CN102351187B - Silicon core drawing process and raw material rod preheating method in silicon core drawing - Google Patents
Silicon core drawing process and raw material rod preheating method in silicon core drawing Download PDFInfo
- Publication number
- CN102351187B CN102351187B CN 201110183614 CN201110183614A CN102351187B CN 102351187 B CN102351187 B CN 102351187B CN 201110183614 CN201110183614 CN 201110183614 CN 201110183614 A CN201110183614 A CN 201110183614A CN 102351187 B CN102351187 B CN 102351187B
- Authority
- CN
- China
- Prior art keywords
- conducting strip
- fuel rod
- silicon core
- raw material
- induction coil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention discloses a silicon core drawing process which can realize convenient and rapid preheating of a raw material rod without bringing in impurities that influence the silicon core quality. The technology comprises the following steps of: a. arranging a conducting strip made of a conducting material with a melting point higher than that of silicon on an upper end of the raw material rod during shove charge; b. heating the conducting strip by an electromagnetic induction coil before drawing to preheat the raw material rod; c. picking off the conducting strip before melting of the upper end of the raw material rod, and after melting of the upper end of the raw material rod, inserting seed crystal downward through a core hole of the electromagnetic induction coil into a melt; d. lifting up the seed crystal to draw the melt to stretch and pass through the core hole of the electromagnetic induction coil. The invention has beneficial effects of substantially reduced silicon core drawing time, increased efficiency, reusable conducting strip and lowered costs; besides a surface of the raw material rod melts uniformly, so that a silicon core drawing success rate is increased dynamically. The invention also provides a method for preheating the raw material rod during the silicon core drawing.
Description
Technical field
The application relates to the production method of polysilicon, is specifically related to the fuel rod pre-heating mean in silicon core drawing process and the silicon core pulling process.
Background technology
At present, in improvement Siemens process polycrystalline silicon production process, the silicon core draws and finishes in silicon core stove.Be respectively equipped with seed crystal clamping device, electromagnetic induction coil and fuel rod clamping device from top to bottom in the existing silicon core stove, wherein, be provided with the core hole in electromagnetic induction coil, after the shove charge, the centerline of seed crystal, core hole and fuel rod is on same plummet.Its specific operation process is: operator are wrapped in molybdenum filament on the seed crystal after the shove charge, controlling the seed crystal clamping device then slowly descends in the seed crystal that is wound with molybdenum filament enters the core hole of electromagnetic induction coil, after this, molybdenum filament is heated rapidly and is drawn red seed crystal, thereby the seed crystal of fusing drops in the upper surface of fuel rod carries out preheating to fuel rod, rising along with the fuel rod temperature, unbound electron in the fuel rod is activated and begins conduction, after this, melt gradually the upper end of fuel rod under the heating of electromagnetic induction coil, again the head of seed crystal is inserted in the upper end melt of fuel rod afterwards, stretch thereby upwards promote seed crystal traction melt at last again, fuel rod is drawn into the silicon core the most at last.
In above-mentioned whole pulling process, the loaded down with trivial details and preheating of the preheating procedure of fuel rod slowly is long-term unsolved technical problem in this area.Especially, advocate at the utility model patent etc. that such as Granted publication number is CN201317831Y under the situation of drawing operation of many silicon cores of disposable realization, will influence production efficiency greatly in the work that every seed crystal twines molybdenum filament.Seldom cause conducting heat slowly because the seed crystal of fusion drops in the amount of fuel rod, need 90～150 fens clock times from tear drop to the fuel rod fusion, cause the silicon core to draw the bottleneck that efficient is difficult to improve.In addition, also there is the failure rate height in above-mentioned pre-heating mean, is prone to dropping liquid contact electricity magnetic induction coil and causes sparking, problem such as burns out.
Summary of the invention
Technical problem to be solved by this invention is to provide a kind of can realize fuel rod preheating easily and fast, does not introduce the silicon core drawing process of the impurity that influences silicon core quality simultaneously again.
Settle by fusing point greater than the made conducting strip of the conductor material of silicon upper end at fuel rod when silicon core drawing process of the present invention specifically comprises the steps: a, shove charge; Utilize electromagnetic induction coil that this conducting strip is heated and then the preheating material rod before b, the drawing; C, before the fusion of the upper end of fuel rod, remove conducting strip, treat again seed crystal to be inserted melt downwards from the core hole of electromagnetic induction coil after its fusion; D, upwards promote that thereby seed crystal traction melt stretches and the core hole by electromagnetic induction coil.
