LED matrix and manufacture method thereof with redundant electrode
Technical field
The present invention relates to LED matrix and manufacture method thereof, especially relate to LED matrix and manufacture method thereof with redundant electrode.
Background technology
LED (Light Emitting Diode) is the light-emitting diode for the light radiation semiconductor subassembly, launches the light of different colours such as red, green, blue, Huang, is used in the electronics indicator light of various electronic products and instrument etc. usually.LED has pn knot knot face structure.Pn knot knot face structure adds forward current, makes the electronics in its n zone accelerate to flow to the p zone because of electric field.The electronics that flows to the p zone is combined with the hole of acceptor level or valence band state again, and according to chip material, and by potential difference energy radiating light, this phenomenon is injection electroluminescence.The representative materials of led chip is GaAs (GaAs), gallium arsenide phosphide (GaAsP), gallium phosphide (GaP), Aluminum gallium arsenide (GaAlAs), carborundum (SiC) etc.
Fig. 1 is the vertical view of the led chip structure of prior art, and Fig. 2 is the cross-sectional structure schematic diagram of the led chip structure of prior art, and Fig. 3 is the LED matrix syndeton schematic diagram of prior art.As shown in Figure 1 to Figure 3, the red LED chips of prior art comprises substrate 101, active region 103, first coating 105, second coating 107, lamination (not shown), first electrode 109 and second electrode 111, because the substrate 101 of red LED chips is conductivity, first electrode 109 engages by lead-in wire 119 with first conductor 117, and the Ag conducting resinl (Paste) 113 that second electrode 111 passes through conducting resinl directly is connected with second conductor 115.Above-mentioned have only an electrode to have the wire-bonded structure, is called 1 integrated structure.LED matrix with prior art of 1 integrated structure, because of a variety of causes, second electrode 111 that is connected by Ag conducting resinl 113 separates easily with the joint between second conductor 117.When for example LED matrix is mounted to substrate, owing to impact Ag conducting resinl 113 is dropped, perhaps because welding causes the rapid variation of temperature, Ag conducting resinl 113 is dropped.Separating of joint between second electrode 111 and second conductor 117, cause the fatal weakness of LED matrix of conventional art.
The red LED chips of prior art is according to the order development of its gallium phosphide (GaP)/gallium phosphide (GaP), gallium arsenide phosphide (GaAsP)/GaAs (GaAs), aluminum gallium arsenide (AlGaAs)/GaAs (GaAs), InGaAIP/ GaAs (GaAs).InGaAIP/ GaAs (GaAs) chip wherein, owing to possess high brightness and outstanding reliability, thus be widely used.Fig. 4 is in the led chip of prior art, and the structural representation of InGaAIP/ GaAs (GaAs) chip structure, Fig. 5 are the schematic diagrames of InGaAIP/ GaAs (GaAs) chip light emitting state.InGaAIP/ GaAs (GaAs) chip comprises active region 203, first coating 205, and second coating 207 of GaAs (GaAs) substrate 201, InGaAIP material.As shown in Figure 4, GaAs (GaAs) substrate 201 of InGaAIP/ GaAs (GaAs) chip is opaque material for the light that active layer produces, absorption as shown in Figure 5, causes the emission efficiency of light very low by the light of active region 203 generations of InGaAIP material.
In order to strengthen the emission efficiency of light, remove GaAs (GaAs) substrate of light absorption substrate, adopt as gallium phosphide (GaP) substrate to have the method that the substrate of printing opacity function engages.Fig. 6 is the drawing of led chip structure of the replacement substrate of diagram prior art, and Fig. 7 is the schematic diagram of led chip luminance of the replacement substrate of prior art.InGaAIP/ GaAs (GaAs) chip as shown in Figure 4, behind removal GaAs (GaAs) substrate, the substrate 301 that has the printing opacity function as gallium phosphide (GaP) substrate engages with active region 203 and second coating 207 of first coating 205, InGaAIP material.As shown in Figure 6, the led chip of replacement substrate has substrate 301 transmissions of printing opacity function by the light of active region 203 generations of InGaAIP material as gallium phosphide (GaP) substrate, as shown in Figure 7, cause the emission efficiency of light very high.
