CN102321867B - Carbon layer material with protective layer structure and preparation method thereof - Google Patents
Carbon layer material with protective layer structure and preparation method thereof Download PDFInfo
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- CN102321867B CN102321867B CN2011103250429A CN201110325042A CN102321867B CN 102321867 B CN102321867 B CN 102321867B CN 2011103250429 A CN2011103250429 A CN 2011103250429A CN 201110325042 A CN201110325042 A CN 201110325042A CN 102321867 B CN102321867 B CN 102321867B
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- 239000000463 material Substances 0.000 title claims abstract description 249
- 239000010410 layer Substances 0.000 title claims abstract description 56
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 45
- 239000011241 protective layer Substances 0.000 title claims abstract description 33
- 238000002360 preparation method Methods 0.000 title claims abstract description 21
- 229910052799 carbon Inorganic materials 0.000 title abstract description 11
- 239000011248 coating agent Substances 0.000 claims abstract description 233
- 238000000576 coating method Methods 0.000 claims abstract description 233
- 230000008021 deposition Effects 0.000 claims abstract description 92
- 238000000034 method Methods 0.000 claims abstract description 11
- 239000000126 substance Substances 0.000 claims description 99
- 229910002804 graphite Inorganic materials 0.000 claims description 31
- 239000010439 graphite Substances 0.000 claims description 31
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 21
- 229910052802 copper Inorganic materials 0.000 claims description 21
- 239000010949 copper Substances 0.000 claims description 21
- 238000007747 plating Methods 0.000 claims description 20
- 239000003795 chemical substances by application Substances 0.000 claims description 13
- 229910021383 artificial graphite Inorganic materials 0.000 claims description 10
- 239000000853 adhesive Substances 0.000 claims description 8
- 230000001070 adhesive effect Effects 0.000 claims description 8
- 239000004642 Polyimide Substances 0.000 claims description 7
- 229920001721 polyimide Polymers 0.000 claims description 7
- 229920000265 Polyparaphenylene Polymers 0.000 claims description 5
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 claims description 5
- -1 polyphenylene Polymers 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 4
- 229910021382 natural graphite Inorganic materials 0.000 claims description 4
- 239000003923 scrap metal Substances 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 229910021389 graphene Inorganic materials 0.000 claims description 3
- 230000008018 melting Effects 0.000 claims description 3
- 238000002844 melting Methods 0.000 claims description 3
- 239000007769 metal material Substances 0.000 claims description 3
- 229920000642 polymer Polymers 0.000 abstract description 8
- 239000003575 carbonaceous material Substances 0.000 abstract description 2
- 238000000151 deposition Methods 0.000 description 87
- 239000010408 film Substances 0.000 description 68
- 239000004820 Pressure-sensitive adhesive Substances 0.000 description 26
- 239000000758 substrate Substances 0.000 description 19
- 230000015572 biosynthetic process Effects 0.000 description 18
- 239000012790 adhesive layer Substances 0.000 description 10
- 238000006116 polymerization reaction Methods 0.000 description 10
- 238000010586 diagram Methods 0.000 description 7
- 239000002985 plastic film Substances 0.000 description 7
- 238000005520 cutting process Methods 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 239000007770 graphite material Substances 0.000 description 5
- 239000000741 silica gel Substances 0.000 description 5
- 229910002027 silica gel Inorganic materials 0.000 description 5
- 239000006185 dispersion Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 230000005855 radiation Effects 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 208000005168 Intussusception Diseases 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 238000013467 fragmentation Methods 0.000 description 3
- 238000006062 fragmentation reaction Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 229920000052 poly(p-xylylene) Polymers 0.000 description 3
- 239000013590 bulk material Substances 0.000 description 2
- 239000011247 coating layer Substances 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 239000007888 film coating Substances 0.000 description 2
- 238000009501 film coating Methods 0.000 description 2
- 229920002521 macromolecule Polymers 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 208000027418 Wounds and injury Diseases 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 239000005002 finish coating Substances 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 208000014674 injury Diseases 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000013528 metallic particle Substances 0.000 description 1
- 238000011017 operating method Methods 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/60—Deposition of organic layers from vapour phase
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/05—Preparation or purification of carbon not covered by groups C01B32/15, C01B32/20, C01B32/25, C01B32/30
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- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Laminated Bodies (AREA)
- Chemical Vapour Deposition (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention provides a preparation method of a carbon layer material with a protective layer structure, belonging to the technical field of carbon materials. The method comprises the following steps of: 1, collecting the carbon layer material to be subjected to polymer vapour deposition; 2, transferring the carbon layer material in a cavity of polymer vapour deposition equipment to carry out the polymer vapour deposition; and 3, completing the polymer vapour deposition operation when the thickness of a polymer vapour deposition layer reaches the preset thickness, wherein the preset thickness is 0.05-15 mu. By using the method disclosed by the invention, a coating film is generated outside the carbon layer material in a manner of the polymer vapour deposition, and therefore, the thickness of the protective layer of the traditional carbon layer material is greatly reduced so that the heat radiating efficiency of the carbon layer material for conducting heat is effectively increased; and the carbon layer material is applied to other places needing arranging the protective layer on the carbon layer material.
Description
Technical field
The invention belongs to the carbon material technical field.
Technical background
The carbon-coating material mainly refers to and has the layer material that carbon component forms, or bulk material.Wherein, be typically the graphite film material.
At present, the graphite film material comprises high thermal conductivity, heat-resisting, corrosion-resistant and high conductivity because of its excellent characteristic, in present industrial application, is widely used in the technical fields such as electronic product heat radiation, heat-resistant seal material, heating element.
