CN102364325B - Method for testing bending fatigue reliability of low dimensional conducting material - Google Patents

Method for testing bending fatigue reliability of low dimensional conducting material Download PDF

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CN102364325B
CN102364325B CN201110302754.9A CN201110302754A CN102364325B CN 102364325 B CN102364325 B CN 102364325B CN 201110302754 A CN201110302754 A CN 201110302754A CN 102364325 B CN102364325 B CN 102364325B
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sample
fatigue
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tested conduction
conduction sample
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CN102364325A (en
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张广平
徐进
张滨
宋竹满
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Institute of Metal Research of CAS
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Abstract

The invention relates to the establishment of a system and method for testing the bending fatigue reliability of a low dimensional conducting material, in particular to a system and method for testing the bending fatigue reliability of a low dimensional conducting material. The problems that the fatigue life measurement error of the conducting film material is great, the crack initiation life can not be accurately measured and the like existing in the prior art are solved. The test system comprises an electromagnetic driving part, a fatigue loading and measurement part and a detection and recording part. The system provides a function and test method for testing the dynamic bending fatigue properties of various materials, and meanwhile, the resistance variation of tested samples can be monitored, analyzed and recorded in real time. The information such as fatigue life, crack initiation and propagation life and the like of various tested conducting samples can be accurately obtained through the recorded resistances. By using the system, the fatigue property experiment can be carried out on various tested conducting samples simultaneously, the resistance value of each tested conducting sample can be recorded and analyzed in real time, and the experiment is simple and quick to operate.

Description

A kind of bending fatigue method for testing reliability of low dimension conductive material
Technical field
The present invention relates to the fatigue property test system of low dimension conductive material and the foundation of method of testing, be specially a kind of test macro of bending fatigue reliability of low dimension conductive material, and the germinating of tested sample body internal fissure and the acquisition of extend information and the method for testing of material fatigue life.
Background technology
Low dimension conductive membraneous material is having a wide range of applications in the field such as electronic information, industry and medical science now, as micro-/microelectronics trigger switch of receiving in electro-mechanical system (MEMS/NEMS), and material etc. for various angiocarpy bracket.Above-mentioned device bears the effect of the complicated alternation fatigue load such as cyclic bending, stretching or torsion in actual military service process, and the fatigue behaviour of understanding conductive film material in device is very helpful to its design and use life prediction.Once there be in material bodies crackle to produce, himself electric conductivity must change, and the normal use of this member is brought to hidden danger.Therefore, test fatigue property and crack initiation and the extend information of above-mentioned conductive material, the theoretical research of the reliability design in the practical application of conductive film material device, damage tolerance design and membraneous material fatigue behaviour is had great importance.
At present, in semi-girder crooked fatigue experiment, adopt of people directly measured the resistance between sample chuck and loading end more, due to this type of fatigue experimental approach between semi-girder bend specimen and loading head inevitably because contacting the existence in gap, and produce huge contact resistance (kilo-ohm level), the gap that can contact in the loading procedure of crooked fatigue experiment in addition can constantly change, cause metering circuit off and on, therefore to resistance measurement, bring inevitable randomness, resistance value and situation of change thereof that often cannot Measurement accuracy sample; Other researchers adopt the high power digital display micro mirror of supporting CCD probe directly to observe fatigue testing specimen, but these class methods need to expend a large amount of manpowers, and experimental result can only obtain the fatigue lifetime of tested conduction sample, still can not get crack initiation and the extend information of tested conduction sample.
Summary of the invention
The object of the present invention is to provide a kind of precisely, simply for microsize conductive film, silk material etc. low dimension conductive material bending fatigue reliability performance test macro and method of testing, this test macro and method of testing can characterize conductive film material fatigue and crack initiation and expansion life-span, solve exist in prior art large to conductive film material measuring error fatigue lifetime, cannot Measurement accuracy crackle the problems such as germinating life-span.Based on conductive film material practical work process, suffer the probability of bending load effect will be more than suffering other load, this fatigue system and method for testing apply the bending fatigue load consistent with membraneous material military service operating mode to tested conduction sample.
