JP3202499B2 - Vibration wave motor and device driven by vibration wave motor - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibration wave motor for frictionally driving a moving body with a vibration wave, and an apparatus using the vibration wave motor as a drive source.

[0002]

2. Description of the Related Art Referring to FIG.
22093) will be described.
In FIG. 14, two piezoelectric elements 3 are arranged in an annular shape on the fixed base 2 of the vibration wave motor 1 in a state where the piezoelectric elements 3 are alternately inverted and polarized, and are shifted vertically by ４ wavelength from each other. Paste and arrange. And the piezoelectric element 3 on the upper side
Is also formed in an annular shape on the surface of
° The vibrating body 4 that bends by applying a voltage out of phase is fixed. On the other hand, the shaft 5 is erected from the fixed base 2, and the moving body 7 is rotatably attached to the shaft 5 via the bearing 6. Then, an annular lining material 8 is fixed to a portion of the moving body 7 facing the vibrating body 4,
It is brought into contact with the annular vibrating body 4.

[0003] A disc spring 7-b is mounted on the upper portion of the moving body 7, and the disc spring 7-b is rotatably attached to the shaft 5 via a bearing 9, and the disc spring 7-b is mounted from above. With the nut 10, it is tightened down along the axis 5,
The moving body 7 is pressed against the vibrating body 4 via the lining 8. The lower end of the shaft 5 is fixed to the fixed base 2 by a nut 11. A gear 12 is formed on the periphery of the moving body 7. The piezoelectric element 3 is connected to a power supply 13 that excites and drives the piezoelectric element 3.

[0004] The upper and lower two-stage piezoelectric elements are supplied with 1 /
When an AC voltage having four wavelength phases different from each other is applied, the piezoelectric element 3 expands and contracts, and a traveling wave is generated on the surface of the vibrating body 4 where the piezoelectric element 3 generates distortion. When the traveling wave is excited in the vibrating body 13, the vibrating body 4 passes through the lining material 8.
The moving body 7 that is in contact with the object rotates by receiving torque from the vibrating body 4.

Since the gear 12 is directly engraved on the periphery of the moving body 7, the gear 12 can be driven by meshing with the gear of a device (not shown). Can be installed. Further, by tightening the nut 10 to the shaft 5 with the disc spring 7-b mounted on the upper end of the shaft 5, the pressing force of the vibrating body 4 against the lining 8 of the moving body 7 can be adjusted.

[0006]

The above-mentioned conventional vibration wave motor has the following disadvantages.

Since the gear 12 is directly engraved on the periphery of the moving body 7, the lining material is directly affected by the external force from the gear of the equipment when driven in combination with the equipment (not shown). The contact between the vibrator 8 and the vibrator 4 becomes unstable, resulting in uneven torque, uneven rotation speed, and squeal. In particular, as shown in FIG.
In a configuration in which the moving body is pivotally supported by the radial ball bearings, the moving body is easily inclined when a slight moment acts in the direction in which the plane of the moving body is inclined due to the centering effect of the radial ball bearing.

[0008] The setting method of the pressing force that greatly affects the performance of the vibration wave motor is performed by tightening a nut on a shaft. The pressing force cannot be directly observed, and the mechanical dimensional displacement of the disc spring is measured. The load and the displacement characteristic curve measured in advance or the average representative characteristic curve are adjusted to a displacement that matches the set pressure value. In mass production, representative characteristics are adopted in order to improve workability. In this case, individual variations in the load and displacement characteristics of the spring directly result in a setting error of the pressurization set value. Even if the characteristics are measured one by one, since the pressure value is not directly set but the dimension is managed, a measurement error of the displacement dimension is added.

In the conventional example, in order to keep the setting error small, a certain displacement range (δ
a to δb), a disc spring having a non-linear spring characteristic that provides a load value (Pa to Pb) of a certain constant width is employed. In other words, a constant value (Pa to Pb) varies. is there. The relationship between the load and the displacement of the disc spring is as shown in the following equation in the relationship shown in FIG.

[0010]

(Equation 1)

[0011] The plate thickness is the fourth power (h ⁴ ), and the JIS standard (JIS G) for stainless steel strips for springs is used.
According to 4313), the tolerance of the plate thickness is approximately ± 3% or more.
There is ± 5%, and when converted to load, it is ± 1 even with the thickness factor alone.
It corresponds to 2.5% to ± 21.5%. Actually, even if the pressurizing spring is a disc spring, the actual pressurization value greatly varies due to the mere setting of the dimensions, which may cause variations in motor characteristics. In addition, there has been a serious drawback in that squealing and uneven torque occur due to an improper pressurization value.

