CN102352526A - Electrochemical corrosion device and operating method thereof - Google Patents
Electrochemical corrosion device and operating method thereof Download PDFInfo
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- CN102352526A CN102352526A CN2011102977440A CN201110297744A CN102352526A CN 102352526 A CN102352526 A CN 102352526A CN 2011102977440 A CN2011102977440 A CN 2011102977440A CN 201110297744 A CN201110297744 A CN 201110297744A CN 102352526 A CN102352526 A CN 102352526A
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Abstract
The invention discloses an electrochemical corrosion device for a single crystal tungsten wire of a field emission electronic source and an operating method thereof. The electrochemical corrosion device disclosed by the invention comprises a right-angle support frame, a fixed datum plate, a bidirectional sloping panel, a vertical adjusting plate, a ceramic seat fixed mount, a U-shaped tube support frame and a U-shaped tube. A three-dimensional position adjusting module is adopted to constitute a new electrochemical corrosion device. The electrochemical corrosion device has the advantages that the verticality and depth of the single crystal tungsten wire which is soaked in a liquid level, of the field emission electronic source can be adjusted conveniently and accurately, thus the control is simple and accurate, the stability is good, and the success rate can reach above 95% once the optimal condition is met; the U-shaped tube is adopted in the device to serve as an electrolytic cell, which can effectively isolate two electrodes, reduce the mutual influences of the two electrodes in the reaction process due to bubble generation, and is favor of connection of signal source leads; and the corrosion solution can be saved by using the U-shaped electrolytic cell to replace a beaker electrolytic cell.
Description
Technical field
The present invention relates to the galvanic corrosion device, be specifically related to a kind of galvanic corrosion device and working method thereof that is used for the single crystal tungsten wire of field emitting electronic source.
Background technology
Field emission microscope is explored the important tool of microcosm as the mankind; With its unique high resolution and analytical performance; Be widely used in numerous areas such as Materials science, life science, semi-conductor industry and geology, the energy, medical treatment, pharmacy, in human sciences's research and industrial production, bringing into play huge effect.
Field emitting electronic source is one of core component of field emission microscope, and the significant parameter of its performance comprises that the emission of electron beam gun, line distribute, restraint shape of spot etc.Its performance directly affects the resolving power of electron microscope.
At present; Be used for commercial field emitting electronic source and mainly contain two kinds; That is: awkward silence at a meeting emission electron sources and zirconium white/tungsten Schottky (ZrO/W Schottky) field emitting electronic source; And ZrO/W Schottky field emitting electronic source more and more receives Electronic Speculum production firm and user's favor so that its brightness is high, line is big, beam stability good, electron energy disperses advantages such as little.
The elementary cell of ZrO/W Schottky field emitting electronic source comprises: the ceramics seat that has two electrodes; The V-type that is welded on the electrode of ceramics seat is sent out the fork tungsten filament; And be welded on the single crystal tungsten wire at tip that V-type is sent out the fork tungsten filament.
Field emitting electronic source brightness is high, line is big, beam stability good in order to satisfy, electron energy disperses little etc. requirement; Need do the pointization processing to the tip of ZrO/W Schottky field emitting electronic source, the radius-of-curvature of electron source emission tip is controlled between the 0.5-1um.
The method at the tip of fabricating yard emission electron sources mainly contains: mechanical mill, chemical corrosion, ion bombardment and galvanic corrosion etc.First three methods is not because complex procedures, poor controllability, dimensional precision are not high, makes that the success ratio at tip of preparation field emitting electronic source is lower.And electrochemical erosion method is many with its controllable parameter, and the corrosion precision is high, becomes effective means gradually and is adopted by everybody, has developed multiple galvanic corrosion device at present.Because single crystal tungsten wire is domestic still can not be produced, need from foreign procurement, its price is very expensive, therefore, how to improve the corrosive success ratio, is to update the problem that the galvanic corrosion device is mainly considered always.
Summary of the invention
One object of the present invention is to propose a kind of galvanic corrosion device that is used for the single crystal tungsten wire of field emitting electronic source.