Such as, in the now widely used handheld terminal, smart mobile phone wherein is because the characteristics such as self size is little, the electronic component intensity is high, thermal value is large need to realize heat sinking function by the material of height heat radiation, lightweight, stable performance.In actual applications, having the graphite film material of high heat dispersion, is good solution.
But the graphite film material has a weak point, and local Fragmentation Phenomena may occur the integral part that is exactly material, thereby causes broken sheet or bulk material to be scattered in the application places.If include the isostructural words of circuit card or electronic component in the applied place, broken graphite film material just might cause the equipment short circuit, perhaps other damage.
For fear of this weak point, the scheme that adopts at present is: with graphite film material attachment external protection, this external protection generally adopts plastic film to realize.Utilize this external protection to play the function that prevents the graphite film material fragmentation, increase simultaneously the intensity of graphite film material under the use state.
Typical performance is the upper and lower surface coated with adhesive layer at the graphite film material, by the adhesive attraction of this adhesive layer, respectively sticks one deck external protection in upper and lower surface.Then, pressure sensitive adhesive is coated in an external protection outside therein again, and then sticks release layer in the periphery of this pressure sensitive adhesive.When using this graphite film material, take aforesaid release layer off, utilize pressure sensitive adhesive with the thermal source surface of graphite film material attachment in the needs heat radiation, can realize heat sinking function described in the invention.Such as, employed graphite film heat sink material on the iphone4 smart mobile phone that present Apple produces carries out conservation treatment by such mode.Employed graphite film material on other the high-end smartphones also is this structure formation usually.
It is pointed out that current technology has great weak point, major cause is: coated adhesive layer usually have the 5-15 micron thickness, and the thickness of external protection can reach the 5-15 micron thickness usually.And be applied in the situation of mobile phone terminal, the thickness of employed graphite film material, great majority are only between the 10-80 micron.
Therefore, coated adhesive layer and protective layer, the thickness that adds up is very large, even can approach or surpass the thickness of heat conduction usefulness graphite film material, and they all are poor conductors of heat.Existing structure formation has reduced significantly that the graphite film material receives and the speed of distribute heat.
How can reduce the thickness of the coating layer of carbon-coating material periphery when avoiding the carbon-coating material fragmentation, increasing carbon-coating materials'use intensity, be the problem that needs at present solution.
Summary of the invention
Purpose of the present invention; provide a kind of carbon-coating material with protective layer structure and preparation method thereof; to generate plated film in carbon-coating material periphery by the mode of polymkeric substance gas phase deposition; thickness decrease with the protective layer of existing carbon-coating material; thereby effectively promote the carbon-coating material and be applied to radiating efficiency in the heat conduction purpose situation, and be applied to the occasion that other need to arrange at the carbon-coating material protective layer.
The invention provides a kind of carbon-coating material preparation method with protective layer structure, the method includes following steps:
Step 1, gather the carbon-coating material of pending polymkeric substance gas phase deposition, carbon-coating material wherein includes carbon-coating base material part and carbon-coating overlapping portion, the area size of this carbon-coating base material part is greater than the carbon-coating overlapping portion, the carbon-coating overlapping portion is placed on the carbon-coating base material part, perhaps adds at the carbon-coating material surface and puts the metallic object that comprises wire or scrap metal;
Step 2 is transferred to aforementioned carbon-coating material among the cavity of equipment of polymkeric substance gas phase deposition, carries out polymkeric substance gas phase electroless copper deposition operation;
Step 3 reaches in the situation of preset thickness at the thickness of described polymkeric substance gas phase settled layer, finishes polymkeric substance gas phase electroless copper deposition operation, and wherein this preset thickness is between the 0.05-15 micron.
Further, the thickness of described polymkeric substance gas phase settled layer is preferably between the 0.2-6 micron.
Further, the thickness of described polymkeric substance gas phase settled layer is preferably between the 0.6-2.5 micron.
Further, the thickness of described polymkeric substance gas phase settled layer is more preferably between the 1.0-1.5 micron.
Further, the material of described polymkeric substance gas phase settled layer is polyphenylene ethyl or both one of polyimide.
Further, described carbon-coating material is the graphite film material of thickness between the 1-150 micron.
Further, described carbon-coating material is the flexible synthetic graphite mould material of thickness between the 10-70 micron.
Further, described carbon-coating material, the carbon-coating material that consists of for natural graphite.
Further, described carbon-coating material is the grapheme material that forms by Graphene.
Further, described carbon-coating overlapping portion includes two-layer and two-layer above carbon-coating overlapping portion, wherein, is positioned at the size of carbon-coating overlapping portion of top-direction less than the size that is positioned at the carbon-coating overlapping portion on the bottom direction.
Further, described carbon-coating overlapping portion is bonding each other by tackiness agent and carbon-coating base material part.
Further, described tackiness agent is organic adhesion agent, or metallic substance.
Further, described carbon-coating overlapping portion is copper sheet or the aluminium flake of thickness between the 5-200 micron.
Further, described metallic object, be fixed on the carbon-coating material by tackiness agent after, carry out again coating operation.
Further, by heating at least mode of one of aforesaid carbon-coating material and metallic object, make at least generating unit fractional melting of metallic object, then utilize the adhesive attraction of the rear resolidification of fusing, make its mutual fixed position, carry out again the operation of polymkeric substance gas phase deposition plating.
Description of drawings
Fig. 1 is carbon-coating material described in the invention and the decomposing schematic representation of polymkeric substance gas phase settled layer.
Fig. 2 is the synoptic diagram that is provided with the carbon-coating material of carbon-coating overlapping portion.
Fig. 3 is the synoptic diagram that is provided with the carbon-coating material of metallic object.