Since the moving body, the disc spring, and the nut are stacked in the height direction, the height dimension becomes large, and the entire apparatus including the vibration wave motor cannot be reduced in size and cost.

[0013] The pressure adjusting mechanism and the fixing mechanism are a screw and a nut, and the vibration transmitted from the device side or the vibration of the motor itself causes loosening of the screw with the passage of time, causing pressure loss, This leads to deterioration of motor characteristics.

An object of a first invention according to the present application is to provide a vibration wave motor capable of minimizing the influence of an external force applied to an output member.

An object of a second invention according to the present application is to provide a simple and compact structure which has almost no variation in the pressing force of the pressurizing means and does not cause a decrease in the set pressing force.
It is another object of the present invention to provide a vibration wave motor which is excellent in assembly and manufacture.

It is an object of a third invention according to the present application to provide an apparatus using a vibration wave motor as a drive source, which solves the above-mentioned disadvantages.

[0017]

According to a first aspect of the present invention, an electro-mechanical energy conversion element is joined to a vibration elastic body, and the electric-mechanical energy conversion element is connected to the elastic body. A vibrator that forms a traveling wave on a driving surface of the vibrating elastic body by applying a frequency voltage to the mechanical energy conversion element;
Contact pressure via the pressure means to the drive surface of the vibrator, the moving element is frictionally driven by the traveling wave, with respect to the vibrator
A fixed shaft that cannot rotate, and the fixed shaft
A bearing member rotatable with respect to the bearing member;
An output member in the form of a gear that moves integrally with the mover,
A coupling means for connecting the output member and the moving element, the coupling means being a part of the pressing means which is elastically deformable in the axial direction is provided.

[0018] In this configuration, even inclined receiving said output member is an external force, the external force received by the output member is absorbed by the elastic displacement in the axial direction of the catch means, wherein the transducer before
It is possible to minimize the impact on pressure contact, such as with the serial mover.

Also, as described in claim 2, claim 1
In the stationary shaft is in the configuration, characterized in that fixed to the fixed member supporting the transducer, the pre said fixed axis with respect to the solid <br/> constant member is fixed, for example, the fixed if to secure the shaft to penetrate the fixed member,
If the penetrating portion is fitted in a fitting hole formed in advance on the mounting side, the vibration wave motor can be mounted in a highly accurate positioning state.

Also, as described in claim 3, claim 1
In the fixed shaft is in a configuration which is characterized by being the fixing member integrally formed to support the transducer, reducing the number of parts, improvement in workability, cost can be reduced.

Further, as described in claim 4, claim 1
In the fixed shaft is in a configuration which is characterized by being formed integrally with the transducer, reducing the number of parts Hakare, also attained a reduction in assembly process.

[0022] Then, as described in claim 5, in claim 1, 2, 3 or 4, wherein the catch means, wherein the transfer <br/> body and the output member is constituted by a separate member, a spring In the configuration of the vibration wave motor, which is a thin plate spring made of stainless steel, a thin plate spring made of non-ferrous metal, or a thin plate spring made of resin injection molding, a conventional spring is used without using a special spring material. The material can be used as it is.

Further, as described in claim 6, according to claim 1, 2, 3 or 4, wherein the catch means, said transfer <br/> body and the output member and that is integrally formed with the configuration of the vibration wave motor, wherein, said output member and the said movable body from the same material as the spring member can integrally configured and catch means, it is possible to reduce number of parts.

The vibration wave <br/> motor to achieve the second object of the present application, as described in claim 7, in claim 2, 5 or 6, and the fixed shaft the fixing member is A shaft shape and a fitting hole shape having a first fitting phase that allows sliding in the axial direction at a relative rotational phase position, and a second fitting phase shift that prevents movement in the axial direction by frictional force. It is characterized by being formed in.

[0025] In this configuration, the <br/> fixed shaft by the first fitting phase pushing with respect to the fixed member, at an arbitrary position
If rotated toward the fixed shaft to the second fitting phase,
The so fixed shaft is fixed to the fixing member at the position, also can easily only load management caused by pressure with the said catch means forming a spring member pressing means with high precision, moreover screw There is no loosening which is a drawback of the fastening method. Further, since it is not necessary to separately provide a means for adjusting the pressing force in the axial direction, the axial length of the entire vibration wave motor can be reduced.