Technical scheme of the present invention is:
A bending fatigue reliability test system for low dimension conductive material, this test macro is comprised of Electromagnetic Drive part, fatigue loading and measure portion, detection and recording section three parts;
(1) Electromagnetic Drive part, comprise digital function generator, power amplifier, electromagnetic transducer, the output terminal of digital function generator connects power amplifier, the output terminal of power amplifier connects electromagnetic transducer, and the output terminal of electromagnetic transducer connects the wedge-shaped slot vibration rod of fatigue loading and measure portion;
(2) fatigue loading and measure portion, comprise wedge-shaped slot vibration rod, tested conduction sample, specimen holder, micrometer caliper and mircrometer gauge probe, specimen holder is fixed on three-dimensional mechanically moving frame, tested conduction sample is fixed in two-dimensional stage by specimen holder fixed mount, micrometer caliper and mircrometer gauge probe are fixed on the two-dimension optical platform at bending fatigue reliability test system place by its fixed mount, one end of wedge-shaped slot vibration rod is connected with electromagnetic transducer, the other end of wedge-shaped slot vibration rod is connected with the mircrometer gauge of micrometer caliper probe, on wedge-shaped slot vibration rod, have wedge-shaped slot, one end of tested conduction sample is fixed on specimen holder, the other end of tested conduction sample extends in wedge-shaped slot, tested conduction sample is connected with multi-path digital multimeter by being fixed on the outer lead of the resistance measurement contact chip on specimen holder,
(3) detection and recording section, comprise multi-path digital multimeter and the PC being connected with multi-path digital multimeter; One end of multi-path digital multimeter connects tested conduction sample, and the other end of multi-path digital multimeter is connected with PC.
The bending fatigue reliability test system of described low dimension conductive material, utilizes the movement of the mircrometer gauge probe that micrometer caliper front end connects accurately to measure the amplitude of wedge-shaped slot vibration rod, and range ability is 1 μ m~4mm, and measuring accuracy is 1 μ m.
The bending fatigue reliability test system of described low dimension conductive material, specimen holder comprises compressing tablet on jig main body, fixture, bolt fastener, resistance measurement contact chip, tested conduction sample is connected by bolt fastener with specimen holder, and resistance measurement contact chip is directly connected with tested conduction sample.
The bending fatigue reliability test system of described low dimension conductive material, on jig main body and fixture, compressing tablet is that stainless steel material processes, and entire body is all carried out insulation processing.
The bending fatigue reliability test system of described low dimension conductive material, one end upper surface of jig main body has terraced structure, one end of two resistance measurement contact chips extends respectively the both sides of terraced structure bottom, and one end of tested conduction sample extends the middle part of terraced structure bottom; On fixture, compressing tablet is installed with in tested conduction sample and two resistance measurement contact chip tops, and engages with the terraced structure of jig main body.
A bending fatigue method for testing reliability that utilizes the low dimension conductive material of described test macro, concrete steps are as follows:
(1) measure in advance the tensile property of the single shaft of tested conductive material, obtain its tensile stress-strain curve;
(2), according to sample original length and required semi-girder length, select tested conduction sample at the clamping length of specimen holder end;
(3) by adjusting, be fixed on the two-dimensional stage on optical table, adjust the degree of depth that tested conduction sample inserts wedge-shaped slot vibration rod, make it reach the needed span of experiment;
(4) by adjusting, be fixed on mircrometer gauge and the power amplifier on optical table, obtain the corresponding amplitude output of electromagnetic transducer;
(5) utilize the drawing stress-strain data obtaining in advance, in conjunction with computer finite element simulation, calculate tested conduction sample in the corresponding repeated strain ε of bare terminal end root and stress σ value thereof;
(6) adopt multi-path digital multimeter, the resistance value of tested conduction sample is measured and record in real time;
(7) by measuring the real-time resistance value of sample, calculate sample resistance change rate, obtain resistance change rate and the relation curve between fatigue load cycle of executing, thereby draw the fatigue lifetime of sample and the information of crack initiation and expansion.
The bending fatigue method for testing reliability of described low dimension conductive material, in test process, digital function generator produces simulating signal fatigue loading waveform used in fatigue experiment, through power amplifier, carry out power amplification, electric signal transmission, to electromagnetic transducer, is become electric signal into mechanical signal by electromagnetic transducer and drives the wedge-shaped slot vibration rod of fatigue loading and measure portion to shake;
In the course of work, electromagnetic transducer drives wedge-shaped slot vibration rod generation vertical tremor, thereby drives the tested conduction sample one end embedding in wedge-shaped slot to produce back and forth vibrations; Mircrometer gauge probe is used for limiting and measure the displacement of wedge-shaped slot vibration rod, thereby measures the vibrations amplitude of tested conduction sample.
