CN102319959A - Surface microstructure-forming system based on coherent laser - Google Patents

Surface microstructure-forming system based on coherent laser Download PDF

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CN102319959A
CN102319959A CN201110241056A CN201110241056A CN102319959A CN 102319959 A CN102319959 A CN 102319959A CN 201110241056 A CN201110241056 A CN 201110241056A CN 201110241056 A CN201110241056 A CN 201110241056A CN 102319959 A CN102319959 A CN 102319959A
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surface
forming system
mirror
system based
coherent laser
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CN201110241056A
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杨彦哲
杨永强
汤勇
黄延禄
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华南理工大学
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Publication of CN102319959A publication Critical patent/CN102319959A/en

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Abstract

The invention discloses a surface microstructure-forming system based on coherent laser. The surface microstructure-forming system based on coherent laser comprises a laser generator, a beam-shaping module, a first semireflector and a second total reflector which are sequentially connected along a light path, an electrically controlled movable operating platform is arranged under the first semireflector and the second total reflector, a matrix is placed on the electrically controlled movable operating platform, the first semireflector and the second total reflector are provided with servomotors, and the electrically controlled movable operating platform, the servomotors and the laser generator are connected with a computer. The surface microstructure-forming system based on coherent laser can ensure that melting, convection, vaporization or other physical and chemical processes can take place on the material of the specified part of the surface of the matrix, so that the surface shape of the material can be changed, and thereby a needed periodic surface can be formed; and the technical means disclosed by the invention is simple and feasible, has a positive significance, and is convenient to popularize and apply.

Description

一种基于相干激光的表面微结构成形系统 A surface microstructure forming system based on a coherent laser

技术领域 FIELD

[0001] 本发明属于表面工程、功能结构精密制造技术领域,具体是一种基于相干激光的表面微结构成形系统。 [0001] The present invention belongs to the surface engineering, a functional configuration of precision manufacturing technical field, in particular a surface microstructure forming system based on coherent laser light.

背景技术 Background technique

[0002] 周期性微结构表面在不同领域具有多种表面功用,譬如在表面反应、表面传热应用中,表面状况很大程度上决定着技术的先进性。 [0002] The periodic microstructure surface having utility in a variety of different areas of a surface, such as the surface of the reaction, the surface of the heat application, largely determines the surface condition of advanced technology. 生物工艺学上,移植整合的效果很大程度上取决于周期性微结构表面的周期频率,此外微型表面结构对细胞的行为也有很大的影响。 On biotechnology, Transplanting effect depends largely on the cycle frequency periodic microstructured surface, in addition to the micro surface structure of cell behavior also has a great influence. 层状纹理还能提高表层的疏水性,把微结构硅被加入到光感应器中还能提高光感应器的光谱感应范围。 Layered Texture can also increase the hydrophobicity of the surface layer, the silicon microstructure is added to the light sensor can improve the spectral sensitivity range of the light sensors. 特定的表面微纳米结构还能实现材料的某些超强性能(如超强的光学吸收效率,超亲水性,超疏水性,超强的电磁辐射,超强的黏附脱附力等),这在新能源、高效能源转化、微机电系统、微流控系统、表面激元器件、日常生活、催化、医学、国家安全和制药等领域有着丰富的潜在应用。 Specific surface micromachining of nanostructures can achieve superior performance of certain materials (such as superior optical absorption efficiency, ultra-hydrophilic, super-hydrophobic, super electromagnetic radiation, superior adhesion force desorption and the like), this new energy sources, efficient energy conversion, microelectromechanical systems, microfluidic systems, surface plasmon components, everyday life, catalysis, medicine, pharmaceutical and other fields of national security and has a wealth of potential applications. 因此微结构表面制备技术越来越重要。 Thus microstructured surface preparation techniques more important.

[0003] 从工艺技术上看,表面微纳米结构的制备技术的类型有多种,比如平面工艺、模型 [0003] From the process technology point of view, there are various types of preparation techniques of micro-nano structure on the surface, such as planar process model

工艺等。 Crafts.