Further, as described in claim 8, claim 1
In to 7 one of the The said bearing member of the stationary shaft and for rotatably supporting said output <br/> force member, the first to slidable axially relative rotational phase position Mating phase,
The same configuration as in the above case is also applied to the configuration of the vibration wave motor characterized in that it is formed in a shaft shape and a fitting hole shape having a second fitting phase shift for preventing movement in the axial direction by frictional force. In addition, the load control of the pressurizing means can be performed easily and with high precision, and the loosening which is a drawback of the screw tightening method does not occur.

The first and second objects according to the present application are simultaneously performed.
The configuration realized as described in claim 9 is an electric-machine
Mechanical energy conversion element is joined to the vibration elastic body,
The vibration is applied by applying a frequency voltage to the mechanical energy conversion element.
A vibrator for forming a traveling wave on a driving surface of the dynamic elastic body;
Pressure contact with the driving surface of
Mover that is more frictionally driven and moves integrally with the mover
Output member and a fixed shaft that cannot rotate with respect to the vibrator.
A bearing member for rotatably supporting the output member,
An output member and the mover are connected to each other, and
Joint means forming a part of the pressure means which can be elastically deformed.
Having a fixed member that supports the fixed shaft and the vibrator.
Is the first that is slidable in the axial direction at the relative rotational phase position.
Phase and axial movement are prevented by frictional force
Formed into a shaft shape and a fitting hole shape having a second fitting phase
It is characterized by having been done. In this configuration, the output
Even if the force member is inclined by receiving an external force, the axial direction of the joint
The external force received by the output member is absorbed by the elastic displacement in the
Influence on the pressure contact between the vibrator and the moving element.
It can be minimized. Further, the first
Push the fixed shaft against the fixed member in the fitting phase
The fixed shaft is oriented at the arbitrary position in the second fitting phase.
And the fixed shaft is rotated by the fixed shaft at that position.
, The joint forming a spring member of the pressing means.
High-precision control of the load generated by the pressing force of the means
It can be done easily and the screw tightening method
There is no disadvantage of loosening. In addition,
There is no need to provide separate adjustment means along the axial direction
Therefore, the axial length of the entire vibration wave motor can be reduced.
it can. An electro-mechanical device as claimed in claim 10.
The energy conversion element is joined to the vibration elastic body,
The vibration is generated by applying a frequency voltage to the mechanical energy conversion element.
A vibrator for forming a traveling wave on a driving surface of an elastic body, and the vibrator
Pressure contact with the drive surface of the
A movable member that is frictionally driven and moves integrally with the movable member.
Output member and a fixed shaft that cannot rotate with respect to the vibrator.
A bearing member for rotatably supporting the output member;
A force member and the mover are connected to each other, and
Joint means forming part of the elastically deformable pressure means.
And, for rotatably supporting said output member relative to the solid Teijiku
The bearing member slides axially at a relative rotational phase position.
The first fitting phase and the axial movement to frictional force
Shaft shape and fitting with second fitting phase to prevent more
A vibration wave mode characterized by being formed in a hole shape.
Also in the configuration of the motor, the output member is
Even when the joint means is tilted due to the
The external force received by the output member is absorbed by the
Minimizing the effect on the pressure contact between the child and the mover
It is possible to control the load of the pressing means with high accuracy.
Can be done easily, and the drawback of the screw tightening method
There is no loosening.

Configuration for realizing the third object according to the present application
As described in claim 11, the claims 1 to 10
Has the vibration wave motor described in any one as a vibration source
Device driven by a vibration wave motor
is there. With this configuration, a small and high-precision vibration wave motor can be used, so that the device can be downsized and high-precision driving can be realized for a long time.

[0029]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. In the embodiments described below, the same components as those of the related art are denoted by the same reference numerals,
Descriptions of the same components are omitted unless necessary.

FIG. 1 shows the structure of a vibration wave motor according to a first embodiment of the present invention.

In the conventional example, two piezoelectric elements are attached, but in this embodiment, one piezoelectric element 3 is mechanically attached to one piezoelectric element 3.
By arranging the A-phase and the B-phase shifted by / 4 wavelength and applying an AC voltage shifted by 90 ° to each phase, the same operation as the conventional example is exerted. The piezoelectric element 3 is fixed to the vibrating body 4 by bonding or the like. A voltage is applied to the piezoelectric element 3 from a drive circuit (not shown) via the flexible 15. The vibrating body 4 is formed integrally with a thin plate portion 4-a and a flange portion 4-b attached to the motor case 18.
It is fixed to the motor case 18 with screws 17.

