 83b and contact portion 83c is formed as individual components respectively.Support section 83b and contact portion 83c is engaged with each other, such as, combined by adhesive, solder bonding metal (such as solder), and by the welding such as laser, resistance heating.
The situation that this and support section 83b and contact portion 83c form is compared and is conducive to processing.
In addition, can manufacture contact portion 83c by the material (such as aluminium oxide and carborundum) that can obtain high frictional force and high-wearing feature, described material is often because its machinability is conventionally difficult to use inferior to metal.
In addition, contact portion 83c also can by the resin manufacture produced by calcining, and wherein fluororesin powder (PTFE: polytetrafluoroethylene) is as main material, and wherein carbon fiber, polyimides and molybdenum bisuphide are used as additive.
Thus, moment of torsion that vibration wave motor generates can be increased and improve the durability of vibration wave motor.
In addition, two projection 83g are formed on the friction surface of contact portion 83c, thus are formed with vibrating mass 2 and contact.So, even if when support section 83b joins contact portion 83c to when the bonding part distortion of contact portion 83c, contact because only projection 83g is formed with vibrating mass 2, therefore also can reduce the impact of this distortion and keep stable contact.
In addition, although must with the friction surface of high flatness precision finished contact part 83c to make friction surface and vibrating mass 2 form good contact, according to the present embodiment, because the projection 83g on the friction surface of only contact portion 83c needs polished, therefore process time can be shortened.
It should be noted that in the present embodiment, make contact portion 83c be projected into internal side diameter from support section 83b, but the present embodiment is not limited thereto.
Such as, as shown in fig. 7c, end sections and the support section 93b of contact portion 93c can be engaged with each other, thus form a projection 93g.
In addition, in the present embodiment, the friction surface of projection 83g and contact portion 83c forms, but the present invention is not limited thereto.Projection 83g also can be formed as the parts independent of contact portion 83c, thus joins contact portion 83c to.
(the 5th embodiment)
Be such structure with the difference of above-mentioned first embodiment according to a fifth embodiment of the invention, be wherein provided with multiple movable body, and wherein each contact portion of movable body is arranged coaxially.
Other elements (piezoelectric element 1 and vibrating mass 2) of the present embodiment are identical with those elements corresponding to above-mentioned first embodiment, and therefore omit their description.
Illustrating in Fig. 8 A according to the structure of the present embodiment, for vibrating mass 102, two movable bodys 103 are set.The support section 103b of each of movable body 103 and contact portion 103c is formed by this way, the whole friction surface of contact portion 103c is formed with vibrating mass 102 contact, and the direction of the oscillation trajectory of vibrating mass 102 is substantially consistent with the direction of the displacement in the whole region of friction surface.
When providing two movable bodys 103 by this way, frictional force can increase and not increasing action in the surface pressing of the friction surface of contact portion 103c, simultaneously movable body 103 each in keep the servo-actuated performance of the vibration about vibrating mass 2.
Thus, the generation of the moment of torsion in oscillation drive can be improved.
In addition, when moment of torsion is kept, surface pressing can reduce, thus improves durability.
It should be noted that in the present embodiment, for a main part 103a, a support section 103b and contact portion 103c is set, but the shape of the support section used in the present embodiment and contact portion is not limited thereto.
Such as, as seen in fig. 8b, for a main body 113a, many group support section 113b and contact portion 113c also can be set.
As mentioned above, structure according to the abovementioned embodiments of the present invention, the support section of moving-member and each elastically deformable of contact portion, make the whole friction surface of the contact portion of moving-member can be formed with vibrating mass and contact.
Thus, the concentrated wear of contact component can reduce, and the performance caused due to long period of operation reduces and can reduce.
In addition, the direction of displacement in the whole region of the friction surface of moving-member is substantially consistent with the direction of the vibration of vibrating mass, and the slip in the radial direction therefore on friction surface can reduce.
Although reference example embodiment describes the present invention, be to be understood that and the invention is not restricted to disclosed exemplary embodiment.The scope of following claim should be consistent with the explanation of most broad sense, thus contain all such modification and equivalent structure and function.
This application claims the rights and interests in No. 2009-092671st, the Japan Patent of submission on April 7th, 2009 and No. 2010-023124th, the Japan Patent in submission on February 4th, 2010, above-mentioned application is intactly incorporated in herein by reference.
Claims (11)
1. a rotary type vibration wave driving apparatus, it is configured to comprise:
Energy converting between mechanical element;
Vibrating mass, this vibrating mass is fixed to described energy converting between mechanical element to vibrate when voltage is fed to described energy converting between mechanical element; And
Moving-member, this moving-member and described vibrating mass are formed and contact frictionally to be driven by the vibration of described vibrating mass,
Wherein said moving-member comprises: the support section extended from the main part of described moving-member extends with from described support section and forms with the contact surface of vibrating mass the contact portion contacted,
The contact surface of wherein said contact portion and vibrating mass extends abreast, and
Can strain independently on the rotation direction that each in wherein said support section and described contact portion is formed at described moving-member.
2. a rotary type vibration wave driving apparatus, it is configured to comprise:
Energy converting between mechanical element;
Vibrating mass, this vibrating mass is fixed to described energy converting between mechanical element to vibrate when voltage is fed to described energy converting between mechanical element; And
Moving-member, this moving-member and described vibrating mass are formed and contact frictionally to be driven by described vibration,
Wherein said moving-member comprises: extend internally the support section with end sections from the main part of described moving-member; Stretch out with the end sections from described support section and form with the contact surface of vibrating mass the contact portion contacted, and
The contact surface of wherein said contact portion and vibrating mass extends abreast,
Can strain independently on the rotation direction that each in wherein said support section and described contact portion is formed at described moving-member.