[0004] 平面工艺,依赖于光刻技术,需要对光敏物质进行曝光,基质的成本提高,适用性降低,受光学衍射极限等限制,尺寸的精度受多种条件的影响,难以控制误差,光学光刻掩膜和使用光学成像设备的成本很高,每种不同尺寸的光刻掩膜需要单独订制。 [0004] The planar technology, rely on a photolithographic technique, the need for exposing the photosensitive material, increase the cost of the substrate, the applicability decreases, the optical diffraction limit, etc. is limited, the accuracy is influenced by the size of a variety of conditions, it is difficult to control error, the optical photolithographic masking and imaging apparatus using an optical cost is high, each of the photolithographic mask of different sizes need to order separately.

[0005] 模型工艺,需要预先制作模具,不能在基质表面直接成形,降低了精度。 [0005] The process model, previously prepared molds need not be formed directly on the substrate surface, reducing the precision. 此种成形方式,对于基质的刚度有很高的要求,因为如果刚度过高,很难通过压制来使模型的图案全部准确的反映在基质上,因此需要更高强度的模具,增加了制造成本,同时受制于基质的刚度,工艺适用广泛性降低。 Such shaped manner, for the stiffness of the substrate has a high requirement, because if the stiffness is too high, it is difficult to make by pressing the pattern models accurately reflected on the entire substrate, and therefore higher die strength is required, increasing manufacturing costs while subject to the stiffness matrix, suitable for extensive reduction process. 由于制作微结构模具的成本较高,此方法只适用于对技术已经成熟的微结构表面进行大批量的生产,不适于小批量、实验性的制备。 Due to the high cost of producing the microstructure of the mold, this method is only applicable to the technology has matured microstructured surface for mass production of small quantities of preparation, experimental unsuitable. 不同周期尺寸微结构表面需要单独制作模具,无法通过调整现有设备直接产生。 Different periodic microstructured surface dimensions need to make separate molds, can not be produced directly by adapting existing equipment.

发明内容 SUMMARY

[0006] 本发明的目的在于克服现有技术的缺点和不足,提供基于相干激光的表面微结构成形系统,本实用新型可以使基质表面指定部位材料发生熔化、对流、蒸发或其他物理化学过程,改变材料表面形状,进而形成所需要的周期性表面。 [0006] The object of the present invention is to overcome the disadvantages and deficiencies of the prior art, providing a shaped coherent laser light based on the surface microstructure of the system, the present invention can make the specified portion of the surface of the matrix material melting occurs, convection, evaporation, or other physical and chemical processes, change the surface shape of the material, thereby forming a periodic surface desired.

[0007] 本发明通过以下技术方案来实现: [0007] The present invention is achieved by the following technical solution:

[0008] 一种基于相干激光的表面微结构成形系统,包括依次光路设置的激光发生器、光束整形模块、第一半反射镜、第二全反射镜,在第一半反射镜和第二全反射镜的下面设置有电控移动工作台,电控移动工作台用于放置基质,所述第一半反射镜和第二全反射镜设置有伺服电机,所述电控移动工作台、伺服电机和激光发生器与计算机连接。 [0008] Based on microstructured surface forming a coherent laser system comprising a laser generator disposed in an optical path in sequence, beam shaping module, a first half mirror, a second total reflection mirror, the half mirror in the first and the second full a mirror disposed below the movable table electronically controlled, electrically controlled movement of the stage for placing the substrate, the first half-mirror and a second total reflection mirror is provided with a servo motor, the electrically controlled movement of the stage, the servo motor and the laser generator is connected to the computer. 所述光束整形模块3采用非球面透镜组整形系统或者微透镜阵列整形系统。 The beam shaping module 3 aspheric lens group shaping system or the microlens array shaping system.

[0009] 所述激光发生器包括依次连接的扩束镜、部分反射镜、调Q开关、聚光腔、全反射镜。 [0009] The generator comprises a laser beam expander are sequentially connected, a partially reflective mirror, Q-switched, condenser chamber, a total reflection mirror. 所述伺服电机为数字控制伺服电机。 Said servo motor is a digitally controlled servo motor.