The bending fatigue method for testing reliability of described low dimension conductive material, multi-path digital multimeter is used for detecting in real time the resistance value of tested conduction sample, and gives the PC for data recording by signal feedback; In experimentation, with the resistance measurement contact chip that wire handle is connected with tested conduction sample, be connected in multi-path digital multimeter the resistance value of the tested conduction sample of Real-time Collection, and the situation of change of resistance value; Utilization and specimen holder and multi-path digital multimeter are accurately measured the changing value of tested conduction sample resistance in fatigue process, and the data by PC Real-time Collection multi-path digital multimeter, realize the automation collection in experimentation; When the increment of the resistance of tested conduction sample reach initial resistance 30% time, be defined as the breakaway poing of tested conduction sample; When tested conduction sample resistance variations arrives infinity, PC stops record data automatically, and by data Auto-Memory before.
The bending fatigue method for testing reliability of described low dimension conductive material, by the parameter of function generator is set, make its waveform that produces multiple fatigue loading, tested conduction sample is applied from La-La load to the fatigue load of drawing-pressing symmetrical and asymmetric etc. any curve form.
In the bending fatigue reliability test system of low dimension conductive material of the present invention, the low dimension conductive material of indication can be by various at present known methods technology such as () physics or chemistry, prepare have matrix support or the conductive single layer of supporting without matrix or multilayer film, paper tinsel class, two dimensional sheets class material or a silk class conductive material etc., the various materials that can use this system to detect are: (1) various metal wire materials, and the outside various conductive filament materials of doing insulation processing, or be the silk material that conductive processing was done in outside at empire silk material; Or the metal forming class of various conductions (2), or the various conductive materials of preparing on insulating body material, or metallic multilayer membrane material; Or the various paper tinsel class material that has piezoelectric effect, or the various piezoelectric films of preparation on insulating body material (3), or have the film of piezoelectric effect, the present invention can be used for measuring its piezoelectric property and evaluate its anti-fatigue ability; (4) detected silk material is of a size of 2mm to 10 μ m, and film-form material total thickness is that 2mm is to 10 μ m; (5) if the intensity of measured material is too high, can adopt large span.
In the present invention, the length of span that (1) is required according to experiment to be measured, chooses the clamping degree of depth of sample and the degree of depth that sample enters wedge-shaped slot, and the precision of controlling span is 1 μ m; (2) link chuck and multi-path multimeter, open function generator, and set the waveform of choosing; (3) adjusted in concert power amplifier and mircrometer gauge probe, make the required output amplitude of reaching of electromagnetic transducer; (4) open control software and start automatic record data, when the time finishes, stop experiment; (5) strain of sample root size while going out to test by FEM (finite element) calculation; (6) process the resistance data of storage, just can interpretation when resistance is increased to 1.3 times of initial sample its there is fatigue break.
Feature of the present invention is:
1, the present invention applies the bending fatigue load that more approaches the actual military service operating mode of conductive film material to tested conduction sample;
2, accurate to the measurement of tested conduction sample resistance value.Method of testing of the present invention has been broken away from previous method because the contact problems of sample and bending strain fatigue testing specimen fixture cannot solve the indeterminable drawback of the resistance value causing, by the tested conduction sample of small scale of brand-new design, sample is prepared easy, can measure exactly sample resistance value and variation thereof;
3, the present invention, by adjusting the output waveform parameter of digital function generator, realizes sample is applied to bending fatigue load arbitrarily;
4, testing fatigue scope is wide.It is 0.01~1000Hz that tested conduction sample is applied to fatigue load frequency, applies tired amplitude in 10 μ m~3mm scopes, and tired amplitude measurement precision is high;
5, tested conduction sample is prepared easy.For conductive film material or paper tinsel, the tested conduction sample yardstick that is processed into the size that test macro allows just can be carried out test, a silk material can directly curve U-shaped after, then two ends are fixed on fixture, just can carry out fatigue loading experiment to sample;
6, the present invention can carry out crooked fatigue experiment to many groups of tested conduction samples simultaneously.Utilize a function generator in parallel with a plurality of power amplifiers, can drive a plurality of electromagnetic drivers simultaneously.Because the power of each power amplifier can regulate separately, and noiseless mutually, therefore can do the fatigue experiment of a plurality of various amplitudes simultaneously;
7, the present invention utilizes multi-path digital multimeter to carry out the measurement of resistance to many groups of tired tested conduction samples, then by software, measurement data is imported to PC and store and analyze;
8, the designed small scale conduction dynamic bending fatigue experimental system of the present invention, simple while implementing test, package unit is cheap, is particularly useful for micro-cantilever class micro-member and material;
9, the film that the present invention tests or silk material have matrix support or the conductive single layer of supporting without matrix or multilayer film, paper tinsel class, two dimensional sheets class material or a class conductive material etc. for what prepare by various current known methods technology such as () physics and chemistries.Specifically describe as follows: (1) various metal wire materials, and the outside various conductive filament materials of doing insulation processing, or be the silk material that conductive processing was done in outside at empire silk material; Or the metal forming class of various conductions (2), or the various conductive materials of preparing on insulating body material, or metallic multilayer membrane material; Or the various paper tinsel class material that has piezoelectric effect, or the various piezoelectric films of preparation on insulating body material (3), or have the film of piezoelectric effect, the present invention can be used for measuring its piezoelectric property and evaluate its anti-fatigue ability; (4) detected silk material is of a size of 2mm to 10 μ m, and film-form material total thickness is that 2mm is to 20 μ m; (5) if the intensity of measured material is too high, can adopt large span.