As Figure 6 and Figure 7, the led chip of the replacement substrate of prior art because of the engaging force deficiency, has the substrate 301 of printing opacity function and is easy to generate with joint between second coating 207 and separates as gallium phosphide (GaP) substrate.In addition, the led chip transparent substrates 301 of the replacement substrate of prior art still is conductive board, as shown in Figure 1 to Figure 3, has 1 integrated structure.In addition, the led chip of the replacement substrate of prior art, because of a variety of causes, second electrode that is connected by the Ag conducting resinl separates easily with the joint between second conductor.As mentioned above, engage between transparent substrates 301 and second coating 207 separate and second electrode and second conductor between the separating of combination, cause the fatal weakness of LED matrix of the replacement substrate of prior art.
The utility model content
In order to solve above-mentioned existing in prior technology problem, the invention provides a kind of LED matrix and manufacture method thereof with redundant electrode, by redundant electrode is set at led chip, cause the joint between electrode and the conductor to separate even make use conducting resinl connection electrode and conductor, the still steady running of this LED matrix.
The technical scheme that the present invention solves the problems of the technologies described above is as follows: have the LED matrix of redundant electrode, comprising: the LED conductive board; First coating that above described conductive board, forms; The active region that above described first coating, forms; Second coating that above described active region, forms; First electrode that a side forms above described second coating; The lamination that between described second coating and described first electrode, forms; Second electrode that below described conductive board, forms; The redundant electrode that the zone forms is exposed in arbitrary part in described conductive board or described first coating; By second conductor that conducting resinl is connected with described second electrode, described second conductor is also by second lead-in wire and described redundant electrode engagement; By first conductor of described first lead-in wire with described first electrode engagement.
Further, the material of described conductive board is any one material in silicon (Si), carborundum (SiC), gallium nitride (GaN), GaAs (GaAs), zinc oxide (ZnO), gallium phosphide (GaP), the indium phosphide (InP).
Further, described conductive board is the replacement substrate.
Further, the material of described conductive board is any one material in gallium phosphide (GaP), carborundum (SiC), gallium nitride (GaN), the zinc oxide (ZnO).
Further, at least one side in described conductive board and/or described first coating and/or described active region and/or described second coating forms a plurality of concavo-convex.
Further, described first electrode and/or described redundant electrode are metal material.
Further, described conducting resinl is the metal jelly, is preferably the Ag conducting resinl.
Adopt the beneficial effect of technique scheme to be: to the invention provides a kind of LED matrix with redundant electrode, by redundant electrode is set at led chip, cause the joint between electrode and the conductor to separate even make use conducting resinl connection electrode and conductor, the still steady running of this LED matrix.
Another technical scheme that the present invention solves the problems of the technologies described above is as follows: have the manufacture method of the LED matrix of redundant electrode, comprising:
Steps A, selection LED conductive board;
Step B, above described conductive board, form first coating;
Step C, above described first coating, form the active region;
Step D, above described active region, form second coating;
Step e, above described second coating, form lamination;
Step F, expose the zone arbitrary local formation of described first coating or described conductive board;
Step G, above described lamination, form first electrode, and form redundant electrode in the described zone of exposing;
Step H, below described conductive board, form second electrode;
Step I, by conducting resinl described second electrode is connected with described second conductor;
Step J, by first lead-in wire described first electrode is engaged with described first conductor, going between by second engages described redundant electrode with described second conductor.
Further, the material of described conductive board is any one material in silicon (Si), carborundum (SiC), gallium nitride (GaN), GaAs (GaAs), zinc oxide (ZnO), gallium phosphide (GaP) and the indium phosphide (InP).