[0010] 本发明可以一步直接加工出所需的周期性表面,而且在加工过程中不使用化学药剂进行腐蚀,满足现在要求越来越严格的环保标准。 [0010] The present invention can be directly processed further periodic surface required and is not used in the chemical etching process, it is now required to meet increasingly stringent environmental standards. 可以通过计算机控制,通过控制伺服电机使反射激光的角度改变,调整基质表面纹理的尺寸。 It can be controlled by a computer, by controlling the servo motor to change the angle of the reflected laser light, the matrix sized surface texture. 相对于模型工艺,此方法改变周期性结构尺寸时不需要重新制造模具,适合小批量生产特殊要求的表面。 With respect to the process model, the method of manufacturing a mold does not need to re-size the periodic structure is changed, for the special requirements of small batch surface. 而且因为是利用光能量场来制备,是面加工,相对于探针工艺具有生产速率高,能量消耗小。 And because it is prepared using light energy field, a processing surface, relative to the probe process having high production rate, energy consumption is small. 可以一步直接加工出所需的周期性表面,减少了步骤和仪器,降低了废品率和工时成本。 It can be directly processed further periodic surface required, reducing the steps and equipment, reducing labor cost and rejection rate.

[0011] 本发明技术手段简便易行,具有积极的有益效果,便于推广应用。 Technology [0011] The present invention is easy to use with a positive benefit, easy application.

附图说明 BRIEF DESCRIPTION

[0012] 图1为本发明基于相干激光的表面微结构成形系统的结构示意图。 [0012] FIG. 1 configuration diagram of a system forming a coherent laser-based surface microstructure of the present invention.

[0013] 图2为图1激光发生器的结构示意图。 [0013] FIG. 2 is a schematic view of a laser generator of FIG.

[0014] 图3为图1第一半反射镜、第二全反射镜与基质之间的夹角关系。 [0014] FIG. 3 is a first half mirror FIG. 1, the relationship between the angle of the total reflection mirror and the second substrate.

[0015] 图4为已成型的基质表面周期尺寸与激光波长及夹角之间的关系。 [0015] FIG 4 the relationship between the substrate surface and the laser wavelength and period of the size of the angle is already formed.

[0016] 上图中:计算机1 ;激光发生器2 ;光束整形模块3 ;第一半反射镜4 ;第二全反射镜5 ;伺服电机6 ;伺服电机7 ;基质8 ;电控移动工作台9 ;扩束镜10 ;部分反射镜11 ;调Q开关12 ;聚光腔13 ;全反射镜14。 [0016] The above figure: a computer; 2 laser generator; beam shaping module 3; 4 a first half mirror; a second total reflection mirror 5; 6 servomotor; servo motor 7; 8 matrix; electrically controlled movement of the stage 9; beam expander 10; partially reflecting mirror 11; Q-switch 12; condensing chamber 13; the total reflection mirror 14.

具体实施方式 Detailed ways

[0017] 下面对本发明的具体实施方式做进一步详细的说明,但本发明的实施方式不限于此。 [0017] The following further detailed description of the specific embodiments of the present invention, but the embodiments of the present invention is not limited thereto.

[0018] 实施例 [0018] Example

[0019] 如图1所述,本发明基于相干激光的表面微结构成形系统,包括依次光路设置的激光发生器2、光束整形模块3、第一半反射镜4、第二全反射镜5,在第一半反射镜4和第二全反射镜5的下面设置有电控移动工作台9,电控移动工作台9用于放置基质8,所述第一半反射镜4和第二全反射镜5设置有伺服电机6、7,所述电控移动工作台9、伺服电机6、7 和激光发生器2与计算机1连接。 [0019] FIG. 1, the system of the present invention is based on forming surface microstructure of the coherent laser, comprising a laser generator 2 are sequentially disposed the optical path, beam shaping module 3, a first half mirror 4, the second total reflection mirror 5, in the following a first half mirror 4 and the second total reflection mirror 5 is provided with an electrically controlled movement of the stage 9, the electronic control moving table 9 for placing the substrate 8, the first half and the second total reflection mirror 4 mirror 5 is provided with a servomotor 6 and 7, the electrically controlled movement of the stage 9, the servo motor 7 and a laser generator 2 is connected to the computer. 所述伺服电机6、7为数字控制伺服电机。 Said servo motor is a digitally controlled servo motors 6,7.