In a word, the invention provides to various micro-/naiio-electro-meclianical systems is with having matrix support and without the conductive film material of matrix support, function and method of testing that integrated circuit for, metal, non-metallic interconnection body foil material and various conduction silk material carry out dynamic bending fatigue performance test, the while can be carried out real time monitoring and analyzing record to tested sample resistance variations.By the resistance of recording, can obtain accurately the information such as tested conduction sample fatigue lifetime, crack initiation and expansion life-span.This system can be carried out fatigue behaviour experiment to a plurality of tested conduction samples simultaneously, and can to the resistance value of each tested conduction sample, carry out real time record and analysis, experimental implementation simple and fast simultaneously.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of small scale conductive material test system for dynamic bending fatigue performance.
In figure, 1 digital function generator; 2 power amplifiers; 3 electromagnetic transducers; 4 wedge-shaped slot vibration rods; 5 tested conduction samples; 6 specimen holders; 7 multi-path digital multimeter; 8PC machine; 9 micrometer calipers; 10 mircrometer gauge probes; 11 wedge-shaped slots.
Fig. 2 (a)-(b) is the wiring layout of the tested conduction sample of small scale and fixture.Wherein, Fig. 2 (a) is front view; Fig. 2 (b) is sectional view.
In figure, the tested conduction sample of 5-1 small scale; 6-1 jig main body; Compressing tablet on 6-2 fixture; 6-3 bolt fastener; 6-4 resistance measurement contact chip.
Fig. 3 is the resistivity of tested conduction sample in embodiment 1 and loads the relation curve between tired cycle.If flexible life is wherein 77600 weeks, as shown in partial enlarged drawing, fatigue crack was germinating in the 71800th week.
Fig. 4 is the wiring layout of the tested conduction sample of thin copper wire and fixture.
In figure, the tested conduction sample of 5-2 thin copper wire; 6-1 jig main body; Compressing tablet on 6-2 fixture; 6-3 bolt fastener; 6-4 resistance measurement contact chip.
Fig. 5 is resistance change rate and the relation curve between fatigue load cycle of executing.
Embodiment
Below in conjunction with drawings and Examples in detail the present invention is described in detail.
As shown in Figure 1, the bending fatigue reliability test system of low dimension conductive material of the present invention is comprised of three parts: (1) Electromagnetic Drive part; (2) fatigue loading and measure portion; (3) detection and recording section.
1, Electromagnetic Drive part, comprises digital function generator 1, power amplifier 2, electromagnetic transducer 3 etc., is responsible for the driving of fatigue experiment.The output terminal of digital function generator 1 connects power amplifier 2, and the output terminal of power amplifier 2 connects electromagnetic transducer 3, and the output terminal of electromagnetic transducer 3 connects the wedge-shaped slot vibration rod 4 of fatigue loading and measure portion.In test process, first by digital function generator 1, produce simulating signal fatigue loading waveform used in fatigue experiment, through power amplifier 2, carry out power amplification again, electric signal transmission, to electromagnetic transducer 3, is finally become electric signal into wedge-shaped slot vibration rod 4 vibrations that mechanical signal drives fatigue loading and measure portion by electromagnetic transducer 3.
