CN102319959A - Surface microstructure-forming system based on coherent laser - Google Patents
Surface microstructure-forming system based on coherent laser Download PDFInfo
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- CN102319959A CN102319959A CN201110241056A CN201110241056A CN102319959A CN 102319959 A CN102319959 A CN 102319959A CN 201110241056 A CN201110241056 A CN 201110241056A CN 201110241056 A CN201110241056 A CN 201110241056A CN 102319959 A CN102319959 A CN 102319959A
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Abstract
The invention discloses a surface microstructure-forming system based on coherent laser. The surface microstructure-forming system based on coherent laser comprises a laser generator, a beam-shaping module, a first semireflector and a second total reflector which are sequentially connected along a light path, an electrically controlled movable operating platform is arranged under the first semireflector and the second total reflector, a matrix is placed on the electrically controlled movable operating platform, the first semireflector and the second total reflector are provided with servomotors, and the electrically controlled movable operating platform, the servomotors and the laser generator are connected with a computer. The surface microstructure-forming system based on coherent laser can ensure that melting, convection, vaporization or other physical and chemical processes can take place on the material of the specified part of the surface of the matrix, so that the surface shape of the material can be changed, and thereby a needed periodic surface can be formed; and the technical means disclosed by the invention is simple and feasible, has a positive significance, and is convenient to popularize and apply.
Description
Technical field
The invention belongs to Surface Engineering, the accurate manufacturing technology of functional structure field, specifically is a kind of surface micro-structure formation system based on coherent laser.
Background technology
The periodic micro structure surface has the kinds of surface function in different field, and for example in surface reaction, surface heat transfer were used, surface appearance was determining the advance of technology to a great extent.On the Biological Technology, transplant the period frequency that the effect of integrating depends on the periodic micro structure surface to a great extent, the behavior of miniature in addition surface texture pair cell also has very big influence.Zonal texture can also improve the hydrophobicity on top layer, is added into micro-structural silicon the spectrum induction range that can also improve optical inductor in the optical inductor.Specific surface micronano structure can also realize that some superpower performance of material is (like superpower optical absorption efficient; Superhydrophilic; Super-hydrophobicity; Superpower electromagnetic radiation, the superpower desorption power etc. of sticking), this has abundant potential application in fields such as new forms of energy, high efficient energy sources conversion, MEMS, microfluidic system, surperficial excimer device, daily life, catalysis, medical science, national security and pharmacy.Therefore the micro-structure surface technology of preparing is more and more important.
See that from technology the type of the technology of preparing of surface micronano structure has multiple, such as planar technology, model technology etc.
Planar technology depends on photoetching technique, need make public to photoactive substance; The cost of matrix improves, and applicability reduces, and receives restrictions such as optical diffraction limit; The precision of size receives multiple condition effect; Be difficult to departure, the optical lithography mask is very high with the cost that uses optical imaging apparatus, and the photo etched mask of every kind of different size needs customized separately.
Model technology need be made mould in advance, can not reduce precision in the stromal surface direct forming.This kind forming mode; Rigidity for matrix has very high requirement, if because rigidity is too high, is difficult to make the pattern of model all be reflected on the matrix accurately through compacting; Therefore need more high-intensity mould; Increased manufacturing cost, be limited by the rigidity of matrix simultaneously, the reduction of the widely applicable property of technology.Because it is higher to make the cost of micro-structural mould, the method only is applicable to carries out large batch of production to the ripe micro-structure surface of technology, is inappropriate for small lot, experimental preparation.Different cycles size micro-structure surface needs to make separately mould, can't directly produce through the adjustment existing equipment.
Summary of the invention
The objective of the invention is to overcome the shortcoming and defect of prior art; Surface micro-structure formation system based on coherent laser is provided; The utility model can make that stromal surface appointed part material melts, convection current, evaporation or other physical and chemical processes; Change the material surface shape, and then form needed periodic surface.
The present invention realizes through following technical scheme:
A kind of surface micro-structure formation system based on coherent laser; The laser generator, light beam shaping module, first half-reflecting mirror, second completely reflecting mirror that comprise light path setting successively; Below first half-reflecting mirror and second completely reflecting mirror, be provided with automatically controlled travelling table; Automatically controlled travelling table is used to place matrix, and said first half-reflecting mirror and second completely reflecting mirror are provided with servomotor, and said automatically controlled travelling table, servomotor and laser generator are connected with computer.Said light beam shaping module 3 adopts non-spherical lens group orthopedic systems or microlens array orthopedic systems.