In such scheme, require conducting strip to have high-melting-point (namely at least greater than 1420 ℃ of the fusing points of silicon) and electroconductibility, therefore, conducting strip can be by the rapid heating of electromagnetic induction coil and with the heat transferred fuel rod, and before the fuel rod heating and melting, conducting strip can not melt, so can remove conducting strip before the fuel rod heating and melting, prevents from mixing in the fuel rod impurity in the conducting strip.In addition, the contact area of conducting strip and fuel rod is bigger, can impel the upper end of fuel rod quick, evenly melt, and need not to bundle molybdenum filament and tear drop preheating at seed crystal again, so working efficiency greatly improves.
Those skilled in the art can select the material of conducting strip under the prerequisite that satisfies high-melting-point and electroconductibility, such as metals such as molybdenums.And the present invention advises adopting graphite to make conducting strip.Graphite because its thermal conductivity is 209.34w/ (mk), is higher than the thermal conductivity 135w/ (mk) of molybdenum except good electrical conductivity, and the fusing point of graphite is 3652 ℃, far above 2620 ℃ of the fusing points of molybdenum, therefore, the characteristics that graphite has rapid heating, good heat conductive and is difficult for melting.Test is found, the conducting strip that adopts graphite to make only needed 10～20 minutes just fuel rod can be heated to molten state, the phenomenon that conducting strip melts does not all take place in multi-pass operations, and can not mix C impurity fully in the silicon core preparation process, so have significant especially effect.
Only require conducting strip is placed in the upper end of fuel rod in the such scheme, therefore, conducting strip both can be made into ring-type and be enclosed within and also can be made into sheet on the sidewall of fuel rod and place and be attached on the upper surface of fuel rod.The method that employing is placed conducting strip and be attached on the upper surface of fuel rod can be simplified the shape of conducting strip, and is convenient to the setting of conducting strip and wins, so the present invention preferentially adopts scheme in this.
In addition, those skilled in the art also can win conducting strip get off from fuel rod in several ways.And the simplest way is that this conducting strip is linked to each other with haulage gear by the silk of being made by materials with high melting point that leads.Lead silk and can adopt molybdenum filament, tungsten filament etc., haulage gear can directly use teleoperator arm in the existing silicon core stove.Lead silk during preheating and just be connected on the conducting strip all the time, drive the haulage gear motion again after reaching preheating requirement, lead silk and can spur conducting strip and easily break away from fuel rod.
The present invention provides a kind of simultaneously can realize fuel rod preheating easily and fast, does not introduce simultaneously the fuel rod pre-heating mean in the silicon core pulling process of the impurity that influences silicon core quality again.
This method at first is to settle in the end of fuel rod by fusing point greater than the made conducting strip of the conductor material of silicon, utilizes electromagnetic induction coil that this conducting strip is heated and then the preheating material rod then, removes this conducting strip before the fusion of the end of fuel rod.
Further, this conducting strip is made by graphite.
Further, this conducting strip is placed and is attached on the end face of fuel rod.
Further, this conducting strip links to each other with haulage gear by the silk of being made by materials with high melting point that leads.
The invention has the beneficial effects as follows that can shorten the silicon core greatly draws the time, raise the efficiency, and conducting strip is reusable that save cost, the fuel rod surface melting is even in addition, the silicon core is drawn into power and improves greatly.The conducting strip made from graphite is example: the pre-heat effect that only need just can reach in the past in 10～20 minutes in the process of the test, and a preheating of every stove can save time 80～130 minutes, but the silicon core of Duola 1120mm processed～1820mm length, output obviously promotes; Calculate according to plant capacity, every stove electricity consumption 60 degree per hour, but preheating save power of every stove 80～130 degree, the most basic preheating every day twice of stove, totally four stoves, but every day save power 640～1040 degree, significantly cut down the consumption of energy; In addition, be drawn into power and be increased to more than 95% from original 50%, working strength obviously reduces.
Description of drawings
The working state figure of Fig. 1 for fuel rod being carried out preheating by conducting strip in the silicon core drawing process of the present invention.