In the conventional example, the lining material is attached to the moving body, but in the present embodiment, it is attached to the vibrating body 4. The moving body 7 sandwiches the vibration-proof rubber 14 between the thin plate spring 7-b attached to the flange 12-a of the output member 12 by the screw 16 and the flange 7-a of the moving body.
It is fixed to the output member 12. The shaft 5 is fixed to the motor case 18, the outer ring is fixed to the output member 12,
The inner ring of the ball bearing 6 in which the inner ring is slidably inserted in the shaft 5 in the axial direction is tightened with a screw 10 having a flat washer 10-a into a screw hole 5-a provided in the shaft 5, thereby moving the moving body 7 and the vibrating body. Pressing is caused at the contact surface with the lining 8 attached to 4.

By adjusting the tightening of the screw 10, the pressure on the contact surface between the moving body 7 and the lining 8 attached to the vibrating body 4 can be set to an appropriate value. A cover 19 is fixed to the motor case 18 to prevent dust from entering the motor case,
Wear particles generated by friction between the moving body 7 and the lining material 8 are prevented from coming out of the motor. The shaft 5 has a lower end 5-b protruding from the motor case 18 and is fixed thereto. When the vibration wave motor 1 is mounted on a device (not shown), the shaft 5 is connected to the outer diameter of the shaft end 5-b. Providing the matching holes improves the workability of mounting, and the output member 12 is mounted on the basis of the shaft 5.
It also has the effect of significantly improving the mounting position accuracy.

As described above, in the vibration wave motor according to the present embodiment, the moving member 7 that moves integrally with the output member that is connected to the external device and receives the external force is elastically moved in the axial direction like a thin plate spring. It is easily deformed and is fixed by an elastic member having rigidity in the rotation direction. Therefore, unlike the conventional example, since the output member and the moving body are not integrally formed, even if the posture of the output member changes due to the influence of the external device, the thin plate spring that is easily elastically deformed in the axial direction is deformed. ,
The contact pressure between the moving body 7 and the lining 8 attached to the vibrating body 4 is always stable. Therefore, a high-performance and high-quality vibration wave motor that does not generate torque unevenness and rotation speed unevenness and does not generate squeal can be realized. Further, since the thin plate spring is arranged on the inner periphery of the moving body, the motor can be made thinner.

FIG. 2 shows a second embodiment.

In FIG. 2, the output member 12, the moving body 7, and the elastic member 7-b are integrally formed by the same member, and the same reference numerals correspond to those of the first embodiment. The attached members have the same function and effect. The shaft 5 is directly fixed to the flange portion 4-b of the vibrating body 4.

The output member 12, the moving body 7, and the elastic member 7-b
Are integrally formed of the same member, but an external force acting on the output member acts to hinder contact between the moving body 7 and the lining material 8 attached to the vibrating body 4 as in the first embodiment. However, since the contact pressure is always stable because it is relieved by the elastic thin plate portion 7-b, high-quality and high-quality vibration that does not cause uneven torque or rotational speed and does not generate squeal is generated. A wave motor can be realized.

In the second embodiment, similarly to the first embodiment, the protruding portion 5-b of the shaft is inserted into the mating hole on the device side, and the lower surface 4-c of the vibrator flange portion 4-b is inserted. To the device side.

FIGS. 3 and 4 show examples of attaching the vibration wave motor of the second embodiment to equipment. 3 and 4
In the figure, only members necessary for explanation are shown, and illustration of members unnecessary for explanation of attachment is omitted.

In the first mounting example shown in FIG.
Is a mounting chassis part on the equipment side, and inserts the protruding part 5-b of the shaft into the mating hole 20-a of the mounting part,
Fix with 1. In the second mounting example shown in FIG. 4, a screw protruding from the mounting chassis portion 20 on the device side to the lower side in the figure is used without using screws as in the first mounting example. Crimp to -a.

In mounting a vibration wave motor without a motor case and a motor cover as shown in the second embodiment to a device, it is necessary to protect the motor members and take measures to prevent dust. FIG. 5 shows an example. In FIG. 5, reference numeral 20 denotes a mounting chassis portion on the device side, which is provided with a concave portion 20-b in which the vibration wave motor unit is housed, and a vibration wave motor is mounted in the concave portion 20-b and fixed with screws 21.

In order to prevent intrusion of dust into the motor and discharge of abrasion powder to the outside of the motor, the motor cover 1
9 is attached to the chassis 20.