Fig. 4 is the synoptic diagram of cutting apart situation of carbon-coating material behind the polymkeric substance gas phase deposition plating.
Fig. 5 is the synoptic diagram of position relationship between Split type structure and the interior miniature synusia.
Fig. 6 is the synoptic diagram of mutual intussusception between Split type structure and the interior miniature synusia.
Fig. 7 is the synoptic diagram that is provided with the substrate of formation of pressure-sensitive adhesive layer.
Fig. 8 is the synoptic diagram that is provided with substrate, formation of pressure-sensitive adhesive layer and carbon-coating material embodiment.
Embodiment
In the present invention, by the mode of polymkeric substance gas phase deposition, film former layer on the carbon-coating material utilizes this thin film layer, can give expediently carbon-coating material protection layer structure.
Particularly, the invention provides a kind of carbon-coating material with protective layer structure, this material comprises:
The carbon-coating material, preferred situation, the material layer that is comprised of graphite material and/or Graphene in addition, also can be the laminate structure that other carbon component forms, and does not certainly also limit;
Polymkeric substance gas phase settled layer, it is to deposit mutually formed material layer by carrying out Polymer Gas at aforementioned carbon-coating material, its thickness is between the 0.05-15 micron.
Below in conjunction with specific embodiment, come material preparation method of the present invention is described.
Step 1 gathers the carbon-coating material for the treatment of polymkeric substance gas phase deposition;
In the present embodiment, selected carbon-coating material can be natural carbon-coating material, also can be artificial carbon-coating material.
In the present invention, described carbon-coating material as typical embodiment, is preferably the graphite film material between the 1-150 micron.Be applied to especially the heat conduction aspect, certainly, also do not limit.
Particularly be directed to the synthetic graphite mould material.Described carbon-coating material, the more preferably flexible synthetic graphite mould material of thickness between the 10-70 micron.The graphite film material of the type has good collapsible performance and conduction, heat dispersion.
As an example, present synthetic graphite mould material commonly used is 25 microns synthetic graphite mould material such as thickness, is applied in some smart mobile phones, and its thermal conductivity can reach 1500-1900W/mk, even higher.Utilize the material of high thermal conductivity like this, the miniaturization that realizes smart mobile phone is necessary.
But at present; be directed to the synthetic graphite mould material of this type; in order to prevent that the graphite film material from use breaking; perhaps produce the phenomenons such as chip; to its protection method that carries out; be at the top layer of graphite film material adhesive coating layer, and then cover one deck external protection at adhesive layer.Such as; rostone ink film for 25 microns; coated adhesive layer may reach the 5-15 micron; and the external protection that covers; can reach the 5-15 micron again, so, the heat conduction advantage of rostone ink film; after thermal conductivity is very low on arranging the adhesive layer and protective membrane, can lose very large.
Therefore, for the very high synthetic graphite mould material of thermal conductivity, in order to play a protective role, and reduce the thermal diffusivity loss of energy that causes because of adhesive layer and external protection, especially applicable the present invention.
In addition, grapheme material has good heat conductivility equally, and the heat sink material that utilizes grapheme material to superpose and consist of each other is similar to aforesaid graphite film material.When utilizing grapheme material to realize the heat radiation purpose, can utilize equally the present invention to carry out polymkeric substance gas phase electroless copper deposition operation.As typical embodiment, can be preferably the grapheme material between the 1-150 micron.When this is too thin because of grapheme material, equally also can affect the capacity of heat transmission.
Described grapheme material and graphite material, the grapheme material material forms mutually compound with graphite material made in the operation that can also mix or superpose between the two.
Certainly, the carbon-coating material that natural graphite consists of can be applied to the present invention too.
As an example, selected carbon-coating material is the synthetic graphite carbon-coating material of 30 micron thickness in the present embodiment, and for laminar, upper bottom surface is the rectangle sheet structure of 20cm * 25cm.
Step 2 is transferred to aforesaid carbon-coating material among the cavity of equipment of polymkeric substance gas phase deposition, carries out polymkeric substance gas phase electroless copper deposition operation;
Continue foregoing embodiment.With aforesaid rectangle sheet carbon-coating material, be placed among the cavity of polymkeric substance gas phase depositing device.In the present embodiment, as an example, the material of the polymkeric substance gas phase deposition that adopts is polyphenylene ethyl.
Described polyphenylene ethyl is called again Parylene, and perhaps Parylene is a kind of polymkeric substance gas phase deposition macromolecule polymer material.This polymkeric substance gas phase deposition material, in the cavity environment of polymkeric substance gas phase deposition, can polymerization reaction take place in vapor deposition processes, generate the macromolecule polymeric material of stable performance, good insulation preformance.It is the chemical polymerization thing vapour deposition of carrying out under vacuum condition.
As an example, with the carbon-coating material of aforesaid 30 micron thickness, in the polymkeric substance gas phase deposition chamber of polyphenylene ethyl, put, condition is adjusted to the polymkeric substance gas phase deposits needed temperature and vacuum tightness, launch polymkeric substance gas phase electroless copper deposition operation.
In addition, can also use polyimide material to carry out polymkeric substance gas phase deposition.Polyimide has the polymerization of good film forming aspect equally.In the present invention, polyimide material can change gas phase state into, when carrying out polymkeric substance gas phase deposition, and polymerization reaction take place, the polyimide coating after the generation polymerization.The film forming properties of polyimide is very strong, but carries out polymkeric substance gas phase when deposition, usually requires the vacuum tightness higher than parylene polymer vapour deposition; Certainly, also also non-limiting.
Step 3, the thickness that deposits the rete that obtains in described polymkeric substance gas phase reaches in the situation of preset thickness, finishes polymkeric substance gas phase deposition, and wherein, this preset thickness is between the 0.05-15 micron.
The reason that this thickness is set is, if the thickness of the rete that aforesaid polymkeric substance gas phase deposition obtains is lower than 0.05 micron, because the too thin cause of rete, will reduces the provide protection on carbon-coating surface, and can't effectively improve the toughness of mould material; If its thickness again can be too large because of the thickness of self greater than 15 microns, affect the heat conductivility of former carbon-coating; In addition, if original carbon-coating material is to have flexibility, folding graphite film material, so, if thickness is too large, also can affect the flexibility of this graphite film material.
Further, the rete that described polymkeric substance gas phase deposition obtains, thickness is preferably the 0.2-6 micron.In this thickness range, the rete that described polymkeric substance gas phase deposition obtains both can prevent that the material on carbon-coating surface from coming off, and also had preferably intensity, higher flexibility simultaneously.
Further, the rete that described polymkeric substance gas phase deposition obtains, thickness is more excellent is chosen as the 0.6-2.5 micron, and the polymkeric substance gas phase deposit thickness between this scope both can keep preferably intensity, also can keep the snappiness of carbon-coating material; In addition, because the thickness of self is limited, less on the heat conductivility impact of carbon-coating material.Simultaneously, in the situation of this thickness, also be convenient to carry out machining control.
Further, the thickness of described polymkeric substance gas phase settled layer has good heat dispersion in order to make it, can also be with the gauge control of rete between the 1.0-1.5 micron, on this thickness, can keep well the heat dispersion of carbon-coating material, and the snappiness of carbon-coating material.
Fig. 1 is the decomposing schematic representation of having showed carbon-coating material described in the invention and polymkeric substance gas phase deposition material.
Carbon-coating material 100 wherein is base material, and polymkeric substance gas phase settled layer 200 is the vapour deposition coating on carbon-coating material 100, after polymkeric substance gas phase electroless copper deposition operation, forms good bonding state.
In the present invention, be directed to the polymkeric substance gas phase electroless copper deposition operation that the carbon-coating material carries out, also have more technical characterictic, the below proceeds explanation.
(1) is directed to the base material of carbon-coating material, the carbon-coating overlapping portion can also be set, then be directed to carbon-coating material base material and carbon-coating overlapping portion and jointly carry out polymkeric substance gas phase electroless copper deposition operation.
Join shown in Figure 2ly, showed the embodiment of carbon-coating material as base material here, be referred to as here carbon-coating base material part 400, on carbon-coating base material part 400, also be provided with carbon-coating overlapping portion 410.Described carbon-coating overlapping portion 410 is circular configurations.The area size of aforesaid carbon-coating base material part 400 is greater than the area size of carbon-coating overlapping portion 410.In use, this carbon-coating overlapping portion 410 is depended on carbon-coating base material part 400 be fixed, then it is carried out polymkeric substance gas phase electroless copper deposition operation.
Described carbon-coating overlapping portion 410 can adopt same carbon-coating material to make, and also can adopt with carbon-coating base material part 400 different materials and make.Such as when the graphite film material that described carbon-coating base material part 400 is 30 micron thickness, described carbon-coating overlapping portion 410 can adopt the graphite film material of this specification to make too.
In addition, also aforesaid carbon-coating overlapping portion 410 can be adopted the graphite material of other specification, such as the natural graphite flakes of 50 micron thickness.
In addition, aforesaid carbon-coating overlapping portion 410 also is fit to adopt metallic substance to make.This is because metal has good heat conductivility equally, and heat conductivility radially is good, but graphite material heat conductivility radially is then lower.As preferred embodiment, can adopt copper sheet or the aluminium flake of 5-200 micron, make carbon-coating overlapping portion 410.Certainly, also can adopt the good conductor of other heat to make carbon-coating overlapping portion 410.
Aforesaid carbon-coating overlapping portion and carbon-coating base material part before carrying out common polymkeric substance gas phase deposition, are fit to carry out each other sealing treatment, make its mutual close contact.This sealing treatment as preferred embodiment and non-limiting, can be realized by tackiness agent.Based on tackiness agent aforesaid carbon-coating overlapping portion 410 and carbon-coating base material part 400 are fixed between the two, then carry out polymkeric substance gas phase electroless copper deposition operation.
Described tackiness agent for example and without limitation, can adopt organic adhesion agent, such as pressure-sensitive adhesive, and the silica gel material that perhaps heat conductivility is stronger etc.In addition, also can adopt tinsel or metal powder or metallic particles, by being heated the mode of fusing, the adhesive attraction of resolidification reaches fixed effect after fusing.
(2) with described carbon-coating material as base material, then layout carries out polymkeric substance gas phase deposition plating with wire or scrap metal thereon.
Utilization is distributed in wire on the carbon-coating material base material or the metallic object of metal fragment one class, can improve whole heat sink material and extraneous contact area, is more convenient for receiving extraneous heat, perhaps to extraneous distribute heat.
Join shown in Figure 3ly, on carbon-coating material 100, be distributed with metallic object 500, this metallic object 500 is fit to adopt the less metal constructions of yardstick such as wires or scrap metal to realize.Described metallic object 500, be distributed on the carbon-coating material 100 after, just can directly carry out coating operation.
In addition, described metallic object 500, can also be fixed on the carbon-coating material 100 by tackiness agent after, carry out again coating operation.
In addition, can also be by both modes of one at least of the aforesaid carbon-coating material 100 of rapid heating or metallic object 500, make at least generating unit fractional melting of metallic object 500, then utilize the adhesive attraction of the rear resolidification of fusing, make its mutual fixed position, and then carry out again the operation of polymkeric substance gas phase deposition plating.
(3) carry out polymkeric substance gas phase deposition plating carbon-coating material afterwards, it is cut apart, will cut apart Split type structure afterwards, have the coating operation of sealing effect.
Particularly, its working method includes following steps:
Step S210 carries out the coating operation that the polymkeric substance gas phase deposits with the carbon-coating material monolithic, and the thickness of its plated film is between the 0.05-15 micron;
Step S220 cuts into Split type structure with the material after the polymkeric substance gas phase depositing treatment;
Step S230, corresponding Split type structure arranges the interior miniature synusia that yardstick inside contracts, the mode that miniature synusia in this is inside contracted with size adds and places between the Split type structure that stacks, and again carries out polymkeric substance gas phase deposition, and the thickness of its polymkeric substance gas phase deposition plating is between the 0.05-15 micron;
Step S240 finishes after the polymkeric substance gas phase deposition, will separate between contiguous interior miniature synusia and the Split type structure, finishes the polymkeric substance gas phase deposition plating operation to the exposed edge after the Split type structure cutting.
Come the step of front is described as follows in conjunction with Fig. 4, Fig. 5 and Fig. 6:
At first, with the mode that carbon-coating material 100 utilizes aforesaid polymkeric substance gas phase to deposit, carry out coating film treatment.
Then, with the carbon-coating material after the polymkeric substance gas phase deposition, cut apart, the mode of cutting apart adopts cutting to get final product.As shown in the figure, the carbon-coating material 100 behind whole plated film has been divided into the Split type structure 110 of four " recessed " word shapes.
Then, join shown in Figure 5ly, the interior miniature synusia 600 that yardstick inside contracts is set.Described interior miniature synusia 600, it is consistent or approximate with aforesaid Split type structure 110 to refer to shape, but the edge section on the in-plane, the structure of evenly inwardly shrinking.Such as, as preferred embodiment, described interior miniature synusia with respect to the planar dimension of Split type structure, evenly inwardly shrinks the 0.5-10 millimeter.
Should in miniature synusia, as preferred embodiment, adopt silica gel piece or plastic sheet both at least one realize.Such as, can utilize separately silica gel piece to realize, such as, thickness is 1 millimeter silica gel piece; Also can adopt plastic sheet to realize, be the plastic sheet of 1 millimeter such as thickness, and described plastic sheet, is preferably soft plastic sheet; The matrix material that in addition, can also adopt silica gel piece and plastic sheet to be fixed together is each other realized.
In actual applications, aforesaid interior miniature synusia, preferred thickness are fit to adopt sheet structure to realize between the 10-2000 micron; Certainly, also also non-limiting.
Join shown in Figure 5ly, show in the accompanying drawing that here Split type structure 110 is " recessed " word shape; Accordingly, interior miniature synusia 600 is " recessed " word shape too, but the edge of its planar dimension evenly inside contracts.
In use, between adjoining Split type structure, and between the edge of interior miniature synusia and adjacent Split type structure, suitable arrangement inside contracts distance uniformly with interior miniature synusia pad.As shown in Figure 6, between Split type structure 110 and the interior miniature synusia 600, mutual intussusception, the edge section of Split type structure 110 all protrudes from outside the interior miniature synusia 600.
Finish after the aforesaid intussusception operation, it is carried out the coating film treatment operation of polymkeric substance gas phase deposition.
So the part of being covered by interior miniature synusia 600 on the Split type structure 110 all can't be carried out polymkeric substance gas phase electroless copper deposition operation; Other part, particularly be exposed to outer, because of the edge section that cutting causes, then can effectively carry out polymkeric substance gas phase electroless copper deposition operation.Utilize this operating method, can be with the edge section coating operation that carry out the vapour deposition of vacuum polymerization thing after the cutting, and can not carry out coating operation to being divided by interior miniature synusia institute partes tecta.
After the coating operation of finishing vacuum polymerization thing vapour deposition again, will separate between miniature synusia 600 in contiguous each and the Split type structure 110.Such as opening one by one between the interior miniature synusia 600 that will be close to and the Split type structure 110, just can obtain cut edge part from the Split type structure 110 of newly finishing the plated film seal operation.
(4) when carrying out the coating film treatment of carbon-coating material, can also only carry out coating film treatment to a side of carbon-coating material, and coating film treatment is not carried out in the another one side.
The mode of particularly, carrying out the individual layer plated film includes following steps:
Step S310 arranges the substrate that scribbles pressure sensitive adhesive;
Step S320, the carbon-coating material is sticked in the pressure sensitive adhesive position on corresponding the aforesaid base plate, and the carbon-coating material is carried out polymkeric substance gas phase electroless copper deposition operation;
Step S330, the thickness of polymkeric substance gas phase deposition plating is chosen between the 0.05-15 micron, after polymkeric substance gas phase electroless copper deposition operation is complete, the carbon-coating material is peeled from aforesaid substrate.
Join shown in Figure 7ly, substrate 700 at first is set, be coated with at this substrate 700 and be covered with formation of pressure-sensitive adhesive layer 710, this formation of pressure-sensitive adhesive layer 710 is suitably for the pressure sensitive adhesive of low degree of peeling off.Described low degree of peeling off refers to described carbon-coating material after formation of pressure-sensitive adhesive layer 710 adheres to, if again be lifted, can not destroyed by the bounding force of this formation of pressure-sensitive adhesive layer 710.