Fig. 2 is the working state figure that after the fuel rod preheating seed crystal is inserted melt in the silicon core drawing process of the present invention.
Working state figure when Fig. 3 stretches for fuel rod in the silicon core drawing process of the present invention.
Be labeled as among the figure: seed crystal 1, electromagnetic induction coil 2, core hole 201, conducting strip 3, lead silk 4, fuel rod 5, melt 6.
Embodiment
As shown in Figure 1, settle by the made conducting strip 3 of graphite material the upper end at fuel rod 5 during shove charge, and this conducting strip 3 is placed and is attached on the upper surface of fuel rod 5.After shove charge was finished, electromagnetic induction coil 2 is positioned at the top of conducting strip 3 and near this conducting strip 3, seed crystal 1 is then by the not shown top that is clamped in electromagnetic induction coil 2 in the seed crystal clamping mechanism map.At this moment, the centerline of the core hole 201 in fuel rod 5, the electromagnetic induction coil 2 and seed crystal 1 is on same plummet.In addition, as shown in Figure 1, this conducting strip 3 also links to each other with haulage gear by the silk of being made by materials with high melting point 4 that leads.
Afterwards, start electromagnetic induction coil 2, conducting strip 3 heats up rapidly, because the good thermal conductivity of graphite, the heat of conducting strip 3 passes to fuel rod 5 fast, along with the rising of fuel rod 5 temperature, unbound electron in the fuel rod 5 is activated and begins conduction, after this, melt gradually the upper end of fuel rod 5 under the heating of electromagnetic induction coil 2, but before the fusion of the upper end of fuel rod 5 must by lead silk 4, haulage gear leads conducting strip 3 from the upper surface of fuel rod 5.Above-mentioned carry out preheating by 3 pairs of fuel rods of conducting strip 5 in because not fusions of fuel rod 5, just unbound electron is activated and begins conduction, therefore can not mix C impurity in silicon core preparation process.
As shown in Figure 2, after the fusion of the upper end of fuel rod 5, seed crystal 1 is inserted melt 6 downwards from the core hole 201 of electromagnetic induction coil 2; Afterwards, as shown in Figure 3, thereby upwards promote the core hole 201 that seed crystal 1 traction melt 6 stretches and passes through electromagnetic induction coil 2 again, in this process, the melt 6 of electromagnetic induction coil 2 tops is along with cooling off gradually, solidify away from the direction of electromagnetic induction coil 2, the fuel rod 5 of electromagnetic induction coil 2 belows then near and by in the process of electromagnetic induction coil 2 by heating, fusion rapidly, fuel rod 5 is drawn into the silicon core the most at last.
In the said process, only needed 10～20 minutes just can reach the fuel rod pre-heat effect, a preheating of every stove can save time 80～130 minutes, but the silicon core of Duola 1120mm processed～1820mm length, and output obviously promotes; Calculate according to plant capacity, every stove electricity consumption 60 degree per hour, but preheating save power of every stove 80～130 degree, the most basic preheating every day twice of stove, totally four stoves, but every day save power 640～1040 degree, significantly cut down the consumption of energy; In addition, be drawn into power and be increased to more than 95% from original 50%, working strength obviously reduces.
Claims (6)
1. silicon core drawing process, settle by fusing point greater than the made conducting strip of the conductor material of silicon (3) upper end at fuel rod (5) when this technology comprises the steps: a, shove charge; Utilize electromagnetic induction coil (2) this conducting strip to be heated and then preheating material rod (5) before b, the drawing; C, before the upper end fusion of fuel rod (5), remove conducting strip (3), treat again seed crystal (1) to be inserted melt (6) downwards from the core hole (201) of electromagnetic induction coil (2) after its fusion; D, upwards promote seed crystal (1) thus traction melt (6) stretches and the core hole (201) by electromagnetic induction coil (2); This conducting strip (3) is made by graphite.
2. silicon core drawing process as claimed in claim 1, it is characterized in that: this conducting strip (3) is placed and is attached on the upper surface of fuel rod (5).
3. silicon core drawing process as claimed in claim 1 is characterized in that: this conducting strip (3) links to each other with haulage gear by the silk of being made by materials with high melting point (4) that leads.