FIG. 6 shows another example of attachment. In the example of FIG. 5, the concave portion 20-b for accommodating the vibration wave motor unit is provided in the mounting chassis portion on the device side, but in the example of FIG.
The chassis side is formed as a plane, and the vibration wave motor is housed by making the motor cover 19 convex. FIG. 2
6, according to the vibration wave motor of the present invention, the vibration wave motor and the entire device incorporating the vibration wave motor can be reduced in size and weight, the number of parts can be reduced, and assembly workability can be reduced. Improvement and cost reduction are realized.

FIG. 7 shows a third embodiment.

In FIG. 7, the shaft 5, the vibrating body 4, and the thin plate 4
-A and the flange portion 4-b are cut from a rod shape,
They are integrally formed from the same member by a method such as forging, die casting, sheet metal pressing, sintered alloy, or injection molding.

In the third embodiment shown in FIG. 7, the assembly of the shaft 5 and the flange 4-b of the vibrating body becomes unnecessary.

FIG. 8 shows a fourth embodiment. In the present embodiment, the bearing 6 uses two bearings 6-a and 6-b,
Since the output member does not tilt due to the centering effect of the radial ball bearing as in the case of one bearing 6, the output member is stuck to the moving body 7 and the vibrating body 4 far more than in the case of one radial ball bearing. Since the contact pressure with the attached lining 8 is always stable, it is possible to realize a high-performance and high-quality vibration wave motor that does not generate uneven torque or rotational speed and does not generate squeal.

FIG. 9 is a longitudinal half sectional view showing the fifth embodiment.

In FIG. 9, the inner race of the bearing 6 is fixed to the shaft 5 by bonding or press fitting. When the vibrating body 4 is constrained in the axial direction and the convex portion 5-d of the shaft 5 is pressed down, the output member 12 supported by the bearing 6 via the bearing 6 is pressed down, and is formed integrally with the output member 12. The moving body 7 is brought into pressure contact with the lining material 8 attached to the vibrating body 4. The cross-sectional shape of the fixing portion 5-c of the shaft 5 and the fitting hole 4-d into which the fixing portion 5-c is inserted has, for example, an irregular cross-sectional shape that is not a perfect circle as shown in FIG. 12A, the shaft is free to slide in the axial direction, and FIG. 12B shows a state in which the shaft is rotated by 90 ° from the phase shown in FIG. d is the dimension W ₅ of is greater than the dimension W ₄ of 4-f of Kangoana 4-d, 4-f
The shaft 5 is fixed to the flange portion 4-b of the vibrating body, as pressure is generated at the portion and the 5-d portion.

As described above, the mating hole is larger so as to be slidable in the axial direction, and is relatively rotated from the phase slidable in the axial direction. With this configuration, the workability of the assembly has been dramatically improved, and the need for a nut as in the conventional example has been eliminated, eliminating the risk of loosening of the screw over time, and at the same time achieving a cost reduction. Further, in FIG. 12, a structure that is easy to rotate is provided by providing mating holes or tapers 4-g and 5-f in the radial direction of the shaft.

FIG. 10 is a longitudinal half sectional view showing the sixth embodiment.

In the embodiment shown in FIG. 10, the shaft 5 is fixed to the flange portion 4-b of the vibrating body 4 by bonding or thickening, and instead, the inner ring 6-c of the bearing 6 is engaged with the shaft 5. The transverse cross-sectional shape of the portion has an irregular cross-sectional shape that is not a perfect circle as shown in FIG. 12. In FIG. 12A, the shaft is free to slide in the axial direction, and FIG. 12A shows a state in which the shaft is rotated by 90 ° from the phase of FIG.
Since the dimension W ₅ is larger than the dimension W ₄ of 4-f of Kangoana, pressing occurs in 4-f unit and 5-d unit, the fixed shaft 5 to the flange portion 4-b of the vibrator Is done.

The phase between the shaft 5 and the bearing inner ring 6-c is set to a phase slidable in the axial direction ((A) in FIG. 12), and the vibrating body is restrained in the axial direction to change the end 6-d of the inner ring. When pushed down, the output member 12 which is supported via the bearing 6 is pushed down, and the movable body 7 formed integrally with the output member 12
Is brought into pressure contact with the lining material 8 attached to the vibrating body 4. When the pressure value is monitored and the pressure value is monitored by the load meter and the pressure reaches the set value, the relative phase between the shaft and the inner ring is changed from the slidable phase to the phase shown in FIG. To generate the shaft 5 and the bearing inner ring 6-
Fix c. In the sixth embodiment shown in FIG. 10, the bearing inner ring 6-c is directly fixed to the shaft 5, whereas in the seventh embodiment shown in FIG. 11, a mating member is provided inside the bearing inner ring 6-c. 22 is attached, and the cross-sectional shape of the mating portion between the shaft 5 and the mating member 22 is changed to the irregular shape shown in FIG. Thereby, the deformation of the inner ring due to the pressing can be reduced.