Further, in the described step F, form the described zone of exposing by dry-etching method or wet etching.
Further, described step F also comprises following content: by dry-etching method or wet etching, at least one side in described conductive board and/or described first coating and/or described active region and/or described second coating forms a plurality of concavo-convex.
Further, described first electrode and/or described redundant electrode are metal material.
Further, described conducting resinl is the metal jelly, is preferably the Ag conducting resinl.
Adopt the beneficial effect of technique scheme to be: to the invention provides a kind of manufacture method with LED matrix of redundant electrode, by redundant electrode is set at led chip, even make the joint between substrate and the coating separate, perhaps connect electrode owing to conducting resinl and conductor causes the joint between electrode and the conductor to separate, this LED matrix still can steady running.
The 3rd technical scheme that the present invention solves the problems of the technologies described above is as follows: have the manufacture method of the LED matrix of redundant electrode, comprising: steps A, selection LED first substrate;
Step B, above described first substrate, form first coating;
Step C, above described first coating, form the active region;
Step D, above described active region, form second coating;
Step e, described first substrate of removal;
Step F, below described first coating, engage LED with second substrate of conductivity;
Step G, make arbitrary local formation of described first coating or described second substrate expose the zone;
Step H, above described second coating, form first electrode, and form redundant electrode in arbitrary zone of exposing of described first coating or described second substrate;
Step I, below described second substrate, form second electrode;
Step J, by conducting resinl described second electrode is engaged with described second conductor;
Step K, by first lead-in wire described first electrode is engaged with described first conductor, going between by second engages described redundant electrode with described second conductor.
Further, described first substrate is the light absorption substrate.
Further, the material of described first substrate is GaAs (GaAs).
Further, described second substrate is transparent substrates.
Further, the material of described second substrate is any one material in gallium phosphide (GaP), carborundum (SiC), gallium nitride (GaN) and the zinc oxide (ZnO).
Further, among the described step G, by forming the described zone of exposing by dry-etching method or wet etching.
Further, described step G also comprises following content: by in formula etching method or wet etching, at least one side in described conductive board and/or described first coating and/or described active region and/or described second coating forms a plurality of concavo-convex.
Further, described first electrode and/or described redundant electrode are metal material.
Further, described conducting resinl is the metal jelly, is preferably the Ag conducting resinl.
Adopt the beneficial effect of technique scheme to be: to the invention provides a kind of manufacture method with LED matrix of redundant electrode, when led chip increases redundant electrode, make this chip sides have male and fomale(M﹠F), need not to increase extra engineering, also can strengthen luminous efficiency.
The invention has the beneficial effects as follows: LED matrix and manufacture method thereof with redundant electrode are provided, increase redundant electrode, it is cheap, can guarantee high reliability simultaneously.
Description of drawings
Fig. 1 is the vertical view of the led chip structure of prior art;
Fig. 2 is the cross-sectional structure schematic diagram of the led chip structure of prior art;
Fig. 3 is the structural representation of the LED matrix syndeton of prior art;
Fig. 4 is in the led chip of prior art, the structural representation of InGaAIP/ GaAs (GaAs) chip structure;
Fig. 5 is the schematic diagram of InGaAIP/ GaAs (GaAs) chip light emitting state;
Fig. 6 is the structural representation of led chip structure of the replacement substrate of prior art;
Fig. 7 is the schematic diagram of led chip luminance of the replacement substrate of prior art;
Fig. 8 is the cross-sectional structure schematic diagram of the led chip structure with redundant electrode of the preferred embodiment of the present invention;
Fig. 9 is the vertical view of the led chip structure with redundant electrode of the preferred embodiment of the present invention;
Figure 10 is the structure chart of the LED matrix integrated structure with redundant electrode of the preferred embodiment of the present invention;
Figure 11 is the manufacture method flow chart of the LED matrix with redundant electrode of the preferred embodiment of the present invention;
Figure 12 is the manufacture method flow chart one of the LED matrix with redundant electrode of the preferred embodiment of the present invention;
Figure 13 is the manufacture method flowchart 2 of the LED matrix with redundant electrode of the preferred embodiment of the present invention;
Figure 14 is the accompanying drawing one of the formation position of the redundant electrode of the explanation of the preferred embodiment of the present invention,
Figure 15 is the accompanying drawing two of the formation position of the redundant electrode of the explanation of the preferred embodiment of the present invention;
Figure 16 is the accompanying drawing three of the formation position of the redundant electrode of the explanation of the preferred embodiment of the present invention;
Figure 17 is the accompanying drawing four of the formation position of the redundant electrode of the explanation of the preferred embodiment of the present invention.