2, fatigue loading and measure portion, comprise wedge-shaped slot vibration rod 4, tested conduction sample 5, specimen holder 6, micrometer caliper 9 and mircrometer gauge probe 10 etc., be responsible for applying bending fatigue load to tested conduction sample, and measure the amplitude of tested conduction sample suspension beam-ends simultaneously.Specimen holder 6 is fixed on three-dimensional mechanically moving frame, tested conduction sample 5 is fixed on high-precision two-dimensional platform by specimen holder 6 fixed mounts, its displacement accuracy is 1 μ m, micrometer caliper 9 and mircrometer gauge probe are fixed on the high-precision two-dimensional optical table at fatigue test system place by its fixed mount, its displacement accuracy is 1 μ m, one end of wedge-shaped slot vibration rod 4 is connected with electromagnetic transducer 3, by electromagnetic transducer 3, driven, the other end of wedge-shaped slot vibration rod 4 is connected with the mircrometer gauge probe 10 of micrometer caliper 9, on wedge-shaped slot vibration rod 4, have wedge-shaped slot 11, one end of tested conduction sample 5 is fixed on the specimen holder 6 of particular design, the other end of tested conduction sample 5 extends in wedge-shaped slot 11, tested conduction sample 5 is connected with multi-path digital multimeter 7 by being fixed on the outer lead of the resistance measurement contact chip 6-4 on specimen holder 6.Utilize the movement of the mircrometer gauge probe 10 that high-precision micrometer caliper 9 front ends connect accurately to measure the amplitude of wedge-shaped slot vibration rod 4, range ability is 1 μ m~4mm, and measuring accuracy is 1 μ m.
In the course of work, electromagnetic transducer 3 drives wedge-shaped slot vibration rod 4 that vertical tremor occurs, thereby drives tested conduction sample 5 one end that embed in wedge-shaped slot 11 to produce back and forth vibrations; Mircrometer gauge pops one's head in 10 for limiting and measure the displacement of wedge-shaped slot vibration rod 4, thereby measures the vibrations amplitude of tested conduction sample 5.
As shown in Figure 2, the wiring layout of the tested conduction sample of typical paper tinsel and film class small scale and specimen holder, the bare terminal end of the tested conduction sample of the small scale 5-1 of the small scale conduction specimen holder 6 clamping difformity specifications by particular design; Experiment is comprised of compressing tablet 6-2, bolt fastener 6-3, two resistance measurement contact chip 6-4 on jig main body 6-1, fixture with specimen holder 6, on jig main body 6-1 and fixture, compressing tablet 6-2 is that stainless steel material processes, and entire body is carried out insulation processing, the tested conduction sample of small scale 5-1 is connected by bolt fastener 6-3 with specimen holder 6, and resistance measurement contact chip 6-4 is directly connected with the tested conduction sample of small scale 5-1.
One end upper surface of jig main body 6-1 has terraced structure, and one end of two resistance measurement contact chip 6-4 extends respectively the both sides of terraced structure bottom, and one end of the tested conduction sample of small scale 5-1 extends the middle part of terraced structure bottom; On fixture, compressing tablet 6-2 is installed with in small scale tested conduction sample 5-1 and two resistance measurement contact chip 6-4 tops, and engages with the terraced structure of jig main body 6-1.
As shown in Figure 4, the wiring layout of the typical case silk tested conduction sample of material class and specimen holder, clamps the bare terminal end of the tested conduction sample of the thin copper wire 5-2 of difformity specifications by specimen holder 6; Experiment is comprised of compressing tablet 6-2, bolt fastener 6-3, two resistance measurement contact chip 6-4 on jig main body 6-1, fixture with specimen holder 6, on jig main body 6-1 and fixture, compressing tablet 6-2 is that stainless steel material processes, and entire body is carried out insulation processing, the tested conduction sample of thin copper wire 5-2 is connected by bolt fastener 6-3 with specimen holder 6, and resistance measurement contact chip 6-4 is directly connected with the tested conduction sample of thin copper wire 5-2.
3, detection and recording section, comprise multi-path digital multimeter 7 and the PC 8 being attached thereto.
One end of multi-path digital multimeter 7 connects tested conduction sample 5(as small scale tested conduction sample 5-1 or the tested conduction sample of thin copper wire 5-2), the other end of multi-path digital multimeter 7 is connected with PC 8, multi-path digital multimeter 7 is for detecting in real time the resistance value of tested conduction sample 5, and gives the PC 8 for data recording by signal feedback.