In the assembly of the vibration wave motor, the setting process of the pressing force is very important, and if the pressing force is not set to an appropriate value, a problem that a predetermined torque is not generated or a squeal occurs. There are three methods for setting the pressurization of the vibration wave motor that applies a pressing force using an elastic member such as a disc spring. (1) The load deflection characteristics of the spring are measured in advance, and the deflection corresponding to the set load is measured. The pressure is set by dimensional control so that

(2) Pressing force is set by load management using a load cell or a push-pull gauge capable of monitoring the load.

(3) Combination of (1) and (2). Adjustment and fixing of the pressing force are done with screws,
Instead of setting the pressure only by dimensional control as in (1), the spring is displaced by pressing the load meter to 90% of the set pressure, for example, and the remaining 10% is the load deflection characteristic curve. And a displacement equivalent to a load of 10% is added by tightening the screw.

The pressure setting in the conventional example is a method of tightening the nut to a certain size corresponding to the set load, and corresponds to (1). The method (1) requires time and labor for measuring the spring characteristics, and is inferior in workability. This involves a measurement error twice during the measurement and the setting, and has a serious drawback that the setting variation of the pressing force occurs. Was.

In the method (3), the error is smaller than in the method (1), but the operation is very complicated and the operation cost is high.

According to the motor structure of the present invention, for example, FIG.
The upper end 5-d of the shaft 5 of the fifth embodiment shown in FIG. 12 is pushed down, and when the set load is reached, the vibrating body is fixed so as not to rotate with it so that the state shown in FIG. , Shaft end 5-
If d is rotated by 90 ° with a tool (not shown), the pressing force can be easily and extremely accurately set. As a result, it is possible to provide an extremely high-quality and highly reliable vibration wave motor having extremely constant characteristics at low cost.

(C), (D), (E), (F) of FIG.
5 shows an example of another cross-sectional shape of the fitting portion. In these examples, similarly to the above example, the shaft and the hole are completely gaps,
There is a phase in which the shaft can be freely slid, and a phase in which the shaft and the hole are fixed by the occurrence of the press-contact portion.

FIG. 13 shows a sixth embodiment of the vibration wave motor of the present invention.

In FIG. 13, the shaft 5 and the supporting member 20 of the vibrating body are made of the same member and are integrally formed. Here, the support member 20 may be a motor case,
It may be a chassis on the device side. With this configuration, it is possible to reduce the number of parts, improve workability, and reduce costs.

Further, in the embodiment shown in FIGS. 1 to 13, the output member may be provided with a gear engraved on the peripheral portion as in the conventional example, or a gear made of another member may be fixed. Instead, a steel belt, a rubber belt, a timing belt, a pulley for applying a high-strength thread such as a piano wire or an organic material, or a flange may be used.

FIG. 17 shows an example in which the vibration wave motor of the first embodiment shown in FIG. 1 is used as a drive source to drive, for example, a planetary mechanism for winding and rewinding a film of a camera by forward and reverse rotations of the motor. The output member 12 of the ultrasonic motor has a gear 12G on the outer periphery to form a sun gear. A planetary gear 31 meshing with the gear 12G is supported by a planetary lever (not shown). It rotates around the gear 12G according to the forward / reverse rotation.

When the gear 12G rotates in the forward direction, the planetary gear 31 which revolves around in the forward direction meshes with, for example, an input gear 32 of a film winding drive system, and executes film winding by the forward rotation of the vibration wave motor. I do. Also, the reverse rotation of the vibration wave motor meshes with the input gear (not shown) of the film rewind drive system (not shown) by the reverse revolution of the planetary gear 31, and rewinds the film by the reverse rotation of the vibration wave motor. To start.

[0066]

According to the first aspect of the present invention, even if the output member is inclined by receiving an external force, the external force received by the output member is absorbed by the elastic displacement of the joint means in the axial direction, and the vibrator is provided. It is possible to minimize the influence on the pressure contact between the actuator and the moving element.

According to the second aspect of the present invention, the fixed shaft is fixed to the fixed member in advance. For example, if the fixed shaft is fixed so as to penetrate the fixed member, the penetrated portion is fixed to the mounting side. The vibration wave motor can be mounted in a highly accurate positioning state by fitting the vibration wave motor into a fitting hole formed in advance.