Embodiment
Figure 10 is the structural representation of the LED matrix integrated structure with redundant electrode of the preferred embodiment of the present invention.
A kind of have a redundant electrode led chip, it comprises: conductive board 401, active region 403, first coating (not shown among the figure), second coating 407, first electrode 409, second electrode 411 and redundant electrode 450, second coating 407 can also comprise lamination (not shown among the figure), realizes the ohmic contact of second coating 407 and first electrode 409 by this lamination.
The material of conductive board 401 can be in silicon (Si), carborundum (SiC), gallium nitride (GaN), GaAs (GaAs), zinc oxide (ZnO), gallium phosphide (GaP), the indium phosphide (InP) any one, and it has conductivity.
Conductive board 401 belows form second electrode 411, the zone of exposing that forms by etching method on first coating is provided with redundant electrode 450, and should redundancy electrode 450 and second electrode 411 with substrate 401 as identical carrier, this redundancy electrode 450 is supplemantary electrodes of second electrode 411.
This redundancy electrode 450 is positioned on first coating, also can be positioned at a side of conductive board 401.
Because it has conductivity the conductive board 401 of the led chip with redundant electrode of the present invention, second electrode 411 directly is connected with second conductor 417 by the conducting resinl 413 with conducting function, and this conducting resinl 413 is preferably the Ag conducting resinl.
First electrode 409 side above second coating 407 forms.
First electrode 409 engages by first lead-in wire 419 with first conductor 415.In order to make the led chip steady running with redundant electrode 450 of the present invention, second conductor 417 is preferable with cup-shape.。
Because being formed on first coating substrate 401 alive, exposes on the zone by the part that etching method forms at redundant electrode 450, therefore, even make because conducting resinl 413 connection second electrodes 411 and second conductor 417 cause second electrode 411 to separate or substrate 401 separates with joint between first coating in the joint between second conductor 417, the present invention has the LED matrix of redundant electrode still can steady running.
Redundant electrode 450 engages by second lead-in wire 421 with second conductor 417 and is connected.
Below in conjunction with accompanying drawing, embodiments of the invention are described in further detail.
Fig. 8 is the cross-sectional structure schematic diagram of the led chip structure with redundant electrode of the preferred embodiment of the present invention; Fig. 9 is the vertical view of the led chip structure with redundant electrode of the preferred embodiment of the present invention; Figure 10 is the schematic diagram of the LED matrix integrated structure with redundant electrode of the preferred embodiment of the present invention.Extremely shown in Figure 17 as Figure 14, for the formation position of redundant electrode is described, the led chip with redundant electrode of the preferred embodiments of the present invention, it comprises: substrate 401, active region 403, first coating 405, second coating 407, first electrode 409, second electrode 411 and redundant electrode 450.Second coating 407 can also comprise lamination (not shown), realizes the ohmic contact of second coating 407 and first electrode 409 by this lamination.The material of substrate 401 is in silicon (Si), carborundum (SiC), gallium nitride (GaN), GaAs (GaAs), zinc oxide (ZnO), gallium phosphide (GaP) and the indium phosphide (InP) any one, and it has conductivity.
Substrate 401 is the replacement substrate, and the meaning of replacement substrate is that a substrate is replaced with another substrate, such as GaAs (GaAs) substrate is changed to indium phosphide (InP) substrate.Conductive board 401 belows form second electrode 411, on first coating, expose the zone by etching method formation redundant electrode 450 is set, and should redundancy electrode 450 and second electrode 411 be identical carrier with substrate 401, this redundancy electrode 450 is supplemantary electrodes of second electrode 411.
Because the substrate 401 with LED matrix of redundant electrode of the present invention has conductivity, second electrode 411 directly is connected with second conductor 417 by the conducting resinl 413 with conducting function, and this conducting resinl 413 is preferably the Ag conducting resinl.In order to make the led chip steady running with redundant electrode 450 of the present invention, second conductor 417 is preferable with cup-shape.
First electrode 409 side above second coating 407 forms.First electrode 409 can have multiple shape, and this is known by the insider of the technical field of the invention.First electrode 409 engages by first lead-in wire 419 with first conductor 415 and is connected.
Because being formed on first coating substrate 401 alive, exposes on the zone by the part that etching method forms at redundant electrode 450, therefore, even make because conducting resinl 413 connection second electrodes 411 and second conductor 417 cause second electrode 411 to separate or substrate 401 separates with joint between first coating in the joint between second conductor 417, the present invention has the LED matrix of redundant electrode still can steady running.
In other preferred embodiments of the present invention, expose method by the part that utilizes first coating or substrate 401, make in substrate 401, first coating 405, active region 403 or second coating 407, the arbitrary side of at least one is to have a plurality of concavo-convex male and fomale(M﹠F)s.Etching engineering when utilize forming redundant electrode 450 makes the side with led chip of redundant electrode of the present invention have male and fomale(M﹠F), need not to increase extra engineering, also can strengthen luminous efficiency.Redundant electrode 450 can have multiple shape, and this is known by the insider of the technical field of the invention.Redundant electrode 450 is connected by second wire-bonded 421 with second conductor 417.
Figure 11 is the manufacture method flow chart of the LED matrix with redundant electrode of the preferred embodiment of the present invention.
As shown in figure 11, in order to make the LED matrix with redundant electrode of the present invention, it may further comprise the steps:
Step 501 provides suitable substrate, substrate can in silicon (Si), carborundum (SiC), gallium nitride (GaN), GaAs (GaAs), zinc oxide (ZnO), gallium phosphide (GaP) and the indium phosphide (InP) any one and have conductivity;
Step 503 forms first coating above substrate;
Step 505 forms the active region of producing light above first coating;
Step 507 forms second coating above the active region;
Step 509, expose the part of first coating or the part of substrate, the part of first coating or the part of substrate are exposed the zone and are realized by dry-etching method (particularly RIE) or wet etching, in other preferred embodiments of the present invention, by dry-etching method (particularly RIE) or wet etching in the part of first coating or the part of substrate form the etching of exposing the zone and expose in the engineering process, can also expose engineering by above-mentioned etching and make substrate, first coating, the active region, and in second coating, at least have a plurality of concavo-convex male and fomale(M﹠F)s one side, expose engineering by the local etching that utilizes first coating or substrate, need not to increase extra engineering, also can make its side become male and fomale(M﹠F), thereby strengthen the luminous efficiency of LED matrix of the present invention;
Step 511, above second coating, form first electrode, and the zone of exposing at first coating or substrate forms redundant electrode, redundant electrode can be above first coating a side (as shown in figure 14), a side (as shown in figure 15) of etching certain depth on first coating, a side (as shown in figure 16) above substrate, and a side (as shown in figure 17) of etching certain depth forms on substrate, even because conducting resinl causes second electrode to separate with joint between second conductor, or substrate separates with joint between first coating, the electric power that provided by second conductor that second lead-in wire connects can be provided because of redundant electrode, led chip with redundant electrode of the present invention or device still can steady runnings, first electrode or redundant electrode can have multiple shape, in addition, first electrode or redundant electrode are that metal material is preferable;
Step 513 is formed for second electrode of ohmic contact below substrate, second electrode is that metal material is preferable;
Step 515, second electrode is connected by the metal jelly with second conductor, and the Ag conducting resinl of preferable alloy jelly makes second electrode that is positioned at the substrate below be connected with second conductor;
Step 517, first electrode and first conductor be by wire-bonded, and redundant electrode and second conductor are by wire-bonded.