Be directed to the aforesaid substrate 700 that is provided with formation of pressure-sensitive adhesive layer 710, the carbon-coating material after formation of pressure-sensitive adhesive layer 710 adheres to, is placed in it and carries out polymkeric substance gas phase deposition plating among cavity of vacuum polymerization thing vapour deposition and process.In this case, an other side of carbon-coating material is protected by described formation of pressure-sensitive adhesive layer 710, can't carry out polymkeric substance gas phase electroless copper deposition operation.So, finish coating film treatment and afterwards this carbon-coating material is opened, just obtain single side and carried out the carbon-coating material of coating film treatment.
(5) process in the operation at the polymkeric substance gas phase deposition plating that once carries out, all parts of carbon-coating material are all carried out the mode of coating film treatment.
The purpose of this mode is to process in order to carry out once complete vacuum polymerization thing vapour deposition to the carbon-coating material.A reason of carrying out like this is: when carrying out polymkeric substance gas phase depositing treatment, need to point of suppon be set to the carbon-coating material, support this carbon-coating material.And the blind spot of vacuum polymerization thing vapour deposition then can be caused in the position of this point of suppon.How to eliminate this blind spot, for example and without limitation, can adopt following step:
Step S410 is directed to the carbon-coating material that need to carry out polymkeric substance gas phase deposition, chooses two or more contact waiting thereon;
Step S420, along with the carrying out of polymkeric substance gas phase electroless copper deposition operation, the situation of covering of conversion these two or more contact waiting makes it not cover simultaneously the carbon-coating material at one time;
Step S430, the thickness of polymkeric substance gas phase deposition plating is chosen between the 0.05-15 micron, behind the coating operation that carries out whole polymkeric substance gas phase depositions, finishes the comprehensive coating operation that is directed to the carbon-coating material.
As an example, can carry out like this:
Utilize the mode of clamping, such as the structure of clip pattern, fix the carbon-coating material.In use, only a location point need to be clamped, just fixed effect can be realized.
So, can correspondingly arrange and have two or more fixation kits that can carry out to the carbon-coating material position restriction, and stationary state control unit, control two or more fixation kits and can not contact simultaneously the carbon-coating material, and in polymkeric substance gas phase depositing time, mutually rotating the carbon-coating material is fixed.Described fixation kit can be to be similar to the such fixed sturcture of clip, also can be the support bar that utilizes more than three or three, the structure that the carbon-coating material is supported.Described stationary state control unit comprises timing topology, by clock and pre-set programs, comes the stationary state of fixation kit is adjusted, and it is being rotated the carbon-coating material is implemented fixing operation.
For instance, can be directed to a carbon-coating material, the fixation kit with three position bites is set.When one of them nip points during in clamp position, other clamp structure all is not in clamp position.Such as the total time of polymkeric substance gas phase deposition is six hours, the time that just can distribute for each bite two hours.Outside two hours, this bite is not in clamp position.
So 4 hours polymkeric substance gas phase depositing time can also be distributed in the position of each bite.If the speed of polymkeric substance gas phase deposition is balanced, so, in the position of bite, the thickness of its polymkeric substance gas phase deposition plated film that obtains is 4/6 of other position; Although thickness reduces to some extent, can not form the blind spot of polymkeric substance gas phase deposition.
(6) utilize the mode of polymkeric substance gas phase deposition, the carbon-coating material production is had the coating film treatment operation scheme of bound edge.
Under this mode, when carrying out the processing of polymkeric substance gas phase deposition plating, can generate the coating structure that extends outside the carbon-coating material.This structure formation can allow the user expediently by extending the coating structure outside the carbon-coating material, opens or grip this carbon-coating material.Particularly, can obviously improve the stretch-proof degree of carbon-coating edge of materials part by this structure.This is because if the edge section of carbon-coating material is torn or stretched operation, direct stressed object will be to extend the coating structure that the bound edge outside the carbon-coating material is used, but not the carbon-coating material, so just effectively protect the carbon-coating material.Particularly, for example and without limitation, the mode of extending the bound edge plated film includes following steps:
Step S510 arranges substrate, applies pressure sensitive adhesive at this substrate;
Step S520 is being provided with the substrate position of aforementioned pressure sensitive adhesive, sticks the carbon-coating material;
Step S530, a side that is directed to the carbon-coating material is carried out the coating operation of polymkeric substance gas phase deposition, the thickness of its plated film is between the 0.05-15 micron, it is opened afterwards again and be directed to the coating film treatment operation that an other side is carried out polymkeric substance gas phase deposition again, the thickness of its plated film is equally between the 0.05-15 micron;
Step S540 in the situation of the bound edge that keeps twice plated film, removes unnecessary plated film part.
Describe below by specific embodiment.
Join shown in Figure 8ly, in the embodiment shown in this figure, be provided with substrate 700.On substrate 700, be provided with formation of pressure-sensitive adhesive layer 710.The viscosity of the corresponding pressure-sensitive adhesive of described formation of pressure-sensitive adhesive layer is to hang down degree of peeling off.Described low degree of peeling off refers to and attaches in the above after the carbon-coating material, if the carbon-coating material is peeled, can be because of the adhesive attraction of adhesive, and to carbon-coating material injury.
So, be directed to the substrate 700 that is provided with formation of pressure-sensitive adhesive layer 710, just can attach carbon-coating material 100.Described carbon-coating material 100 is preferably the graphite film material with flexibility here.As an example, the graphite film material of artificial 10-70 micron generally has good flexibility.Here as an example, employing be the synthetic graphite mould material of 30 micron thickness, it is flexible good.After aforesaid graphite film material attachment is on substrate 700 corresponding formation of pressure-sensitive adhesive layer 710, it is placed among the cavity of polymkeric substance gas phase deposition, carry out vapour deposition first time and operate.