Said laser generator comprises beam expanding lens, partially reflecting mirror, Q-switch, laser pump cavity, the completely reflecting mirror that connects successively.Said servomotor is digital control servomotor.
The present invention can a step directly process required periodic surface, and in process, does not use chemical agent to corrode, and satisfies requiring more and more stricter environmental protection standard now.Can through the control servomotor angle of reflector laser be changed through computer control, the size of adjustment stromal surface texture.With respect to model technology, the method does not need mfg. moulding die again when changing the periodic structure size, is fit to the surface of small lot batch manufacture specific (special) requirements.And because be to utilize the light energy field to prepare, be face processing, having the throughput rate height with respect to probe technology, energy consumes little.Can a step directly process required periodic surface, reduce step and instrument, reduce percent defective and time cost.
Technological means of the present invention is simple and easy to do, has positive beneficial effect, and is easy to utilize.
Description of drawings
Fig. 1 is the structural representation that the present invention is based on the surface micro-structure formation system of coherent laser.
Fig. 2 is the structural representation of Fig. 1 laser generator.
Fig. 3 is the angle relation between Fig. 1 first half-reflecting mirror, second completely reflecting mirror and the matrix.
Fig. 4 is the relation between in type stromal surface cycle size and optical maser wavelength and the angle.
Among the last figure: computer 1; Laser generator 2; Light beam shaping module 3; First half-reflecting mirror 4; Second completely reflecting mirror 5; Servomotor 6; Servomotor 7; Matrix 8; Automatically controlled travelling table 9; Beam expanding lens 10; Partially reflecting mirror 11; Q-switch 12; Laser pump cavity 13; Completely reflecting mirror 14.
The specific embodiment
Following specific embodiments of the invention is done further detailed explanation, but embodiment of the present invention is not limited thereto.
Embodiment
Of Fig. 1; The present invention is based on the surface micro-structure formation system of coherent laser; Comprise laser generator 2 that light path successively is provided with, light beam shaping module 3, first half-reflecting mirror 4, second completely reflecting mirror 5; Below first half-reflecting mirror 4 and second completely reflecting mirror 5, be provided with automatically controlled travelling table 9; Automatically controlled travelling table 9 is used to place matrix 8, and said first half-reflecting mirror 4 and second completely reflecting mirror 5 are provided with servomotor 6,7, and said automatically controlled travelling table 9, servomotor 6,7 are connected with computer 1 with laser generator 2.Said servomotor 6,7 is digital control servomotor.
As shown in Figure 2, said laser generator 2 comprises beam expanding lens 10, partially reflecting mirror 11, Q-switch 12, laser pump cavity 13, the completely reflecting mirror 14 that connects successively.
Like Fig. 1, shown in Figure 2.Laser generator 2, servomotor 6,7 and automatically controlled mobile working platform 9 are by computer 1 control, and laser generator 2 adopts 200W semiconductor pump YAG laser instrument, perhaps adopts the 50-100W optical fiber laser.The wavelength that optical fiber laser sends is close with YAG laser, but beam quality is better than semiconductor pumped YAG laser.Insert Q-modulating device 12 in laser generator 2 resonators, and expand bundle by beam expanding lens 10 in partially reflecting mirror 11 fronts.
Laser generator 2 emitted laser bundle transmissions change into flat top beam through light beam shaping module 3 by Gaussian beam, under the situation of needs, also can change into rectangular light spot to circular light spot.Light beam shaping module 3 can adopt non-spherical lens group orthopedic systems or microlens array orthopedic systems etc.
Laser beam is by first half-reflecting mirror 4 and 5 beam split of second completely reflecting mirror; First half-reflecting mirror 4 and second completely reflecting mirror 5 are connected on the turning cylinder of servomotor 6,7, thereby the angle that computer 1 control servomotor 6,7 rotates is controlled the angle of first half-reflecting mirror 4 and second completely reflecting mirror 5 and horizontal plane.Automatically controlled travelling table 9 can move up and down and can realize fine setting through computer 1 control.