Figure 12 and Figure 13 are the manufacture method flow charts of the LED matrix with redundant electrode of the preferred embodiment of the present invention.
As Figure 12 and shown in Figure 13, in order to make the LED matrix with redundant electrode of the present invention, it may further comprise the steps:
Step 601 provides first substrate, and first substrate is the light absorption substrate, as GaAs (GaAs) substrate, and has conductivity;
Step 603 forms first coating above first substrate;
Step 605 forms the active region of producing light above first coating;
Step 607 forms second coating above the active region;
Step 609 is removed first substrate that absorbs the light that is produced by the active region and reduce light emission efficient;
Step 611, replace first substrate below first coating, to engage with second substrate, just first substrate is replaced by second substrate, second substrate is preferable as the transparent substrates of gallium phosphide (GaP) substrate, SiC substrate, gallium nitride (GaN) substrate, zinc oxide (ZnO) substrate, the first substrate light absorption substrate is replaced by the second substrate transparent substrates, make substrate no longer absorb the light that is produced by the active region, thereby effectively improved light emission efficient;
Step 613, the part of exposing first coating or second substrate, it is to be finished by dry-etching method (particularly RIE) or wet etching that the zone is exposed in the part of first coating or the part of substrate, in other preferred embodiments of the present invention, by dry-etching method (particularly RIE) or wet etching in the part of first coating or the part of substrate form the etching of exposing the zone and expose in the engineering process, can also expose engineering by above-mentioned etching and make second substrate, first coating, the active region, and in second coating, at least have a plurality of concavo-convex male and fomale(M﹠F)s one side, simultaneously, expose the zone by the part that utilizes etching method to form first coating or second substrate, need not to increase extra engineering, also can make its side become male and fomale(M﹠F), thereby strengthen the luminous efficiency of LED matrix of the present invention;
Step 615, above second coating, form first electrode, and the zone of exposing at first coating or second substrate forms redundant electrode, the side (as shown in figure 14) of this redundancy electrode above first coating, a side (as shown in figure 15) of etching certain depth on first coating, a side (as shown in figure 16) above second substrate, and a side (as shown in figure 17) of etching certain depth forms on second substrate, even conducting resinl causes second electrode to separate with joint between second conductor, or second substrate separate with joint between first coating, because the electric power that provided by second conductor that second lead-in wire connects can be provided redundant electrode, therefore the led chip with redundant electrode of the present invention or device still can steady runnings, first electrode or redundant electrode can have multiple shape, in addition, first electrode or redundant electrode are that metal material is preferable;
Step 617 is formed for second electrode of ohmic contact below second substrate, second electrode is that metal material is preferable;
Step 619, second electrode are crossed metal-to-metal adhesive with second conductor dbus and are connected, and preferable alloy glue is the Ag conducting resinl, and second electrode that is positioned at the substrate below is connected with second conductor;
Step 621, first electrode and first conductor be by wire-bonded, and redundant electrode and second conductor are by wire-bonded.
The above is the preferred embodiments of the present invention only, is not limited to the present invention, and is within the spirit and principles in the present invention all, any modification of doing, is equal to replacement, improvement etc., all should be included within protection scope of the present invention.
Use possibility on the industry
LED matrix and manufacture method thereof with redundant electrode of the present invention, except first electrode of the formation of a side above second coating or lamination and second electrode that below conductive board, forms, in described substrate and first coating, wherein any one part is exposed the zone and is formed redundant electrode, provides cheap and has guaranteed the LED matrix of high reliability.