In experimentation, with the resistance measurement contact chip 6-4 that wire handle is connected with tested conduction sample 5, be connected in multi-path digital multimeter 7 resistance value of the tested conduction sample 5 of Real-time Collection, and the situation of change of resistance value.Utilize the changing value of accurately measuring tested conduction sample 5 resistance in fatigue process with specimen holder 6 and multi-path digital multimeter 7, the data by PC 8 Real-time Collection multi-path digital multimeter 7, realize the automation collection in experimentation.When the increment of the resistance of tested conduction sample 5 reach initial resistance 30% time, be defined as the breakaway poing of tested conduction sample 5; When tested conduction sample 5 resistance variations arrive infinity, PC 8 stops record data automatically, and by data Auto-Memory before.
The bending fatigue method for testing reliability of low dimension conductive material of the present invention, utilizes above-mentioned test macro, and concrete steps are as follows: (1) measures the tensile property of the single shaft of tested conductive material in advance, obtains its tensile stress-strain curve; (2), according to sample original length and required semi-girder length, select tested conduction sample at the clamping length of specimen holder end; (3) by adjusting, be fixed on the high-precision two-dimensional platform on optical table, adjust the degree of depth that tested conduction sample inserts wedge-shaped slot vibration rod, make it reach the needed span of experiment; (4) by adjusting, be fixed on high precision mircrometer gauge and the power amplifier on optical table, obtain the corresponding amplitude output of electromagnetic transducer; (5) utilize the drawing stress-strain data obtaining in advance, in conjunction with computer finite element simulation, calculate tested conduction sample in the corresponding repeated strain ε of bare terminal end root and stress σ value thereof; (6) adopt multi-path digital multimeter, the resistance value of tested conduction sample is measured and record in real time; (7) by measuring the real-time resistance value of sample, calculate sample resistance change rate, obtain resistance change rate and the relation curve between fatigue load cycle of executing, thereby draw the fatigue lifetime of sample and the information of crack initiation and expansion.
The present invention goes out by finite element simulation calculation maximum stress and the strain that tested conduction sample 5 roots bear.By to collecting the data of resistance variations in time, calculate the crack initiation life and total fatigue lifetime of tested conduction sample 5.
The present invention utilizes multi-path digital multimeter to detect and record the different resistance value of the tested conduction sample of small scale in whole fatigue process.Can make its waveform that produces multiple fatigue loading by the parameter of function generator is set, can apply from La-La load to the fatigue load of drawing-pressing symmetrical and asymmetric etc. any curve form the tested conduction sample of small scale.In conjunction with existing semi-girder bending fatigue test macro, utilize the fixture matching with special-shaped sample of particular design.
The tested conduction sample of the present invention is the silk material that has substrate and all kinds of conductive films, paper tinsel and the various conductions supported without substrate.The membraneous material that the present invention tests is for preparing conductive film and unsupported conductive foil or the membraneous material on flexible base, board by technology such as various physics and chemistries.
Embodiment 1
By thickness, be that the metal nickel foil of 50 μ m is through mechanical buffing and electropolishing, tested conduction sample 5 thickness are 34 μ m, cut into the tested conduction sample of U-shaped small scale 5-1, and this sample is fixed on specimen holder 6, choosing semi-girder effective length is 3mm, and the wiring layout of sample and specimen holder 6 devices as shown in Figure 2.Before fatigue experiment, utilize one way tensile test to obtain the tensile stress-strain curve of nickel foil, to obtain the constitutive relation in finite element analogy, utilizing constitutive relation to calculate the maximum strain of sample root is 1.0921%.Selecting frequency is that the sine wave of 50Hz carries tired waveform as executing, and sample amplitude is 2mm, adopts the symmetrical fatigue loading of tension and compression.The real-time resistance value of sample recording in fatigue experiment process, calculate the relative change rate of sample resistance, and obtain resistance change rate and the relation curve (as shown in Figure 3) between fatigue load cycle of executing, from curve, when sample resistance change rate is increased to 30%, as sample resistance change rate, undergo mutation, now fatigue load circulation cycle is 71800 weeks, the unexpected increase of sample resistance value, the crackle generation unstable propagation that shows the inner germinating of sample, be defined as crack initiation life, when fatigue load circulation sample generation fatigue break in the time of 80000 weeks, therefore the total fatigue life of sample is 80000 weeks, the germinating life-span of fatigue crack is the 70000th week.
Embodiment 2
The drawing fine copper silk that is 25 μ m by diameter bends to arc, and its two ends are fixed on fixture 6, and choosing filament semi-girder length is 3.5mm, and wiring layout as shown in Figure 4.Before fatigue experiment, utilize one way tensile test to obtain the tensile stress-strain curve of copper wire, to obtain the constitutive relation in finite element analogy, utilizing constitutive relation to calculate the maximum strain of sample root is 8.5%.Selecting frequency is that the sine wave of 50Hz carries tired waveform as executing, and the amplitude of sample is 2mm, adopts the symmetrical fatigue loading of tension and compression.Utilize multi-channel digital multimeter to gather the resistance value of sample in fatigue experiment process.The real-time resistance value of sample recording in fatigue experiment process, calculate the relative change rate of sample resistance, and obtain resistance change rate and the relation curve (as shown in Figure 5) between fatigue load cycle of executing, due to the sample effect of fatigue load by bending, having there is tired intrusion and squeeze-out phenomenon at the root being clamped by specimen holder 6 in silk, finally causes it from fracture of root.As seen from Figure 5, when fatigue load circulation cycle is 12500 weeks, the resistance change rate of sample is undergone mutation, sample resistance value occurs to increase suddenly, the crackle generation unstable propagation that shows the inner germinating of sample, sample generation fatigue break in the time of 88500 weeks, so the total fatigue life of sample is 88500 weeks, the germinating life-span of fatigue crack is the 12500th week.
Embodiment result shows, the present invention produces fatigue loading waveform by digital function generator, then amplifies through power amplifier, drives electromagnetic transducer to drive the vibrations of wedge-shaped slot vibration rod, drives the tested conduction sample of the small scale being embedded in wedge-shaped slot to produce vibrations.The other end of sample is fixed on the fixture of particular design, and fixture is connected with multi-path digital multimeter, the sample resistance value data that recycling PC Real-time Collection multi-path digital multimeter is measured.Complete after experiment, utilize the stress-strain diagram previously having obtained, by finite element simulation calculation, obtain cantilever beam specimen clamping root maximum stress, strain value.Finally by the resistance variations rate curve of recording, obtain fatigue crack initiation life and sample total fatigue lifetime, thereby realized the mensuration of microscale conductive material fatigue behaviour.Entire life and crack initiation life when the present invention can determine fatigue experiment more accurately, experimental implementation simple and fast, and can carry out real-time monitored and analysis to tested conduction sample.

Claims (9)

1. a bending fatigue method for testing reliability for low dimension conductive material, the test macro of the method is comprised of three parts: (1) Electromagnetic Drive part; (2) fatigue loading and measure portion; (3) detection and recording section;
(1) Electromagnetic Drive part, comprise digital function generator, power amplifier, electromagnetic transducer, the output terminal of digital function generator connects power amplifier, the output terminal of power amplifier connects electromagnetic transducer, and the output terminal of electromagnetic transducer connects the wedge-shaped slot vibration rod of fatigue loading and measure portion;
(2) fatigue loading and measure portion, comprise wedge-shaped slot vibration rod, tested conduction sample, specimen holder, micrometer caliper and mircrometer gauge probe, specimen holder is fixed on three-dimensional mechanically moving frame, tested conduction sample is fixed in two-dimensional stage by three-dimensional mechanically moving frame, micrometer caliper and mircrometer gauge probe are fixed in the two-dimensional stage at bending fatigue reliability test system place by its fixed mount, one end of wedge-shaped slot vibration rod is connected with electromagnetic transducer, the other end of wedge-shaped slot vibration rod is connected with the mircrometer gauge of micrometer caliper probe, on wedge-shaped slot vibration rod, have wedge-shaped slot, one end of tested conduction sample is fixed on specimen holder, the other end of tested conduction sample extends in wedge-shaped slot, tested conduction sample is connected with multi-path digital multimeter by being fixed on the outer lead of the resistance measurement contact chip on specimen holder,
(3) detection and recording section, comprise multi-path digital multimeter and the PC being connected with multi-path digital multimeter; One end of multi-path digital multimeter connects tested conduction sample, and the other end of multi-path digital multimeter is connected with PC;
It is characterized in that, concrete steps are as follows:
(1) measure in advance the tensile property of the single shaft of tested conductive material, obtain its tensile stress-strain curve;
(2), according to sample original length and required semi-girder length, select tested conduction sample at the clamping length of specimen holder end;
(3) by adjusting, be fixed on the two-dimensional stage on optical table, adjust the degree of depth that tested conduction sample inserts wedge-shaped slot vibration rod, make it reach the needed span of experiment;
(4) by adjusting, be fixed on mircrometer gauge and the power amplifier on optical table, obtain the corresponding amplitude output of electromagnetic transducer;
(5) utilize the drawing stress-strain data obtaining in advance, in conjunction with computer finite element simulation, calculate tested conduction sample in the corresponding repeated strain ε of bare terminal end root and stress σ value thereof;
(6) adopt multi-path digital multimeter, the resistance value of tested conduction sample is measured and record in real time;
(7) by measuring the real-time resistance value of sample, calculate sample resistance change rate, obtain resistance change rate and the relation curve between fatigue load cycle of executing, thereby draw the fatigue lifetime of sample and the information of crack initiation and expansion.