4. the fuel rod pre-heating mean in the silicon core pulling process, it is characterized in that: at first settle by fusing point greater than the made conducting strip of the conductor material of silicon (3) in the end of fuel rod (5), utilize electromagnetic induction coil (2) that this conducting strip (3) is heated and then preheating material rod (5) then, before the end fusion of fuel rod (5), remove this conducting strip (3); This conducting strip (3) is made by graphite.
5. pre-heating mean as claimed in claim 4, it is characterized in that: this conducting strip (3) is placed and is attached on the end face of fuel rod (5).
6. pre-heating mean as claimed in claim 4 is characterized in that: this conducting strip (3) links to each other with haulage gear by the silk of being made by materials with high melting point (4) that leads.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110183614 CN102351187B (en) | 2011-07-01 | 2011-07-01 | Silicon core drawing process and raw material rod preheating method in silicon core drawing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110183614 CN102351187B (en) | 2011-07-01 | 2011-07-01 | Silicon core drawing process and raw material rod preheating method in silicon core drawing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102351187A CN102351187A (en) | 2012-02-15 |
| CN102351187B true CN102351187B (en) | 2013-08-07 |
Family
ID=45574872
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201110183614 Expired - Fee Related CN102351187B (en) | 2011-07-01 | 2011-07-01 | Silicon core drawing process and raw material rod preheating method in silicon core drawing |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102351187B (en) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3531610A1 (en) * | 1985-09-04 | 1987-03-05 | Wacker Chemitronic | METHOD AND DEVICE FOR PRODUCING SILICON RODS |
| JP2874722B2 (en) * | 1993-06-18 | 1999-03-24 | 信越半導体株式会社 | Method and apparatus for growing silicon single crystal |
| CN201317831Y (en) * | 2008-12-26 | 2009-09-30 | 西安理工晶体科技有限公司 | Polysilicon double silicon core pulling device |
| CN101775643B (en) * | 2009-12-23 | 2012-06-13 | 洛阳金诺机械工程有限公司 | Manufacture technology of whole U-shaped silicon core |
-
2011
- 2011-07-01 CN CN 201110183614 patent/CN102351187B/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN102351187A (en) | 2012-02-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102560645B (en) | A kind of in crystalline silicon forming process method and the device thereof of controlling resistance rate | |
| CN202208779U (en) | Ingot furnace | |
| CN201506846U (en) | Secondary charging circular-rod fixture for monocrystalline furnace | |
| CN104328492A (en) | Device for moving small insulating plate at bottom of polycrystalline silicon ingot furnace and polycrystalline silicon ingot furnace | |
| CN101519797B (en) | Method for pulling silicon core by crystal crushed material and device for applying same | |
| CN103510157A (en) | Induced crystal growth technology for efficient ingot casting | |
| CN202849233U (en) | Basalt fiber electric melting furnace | |
| CN102583355A (en) | Very-large-specification and high-power graphite conductive electrode and preparation method of graphite conductive electrode | |
| CN102351187B (en) | Silicon core drawing process and raw material rod preheating method in silicon core drawing | |
| CN101498033A (en) | Method for crystal crushed aggregate drawing silicon core and simple apparatus | |
| CN101775643B (en) | Manufacture technology of whole U-shaped silicon core | |
| CN205151785U (en) | Polycrystalline silicon side's silicon core and overlap joint structure thereof | |
| CN103590109B (en) | Czochralski crystal growing furnace magnetic field device and use the crystal pulling method of this magnetic field device | |
| CN103397378A (en) | Preparation method of polycrystalline silicon ingot | |
| CN103160917A (en) | Drawing die plate for hollow silicon core | |
| CN202337907U (en) | Device for deburring fiber cloth | |
| CN102051686A (en) | Method and device for growing large-size sodium yttrium tungstate crystals by two-stage heating and pulling process | |
| CN213476147U (en) | Preheating device for drawing silicon core | |
| CN103785918A (en) | Technology for welding solder strip on solar cell sheet | |
| CN103160916A (en) | Drawing die plate for specially-shaped silicon core | |
| CN202744655U (en) | Graphite heater for preparing monocrystalline silicon by czochralski method | |
| CN204566430U (en) | Silicon core cutting machine crystal cup | |
| CN201962423U (en) | Silicon liquid heater | |
| CN218262819U (en) | Device for simultaneously drawing multiple crystals by using high-frequency coil | |
| CN205420602U (en) | End heater is used to single crystal growing furnace |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130807 Termination date: 20160701 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |