CN102360696A - Open and close type monocrystal permanent magnetic field structure - Google Patents

Open and close type monocrystal permanent magnetic field structure Download PDF

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Publication number
CN102360696A
CN102360696A CN2011101543622A CN201110154362A CN102360696A CN 102360696 A CN102360696 A CN 102360696A CN 2011101543622 A CN2011101543622 A CN 2011101543622A CN 201110154362 A CN201110154362 A CN 201110154362A CN 102360696 A CN102360696 A CN 102360696A
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magnetic
open
close type
magnetic field
field structure
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CN102360696B (en
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张承臣
李波
李恒盛
李朝朋
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Longi Magnet Co Ltd
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Longi Magnet Co Ltd
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Abstract

The invention discloses an open and close type monocrystal permanent magnetic field structure, which comprises magnetic yoke end plates (1), a magnetizing plate I (2), an angular wheel (3), a hinge (4), an open and close type push rod (5), a magnetizing plate II (6), a magnet outer cover (7), a magnet (8) and a magnetic box (9), wherein the magnetic box is fixed with the magnetizing plate I and the magnetizing plate II; the magnetic yoke end plates at two ends are welded firmly by the magnetizing plate I and the magnetizing plate II so as to form two semicircular C-arm magnetic poles to construct a pair of circular magnetic fields; the two semicircular magnetic poles are connected with each other by using the hinge (4); the open and close type push rod drives the two semicircular magnetic poles to do open and close rotation around the hinge serving as a shaft; the magnetic box in which a magnet is arranged is encapsulated in the magnet outer cover; and the angular wheel is used for flexibly moving the open and close type monocrystal permanent magnetic field structure. By application of the open and close type monocrystal permanent magnetic field structure, process parameters of polysilicon in a monocrystal state can be guaranteed; compared with an electromagnetic field, the open and close type monocrystal permanent magnetic field has the advantages that: zero power consumption, zero energy consumption during working, zero maintenance and zero fault during working are realized.