After having finished default deposit thickness, this deposit thickness can be taken as it 5 microns for example and without limitation.
Then, be inconjunction with the film coating composition of the polymkeric substance gas phase deposition on the carbon-coating material 100, it is peeled from substrate 700, then carry out for the second time gas-phase deposition coating and process.
Aforesaid second time, gas-phase deposition coating was processed, and can also have for the first time that side of film coating composition, selected to have the substrate of formation of pressure-sensitive adhesive layer, and this side correspondence after stickup, the sealing, carried out the coating film treatment second time.
This scheme can be controlled the coating film thickness of carbon-coating material 100 both sides effectively.
It is to be noted, if carry out vacuum plating for the second time, it is the carbon-coating material that directly will finish behind the vacuum coating for the first time, the words of in the situation without any protection, directly carrying out vacuum plating, so, carry out after the vacuum plating for the second time, the thickness that can form a side is larger, less this phenomenon of the thickness of opposite side.This be because, the side that thickness is larger, its thickness is for the first time and carries out the thickness summation of gas-phase deposition coating for the second time; And a side of thinner thickness, its thickness is corresponding the coating film thickness that carries out for the second time gas-phase deposition coating only.
And then, in the situation of the bound edge that forms that keeps twice plated film, remove unnecessary plated film part.And non-limiting, it is regional to keep the bound edge that extends 2-20 millimeter outside the carbon-coating material as preferred embodiment, processes and the bound edge of other parts is done excision.
(7) be directed to same carbon-coating material, skin arranges different polymkeric substance gas phase deposition plating thickness within it.
When carrying out the processing of polymkeric substance gas phase deposition plating, ectonexine carries out the mode of thickness difference alienation plated film, for example and without limitation, includes following steps:
Step S610 arranges substrate, applies pressure sensitive adhesive at this substrate;
Step S620 is being provided with the substrate position of aforementioned pressure sensitive adhesive, sticks the carbon-coating material;
Step S630 carries out polymkeric substance gas phase deposition plating, afterwards it is opened, and proceeds the coating operation that the polymkeric substance gas phase deposits in an other side,
Wherein, be the 1-15 micron at the thickness of an aforesaid wherein side plated film, as skin, the thickness of an other side plated film therein is the 0.05-2 micron, as internal layer.
By aforesaid mode, a side coating film thickness that obtains is thicker, and the coating film thickness of an other side is thinner.This structure has widely value in actual applications.This be because, be provided with a side of thicker plated film as outer field words, can whole Coating Materials be played a good protection, so that carbon-coating material wherein can stably exist.On the other hand, the coating film thickness of internal layer is thinner, this structure formation, and in situation about directly internal layer being attached on the thermal source, the heat of thermal source just can be transferred on the carbon-coating material very effectively.
By the present invention, can realize the effect of giving prominence to very much.Under current existing technical qualification, be directed to the set protective layer of graphite film, the adhesive layer comprising applying usually have the 5-15 micron thickness, and the thickness of external protection can reach the 5-15 micron thickness usually.So the total thickness of protective layer is about the 10-30 micron.
And the polymkeric substance gas phase deposition plating material of realizing by the present invention, for example and without limitation, the thickness of its individual layer can be controlled at about the 1.0-1.5 micron, is about 10% of current protective layer total thickness; Certainly can also be thinner.
Protective layer of the prior art, and gas-phase depositing materials of the present invention are hot poor conductor, and its thermal conductivity is comparatively approaching.As an example, its thermal conductivity is taken as in the consistent situation, because be inversely proportional to by the heat-transfer rate of protective layer and the thickness of protective layer; so; utilize the present invention, with the heat transfer efficiency of heat by the protective layer structure that formed by adhesive layer and external protection, can improve 5-10 doubly.
More than be the description of this invention and non-limiting, based on other embodiment of inventive concept, also all among protection scope of the present invention.
Claims (15)
1. carbon-coating material preparation method with protective layer structure is characterized in that the method includes following steps:
Step 1, gather the carbon-coating material of pending polymkeric substance gas phase deposition, carbon-coating material wherein includes carbon-coating base material part and carbon-coating overlapping portion, the area size of this carbon-coating base material part is greater than the carbon-coating overlapping portion, the carbon-coating overlapping portion is placed on the carbon-coating base material part, perhaps adds at the carbon-coating material surface and puts the metallic object that comprises wire or scrap metal;
Step 2 is transferred to aforementioned carbon-coating material among the cavity of equipment of polymkeric substance gas phase deposition, carries out polymkeric substance gas phase electroless copper deposition operation;
Step 3 reaches in the situation of preset thickness at the thickness of described polymkeric substance gas phase settled layer, finishes polymkeric substance gas phase electroless copper deposition operation, and wherein this preset thickness is between the 0.05-15 micron.
2. a kind of carbon-coating material preparation method with protective layer structure according to claim 1, it is characterized in that: the thickness of described polymkeric substance gas phase settled layer is preferably between the 0.2-6 micron.
3. a kind of carbon-coating material preparation method with protective layer structure according to claim 2, it is characterized in that: the thickness of described polymkeric substance gas phase settled layer is preferably between the 0.6-2.5 micron.
4. a kind of carbon-coating material preparation method with protective layer structure according to claim 3 is characterized in that: the thickness of described polymkeric substance gas phase settled layer, and more preferably between the 1.0-1.5 micron.
5. a kind of carbon-coating material preparation method with protective layer structure according to claim 1, it is characterized in that: the material of described polymkeric substance gas phase settled layer is polyphenylene ethyl or both one of polyimide.
6. a kind of carbon-coating material preparation method with protective layer structure according to claim 1, it is characterized in that: described carbon-coating material is the graphite film material of thickness between the 1-150 micron.