3., according to the rotary type vibration wave driving apparatus of claim 1 or 2, wherein said support section and described contact portion are formed as having homogeneous thickness in circumferential direction.
4., according to the rotary type vibration wave driving apparatus of claim 1 or 2, the displacement of wherein said contact portion is larger in inner side at outside ratio.
5. according to the rotary type vibration wave driving apparatus of claim 1 or 2, wherein said support section comprises: the first support section extended from described main part; With the second support section that the end sections from described first support section extends.
6., according to the rotary type vibration wave driving apparatus of claim 1 or 2, wherein said support section and described contact portion are formed by pressure processing.
7., according to the rotary type vibration wave driving apparatus of claim 1 or 2, wherein said contact portion has from the outstanding medial end part of described support section.
8. according to the rotary type vibration wave driving apparatus of claim 1 or 2, wherein said contact portion is formed by the parts independent of described support section, thus connects with described support section.
9., according to the rotary type vibration wave driving apparatus of claim 1 or 2, wherein said contact surface comprises at least one projection.
10. rotary type vibration wave driving apparatus according to claim 9, wherein said projection is formed by the parts independent of described contact portion, thus connects with described contact portion.
11. 1 kinds of rotary type vibration wave driving apparatus according to claim 1 or 2, it comprises the described support section of at least two groups and described contact portion, and wherein each contact portion is arranged coaxially.
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009-092671 | 2009-04-07 | ||
| JP2009092671 | 2009-04-07 | ||
| JP2010023124A JP5631018B2 (en) | 2009-04-07 | 2010-02-04 | Rotational vibration wave drive |
| JP2010-023124 | 2010-02-04 | ||
| PCT/JP2010/055301 WO2010116896A1 (en) | 2009-04-07 | 2010-03-18 | Rotary type vibration wave driving apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102365814A CN102365814A (en) | 2012-02-29 |
| CN102365814B true CN102365814B (en) | 2015-05-13 |
Family
ID=42936182
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201080014784.3A Active CN102365814B (en) | 2009-04-07 | 2010-03-18 | Rotary type vibration wave driving apparatus |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9154056B2 (en) |
| EP (1) | EP2417699B1 (en) |
| JP (1) | JP5631018B2 (en) |
| CN (1) | CN102365814B (en) |
| WO (1) | WO2010116896A1 (en) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011166901A (en) * | 2010-02-08 | 2011-08-25 | Nikon Corp | Oscillating actuator, and lens barrel and camera with the same |
| JP5701032B2 (en) * | 2010-12-09 | 2015-04-15 | キヤノン株式会社 | Vibration type driving device |
| JP5627448B2 (en) * | 2010-12-28 | 2014-11-19 | キヤノン株式会社 | Vibration type driving device |
| JP5791339B2 (en) * | 2011-04-13 | 2015-10-07 | キヤノン株式会社 | Toroidal vibration wave actuator |
| JP5924879B2 (en) * | 2011-07-08 | 2016-05-25 | キヤノン株式会社 | Vibration type actuator |
| JP6039253B2 (en) * | 2012-06-14 | 2016-12-07 | キヤノン株式会社 | A vibration wave driving device and a device equipped with the vibration wave driving device. |
| JP5990067B2 (en) * | 2012-09-13 | 2016-09-07 | キヤノン株式会社 | Vibration type driving device and electronic apparatus |
| JP6652289B2 (en) * | 2014-11-07 | 2020-02-19 | キヤノン株式会社 | Vibration type driving device, robot, image forming device, and imaging device |
| JP6460833B2 (en) * | 2015-02-25 | 2019-01-30 | キヤノン株式会社 | Vibrating body, driving method of vibrating body, vibration type driving device, dust removing device, and imaging device |
| JP6961383B2 (en) * | 2017-04-26 | 2021-11-05 | キヤノン株式会社 | Vibration type actuator |
| US11515811B2 (en) * | 2020-02-03 | 2022-11-29 | Canon Kabushiki Kaisha | Vibration-type actuator, pan head, and electronic apparatus |
| US11658587B2 (en) | 2020-07-27 | 2023-05-23 | Canon Kabushiki Kaisha | Vibration actuator, camera platform, and electronic device |
| JP2022029751A (en) | 2020-08-05 | 2022-02-18 | キヤノン株式会社 | Vibration type actuator, camera platform, and electronic apparatus |
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| JPS6122778A (en) * | 1984-07-10 | 1986-01-31 | Matsushita Electric Ind Co Ltd | Piezoelectric motor |
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- 2010-02-04 JP JP2010023124A patent/JP5631018B2/en active Active
- 2010-03-18 WO PCT/JP2010/055301 patent/WO2010116896A1/en active Application Filing
- 2010-03-18 EP EP10761596.5A patent/EP2417699B1/en not_active Not-in-force
- 2010-03-18 CN CN201080014784.3A patent/CN102365814B/en active Active
- 2010-03-18 US US13/143,768 patent/US9154056B2/en not_active Expired - Fee Related
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| US5028833A (en) * | 1989-05-30 | 1991-07-02 | Olympus Optical Co., Ltd. | Ultrasonic motor |
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Also Published As
| Publication number | Publication date |
|---|---|
| JP2010263769A (en) | 2010-11-18 |
| EP2417699A1 (en) | 2012-02-15 |
| JP5631018B2 (en) | 2014-11-26 |
| EP2417699A4 (en) | 2014-12-03 |
| EP2417699B1 (en) | 2017-11-22 |
| WO2010116896A1 (en) | 2010-10-14 |
| CN102365814A (en) | 2012-02-29 |
| US20110273058A1 (en) | 2011-11-10 |
| US9154056B2 (en) | 2015-10-06 |
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