Description

A kind of open-close type monocrystalline permanent magnetic field structure
Technical field
The invention belongs to magnetic apparatus manufacturing technology field, have and relate to a kind of open-close type monocrystalline permanent magnetic field structure, use this open-close type monocrystalline permanent magnetic field structure can form circular magnetic field.
Background technology
Along with fast development of national economy; And along with the fast development of China's scientific and technological level; Semiconductor silicon material is used more and more widely; Also more and more require ultra-large circuit VLSI and the ULSI ULSI demand with very high speed integrated circuit (UHSIC), this just requires the performance parameter of silicon materials to require increasingly high.Particularly, increasing to the demand of polysilicon, require increasingly high to the precision (purity) of polysilicon.Since use feasible size and the shape that is difficult to control the material for preparing of chemical corrosion method, the quality of more wayward product, and this just makes people that sight is transferred on the physical preparation method that uses magnetic field.Particularly in recent years, magnetic field intensity receives people's extensive attention above the application of the ultrastrong magnetic field of 10T; High-intensity magnetic field can suspend in high-intensity magnetic field like water, plastics, timber etc. so that the nonferromagnetic material also can demonstrate intrinsic magnetic properties because of its powerful magnetization; The object that acts on macroscopic view with the general magnetic field is different, and high-intensity magnetic field can be delivered to high-intensity magnetic energy the atomic scale of material, changes the behaviors such as arrangement, coupling and migration of atom, thereby the tissue and the performance of material produced far-reaching influence; In material preparation, form, size, distribution and orientation etc. in the magnetic field energy control material growth course, thus influence the institutional framework of material, the final new material that obtains to have premium properties.But the technology that present magnetization effect through high-intensity magnetic field prepares polycrystalline silicon material is not used on a large scale; Trace it to its cause and be; Owing to use electromagnetic field to bring huge energy loss, at first be uneconomical and not environmental protection, moreover be in present scale preparation polysilicon process; Owing to the uncontrollability of strong magnetic field, also caused the uncertainty of polysilicon precision.
Therefore, be badly in need of at present a kind of can economy and environmental protection, and can controlling magnetic field produce and the magnetic field structure of sphere of action.
Summary of the invention
In order to solve above-mentioned technical barrier; The inventor is through a large amount of experiments and research; A kind of open-close type monocrystalline permanent magnetic field structure has been proposed; This open-close type monocrystalline permanent magnetic field structure can solve a difficult problem of the prior art effectively, not consuming electric power not only, and need not safeguard and not have the noise pollution in the electromagnetic field application process.
According to technical scheme of the present invention, provide a kind of open-close type monocrystalline permanent magnetic field structure, it comprises that magnetic grips end plate 1, magnetic conductive board 1, horn ring 3, folding 4, folding push rod 5, magnetic conductive board 26, magnet outer cover 7, magnet 8 and magnetic holder 9; Magnetic holder 9 is fixed together with magnetic conductive board 1 and magnetic conductive board 26, and the magnetic at two ends is gripped end plate 1 through magnetic conductive board 1 and magnetic conductive board 26 firm welding, forms two semicircle magnetic poles, and circular magnetic field partners.Use folding 4 to connect two semicircle magnetic poles, and can serve as that axle rotates two semicircle magnetic pole foldings with folding 4, the folding of two magnetic poles be to be driven by folding push rod 5; The magnetic holder 9 that inside is equipped with magnet 8 is encapsulated in the magnet outer cover 7; Horn ring 3 evenly is fixed on magnet outer cover 7 periphery, is used for moving flexibly open-close type monocrystalline permanent magnetic field structure.
Preferably, open-close type monocrystalline permanent magnetic field structural entity is that open-close type is formed " C " structure.
Preferably, magnet 8 is a monopolar configuration, and magnetic pole adopts the rare-earth Nd-Fe-B material.
More preferably, that magnet 8 adopts is Nd-Fe-B N38, and magnetic strength coercive force (bHb) is greater than 11200 Oe (oersted).
Preferably, magnetic holder 9 is box bodys that put together magnet, with yoke end plate 1, magnetic conductive board 1, magnetic conductive board 26, folding 4 through being welded to form one.
Preferably, magnetic pole outer cover 7 is to adopt the welding of wire drawing corrosion resistant plate material.
The present invention is reasonable in design, owing to adopted open-close type monocrystalline permanent magnetic field structure, has strengthened the uniformity that magnetic field gradient and magnetic force distribute, and does not have energy loss simultaneously, and open-close type has increased the conveniency that uses; In addition, the compact of structure has improved the magnetic potential utilance.
Description of drawings
Fig. 1 is an open-close type monocrystalline permanent magnetic field structural representation of the present invention;
Fig. 2 is the folding sketch map among Fig. 1;
Fig. 3 is the folding push rod sketch map among Fig. 1;
Fig. 4 is the sketch map of magnetic holder in the open-close type monocrystalline permanent magnetic field structure among Fig. 1;
Fig. 5 is a vertical view of single crystal growing furnace being used open-close type monocrystalline permanent magnetic field structure.
Embodiment
Specify open-close type monocrystalline permanent magnetic field structure of the present invention below in conjunction with accompanying drawing 1-5, bright as just as an exampleBSEMGVR takeN-PSVSEMOBJ below, know with those skilled in the art know that, all fall among the present invention as long as meet the method and system of inventive concept; Additionally, should protection scope of the present invention only be limited to the concrete parameter of open-close type monocrystalline permanent magnetic field structure concrete structure or parts.
As shown in Figure 1, open-close type monocrystalline permanent magnetic field structure of the present invention, it comprises that magnetic grips end plate 1, magnetic conductive board 1, horn ring 3, folding 4, folding push rod 5, magnetic conductive board 26, magnet outer cover 7, magnet 8 and magnetic holder 9; Magnetic holder 9 is fixed together with magnetic conductive board 1 and magnetic conductive board 26, and the magnetic at two ends is gripped end plate 1 through magnetic conductive board 1 and magnetic conductive board 26 firm welding, forms two semicircle magnetic poles, and circular magnetic field partners.Use folding 4 to connect two semicircle magnetic poles, and can serve as that axle rotates two semicircle magnetic pole foldings with folding 4, the folding of two magnetic poles be to be driven by folding push rod 5; The magnetic holder 9 that inside is equipped with magnet 8 is encapsulated in the magnet outer cover 7; Horn ring 3 evenly is fixed on magnet outer cover 7 periphery, is used for moving flexibly open-close type monocrystalline permanent magnetic field structure.
Particularly, open-close type monocrystalline permanent magnetic field structural entity is that open-close type is formed " C " structure; Magnetic holder 9 is box bodys that put together magnet, with yoke end plate 1, magnetic conductive board 1, magnetic conductive board 26, folding 4 through being welded to form one.Magnetic pole outer cover 7 is to adopt the welding of wire drawing corrosion resistant plate material.
Shown in Fig. 5; Open-close type monocrystalline permanent magnetic field structural entity is " open-close type half " structure; Two magnetic holders that comprise magnetic pole are positioned at both sides, single crystal growing furnace body of heater main chamber, and magnetic field is transverse magnetic field, and the parallel material district, main chamber of passing of the magnetic line of force is constituting the closed-loop path through yoke plate, magnetic conductive board.Magnet 8 is a monopolar configuration, and magnetic pole adopts the rare-earth Nd-Fe-B material.Produce magnetic direction perpendicular to the sidewall of crucible in the single crystal growing furnace by magnet 8, make the sidewall of crucible table produce the 400-500Gs field intensity, and crucible center field intensity is 0 magnetic field.
In more detail, that magnet 8 adopts is Nd-Fe-B N38, and magnetic strength coercive force (bHb) is greater than 11200 Oe (oersted).Each small magnet is arranged to repelling each other between row and the row and between row and the row in magnet 8; And the yoke endplate area is 1.7 times of the magnetic pole area, and the enough thick magnet of yoke plate does not demagnetize.
Further, the yoke end plate is the magnetic holder termination, plays the magnetic conduction effect, makes in the magnetic holder magnetic force that magnetic patch produces through the yoke end plate conducting magnetic line of force, and the magnetic line of force is not leaked outside, and strengthens magnetic field intensity.Preferably, yoke end plate overall dimension 310X150X22, this overall dimension is the minimum size of being passed through of the magnetic line of force.Magnetic conductive board one is symmetrical with magnetic conductive board two, and main effect is a magnetic conduction, and magnetic field is not leaked outside, and its overall dimension is: 1492X400X40, and magnetic conductive board one can satisfy magnetic conduction with the combination of magnetic conductive board two; Can overcome again and cause the processing problem of difficult because of plate is too thick.As shown in Figure 1, when opening open-close type monocrystalline permanent magnetic field structure, can move open-close type monocrystalline permanent magnetic field structure flexibly through horn ring 3, make single crystal growing furnace thorough from magnetic field environment (referring to Fig. 5).Folding 4 shown in Fig. 1 and Fig. 2 is used under the promotion of folding push rod 5 realizing the folding of two " C " types of open-close type monocrystalline permanent magnetic field structure wall.As shown in Figure 3, folding push rod 5 is that motor 51 drives hydraulic stems 53 through hydraulic pump 52, realizes that promptly hydraulic stem 53 is flexible, promotes folding 4 through stretching of hydraulic stem 53 and realizes the folding of two " C " types of open-close type monocrystalline permanent magnetic field structures wall.In addition, magnetic holder is put into magnet 8 for 9 li and is fixed, and the outside is with on magnetic pole outer cover 7 covers.
The present invention does not use electromagnet, but the overall improvement through structure, realized simple in structure, stable performance, manufacturing cost is low.Through the use of horn ring, increase the mobility of equipment.
Apply the present invention in the preparation of polysilicon, guaranteed the technological parameter of polysilicon when crystallization is monocrystalline, overcome the difficult problem of prior art.In addition, the fixed monocrystalline magnetic field structure uneven distribution of the early stage invention of the inventor and the problem that is not easy to adjust have also been overcome.Further, the present invention can adapt to single crystal growing furnace several kinds of types, and fixed monocrystalline magnetic field structure can only be on a kind of single crystal growing furnace of model, so open-close type monocrystalline permanent magnetic field structure adapts to; Also having open-close type monocrystalline permanent magnetic field structure of the present invention to adopt magnetic field is transverse magnetic field, and the parallel material district, main chamber of passing of the magnetic line of force is constituting the closed-loop path through yoke plate, magnetic conductive board.Make the sidewall of crucible table in the single crystal growing furnace produce the 400-500Gs field intensity, and crucible center field intensity is 0 magnetic field.This is different with existing fixed monocrystalline magnetic field structure.
As above-mentioned; The clear open-close type monocrystalline permanent magnetic field structure that has described the present invention's proposition in detail; But this area those skilled in the art are appreciated that under the situation of the spirit and scope of the present invention that do not deviate from the accompanying claims definition, can in form and details, make multiple modification.Therefore, all should be worked as and be included within protection scope of the present invention with reference to the various modifications that technical scheme of the present invention is made.