As shown in Figure 4; The relation of coherent laser wavelength and surface period size is the angle of two coherent laser beams for
θ; λ is an optical maser wavelength, and p is 8 cycle of the matrix size of gained.Can know the micro-structure surface that will obtain the different cycles size by formula, need the angle theta of adjustment two bundle laser, as shown in Figure 3, second completely reflecting mirror 5 is a with the angle of horizontal plane
1, it is a that first half-reflecting mirror 4 gets angle with horizontal plane
2, the distance on plane, matrix 8 surfaces to be machined and incoming laser beam place is h, second completely reflecting mirror 5, first half-reflecting mirror 4 and the distance light beam intersection point are l.Can know θ=2a by geometrical relationship
1-2a
2,
Therefore can change angle a through regulating control servomotor 7,6
1, a
2Thereby, obtain the angle theta that target period size pairing two is restrainted reflector lasers, reach the specified angle of target size cycle P.And need change h through adjusting automatically controlled mobile working platform 9 up and down, make matrix 8 surfaces to be machined be in two bundle laser intersections.
For large-scale to be processed, work surface is long-pending to overlap area greater than the coherent beam hot spot, then regularly carries out feed motion in the horizontal direction through the automatically controlled travelling table 9 of computer 1 control.The feed motion time interval is by the material character and the processing request decision of surface to be machined.Rectangular light spot is compared circular light spot and is more suitable for the control of the feed motion amount of feeding.
Just can realize the present invention preferably as stated.
The foregoing description is a preferred implementation of the present invention; But embodiment of the present invention is not restricted to the described embodiments; Other any do not deviate from change, the modification done under spirit of the present invention and the principle, substitutes, combination, simplify; All should be the substitute mode of equivalence, be included within protection scope of the present invention.
Claims (4)
1. surface micro-structure formation system based on coherent laser; It is characterized in that; The laser generator, light beam shaping module, first half-reflecting mirror, second completely reflecting mirror that comprise light path setting successively; Below first half-reflecting mirror and second completely reflecting mirror, be provided with automatically controlled travelling table; Automatically controlled travelling table is used to place matrix, and said first half-reflecting mirror and second completely reflecting mirror are provided with servomotor, and said automatically controlled travelling table, servomotor and laser generator are connected with computer.
2. the surface micro-structure formation system based on coherent laser according to claim 1 is characterized in that, said laser generator comprises beam expanding lens, partially reflecting mirror, Q-switch, laser pump cavity, the completely reflecting mirror that connects successively.
3. the surface micro-structure formation system based on coherent laser according to claim 2 is characterized in that said servomotor is digital control servomotor.
4. the surface micro-structure formation system based on coherent laser according to claim 3 is characterized in that, said light beam shaping module adopts non-spherical lens group orthopedic systems or microlens array orthopedic systems.
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| CN201110241056A CN102319959A (en) | 2011-08-22 | 2011-08-22 | Surface microstructure-forming system based on coherent laser |
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Cited By (7)
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|---|---|---|---|---|
| CN103676461A (en) * | 2012-09-19 | 2014-03-26 | 三星电子株式会社 | Beam shapers, annealing systems employing the same, methods of heat treating substrates and methods of fabricating semiconductor devices |
| CN103706947A (en) * | 2013-11-14 | 2014-04-09 | 中国科学技术大学 | Large-area manufacturing method and processing system for surfaces of micrometer and nanometer structures with tunable periods and tunable morphologies |
| CN104007091A (en) * | 2013-02-26 | 2014-08-27 | 中国科学院天津工业生物技术研究所 | High-throughput detection system for microbe based on droplet microfluidic chip |
| CN104275551A (en) * | 2014-09-18 | 2015-01-14 | 上海小糸车灯有限公司 | Welding method and welding device of complex curved surface vehicle lamp |
| CN104439699A (en) * | 2014-10-27 | 2015-03-25 | 中国科学院理化技术研究所 | System and method for preparing micro-nano array structure by means of laser light |
| CN105665935A (en) * | 2015-12-29 | 2016-06-15 | 四川大学 | Microprobe tip forming system based on CO2 laser bilateral heating mode |
| CN110869149A (en) * | 2017-03-31 | 2020-03-06 | 普雷斯泰克有限两合公司 | Apparatus and method for additive manufacturing |
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| CN105665935A (en) * | 2015-12-29 | 2016-06-15 | 四川大学 | Microprobe tip forming system based on CO2 laser bilateral heating mode |
| CN110869149A (en) * | 2017-03-31 | 2020-03-06 | 普雷斯泰克有限两合公司 | Apparatus and method for additive manufacturing |
| CN110869149B (en) * | 2017-03-31 | 2022-06-28 | 普雷斯泰克有限两合公司 | Apparatus and method for additive manufacturing |
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Application publication date: 20120118 |