[0020] 如图2所示,所述激光发生器2包括依次连接的扩束镜10、部分反射镜11、调Q开关12、聚光腔13、全反射镜14。 [0020] As shown in FIG. 2, the laser generator 2 includes a beam expander 10 are connected in turn, partially reflective mirror 11, Q-switch 12, the condensing chamber 13, the total reflection mirror 14.

[0021] 如图1、图2所示。 [0021] FIG 1 and FIG 2. 激光发生器2、伺服电机6、7以及电控移动工作平台9由计算机1控制,激光发生器2采用200W半导体泵YAG激光器,或者采用50-100W光纤激光器。 Laser generator 2, and an electrically controlled servo motors 6,7 mobile work platform controlled by the computer 91, a semiconductor laser generator 2 using the pump 200W YAG laser, a fiber laser or with 50-100W. 光纤激光器发出的波长与YAG激光相近,但光束质量要优于半导体泵浦YAG激光。 YAG laser with a wavelength emitted from the fiber laser is similar to, but better than the quality of beam diode-pumped YAG laser. 激光发生器2谐振腔内置入调Q装置12,并在部分反射镜11前面由扩束镜10进行扩束。 A laser generator 2 into Q-resonator apparatus 12, a beam expander and a beam expander 10 in front of the mirror part 11.

[0022] 激光发生器2发射的激光束透射通过光束整形模块3,由高斯光束转化成平顶光束,在需要的情况下也可以把圆形光斑转化成矩形光斑。 [0022] Laser beams emitted laser generator 2 is transmitted through the beam shaping module 3, the conversion of a Gaussian beam into a flattened beam, in case of need may be converted to the circular spot rectangular beam. 光束整形模块3可采用非球面透镜组整形系统或者微透镜阵列整形系统等。 The beam shaping module 3 may employ aspheric lenses, or microlens arrays shaping system shaping system.

[0023] 激光束由第一半反射镜4和第二全反射镜5分光,第一半反射镜4及第二全反射镜5分别连接在伺服电机6、7的转动轴上,计算机1控制伺服电机6、7转动的角度从而控制第一半反射镜4与第二全反射镜5与水平面的夹角。 [0023] The first laser beam by the half mirror 4 and the total reflection mirror 5 second beam splitter, a first half mirror 4 and the second total reflection mirror 5 are respectively connected to the servo motor rotating shaft 6, 7, the control computer 1 6,7 angle of rotation of the servo motor to control the angle of the first half mirror 4 and the total reflection mirror 5 and the second horizontal plane. 电控移动工作台9通过计算机1控制,可以上下移动并能实现微调。 Electronically controlled moving table 9 by the control computer 1, and can be moved up and down to achieve fine tuning.

[0024] 如图4所示,相干激光波长与表面周期尺寸的关系为P ^7^' θ为两相干激光 [0024], and the surface of the coherent laser wavelength period size relationship shown in FIG. 4 is a P ^ 7 ^ 'θ of two coherent laser

束的夹角,λ为激光波长,ρ为所得的基质8周期尺寸。 Beam angle, λ is the laser wavelength, ρ is the resulting matrix size 8 cycles. 由公式可知要得到不同周期尺寸的微结构表面,需要调整两束激光的夹角θ,如图3所示,第二全反射镜5与水平面的夹角为%,第一半反射镜4与水平面得夹角为%,基质8被加工表面与入射激光束所在平面的距离为h,第二全反射镜5、第一半反射镜4的与光束交点的距离为1。 It found by the equation to get the microstructured surfaces of different sizes of cycles necessary to adjust the angle θ of the laser beam in two, as shown in FIG. 3, the angle between the horizontal plane and the second total reflection mirror 5 is%, and the first half mirror 4 % horizontal angle is obtained, the substrate 8 is machined surfaces and the distance from the plane where the incident laser beam is h, a second total reflection mirror 5, a first light beam from the half mirror 4 is an intersection. 由几何关系可知θ = It is seen from the geometrical relationship θ =

2ar2a2, a: = τ — : arctai: —,a: = -arctar:―,因此可以通过调节控制伺服电机7、6来 2ar2a2, a: = τ -: arctai: -, a: = -arctar: ​​-, can therefore be adjusted by controlling the servomotor 7,6

改变角%、%,从而获得目标周期尺寸所对应的两束反射激光的夹角θ,达到目标尺寸周期P的指定角度。 Change the angular%,%, to obtain a target period corresponding to the size of the angle between the two beams of laser light reflection θ, the angle of the specified period P of the target size. 并且需要通过上下调整电控移动工作平台9改变h,使基质8被加工表面处于两束激光相交处。 H and needs to be changed by adjusting the vertical movement of the work platform 9 electrically controlled, so that the surface of the substrate 8 is machined in two laser beams at the intersection.