2. according to the bending fatigue method for testing reliability of low dimension conductive material claimed in claim 1, it is characterized in that, in test process, digital function generator produces simulating signal fatigue loading waveform used in fatigue experiment, through power amplifier, carry out power amplification, electric signal transmission, to electromagnetic transducer, is become electric signal into mechanical signal by electromagnetic transducer and drives the wedge-shaped slot vibration rod of fatigue loading and measure portion to shake;
In the course of work, electromagnetic transducer drives wedge-shaped slot vibration rod generation vertical tremor, thereby drives the tested conduction sample one end embedding in wedge-shaped slot to produce back and forth vibrations; Mircrometer gauge probe is used for limiting and measure the displacement of wedge-shaped slot vibration rod, thereby measures the vibrations amplitude of tested conduction sample.
3. according to the bending fatigue method for testing reliability of low dimension conductive material claimed in claim 1, it is characterized in that, multi-path digital multimeter is used for detecting in real time the resistance value of tested conduction sample, and gives the PC for data recording by signal feedback; In experimentation, with the resistance measurement contact chip that wire handle is connected with tested conduction sample, be connected in multi-path digital multimeter the resistance value of the tested conduction sample of Real-time Collection, and the situation of change of resistance value; Utilize specimen holder and multi-path digital multimeter accurately to measure the changing value of tested conduction sample resistance in fatigue process, the data by PC Real-time Collection multi-path digital multimeter, realize the automation collection in experimentation; When the increment of the resistance of tested conduction sample reaches 30 % of initial resistance, be defined as the breakaway poing of tested conduction sample; When tested conduction sample resistance variations arrives infinity, PC stops record data automatically, and by data Auto-Memory before.
4. according to the bending fatigue method for testing reliability of low dimension conductive material claimed in claim 1, it is characterized in that, by the parameter of function generator is set, make its waveform that produces multiple fatigue loading, tested conduction sample is applied from La-La load to the fatigue load of drawing-pressing symmetric and asymmetric any curve form.
5. according to the bending fatigue method for testing reliability of low dimension conductive material claimed in claim 1, it is characterized in that, tested conduction sample is the silk material that has substrate and all kinds of conductive films, paper tinsel or the various conductions supported without substrate.
6. according to the bending fatigue method for testing reliability of low dimension conductive material claimed in claim 1, it is characterized in that, utilize the movement of the mircrometer gauge probe that micrometer caliper front end connects accurately to measure the amplitude of wedge-shaped slot vibration rod, range ability is 1 μ m ~ 4 mm, and measuring accuracy is 1 μ m.
7. according to the bending fatigue method for testing reliability of low dimension conductive material claimed in claim 1, it is characterized in that, specimen holder comprises compressing tablet on jig main body, fixture, bolt fastener, resistance measurement contact chip, tested conduction sample is connected by bolt fastener with specimen holder, and resistance measurement contact chip is directly connected with tested conduction sample.
8. according to the bending fatigue method for testing reliability of low dimension conductive material claimed in claim 7, it is characterized in that, on jig main body and fixture, compressing tablet is that stainless steel material processes, and entire body is all carried out insulation processing.
9. according to the bending fatigue method for testing reliability of low dimension conductive material claimed in claim 7, it is characterized in that, one end upper surface of jig main body has terraced structure, one end of two resistance measurement contact chips extends respectively the both sides of terraced structure bottom, and one end of tested conduction sample extends the middle part of terraced structure bottom; On fixture, compressing tablet is installed with in tested conduction sample and two resistance measurement contact chip tops, and engages with the terraced structure of jig main body.
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