7. a kind of carbon-coating material preparation method with protective layer structure according to claim 6, it is characterized in that: described carbon-coating material is the flexible synthetic graphite mould material of thickness between the 10-70 micron.
8. a kind of carbon-coating material preparation method with protective layer structure according to claim 1 is characterized in that: described carbon-coating material, the carbon-coating material that consists of for natural graphite.
9. a kind of carbon-coating material preparation method with protective layer structure according to claim 1, it is characterized in that: described carbon-coating material is the grapheme material that forms by Graphene.
10. a kind of carbon-coating material preparation method with protective layer structure according to claim 1; it is characterized in that: described carbon-coating overlapping portion; include two-layer and two-layer above carbon-coating overlapping portion; wherein, be positioned at the size of carbon-coating overlapping portion of top-direction less than the size that is positioned at the carbon-coating overlapping portion on the bottom direction.
11. a kind of carbon-coating material preparation method with protective layer structure according to claim 1, it is characterized in that: described carbon-coating overlapping portion is bonding each other by tackiness agent and carbon-coating base material part.
12. a kind of carbon-coating material preparation method with protective layer structure according to claim 11, it is characterized in that: described tackiness agent is organic adhesion agent, or metallic substance.
13. a kind of carbon-coating material preparation method with protective layer structure according to claim 1 is characterized in that: described carbon-coating overlapping portion is copper sheet or the aluminium flake of thickness between the 5-200 micron.
14. a kind of carbon-coating material preparation method with protective layer structure according to claim 1 is characterized in that: described metallic object, be fixed on the carbon-coating material by tackiness agent after, carry out again coating operation.
15. a kind of carbon-coating material preparation method with protective layer structure according to claim 1; it is characterized in that: by heating at least mode of one of aforesaid carbon-coating material and metallic object; make at least generating unit fractional melting of metallic object; then utilize the adhesive attraction of the rear resolidification of fusing; make its mutual fixed position, carry out again the operation of polymkeric substance gas phase deposition plating.
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| CN201210468257.0A CN102925860B (en) | 2011-10-23 | 2011-10-23 | Preparation method for carbon layer material with protective layer structure |
| CN2011103250429A CN102321867B (en) | 2011-10-23 | 2011-10-23 | Carbon layer material with protective layer structure and preparation method thereof |
| PCT/CN2012/083357 WO2013060256A1 (en) | 2011-10-23 | 2012-10-23 | Carbon layer material having protective layer structure and preparation process thereof |
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| CN201210465628.XA Division CN102925858B (en) | 2011-10-23 | 2011-10-23 | Carbon layer materials with protection layer structure |
| CN2012104656203A Division CN102925857A (en) | 2011-10-23 | 2011-10-23 | Preparation method for carbon layer materials with protection layer structure |
| CN201210468257.0A Division CN102925860B (en) | 2011-10-23 | 2011-10-23 | Preparation method for carbon layer material with protective layer structure |
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| CN102651961B (en) * | 2012-05-29 | 2016-02-03 | 安顿雷纳(上海)纤维材料科技有限公司 | A kind of Heat-conduction heat-dissipation interface material and manufacture method thereof |
| CN104404477A (en) * | 2014-11-03 | 2015-03-11 | 曾芳勤 | Method for compounding insulation heat radiation film and superconductor slice |
| FR3033554B1 (en) * | 2015-03-09 | 2020-01-31 | Centre National De La Recherche Scientifique | PROCESS FOR FORMING A GRAPHENE DEVICE |
| CN105472948A (en) * | 2015-12-17 | 2016-04-06 | 江苏灰山石科技股份有限公司 | Graphite cooling fin for frequency converter and manufacturing process for cooling fin |
| CN110776737A (en) * | 2018-07-31 | 2020-02-11 | 天津大学 | Graphene-polyimide resin heat-conducting composite material and preparation method thereof |
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| CN1404584A (en) * | 2000-02-22 | 2003-03-19 | 部鲁尔科学公司 | Organic polymeric antireflective coatings deposited by chemical vapor deposition |
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| WO2002101769A1 (en) * | 2001-06-08 | 2002-12-19 | Matsushita Electric Industrial Co., Ltd. | Multilayer film capacitor and production method thereof |
| US7163721B2 (en) * | 2003-02-04 | 2007-01-16 | Tegal Corporation | Method to plasma deposit on organic polymer dielectric film |
| US7276273B2 (en) * | 2003-10-14 | 2007-10-02 | Advanced Energy Technology Inc. | Heat spreader for display device |
| CN1837147B (en) * | 2005-03-24 | 2010-05-05 | 清华大学 | Thermal interface material and its production method |
| JP4695943B2 (en) * | 2005-08-24 | 2011-06-08 | Ｈｏｙａ株式会社 | Method for manufacturing thin film and optical member |
| AT503050B1 (en) * | 2005-11-17 | 2007-09-15 | Boehlerit Gmbh & Co Kg | Coating a tool with titanium, zirconium, hafnium, vanadium, niobium, tantalum or chromium carbonitride by chemical vapor deposition comprises increasing the temperature during deposition |
| JP5332475B2 (en) * | 2008-10-03 | 2013-11-06 | 株式会社村田製作所 | Multilayer ceramic electronic component and manufacturing method thereof |
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| CN102925860B (en) * | 2011-10-23 | 2015-07-01 | 碳元科技股份有限公司 | Preparation method for carbon layer material with protective layer structure |
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| CN102321867A (en) | 2012-01-18 |
| WO2013060256A1 (en) | 2013-05-02 |
| CN102925860A (en) | 2013-02-13 |
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