Claims (7)

1. open-close type monocrystalline permanent magnetic field structure, it comprises that magnetic grips end plate (1), magnetic conductive board one (2), horn ring (3), folding (4), folding push rod (5), magnetic conductive board two (6), magnet outer cover (7), magnet (8) and magnetic holder (9); Magnetic holder (9) is fixed together with magnetic conductive board one (2) and magnetic conductive board two (6), and the magnetic at two ends is gripped end plate (1) through magnetic conductive board one (2) and magnetic conductive board two (6) firm welding, forms two semicircles " C " arm magnetic pole, and circular magnetic field partners; Use folding (4) to connect two semicircle magnetic poles, and can serve as that axle rotates two semicircle magnetic pole foldings with folding (4), the folding of two magnetic poles be to be driven by folding push rod (5); The magnetic holder (9) that inside is equipped with magnet (8) is encapsulated in the magnet outer cover (7); Horn ring (3) evenly is fixed on magnet outer cover (7) periphery, is used for moving flexibly open-close type monocrystalline permanent magnetic field structure.
2. open-close type monocrystalline permanent magnetic field structure according to claim 1, wherein open-close type monocrystalline permanent magnetic field structural entity consists of open-close type " C " structure.
3. open-close type monocrystalline permanent magnetic field structure according to claim 1, wherein magnet (8) is a monopolar configuration, magnetic pole adopts the rare-earth Nd-Fe-B material.
4. open-close type monocrystalline permanent magnetic field structure according to claim 3, that wherein magnet (8) adopts is Nd-Fe-B N38, magnetic strength coercive force (bHb) is greater than 11200 Oe (oersted).
5. open-close type monocrystalline permanent magnetic field structure according to claim 1, wherein magnetic holder (9) is a box body that puts together magnet, with yoke end plate (1), magnetic conductive board one (2), magnetic conductive board two (6, folding (4) is through being welded to form one.
6. open-close type monocrystalline permanent magnetic field structure according to claim 1, wherein magnetic pole outer cover (7) is to adopt the welding of wire drawing corrosion resistant plate material.
7. open-close type monocrystalline permanent magnetic field structure according to claim 2; Wherein folding push rod (5) comprises motor, hydraulic pump and hydraulic stem; It is flexible that motor-driven hydraulic pumps drives hydraulic stem, promotes folding (4) through stretching of hydraulic stem and realize the folding of two " C " arm configurations of open-close type monocrystalline permanent magnetic field structure.
CN 201110154362 2011-06-10 2011-06-10 Open and close type monocrystal permanent magnetic field structure Active CN102360696B (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106669301A (en) * 2016-09-13 2017-05-17 沈阳隆基电磁科技股份有限公司 Vacuum dust removal equipment for single crystal growth furnace
CN112837885A (en) * 2020-12-30 2021-05-25 四川红华实业有限公司 Pole shoe wire inclusion in mass spectrometer electromagnet and forming method
WO2021182309A1 (en) * 2020-03-13 2021-09-16 横河電機株式会社 Magnetization device and magnetizing method

Citations (5)

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Publication number Priority date Publication date Assignee Title
US5178720A (en) * 1991-08-14 1993-01-12 Memc Electronic Materials, Inc. Method for controlling oxygen content of silicon crystals using a combination of cusp magnetic field and crystal and crucible rotation rates
CN1958875A (en) * 2006-09-28 2007-05-09 浙江理工大学 Equipment and method for drawing single article of semiconductor
CN101245487A (en) * 2007-02-14 2008-08-20 抚顺隆基磁电设备有限公司 Single-crystal electromagnetic field
CN201106071Y (en) * 2007-09-20 2008-08-27 西安理工大学 Cusp magnetic field device of single-crystal furnace
CN201593075U (en) * 2009-12-28 2010-09-29 抚顺隆基电磁科技有限公司 Annular permanent magnetic field for single crystal

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5178720A (en) * 1991-08-14 1993-01-12 Memc Electronic Materials, Inc. Method for controlling oxygen content of silicon crystals using a combination of cusp magnetic field and crystal and crucible rotation rates
CN1958875A (en) * 2006-09-28 2007-05-09 浙江理工大学 Equipment and method for drawing single article of semiconductor
CN101245487A (en) * 2007-02-14 2008-08-20 抚顺隆基磁电设备有限公司 Single-crystal electromagnetic field
CN201106071Y (en) * 2007-09-20 2008-08-27 西安理工大学 Cusp magnetic field device of single-crystal furnace
CN201593075U (en) * 2009-12-28 2010-09-29 抚顺隆基电磁科技有限公司 Annular permanent magnetic field for single crystal

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106669301A (en) * 2016-09-13 2017-05-17 沈阳隆基电磁科技股份有限公司 Vacuum dust removal equipment for single crystal growth furnace
WO2021182309A1 (en) * 2020-03-13 2021-09-16 横河電機株式会社 Magnetization device and magnetizing method
JP2021145119A (en) * 2020-03-13 2021-09-24 横河電機株式会社 Magnetization device and magnetizing method
JP7314842B2 (en) 2020-03-13 2023-07-26 横河電機株式会社 Magnetizing device and magnetizing method
CN112837885A (en) * 2020-12-30 2021-05-25 四川红华实业有限公司 Pole shoe wire inclusion in mass spectrometer electromagnet and forming method

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