According to the third and fourth aspects of the present invention, the number of parts can be reduced, workability can be improved, and costs can be reduced.

According to the fifth aspect of the present invention, the conventional spring material can be used as it is without using a special spring material, and can also be used as the pressure spring of the pressure means.

According to the sixth aspect of the present invention, the moving body, the output member, and the joint means can be integrally formed of the same material as the spring material, and the number of parts can be reduced.

According to the seventh aspect of the present invention, if the fixed shaft is pushed into the fixed member at the first fitting phase and the fixed shaft is rotated at an arbitrary position toward the second fitting phase. Since the fixed shaft is fixed to the fixed member at that position, the load generated by the pressing force of the joint means forming the spring member of the pressurizing means can be managed with high precision and easily, and the screw tightening method There is no loosening which is a disadvantage of the above. Further, since it is not necessary to separately provide a means for adjusting the pressing force in the axial direction, the axial length of the entire ultrasonic motor can be reduced.

According to the eighth aspect of the present invention, the load control of the pressing means can be performed with high accuracy and easily as in the above case, and loosening which is a drawback of the screw tightening method occurs. Nor.

According to the ninth aspect of the present invention, the output member
Of the joint means in the axial direction even if the
The external force received by the output member is absorbed by the displacement, and the vibrator
To minimize the effect on pressure contact with the slider
It becomes possible. Further, the fixed shaft is moved in the first fitting phase.
Push the fixed shaft against the fixed member at any position.
When rotating toward the second mating phase, the fixed position
Since the fixed shaft is fixed to the fixing member, the spring of the pressing means is
Caused by the pressure of the joint means forming the member
Load management can be performed easily and with high precision.
There is no looseness that is a disadvantage of the screw tightening method.
No. In addition, a means for adjusting the pressing force is provided separately along the axial direction.
In the axial direction of the entire vibration wave motor.
Can be reduced. The invention according to claim 10
According to the third aspect of the present invention, similarly to the ninth aspect, the output member
Even if inclined by external force, the elasticity of the joint means in the axial direction will change.
The external force received by the output member is absorbed by the position,
Minimize the effect on pressure contact with the mover
It is possible to control the load of the pressing means with high accuracy and
It can be easily performed, and is a disadvantage of the screw tightening method.
There is no loosening. According to the eleventh aspect of the present invention, it is possible to use a small-sized and high-precision vibration wave motor, so that the device can be downsized and high-precision driving can be realized for a long time.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view of a vibration wave motor according to a first embodiment of the present invention.

FIG. 2 is a longitudinal sectional view of a vibration wave motor according to a second embodiment of the present invention.

FIG. 3 is a longitudinal sectional view showing a first embodiment of mounting the vibration wave motor of the second embodiment on a device.

FIG. 4 is a longitudinal sectional view showing a second embodiment of mounting the vibration wave motor of the second embodiment on a device.

FIG. 5 is a longitudinal sectional view showing a third embodiment of mounting the vibration wave motor of the second embodiment on a device.

FIG. 6 is a longitudinal sectional view showing a fourth embodiment of mounting the vibration wave motor of the second embodiment on a device.

FIG. 7 is a longitudinal sectional view of a vibration wave motor according to a third embodiment of the present invention.

FIG. 8 is a longitudinal sectional view of a vibration wave motor according to a fourth embodiment of the present invention.

FIG. 9 is a longitudinal sectional view of a vibration wave motor according to a fifth embodiment of the present invention.

FIG. 10 is a longitudinal sectional view of a vibration wave motor showing a sixth embodiment of the present invention.

FIG. 11 is a longitudinal sectional view of a vibration wave motor according to a seventh embodiment of the present invention.

FIG. 12 is a cross-sectional view showing a shaft and a fitting hole shape of a fitting portion effectively used in the fifth embodiment and the like.

FIG. 13 is a longitudinal sectional view of a vibration wave motor according to an eighth embodiment of the present invention.

FIG. 14 is a longitudinal half sectional view showing a conventional vibration wave motor.

FIG. 15 is a diagram showing a relationship between a load of a disc spring of the vibration wave motor and a displacement characteristic.

FIG. 16 is a cross-sectional view of the disc spring showing the relationship between the load and the displacement of the disc spring of the vibration wave motor.