The galvanic corrosion device that is used for the single crystal tungsten wire of field emitting electronic source of the present invention comprises right angle bracing frame, fixed reference plate, inclined in two-way plate, vertical adjusting plate, ceramics seat anchor, U type pipe bracing frame and U type pipe; Wherein, the right angle bracing frame is fixed in order on the optical table that prevents to shake; The fixed reference plate is fixed on the bearing surface of right angle bracing frame through screw; The back surface of inclined in two-way plate relatively also links to each other with the front surface of fixed reference plate; The vertical adjusting plate is fixed on the front surface of inclined in two-way plate; The ceramics seat anchor is installed on the front surface of vertical adjusting plate; U type pipe bracing frame be fixed on the bearing surface of right angle bracing frame and be positioned at the fixed reference plate under; U type pipe is placed on the U type pipe bracing frame.
The fixed reference plate also is included in its top-right first emergence, and fixed body also perpendicular at the lower surface of first emergence and that become one.
Between the back surface of the front surface of fixed reference plate and inclined in two-way plate, be provided with roating sphere that two surfaces are connected and No. two roating spheres more smaller than its diameter.Wherein, a roating sphere is positioned at the back surface that two surperficial lower lefts also sink into the front surface and the inclined in two-way plate of fixed reference plate respectively; No. two roating sphere be positioned at two surfaces the lower right and with a roating sphere on same sea line, sink in the one of which end in the back surface of inclined in two-way plate and the other end contacts with the front surface of fixed reference plate.
The inclined in two-way plate has second emergence similar with fixed reference plate shape.
Further, also be provided with a fine setting screw thread pair and No. two fine setting screw thread pairs on the inclined in two-way plate.Fine setting screw thread pair is arranged on the front surface of second emergence of inclined in two-way plate and penetrates second emergence and contacts with the front surface of first emergence of fixed reference plate; And No. two fine setting screw thread pairs are arranged on the lower surface of fixed body and penetrate fixed body and contact with the lower surface of second emergence.
The vertical adjusting plate further comprises vertical guide rails seat, micrometer head support, micrometer head and guide rail slide block, and wherein, the vertical guide rails seat is fixed on the front surface of inclined in two-way plate; The micrometer head support is fixed on an end of the upper surface of vertical guide rails seat; Micrometer head is installed on the micrometer head support; And the guide rail slide block is installed on the front surface of vertical guide rails seat.
The ceramics seat anchor further comprises anchor base, fixed support and ceramics seat open hole, and wherein, the anchor base is installed on the front surface of guide rail slide block; Fixed support is installed in the front surface of anchor base through threaded hole; The ceramics seat open hole is arranged on support bracket fastened front end.Further, the anchor base also comprises pilot hole and following pilot hole, is separately positioned on apart from threaded hole apart from being the above and below of l, and the central point of two pilot holes and threaded hole is on a vertical line; Spring ball is arranged on support bracket fastened below and is the position of l apart from the threaded hole distance.
U type pipe bracing frame further comprises bracing frame base and U type pipe clamp, wherein, the bracing frame base be fixed on the bearing surface of right angle bracing frame and be positioned at the fixed reference plate under; U type pipe clamp is fixed on the front surface of bracing frame base, and front end is two semicircles, being centered close on the concentric shafts of the center of two semicircles and ceramics seat open hole.
Another object of the present invention is to propose a kind of working method of galvanic corrosion device of the single crystal tungsten wire that is used for field emitting electronic source.
Utilize the working method of single crystal tungsten wire of galvanic corrosion corrosion of equipment field emitting electronic source of the aforesaid single crystal tungsten wire that is used for field emitting electronic source following:
1) pours the corrosive fluid for preparing into U type pipe from an end of U type pipe, and insert electrode;
2) with the fixed support Rotate 180 degree of ceramics seat anchor, make spring ball on the fixed support fall into the last pilot hole of anchor base, the filament ceramics seat that welds tungsten filament is put into the ceramics seat open hole;
3) will install the fixed support Rotate 180 degree of filament ceramics seat, and make support bracket fastened spring ball fall into the following pilot hole of anchor base, making needs the corrosive tungsten filament to align the mouth of pipe of U type pipe;
4) be arranged on a fine setting screw thread pair that rotates before and after the control on the inclined in two-way plate through adjusting, and No. two fine setting screw thread pairs regulating the control left-right rotation, make on the filament ceramics seat tungsten filament vertically downward;
5), the tungsten filament on the filament ceramics seat is immersed in the corrosive fluid through regulating the knob of micrometer head;
The lead that 6) will be connected with signal source and switch is connected with electrode in the U type pipe through the metal electrode on clip and the filament ceramics seat respectively;
7) opening signal source switch, adjustment signal source parameter starts the switch on the wire, begins corrosion;
8) after corrosion finishes, cut-off switch;
9) regulate micrometer head, make the tungsten filament on the filament ceramics seat withdraw from corrosive fluid fully.
Operating process finishes.
The present invention adopts the three-dimensional position adjustment module, constitutes a kind of new galvanic corrosion device, and the single crystal tungsten wire that this galvanic corrosion device can be adjusted field emitting electronic source easily and accurately inserts the verticality of corrosive fluid and the degree of depth of intrusion liquid level.The advantage of this forms of corrosion is: control simply, control is accurate, good stability, in case obtain top condition, its success ratio can reach more than 95%.
In addition, the present invention adopts U type pipe as electrolyzer, has the following advantages: one, the two ends of U type pipe can isolate two electrodes effectively, and can effectively reduce two electrodes and in reaction process, influence each other because of producing bubble; Two, U type pipe makes two electrodes separately, helps the connection of signal source lead-in wire; Three, compare as electrolyzer with beaker, U type pipe electrolyzer is saved corrosive fluid more.
Description of drawings
Fig. 1. galvanic corrosion schematic representation of apparatus of the present invention;
Fig. 2. (a) being the front view of galvanic corrosion device of the present invention, (b) is the left view of galvanic corrosion device of the present invention, (c) is the right oblique drawing of galvanic corrosion device of the present invention, (d) is the vertical view of galvanic corrosion device of the present invention;
Fig. 3. the skeleton view between fixed reference plate of the present invention to the inclined in two-way plate;
Fig. 4. the skeleton view of ceramics seat anchor of the present invention.
Embodiment
Below in conjunction with the detailed description of Figure of description embodiment of the present invention.
As shown in Figure 1; Fig. 1 comprises right angle bracing frame 1, fixed reference plate 2, inclined in two-way plate 3, vertical adjusting plate 4, ceramics seat anchor 5, U type pipe bracing frame 6 and U type pipe 7 for the galvanic corrosion device that is used for the single crystal tungsten wire of field emitting electronic source of the present invention; Wherein, right angle bracing frame 1 is fixed in order on the optical table that prevents to shake; Fixed reference plate 2 is fixed on the bearing surface of right angle bracing frame 1 through screw; The back surface of inclined in two-way plate 3 relatively also links to each other with the front surface of fixed reference plate 2; Vertical adjusting plate 4 is fixed on the front surface of inclined in two-way plate 3; Ceramics seat anchor 5 is installed on the front surface of vertical adjusting plate 4; U type pipe bracing frame 6 be fixed on the bearing surface of right angle bracing frame 1 and be positioned at fixed reference plate 2 under; U type pipe 7 is placed on the U type pipe bracing frame 6.
Fixed reference plate 2 also is included in its top-right first emergence 201, and fixed body 202 also perpendicular at the lower surface of first emergence 201 and that become one, and is as shown in Figure 3.
Between the back surface of the front surface of fixed reference plate 2 and inclined in two-way plate 3, be provided with roating sphere 321 and No. two roating sphere 322 that two surfaces are connected.Wherein, a roating sphere 321 is positioned at the lower left on two surfaces and sinks into the back surface of the front surface and the inclined in two-way plate 3 of fixed reference plate 2 respectively, and it can rotate but can not slide, with thinking that the left-right rotation of inclined in two-way plate 3 provides reference point; No. two roating sphere 322 be positioned at two the surface the lower right and with a roating sphere 321 on same sea line; Sink in the one of which end in the back surface of inclined in two-way plate 3 and the other end contacts with the front surface of fixed reference plate 2; Can rotate the front surface that also can paste fixed reference plate 2 slides; Therefore the diameter of No. two roating spheres 322 is slightly less than the diameter of a roating sphere 321; The rotating shaft that rotate No. two roating sphere 322 and a roating sphere 321 common front and back that constitute inclined in two-way plate 3 is shown in Fig. 3 and Fig. 2 (d).
Inclined in two-way plate 3 has second emergence 301 similar with fixed reference plate 2 shapes, and is as shown in Figure 3.
Further, also be provided with a fine setting screw thread pair 311 and No. two fine setting screw thread pairs 312 on the inclined in two-way plate 3.Fine setting screw thread pair 311 is arranged on the front surface of second emergence 301 of inclined in two-way plate 3 and penetrates second emergence 301 and contacts with the front surface of first emergence 201 of fixed reference plate 2; In order to the spacing between the front surface of the back surface of control inclined in two-way plate 3 and fixed reference plate 2, thereby regulate the rotation of inclined in two-way plate 3 fore-and-aft directions; And No. two fine setting screw thread pairs 312 are arranged on the lower surface of fixed body 202 and penetrate fixed body 202 and contact with the lower surface of second emergence 301; In order to the spacing between the upper surface of the fixed body 202 of the lower surface of second emergence 301 of control inclined in two-way plate 3 and fixed reference plate 2; Be the fulcrum left-right rotation thereby regulate inclined in two-way plate 3 with a roating sphere 321, as shown in Figure 2.
Vertical adjusting plate 4 further comprises: vertical guide rails seat 401, micrometer head support 402, micrometer head 403 and guide rail slide block 404, and wherein, vertical guide rails seat 401 is fixed on the front surface of inclined in two-way plate 3; Micrometer head support 402 is fixed on an end of the upper surface of vertical guide rails seat 401; Micrometer head 403 is installed on the micrometer head support 402; And guide rail slide block 404 is installed on the front surface of vertical guide rails seat 401.Control moving up and down of guide rail slide block 404 through regulating micrometer head 403, thereby realize moving of vertical direction, as shown in Figure 2.
U type pipe bracing frame 6 further comprises bracing frame base 601 and U type pipe clamp 602, wherein, bracing frame base 601 be fixed on the bearing surface of right angle bracing frame 1 and be positioned at fixed reference plate 2 under; U type pipe clamp 602 is fixed on the front surface of bracing frame base 601, and front end is two semicircles, and is in order to fixing U type pipe, being centered close on the concentric shafts of the center of two semicircles and ceramics seat open hole 503, as shown in Figure 2.
Utilize the working method of galvanic corrosion corrosion of equipment single crystal tungsten wire of the aforesaid single crystal tungsten wire that is used for field emitting electronic source following:
1) pours the corrosive fluid for preparing into U type pipe from an end of U type pipe 7, and insert electrode;
2) with the fixed support 502 Rotate 180 degree of ceramics seat anchor 5, make the spring ball 5021 of fixed support 502 fall into the last pilot hole 5011 of anchor base 501, the filament ceramics seat that welds tungsten filament is put into ceramics seat open hole 503;
3) will install the fixed support 502 Rotate 180 degree of filament ceramics seat, and make spring ball 5021 on the fixed support 502 fall into the following pilot hole 5012 of anchor base 501, making needs the corrosive tungsten filament to align the mouth of pipe of U type pipe 7;
4) be arranged on a fine setting screw thread pair 311 that rotates before and after the control on the inclined in two-way plate 3 through adjusting, and No. two fine setting screw thread pairs 312 regulating the control left-right rotation, make on the filament ceramics seat tungsten filament vertically downward;
5), the tungsten filament on the filament ceramics seat is immersed in the corrosive fluid through regulating the knob of micrometer head 403;
The lead that 6) will be connected with signal source and switch is connected with electrode in the U type pipe through the metal electrode on clip and the filament ceramics seat respectively;
7) opening signal source switch, adjustment signal source parameter starts the switch on the wire, begins corrosion;
8) after corrosion finishes, cut-off switch;
9) regulate micrometer head 403, make the tungsten filament on the filament ceramics seat withdraw from corrosive fluid fully.
Operating process finishes.
It should be noted that at last; The purpose of publicizing and implementing mode is to help further to understand the present invention; But it will be appreciated by those skilled in the art that: in the spirit and scope that do not break away from the present invention and appended claim, various replacements and to revise all be possible.Therefore, the present invention should not be limited to the disclosed content of embodiment, and the scope that the present invention requires to protect is as the criterion with the scope that claims define.
Claims (9)
1. galvanic corrosion device; It is characterized in that; Said galvanic corrosion device comprises right angle bracing frame, fixed reference plate, inclined in two-way plate, vertical adjusting plate, ceramics seat anchor, U type pipe bracing frame and U type pipe; Wherein, said right angle bracing frame is fixed in order on the optical table that prevents to shake; Said fixed reference plate is fixed on the bearing surface of said right angle bracing frame through screw; The back surface of said inclined in two-way plate relatively also links to each other with the front surface of fixed reference plate; Said vertical adjusting plate is fixed on the front surface of said inclined in two-way plate; Said ceramics seat anchor is installed on the front surface of said vertical adjusting plate; Said U type pipe bracing frame be fixed on the bearing surface of said right angle bracing frame and be positioned at said fixed reference plate under; Said U type pipe is placed on the said U type pipe bracing frame.
2. galvanic corrosion device as claimed in claim 1 is characterized in that, said fixed reference plate also is included in its top-right first emergence, and fixed body also perpendicular at the lower surface of said first emergence and that become one.
3. galvanic corrosion device as claimed in claim 1; It is characterized in that; Between the back surface of the front surface of said fixed reference plate and said inclined in two-way plate, be provided with roating sphere that two surfaces are connected and No. two roating spheres more smaller than its diameter; Wherein, a said roating sphere is positioned at the back surface that two surperficial lower lefts also sink into the front surface and the said inclined in two-way plate of said fixed reference plate respectively; Said No. two roating spheres be positioned at two surfaces the lower right and with a roating sphere on same sea line, sink in the one of which end in the back surface of said inclined in two-way plate and the other end contacts with the front surface of said fixed reference plate.
4. galvanic corrosion device as claimed in claim 1 is characterized in that, said inclined in two-way plate has and the second similar emergence of said fixed reference plate shape.
5. like the described galvanic corrosion device of one of claim 1 to 4; It is characterized in that; Further comprise a fine setting screw thread pair and No. two fine setting screw thread pairs; Wherein, a said fine setting screw thread pair is arranged on the front surface of second emergence of said inclined in two-way plate and penetrates said second emergence and contacts with the front surface of first emergence of said fixed reference plate; And said No. two fine setting screw thread pairs are arranged on the lower surface of said fixed body and penetrate said fixed body and contact with the lower surface of said second emergence.
6. galvanic corrosion device as claimed in claim 1; It is characterized in that; Said vertical adjusting plate further comprises vertical guide rails seat, micrometer head support, micrometer head and guide rail slide block, and wherein, said vertical guide rails seat is fixed on the front surface of said inclined in two-way plate; Said micrometer head support is fixed on an end of the upper surface of said vertical guide rails seat; Said micrometer head is installed on the said micrometer head support; And the guide rail slide block is installed on the front surface of said vertical guide rails seat.
7. galvanic corrosion device as claimed in claim 1 is characterized in that, said ceramics seat anchor further comprises anchor base, fixed support and ceramics seat open hole, and wherein, said anchor base is installed on the front surface of said guide rail slide block; Said fixed support is installed in the front surface of said anchor base through threaded hole; Said ceramics seat open hole is arranged on said support bracket fastened front end; Further; Said anchor base also comprises pilot hole and following pilot hole, is separately positioned on apart from said threaded hole distance to be the above and below of l, and the central point of two pilot holes and said threaded hole is on a vertical line; Spring ball is arranged on said support bracket fastened below and is the position of l apart from said threaded hole distance.
8. galvanic corrosion device as claimed in claim 1; It is characterized in that; Said U type pipe bracing frame further comprises bracing frame base and U type pipe clamp, wherein, the support frame as described above base be fixed on the bearing surface of said right angle bracing frame and be positioned at said fixed reference plate under; Said U type pipe clamp is fixed on the front surface of support frame as described above base, and front end is two semicircles, being centered close on the concentric shafts of the center of two semicircles and said ceramics seat open hole.
9. the working method of a galvanic corrosion device is characterized in that, utilizes the concrete steps of single crystal tungsten wire of galvanic corrosion corrosion of equipment field emitting electronic source as claimed in claim 1 following:
1) pours the corrosive fluid for preparing into U type pipe from an end of U type pipe, and insert electrode;
2) with the fixed support Rotate 180 degree of ceramics seat anchor, make said support bracket fastened spring ball fall into the last pilot hole of said anchor base, the filament ceramics seat that welds tungsten filament is put into the ceramics seat open hole;
3) will install the said fixed support Rotate 180 degree of filament ceramics seat, and make spring ball on the said fixed support fall into the following pilot hole of said anchor base, making needs the corrosive tungsten filament to align the mouth of pipe of U type pipe;
4) be arranged on a said fine setting screw thread pair that rotates before and after the control on the said inclined in two-way plate through adjusting, and the said No. two fine setting screw thread pairs of regulating the control left-right rotation, make on the filament ceramics seat tungsten filament vertically downward;
5), the tungsten filament on the filament ceramics seat is immersed in the corrosive fluid through regulating the knob of micrometer head;
The lead that 6) will be connected with signal source and switch is connected with electrode in the U type pipe through the metal electrode on clip and the filament ceramics seat respectively;
7) opening signal source switch, adjustment signal source parameter starts the switch on the wire, begins corrosion;
8) after corrosion finishes, cut-off switch;
9) regulate said micrometer head, make the tungsten filament on the filament ceramics seat withdraw from corrosive fluid fully, operating process finishes.
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201110297744 CN102352526B (en) | 2011-09-30 | 2011-09-30 | Electrochemical corrosion device and operating method thereof |
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| CN 201110297744 CN102352526B (en) | 2011-09-30 | 2011-09-30 | Electrochemical corrosion device and operating method thereof |
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| CN102352526B CN102352526B (en) | 2013-07-31 |
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| CN102586854A (en) * | 2012-02-24 | 2012-07-18 | 西安交通大学 | High-efficiency automatic tungsten needle manufacturing device and method |
| CN104020067A (en) * | 2014-05-30 | 2014-09-03 | 中国船舶重工集团公司第七二五研究所 | Support device used for medium tank in axial corrosion fatigue test |
| CN111074351A (en) * | 2020-01-09 | 2020-04-28 | 江苏金瑞机械制造有限公司 | Device for preventing blackening of high-temperature alloy corrosion reaction and operation method thereof |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102586854A (en) * | 2012-02-24 | 2012-07-18 | 西安交通大学 | High-efficiency automatic tungsten needle manufacturing device and method |
| CN102586854B (en) * | 2012-02-24 | 2014-11-05 | 西安交通大学 | High-efficiency automatic tungsten needle manufacturing device and method |
| CN104020067A (en) * | 2014-05-30 | 2014-09-03 | 中国船舶重工集团公司第七二五研究所 | Support device used for medium tank in axial corrosion fatigue test |
| CN111074351A (en) * | 2020-01-09 | 2020-04-28 | 江苏金瑞机械制造有限公司 | Device for preventing blackening of high-temperature alloy corrosion reaction and operation method thereof |
| CN111074351B (en) * | 2020-01-09 | 2023-09-12 | 泰州市金鹰精密铸造有限公司 | Device for preventing blackening of superalloy corrosion reaction and operation method thereof |
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| CN102352526B (en) | 2013-07-31 |
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