[0025] 对于大型待加工件,待加工表面积大于相干光束光斑重合面积,则通过计算机1 控制电控移动工作台9定时在水平方向进行进给运动。 [0025] For large piece to be machined, to be processed surface area greater than the area of ​​the coherent beam spots coincide, then the computer 1 controls the moving table 9 Electronically Controlled timing of the feed movement in the horizontal direction. 进给运动时间间隔由被加工表面的材料性质和加工要求决定。 Feed movement time interval from a material properties and processing requirements determined surface to be machined. 矩形光斑相比圆形光斑更适于进给运动进给量控制。 Compared rectangular beam spot is more circular feed movement is adapted to control the feed rate.

[0026] 如上所述便可较好地实现本发明。 The present invention can preferably be implemented [0026] described above.

[0027] 上述实施例为本发明较佳的实施方式,但本发明的实施方式并不受上述实施例的限制,其他的任何未背离本发明的精神实质与原理下所作的改变、修饰、替代、组合、简化, 均应为等效的置换方式,都包含在本发明的保护范围之内。 [0027] The preferred embodiment of the present invention embodiment, but the embodiment of the present invention is not limited to the above embodiments, changes made to any other without departing from the spirit and principle of the present invention, modifications, substitutions , combined, simplified, should be equivalent replacement method, it is included within the scope of the present invention.

Claims (4)

1. 一种基于相干激光的表面微结构成形系统,其特征在于,包括依次光路设置的激光发生器、光束整形模块、第一半反射镜、第二全反射镜,在第一半反射镜和第二全反射镜的下面设置有电控移动工作台,电控移动工作台用于放置基质,所述第一半反射镜和第二全反射镜设置有伺服电机,所述电控移动工作台、伺服电机和激光发生器与计算机连接。 1. A surface microstructure forming system based on coherent laser light, wherein the optical path comprises successively disposed a laser generator, the beam shaping module, a first half mirror, a second total reflection mirror, the half mirror and the first a second total reflection mirror provided below the movable table electronically controlled, electronically controlled moving table for placing the substrate, the first half-mirror and a second total reflection mirror is provided with a servo motor, the electrically controlled movable table , servo motors and laser generator connected to the computer.
2.根据权利要求1所述的基于相干激光的表面微结构成形系统,其特征在于,所述激光发生器包括依次连接的扩束镜、部分反射镜、调Q开关、聚光腔、全反射镜。 2. The microstructured surface according to claim coherent laser forming system based on claim 1 wherein the laser generator comprises a beam expander are sequentially connected, a partially reflective mirror, Q-switched, condenser chamber, totally mirror.
3.根据权利要求2所述的基于相干激光的表面微结构成形系统,其特征在于,所述伺服电机为数字控制伺服电机。 3. The surface microstructure based on coherent laser forming system according to claim 2, wherein said servo motor is a digitally controlled servo motor.
4.根据权利要求3所述的基于相干激光的表面微结构成形系统,其特征在于,所述光束整形模块采用非球面透镜组整形系统或者微透镜阵列整形系统。 4. The surface microstructure forming system based on coherent laser light, wherein according to claim 3, the beam shaping module aspheric lens group shaping system or the microlens array shaping system.
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CN104007091A (en) * 2013-02-26 2014-08-27 中国科学院天津工业生物技术研究所 High-throughput detection system for microbe based on droplet microfluidic chip
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CN104439699A (en) * 2014-10-27 2015-03-25 中国科学院理化技术研究所 System and method for preparing micro-nano array structure by means of laser light
CN105665935A (en) * 2015-12-29 2016-06-15 四川大学 Microprobe tip forming system based on CO2 laser bilateral heating mode

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