FIG. 17 is a schematic diagram of an apparatus using the first embodiment as a driving source.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Vibration wave motor 2 ... Fixed base 3 ... Piezoelectric element 4 ... Vibration body 4-a ... Thin plate part of vibration body 4-c ... Flange part of vibration body 5 ... Shaft 5-a ... Screw hole of shaft 5-b ... Shaft end (engagement part) 5-c: Deformed shape part of shaft end (engagement part) 6 ... Bearing 7 ... Moving body 8 ... Lining material 9 ... Bearing s 10 ... Nut (screw) 11 ... Nut 12 ... Output member DESCRIPTION OF SYMBOLS 13 ... Power supply 14 ... Anti-vibration rubber 15 ... Flexible 16 ... Screw 17 ... Screw 18 ... Motor case 19 ... Motor cover 20 ... Equipment chassis 21 ... Screw 22 ... Mating member

Claims (11)

(57) [Claims] A vibrator for joining an electro-mechanical energy conversion element to a vibration elastic body and forming a traveling wave on a driving surface of the vibration elastic body by applying a frequency voltage to the electro-mechanical energy conversion element; A moving element which is brought into pressure contact with a driving surface of the vibrator via a pressure means, and is frictionally driven by the traveling wave;
A fixed shaft that cannot rotate with respect to the vibrator;
A bearing member serving as a shaft and rotatable with respect to the fixed shaft;
In a gear shape that is supported by a member and moves integrally with the mover
A vibration wave motor comprising: an output member; and coupling means for connecting the output member and the mover, the coupling means forming a part of the pressing means capable of being elastically deformed in the axial direction. . 2. The vibration wave motor according to claim 1, wherein the fixed shaft is fixed to a fixed member that supports the vibrator. 3. The vibration wave motor according to claim 1, wherein the fixed shaft is formed integrally with the fixed member that supports the vibrator. 4. The vibration wave motor according to claim 1, wherein the fixed shaft is formed integrally with the vibrator. 5. The spring according to claim 1, 2, 3, or 4, wherein the coupling means is formed of a member separate from the movable member and the output member, and is a thin plate spring made of stainless steel for a spring or a thin plate made of non-ferrous metal. A vibration wave motor characterized by being a spring or a thin plate spring such as resin injection molding. 6. The vibration wave motor according to claim 1, wherein said coupling means is formed integrally with said movable element and said output member. 7. The fixing shaft according to claim 2, 5 or 6, wherein the fixed shaft and the fixed member are slidable in the axial direction at a relative rotational phase position, and are moved in the axial direction. vibration wave motor that is characterized in being formed in the shaft shape and fitting holes shape and a second fitting position phase prevented by frictional force. 8. The bearing member according to claim 1, wherein the bearing member for supporting the output member with respect to the fixed shaft is slidable in an axial direction at a relative rotational phase position. vibration wave motor, wherein a first fitting phase, that is formed in the axial shape and fitting holes shape and a second fitting position phase prevented by frictional force from moving in the axial direction. 9. An electric-mechanical energy conversion element comprising a vibration bullet
To the electro-mechanical energy conversion element
A traveling wave is formed on the driving surface of the vibrating elastic body by applying a wave voltage.
And a driving surface of the vibrator through a pressurizing means.
A moving element that is in pressure contact and frictionally driven by the traveling wave;
An output member that moves integrally with the mover;
To rotate the output member freely with respect to the non-rotatable fixed shaft.
A bearing member for supporting the shaft, and connecting the output member and the mover;
The pressing means, which is elastically deformable in the axial direction.
The fixed shaft and the vibrator,
Is fixed relative to the rotational phase position in the axial direction
The first fitting phase, which makes it slidable, and the movement in the axial direction
Shaft shape having second fitting phase blocked by frictional force
And a fitting hole shape.
Motion wave motor. 10. Vibration of electro-mechanical energy conversion element
Bonded to an elastic body,
A traveling wave is applied to the driving surface of the elastic body by applying a frequency voltage.
A vibrator to be formed, and a driving surface of the vibrator through a pressing means.
Mover contacted by pressure and frictionally driven by the traveling wave
An output member that moves integrally with the mover, and the vibrator
The output member rotates automatically with respect to the fixed shaft that cannot rotate
The output member and the mover are connected to each other.
The pressing hand, which is elastically deformable in the axial direction.
Joint means forming a part of a step, with respect to the fixed shaft
The bearing member for supporting the output member is a relative member.
First mating phase to allow axial sliding in the rotational phase position
And a second fitting for preventing axial movement by frictional force
It is formed in a shaft shape and a fitting hole shape having a phase.
A vibration wave motor characterized in that: 11. An apparatus using a vibration wave motor as a driving source, comprising the vibration wave motor according to any one of claims 1 to 10 as a driving source.